Radio frequency power supply circuit and electronic equipment

Abstract

The invention discloses a radio frequency power supply circuit and electronic equipment. The radio frequency power supply circuit comprises a power supply module, a first inductor, a power tube, a peak value detection module and a control module. The first end of the first inductor is connected with the power module; the first end of the power tube is connected with the second end of the first inductor and coupled with a load, the second end of the power tube is grounded, and the control end of the power tube is configured to input a radio frequency signal; the peak detection module is connected with the first end of the power tube, and the peak detection module is configured to obtain the peak voltage of the first end of the power tube; the control module is connected with the peak value detection module and the power supply module, and the control module is configured to control the power supply module to reduce the output voltage when the peak value voltage is larger than a first voltage threshold value. Through the above mode, the mismatch risk of the power tube can be effectively reduced, and the overvoltage protection of the power tube can be realized.

Description

Technical Field

[0001] The present application relates to the field of electronic circuits, and in particular to a radio frequency power supply circuit and an electronic device. Background Art

[0002] The RF source module is generally composed of a signal source, a driver stage, and a power amplifier stage. The power tube is the core component of the power amplifier stage. In some applications, the load of the power amplifier stage is usually dynamically changing, resulting in an impedance mismatch between the power amplifier stage and its load. The common solution is to use a matcher to adjust the load adaptation state, but the matcher usually uses a motor-driven adjustable capacitor to find the impedance adaptation point. Due to the motor stroke problem, a relatively large delay is usually generated, causing the power tube to work in a mismatched state. When the power tube works in a mismatched state, the output power will be reflected back to the power tube from the load end, causing the voltage stress of the power tube to exceed the standard, which is easy to cause overstress damage to the power tube.

[0003] Existing RF sources generally use multiple power amplifier modules for power synthesis to achieve a larger power output. The incident power and reflected power are detected at the output end of the RF power supply to ensure that the working state of the matcher is corrected under abnormal reflection conditions to achieve complete load matching. During the matching device adjustment process, the power tube is prone to overvoltage stress; on the other hand, the working conditions of each power amplifier module are not exactly the same, and individual power tubes may be in an overvoltage state. The power tube is easily damaged under overvoltage stress conditions, and the reliability of the system cannot be guaranteed. Summary of the invention

[0004] In order to solve the above problems, the present application provides a radio frequency power supply circuit and an electronic device, which can effectively reduce the mismatch risk of the power tube and realize overvoltage protection of the power tube through the above method.

[0005] A technical solution adopted in the present application is: adopting a radio frequency power supply circuit, which includes: a power supply module; a first inductor, the first end of the first inductor is connected to the power supply module; a power tube, the first end of the power tube is connected to the second end of the first inductor and coupled to the load, the second end of the power tube is grounded, and the control end of the power tube is configured to input a radio frequency signal; a peak detection module, connected to the first end of the power tube, the peak detection module is configured to obtain the peak voltage of the first end of the power tube; a control module, connected to the peak detection module and the power supply module, the control module is configured to control the power supply module to reduce the output voltage when the peak voltage is greater than a first voltage threshold.

[0006] In one embodiment, the peak detection module includes: a voltage divider unit connected to the first end of the power tube, the voltage divider unit is configured to divide the voltage of the first end of the power tube; a peak holding unit connected to the voltage dividing node of the voltage divider unit and the control module, the peak holding unit is configured to hold the peak value of the voltage after the voltage is divided by the voltage divider unit, so that the control module detects the peak value of the voltage after the voltage is divided, thereby determining the peak voltage of the first end of the power tube.

[0007] In one embodiment, the peak holding unit includes: a diode, an anode of the diode is connected to the voltage dividing node of the voltage dividing unit, and a cathode of the diode is connected to the control module; a first capacitor, a first end of the first capacitor is connected to the cathode of the diode, and a second end of the first capacitor is grounded; a first resistor, a first end of the first resistor is connected to the first end of the first capacitor, and a second end of the first resistor is grounded.

[0008] In one embodiment, the RF power supply circuit also includes a power detection module, which is coupled to the first end of the power tube and connected to the control module and the load. The power detection module is configured to obtain the output power of the first end of the power tube, and the control module is configured to: when the peak voltage is less than the second voltage threshold, control the power supply module to increase the output voltage; or when the output power is less than the power threshold, control the power supply module to increase the output voltage.

[0009] In one embodiment, the RF power supply circuit includes: a second capacitor, a first end of the second capacitor is connected to the first end of the power tube, and a second end of the second capacitor is grounded; a second inductor, a first end of the second inductor is connected to the first end of the power end; a third capacitor, a first end of the third capacitor is connected to the second end of the second inductor, and the second end of the third capacitor is grounded; a fourth capacitor, a first end of the fourth capacitor is connected to the second end of the second inductor, and the second end of the fourth capacitor is connected to the load; wherein the power detection module is connected to the second end of the second inductor.

