A pipeline pressure measuring sensor device
By designing multiple sets of alternately working sensing mechanisms and pressure differential mechanisms, combined with the use of transmission components, the problem of failure of a single sensor mechanism of existing pipeline pressure sensing equipment is solved, and the continuous and efficient monitoring is achieved.
Patent Information
- Application Number
- CN202510035727.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-09
- Publication Date
- 2025-04-01
- Estimated Expiration
- 2045-01-09
AI Technical Summary
The existing pipeline pressure sensing equipment only has a set of sensing mechanisms. If there is a problem with the sensing structure itself, the equipment will fail and cannot be monitored, resulting in the equipment being unable to work efficiently.
A pipeline pressure measurement sensing device is designed, including multiple groups of sensing mechanisms and pressure differential mechanisms. The sensing mechanisms work alternately to ensure that a group of sensing mechanisms are in a working state at any time, and the transmission assembly is driven to rotate the rotary assembly by using fluid impact to achieve uninterrupted operation of the sensing mechanism.
The monitoring continuity and efficiency are achieved, the equipment failure caused by the failure of a single sensor mechanism is avoided, and the data authenticity and overall operation efficiency of the equipment are ensured.
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Figure CN119469525B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of pressure sensing, in particular to a pipeline pressure measuring sensing device. Background Art
[0002] Pipeline pressure sensing equipment is the most commonly used sensing equipment in industrial practice. It is widely used in various industrial automatic control environments to measure the pressure of the fluid in the pipeline and feed back the data to the control terminal in real time, so that operators can adjust the operation of the equipment.
[0003] Existing pipeline pressure sensing devices are mostly in electronic form. For example, the utility model patent with announcement number CN217930646U discloses a pipeline pressure sensing device, and the utility model patent with announcement number CN214224418U discloses a wind pressure sensing device that can adjust the pipeline airflow pressure. Both of the above schemes adopt the contact between the fluid and the sensing structure, and the sensing structure outputs the conversion signal through the corresponding change. During the working process, only one set of sensing sensor mechanisms is set. When the sensing sensor structure itself has problems, the equipment will fail. During maintenance, monitoring cannot be performed, making the equipment unable to work efficiently. Summary of the invention
[0004] The purpose of the present invention is to provide a pipeline pressure measurement sensor device to solve the problem proposed in the above background technology that only one set of sensing sensor mechanisms is set. When problems occur in the sensing sensor structure itself, the equipment will fail. During maintenance, monitoring cannot be performed, making the equipment unable to work efficiently.
[0005] To achieve the above object, the present invention provides the following technical solutions:
[0006] A pipeline pressure measurement sensor device comprises: a housing, multiple sensor groups and a pressure difference mechanism, wherein the multiple sensor groups are arranged on both sides of the pressure difference mechanism, and the pressure difference mechanism is arranged in the middle of the housing;
[0007] The pressure difference mechanism comprises a box body, two sets of rotary components and a transmission component, the two sets of rotary components are symmetrically arranged on both sides of the box body, the upper and lower sides of the box body are respectively provided with a first cavity and a second cavity, a flow guide pipe is vertically fixedly installed at the bottom of the box body, the top of the flow guide pipe is communicated with the second cavity, a valve joint is fixedly installed at the top of the box body, and the valve joint is communicated with the first cavity;
[0008] The rotary assembly comprises a ring body and a gear ring, wherein the ring body is horizontally rotatably sleeved in the middle of the box body, and the gear ring is fixedly sleeved on the outside of the ring body, and the two gear rings are meshed and connected;
[0009] The transmission assembly is arranged in the guide tube and is used to drive the two sets of rotating assemblies to rotate;
[0010] The multiple sensor mechanisms are divided into two groups, which are respectively arranged in two ring bodies, and the contact surfaces between the box body and the two ring bodies are fixedly installed with sealing strips;
[0011] A signal output device is fixedly installed on the top of the box body. The signal output device feeds back the data of the sensor mechanism to an external terminal device and is electrically connected to an external power supply.
