Electromagnetic wave modulation device

Abstract

An electromagnetic wave modulation device comprises a substrate and a plurality of electromagnetic wave modulation elements arranged on the substrate in an array. Each electromagnetic wave modulation element comprises an antenna and a phase shifter. The phase shifter comprises a first electrode, a grounding electrode and a plurality of second electrodes. The first electrode is electrically connected to the antenna. The grounding electrodes are at least arranged on two opposite sides of the first electrode. Each second electrode is arranged on the grounding electrode and crosses the first electrode. A first air gap exists between each second electrode and the first electrode.

Description

Technical Field

[0001] The invention relates to an electronic device, and in particular to an electromagnetic wave modulation device. Background Art

[0002] Reconfigurable Intelligent Surface (RIS) is an array module composed of many wavelength modulation elements. Each wavelength modulation element can be controlled independently. Through active intelligent regulation, the signal wave number can be enhanced in a specific direction, and even interference signals can be suppressed or eliminated. It is expected that in the future, reconfigurable intelligent surface technology will be a key technology for the 6G generation. However, the current reconfigurable intelligent surface has problems such as opacity, high cost, and high signal loss. Summary of the invention

[0003] The object of the present invention is to provide an electromagnetic wave modulation device with good performance.

[0004] The electromagnetic wave modulation device of the present invention comprises a substrate and a plurality of electromagnetic wave modulation elements arranged in an array on the substrate. Each electromagnetic wave modulation element comprises an antenna and a phase shifter. The phase shifter comprises a first electrode, a ground electrode and a plurality of second electrodes. The first electrode is electrically connected to the antenna. The ground electrode is at least arranged on two opposite sides of the first electrode. Each second electrode is arranged on the ground electrode and crosses the first electrode. A first air gap exists between each second electrode and the first electrode. BRIEF DESCRIPTION OF THE DRAWINGS

[0005] Figure 1 FIG. 4 is a schematic top view of an electromagnetic wave modulation device according to an embodiment of the present invention.

[0006] Figure 2 FIG. 4 is an enlarged schematic diagram of an electromagnetic wave modulation element according to an embodiment of the present invention.

[0007] Figure 3 FIG. 1 is a partial enlarged schematic diagram of an electromagnetic wave modulation element according to an embodiment of the present invention.

[0008] Figure 4 FIG. 4 is a cross-sectional schematic diagram of an electromagnetic wave modulation element according to an embodiment of the present invention.

[0009] Figure 5 FIG. 4 is a cross-sectional schematic diagram of an electromagnetic wave modulation element according to an embodiment of the present invention.

[0010] Figure 6 , Figure 7 and Figure 8 The phase shifter according to one embodiment of the present invention operates under different conditions.

[0011] Fig. 9The diagram shows signals of a plurality of gate lines and signals of a plurality of signal lines of an electromagnetic wave modulation device according to an embodiment of the present invention.

[0012] Fig.10 FIG. 4 is a graph showing the relationship between the bandwidth and phase shift of an electromagnetic wave modulation element according to an embodiment of the present invention.

[0013] Fig.11 FIG. 4 is an S parameter curve diagram of an electromagnetic wave modulation device according to an embodiment of the present invention.

[0014] The reference numerals are as follows:

