An electrostatic discharge generator for integrated circuit testing and control method thereof

Abstract

One aspect of the present invention is to disclose an electrostatic discharge generator for integrated circuit testing. Another aspect of the present invention is to disclose a control method for the above-mentioned electrostatic discharge generator for integrated circuit testing. The electrostatic discharge generator for integrated circuit testing provided by the present invention is composed of a replaceable resistor-capacitor module, a gun body, an angled gun head adapter and a micro-sized gun head to form a low-parasitic effect transmission channel for electrostatic discharge pulses, ensuring that the electrostatic discharge pulses are not distorted; the gun body is supported by a gun body adapter plate and a gun body bracket at a certain tilt angle, ensuring that the micro-sized gun head is accurately and stably positioned on the pins of the integrated circuit under test, realizing accurate identification of the fine pins of the integrated circuit and avoiding mechanical stress damage to the integrated circuit under test; the electrostatic discharge generator host and the control computer can control the output of high-level, multiple electrostatic discharge pulses, etc. to meet the current needs of the integrated circuit industry for integrated circuit electrostatic discharge immunity testing.

Description

Technical Field

[0001] The invention relates to an electrostatic discharge generator for integrated circuit testing and a control method thereof, belonging to the technical field of electromagnetic compatibility testing. Background Art

[0002] Electromagnetic compatibility (EMC) testing for integrated circuits is a relatively new technology, and electrostatic discharge (ESD) immunity testing is a key component of this testing. Currently, the maximum output level of commercial ESD generators is ±9kV, while IC R&D and manufacturing manufacturers require levels exceeding ±15kV. Furthermore, existing commercial ESD generators experience high failure rates and high repair costs, making these performance limitations a critical issue that testing agencies urgently need to address. Furthermore, existing ESD generators used for device-level testing have higher output levels, exceeding ±25kV. However, these ESD guns are bulky and heavy, with large tips. ESD testing typically relies on handheld ESD guns to trigger the device. Using these ESD generators for ESD testing on IC pins presents challenges: 1. Accurate identification of delicate IC pins is difficult; 2. Minor movements caused by holding the ESD gun can affect the test voltage level and potentially cause short circuits between IC pins; 3. The weight of the ESD gun can cause mechanical stress on the IC pins, potentially damaging the IC under test. Summary of the Invention

[0003] The purpose of the present invention is to provide an electrostatic discharge generator and a control method for integrated circuit testing, which are applied to integrated circuit electrostatic discharge immunity testing, achieve high discharge voltage levels, tiny gun tips, and precise and stable test positioning. At the same time, it can control multiple electrostatic discharge pulse outputs, meet the current needs of the integrated circuit industry and ensure the accuracy and reliability of test results.

[0004] In order to achieve the above object, one aspect of the present invention is to disclose an electrostatic discharge generator for integrated circuit testing, characterized in that it includes:

[0005] Micro-sized gun tip: The tip of the micro-sized gun tip is a needle-shaped good conductor metal, used to contact the pins of the integrated circuit under test;

[0006] The angled gun tip adapter is made of angled good conductor metal and is used to connect the micro-sized gun tip and the gun tip base to ensure that the micro-sized gun tip is vertically downward;

[0007] The gun tip base is a hard structure in the shape of a hollow flat cone, used to connect the angled gun tip adapter to the gun body;

[0008] The gun body is a hard structural shell on the outside, and the inside of the gun body contains a high-voltage relay for controlling the discharge of electrostatic discharge pulses, a space for accommodating electrostatic discharge pulse charge and discharge resistor and capacitor modules, and necessary good conductor metal connection structures. The good conductor metal on the electrostatic discharge pulse transmission path inside the gun head base contacts the good conductor metal on the electrostatic discharge pulse transmission path inside the gun body with low impedance;

[0009] Status indicator light, which is an LED indicator light, is used to display the working status of the electrostatic discharge generator;

[0010] A replaceable resistance and capacitance module is a capacitor and resistance module for charging and discharging electrostatic discharge pulses, which can be stably placed in the gun body and matched with the electrostatic discharge pulse transmission path in the gun body;

[0011] The gun body adapter plate is made of a hard material and is used to reinforce the gun body and fix it to the gun body bracket;

[0012] The gun body bracket is made of a hard material and is used to support the gun body with the gun body adapter plate, and is used to fix the gun body on the connecting inclined surface at an angle equal to the inner angle of the angled gun head adapter minus 90 degrees, so as to ensure that the micro-sized gun head is vertically downward;

[0013] The electrostatic discharge gun connection line includes a high-voltage power supply line, a high-voltage relay control line, and an electrostatic discharge return line can be added according to the application scenario. When the electrostatic discharge circuit of the gun body is at the proximal end, the electrostatic discharge gun connection line does not need to be added with an electrostatic discharge return line; when the electrostatic discharge circuit of the gun body is at the distal end, the electrostatic discharge gun connection line is added with an electrostatic discharge return line.