[0012] As a preferred technical solution of the present invention, the sensing mechanism includes an upper sealing plate, a lower sealing plate and a sensing device. The ring body is provided with a plurality of air holes in a ring-shaped and uniform vertical manner. Multiple groups of sensing mechanisms are respectively arranged in the plurality of air holes. The sensing device is horizontally fixedly installed in the middle of the air hole and separates the upper and lower sides of the air hole. The upper sealing plate is horizontally fixedly installed on the upper side of the air hole, and the upper surface is flush with the upper side of the ring body. The lower sealing plate is fixedly installed on the bottom of the air hole, and the lower surface is flush with the bottom surface of the ring body. Both the upper sealing plate and the lower sealing plate are made of elastic material.
[0013] As a preferred technical solution of the present invention, the areas on both sides of the box body that are connected to the ring body are symmetrically fixed with pressure plates, and the sides of the pressure plates that are close to each other are in sliding contact with the upper and lower surfaces of the ring body, and the air holes and solid areas in the two ring bodies are alternately close.
[0014] As a preferred technical solution of the present invention, multiple groups of conductive plates are fixedly installed on the outside of the ring body, the number of conductive plates in each group of conductive plates is the same as the number of electrodes of the sensing device, and each conductive plate is electrically connected to an electrode respectively, and the signal output device is electrically connected to the multiple groups of conductive plates through conductive components.
[0015] As a preferred technical solution of the present invention, the conductive component includes two groups of springs, two groups of balls, multiple first wires and multiple second wires. A plurality of sliding cavities are horizontally and symmetrically opened in the middle of the box body. Each group of springs and balls corresponds to a conductive plate in each sensing mechanism respectively. The sliding cavities on the same side correspond to the corresponding conductive plates. The springs are horizontally arranged in the sliding cavities, and the inner ends are fixedly connected to the inner walls of the sliding cavities. The balls are movably embedded in the outer ends of the sliding cavities and are in rolling contact with the springs. Each pair of springs distributed on the left and right are electrically connected through a first wire. The upper and lower ends of each second wire are respectively electrically connected to the electrode end of the signal output device and the first wire. The conductive plate is in rolling contact with the outer side of the ball during rotation.
[0016] As a preferred technical solution of the present invention, the transmission assembly includes gears, multiple first brackets, multiple second brackets, a main shaft, two universal joints, a transmission shaft, a rotating shaft and an impeller. The rotating shaft is vertically rotatably installed in the guide tube through multiple second brackets, the impeller is fixedly sleeved on the bottom end of the rotating shaft, the main shaft is vertically rotatably installed on the outside of the box through multiple first brackets, the gear is fixedly sleeved on the top end of the main shaft and meshed with one of the gear rings, the transmission shaft is rotatably sleeved in the side wall of the guide tube, and both ends are fixedly connected to the bottom end of the main shaft and the top end of the rotating shaft through universal joints for torque transmission.
[0017] As a preferred technical solution of the present invention, sealing doors are rotatably installed on both sides of the shell through pin rods, the outer bottom of the sealing door is connected to the shell through a lock, and locking screws are symmetrically threaded on both sides of the box body.
[0018] Compared with the prior art, the present invention provides a pipeline pressure measurement sensor device, which has the following beneficial effects:
[0019] (1) During the monitoring process, the sensor mechanisms in the two rings are alternately involved. At any time, there is a group of sensor mechanisms in operation to ensure the continuity of monitoring. Multiple groups of sensor mechanisms work alternately to avoid a single setting and ensure the high efficiency of monitoring.
[0020] (2) Multiple groups of sensor mechanisms work alternately to form a control group, which is conducive to the authenticity of the feedback data and avoids inaccurate data caused by problems with the equipment itself;
[0021] (3) When a problem occurs in one of the sensor mechanisms, it can be rotated to a position close to the sealing door, and then the locking screw can be tightened to cut off the power supply for maintenance. At this time, the other sensor mechanism in normal condition can continue to work, so that maintenance can be carried out without affecting the overall monitoring work of the equipment, further ensuring the efficiency of the overall operation of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 A schematic diagram of the three-dimensional structure of a pipeline pressure measurement sensor device proposed by the present invention;
[0023] Figure 2 A schematic diagram of the internal three-dimensional structure of a pipeline pressure measurement sensor device proposed by the present invention;
[0024] Figure 3 This is a schematic diagram of a partial cross-sectional structure of a pipeline pressure measurement sensor device proposed by the present invention;
[0025] Figure 4 A schematic diagram of a partial cross-sectional structure of a pipeline pressure measurement sensor device proposed by the present invention;
[0026] Figure 5 for Figure 3 A magnified view of the structure in Figure 2.
