A calibration device and method for aerospace resistance strain pressure sensor

Abstract

The present application belongs to the technical field of aerospace sensor calibration, and discloses a calibration device and method for an aerospace resistance strain pressure sensor. The calibration device comprises a displacement generating mechanism, a first supporting mechanism, a second supporting mechanism and a fixing module. The first supporting mechanism and the second supporting mechanism are connected in series to support the sensor to be calibrated. The displacement generating mechanism is arranged adjacent to the first supporting mechanism, and the fixing module is arranged adjacent to the second supporting mechanism. The displacement generating mechanism drives the sensor to move towards the fixing module to apply pressure to the sensor. The sensor is arranged horizontally, and the direction of pressure application is perpendicular to the direction of gravity of the sensor. The present application improves the accuracy of calibration.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of space sensor calibration, and more particularly relates to a calibration device and method for a space resistance strain pressure sensor. BACKGROUND

[0002] In recent years, with the rapid development of the aerospace industry, the precision requirements of spacecraft for sensors are also increasingly high. Because the spacecraft has limitations on the internal space, internal magnetic field environment and take-off weight, a small, reliable, non-magnetic and high-precision sensor is urgently needed. A space resistance strain pressure sensor designed in patent CN117664403A is composed of a strain beam, a detection end, a resistance strain gauge and a conditioning circuit. After the detection end is pressed, the strain beam is extruded to deform, so that the resistance value of the strain gauge pasted on the surface of the beam changes, and the changed voltage signal is obtained after processing by the conditioning circuit. The calibration of the sensor can establish the relationship between the pressure and the output voltage. The premise for the accurate work of the sensor is reasonable and accurate calibration.

[0003] However, the existing calibration device often ignores the self-gravity of the sensor, which will cause a system error in the calibration process. And the commonly used loading method is the weight method, which has friction on the rope, which will bring system error and cannot be accurately calibrated. SUMMARY

[0004] In view of the above defects or improvement needs of the prior art, the application provides a calibration device and method for a space resistance strain pressure sensor, which aims to solve the problem of low calibration accuracy of the existing resistance strain pressure sensor.

[0005] To achieve the above-mentioned purpose, according to one aspect of the application, a calibration device for a space resistance strain pressure sensor is provided, which comprises a displacement generating mechanism, a first supporting mechanism, a second supporting mechanism and a fixing module. The first supporting mechanism and the second supporting mechanism are connected in series to support the sensor to be calibrated. The displacement generating mechanism is arranged adjacent to the first supporting mechanism, and the fixing module is arranged adjacent to the second supporting mechanism.

[0006] The displacement generating mechanism is used to drive the sensor to move towards the fixing module to apply pressure to the sensor. The sensor is arranged horizontally, and the direction of pressure application is perpendicular to the direction of gravity of the sensor.

[0007] Further, the fixed end is used for measuring the pressure received by the sensor; the sensor is connected to a conditioning circuit or a strain gauge to measure the output voltage of the sensor, and a controller is used for fitting according to the received output voltage and pressure to obtain a relationship curve between the output voltage of the sensor and the pressure received by the sensor, so as to complete the calibration of the sensor.

[0008] Further, the displacement generating mechanism comprises a displacement table base plate, a two-dimensional displacement table, an actuator support, a piezoelectric actuator and an actuator top, the two-dimensional displacement table is fixed on the displacement table base plate; the actuator support is fixed on the two-dimensional displacement table; one end of the piezoelectric actuator is fixedly connected to the actuator support, and the other end is threadedly connected to the actuator top.

[0009] Further, the actuator top is formed with an internal thread, and the piezoelectric actuator is formed with an external thread at the end away from the actuator support; the corresponding internal thread and external thread are engaged to form a threaded connection between the actuator top and the piezoelectric actuator.

[0010] Further, the actuator support is formed with a cylindrical groove for accommodating the piezoelectric actuator, and the piezoelectric actuator has a cylindrical shell.

[0011] Further, the first support mechanism comprises a first support, a sliding table guide rail, a sliding table, a sliding table conversion piece, a sensor holder and a force conversion holder, the sliding table guide rail is fixed on the first support; the sliding table is slidingly arranged on the sliding table guide rail; the sliding table conversion piece is fixed on the sliding table; the sensor holder and the force holding holder are arranged on the sliding table conversion piece and are used for supporting the sensor.