[0014] An electrostatic discharge generator host, used to generate the high voltage required for the gun body to generate electrostatic discharge pulses and control related parameters;

[0015] The control computer is communicatively connected to the electrostatic discharge generator host and serves as a host computer to control the electrostatic discharge generator host and is used to edit electrostatic discharge pulses with specific parameter requirements.

[0016] Preferably, the tip diameter of the micro-sized gun tip is less than 1 mm; the length of the micro-sized gun tip is adjustable according to the processing technology and in coordination with the mechanical strength of the gun body.

[0017] Preferably, the angled gun tip adapter and the micro-sized gun tip are fixedly connected with each other at low impedance via metal screws.

[0018] Preferably, the small diameter end of the gun head base is fixedly connected to the angled gun head adapter, and the large diameter end is reliably connected to the gun body via a threaded interface or a snap-on interface.

[0019] Preferably, the gun head base and the gun body are plastic structures.

[0020] Preferably, the hollow inner wall of the gun tip base is sprayed with a metal shielding coating process to reduce the external radiation effect on the electrostatic discharge pulse transmission path, and the metal shielding coating on the hollow inner wall of the gun tip base does not contact the conductor of the angled gun tip adapter.

[0021] Preferably, the front end of the gun body is a threaded interface or a snap interface that matches the threaded interface or the snap interface of the gun head base, and the rear end is a threaded interface or a snap interface that facilitates reliable connection to the replaceable resistor-capacitor module.

[0022] Preferably, the inner wall of the gun body shell is sprayed with a metal shielding coating process, and the metal shielding coating on the inner wall of the gun body shell does not contact the conductor on the direct transmission channel of the electrostatic discharge pulse.

[0023] Preferably, the gun body adapter plate and the gun body bracket are made of the same hard material, and good conductor metal or plastic can be selected according to different application scenarios, wherein: when the electrostatic discharge circuit of the gun body is at the proximal end, the gun body adapter plate and the gun body bracket are made of good conductor metal, and are connected to the electrostatic discharge circuit inside the gun body with low impedance to jointly form the electrostatic discharge circuit of the gun body; when the electrostatic discharge circuit of the gun body is at the distal end, the gun body adapter plate and the gun body bracket are made of hard plastic.

[0024] Another aspect of the present invention is to disclose a control method for the electrostatic discharge generator for integrated circuit testing, characterized in that it includes the following steps:

[0025] Step 1: The electrostatic discharge generator for integrated circuit testing is turned on and connected to a control host computer;

[0026] Step 2: Set the voltage, polarity, interval time, and number of ESD single pulses on the host computer interface to achieve ESD single pulse test control.

[0027] Step 3: Multiple single electrostatic discharge pulses set in step 2 constitute a series of electrostatic discharge pulses, namely, an electrostatic discharge pulse train or an electrostatic discharge pulse group;

[0028] By setting the number and interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group on the host computer interface, the test control of the electrostatic discharge pulse train or electrostatic discharge pulse group can be realized, wherein the interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group is usually greater than the interval time of the electrostatic discharge single pulse contained therein.

[0029] Compared with the existing technical solutions, the present invention has the following beneficial technical effects: the electrostatic discharge generator for integrated circuit testing provided by the present invention is composed of a replaceable resistor-capacitor module, a gun body, an angled gun tip adapter and a micro-sized gun tip to form a low-parasitic effect transmission channel for electrostatic discharge pulses, ensuring that the electrostatic discharge pulses are not distorted; the gun body is supported by a gun body adapter plate and a gun body bracket at a certain tilt angle, ensuring that the micro-sized gun tip is accurately and stably positioned on the pins of the integrated circuit under test, thereby achieving accurate identification of the fine pins of the integrated circuit and avoiding mechanical stress damage to the integrated circuit under test; the electrostatic discharge generator host and the control computer can control the output of high-level, multiple electrostatic discharge pulses, etc. to meet the current needs of the integrated circuit industry for integrated circuit electrostatic discharge immunity testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 1 is a schematic structural diagram of an embodiment of an electrostatic discharge generator for integrated circuit testing according to the present invention;