[0027] In the figure: 1. outer shell; 2. box body; 3. first cavity; 4. second cavity; 5. guide tube; 6. valve joint; 7. ring body; 8. gear ring; 9. sealing strip; 10. signal output device; 11. upper sealing plate; 12. lower sealing plate; 13. sensing device; 14. air hole; 15. pressure plate; 16. conductive plate; 17. spring; 18. ball; 19. first wire; 20. second wire; 21. sliding cavity; 22. gear; 23. first bracket; 24. second bracket; 25. main shaft; 26. universal joint; 27. transmission shaft; 28. rotating shaft; 29. impeller; 30. pin rod; 31. sealing door; 32. lock buckle; 33. locking screw. DETAILED DESCRIPTION
[0028] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, what is described is only a part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0029] See also Figure 1-5 , a pipeline pressure measurement sensor device, comprising: a housing 1, a plurality of sensor mechanisms and a pressure difference mechanism, the plurality of sensor mechanisms are arranged on both sides of the pressure difference mechanism, and the pressure difference mechanism is arranged in the middle of the housing 1;
[0030] The pressure difference mechanism includes a box body 2, two sets of rotary components and a transmission component. The two sets of rotary components are symmetrically arranged on both sides of the box body 2. The upper and lower sides of the box body 2 are respectively provided with a first cavity 3 and a second cavity 4. A flow guide pipe 5 is vertically fixedly installed at the bottom of the box body 2. The top of the flow guide pipe 5 is connected to the second cavity 4. A valve joint 6 is fixedly installed on the top of the box body 2. The valve joint 6 is connected to the first cavity 3.
[0031] The bottom end of the flow guide tube 5 is provided with a connection end for sealingly connecting with the pipeline, and the valve joint 6 is in a normally closed state, for connecting with an external pressure measuring device to measure the pressure in the first cavity 3 to ensure that the back pressure value of the first cavity 3 is at a preset standard pressure value;
[0032] The rotary assembly includes a ring body 7 and a gear ring 8. The ring body 7 is horizontally rotatably sleeved in the middle of the box body 2, and the gear ring 8 is fixedly sleeved on the outside of the ring body 7. The two gear rings 8 are meshed and connected;
[0033] The transmission assembly is arranged in the guide tube 5, and is used to drive the two sets of rotating assemblies to rotate;
[0034] The multiple sensor mechanisms are divided into two groups, which are respectively arranged in two ring bodies 7. The contact surfaces between the box body 2 and the two ring bodies 7 are fixedly installed with sealing strips 9. The sealing strips 9 ensure the sealing of the first cavity 3 and the second cavity 4 while ensuring the rotation of the ring body 7;
[0035] A signal output device 10 is fixedly mounted on the top of the box 2. The signal output device 10 feeds back the data of the sensor mechanism to an external terminal device and is electrically connected to an external power supply.
[0036] The sensing mechanism includes an upper sealing plate 11, a lower sealing plate 12 and a sensing device 13. A plurality of air holes 14 are vertically and evenly opened in a ring body 7 in a circular shape. A plurality of sensing mechanisms are respectively arranged in the plurality of air holes 14. The sensing device 13 is horizontally fixedly installed in the middle of the air hole 14 and separates the upper and lower sides of the air hole 14. The upper sealing plate 11 is horizontally fixedly installed on the upper side of the air hole 14, and the upper surface is flush with the upper side of the ring body 7. The lower sealing plate 12 is fixedly installed at the bottom of the air hole 14, and the lower surface is flush with the bottom surface of the ring body 7. Both the upper sealing plate 11 and the lower sealing plate 12 are made of elastic material.
