Electrostatic discharge generator for integrated circuit test and control method thereof

Abstract

One aspect of the invention discloses an electrostatic discharge generator for integrated circuit testing. On the other hand, the invention discloses a control method of the electrostatic discharge generator for the integrated circuit test. According to the electrostatic discharge generator for the integrated circuit test, the replaceable resistance-capacitance module, the gun body, the bevel gun head adapter and the micro-size gun head form a low-parasitic-effect transmission channel of electrostatic discharge pulses, and it is ensured that the electrostatic discharge pulses do not distort; the gun body is supported by the gun body adapter plate and the gun body bracket at a certain inclination angle, so that the micro-size gun head is ensured to be accurately and stably positioned on the pin of the tested integrated circuit, the precise identification of the fine pin of the integrated circuit is realized, and the tested integrated circuit is prevented from being damaged by mechanical stress; the electrostatic discharge generator host and the control computer can control the output of high-grade and multi-electrostatic discharge pulses and other integrated circuit electrostatic discharge immunity tests meeting the requirements of the current integrated circuit industry.

Description

Technical Field

[0001] The invention relates to an electrostatic discharge generator for integrated circuit testing and a control method thereof, belonging to the technical field of electromagnetic compatibility testing. Background Art

[0002] Electromagnetic compatibility testing of integrated circuits is a relatively new technology, and electrostatic discharge (ESD) immunity testing is an important test item in the electromagnetic compatibility testing of integrated circuits. At present, the highest output level of commercial electrostatic discharge generators is ±9kV, while the required level of integrated circuit R&D and production manufacturers has exceeded ±15kV. In addition, the existing commercial electrostatic discharge generators are damaged very frequently and have high maintenance costs. This performance defect has become one of the important problems that relevant testing agencies need to solve urgently. In addition, the output level of the existing electrostatic discharge generators for equipment-level testing is relatively high, which can exceed ±25kV, but the electrostatic discharge guns are large and heavy, and the gun head size is also large. During the test, the ESD test of the equipment is usually carried out by pulling the trigger of a handheld electrostatic discharge gun. If the electrostatic discharge generator for equipment-level testing is applied to the ESD test of integrated circuit pins, it is difficult to accurately identify the fine pins of the integrated circuit; second, the slight movement caused by the handheld electrostatic discharge gun will affect the test voltage level and may cause a short circuit between the integrated circuit pins; third, the weight of the electrostatic discharge gun will cause mechanical stress on the integrated circuit pins and damage the tested integrated circuit. Summary of the invention

[0003] The purpose of the present invention is to provide an electrostatic discharge generator for integrated circuit testing and a control method thereof, which are applied to integrated circuit electrostatic discharge immunity testing to achieve high discharge voltage level, tiny gun head size, precise and stable test positioning, and can control multiple electrostatic discharge pulse outputs at the same time, meet the current needs of the integrated circuit industry and ensure the accuracy and reliability of test results.

[0004] In order to achieve the above object, one aspect of the present invention is to disclose an electrostatic discharge generator for integrated circuit testing, characterized in that it includes:

[0005] Micro-sized gun tip: The tip of the micro-sized gun tip is a needle-shaped good conductor metal, which is used to contact the pins of the integrated circuit under test;

[0006] The angled gun tip adapter is an angled good conductor metal, used to connect the micro-sized gun tip and the gun tip base to ensure that the micro-sized gun tip is vertically downward;

[0007] The gun tip base is a hard structure in the shape of a hollow flat-head cone, used to connect the angled gun tip adapter to the gun body;

[0008] The gun body is a hard structure shell on the outside, and the inside of the gun body contains a high-voltage relay for controlling the discharge of electrostatic discharge pulses, a space for accommodating electrostatic discharge pulse charge and discharge resistor and capacitor modules, and necessary good conductor metal connection structures. The good conductor metal on the electrostatic discharge pulse transmission path inside the gun head base contacts the good conductor metal on the electrostatic discharge pulse transmission path inside the gun body with low impedance;