[0015] 10: Electromagnetic wave modulation device

[0016] 100:Substrate

[0017] 102: First surface

[0018] 104: Second surface

[0019] 200:Electromagnetic wave modulation element

[0020] 210: Antenna

[0021] 212: Opening

[0022] 220: Phase Shifter

[0023] 222: first electrode

[0024] 222a: First end

[0025] 222b: Second end

[0026] 223: first auxiliary electrode

[0027] 224: Grounding Electrode

[0028] 224-1: Part 1

[0029] 224-2: Part 2

[0030] 224-3: Part 3

[0031] 225: second auxiliary electrode

[0032] 226, 226-1, 226-2, 226-3: second electrode

[0033] 226a, 226b, 229a, 229b: lateral part

[0034] 226c, 229c: Top

[0035] 227: Dielectric layer

[0036] 228: Wire

[0037] 229: Skybridge Structure

[0038] 240: Switching element

[0039] 242: First End

[0040] 244: Second End

[0041] 246: Control terminal

[0042] AG1: First air gap

[0043] AG2: Second air gap

[0044] C: Junction

[0045] d1, d2, d3: direction

[0046] EM: Electromagnetic wave signal

[0047] GL, GL1, GL2, GL3, GLn: Gate lines

[0048] K1, K2: Distance

[0049] R: Local

[0050] SL, SL1, SL2, SL3, SLm: signal line

[0051] S GL1 , S GL2 , S GL3 , S GLn , S SL1 , S SL2 , S SL3 , S SLm :Signal

[0052] T1, T2, T3, Tn: period

[0053] I-I', II-II': line segment DETAILED DESCRIPTION

[0054] Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Whenever possible, the same reference numerals are used in the drawings and the description to refer to the same or like parts.

[0055] It should be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected to" another element, it may be directly on or connected to another element, or an intermediate element may also exist. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intermediate elements. As used herein, "connection" may refer to physical and / or electrical connection. Furthermore, "electrical connection" or "coupling" may refer to the presence of other elements between two elements.

[0056] As used herein, "about", "approximately", or "substantially" includes the stated value and the average value within an acceptable deviation range of the particular value determined by one of ordinary skill in the art, taking into account the measurement in question and the particular amount of error associated with the measurement (i.e., the limitations of the measurement system). For example, "about" can mean within one or more standard deviations of the stated value, or within ±30%, ±20%, ±10%, ±5%. Furthermore, as used herein, "about", "approximately", or "substantially" can select a more acceptable deviation range or standard deviation depending on the optical property, etching property or other property, and can apply to all properties without a single standard deviation.

[0057] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the invention belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology and the present invention, and will not be interpreted as an idealized or overly formal meaning unless explicitly defined as such herein.

[0058] Figure 1 FIG. 4 is a schematic top view of an electromagnetic wave modulation device according to an embodiment of the present invention. Figure 2 FIG. 4 is an enlarged schematic diagram of an electromagnetic wave modulation element according to an embodiment of the present invention. Figure 3 FIG. 1 is a partial enlarged schematic diagram of an electromagnetic wave modulation element according to an embodiment of the present invention. Figure 3 correspond Figure 2 The local R. Figure 4 FIG. 4 is a cross-sectional schematic diagram of an electromagnetic wave modulation element according to an embodiment of the present invention. Figure 4 correspond Figure 3 The line segment I-I'. Figure 5 FIG. 4 is a cross-sectional schematic diagram of an electromagnetic wave modulation element according to an embodiment of the present invention. Figure 5 correspond Figure 3 The line segment II-II'.

[0059] Please refer to Figure 1 and Figure 2The electromagnetic wave modulation device 10 includes a substrate 100 and a plurality of electromagnetic wave modulation elements 200 arrayed on the substrate 100. In some embodiments, the substrate 100 may be a transparent substrate. For example, in some embodiments, the material of the substrate 100 may be glass, organic polymer, or other applicable materials, but the present invention is not limited thereto.

[0060] Each electromagnetic wave modulation element 200 includes an antenna 210 and a phase shifter 220. In some embodiments, the material of the antenna 210 may be metal, such as copper, silver, gold, aluminum, etc. In some embodiments, the antenna 210 may selectively have a plurality of openings 212 to improve the transparency of the electromagnetic wave modulation device 10. However, the present invention is not limited thereto. In other embodiments, the material of the antenna 210 may also be a transparent conductive material, such as indium tin oxide, indium zinc oxide, aluminum tin oxide, aluminum zinc oxide, indium germanium zinc oxide, other suitable oxides, or a stacked layer of at least two of the above, but the present invention is not limited thereto.

