Ultrahigh vacuum metal blade gear ring sealing flange and manufacturing method thereof

Abstract

The invention discloses an ultrahigh vacuum metal blade gear ring sealing flange and a manufacturing method thereof, the sealing flange is made of an aluminum material, a blade gear ring is arranged on a butt joint surface of the sealing flange, a hard metal ring which is axially embedded in a sealing manner is arranged on the butt joint surface of the sealing flange, the hardness of the hard metal ring is greater than that of a copper gasket, and the hardness of the hard metal ring is greater than that of the copper gasket. The blade gear ring is formed by machining the outer end face of the hard metal ring, and during application, the blade gear ring is forcefully pressed into the copper gasket, so that sealing between the sealing flange and the copper gasket is achieved. The sealing structure has the advantages that a tooth groove corresponding to the blade gear ring does not need to be preset on the copper gasket, but the plane of the copper gasket is forcefully pressed and the pressure is kept, so that the sealing failure caused by untight matching due to manufacturing errors when the tooth groove is matched with the blade gear ring in the traditional measure is avoided; the manufacturing mode is simple and reliable, and the problem that stainless steel and aluminum materials cannot be directly welded in a fusion mode is solved.

Description

Technical Field

[0001] The invention relates to an ultra-high vacuum metal blade gear ring sealing flange and a manufacturing method thereof, belonging to the technical field of vacuum sealing. Background Art

[0002] Generally, the sealing between two cavities is to make the ends of the two cavities into connecting flanges, and use a rubber sealing ring between the two connecting ends. Since ultra-high vacuum has extremely high requirements for the surface release of materials, volatile substances are not allowed to be emitted from the surface of the material to the cavity to affect the vacuum degree in the cavity. Rubber rings made of rubber materials do not meet the requirements due to their high surface release. Therefore, the existing technology chooses to use a copper gasket with lower hardness between the two, and respectively sets corresponding annular blade teeth and annular grooves on the butt surfaces of the copper gasket and the aluminum flange, so that the blade teeth are embedded in the annular groove in a tight fit to implement compression sealing.

[0003] The drawback of the above sealing method is that it requires extremely high processing accuracy and assembly method of the cutting teeth and the annular groove, and any slight deviation will lead to sealing failure. Summary of the invention

[0004] The technical problem to be solved by the present invention is: how to achieve reliable sealing between the aluminum flange and the copper gasket.

[0005] In view of the above problems, the technical solution proposed by the present invention is: An ultra-high vacuum metal blade gear ring sealing flange is made of aluminum material, and its butt joint surface is provided with a blade gear ring. A hard metal ring with axial sealing is embedded in the butt joint surface of the sealing flange. The hardness of the hard metal ring is greater than the hardness of the copper gasket. The blade gear ring is formed by processing on the outer end surface of the hard metal ring. When used, the blade gear ring is strongly pressed into the copper gasket to achieve sealing between the sealing flange and the copper gasket.

[0006] The hard metal ring is a stainless steel ring.

[0007] A method for manufacturing a sealing flange as described above, comprising: manufacturing an annular embedding groove on the butt joint surface of the sealing flange, placing a stainless steel ring in the embedding groove and rotating it at high speed under axial pressure, so that the inner end of the stainless steel ring rubs against the bottom of the groove to generate high temperature to form a molten body, and the molten body fills the gap between the stainless steel ring and the embedding groove to achieve sealing and combine the stainless steel ring in the embedding groove, and then cutting the outer end surface of the stainless steel ring to form a toothed ring on the outer end surface of the stainless steel ring.

[0008] The method of placing the stainless steel ring in the embedding groove and rotating it at high speed under axial pressure is as follows: in the method of combining the stainless steel ring in the embedding groove, a stainless steel pipe is first made and clamped on a rotating seat, a sealing flange and the stainless steel pipe are coaxially clamped on a fixed seat opposite to the rotating seat, one end of the stainless steel pipe is inserted into the embedding groove of the sealing flange, and the stainless steel pipe is rotated at high speed by the rotating mechanism of the rotating seat. After the stainless steel pipe is combined with the embedding groove, the stainless steel pipe is cut off at a position close to the sealing flange to form a stainless steel ring with an inner end sealed and embedded in the embedding groove.