[0012] Further, the sliding table guide rail is provided with a sliding channel, the sliding table is provided with a boss, the shape of the boss corresponds to the shape of the sliding channel, and the boss is movably arranged in the sliding channel, so that the sliding table and the sliding table guide rail are connected in a sliding manner.

[0013] Further, the force conversion holder and the sensor holder are detachably connected, and the sensor holder is formed with an accommodation groove for accommodating part of the sensor; the force conversion holder is provided with two wire grooves for the wires of the sensor to pass through.

[0014] Further, the sensor comprises an end cover, a strain beam, a resistance strain gauge and a probe end, the probe end is in a columnar shape, one end of the probe end is connected to the middle of one side of the strain beam, the end cover is connected to the middle of the other side of the strain beam, and a plurality of resistance strain gauges are respectively pasted on both ends of the strain beam; the end cover, the strain beam and the resistance strain gauges are arranged in the accommodating groove; the other end of the probe end is connected to the fixed module in sequence after passing through the force conversion frame and the second support; and both ends of the strain beam are respectively connected to the force conversion frame.

[0015] The application further provides a calibration method of the aerospace resistance strain pressure sensor, and the calibration method is calibrated by using the calibration device of the aerospace resistance strain sensor.

[0016] Overall, compared with the prior art, the calibration device and method of the aerospace resistance strain pressure sensor provided by the application mainly have the following beneficial effects:

[0017] 1. The first support mechanism and the second support mechanism are connected in series to support the sensor to be calibrated together; the sensor is arranged horizontally, the direction of the pressure application is perpendicular to the direction of the gravity of the sensor, the influence of the gravity of the sensor itself on the calibration process is shielded, and then the accuracy of the calibration is improved.

[0018] 2. The piezoelectric actuator is used as the output unit in the working process, the piezoelectric actuator is matched with a suitable driver to perform nanoscale feeding motion, and the stability is good. Therefore, the calibration can be performed with a very small feeding increment in the working process, that is, more calibration points can be obtained, and the calibration capacity is greatly improved.

[0019] 3. The first support mechanism uses a sliding table to drive the sensor to move, and although the sliding table and the sliding table guide rail have friction, the friction is not transmitted to the sensor, and no system error is caused.

[0020] 4. Since the force conversion frame and the sensor holder are detachably connected, for different models of resistance strain pressure sensors, the previous sensor is detached, the new model pressure sensor to be calibrated is installed, and then the connection is performed, so that the high-precision calibration of different models of resistance strain displacement sensors can be quickly realized. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a structural schematic view of a calibration device of an aerospace resistance strain pressure sensor provided by the application;

[0022] Figure 2 is Figure 1Schematic diagram of a sensor of a calibration device for an aerospace resistance strain gauge pressure sensor;

[0023] Figure 3 yes Figure 1 A schematic diagram of a first supporting mechanism of a calibration device for an aerospace resistance strain gauge pressure sensor;

[0024] Figure 4 yes Figure 1 Schematic diagram of the first support mechanism, sensor and second support mechanism of the calibration device of the aerospace resistance strain type pressure sensor;

[0025] Figure 5 yes Figure 1 Schematic diagram of the second supporting mechanism of the calibration device of the aerospace resistance strain gauge pressure sensor;

[0026] Figure 6 yes Figure 1 Schematic diagram of the fixing module of the calibration device of the aerospace resistance strain gauge pressure sensor.

[0027] In all the drawings, the same figure numbers are used to represent the same elements or structures, where: 11-displacement stage base plate, 12-two-dimensional displacement stage, 131-actuator bracket, 132-piezoelectric actuator, 133-actuator top, 21-first support member, 221-slide guide rail, 222-slide, 23-slide conversion member, 24-sensor holder, 25-force conversion frame, 31-end cover, 32-strain beam, 33-detection end, 34-resistance strain gauge, 41-second support member, 42-bearing adapter plate, 431-linear bearing holder, 432-linear bearing, 51-fixed end, 52-S-type force sensor, 53-force terminal. DETAILED DESCRIPTION

[0028] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for the purpose of explaining the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

[0029] See also Figure 1The application provides a calibration device for aerospace resistance strain pressure sensors, which can simulate the weightlessness environment of the aerospace resistance strain pressure sensors during work, reduce the influence of gravity on the calibration process, shield the influence of the gravity of the sensors on the calibration, and be more in line with the working environment of the weightlessness of the aerospace sensors; specifically, the sensor to be calibrated is placed horizontally, so that the force direction of the sensor is perpendicular to the gravity direction, and the force of the sensor is not affected by its own gravity. Meanwhile, a piezoelectric actuator is used to provide feed during the calibration process, and nanoscale feed can be realized under ideal conditions, which greatly improves the interval of the calibration points in the calibration process, and further improves the calibration precision and accuracy.