[0010] In one embodiment, the RF power supply circuit includes: a fifth capacitor, a first end of the fifth capacitor is connected to the power supply module, a second end of the fifth capacitor is grounded, and a first end of the fifth capacitor is configured as an input supply voltage; a sixth capacitor, a first end of the sixth capacitor is connected to the power supply module, and a second end of the sixth capacitor is grounded.

[0011] In one embodiment, the RF power supply circuit also includes: a seventh capacitor, a first end of the seventh capacitor is configured to input a RF signal; an eighth capacitor, a first end of the eighth capacitor is connected to the second end of the seventh capacitor, and the second end of the eighth capacitor is grounded; a third inductor, a first end of the third inductor is connected to the second end of the seventh capacitor; and a ninth capacitor, a first end of the ninth capacitor is connected to the second end of the third inductor, and the second end of the ninth capacitor is grounded.

[0012] In one embodiment, a second resistor, a first end of the second resistor is connected to the second end of the third inductor, and the second end of the second resistor is connected to the control end of the power tube; a tenth capacitor, a first end of the tenth capacitor is connected to the first end of the power tube; a third resistor, a first end of the third resistor is connected to the second end of the tenth capacitor, and the second end of the third resistor is connected to the control end of the power tube; a fourth resistor, a first end of the fourth resistor is connected to the control end of the power tube; an eleventh capacitor, a first end of the eleventh capacitor is connected to the second end of the fourth resistor, and the second end of the eleventh capacitor is grounded.

[0013] In one embodiment, the RF power supply circuit also includes: a fifth resistor, a first end of the fifth resistor is connected to the power supply module; a sixth resistor, a first end of the sixth resistor is connected to the second end of the fifth resistor; a seventh resistor, a first end of the seventh resistor is connected to the second end of the sixth resistor, and the second end of the seventh resistor is connected to the control end of the power tube; a twelfth capacitor, a first end of the twelfth capacitor is connected to the second end of the fifth resistor, and the second end of the twelfth capacitor is grounded; a voltage regulator tube, a cathode of the voltage regulator tube is connected to the first end of the sixth resistor, and the second end of the voltage regulator tube is grounded; an eighth resistor, a first end of the eighth resistor is connected to the second end of the sixth resistor, and the second end of the eighth resistor is grounded; a thirteenth capacitor, a first end of the thirteenth capacitor is connected to the second end of the sixth resistor, and the second end of the thirteenth capacitor is grounded.

[0014] The present application also provides an electronic device, which includes the radio frequency power supply circuit as described above.

[0015] A technical solution adopted in the present application is: adopting a radio frequency power supply circuit, which includes: a power supply module; a first inductor, the first end of the first inductor is connected to the power supply module; a power tube, the first end of the power tube is connected to the second end of the first inductor and coupled to the load, the second end of the power tube is grounded, and the control end of the power tube is configured to input a radio frequency signal; a peak detection module, connected to the first end of the power tube, the peak detection module is configured to obtain the peak voltage of the first end of the power tube; a control module, connecting the peak detection module and the power supply module, the control module is configured to control the power supply module to reduce the output voltage when the peak voltage is greater than the first voltage threshold. Through the above method, when the power tube is over-voltage, the output voltage of the power supply module is reduced, thereby reducing the working voltage of the power tube and realizing overvoltage protection; when the power tube is under-voltage or under-power, the output voltage of the power supply module is increased, thereby increasing the operating power of the power tube; it can effectively reduce the mismatch risk of the power tube, and can realize overvoltage protection and under-voltage / under-power protection of the power tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0017] in:

[0018] Figure 1 is a structural schematic diagram of the first embodiment of the radio frequency power supply circuit provided by the present application;

[0019] Figure 2 is a structural schematic diagram of a second embodiment of a radio frequency power supply circuit provided by the present application;

[0020] Figure 3 is a structural schematic diagram of a third embodiment of a radio frequency power supply circuit provided by the present application;

[0021] Figure 4 is a structural schematic diagram of a fourth embodiment of a radio frequency power supply circuit provided by the present application;

[0022] Figure 5 It is a structural schematic diagram of an embodiment of an electronic device provided by the present application. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It will be appreciated that the specific embodiments described herein are only used to explain the present application, rather than to limit the present application. It should also be noted that, for ease of description, only some but not all structures related to the present application are shown in the drawings. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the art without making creative work are within the scope of protection of the present application.