[0037] The sensing mechanism adopts the existing pressure sensing technology, that is, using the pressure difference between the first cavity 3 and the second cavity 4 to make the sensing device 13 produce elastic deformation, thereby producing a change in resistance value. The sensing device 13 is designed using the Wheatstone bridge principle, which belongs to the existing technology and will not be described in detail here.
[0038] The areas on both sides of the box body 2 that are connected to the ring body 7 are symmetrically fixed with pressure plates 15, and the sides of the pressure plates 15 that are close to each other are in sliding contact with the upper and lower surfaces of the ring body 7. The pressure plates 15 can ensure that the upper sealing plate 11 and the lower sealing plate 12 are in a smooth state and enter the box body 2. The total length of the air holes 14 is half of the length of the ring body 7. The length of the area between two adjacent air holes 14 is the same as the length of the air holes 14. The air holes 14 in the two ring bodies 7 are alternately close to the solid areas, that is, when one air hole 14 in one ring body 7 is in the box body 2, the area of the other ring body 7 located in the box body 2 is a solid area.
[0039] Multiple groups of conductive plates 16 are fixedly installed on the outside of the ring body 7. The number of conductive plates in each group of conductive plates 16 is the same as the number of electrodes of the sensing device 13, and each conductive plate 16 is electrically connected to an electrode respectively. The signal output device 10 is electrically connected to the multiple groups of conductive plates 16 through conductive components.
[0040] The conductive components include two groups of springs 17, two groups of balls 18, multiple first wires 19 and multiple second wires 20. A plurality of sliding cavities 21 are horizontally and symmetrically opened in the middle of the box body 2. Each group of springs 17 and balls 18 corresponds to a conductive plate 16 in each sensing mechanism. The sliding cavities 21 on the same side correspond to the corresponding conductive plates 16. The springs 17 are horizontally arranged in the sliding cavities 21, and the inner ends are fixedly connected to the inner walls of the sliding cavities 21. The balls 18 are movably embedded in the outer ends of the sliding cavities 21 and are in rolling contact with the springs 17. Each pair of springs 17 distributed on the left and right are electrically connected through a first wire 19. The upper and lower ends of each second wire 20 are electrically connected to the electrode end of the signal output device 10 and the first wire 19, respectively. The conductive plate 16 is in rolling contact with the outer side of the ball 18 during rotation.
[0041] During operation, the conductive plate 16 is connected to the sensing device 13, the ball 18 is in contact with the spring 17, the spring 17 is connected to the first wire 19, and the first wire 19 is electrically connected to the signal output device 10 through the second wire 20. When the ball 18 is in contact with the conductive plate 16, a circuit path connection is formed from the sensing device 13 to the signal output device 10, so that the sensing mechanism rotating to the box body 2 works. It should be noted that the setting of the sensing mechanism is that when the sensing mechanism in one ring body 7 moves out of the box body 2, a group of sensing mechanisms in the other ring body 7 is turned on, thereby realizing uninterrupted operation of the sensing mechanism, and multiple groups of sensing mechanisms in the two ring bodies 7 cooperate to realize alternating and uninterrupted operation.
[0042] The transmission assembly includes a gear 22, a plurality of first brackets 23, a plurality of second brackets 24, a main shaft 25, two universal joints 26, a transmission shaft 27, a rotating shaft 28 and an impeller 29. The rotating shaft 28 is vertically rotatably installed in the guide tube 5 through a plurality of second brackets 24. The impeller 29 is fixedly sleeved on the bottom end of the rotating shaft 28. The main shaft 25 is vertically rotatably installed on the outside of the housing 2 through a plurality of first brackets 23. The gear 22 is fixedly sleeved on the top end of the main shaft 25 and meshed with one of the gear rings 8. The transmission shaft 27 is rotatably sleeved in the side wall of the guide tube 5, and both ends are fixedly connected to the bottom end of the main shaft 25 and the top end of the rotating shaft 28 through universal joints 26 for torque transmission.
[0043] When using this device to perform pressure sensing detection on the fluid in the pipeline, first, the entire device is fixedly and sealedly connected to the pipeline through the port at the bottom end of the guide tube 5, so that the second cavity 4 is connected to the inside of the pipeline, and the impeller 29 is located inside the pipeline. After installation, the device is powered on and operated.