[0030] The calibration device comprises a displacement generating mechanism, a first supporting mechanism, a second supporting mechanism and a fixing module. The first supporting mechanism and the second supporting mechanism are connected in series to support the sensor to be calibrated. The displacement generating mechanism is arranged adjacent to the first supporting mechanism, and the fixing module is arranged adjacent to the second supporting mechanism. The displacement generating mechanism is used to drive the sensor to move towards the fixing module to apply pressure to the sensor. The fixing module is used to measure the pressure received by the sensor. The sensor is connected to a conditioning circuit or a strain gauge to measure the output voltage of the sensor, so as to obtain the relationship between the pressure received by the sensor and the output voltage, and complete the calibration of the sensor. The sensor is an aerospace resistance strain pressure sensor.

[0031] Please refer to Figure 4 The displacement generating mechanism comprises a displacement table bottom plate 11, a two-dimensional displacement table 12, an actuator support 131, a piezoelectric actuator 132 and an actuator top 133. The two-dimensional displacement table 12 is fixed on the displacement table bottom plate 11. The actuator support 131 is fixed on the two-dimensional displacement table 12. One end of the piezoelectric actuator is fixedly connected to the actuator support, and the other end is threadedly connected to the actuator top 133. Specifically, the bottom surface of the two-dimensional displacement table 12 is connected to the displacement table bottom plate 11 through locking screws, the actuator support 131 is connected to the table top of the two-dimensional displacement table 12 through locking screws, and the piezoelectric actuator 132 is fixed on the actuator support 131 through locking screws. The actuator top 133 is formed with internal threads, and the end of the piezoelectric actuator 132 away from the actuator support 131 is formed with external threads. The corresponding internal threads and external threads are engaged to form a threaded connection between the actuator top 133 and the piezoelectric actuator 132. The actuator support 131 is formed with a cylindrical recess for accommodating the piezoelectric actuator 132, and the shell of the piezoelectric actuator 132 is cylindrical.

[0032] In one embodiment, the two-dimensional displacement table 12 is divided into upper and lower parts, the lower part is provided with four cylindrical countersunk holes respectively, the displacement table bottom plate 11 is provided with threaded bottom holes, and locking screws enter the threaded bottom holes from the corresponding countersunk holes to fix the two-dimensional displacement table and the displacement table bottom plate 11; the upper part of the two-dimensional displacement table is provided with four threaded bottom holes, the bottom of the actuator support 131 is provided with four through holes, and locking screws are screwed into the threaded bottom holes through the through holes to fix the two-dimensional displacement table and the actuator support; the side of the piezoelectric actuator 132 with a wire is upward; the side surface of the actuator support is provided with a cylindrical countersunk hole, the bottom of the piezoelectric actuator is provided with a threaded hole, and a screw is screwed into the threaded hole through the corresponding countersunk hole to fix the actuator support and the piezoelectric actuator; the actuator top 133 is used to enlarge the contact area of the pushing end of the piezoelectric actuator.

[0033] Please refer to Figure 3 The first support mechanism includes a first support 21, a slide rail 221, a slide table 222, a slide table conversion piece 23, a sensor holder 24, and a force conversion holder 25. The slide rail 221 is fixed on the first support 21. The slide table 222 is slidingly arranged on the slide rail 221. The slide table conversion piece 23 is fixed on the slide table. The sensor holder 24 and the force conversion holder are arranged on the slide table conversion piece 23, and are used to support the sensor. The slide rail 221 is provided with a slide channel, the slide table is provided with a protrusion, the shape of the protrusion corresponds to the shape of the slide channel, the protrusion is movably arranged in the slide channel, so that the slide table and the slide rail 221 form a sliding connection, and the slide table can slide linearly along the slide rail 221. The force conversion holder 25 and the sensor holder 24 form a detachable connection, and the sensor holder 24 is formed with a receiving groove for receiving part of the sensor; the force conversion holder 25 is provided with two wire passing grooves for the wires of the sensor to pass through to be connected to a debugging circuit or the like.