[0061] Please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 , the substrate 100 has a first surface 102 and a second surface 104 opposite to each other. The plurality of antennas 210 of the electromagnetic wave modulation element 200 are disposed on the first surface 102. In some embodiments, the plurality of electromagnetic wave modulation elements 200 arranged in an array may form a reconfigurable intelligent surface (RIS), and the second surface 104 of the substrate 100 may not be provided with electrodes overlapping with the plurality of antennas 210, and the reconfigurable intelligent surface may be a penetrating type. However, the present invention is not limited thereto, and in other embodiments, the second surface 104 of the substrate 100 may also be provided with electrodes (not shown) overlapping with the plurality of antennas 210, and the reconfigurable intelligent surface may also be a reflective type.

[0062] The phase shifter 220 includes a first electrode 222, a ground electrode 224, and a plurality of second electrodes 226. The first electrode 222 is electrically connected to the antenna 210. In some embodiments, the first electrode 222 of the phase shifter 220 and the antenna 210 may be formed in the same film layer, and the first electrode 222 of the phase shifter 220 and the antenna 210 may be directly connected, but the present invention is not limited thereto. In some embodiments, the first electrode 222 of the phase shifter 220 may be linear. However, the present invention is not limited thereto, and the shape of the first electrode 222 may be changed according to actual needs. In other embodiments, the first electrode 222 may also be meandered into other shapes.

[0063] The ground electrode 224 is disposed at least on two opposite sides of the first electrode 222. For example, in some embodiments, the first electrode 222 of the phase shifter 220 has a first end 222a and a second end 222b opposite to each other, the first end 222a of the first electrode 222 is connected to the antenna 210, the ground electrode 224 includes a first portion 224-1, a second portion 224-2, and a third portion 224-3, the first portion 224-1 and the second portion 224-2 are respectively disposed on two opposite sides of the first electrode 222 and are separated from the first electrode 222 in a direction d1 parallel to the substrate 100, the third portion 224-3 connects the first portion 224-1 and the second portion 224-2, and the third portion 224-3 is disposed beside the second end 222b of the first electrode 222 and connected to the second end 222b of the first electrode 222. Specifically, in some embodiments, the phase shifter 220 further includes a wire 228, wherein two ends of the wire 228 are respectively connected to the second end 222b of the first electrode 222 and the third portion 224-3 of the ground electrode 224. In some embodiments, the first electrode 222 and the ground electrode 224 of the phase shifter 220 may be formed in the same film layer, but the present invention is not limited thereto.

[0064] In some embodiments, the phase shifter 220 may further selectively include a first auxiliary electrode 223 and a second auxiliary electrode 225. The antenna 210 and the first electrode 222 have a junction C. The first auxiliary electrode 223 and the second auxiliary electrode 225 are respectively disposed on both sides of the junction C and are respectively connected to the first portion 224-1 and the second portion 224-2 of the ground electrode 224. The distance K1 between the first auxiliary electrode 223 and the antenna 210 decreases as it approaches the junction C, and the distance K2 between the second auxiliary electrode 225 and the antenna 210 decreases as it approaches the junction C. When the transmission mode is converted, for example, from a micro strip line (MSL) to a coplanar waveguide (CPWG), the first auxiliary electrode 223 and the second auxiliary electrode 225 help to reduce the electromagnetic wave signal EM (indicated at Figure 6 ) loss.

[0065] Please refer to Figure 2 , Figure 3 and Figure 4, a plurality of second electrodes 226 are arranged at intervals, each second electrode 226 is arranged on the ground electrode 224 and crosses the first electrode 222 , and a first air gap AG1 exists between each second electrode 226 and the first electrode 222 . Specifically, in some embodiments, the phase shifter 220 also includes a dielectric layer 227, which covers the ground electrode 224 and the first electrode 222. The second electrode 226 may include two lateral portions 226a, 226b and a top 226c. The two lateral portions 226a, 226b are arranged on the dielectric layer 227 and are respectively located above the first portion 224-1 and the second portion 224-2 of the ground electrode 224. The two lateral portions 226a, 226b extend in a direction d2 away from the substrate 100. The top 226c is suspended on the two lateral portions 226a, 222b. At least a portion of the top 226c is located above the first electrode 222. The portion of the dielectric layer 227 located between the first portion 224-1 and the second portion 224-2 of the ground electrode 224, the two lateral portions 226a, 226b and the top 226c of the second electrode 226 enclose a first air gap AG1.

