Method and apparatus for gas line matrix and interchange assembly

Abstract

Various embodiments of the present technology may provide a gas line matrix and interchange assembly. Wherein the interchange assembly includes a first plurality of gas lines, where each gas line includes a first end and a second end, and where the first ends of the first plurality of gas lines are aligned on a first axis, the second ends of the first plurality of gas lines are aligned on a second axis, and the first axis is perpendicular to the second axis.

Description

Technical Field

[0001] The present invention generally relates to methods and apparatus for gas line matrices and interchange assemblies. More particularly, the present invention relates to a gas line assembly having a set of sections aligned on a single axis. Background Art

[0002] Semiconductor equipment requires routing various source containers and process gases to the reaction chambers through a valve manifold with multiple ports. For different processes, a given source container will need to be routed to different valve manifold ports, requiring different gas lines. Since these gas lines are heated, this can result in a large number of unique gas lines and heater jackets, resulting in a complex and confusing gas line system. Summary of the invention

[0003] Various embodiments of the present technology may provide a gas line matrix and an interchange assembly, wherein the interchange assembly includes a first plurality of gas lines, wherein each gas line includes a first end and a second end, and wherein the first ends of the first plurality of gas lines are aligned on a first axis, the second ends of the first plurality of gas lines are aligned on a second axis, and the first axis is perpendicular to the second axis.

[0004] According to one aspect, a device includes: a gas pipeline matrix; and an interchange assembly connected to the gas pipeline matrix, wherein the interchange assembly includes a first plurality of gas pipelines, wherein each gas pipeline includes a first end and a second end; wherein: the first ends of the first plurality of gas pipelines are aligned on a first axis, the second ends of the first plurality of gas pipelines are aligned on a second axis, and the first axis is perpendicular to the second axis.

[0005] In one embodiment, the gas line matrix includes a second plurality of gas lines, and each gas line from the second plurality of gas lines is coupled to a gas line from the first plurality of gas lines.

[0006] In one embodiment, each gas line from the first plurality of gas lines includes at least one right angle.

[0007] In one embodiment, each gas line from the first plurality of gas lines includes a first portion coupled to a second portion by a connector, and the first portion includes a first end and the second portion includes a second end.

[0008] In one embodiment, the first portion is parallel to the second axis and perpendicular to the first axis.

[0009] In one embodiment, the second portion is parallel to the first axis and perpendicular to the second axis.

[0010] In one embodiment, the first portion is Z-shaped and the second portion is L-shaped.

[0011] In one embodiment, the first portion is coupled to the second portion by a connector.

[0012] In one embodiment, each second portion has a different length than the other second portions.

[0013] According to another aspect, a method for assembling a gas line interchange device includes: selecting a first gas line section from a plurality of first sections based on a first distance, wherein each first section has a first end and a second end; selecting a second gas line section from a plurality of second sections based on a second distance, wherein each second section has a length different from that of other second sections, and wherein each second section has a first end and a second end connecting the second end of the first section to the first end of the second section; selecting a third gas line section from a plurality of first sections based on a third distance; selecting a fourth gas line section from a plurality of second sections based on a fourth distance; and connecting the second end of the third section to the first end of the fourth section; wherein the first ends of the first and third sections are aligned on a first axis; and wherein the second ends of the second and fourth sections are aligned on a second axis perpendicular to the first axis.

[0014] In one embodiment, the method further comprises connecting a first end of a first gas line section to the gas line matrix and connecting a second end of a second gas line section to the vessel port.

[0015] In one embodiment, the first distance is a horizontal distance between the first axis and the container port.

[0016] In one embodiment, the second distance is a vertical distance between the second axis and the second end of the selected first gas line portion.