[0034] In one embodiment, the slide rail 221 is provided with four cylindrical countersunk holes, and the first support 21 is correspondingly provided with four threaded holes. Screws are screwed into the threaded holes through the corresponding countersunk holes to fix the slide rail 221 on the first support 21. The slide rail is arranged on the side of the slide rail 221. Since the surface of the slide rail is too small, the slide rail adapter 23 is introduced to expand the area. The slide rail adapter 23 is provided with four cylindrical countersunk holes and two threaded holes. Screws pass through the corresponding countersunk holes and then enter the threaded holes of the slide rail to connect the slide rail adapter with the slide rail. The sensor holder 24 is in the shape of a "J" character. Two ends of the sensor holder 24 are respectively provided with cylindrical countersunk holes. Screws pass through the corresponding countersunk holes and then are screwed into the corresponding threaded holes to connect the sensor holder with the slide rail adapter.

[0035] Please refer to Figure 2 The sensor includes an end cover 31, a strain beam 32, resistance strain gauges 34, and a probe end 33. The probe end 33 is in a columnar shape, one end of which is connected to the middle of one side of the strain beam 32, and the end cover 31 is connected to the middle of the other side of the strain beam 32. A plurality of resistance strain gauges 34 are respectively adhered to both ends of the strain beam 32. The end cover 31, the strain beam 32, and the resistance strain gauges 34 are arranged in the accommodation groove. The other end of the probe end 33 passes through the force conversion holder 25 and the second support 41 in sequence and is connected to the fixed module. Both ends of the strain beam 32 are respectively connected to the force conversion holder 25.

[0036] In one embodiment, the middle of the strain beam 32 is formed with a stepped groove, and the bottom of the corresponding probe end 33 is formed with a stepped protrusion. The stepped protrusion cooperates with the stepped groove, and the stepped protrusion is clamped in the stepped part of the stepped groove. The end cover 31 is arranged at the top of the stepped groove, so that the probe end, the strain beam, and the end cover 31 are connected and can move together. The number of resistance strain gauges 34 is four. The four resistance strain gauges 34 are divided into two groups. The resistance strain gauges 34 in the two groups are respectively adhered to the long arms of both ends of the strain beam.

[0037] The sensor is horizontally placed. The probe end is always extended forward after passing out of the force conversion holder 25 until the strain beam is adhered to the force conversion holder. The sensor is rotated so that the long arms of the strain beam are horizontally arranged. That is, the four cylindrical countersunk holes on the strain beam are aligned with the four threaded holes on the force conversion holder. Locking screws are tightened to fix the sensor on the force conversion holder.

[0038] The force applying conversion frame is a U-shaped structure, which is placed on the slide conversion piece. The bottom of the U-shaped force applying conversion frame is placed on the sensor holder. Screws are screwed into the sensor holder through four cylindrical countersunk holes on the force applying conversion frame to achieve connection. The force applying conversion frame, the sensor holder, the sensor, the slide conversion piece and the slide are fixed together and can slide together with the slide on the slide rail.

[0039] Please refer to Figure 5 The second support mechanism includes a second support piece 41, a bearing adapter plate 42, a linear bearing 432 and a linear bearing holder 431. The bearing adapter plate 42 is arranged on the second support piece 41. The linear bearing holder 431 is arranged on the bearing adapter plate 42. The linear bearing 432 is arranged in a groove inside the linear bearing holder 431 and is used to support the probe end. The probe end protrudes out of the linear bearing. The second support mechanism provides support for the elongated probe end to prevent it from drooping due to gravity.

[0040] The second support piece 41 is used to provide sufficient height for the linear bearing. Due to space limitations, the second support piece 41 cannot be designed too thick. In addition, the top table has a certain width. In order to avoid the difficulty of processing the I-shaped structure, a split design and screw locking structure are adopted. The second support piece 41 and the bearing adapter plate 42 are used. The bearing adapter plate 42 has threaded holes for mounting the linear bearing holder 431 and countersunk holes for fixing the second support piece. Screws are screwed into the screw holes of the second support piece through the countersunk holes of the bearing adapter plate 42, so that the bearing adapter plate 42 is connected with the second support piece. Screws pass through the linear bearing holder 431 and are screwed onto the bearing adapter plate 42. The hole card of the linear bearing holder 431 can be removed, the linear bearing is installed, and then the hole card is installed. The linear bearing is fixed in the linear bearing holder 431.