[0066] Please refer to Figure 2 and Figure 3 , a plurality of second electrodes 226 are disposed above the first electrode 222 at intervals along the extension direction d3 of the first electrode 222. In some embodiments, the plurality of second electrodes 226 may be disposed at equal intervals, but the present invention is not limited thereto. In some embodiments, the material of the second electrode 226 is, for example, metal. However, the present invention is not limited thereto, and in other embodiments, the material of the second electrode 226 may also be other conductive materials, such as alloys, nitrides of metal materials, oxides of metal materials, oxynitrides of metal materials, or stacked layers of metal materials and other conductive materials, but the present invention is not limited thereto.

[0067] Please refer to Figure 2 , Figure 3 and Figure 5In some embodiments, the phase shifter 220 may further selectively include an air bridge structure 229, which is disposed on the first portion 224-1 and the second portion 224-2 of the ground electrode 224 and spans the first end 222a of the first electrode 222. The air bridge structure 229 is electrically connected to the ground electrode 224, and a second air gap AG2 exists between the air bridge structure 229 and the first end 222a of the first electrode 222. Specifically, in some embodiments, the air bridge structure 229 may include two lateral portions 229a, 229b and a top portion 229c, the two lateral portions 229a, 229b may be directly disposed on the first portion 224-1 and the second portion 224-2 of the ground electrode 224, the top portion 229c is suspended on the two lateral portions 229a, 229b, at least a portion of the top portion 229c is located above the first end 222a of the first electrode 222, the first end 222a of the first electrode 222, the two lateral portions 229a, 229b of the air bridge structure 229 and the top portion 229c of the air bridge structure 229 surround a second air gap AG2. The air bridge structure 229 helps to eliminate the generation of odd modes.

[0068] Table 1 below lists the values ​​of various performances of a phase shifter according to an embodiment of the present invention and a conventional phase shifter. Figure 2 As shown in Table 1 below, the phase shifter 200 of one embodiment of the present invention has the advantages of large angle, low loss, resolution and small size. For example, in some embodiments, if the area of ​​the first auxiliary electrode 223 and the second auxiliary electrode 225 is not taken into account, the area of ​​the phase shifter 220 is approximately 3.5 mm×0.7 mm, but the present invention is not limited thereto. For example, in some embodiments, each electromagnetic wave modulation element 200 may include 16 second electrodes 226, and the resolution of the electromagnetic wave modulation element 200 may be 4 bits. However, the present invention is not limited thereto, and the number of second electrodes 226 included in each electromagnetic wave modulation element 200 may be designed appropriately according to the resolution to be achieved.

[0069]

[0070] [Table 1]

[0071] Please refer to Figure 2 , Figure 3 and Figure 4In some embodiments, each electromagnetic wave modulation element 200 may further include a plurality of switch elements 240, which are electrically connected to a plurality of second electrodes 226 of the phase shifter 220. In some embodiments, the switch element 240 may include a thin film transistor, wherein the thin film transistor has a first end 242, a second end 244, and a control end 246. When a switch element 240 of the electromagnetic wave modulation element 200 is turned on, a corresponding second electrode 226 may have a voltage. The second electrode 226 with voltage will be attracted by the first electrode 222 and collapse downward and contact the dielectric layer 227, thereby generating a very large capacitance, thereby slowing down or blocking the electromagnetic wave signal EM (indicated at Figure 6 ) transfer on the first electrode 222.