[0024] The terms "first", "second", etc. in this application are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but in some embodiments also includes steps or units that are not listed, or in some embodiments also includes other steps or units inherent to these processes, methods, products or devices.

[0025] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0026] See also Figure 1 , Figure 1 The RF power circuit 100 includes a power module 10 , a first inductor L1 , a power tube Q, a peak detection module 20 and a control module 30 .

[0027] Among them, the first end of the first inductor L1 is connected to the power module 10; the first end of the power tube Q is connected to the second end of the first inductor L1 and coupled to the load, the second end of the power tube Q is grounded, and the control end of the power tube Q is configured to input a radio frequency signal; the peak detection module 20 is connected to the first end of the power tube Q, and the peak detection module 20 is configured to obtain the peak voltage of the first end of the power tube Q; the control module 30 is connected to the peak detection module 20 and the power module 10, and the control module 30 is configured to control the power module 10 to reduce the output voltage when the peak voltage is greater than the first voltage threshold.

[0028] Specifically, in the RF power supply circuit 100, the power tube Q is used to amplify the input RF signal, so as to output a sufficiently large power signal to effectively drive the load. The voltage at the first end of the power tube Q is one of the important parameters reflecting the working state of the power tube Q. By real-time monitoring of the voltage value, it is possible to understand whether the power tube Q is in a normal working state, including whether there are abnormal conditions such as overvoltage and undervoltage. Among them, the power tube Q can be a MOS transistor, specifically an NMOS transistor, and its working state is controlled by the gate (i.e., control terminal) voltage signal of the NMOS transistor. When the gate voltage signal is at a high level, the NMOS transistor is in an on state, and when the gate voltage signal is at a low level, the NMOS transistor is in an off state. In other embodiments, the power tube Q can also be a semiconductor device such as a PMOS tube, a triode, etc., which are not listed here one by one.

[0029] Among them, in addition to filtering and energy storage, the first inductor L1 can also improve the transient response of the circuit to a certain extent. When the circuit current changes rapidly, the first inductor L1 can slow down the rate of current change, maintain the stability of the current, and reduce the impact on the power module 10, thereby protecting the power module 10 and the power tube Q.

[0030] In one embodiment, the control module 30 may be an MCU (Microcontroller Unit) with an ADC conversion function. The control module 30 is connected to the power module 10 through a communication connection, and the output voltage of the power module 10 is controlled by the communication instruction of the control module 30. The control module 30 collects the peak voltage of the first end of the power tube Q, converts it into a digital signal, and compares it with the first voltage threshold to determine whether the power tube Q is in an overvoltage state. When the power tube Q is in an overvoltage state, the percentage of the peak voltage of the first end of the power tube Q exceeding the first voltage threshold is calculated, and the power module 10 is notified to reduce the output voltage in proportion according to the percentage, thereby reducing the output power, thereby reducing the peak voltage of the first end of the power tube Q, and realizing overvoltage protection of the power tube Q.

[0031] It can be understood that the present application directly monitors the peak voltage of the power tube Q through the peak detection module 20, and adjusts the output voltage of the power module 10 through the control module 30, thereby ensuring that the power tube Q operates within a safe voltage range, achieving overvoltage protection of the power tube Q, and improving the reliability of the system.

[0032] See also Figure 2 , Figure 2 1 is a schematic diagram of the structure of the second embodiment of the radio frequency power supply circuit provided in the present application. The radio frequency power supply circuit 100 comprises: a power supply module 10 , a first inductor L1 , a power tube Q, a peak detection module 20 and a control module 30 .

[0033] Among them, the first end of the first inductor L1 is connected to the power module 10; the first end of the power tube Q is connected to the second end of the first inductor L1 and coupled to the load, the second end of the power tube Q is grounded, and the control end of the power tube Q is configured to input a radio frequency signal; the peak detection module 20 is connected to the first end of the power tube Q, and the peak detection module 20 is configured to obtain the peak voltage of the first end of the power tube Q; the control module 30 is connected to the peak detection module 20 and the power module 10, and the control module 30 is configured to control the power module 10 to reduce the output voltage when the peak voltage is greater than the first voltage threshold.

[0034] In some embodiments, the peak detection module 20 includes: a voltage divider unit 21 and a peak holding unit 22. The voltage divider unit 21 is connected to the first end of the power tube Q, and the voltage divider unit 21 is configured to divide the voltage of the first end of the power tube Q; the peak holding unit 22 is connected to the voltage division node of the voltage divider unit 21 and the control module 30, and the peak holding unit 22 is configured to hold the peak value of the voltage after the voltage division of the voltage divider unit 21, so that the control module 30 detects the peak value of the voltage after the voltage division, thereby determining the peak voltage of the first end of the power tube Q.