[0044] During the detection process, the fluid flows in the pipeline and impacts the impeller 29. The impeller 29 rotates, driving the rotating shaft 28 to rotate. The rotating shaft 28 rotates through the universal joint 26 and the main shaft 25. The main shaft 25 drives the gear 22 to rotate. The gear 22 drives the gear ring 8 meshing with it to rotate. The two gear rings 8 mesh and rotate, thereby driving the two ring bodies 7 to rotate. The ring body 7 rotates, so that the sensing mechanism in the air hole 14 alternately enters the box body 2 in turn. Under the pressure difference between the first cavity 3 and the second cavity 4, the sealed space between the upper sealing plate 11 and the lower sealing plate 12 is squeezed, so that the sensing device 13 is deformed, and data signal collection is performed. The electrical signal is fed back to the signal output device 10 through the conductive component. Finally, the signal output device 10 converts and processes the collected electrical signal and finally sends it to the external terminal device for reference and reading by the operator.
[0045] During the monitoring process, the sensor mechanisms in the two ring bodies 7 are alternately involved. At any time, there is a group of sensor mechanisms in operation to ensure the continuity of monitoring. Multiple groups of sensor mechanisms work alternately to avoid a single setting and ensure the high efficiency of monitoring.
[0046] Multiple groups of sensor mechanisms work alternately to form a control group, which is conducive to the authenticity of the feedback data and avoids inaccurate data due to problems with the equipment itself.
[0047] With the cooperation of the transmission components, it uses the impact of the fluid itself as power without the need for an additional power source, so that the flow rate data of the fluid can be indirectly reflected according to the replacement speed of the transmission mechanism.
[0048] Sealing doors 31 are rotatably mounted on both sides of the shell 1 through pin rods 30 , the outer bottom of the sealing door 31 is connected to the shell 1 through a lock buckle 32 , and locking screws 33 are symmetrically threadedly sleeved on both sides of the box body 2 .
[0049] When a problem occurs in one of the sensor mechanisms, it can be rotated to a position close to the sealing door 31, and then the locking screw 33 can be tightened to stop the ring body 7 from rotating. The sensor mechanism with the problem can be powered off for maintenance. At this time, the other group of normal sensor mechanisms can continue to work, thereby achieving maintenance without affecting the overall monitoring work of the equipment, further ensuring the efficiency of the overall operation of the equipment.
[0050] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
Claims
1. A pipeline pressure measurement sensor device, comprising: A housing (1), a plurality of sensor mechanisms and a pressure difference mechanism, wherein the plurality of sensor mechanisms are arranged on both sides of the pressure difference mechanism, and the pressure difference mechanism is arranged in the middle of the housing (1); The invention is characterized in that: the pressure difference mechanism comprises a box body (2), two sets of rotary components and a transmission component, the two sets of rotary components are symmetrically arranged on both sides of the box body (2), the upper and lower sides of the box body (2) are respectively provided with a first cavity (3) and a second cavity (4), a flow guide tube (5) is vertically fixedly installed at the bottom of the box body (2), the top of the flow guide tube (5) is connected to the second cavity (4), and a valve joint (6) is fixedly installed at the top of the box body (2), and the valve joint (6) is connected to the first cavity (3); The rotary assembly comprises a ring body (7) and a gear ring (8), wherein the ring body (7) is horizontally rotatably sleeved on the middle part of the box body (2), and the gear ring (8) is fixedly sleeved on the outside of the ring body (7), and the two gear rings (8) are meshingly connected; The transmission assembly is arranged in the guide tube (5) and is used to drive the two sets of rotating assemblies to rotate; The multiple groups of sensor mechanisms are divided into two groups, which are respectively arranged in two ring bodies (7); the contact surfaces between the box body (2) and the two ring bodies (7) are fixedly mounted with sealing strips (9); A signal output device (10) is fixedly mounted on the top of the box (2); the signal output device (10) feeds back data from the sensor mechanism to an external terminal device and is electrically connected to an external power supply.