[0009] The status indicator light is an LED indicator light used to display the working status of the electrostatic discharge generator;

[0010] A replaceable resistor and capacitor module is a capacitor and resistor module for charging and discharging electrostatic discharge pulses, which can be stably placed in the gun body and matched and connected to the electrostatic discharge pulse transmission path in the gun body;

[0011] The gun body adapter plate is a hard material used to reinforce the gun body and fix it to the gun body bracket;

[0012] The gun body bracket is made of a hard material and is used to support the gun body with the gun body adapter plate, and is used to fix the gun body on the connecting inclined plane at an inclination angle of 90° minus the inner angle of the angled gun head adapter, so as to ensure that the micro-sized gun head is vertically downward;

[0013] The electrostatic discharge gun connection line includes a high-voltage power supply line and a high-voltage relay control line, and an electrostatic discharge return line can be added according to the application scenario, wherein: when the electrostatic discharge circuit of the gun body is the proximal end, the electrostatic discharge gun connection line does not need to add an electrostatic discharge return line; when the electrostatic discharge circuit of the gun body is the distal end, the electrostatic discharge gun connection line adds an electrostatic discharge return line;

[0014] The electrostatic discharge generator host is used to generate the high voltage required for the gun body to generate electrostatic discharge pulses and control related parameters;

[0015] A control computer is communicatively connected to the electrostatic discharge generator host and serves as a host computer to control the electrostatic discharge generator host and is used to edit electrostatic discharge pulses with specific parameter requirements.

[0016] Preferably, the tip diameter of the micro-sized gun tip is less than 1 mm; the length of the micro-sized gun tip is adjustable according to the processing technology and in coordination with the mechanical strength of the gun body.

[0017] Preferably, the angled gun tip adapter and the micro-sized gun tip are fixedly connected with each other at low impedance via metal screws.

[0018] Preferably, the small diameter end of the gun head base is fixedly connected to the angled gun head adapter, and the large diameter end is reliably connected to the gun body via a threaded interface or a snap-on interface.

[0019] Preferably, the gun head base and the gun body are plastic structures.

[0020] Preferably, the hollow inner wall of the gun tip base is sprayed with a metal shielding coating process to reduce the external radiation effect on the electrostatic discharge pulse transmission path, and the metal shielding coating on the hollow inner wall of the gun tip base does not contact the conductor of the angled gun tip adapter.

[0021] Preferably, the front end of the gun body is a threaded interface or a snap-fit ​​interface that matches the threaded interface or the snap-fit ​​interface of the gun head base, and the rear end is a threaded interface or a snap-fit ​​interface that facilitates reliable connection to the replaceable resistor-capacitor module.

[0022] Preferably, the inner wall of the gun body shell is sprayed with a metal shielding coating process, and the metal shielding coating on the inner wall of the gun body shell does not contact the conductor on the direct transmission channel of the electrostatic discharge pulse.

[0023] Preferably, the hard material of the gun body adapter plate and the gun body bracket is the same, and good conductor metal or plastic can be selected according to different application scenarios, wherein: when the electrostatic discharge circuit of the gun body is at the proximal end, the gun body adapter plate and the gun body bracket are made of good conductor metal, and are connected to the electrostatic discharge circuit inside the gun body with low impedance to jointly form the electrostatic discharge circuit of the gun body; when the electrostatic discharge circuit of the gun body is at the distal end, the gun body adapter plate and the gun body bracket are made of hard plastic.

[0024] Another aspect of the present invention discloses a control method of the electrostatic discharge generator for integrated circuit testing, characterized in that it comprises the following steps:

[0025] Step 1: The electrostatic discharge generator for integrated circuit testing is turned on and connected to a control host computer;

[0026] Step 2: Set the voltage, polarity, interval time, and number of single electrostatic discharge pulses on the host computer interface to achieve test control of single electrostatic discharge pulses;

[0027] Step 3: multiple single electrostatic discharge pulses set in step 2 constitute a series of electrostatic discharge pulses, namely, an electrostatic discharge pulse train or an electrostatic discharge pulse group;

[0028] By setting the number and interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group on the upper computer interface, the test control of the electrostatic discharge pulse train or electrostatic discharge pulse group can be realized, wherein the interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group is usually greater than the interval time of the electrostatic discharge single pulse contained therein.

