High-voltage direct-current power supply with bidirectional energy control characteristic for ion implanter

Abstract

The invention discloses a high-voltage direct-current power supply with a bidirectional energy control characteristic for an ion implanter. The high-voltage direct-current power supply comprises a voltage source, a current source and a current limiting unit, the current source and the current limiting unit are connected in series and then are integrally connected in parallel with the voltage source for external output. According to the high-voltage direct-current power supply with the bidirectional energy control characteristic, the current-limiting resistor in the power supply is effectively designed, so that the power supply has bidirectional current output capability, and bidirectional functional characteristics of outputting energy and absorbing energy can be realized; the current of the current source or the voltage of the voltage source can be flexibly set; the current source can be externally controlled to adjust current according to needs; the voltage source can be externally controlled to adjust the voltage according to needs.

Description

Technical Field

[0001] The present invention mainly relates to the technical field of ion implanters, and in particular to a high-voltage direct current power supply with bidirectional energy control characteristics for ion implanters. Background Art

[0002] In an ion implanter, a high-voltage power supply is usually required to adjust and control the ion implantation process. The high-voltage output of the high-voltage power supply is often connected to a fixed load. The load can be a conductive material with capacitive or resistive characteristics such as a plate or electrode. Usually, the high-voltage output current of the high-voltage power supply is sent to the load, and energy is consumed on the load.

[0003] However, in an ion implanter, for certain loads such as plates, the high voltage power supply usually outputs energy to the load, so the high voltage power supply usually only has the function of high voltage energy output. However, when the load carries ions during the ion implantation process, it is necessary to ensure that the output voltage of the high voltage power supply is stable. Due to the presence of positive ions, the load needs to reversely transmit energy to the high voltage power supply, and at this time the high voltage power supply needs to have the characteristic of absorbing energy. Summary of the invention

[0004] In view of the technical problems existing in the prior art, the present invention provides a high-voltage direct current power supply with bidirectional energy control characteristics for an ion implanter, which can realize bidirectional functional characteristics of outputting energy and absorbing energy.

[0005] In order to solve the above technical problems, the technical solution proposed by the present invention is:

[0006] A high-voltage direct current power supply with bidirectional energy control characteristics for an ion implanter comprises a voltage source, a current source and a current limiting unit. After the current source and the current limiting unit are connected in series, the whole is connected in parallel with the voltage source for external output.

[0007] Preferably, the current source is a controlled current source or a constant current source or a programmable power supply.

[0008] Preferably, the voltage source is a controlled voltage source, a constant voltage source or a programmable power source.

[0009] Preferably, the current limiting unit is a current limiting resistor.

[0010] Preferably, the high-voltage direct current power supply is externally connected to a load that is one of a resistive load, a capacitive load and an inductive load, or a combination of any types of loads.

[0011] Preferably, the high-voltage direct current power supply is grounded or ungrounded to a load connected to the outside.

[0012] Preferably, the high-voltage DC power supply is externally connected to an electrode plate.

[0013] Preferably, a positive voltage or a negative voltage is applied to the electrode plate.

[0014] Compared with the prior art, the advantages of the present invention are:

[0015] The high-voltage direct current power supply with bidirectional energy control characteristics of the present invention can effectively achieve bidirectional current output capability through the design of the current limiting resistor inside the power supply, and can realize the bidirectional functional characteristics of outputting energy and absorbing energy; the present invention can flexibly set the current source current or the voltage source voltage; the current source can be externally controlled to adjust the current as needed; the voltage source can be externally controlled to adjust the voltage as needed; the high-voltage power supply can be in the form of an integral device or multiple devices consisting of a current source, a voltage source, and a current limiting resistor. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is one of the topological structure diagrams of the high voltage DC power supply of the present invention in an embodiment.

[0017] Figure 2 This is the second topological structure diagram of the high voltage DC power supply of the present invention in an embodiment.

[0018] Figure 3 This is one of the topological structure diagrams (plate load) of the high voltage DC power supply of the present invention in an embodiment.

[0019] Figure 4 This is the second topological structure diagram (plate load) of the high voltage DC power supply of the present invention in an embodiment. DETAILED DESCRIPTION

[0020] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0021] like Figure 1 and Figure 2 As shown, a high-voltage direct current power supply with bidirectional energy control characteristics for an ion implanter according to an embodiment of the present invention comprises a high-voltage power supply working as a current source, a high-voltage power supply working as a voltage source, and a current limiting unit (such as a resistor);

[0022] Figure 1 In the figure, the dotted box represents a high-voltage DC power supply with bidirectional energy control characteristics; the current source and the current limiting resistor are connected in series, and then connected in parallel with the voltage source, and finally output to the outside;

[0023] The current source can be a controlled current source or a constant current source, or a programmable power supply. Usually, a programmable power supply can work in voltage source mode or current source mode, so the programmable power supply can be set as a current source;

[0024] The voltage source can be a controlled voltage source or a constant voltage source, or a programmable power supply. Usually, a programmable power supply can work in a voltage source mode or a current source mode, so the programmable power supply can be set as a voltage source;

[0025] Current limiting resistors are high voltage power resistors that are connected in series with current sources to absorb additional energy from the voltage source or load.

[0026] Load: A load externally connected to a high-voltage DC power supply, which may be a resistive load, a capacitive load, an inductive load, or a combination of any types of loads, and may be an electrode plate, etc.; one end of the load may be grounded or not; in particular, a voltage may be applied to the electrode plate, which may repel positively charged ions when a positive voltage is applied, or attract positively charged ions when a negative voltage is applied, thereby forming a current in the power supply circuit.