[0009] Furthermore, by utilizing the fact that the melting point of aluminum is higher than that of the stainless steel ring, the inner end of the stainless steel ring is rubbed against the bottom of the groove to generate a high-temperature molten body, which is an aluminum molten body formed by melting the aluminum at the bottom of the groove; and gaps are formed between the inner wall and the outer wall of the stainless steel tube inserted into the groove and the inner and outer walls of the groove respectively, so that the aluminum molten body can flow.

[0010] Furthermore, a plurality of annular grooves are opened on the outer circumference of the stainless steel tube, so that each stainless steel ring has an annular groove on its outer circumference, so that the molten aluminum flows from the inside to the outside along the gap between the outer wall of the stainless steel tube and the outer side wall of the embedded groove and fills the annular groove. After cooling, an annular ridge that is in close contact with the annular groove and integrated with the sealing flange is formed and can axially limit the movement of the stainless steel ring.

[0011] Furthermore, the groove wall of the annular groove is configured to be in an arc shape.

[0012] Furthermore, at least two axial grooves are provided on the outer circumference of the stainless steel tube, so that each stainless steel ring has at least two axial grooves on the outer circumference, so that the molten aluminum flows out from the inside to the outside along the gap between the outer wall of the stainless steel tube and the outer wall of the embedded groove, and at the same time flows into and fills the axial grooves, and after cooling, an axial ridge that is in close contact with the axial groove and integrated with the sealing flange is formed, which can circumferentially limit the rotation of the stainless steel ring.

[0013] Furthermore, an annular cutting groove is provided between two adjacent annular grooves provided on the outer circumference of the stainless steel pipe.

[0014] Furthermore, a formulated alloy sheet that can be melt-welded with the aluminum material of the groove bottom and the stainless steel ring is arranged between the stainless steel ring and the bottom of the groove of the sealing flange, so that the molten body formed by the high temperature generated by the high-speed rotation of the stainless steel ring is a mixed molten body of stainless steel, aluminum material and the formulated alloy sheet. After cooling, the stainless steel ring is welded to the sealing flange through the formulated alloy sheet. Beneficial Effects

[0015] 1. Instead of pre-setting the tooth grooves corresponding to the blade gear ring on the copper gasket, use strong pressure on the plane of the copper gasket and maintain this pressure to avoid the sealing failure caused by the manufacturing error when the tooth grooves and the blade gear ring are matched in the traditional way; 2. The production method is simple and reliable, which solves the problem that stainless steel and aluminum cannot be directly welded. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional view of the sealing flange described in Example 1; Figure 2 It is a cross-sectional schematic diagram of the stainless steel ring with a bladed ring according to the first embodiment; Figure 3 It is a three-dimensional schematic diagram of the sealing flange described in the second embodiment; Figure 4 It is a three-dimensional schematic diagram of the stainless steel tube described in Example 2; Figure 5 It is a three-dimensional schematic diagram of the sealing flange fixed on the fixed seat and the stainless steel pipe clamped on the rotating seat according to the second embodiment, and the stainless steel pipe is shown to be inserted into the embedding groove of the sealing flange; Figure 6 It is a cross-sectional schematic diagram of the stainless steel pipe in the second embodiment to be inserted into the embedding groove of the sealing flange; Figure 7 It is a cross-sectional schematic diagram of the stainless steel pipe of the second embodiment inserted into the embedding groove of the sealing flange; Figure 8 It is a partial cross-sectional schematic diagram of the stainless steel pipe inserted into the embedding groove of the sealing flange according to the second embodiment, and the figure shows that the stainless steel pipe rotates at a high speed, and the stainless steel pipe rubs against the bottom of the embedding groove, so that the bottom of the embedding groove rubs to form aluminum melt; Fig. 9 for Figure 8 The schematic diagram of the aluminum melt having intermittently flowed into the annular groove and part of the axial groove is shown; Fig.10 for Fig. 9 The schematic diagram of the aluminum melt having flowed out of the groove; Fig.11 for Fig.10 The aluminum melt shown is cooled to form an annular ridge and an axial ridge that are integral with the sealing flange. The stainless steel pipe has been cut off near the notch of the embedding groove, and the cut-out part embedded in the embedding groove is a cross-sectional schematic diagram of the stainless steel ring blank; Fig.12 A partial cross-sectional schematic diagram of the sealing flange butt surface of the cutting edge gear ring being turned on a stainless steel ring blank according to the method provided in the second embodiment; Fig.13 It is a partial cross-sectional schematic diagram of the stainless steel pipe in the sealing flange groove before welding according to the third embodiment; Fig.14 This is a cross-sectional schematic diagram of the stainless steel ring described in Example 3 after it is welded in the sealing flange groove and cut off from the stainless steel pipe, and then turned into a blade gear ring.