[0072] Figure 6 , Figure 7 and Figure 8 FIG. 2 shows a phase shifter operating under different conditions according to an embodiment of the present invention. Figure 2 and Figures 6 to 8 In some embodiments, by determining which switch element 240 is turned on, the length of the electromagnetic wave signal EM transmitted in the phase shifter 220 can be determined. For example, the plurality of second electrodes 226 of the electromagnetic wave modulation element 200 include a second electrode 226-1, a second electrode 226-2, and a second electrode 226-3. The antenna 210 and the first electrode 222 have a junction C. The second electrode 226-1 and the junction C have a first distance (not marked) along the extension direction d3 of the first electrode 222. The second electrode 226-2 and the junction C have a second distance (not marked) along the extension direction d3 of the first electrode 222. The third electrode 226-3 and the junction C have a third distance (not marked) along the extension direction d3 of the first electrode 222. The third distance is greater than the second distance, and the second distance is greater than the first distance.

[0073] If the switch element 240 electrically connected to the second electrode 226-1 is turned on, and the other switch elements 240 located between the second electrode 226-1 and the first end 222a of the first electrode 222 are turned off, the transmission length of the electromagnetic wave signal EM in the phase shifter 220 is short; if the switch element 240 electrically connected to the second electrode 226-2 is turned on, and the other switch elements 240 located between the second electrode 226-2 and the first end 222a of the first electrode 222 are turned off, the transmission length of the electromagnetic wave signal EM in the phase shifter 220 is medium; if the switch element 240 electrically connected to the second electrode 226-3 is turned on, and the other switch elements 240 located between the second electrode 226-3 and the first end 222a of the first electrode 222 are turned off, the transmission length of the electromagnetic wave signal EM in the phase shifter 220 is long. In this way, the transmission length of the electromagnetic wave signal EM in the phase shifter 220 can be controlled, and the phase of the electromagnetic wave signal EM emitted by the antenna 210 after receiving the electromagnetic wave signal EM can be adjusted.

[0074] Please refer to Figure 1 , Figure 2 and Figure 3 In some embodiments, the electromagnetic wave modulation device 10 further includes a plurality of signal lines SL and a plurality of gate lines GL disposed on the substrate 100, the plurality of gate lines GL and the plurality of signal lines SL are alternately disposed, the plurality of first ends 242 of the plurality of switch elements 240 of each electromagnetic wave modulation element 200 are respectively electrically connected to the plurality of signal lines SL, the plurality of control ends 246 of the plurality of switch elements 240 of each electromagnetic wave modulation element 200 are respectively electrically connected to a corresponding gate line GL, and the plurality of second ends 244 of the plurality of switch elements 240 of each electromagnetic wave modulation element 200 are respectively electrically connected to the plurality of second electrodes 226 of the phase shifter 220.

[0075] Fig. 9 1 shows the signals of multiple gate lines and multiple signal lines of an electromagnetic wave modulation device according to an embodiment of the present invention. Figure 1 and Fig. 9 The electromagnetic wave modulation device 10 includes a plurality of gate lines GL1, GL2, GL3, ... GLn and a plurality of signal lines SL1, SL2, SL3, ... SLm. The plurality of gate lines GL1, GL2, GL3, ... GLn respectively have signal lines S GL1 , S GL2 , S GL3 …S GLn , and the plurality of signal lines SL1, SL2, SL3 ... SLm respectively have signal S SL1 , S SL2 , S SL3 …S SLm Similar to the driving of the display panel, the signals S of the plurality of gate lines GL1, GL2, GL3, ... GLn areGL1 , S GL2 , S GL3 …S GLn The gate-on pulses are respectively provided in the consecutive periods T1, T2, T3, ... Tn, and the plurality of signal lines SL1, SL2, SL3, ... SLm also have corresponding signals S in the consecutive periods T1, T2, T3, ... Tn. GL1 , S GL2 , S GL3 …S GLn The signal S through the plurality of gate lines GL1, GL2, GL3...GLn GL1 , S GL2 , S GL3 …S GLn The signal S of the plurality of signal lines SL1, SL2, SL3, ... SLm SL1 , S SL2 , S SL3 …S SLm By matching the phase of the electromagnetic wave signal EM transmitted to the plurality of electromagnetic wave modulation elements 200 arranged in the array, the phase of the electromagnetic wave signal EM can be changed, thereby adjusting the emission direction of the electromagnetic wave signal EM.