[0017] According to yet another aspect, a system includes: a reaction chamber; a gas line matrix connected to the reaction chamber; an interchange assembly connected to the gas line matrix, wherein the interchange assembly includes a first plurality of gas pipelines, wherein each gas line includes a first end and a second end; wherein the first ends of the first plurality of gas pipelines are aligned on a first axis and the second ends of the first plurality of gas pipelines are aligned on a second axis, and wherein the first axis is perpendicular to the second axis; a gas line matrix connected between the reaction chamber and the interchange assembly, wherein the gas line matrix includes a second plurality of gas pipelines, and each gas line from the second plurality of gas pipelines is connected to a gas pipeline from the first plurality of gas pipelines; and a plurality of containers connected to the interchange assembly.

[0018] In one embodiment, each gas line from the first plurality of gas lines includes at least one right angle.

[0019] In one embodiment, each gas line from the first plurality of gas lines includes a first portion coupled to a second portion by a connector, and the first portion includes a first end and the second portion includes a second end.

[0020] In one embodiment, the first portion is parallel to the second axis and perpendicular to the first axis, wherein the second portion is parallel to the first axis and perpendicular to the second axis.

[0021] In one embodiment, each second portion has a different length than the other second portions.

[0022] In one embodiment, the first portion is Z-shaped and the second portion is L-shaped.

[0023] In one embodiment, the first portion is coupled to the second portion via a first connector, the first portion is coupled to the gas matrix via a second connector, and the second portion is coupled to a container from the plurality of containers via a third connector. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] A more complete understanding of the present technology may be obtained by referring to the detailed description when considered in conjunction with the following illustrative drawings.In the following drawings, like reference numerals refer to like elements and steps throughout the drawings.

[0025] Figure 1 A first view of a system according to various embodiments of the present technology is representatively shown;

[0026] Figure 2 representatively illustrating a second view of a system in accordance with various embodiments of the present technology;

[0027] Figure 3 representatively illustrating a top view of a first portion used in a system according to various embodiments of the present technology;

[0028] Figure 4 representatively illustrating a top view of a set of second parts used in a system according to various embodiments of the present technology; and

[0029] Figure 5 and Figure 6 is a perspective view of gas lines in an interchange assembly according to various embodiments of the present technology. DETAILED DESCRIPTION

[0030] The present technology can be described in terms of functional block components and various processing steps. Such functional blocks can be implemented by any number of components configured to perform a specified function and achieve various results. For example, the present technology can use various reaction chambers, valves and valve manifolds, gas pipeline connectors and containers.

[0031] refer to Figure 1, the exemplary system 100 may include reaction chambers 105, valve manifolds 110, source containers 125, gas pipeline matrix 115, and interchange assembly 120. In the exemplary embodiment, system 100 includes a first reaction chamber 105 (a) and a second reaction chamber 105 (b). In addition, each reaction chamber 105 is coupled to a corresponding valve manifold 110. For example, the first reaction chamber 105 (a) is coupled to the first valve manifold 110 (a), and the second reaction chamber 105 (b) is coupled to the second valve manifold 110 (b). Each valve manifold 110 may include a plurality of ports for connecting to the gas pipeline matrix 115.

[0032] In various embodiments, the source container 125 can be configured to contain or hold solid or liquid chemicals used during semiconductor processing. In various embodiments, the source container can be formed of a metal material, such as stainless steel, a metal alloy, etc. In an exemplary embodiment, the system 100 may include a plurality of source containers, such as a first source container 125 (a), a second source container 125 (b), a third source container 125 (c), a fourth source container 125 (d), and a fifth source container 125 (e). In various embodiments, the system 100 may include any desired number of source containers.

[0033] In addition, each source container 125 may include or be coupled to a corresponding container port 250. For example, the first source container 125 (a) may be coupled to or include a first container port 250 (a), the second source container 125 (b) may be coupled to or include a second container port 250 (b), the third source container 125 (c) may be coupled to or include a third container port 250 (c), the fourth source container 125 (d) may be coupled to or include a fourth container port 250 (d), and the fifth source container 125 (e) may be coupled to or include a fifth container port 250 (e). In an exemplary embodiment, the container ports 250 are aligned on the second axis 205. The container ports 250 may include fittings, gaskets, or any other suitable couplings.