[0029] Compared with the existing technical solutions, the present invention has the following beneficial technical effects: the electrostatic discharge generator for integrated circuit testing provided by the present invention, which is composed of a replaceable resistor-capacitor module, a gun body, an angled gun head adapter and a micro-sized gun head, constitutes a low parasitic effect transmission channel for electrostatic discharge pulses, ensuring that the electrostatic discharge pulses are not distorted; the gun body is supported by a gun body adapter plate and a gun body bracket at a certain tilt angle, ensuring that the micro-sized gun head is accurately and stably positioned on the pins of the integrated circuit under test, thereby achieving accurate identification of the fine pins of the integrated circuit and avoiding mechanical stress damage to the integrated circuit under test; the main unit of the electrostatic discharge generator and the control computer can control the output of high-level, multiple electrostatic discharge pulses and other integrated circuit electrostatic discharge immunity tests that meet the current needs of the integrated circuit industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a structural schematic diagram of an embodiment of an electrostatic discharge generator for integrated circuit testing of the present invention;

[0031] Figure 2 It is an application example of an electrostatic discharge single pulse for integrated circuit testing of the present invention;

[0032] Figure 3 The present invention is an application example of an electrostatic discharge generator control software interface for integrated circuit testing. DETAILED DESCRIPTION

[0033] The present invention will be further described below in conjunction with specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms fall within the scope limited by the appended claims of the application equally.

[0034] One aspect of the present invention is to disclose an electrostatic discharge generator for integrated circuit testing. Figure 1 As shown, it includes a micro-sized gun tip 1, an angled gun tip adapter 2, a gun tip base 3, a gun body 4, a status indicator light 5, a replaceable resistor-capacitor module 6, a gun body adapter plate 7, a gun body bracket 8, an electrostatic discharge gun connecting line 9, an electrostatic discharge generator host 10 and a control computer 11.

[0035] The tip of the micro-sized gun tip 1 is a needle-shaped good conductor metal, which is used to contact the pin of the integrated circuit under test, and its tip diameter is less than 1mm. The length of the micro-sized gun tip 1 is adjustable according to the processing technology and the coordination with the mechanical strength of the gun body. In the embodiment of the present invention, in order to ensure the low parasitic effect of the electrostatic discharge pulse transmission path, its length is usually 2cm to 4cm.

[0036] The angled gun tip adapter 2 is an angled good conductor metal, used to connect the micro-sized gun tip 1 and the gun tip base 3, ensuring that the micro-sized gun tip 1 is vertically downward. The angled gun tip adapter 2 is connected to the micro-sized gun tip 1 by a low-impedance fixed connection with a metal screw.

[0037] The gun tip base 3 is a hard structure in the shape of a hollow flat cone, which is used to connect the angled gun tip adapter 2 and the gun body 4, wherein the small diameter end of the gun tip base 3 is fixedly connected to the angled gun tip adapter 2, and the large diameter end is a threaded interface or a snap-on interface, which is convenient for reliable connection with the gun body 4. The gun tip base 3 is a plastic structure, which is convenient for reducing weight and reducing the low parasitic effect of the electrostatic discharge pulse transmission path. The hollow inner wall of the gun tip base 3 is sprayed with a metal shielding coating process to reduce the external radiation effect on the electrostatic discharge pulse transmission path, and the metal shielding coating of the hollow inner wall shall not contact the conductor of the angled gun tip adapter 2 to avoid the electrostatic discharge pulse from being directly transmitted to the metal shielding coating of the hollow inner wall of the gun tip base 3.