[0027] Figure 1 The high voltage DC power supply structure is shown in Figure 1: The directions of the current source and voltage source inside it are as follows: Figure 1 As shown, this design method is a special design of the high-voltage DC power supply, that is, the voltage source provides output current while maintaining the output voltage. According to the KCL node current method circuit principle, the output current of the voltage source is composed of the current source current and the current to the load.

[0028] Figure 2 In the figure, the dotted box represents a high-voltage DC power supply with bidirectional energy control characteristics; the current source and the current limiting resistor are connected in series, and then connected in parallel with the voltage source, and finally output to the outside. Its composition and structure are similar to Figure 1 same.

[0029] Figure 2 The high voltage DC power supply structure is shown in the figure: the directions of the current source and voltage source inside it are as follows: Figure 2 As shown, this design method is a special design of the high-voltage DC power supply, that is, the voltage source provides output current while maintaining the output voltage. According to the KCL node current method circuit principle, the input current of the voltage source is composed of the current source current and the current to the load.

[0030] by Figure 2 Taking the power supply structure as an example, connect the electrode plate load and mark the relevant voltage and current signals, such as Figure 3 shown.

[0031] The working principle of the power supply is described as follows:

[0032] The voltage source outputs a voltage -Us, which keeps the plate load voltage constant;

[0033] In ion implantation applications, when the charge on the plate is positive, the current is as follows: Figure 3The voltage source flows out of the load in the direction shown. At this time, the voltage source input current is:

[0034] I S =I C +I L (1)

[0035] When the charge on the plate is negative, the current Figure 4 The voltage source flows into the load in the direction shown. At this time, the voltage source input current is:

[0036] I S =I C -I L (2)

[0037] Because Is ≥ 0; when Ic takes a fixed current, I L Positive and negative output currents can be output, which means that from the perspective of the plate load, the overall high-voltage power supply has a bidirectional energy control characteristic.

[0038] Assuming that the output voltage range of the voltage source is 0~-20kV and the maximum output current Is range is 0~10mA, then:

[0039] Example 1: Set the voltage source voltage to -10kV. If Ic is set to 2mA, the load voltage is -10kV. Is is adjustable from 0 to 10mA. According to formulas (1)-(2), the load current I L (The current direction outflowing from the load is defined as the positive direction) The adjustable current range is -2mA to +8mA, and the current output capacity is asymmetric at this time;

[0040] Example 2: Set the voltage source voltage to -10kV. If Ic is set to 5mA, the load voltage is -10kV. Is is adjustable from 0 to 10mA. According to formulas (1)-(2), the load current I L (The current direction out of the load is defined as the positive direction) The adjustable current range is -5mA to +5mA, and the current output capacity is asymmetric at this time;

[0041] Example 3: Set the voltage source voltage to -20kV. If Ic is set to 2mA, the load voltage is -20kV. Is is adjustable from 0 to 10mA. According to formulas (1)-(2), the load current I L (The current direction outflowing from the load is defined as the positive direction) The adjustable current range is -2mA to +8mA, and the current output capacity is asymmetric at this time;

[0042] Example 4: Set the voltage source voltage to -20kV. If Ic is set to 5mA, the load voltage is -20kV. Is is adjustable from 0 to 10mA. According to formulas (1)-(2), the load current I L(The current direction outflowing from the load is defined as the positive direction) The adjustable current range is -5mA to +5mA, at which time the current output capacity is symmetrical;

[0043] Therefore, by adjusting the current source to set the Ic value, the current output range and symmetry to the load are adjusted.

[0044] The high-voltage direct current power supply with bidirectional energy control characteristics of the present invention can effectively achieve bidirectional current output capability through the design of the current limiting resistor inside the power supply, and can realize the bidirectional functional characteristics of outputting energy and absorbing energy; the present invention can flexibly set the current source current or the voltage source voltage; the current source can be externally controlled to adjust the current as needed; the voltage source can be externally controlled to adjust the voltage as needed; the high-voltage power supply can be in the form of an integral device or multiple devices consisting of a current source, a voltage source, and a current limiting resistor.

[0045] The above are only preferred embodiments of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should be regarded as the protection scope of the present invention.

Claims

1. A high voltage DC power supply with bidirectional energy control characteristics for an ion implanter, characterized in that: It includes a voltage source, a current source and a current limiting unit; after the current source and the current limiting unit are connected in series, the whole is connected in parallel with the voltage source for external output.

2. The high voltage DC power supply with bidirectional energy control characteristics for ion implantation apparatus according to claim 1, characterized in that: The current source is a controlled current source, a constant current source or a programmable power source.

3. The high voltage DC power supply with bidirectional energy control characteristics for ion implantation equipment according to claim 1, characterized in that: The voltage source is a controlled voltage source, a constant voltage source or a programmable power source.

4. The high voltage DC power supply with bidirectional energy control characteristics for ion implantation equipment according to claim 1, 2 or 3, characterized in that: The current limiting unit is a current limiting resistor.

5. The high voltage DC power supply with bidirectional energy control characteristics for ion implantation equipment according to claim 1, 2 or 3, characterized in that: The high-voltage direct current power supply is externally connected to a load that is one of a resistive load, a capacitive load, and an inductive load, or a combination of any types of loads.

6. The high voltage DC power supply with bidirectional energy control characteristics for ion implantation equipment according to claim 5, characterized in that: The load connected to the external side of the high-voltage direct current power supply is grounded or not grounded.

7. The high voltage DC power supply with bidirectional energy control characteristics for ion implantation equipment according to claim 1, 2 or 3, characterized in that: The high-voltage direct current power source is externally connected to the electrode plate.

8. The high voltage DC power supply with bidirectional energy control characteristics for ion implantation equipment according to claim 7, characterized in that: A positive voltage or a negative voltage is applied to the electrode plates.

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