[0034] In various embodiments, reference Figure 2 and Figure 3 , the interchange assembly 120 may include a first plurality of gas pipelines 210. The first plurality of gas pipelines 210 may be coupled to the gas matrix 115 via a plurality of connectors 130, such as a first connector 130(a), a second connector 130(b), a third connector 130(c), a fourth connector 130(d), and a fifth connector 130(e). In some embodiments, the connectors 130 may include gaskets, fittings, or any other suitable connectors. In an exemplary embodiment, the plurality of connectors 130 are aligned on the first axis 200. In addition, each connector 130 is connected to only one gas pipeline 210 in the first plurality of gas pipelines.

[0035] Each gas line from the first plurality of gas lines may include a first portion 215 and a second portion 220. For example, the first gas line 210(a) may include a first portion 215(a) and a second portion 220(a), the second gas line 210(b) may include a first portion 215(b) and a second portion 220(b), the third gas line 210(c) may include a first portion 215(c) and a second portion 220(c), the fourth gas line 210(d) may include a first portion 215(d) and a second portion 220(d), and the fifth gas line 210(e) may include a first portion 215(e) and a second portion 220(e).

[0036] In various embodiments, the first portion 215 may include a first end 225 and a second end 230. The first end 225 may be coupled to the gas matrix 115. The second end 230 may be coupled to the second portion 220. The first portion 215 may be coupled to the second portion 220 via a connector. The connector may be any suitable pipe connector or fitting.

[0037] In various embodiments, the second portion 220 may include a first end 235 and a second end 240. The first end 235 of the second portion 220 may be coupled to the second end 230 of the first portion 215. The second end 240 may be coupled to a single source container 125 from the plurality of source containers 125 via a container port 250. For example, the second end 240 may include a gasket or fitting connected to the container port 250. Thus, the second end 240 of the second portion 220 will be aligned on the second axis 205.

[0038] In an exemplary embodiment, the second portion 200 may include at least one bend. For example, the second portion 220 may include a right angle. In an exemplary embodiment, the second portion is L-shaped, for example, Figure 4-6 shown.

[0039] Thus, each gas line from the first plurality of gas lines may be defined by a portion spanning between a first end 215 of the first portion and a second end 240 of the second portion.

[0040] In various embodiments, the first portion 215 can include at least two bends. For example, the first portion 215 can include two right angles. In an exemplary embodiment, the first portion 215 is Z-shaped, for example, Figure 3 , 5 6 . In addition, at least a portion of the first portion 215 may be arranged perpendicular to the second portion 220 .

[0041] In addition, the first portion 215 may be arranged perpendicular to the first axis 200 and parallel to the second axis 205. The second portion 220 may be arranged parallel to the first axis 200 and perpendicular to the second axis 205.

[0042] In various embodiments, the first end 225 of the first portion 215 is connected to the connection joint 130. For example, the portion 215(a) can be connected to the first connection joint 130(a), the portion 215(b) can be connected to the second connection joint 130(b), the portion 215(c) can be connected to the third connection joint 130(c), the portion 215(d) can be connected to the fourth connection joint 130(d), and the portion 215(e) can be connected to the fifth connection joint 130(e).

[0043] In various embodiments, the second end 240 of the second portion 220 is connected to a source container. For example, portion 220(a) may be connected to a first source container 125(a), portion 220(b) may be connected to a second source container 125(b), portion 220(c) may be connected to a third source container 125(c), portion 220(d) may be connected to a fourth source container 220(d), and portion 220(e) may be connected to a fifth source container 220(e). The interchange assembly 120 may be connected to the source containers 125 via any number or type of pipe connectors or fittings.

[0044] In an exemplary embodiment, referring to Figure 4 , each second portion 220 has a length different from the other second portions. For example, portion 220(a) has a first length L1, portion 220(b) has a second length L2, portion 220(c) has a third length L3, portion 220(d) has a fourth length L4, and portion 220(e) has a fifth length L5, wherein L1≠L2≠L3≠L4≠L5.