[0038] The outside of the gun body 4 is a hard structure shell, and the inside contains a high-voltage relay that controls the discharge of electrostatic discharge pulses, a space for accommodating electrostatic discharge pulse charge and discharge resistor and capacitor modules, and necessary good conductor metal connection structures. The gun body 4 is a plastic structure, which is convenient for reducing weight and reducing the low parasitic effects of the electrostatic discharge pulse transmission path. The front end of the gun body 4 is an external (or internal) threaded interface or a snap-on interface that matches the internal (or external) threaded interface or snap-on interface of the gun head base 3, ensuring that the gun body 4 is reliably connected to the gun head base 3, and at the same time ensuring that the good conductor metal on the electrostatic discharge pulse transmission path inside the gun head base 3 has low impedance contact with the good conductor metal on the electrostatic discharge pulse transmission path inside the gun body 4.

[0039] The rear end of the gun body 4 is an external (or internal) threaded interface or a snap-on interface to facilitate reliable connection of replaceable resistor and capacitor modules. The inner wall of the gun body 4 shell is sprayed with a metal shielding coating process to reduce the external radiation effect on the electrostatic discharge pulse transmission path, and the metal shielding coating on the inner wall of the gun body 4 shell shall not contact the conductor on the electrostatic discharge pulse direct transmission path.

[0040] The status indicator light 5 is an LED indicator light, which is used to display the working status of the electrostatic discharge generator, and the status indicator light 5 displays different colors in the discharge working state and the standby state of the electrostatic discharge generator.

[0041] The replaceable resistor and capacitor module 6 is a capacitor and resistor module for electrostatic discharge pulse charging and discharging. The replaceable resistor and capacitor module 6 can be stably placed in the gun body 4 and matched to the electrostatic discharge pulse transmission path in the gun body 4. The end of the replaceable resistor and capacitor module 6 has a cover body for reliable fixation on the gun body 4. In the embodiment of the present invention, the end cover body of the replaceable resistor and capacitor module 6 is an internal (or external) threaded interface or snap-on interface that matches the external (or internal) threaded interface or snap-on interface at the rear end of the gun body 4. The capacitance and resistance values ​​of the replaceable resistor and capacitor module 6 can be replaced according to the test requirements, usually 75pF / 100Ω, 150pF / 330Ω, 330pF / 330Ω, 150pF / 2000Ω, 330pF / 2000Ω, etc.

[0042] The gun body adapter plate 7 is made of a hard material and is used to reinforce the gun body 4 and fix it to the gun body bracket 8 .

[0043] The gun body bracket 8 is made of a hard material and is used to support the gun body 4 with the gun body adapter plate 7, and is used to fix the gun body 4 on the connecting inclined surface at an angle of 90° minus the inner angle of the angled gun head adapter 2, so as to ensure that the micro-sized gun head 1 is vertically downward. The connecting inclined surface of the gun body bracket 8 has an inclination angle greater than 0°, so as to keep the gun body 4 as far away as possible from the ground plane of the test table where the integrated circuit under test is located, thereby reducing parasitic effects. At the same time, the connecting inclined surface of the gun body bracket 8 has an inclination angle less than 90°, so as to better support the gun body 4, avoid the weight stress of the gun body 4 being applied to the pins of the integrated circuit under test, and reduce the risk of mechanical damage to the integrated circuit under test.

[0044] The gun body adapter plate 7 and the gun body bracket 8 are made of the same hard material, and good conductor metal or plastic can be selected according to different application scenarios, wherein: when the electrostatic discharge circuit of the gun body 4 is at the proximal end, the gun body adapter plate 7 and the gun body bracket 8 are made of good conductor metal, and are connected to the electrostatic discharge circuit inside the gun body 4 with low impedance to jointly form the electrostatic discharge circuit of the gun body 4; when the electrostatic discharge circuit of the gun body 4 is at the distal end, the gun body adapter plate 7 and the gun body bracket 8 are made of hard plastic.

[0045] The electrostatic discharge gun connection line 9 includes a high-voltage power supply line, a high-voltage relay control line, and an electrostatic discharge loop line can be added according to the application scenario, wherein: when the electrostatic discharge loop of the gun body 4 is the proximal end, the electrostatic discharge gun connection line 9 does not need to add an electrostatic discharge loop line; when the electrostatic discharge loop of the gun body 4 is the distal end, the electrostatic discharge gun connection line 9 adds an electrostatic discharge loop line.