[0076] Please refer to Figure 1 and Figure 2 The electromagnetic wave modulation device 10 and the electromagnetic wave modulation element 200 of an embodiment of the present invention have the advantages of high gain, high bandwidth and high resolution. For example, in some embodiments, the gain value of the electromagnetic wave modulation element 200 including a single antenna 210 is about 8.3 dB, which is significantly higher than the gain value of the conventional patch antenna by 4 dB to 10 dB.

[0077] Fig.10 The relationship between the bandwidth and phase shift of the electromagnetic wave modulation element of an embodiment of the present invention is a curve diagram. A new reconfigurable intelligent surface (RIS) can be formed by using a plurality of electromagnetic wave modulation elements 200 arranged in an array. The following table 2 lists the relationship between the phase shift and bandwidth of the new reconfigurable intelligent surface and the conventional reconfigurable intelligent surface, wherein the conventional reconfigurable intelligent surface is formed by using a plurality of liquid crystal antennas. Please refer to Figure 1 , Fig.10 As shown in Table 2 below, the bandwidth of the new reconfigurable smart surface formed by using multiple electromagnetic wave modulation elements 200 is significantly greater than that of the conventional reconfigurable smart surface.

[0078]

[0079] [Table 2]

[0080] Fig.11This is an S parameter curve diagram of an electromagnetic wave modulation device according to an embodiment of the present invention. Figure 1 , Figure 2 and Fig.11 , the electromagnetic wave modulation device 10 of one embodiment of the present invention has high resolution.

Claims

1. An electromagnetic wave modulation device, comprising: a substrate; as well as A plurality of electromagnetic wave modulation elements are arrayed on the substrate, wherein each electromagnetic wave modulation element comprises: an antenna; and A phase shifter, comprising: a first electrode electrically connected to the antenna; a ground electrode disposed at least on two opposite sides of the first electrode; and A plurality of second electrodes are provided, wherein each second electrode is disposed on the ground electrode and straddles the first electrode, and a first air gap exists between each second electrode and the first electrode.

2. The electromagnetic wave modulation device as described in claim 1, wherein the first electrode of the phase shifter has a first end and a second end opposite to each other, the first end of the first electrode is connected to the antenna, the ground electrode includes a first portion, a second portion and a third portion, the first portion and the second portion are respectively arranged on opposite sides of the first electrode, the third portion connects the first portion and the second portion, and the third portion is arranged next to the second end of the first electrode and is connected to the second end of the first electrode.

3. The electromagnetic wave modulation device as claimed in claim 2, wherein the phase shifter further comprises: A conductive wire, wherein two ends of the conductive wire are respectively connected to the second end of the first electrode and the third portion of the ground electrode.

4. The electromagnetic wave modulation device as claimed in claim 2, wherein the phase shifter further comprises: An air bridge structure is arranged on the first part and the second part of the ground electrode and spans the first end of the first electrode, wherein the air bridge structure is electrically connected to the ground electrode, and there is a second air gap between the air bridge structure and the first end of the first electrode.

5. The electromagnetic wave modulation device as claimed in claim 1, wherein each of the electromagnetic wave modulation elements further comprises: A plurality of switch elements are electrically connected to a plurality of the second electrodes of the phase shifter respectively.

6. The electromagnetic wave modulation device according to claim 5, further comprising: A plurality of signal lines are arranged on the substrate; as well as A plurality of gate lines are arranged on the substrate and are staggered with the plurality of signal lines, wherein the plurality of first ends of the plurality of switch elements of each electromagnetic wave modulation element are respectively electrically connected to the plurality of signal lines, the plurality of control ends of the plurality of switch elements of each electromagnetic wave modulation element are respectively electrically connected to a corresponding gate line, and the plurality of second ends of the plurality of switch elements of each electromagnetic wave modulation element are respectively electrically connected to the plurality of second electrodes of the phase shifter.

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