[0035] In some embodiments, the peak holding unit 22 includes: a diode D1, a first capacitor C1 and a first resistor R1. The anode of the diode D1 is connected to the voltage dividing node of the voltage dividing unit 21, and the cathode of the diode D1 is connected to the control module 30; the first end of the first capacitor C1 is connected to the cathode of the diode D1, and the second end of the first capacitor C1 is grounded; the first end of the first resistor R1 is connected to the first end of the first capacitor C1, and the second end of the first resistor R1 is grounded.

[0036] Specifically, the diode D1 is a radio frequency detection diode D1, which is used to detect, measure and convert radio frequency signals; the voltage divider unit 21 is used to reduce the voltage at the first end of the power tube Q to meet the working voltage of the diode D1. According to Ohm's law and the voltage division principle of the series circuit, by adjusting the resistance ratio of the voltage in the voltage divider unit 21, the voltage value after the voltage division can be accurately controlled. The voltage after the voltage division should be lower than the maximum reverse working voltage of the diode D1 to avoid damaging the diode D1. In one embodiment, the voltage divider unit 21 may include multiple resistors, such as the eleventh resistor R11 and the twelfth resistor R12.

[0037] Specifically, when the forward voltage of the diode D1 (ie, the voltage of the anode relative to the cathode) is lower than its conduction voltage, the diode D1 is cut off; when the forward voltage is higher than the conduction voltage, the diode D1 is turned on, allowing current to pass.

[0038] In one embodiment, when the power tube Q works normally, the waveform of the voltage outputted from the first end of the power tube Q is a steamed bun wave of tens to hundreds of volts. When the voltage at the first end of the power tube Q after being divided by the voltage divider unit 21 meets the conduction condition of the diode D1, the diode D1 will be briefly turned on, allowing current to pass through and charge the first capacitor C1; during the conduction period of the diode D1, the first capacitor C1 will be charged to a peak voltage close to the input signal (i.e., the voltage at the first end of the power tube Q after the voltage is divided). Due to the energy storage characteristics of the first capacitor C1, even if the input signal drops, the voltage on the first capacitor C1 will be maintained for a period of time, thereby realizing the peak holding function. After the peak holding, the waveform of the voltage outputted from the first end of the power tube Q is converted from a steamed bun wave voltage to a slowly changing DC voltage.

[0039] Specifically, the first resistor R1 is a discharge resistor, which is used to discharge the voltage of the first capacitor C1. When the peak voltage of the input signal of the first capacitor C1 does not need to be maintained, the first resistor R1 provides a discharge path, allowing the charge on the first capacitor C1 to be slowly released to the ground through the first resistor R1. The resistance value of the first resistor R1 and the capacitance value of the first capacitor C1 jointly determine the discharge time constant, that is, the time required for the voltage on the first capacitor C1 to drop to a certain level. The time constant is determined by the product of the first capacitor C1 and the first resistor R1. The larger the time constant, the slower the voltage on the first capacitor C1 changes and the longer the peak holding time; conversely, the smaller the time constant, the faster the voltage on the first capacitor C1 changes and the shorter the peak holding time.

[0040] It can be understood that the peak voltage in the high voltage sinusoidal wave signal on the first end of the power tube Q is effectively extracted through the peak holding unit 22 and maintained in the form of a DC voltage. By adjusting the peak holding time, it helps to accurately capture the peak voltage, reduce errors, and improve the accuracy of signal processing.

[0041] See also Figure 3 , Figure 3 The third embodiment of the radio frequency power supply circuit provided in the present application is shown in FIG. 1. The radio frequency power supply circuit 100 includes: a power supply module 10 , a first inductor L1 , a power tube Q, a peak detection module 20 and a control module 30 .

[0042] Among them, the first end of the first inductor L1 is connected to the power module 10; the first end of the power tube Q is connected to the second end of the first inductor L1 and coupled to the load, the second end of the power tube Q is grounded, and the control end of the power tube Q is configured to input a radio frequency signal; the peak detection module 20 is connected to the first end of the power tube Q, and the peak detection module 20 is configured to obtain the peak voltage of the first end of the power tube Q; the control module 30 is connected to the peak detection module 20 and the power module 10, and the control module 30 is configured to control the power module 10 to reduce the output voltage when the peak voltage is greater than the first voltage threshold.