[0046] The high-voltage power supply line of the electrostatic discharge gun connection line 9 is wrapped with a reliable insulation layer for insulating and isolating high voltage. The high-voltage power supply line of the electrostatic discharge gun connection line 9 and the high-voltage relay control line are routed together, and the electrostatic discharge return line that can be added according to the application scenario is routed separately.

[0047] The electrostatic discharge generator host 10 is used to generate the high voltage required by the gun body 4 to generate an electrostatic discharge pulse, and to control parameters such as the voltage level, discharge interval time, polarity and number of the electrostatic discharge pulse.

[0048] The control computer 11 is communicatively connected to the ESD generator host 10 and serves as a host computer to control the ESD generator host 10 for editing ESD pulses with specific parameter requirements, such as ESD pulse groups.

[0049] A second aspect of an embodiment of the present invention provides a control method for an electrostatic discharge generator for integrated circuit testing, which uses an electrostatic discharge generator for integrated circuit testing provided by the first aspect of the present invention, including:

[0050] Step 1: The electrostatic discharge generator for integrated circuit testing is turned on and connected to a control host computer. The control host computer is usually a computer. An alternative solution is that the control function implemented by the control host computer can also be built into the host interface of the electrostatic discharge generator for integrated circuit testing.

[0051] Step 2: Set the voltage, polarity, interval time, and number of single electrostatic discharge pulses on the host computer interface to achieve test control of single electrostatic discharge pulses. The voltage of a single electrostatic discharge pulse is usually 100V to 30kV, the polarity is usually positive (+) or negative (-), the interval time is usually 50ms to 10s, and the number of single electrostatic discharge pulses can be set according to test needs, such as 1 to 100 times.

[0052] Step 3: Multiple single electrostatic discharge pulses set in step 2 constitute a series of electrostatic discharge pulses, namely, an electrostatic discharge pulse train or an electrostatic discharge pulse group. For example, 10 times constitutes an electrostatic discharge pulse train or an electrostatic discharge pulse group including 10 single electrostatic discharge pulses.

[0053] By setting the number and interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group on the upper computer interface, the test control of the electrostatic discharge pulse train or electrostatic discharge pulse group can be realized, wherein the interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group is usually greater than the interval time of the electrostatic discharge single pulse contained therein.

Claims

1. An electrostatic discharge generator for integrated circuit testing, characterized in that: include: Micro-sized gun tip: The tip of the micro-sized gun tip is a needle-shaped good conductor metal, which is used to contact the pins of the integrated circuit under test; The angled gun tip adapter is an angled good conductor metal, used to connect the micro-sized gun tip and the gun tip base to ensure that the micro-sized gun tip is vertically downward; The gun tip base is a hard structure in the shape of a hollow flat-head cone, used to connect the angled gun tip adapter to the gun body; The gun body is a hard structure shell on the outside, and the inside of the gun body contains a high-voltage relay for controlling the discharge of electrostatic discharge pulses, a space for accommodating electrostatic discharge pulse charge and discharge resistor and capacitor modules, and necessary good conductor metal connection structures. The good conductor metal on the electrostatic discharge pulse transmission path inside the gun head base contacts the good conductor metal on the electrostatic discharge pulse transmission path inside the gun body with low impedance; The status indicator light is an LED indicator light used to display the working status of the electrostatic discharge generator; A replaceable resistor and capacitor module is a capacitor and resistor module for charging and discharging electrostatic discharge pulses, which can be stably placed in the gun body and matched and connected to the electrostatic discharge pulse transmission path in the gun body; The gun body adapter plate is a hard material used to reinforce the gun body and fix it to the gun body bracket; The gun body bracket is made of a hard material and is used to support the gun body with the gun body adapter plate, and is used to fix the gun body on the connecting inclined plane at an inclination angle of 90° minus the inner angle of the angled gun head adapter, so as to ensure that the micro-sized gun head is vertically downward; The electrostatic discharge gun connection line includes a high-voltage power supply line and a high-voltage relay control line, and an electrostatic discharge return line can be added according to the application scenario, wherein: when the electrostatic discharge circuit of the gun body is the proximal end, the electrostatic discharge gun connection line does not need to add an electrostatic discharge return line; when the electrostatic discharge circuit of the gun body is the distal end, the electrostatic discharge gun connection line adds an electrostatic discharge return line; The electrostatic discharge generator host is used to generate the high voltage required for the gun body to generate electrostatic discharge pulses and control related parameters; A control computer is communicatively connected to the electrostatic discharge generator host and serves as a host computer to control the electrostatic discharge generator host and is used to edit electrostatic discharge pulses with specific parameter requirements.