[0017] In the figure: 1, sealing flange; 101, embedded groove; 2, stainless steel ring; 201, annular groove; 202, axial groove; 203, blade gear ring; 200, stainless steel pipe; 210, cutting groove; 3, aluminum melt; 301, annular ridge; 302, axial ridge; 4, gap; 5, formula alloy sheet; 6, mixed melt; 7, rotating seat; 701, motor; 702, rotating chuck; 8, fixed seat. DETAILED DESCRIPTION

[0018] The present invention will be further described below in conjunction with embodiments and drawings: Embodiment 1

[0019] like Figure 1 As shown, an ultra-high vacuum metal blade gear ring sealing flange is made of aluminum material, and its butt surface is provided with a blade gear ring 203. A hard metal ring with axial sealing is embedded in the butt surface of the sealing flange 1. The hardness of the hard metal ring is greater than that of the copper gasket. The blade gear ring 203 is formed by processing on the outer end surface of the hard metal ring. When used, the blade gear ring 203 is strongly pressed into the copper gasket to achieve the seal between the sealing flange 1 and the copper gasket. In this way, there is no need to preset the tooth groove corresponding to the blade gear ring 203 on the copper gasket, but to use strong pressure on the plane of the copper gasket and maintain this pressure, so as to avoid the failure of the seal due to the manufacturing tolerance when the tooth groove and the blade gear ring 203 are matched.

[0020] like Figure 2 Preferably, the hard metal ring is a stainless steel ring 2. Embodiment 2

[0021] like Figure 3 As shown in FIG. 12 , a method for manufacturing a sealing flange as described in Example 1 is to manufacture an annular groove 101 on the mating surface of the sealing flange 1, place a stainless steel ring 2 in the groove 101 and rotate it at high speed under axial pressure, so that the inner end of the stainless steel ring rubs against the bottom of the groove 101 to generate high temperature to form a molten body, and the gap between the stainless steel ring 2 and the groove 101 is filled with the molten body to achieve sealing and combine the stainless steel ring in the groove 101, thereby solving the problem that stainless steel and aluminum materials cannot be directly welded and sealed, and then the outer end face of the stainless steel ring 2 is cut to form a toothed ring 203 on the outer end face of the stainless steel ring 2.

[0022] The above-mentioned method of placing the stainless steel ring 2 in the embedding groove 101 and rotating it at high speed under axial pressure is that in the method of combining the stainless steel ring in the embedding groove 101, a stainless steel tube 200 is first made and clamped on a rotating seat 7, the sealing flange 1 and the stainless steel tube 200 are coaxially clamped on a fixed seat 8 opposite to the rotating seat 7, one end of the stainless steel tube 200 is inserted into the embedding groove 101 of the sealing flange 1, and the stainless steel tube 200 is rotated at high speed by the rotating mechanism of the rotating seat 7. After the stainless steel tube 200 is combined with the embedding groove 101, the stainless steel tube 200 is cut off at a position close to the sealing flange 1, thereby forming a stainless steel ring 2 with an inner end sealed and embedded in the embedding groove 101.

[0023] A rotating chuck 702 driven by a motor 701 is provided on the rotating seat 7 .

[0024] The above manufacturing method utilizes the melting point of aluminum to be higher than that of the stainless steel ring 2, so that the inner end of the stainless steel ring 2 and the groove bottom of the embedding groove 101 generate a high temperature molten body formed by friction, which is the aluminum melt 3 formed by melting the aluminum at the bottom of the embedding groove 101, without melting the stainless steel. The inner wall and outer wall of the stainless steel tube 200 inserted into the embedding groove 101 are respectively formed with the inner wall and outer wall of the embedding groove 101 to form a gap 4 through which the aluminum melt 3 can flow. In this way, the aluminum melt 3 can flow out from the gap 4, so that the gap can be filled without leaving any gap.