[0043] Figure 3 The RF power supply circuit 100 shown in FIG. Figure 2 The main difference of the RF power supply circuit 100 shown in FIG. 1 is that the power detection module 40 and the components added to the RF power supply circuit 100 are added. Therefore, the following mainly describes the power detection module 40 and the components added to the RF power supply circuit 100. For other components in the RF power supply circuit 100, please refer to FIG. Figure 2 The relevant description of the embodiment shown, for example Figure 3 The peak holding unit 22 in FIG. Figure 2 The description of the peak holding unit 22 in FIG. 2 is omitted here.

[0044] In some embodiments, the RF power supply circuit 100 also includes a power detection module 40, which is coupled to the first end of the power tube Q and connected to the control module 30 and the load. The power detection module 40 is configured to obtain the output power of the first end of the power tube Q. The control module 30 is configured to: when the peak voltage is less than the second voltage threshold, control the power supply module 10 to increase the output voltage; or when the output power is less than the power threshold, control the power supply module 10 to increase the output voltage.

[0045] Specifically, after the control module 30 controls the output voltage of the power module 10 to decrease, when the voltage at the first end of the power tube Q is less than the second voltage threshold, the power tube Q enters an undervoltage state, and the control module 30 detects the voltage at the first end of the power tube Q at this time, and calculates the percentage of it being lower than the second voltage threshold; at the same time, the power detection module 40 obtains the voltage V and current I outputted from the first end of the power tube Q, and calculates the power value at this time according to the voltage V and the current I, and the control module 30 obtains the power value as the actual output power of the first end of the power tube Q, and calculates the percentage of it being less than the power threshold; the smaller value of the two percentages is taken, and the power module 10 is controlled to increase the output voltage proportionally according to this percentage, so as to increase the output power until the normal output power is reached. In the adjustment process, the adjustment speed of the overvoltage of the power tube Q is faster than the speed of the undervoltage of the power tube Q.

[0046] In some embodiments, the RF power supply circuit 100 includes: a second capacitor C2, a second inductor L2, a third capacitor C3 and a fourth capacitor C4. The first end of the second capacitor C2 is connected to the first end of the power tube Q, and the second end of the second capacitor C2 is grounded; the first end of the second inductor L2 is connected to the first end of the power end; the first end of the third capacitor C3 is connected to the second end of the second inductor L2, and the second end of the third capacitor C3 is grounded; the first end of the fourth capacitor C4 is connected to the second end of the second inductor L2, and the second end of the fourth capacitor C4 is connected to the load; wherein the power detection module 40 is connected to the second end of the second inductor L2.

[0047] Specifically, the second capacitor C2, the second inductor L2 and the third capacitor C3 constitute a first matching network, which is used to achieve a good match between the output impedance of the power tube Q and the load impedance to ensure that the maximum power is transmitted to the load end. The second capacitor C2 and the third capacitor C3 are used to adjust the capacitive part in the matching network, and the second inductor L2 is used to adjust the inductive part of the matching network; the fourth capacitor C4 mainly functions to isolate the DC component and allow the AC signal (i.e., the RF signal) to pass.

[0048] In one application scenario, the rated maximum operating voltage of the power tube Q is set to 150V, and the first voltage threshold of the power tube Q is set to 130V. If the actual operating voltage of the power tube Q obtained by the control module 30 is 140V, and an overvoltage occurs, the control module 30 calculates the overvoltage percentage to be 7.7%. If the output voltage of the power module 10 is 40V at this time, the control module 30 will control the power module 10 to reduce the output voltage by 7.7%. After the first adjustment is completed, the operating voltage of the power tube Q is measured again. If the actual operating voltage of the power tube Q is 132V at this time, that is, the overvoltage percentage is 1.5%, then the output voltage of the power module 10 will continue to be reduced by 1.5%, and it will be adjusted successively until the operating voltage of the power tube Q is less than or equal to the first voltage threshold.

[0049] When the load state returns to normal, after the above-mentioned voltage reduction adjustment process, the output power of the power tube Q is less than the power threshold at this time, and the output power of the power tube Q needs to be restored to normal at this time. The specific method is: if the actual working voltage of the power tube Q is 100V at this time, the power threshold is set to 1KW, and the actual operating power is 900W, then the undervoltage percentage of the power tube Q is 23%, and the underpower percentage is 10%, then the power threshold takes the smaller percentage of the two, that is, 10%, and the control module 30 controls the power module 10 to increase the output voltage by half of the underpower percentage of 10%, that is, 5%. After this adjustment, the control module 30 obtains the working voltage and output power of the power tube Q again. If the working voltage of the power tube Q is 108V at this time, and the actual operating power is 960W, that is, the undervoltage percentage is 17%, and the underpower percentage is 4%, then take the smaller percentage of the two, that is, 4%, then the control module 30 controls the output voltage of the power module 10 to increase by half of the underpower percentage, that is, 2%, and the output voltage of the power module 10 is increased again. After multiple rounds of adjustment, the power threshold is finally reached.