[0045] In various embodiments, the gas line matrix 115 may include a second plurality of gas lines connected to desired connection junctions 130 based on the type of chemistry required for a particular reaction chamber 105. Thus, each gas line from the second plurality of gas lines is coupled to a single gas line 210 from the first plurality of gas lines.

[0046] In various embodiments, a method for assembling a gas line interchange device may include selecting a first gas line portion (e.g., 210(a)) from a plurality of first portions 300 based on a first distance. The first distance may be a horizontal distance between the first axis 200 and a container port 250 of a desired source container 125. For example, a shorter distance would require a shorter first gas line portion 210, while a longer distance would require a longer first gas line portion 210.

[0047] The method may further include connecting the first end 225 of the first portion to a desired connection fitting 130. The particular connection fitting 130 is selected based on the desired routing of the chemicals in the source container 125 to the appropriate / desired reaction chamber 105 and / or ports on the valve manifold 110.

[0048] The method can also include selecting a second gas line portion (e.g., 220(a)) from the plurality of second portions 400 based on the second distance. The second distance can be a vertical distance between the second axis 205 and the second end 230 of the selected first gas line portion 210. For example, a shorter distance would require a shorter second gas line portion 220, while a longer distance would require a longer second gas line portion 200.

[0049] The method may also include connecting the second end 230 of the first portion 210 to the first end 235 of the second portion 220 , and connecting the second end 240 of the second portion 220 to a desired container port 250 .

[0050] The method may include repeatedly selecting and connecting the first and second portions 215 , 220 as described above to form any desired number of gas lines 210 .

[0051] As described above, the first end of the first portion is aligned on the first axis 200 , and the second end of the second portion is aligned on the second axis 205 that is perpendicular to the first axis 200 .

[0052] In the foregoing description, the technology has been described with reference to specific exemplary embodiments. The specific embodiments shown and described are illustrations of the technology and its best mode and are not intended to limit the scope of the technology in any way. In fact, for the sake of brevity, the conventional manufacturing, connection, preparation and other functional aspects of the method and system may not be described in detail. In addition, the connecting lines shown in the various figures are intended to represent exemplary functional relationships and / or steps between the various elements. In actual systems, there may be many alternative or additional functional relationships or physical connections.

[0053] The technology has been described with reference to specific exemplary embodiments. However, various modifications and changes may be made without departing from the scope of the technology. The description and drawings are to be regarded as illustrative rather than restrictive, and all such modifications are intended to be included within the scope of the technology. Therefore, the scope of the technology should be determined by the general embodiments described and their legal equivalents, rather than solely by the specific examples described above. For example, the steps described in any method or process embodiment may be performed in any order unless otherwise expressly specified, and are not limited to the explicit order presented in the specific examples. In addition, the components and / or elements described in any device embodiment may be assembled or otherwise operably configured in various arrangements to produce substantially the same results as the technology, and are therefore not limited to the specific configurations described in the specific examples.

[0054] Benefits, other advantages, and solutions to problems have been described above with respect to specific embodiments. However, any benefit, advantage, solution to a problem, or any element that may cause any particular benefit, advantage, or solution to occur or become more significant should not be construed as a critical, required, or essential feature or component.

[0055] The terms "comprises," "comprising," or any variations thereof, are intended to refer to non-exclusive inclusion, such that a process, method, article, composition, or apparatus that includes a list of elements includes not only those elements listed, but may also include other elements not expressly listed or inherent to such process, method, article, composition, or apparatus. Other combinations and / or modifications of the above-described structures, arrangements, applications, proportions, elements, materials, or components used in the practice of the present technology, except those not specifically recited, may be changed or otherwise specially adapted to a particular environment, manufacturing specifications, design parameters, or other operating requirements without departing from the general principles thereof.

[0056] The present technology has been described above with reference to exemplary embodiments. However, changes and modifications may be made to the exemplary embodiments without departing from the scope of the present technology. These and other changes or modifications are intended to be included within the scope of the present technology, as expressed in the following claims.