2. A pipeline pressure measurement sensor device according to claim 1, characterized in that: The sensing mechanism comprises an upper sealing plate (11), a lower sealing plate (12) and a sensing device (13); a plurality of air holes (14) are evenly and vertically opened in a ring shape in the ring body (7); a plurality of sets of sensing mechanisms are respectively arranged in the plurality of air holes (14); the sensing device (13) is horizontally fixedly mounted in the middle of the air hole (14) and separates the upper and lower sides of the air hole (14); the upper sealing plate (11) is horizontally fixedly mounted on the upper side of the air hole (14) and the upper surface is flush with the upper side of the ring body (7); the lower sealing plate (12) is fixedly mounted on the bottom of the air hole (14) and the lower surface is flush with the bottom surface of the ring body (7); the upper sealing plate (11) and the lower sealing plate (12) are both made of elastic material.
3. A pipeline pressure measurement sensor device according to claim 1, characterized in that: The areas on both sides of the box body (2) that are connected to the ring body (7) are both symmetrically fixed with pressure plates (15) in the upper and lower directions, and the mutually adjacent sides of the pressure plates (15) are in sliding contact with the upper and lower surfaces of the ring body (7), and the air holes (14) in the two ring bodies (7) are alternately adjacent to the solid areas.
4. A pipeline pressure measurement sensor device according to claim 3, characterized in that: A plurality of groups of conductive plates (16) are fixedly mounted on the outside of the ring body (7), the number of conductive plates in each group of conductive plates (16) being the same as the number of electrodes of the sensing device (13), and each conductive plate (16) being electrically connected to one electrode respectively, and the signal output device (10) being electrically connected to the plurality of groups of conductive plates (16) via conductive components.
5. A pipeline pressure measurement sensor device according to claim 4, characterized in that: The conductive component comprises two groups of springs (17), two groups of balls (18), a plurality of first wires (19) and a plurality of second wires (20). A plurality of sliding cavities (21) are symmetrically provided in the middle of the housing (2). Each group of springs (17) and balls (18) corresponds to a conductive plate (16) in each sensing mechanism. The sliding cavities (21) on the same side correspond to the corresponding conductive plates (16). The springs (17) are horizontally arranged in the sliding cavities (21), and the inner ends are fixedly connected to the inner wall of the sliding cavities (21). The balls (18) are movably embedded in the outer ends of the sliding cavities (21) and are in rolling contact with the springs (17). Each pair of springs (17) distributed on the left and right are electrically connected via a first wire (19). The upper and lower ends of each second wire (20) are electrically connected to the electrode end of the signal output device (10) and the first wire (19) respectively. The conductive plates (16) are in rolling contact with the outer sides of the balls (18) during rotation.
6. A pipeline pressure measurement sensor device according to claim 1, characterized in that: The transmission assembly comprises a gear (22), a plurality of first brackets (23), a plurality of second brackets (24), a main shaft (25), two universal joints (26), a transmission shaft (27), a rotating shaft (28) and an impeller (29). The rotating shaft (28) is vertically rotatably mounted in the guide tube (5) via a plurality of second brackets (24). The impeller (29) is fixedly sleeved on the bottom end of the rotating shaft (28). The main shaft (25) is vertically rotatably mounted on the outside of the housing (2) via a plurality of first brackets (23). The gear (22) is fixedly sleeved on the top end of the main shaft (25) and meshedly connected with one of the gear rings (8). The transmission shaft (27) is rotatably sleeved in the side wall of the guide tube (5), and both ends are fixedly connected to the bottom end of the main shaft (25) and the top end of the rotating shaft (28) via universal joints (26) for torque transmission.
7. A pipeline pressure measurement sensor device according to claim 1, characterized in that: Sealing doors (31) are rotatably mounted on both sides of the housing (1) via pins (30); the outer bottom of the sealing door (31) is connected to the housing (1) via a lock buckle (32); and locking screws (33) are symmetrically threadedly sleeved on both sides of the box body (2).
Citation Information
Patent Citations
Wind pressure sensing device capable of adjusting pipeline airflow pressure
CN214224418U
Pipeline pressure sensing device
CN217930646U
Measurement device and measurement method for measuring internal pressure of measured object
CN113194810A
MEMS pressure sensor for depth-to-width ratio etching
CN116046226A