[0050] It can be understood that, through the second capacitor C2, the second inductor L2, and the third capacitor C3, a good match between the output impedance of the power tube Q and the load impedance is achieved, thereby reducing the risk of load mismatch; the fourth capacitor C4 can protect the load end from the influence of the DC voltage to ensure the safe operation of the load end; the output power of the power tube Q is monitored and adjusted in real time through the power detection module 40 and the control module 30, realizing the undervoltage / underpower protection of the power tube Q, ensuring the normal operating power of the power tube Q, thereby improving the reliability and stability of the entire circuit.

[0051] See also Figure 4 , Figure 4 1 is a schematic diagram of the structure of the fourth embodiment of the radio frequency power supply circuit provided in the present application. The radio frequency power supply circuit 100 comprises: a power supply module 10 , a first inductor L1 , a power tube Q, a peak detection module 20 and a control module 30 .

[0052] Among them, the first end of the first inductor L1 is connected to the power module 10; the first end of the power tube Q is connected to the second end of the first inductor L1 and coupled to the load, the second end of the power tube Q is grounded, and the control end of the power tube Q is configured to input a radio frequency signal; the peak detection module 20 is connected to the first end of the power tube Q, and the peak detection module 20 is configured to obtain the peak voltage of the first end of the power tube Q; the control module 30 is connected to the peak detection module 20 and the power module 10, and the control module 30 is configured to control the power module 10 to reduce the output voltage when the peak voltage is greater than the first voltage threshold.

[0053] Figure 4 The RF power supply circuit 100 shown in FIG. Figure 3 The main difference of the RF power supply circuit 100 shown in FIG. 1 is that the description of the components added to the RF power supply circuit 100 is added. Therefore, the following mainly describes the components added to the RF power supply circuit 100. For other components in the RF power supply circuit 100, please refer to FIG. Figure 3 The relevant description of the embodiment shown, for example Figure 4 The second capacitor C2, the second inductor L2 and the third capacitor C3 in FIG. Figure 3 The description of the second capacitor C2, the second inductor L2 and the third capacitor C3 will not be repeated here.

[0054] In some embodiments, the RF power supply circuit 100 further includes: a fifth capacitor C5 and a sixth capacitor C6. The first end of the fifth capacitor C5 is connected to the power module 10, the second end of the fifth capacitor C5 is grounded, and the first end of the fifth capacitor C5 is configured to input the power supply voltage VCC; the first end of the sixth capacitor C6 is connected to the power module 10, and the second end of the sixth capacitor C6 is grounded.

[0055] Specifically, the fifth capacitor C5 and the sixth capacitor C6 serve as filter capacitors, which can effectively filter out the AC component (ie, ripple) in the voltage output by the power module 10, so that the voltage supplied to the power tube Q is more stable and smooth.

[0056] In some embodiments, the RF power supply circuit 100 further includes: a seventh capacitor C7, an eighth capacitor C8, a third inductor L3 and a ninth capacitor C9. The first end of the seventh capacitor C7 is configured to input a RF signal; the first end of the eighth capacitor C8 is connected to the second end of the seventh capacitor C7, and the second end of the eighth capacitor C8 is grounded; the first end of the third inductor L3 is connected to the second end of the seventh capacitor C7; the first end of the ninth capacitor C9 is connected to the second end of the third inductor L3, and the second end of the ninth capacitor C9 is grounded.

[0057] Specifically, the eighth capacitor C8, the third inductor L3 and the ninth capacitor C9 constitute a second matching network, which is used to achieve impedance matching between the RF signal source and the power tube Q, reduce signal loss during transmission, and thus reduce the risk of power tube mismatch; the seventh capacitor C7 is used to isolate the DC part of the RF signal and reduce signal interference.

[0058] In some embodiments, the RF power supply circuit 100 further includes: a second resistor R2, a tenth capacitor C10, a third resistor R3, a fourth resistor R4, and an eleventh capacitor C11. The first end of the second resistor R2 is connected to the second end of the third inductor L3, and the second end of the second resistor R2 is connected to the control end of the power tube Q; the first end of the tenth capacitor C10 is connected to the first end of the power tube Q; the first end of the third resistor R3 is connected to the second end of the tenth capacitor C10, and the second end of the third resistor R3 is connected to the control end of the power tube Q; the first end of the fourth resistor R4 is connected to the control end of the power tube Q; the first end of the eleventh capacitor C11 is connected to the second end of the fourth resistor R4, and the second end of the eleventh capacitor C11 is grounded.