Claims

1. A device comprising: Gas pipeline matrix; as well as an interchange assembly coupled to a gas line matrix, wherein the interchange assembly includes a first plurality of gas lines, wherein each gas line includes a first end and a second end; in: first ends of the first plurality of gas lines are aligned on a first axis, second ends of the first plurality of gas lines are aligned on a second axis, and The first axis is perpendicular to the second axis.

2. The device according to claim 1, wherein: The gas line matrix includes a second plurality of gas lines, and each gas line from the second plurality of gas lines is coupled to a gas line from the first plurality of gas lines.

3. The device according to claim 1, wherein: Each gas line from the first plurality of gas lines includes at least one right angle.

4. The device according to claim 1, wherein: Each gas line of the first plurality of gas lines includes a first portion coupled to a second portion by a connector, the first portion including the first end, and the second portion including the second end.

5. The device according to claim 4, wherein: The first portion is parallel to the second axis and perpendicular to the first axis.

6. The device according to claim 5, wherein: The second portion is parallel to the first axis and perpendicular to the second axis.

7. The device according to claim 4, wherein: The first portion is Z-shaped and the second portion is L-shaped.

8. The device according to claim 4, wherein: The first portion is coupled to the second portion via a connector.

9. The device according to claim 4, wherein: Each second portion has a different length than the other second portions.

10. A method for assembling a gas line interchange device, comprising: selecting a first gas line portion from a plurality of first portions based on the first distance, and each first portion having a first end and a second end; selecting a second gas line portion from a plurality of second portions based on the second distance, wherein each second portion has a length different from the other second portions, and wherein each second portion has a first end and a second end; connecting the second end of the first portion to the first end of the second portion; selecting a third gas line portion from the plurality of first portions based on a third distance; selecting a fourth gas line portion from the plurality of second portions based on a fourth distance; as well as connecting the second end of the third section to the first end of the fourth section; wherein the first ends of the first and third portions are aligned on a first axis; and Wherein, the second ends of the second and fourth portions are aligned on a second axis that is perpendicular to the first axis.

11. The method of claim 10, further comprising connecting a first end of the first gas line section to a gas line matrix and connecting a second end of the second gas line section to a vessel port.

12. The method according to claim 11, wherein: The first distance is a horizontal distance between the first axis and a container port.

13. The method according to claim 12, wherein: The second distance is a vertical distance between the second axis and the second end of the selected first gas line section.

14. A system comprising: Reaction chamber; a matrix of gas lines connected to the reaction chamber; an interchange assembly coupled to a gas line matrix, wherein the interchange assembly includes a first plurality of gas lines, wherein each gas line includes a first end and a second end; wherein first ends of the first plurality of gas lines are aligned on a first axis and second ends of the first plurality of gas lines are aligned on a second axis, and wherein the first axis is perpendicular to the second axis; a gas line matrix coupled between the reaction chamber and the interchange assembly, wherein the gas line matrix includes a second plurality of gas lines, and each gas line from the second plurality of gas lines is coupled to a gas line from the first plurality of gas lines; and Multiple containers coupled to interchangeable components.

15. The system of claim 14, wherein: Each gas line from the first plurality of gas lines includes a first portion coupled to a second portion via a connector, the first portion including the first end, and the second portion including the second end.

16. The system of claim 15, wherein: The first portion is parallel to the second axis and perpendicular to the first axis, and wherein the second portion is parallel to the first axis and perpendicular to the second axis.

17. The system of claim 15, wherein: Each second portion has a different length than the other second portions.

18. The system of claim 14, wherein: The first portion is Z-shaped.

19. The system of claim 14, wherein: The second portion is L-shaped.

20. The system of claim 14, wherein: The first portion is coupled to the second portion via a first connector, the first portion is coupled to the gas matrix via a second connector, and the second portion is coupled to a container from the plurality of containers via a third connector.

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