[0041] Please refer to Figure 6The fixed module comprises a fixed end 51, an S-shaped force sensor 52 and a force receiving terminal 53. The S-shaped force sensor 52 is arranged on one end of the fixed end 51, and the force receiving terminal 53 is connected to the S-shaped force sensor 52 and the detection end. The force receiving terminal 53 is provided with a groove, and the shape of the groove is the same as the bottom of the detection end, so as to increase the force receiving area. The force receiving terminal 53 is formed with external threads, which can be screwed into the threaded hole of the S-shaped force sensor 52, so as to ensure that the detection end acts on the middle of the S-shaped force sensor 52, that is, the most sensitive area of force. The fixed end 51 is made of steel material with large rigidity, and the large rigidity can ensure that the deformation of the fixed end during force receiving in the calibration process is small enough, and the influence on the calibration is small enough. In one embodiment, the fixed end is a T-shaped steel material with large rigidity, which is used to bear the force received by the sensor and is not easy to deform due to the large rigidity; the fixed end is cut out to have a smaller surface as a working surface, so as to reduce the machining workload; and the S-shaped force sensor 52 is connected to the working surface.

[0042] The displacement table bottom plate, the first support 21, the second support and the fixed end all have M6 screw stepped holes, which are used to be fixed on an optical platform. The optical platform is a common product on the market, and the upper surface thereof has an M6 threaded hole matrix with a pitch of 25mm*25mm. The displacement table bottom plate, the first support, the second support and the fixed end are respectively fixed on the optical platform by locking screws at certain intervals.

[0043] The displacement table bottom plate, the first support, the second support and the fixed end have two common points, one is to ensure that the key components of the calibration are in the same height, and the other is to ensure the relative positions of the parts. The displacement table bottom plate and the fixed end are both provided with four cylindrical countersunk holes, the first support is provided with two cylindrical countersunk holes, and the second support is provided with two asymmetric cylindrical countersunk holes. The countersunk holes are used to install locking screws to fix the corresponding components on the optical platform. The optical platform has a square array of threaded holes, and the cylindrical countersunk holes are arranged at appropriate positions to ensure the relative positions of the components.

[0044] After installation, the two-dimensional displacement table can be moved backward to leave enough space for installation, and the top of the actuator can be adjusted to be in the middle of the force conversion frame, and then the actuator top is pushed onto the force conversion frame. During work, the elongation of the piezoelectric actuator is controlled by a controller, so as to push the force conversion frame, the sensor holder, the sensor, the slide conversion frame and the slide table to move as a whole, and the detection end is pressed after being pushed to the force receiving terminal 53 to generate force, so that the strain beam deforms to generate strain, and then the resistance strain gauge generates resistance value change.

[0045] The signal line of the resistance strain gauge is connected to a conditioning circuit or a strain gauge, and then the voltage value on the piezoelectric actuator is adjusted by the controller to control the elongation, and the more the elongation, the greater the pressure. The elongation of the piezoelectric actuator is adjusted so that the reading of the S-shaped force sensor follows the same value F as the desired value, and the conditioned value U measured by the resistance strain gauge is read at this time.

[0046] The present application also provides a calibration method of a space resistance strain pressure sensor, which uses the calibration device of the space resistance strain sensor as described above to calibrate.

[0047] In one embodiment, the calibration method mainly comprises the following steps:

[0048] (1) Start the S-shaped force sensor and perform zero adjustment operation on the reading of the S-shaped force sensor.

[0049] (2) Connect the signal line of the resistance strain gauge to a conditioning circuit or a strain gauge for balance adjustment, so that the output at this time is 0.

[0050] (3) Turn the screw rod of the two-dimensional displacement table, stop turning when the actuator top just contacts the surface of the force conversion frame, and turn the other screw rod so that the actuator top is in the middle of the force conversion frame.

[0051] (4) Continue to turn the screw rod of the two-dimensional displacement table to coarsely adjust the position of the sensor until the detection end of the sensor just contacts the force receiving terminal, and at this time the S-shaped force sensor reads the pressure as 0.

[0052] (5) Set the pressure increment, for example, the pressure increment is F1, and the maximum pressure of the calibration process is F M , that is, it is expected that during the calibration process, the pressure starts from 0 and increases by F1 each time, until the pressure reaches F M .

[0053] (6) Turn on the power of the controller of the piezoelectric actuator, start to pressurize the piezoelectric actuator, and constantly adjust the voltage value so that the pressure reading is exactly the pressure value expected at this time.

[0054] (7) Record the voltage signal value U1 of the resistance strain gauge after conditioning at this time.