[0059] Specifically, the second resistor R2 is used to limit the current flowing through the gate of the power tube Q to prevent the power tube Q from being damaged due to excessive current. The signal can also be adjusted to a certain extent to make it more suitable for the amplification characteristics of the power tube Q; the tenth capacitor C10 and the third resistor R3 constitute a negative feedback network of the power tube Q, which is used to stabilize the working point of the power tube Q; the fourth resistor R4 and the eleventh capacitor C11 constitute a low-pass filter, which is used to filter out the low-frequency components in the radio frequency signal.

[0060] In some embodiments, the RF power supply circuit 100 further includes: a fifth resistor R5, a sixth resistor R6, a seventh resistor R7, a twelfth capacitor C12, a voltage regulator tube D2, an eighth resistor R8 and a thirteenth capacitor C13. The first end of the fifth resistor R5 is connected to the power module 10; the first end of the sixth resistor R6 is connected to the second end of the fifth resistor R5; the first end of the seventh resistor R7 is connected to the second end of the sixth resistor R6, and the second end of the seventh resistor R7 is connected to the control end of the power tube Q; the first end of the twelfth capacitor C12 is connected to the second end of the fifth resistor R5, and the second end of the twelfth capacitor C12 is grounded; the cathode of the voltage regulator tube D2 is connected to the first end of the sixth resistor R6, and the second end of the voltage regulator tube D2 is grounded; the first end of the eighth resistor R8 is connected to the second end of the sixth resistor R6, and the second end of the eighth resistor R8 is grounded; the first end of the thirteenth capacitor C13 is connected to the second end of the sixth resistor R6, and the second end of the thirteenth capacitor C13 is grounded.

[0061] Specifically, the fifth resistor R5, the sixth resistor R6, and the seventh resistor R7 form a voltage divider circuit to divide the output voltage of the power module 10, and stabilize the voltage through the voltage regulator D2. By adjusting the resistance ratio of the voltage divider resistors, the output voltage can be accurately controlled, so as to set a suitable output voltage as the bias voltage of the power tube Q and set the static operating point of the power tube Q.

[0062] A technical solution adopted in the present application is: adopting a radio frequency power supply circuit, which includes: a power supply module; a first inductor, the first end of the first inductor is connected to the power supply module; a power tube, the first end of the power tube is connected to the second end of the first inductor and coupled to the load, the second end of the power tube is grounded, and the control end of the power tube is configured to input a radio frequency signal; a peak detection module, connected to the first end of the power tube, the peak detection module is configured to obtain the peak voltage of the first end of the power tube; a control module, connecting the peak detection module and the power supply module, the control module is configured to control the power supply module to reduce the output voltage when the peak voltage is greater than the first voltage threshold. Through the above method, when the power tube is over-voltage, the output voltage of the power supply module is reduced, thereby reducing the working voltage of the power tube and realizing overvoltage protection; when the power tube is under-voltage or under-power, the output voltage of the power supply module is increased, thereby increasing the operating power of the power tube; it can effectively reduce the mismatch risk of the power tube, and can realize overvoltage protection and under-voltage / under-power protection of the power tube.

[0063] See also Figure 5 , Figure 5 1 is a schematic diagram of the structure of an electronic device according to an embodiment of the present application. The electronic device 1000 includes a radio frequency power supply circuit 100, and the radio frequency power supply circuit 100 is the radio frequency power supply circuit 100 described above, which will not be described in detail here.

[0064] In the several embodiments provided in this application, it should be understood that the disclosed methods and devices can be implemented in other ways. For example, the device implementation described above is only illustrative, for example, the division of the modules or units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed.

[0065] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the present embodiment.

[0066] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0067] The above description is only an implementation method of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A radio frequency power supply circuit, characterized in that: The radio frequency power supply circuit comprises: Power module; A first inductor, wherein a first end of the first inductor is connected to the power module; A power tube, wherein a first end of the power tube is connected to the second end of the first inductor and coupled to a load, a second end of the power tube is grounded, and a control end of the power tube is configured to input a radio frequency signal; A peak detection module connected to the first end of the power tube, the peak detection module being configured to obtain a peak voltage of the first end of the power tube; A control module is connected to the peak detection module and the power module, and the control module is configured to control the power module to reduce the output voltage when the peak voltage is greater than a first voltage threshold.

2. The radio frequency power supply circuit according to claim 1, characterized in that: The peak detection module comprises: A voltage dividing unit connected to the first end of the power tube, the voltage dividing unit being configured to divide the voltage of the first end of the power tube; A peak holding unit is connected to the voltage dividing node of the voltage dividing unit and the control module, and the peak holding unit is configured to hold the peak value of the voltage after the voltage is divided by the voltage dividing unit, so that the control module detects the peak value of the voltage after the voltage is divided, thereby determining the peak voltage of the first end of the power tube.