[0025] Furthermore, a plurality of annular grooves 201 are formed on the outer circumference of the stainless steel tube 200, so that each stainless steel ring 2 has an annular groove 201 on the outer circumference, so that the aluminum melt 3 flows from the inside to the outside along the gap 4 between the outer wall of the stainless steel tube 200 and the outer wall of the embedded groove 101 and fills the annular groove 201, and after cooling, an annular ridge 301 that is in close contact with the annular groove 201 and is integrated with the sealing flange 1 and can axially limit the movement of the stainless steel ring 2 is formed. In this way, the embedded stainless steel ring 2 will not fall out of the embedded groove 101.

[0026] The groove wall of the annular groove 201 is set to be an arc surface, so that the aluminum melt 3 will not leave a dead corner when flowing out through the annular groove 201. If the annular groove 201 is designed so that the bottom surface and the side wall intersect at an angle, bubbles may be left at the angle.

[0027] At least two axial grooves 202 are provided on the outer circumference of the stainless steel tube 200, so that each stainless steel ring 2 has at least two axial grooves 202 on its outer circumference, so that the aluminum melt 3 flows out from the inside to the outside along the gap 4 between the outer wall of the stainless steel tube 200 and the outer wall of the embedded groove 101, and at the same time flows into and fills the axial groove 202, and after cooling, an axial convex ridge 302 which is in close contact with the axial groove 202 and is integrated with the sealing flange 1 and can circumferentially limit the rotation of the stainless steel ring 2 is formed, so that the stainless steel ring 2 will not rotate in the embedded groove 101, especially when the turning of the toothed ring 203 causes the stainless steel ring 2 to be subjected to axial force.

[0028] Figure 8 It shows that the stainless steel tube 200 rotates at a high speed, and the stainless steel tube 200 rubs against the bottom of the embedding groove 101, so that the bottom of the embedding groove 101 rubs to form an aluminum melt 3; Fig. 9 It shows that the aluminum melt 3 has flowed into the annular groove 201 and part of the axial groove 202 through the gap 4; Fig.10 It shows that the aluminum melt 3 has flowed out of the notch through the gap 4; Fig.11 It is shown that the aluminum melt 3 is cooled to form an annular ridge 301 and an axial ridge 302 which are integrated with the sealing flange, and the stainless steel pipe 200 has been cut off from the notch near the embedding groove 101, and the cut part embedded in the embedding groove 101 is the blank of the stainless steel ring 2; Furthermore, an annular cutting groove 210 is provided between two adjacent annular grooves 201 provided on the outer circumference of the stainless steel tube 200 , so that when the stainless steel tube is cut, the axial lengths of the cut stainless steel rings 2 are completely equal. Embodiment 3

[0029] Fig.13 , 14 The difference between the embodiment 2 and the embodiment 2 is that: a formula alloy sheet 5 capable of being welded to the aluminum material at the bottom of the groove 101 and the stainless steel ring 2 is arranged between the stainless steel ring 2 and the bottom of the groove 101 of the sealing flange 1, so that the high-temperature molten body formed by the high-speed rotation of the stainless steel ring 2 is a mixed molten body 6 of stainless steel, aluminum and the formula alloy sheet 5, and after cooling, the stainless steel ring 2 is welded to the sealing flange 1 through the formula alloy sheet 5.

[0030] The above embodiments are only used to more clearly describe the present invention and cannot be regarded as limiting the protection scope of the present invention. Any modifications in equivalent forms should be regarded as falling within the protection scope of the present invention.

Claims

1. An ultra-high vacuum metal blade gear ring sealing flange, made of aluminum material, with a blade gear ring (203) provided on its butt joint surface, characterized in that: A hard metal ring is embedded in the butt joint of the sealing flange (1) for axial sealing. The hardness of the hard metal ring is greater than that of the copper gasket. The blade tooth ring (203) is formed by machining the outer end surface of the hard metal ring. When in use, the blade tooth ring (203) is strongly pressed into the copper gasket to achieve sealing between the sealing flange (1) and the copper gasket.