[0055] (8) Constantly repeat steps (6) and (7) to obtain data points (F1, U1), (2F1, U2), … (nF1, U n ) with one-to-one correspondence, a total of n.

[0056] (9) According to the acquired n data points, a relationship curve between the output voltage U of the resistance strain displacement sensor and the pressure F is fitted, and the calibration is completed. Specifically, the controller performs fitting according to the received voltage and pressure to obtain the relationship curve between the output voltage U of the resistance strain displacement sensor and the pressure F.

[0057] (10) The voltage is reduced to zero, and after re-pressurization, repeatability test can be performed.

[0058] Those skilled in the art will easily understand that the above description is only a preferred embodiment of the present application, and is not used to limit the present application, and any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A calibration device for aerospace resistance strain gauge pressure sensor, characterized by: The calibration device includes a displacement generating mechanism, a first supporting mechanism, a second supporting mechanism, and a fixing module. The first supporting mechanism and the second supporting mechanism are connected in series to jointly support the sensor to be calibrated. The displacement generating mechanism is arranged adjacent to the first supporting mechanism, and the fixing module is arranged adjacent to the second supporting mechanism. The displacement generating mechanism is used to drive the sensor to move toward the fixing module to apply pressure to the sensor; wherein the sensor is arranged horizontally, and the direction of the pressure application is perpendicular to the gravity direction of the sensor; The fixed end is used to measure the pressure exerted on the sensor; the sensor is connected to a conditioning circuit or a strain gauge to measure the output voltage of the sensor, and the controller is used to perform fitting based on the received output voltage and pressure to obtain a relationship curve between the output voltage of the sensor and the pressure exerted on it, thereby completing the calibration of the sensor; the first supporting mechanism includes a first supporting member, a slide rail, a slide, a slide conversion member, a sensor holder and a force conversion frame, the slide rail is fixed on the first supporting member; the slide is slidably arranged on the slide rail; the slide conversion member is fixed on the slide; the sensor holder and the force holder are arranged on the slide conversion member, and both are used to support the sensor; the force conversion frame and the sensor A detachable connection is formed between the sensor holders, and the sensor holder is formed with a receiving groove, which is used to accommodate part of the sensors; the force conversion frame is provided with two wire threading grooves, which are used for the wiring of the sensors to pass through; the sensor includes an end cover, a strain beam, a resistive strain gauge and a detection end, the detection end is columnar, one end of which is connected to the middle of one side of the strain beam, the end cover is connected to the middle of the other side of the strain beam, and a plurality of resistive strain gauges are respectively pasted on the two ends of the strain beam; the end cover, the strain beam and the resistive strain gauge are arranged in the receiving groove; the other end of the detection end passes through the force conversion frame and the second support member in sequence and is connected to the fixing module; the two ends of the strain beam are respectively connected to the force conversion frame.

2. The calibration device for aerospace resistance strain gauge pressure sensor according to claim 1, characterized in that: The displacement generating mechanism includes a displacement platform base plate, a two-dimensional displacement platform, an actuator bracket, a piezoelectric actuator and an actuator top. The two-dimensional displacement platform is fixed on the displacement platform base plate; the actuator bracket is fixed on the two-dimensional displacement platform; one end of the piezoelectric driver is fixedly connected to the driver bracket, and the other end is threadedly connected to the actuator top.

3. The calibration device for aerospace resistance strain gauge pressure sensor according to claim 2, characterized in that: The actuator top is formed with an internal thread, and the end of the piezoelectric actuator away from the actuator bracket is formed with an external thread. The corresponding internal thread is engaged with the external thread to form a threaded connection between the actuator top and the piezoelectric actuator.

4. The calibration device for aerospace resistance strain gauge pressure sensor according to claim 2, characterized in that: The actuator bracket is formed with a cylindrical groove, and the cylindrical groove is used to accommodate the piezoelectric actuator. The shell of the piezoelectric actuator is cylindrical.

5. The calibration device for aerospace resistance strain gauge pressure sensor according to claim 1, characterized in that: The slide rail is provided with a slideway, and the slide is provided with a boss, the shape of the boss corresponds to the shape of the slideway, and the boss is movably arranged in the slideway, so that a sliding connection is formed between the slide and the slide rail.

6. A calibration method for an aerospace resistive strain gauge pressure sensor, characterized by: The calibration method uses the calibration device of the aerospace resistive strain sensor according to any one of claims 1 to 5 for calibration.

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