3. The radio frequency power supply circuit according to claim 2, characterized in that: The peak holding unit comprises: a diode, wherein an anode of the diode is connected to the voltage dividing node of the voltage dividing unit, and a cathode of the diode is connected to the control module; A first capacitor, wherein a first end of the first capacitor is connected to the cathode of the diode, and a second end of the first capacitor is grounded; A first resistor, wherein a first end of the first resistor is connected to a first end of the first capacitor, and a second end of the first resistor is grounded.

4. The radio frequency power supply circuit according to claim 1, characterized in that: The RF power supply circuit further includes a power detection module, coupled to the first end of the power tube and connected to the control module and the load, wherein the power detection module is configured to obtain the output power of the first end of the power tube, and the control module is configured to: When the peak voltage is less than a second voltage threshold, controlling the power module to increase the output voltage; or When the output power is less than a power threshold, the power module is controlled to increase the output voltage.

5. The radio frequency power supply circuit according to claim 4, characterized in that: The radio frequency power supply circuit comprises: A second capacitor, wherein a first end of the second capacitor is connected to the first end of the power tube, and a second end of the second capacitor is grounded; a second inductor, wherein a first end of the second inductor is connected to a first end of the power end; a third capacitor, wherein a first end of the third capacitor is connected to the second end of the second inductor, and a second end of the third capacitor is grounded; a fourth capacitor, wherein a first end of the fourth capacitor is connected to the second end of the second inductor, and a second end of the fourth capacitor is connected to the load; Wherein, the power detection module is connected to the second end of the second inductor.

6. The radio frequency power supply circuit according to claim 1, characterized in that: The radio frequency power supply circuit comprises: a fifth capacitor, wherein a first end of the fifth capacitor is connected to the power module, a second end of the fifth capacitor is grounded, and a first end of the fifth capacitor is configured to input a power supply voltage; A sixth capacitor, wherein a first end of the sixth capacitor is connected to the power module, and a second end of the sixth capacitor is grounded.

7. The radio frequency power supply circuit according to claim 1, characterized in that: The radio frequency power supply circuit also includes: a seventh capacitor, wherein a first end of the seventh capacitor is configured to input the radio frequency signal; an eighth capacitor, wherein a first end of the eighth capacitor is connected to the second end of the seventh capacitor, and a second end of the eighth capacitor is grounded; a third inductor, wherein a first end of the third inductor is connected to a second end of the seventh capacitor; A ninth capacitor, wherein a first end of the ninth capacitor is connected to the second end of the third inductor, and a second end of the ninth capacitor is grounded.

8. The radio frequency power supply circuit according to claim 7, characterized in that: The radio frequency power supply circuit also includes: A second resistor, wherein a first end of the second resistor is connected to a second end of the third inductor, and a second end of the second resistor is connected to a control end of the power tube; a tenth capacitor, a first end of the tenth capacitor being connected to the first end of the power tube; a third resistor, wherein a first end of the third resistor is connected to the second end of the tenth capacitor, and a second end of the third resistor is connected to the control end of the power tube; a fourth resistor, a first end of which is connected to the control end of the power tube; An eleventh capacitor, wherein a first end of the eleventh capacitor is connected to the second end of the fourth resistor, and a second end of the eleventh capacitor is grounded.

9. The radio frequency power supply circuit according to claim 1, characterized in that: The radio frequency power supply circuit also includes: a fifth resistor, a first end of which is connected to the power module; a sixth resistor, a first end of the sixth resistor being connected to the second end of the fifth resistor; a seventh resistor, wherein a first end of the seventh resistor is connected to a second end of the sixth resistor, and a second end of the seventh resistor is connected to a control end of the power tube; a twelfth capacitor, a first end of the twelfth capacitor being connected to the second end of the fifth resistor, and a second end of the twelfth capacitor being grounded; A voltage regulator tube, wherein a cathode of the voltage regulator tube is connected to a first end of the sixth resistor, and a second end of the voltage regulator tube is grounded; an eighth resistor, a first end of the eighth resistor being connected to the second end of the sixth resistor, and a second end of the eighth resistor being grounded; A thirteenth capacitor, a first end of the thirteenth capacitor is connected to the second end of the sixth resistor, and a second end of the thirteenth capacitor is grounded.

10. An electronic device, characterized in that: The electronic device comprises the radio frequency power supply circuit as described in any one of claims 1-9.

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