2. The ultra-high vacuum metal blade gear ring sealing flange according to claim 1, characterized in that: The hard metal ring is a stainless steel ring (2).

3. A method for manufacturing a sealing flange according to claim 2, characterized in that: An annular embedding groove (101) is made on the butt joint surface of the sealing flange (1), and a stainless steel ring (2) is placed in the embedding groove (101) and rotated at high speed under axial pressure, so that the inner end of the stainless steel ring and the groove bottom of the embedding groove (101) rub against each other to generate high temperature to form a molten body, and the molten body fills the gap between the stainless steel ring (2) and the embedding groove (101) to achieve sealing and combine the stainless steel ring in the embedding groove (101), and then the outer end surface of the stainless steel ring (2) is cut to form a toothed ring (203) on the outer end surface of the stainless steel ring (2).

4. The method according to claim 3, characterized in that: The method of placing the stainless steel ring (2) in the embedding groove (101) and rotating it at high speed under axial pressure is as follows: in the method of combining the stainless steel ring in the embedding groove (101), firstly, a stainless steel tube (200) is manufactured and clamped on a rotating seat (7); the sealing flange (1) and the stainless steel tube (200) are coaxially clamped on a fixed seat (8) opposite to the rotating seat (7); one end of the stainless steel tube (200) is inserted into the embedding groove (101) of the sealing flange (1); the stainless steel tube (200) is rotated at high speed by the rotating mechanism of the rotating seat (7); after the stainless steel tube (200) is combined with the embedding groove (101), the stainless steel tube (200) is cut off at a position close to the sealing flange (1) to form a stainless steel ring (2) with an inner end sealed and embedded in the embedding groove (101).

5. The method according to claim 4, characterized in that: By taking advantage of the fact that the melting point of aluminum is higher than that of the stainless steel ring (2), the inner end of the stainless steel ring rubs against the bottom of the groove (101) to generate a high-temperature molten body, which is an aluminum molten body (3) formed by melting the aluminum at the bottom of the groove (101); and a gap (4) capable of allowing the aluminum molten body (3) to flow is formed between the inner wall and the outer wall of the stainless steel tube (200) inserted into the groove (101) and the inner side wall and the outer side wall of the groove (101), respectively.

6. The method according to claim 5, characterized in that: A plurality of annular grooves (201) are provided on the outer circumference of the stainless steel tube (200), so that each stainless steel ring (2) has an annular groove (201) on its outer circumference, so that the aluminum melt (3) flows from the inside to the outside along the gap (4) between the outer wall of the stainless steel tube (200) and the outer wall of the embedded groove (101) and fills the annular groove (201), and after cooling, an annular ridge (301) is formed which is in close contact with the annular groove (201) and is integrated with the sealing flange (1) and is capable of axially limiting the movement of the stainless steel ring (2).

7. The method according to claim 6, characterized in that: The groove wall of the annular groove (201) is configured to be in an arc shape.

8. The method according to claim 5, characterized in that: At least two axial grooves (202) are provided on the outer circumference of the stainless steel tube (200), so that each stainless steel ring (2) has at least two axial grooves (202) on its outer circumference, so that the aluminum melt (3) flows out from the inside to the outside along the gap (4) between the outer wall of the stainless steel tube (200) and the outer wall of the embedded groove (101), and at the same time flows into and fills the axial grooves (202), and after cooling, an axial ridge (302) is formed which is in close contact with the axial grooves (202) and is integrated with the sealing flange (1) and can circumferentially limit the rotation of the stainless steel ring (2).

9. The method according to claim 6, characterized in that: An annular cutting groove (210) is provided between two adjacent annular grooves (201) provided on the outer circumference of the stainless steel tube (200).

10. The method according to claim 4, characterized in that: A formulated alloy sheet (5) capable of being welded to both the aluminum material at the bottom of the groove (101) and the stainless steel ring (2) is arranged between the stainless steel ring (2) and the bottom of the groove (101) of the sealing flange (1), so that the high temperature generated by the high-speed rotation of the stainless steel ring (2) forms a molten body (6) of stainless steel, aluminum and the formulated alloy sheet (5), and after cooling, the stainless steel ring (2) is welded to the sealing flange (1) through the formulated alloy sheet (5).

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