2. An electrostatic discharge generator for integrated circuit testing as claimed in claim 1, characterized in that: The tip diameter of the micro-sized gun head is less than 1 mm; the length of the micro-sized gun head is adjustable according to the processing technology and in coordination with the mechanical strength of the gun body.

3. An electrostatic discharge generator for integrated circuit testing as claimed in claim 1, characterized in that: The angled gun tip adapter and the micro-sized gun tip are fixedly connected with each other at low impedance via metal screws.

4. An electrostatic discharge generator for integrated circuit testing as claimed in claim 1, characterized in that: The small diameter end of the gun head base is fixedly connected to the angled gun head adapter, and the large diameter end is reliably connected to the gun body through a threaded interface or a snap-on interface.

5. An electrostatic discharge generator for integrated circuit testing as claimed in claim 1, characterized in that: The gun head base and the gun body are plastic structures.

6. An electrostatic discharge generator for integrated circuit testing as claimed in claim 1, characterized in that: The hollow inner wall of the gun head base is sprayed with a metal shielding coating process to reduce the external radiation effect on the electrostatic discharge pulse transmission path, and the metal shielding coating of the hollow inner wall of the gun head base does not contact the conductor of the angled gun head adapter.

7. An electrostatic discharge generator for integrated circuit testing as claimed in claim 1, characterized in that: The front end of the gun body is a threaded interface or a snap-fit ​​interface that matches the threaded interface or the snap-fit ​​interface of the gun head base, and the rear end is a threaded interface or a snap-fit ​​interface that facilitates reliable connection with the replaceable resistor-capacitor module.

8. An electrostatic discharge generator for integrated circuit testing as claimed in claim 1, characterized in that: The inner wall of the gun body shell is sprayed with a metal shielding coating process, and the metal shielding coating on the inner wall of the gun body shell does not contact the conductor on the direct transmission channel of the electrostatic discharge pulse.

9. An electrostatic discharge generator for integrated circuit testing as claimed in claim 1, characterized in that: The gun body adapter plate and the gun body bracket are made of the same hard material, and good conductor metal or plastic can be selected according to different application scenarios, wherein: when the electrostatic discharge circuit of the gun body is at the proximal end, the gun body adapter plate and the gun body bracket are made of good conductor metal, and are connected to the electrostatic discharge circuit inside the gun body with low impedance to jointly form the electrostatic discharge circuit of the gun body; when the electrostatic discharge circuit of the gun body is at the distal end, the gun body adapter plate and the gun body bracket are made of hard plastic.

10. A control method for an electrostatic discharge generator for integrated circuit testing as claimed in claim 1, characterized in that: The following steps are involved: Step 1: The electrostatic discharge generator for integrated circuit testing is turned on and connected to a control host computer; Step 2: Set the voltage, polarity, interval time, and number of single electrostatic discharge pulses on the host computer interface to achieve test control of single electrostatic discharge pulses; Step 3: multiple single electrostatic discharge pulses set in step 2 constitute a series of electrostatic discharge pulses, namely, an electrostatic discharge pulse train or an electrostatic discharge pulse group; By setting the number and interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group on the upper computer interface, the test control of the electrostatic discharge pulse train or electrostatic discharge pulse group can be realized, wherein the interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group is usually greater than the interval time of the electrostatic discharge single pulse contained therein.

Images