[0031] Figure 2 This is an application example of an electrostatic discharge single pulse for integrated circuit testing of the present invention;

[0032] Figure 3 This is an application example of an electrostatic discharge generator control software interface for integrated circuit testing of the present invention. DETAILED DESCRIPTION

[0033] Below in conjunction with specific embodiment, further set forth the present invention.Should be understood that these embodiments are only used to illustrate the present invention and are not used in limiting the scope of the present invention.In addition, should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms fall equally within the scope limited by the appended claims of the application.

[0034] One aspect of the present invention is to disclose an electrostatic discharge generator for integrated circuit testing. Figure 1 As shown, it includes a micro-sized gun tip 1, an angled gun tip adapter 2, a gun tip base 3, a gun body 4, a status indicator light 5, a replaceable resistor-capacitor module 6, a gun body adapter plate 7, a gun body bracket 8, an electrostatic discharge gun connecting line 9, an electrostatic discharge generator host 10 and a control computer 11.

[0035] The tip of the micro-sized gun tip 1 is a needle-shaped, highly conductive metal tip, designed to contact the pins of the integrated circuit under test. Its tip diameter is less than 1 mm. The length of the micro-sized gun tip 1 is adjustable based on the processing technology and the mechanical strength of the gun body. In the embodiments of the present invention, to ensure low parasitic effects in the ESD pulse transmission path, its length is typically 2 cm to 4 cm.

[0036] The angled tip adapter 2 is made of a good conductor metal and is used to connect the micro-sized tip 1 and the tip base 3, ensuring that the micro-sized tip 1 is vertically downward. The angled tip adapter 2 is connected to the micro-sized tip 1 with a low-impedance fixed connection using metal screws.

[0037] The gun tip base 3 is a hard structure in the shape of a hollow flat cone, which is used to connect the angled gun tip adapter 2 and the gun body 4, wherein the small diameter end of the gun tip base 3 is fixedly connected to the angled gun tip adapter 2, and the large diameter end is a threaded interface or a snap-on interface, which is convenient for reliable connection with the gun body 4. The gun tip base 3 is a plastic structure, which is convenient for reducing weight and reducing the low parasitic effects of the electrostatic discharge pulse transmission path. The hollow inner wall of the gun tip base 3 is sprayed with a metal shielding coating process to reduce the external radiation effect on the electrostatic discharge pulse transmission path, and the metal shielding coating of the hollow inner wall must not contact the conductor of the angled gun tip adapter 2 to avoid the electrostatic discharge pulse from being directly transmitted to the metal shielding coating of the hollow inner wall of the gun tip base 3.

[0038] The exterior of the gun body 4 is a hard structural shell, and the interior contains a high-voltage relay that controls the discharge of electrostatic discharge pulses, a space for accommodating electrostatic discharge pulse charge and discharge resistor and capacitor modules, and the necessary good conductor metal connection structure. The gun body 4 is a plastic structure, which is convenient for reducing weight and reducing the low parasitic effects of the electrostatic discharge pulse transmission path. The front end of the gun body 4 is an external (or internal) threaded interface or snap-on interface that matches the internal (or external) threaded interface or snap-on interface of the gun head base 3, ensuring that the gun body 4 is reliably connected to the gun head base 3, while ensuring that the good conductor metal on the electrostatic discharge pulse transmission path inside the gun head base 3 has low impedance contact with the good conductor metal on the electrostatic discharge pulse transmission path inside the gun body 4.

[0039] The rear end of the gun body 4 features an external (or internal) threaded or snap-on interface for secure connection of replaceable resistor and capacitor modules. The inner wall of the gun body 4 housing is sprayed with a metal shielding coating process to reduce the external radiation effect on the ESD pulse transmission path. The metal shielding coating on the inner wall of the gun body 4 housing must not come into contact with the conductors in the direct ESD pulse transmission path.

[0040] The status indicator light 5 is an LED indicator light, which is used to display the working status of the electrostatic discharge generator, and the status indicator light 5 displays different colors in the discharge working state and the standby state of the electrostatic discharge generator.

[0041] The replaceable resistor-capacitor module 6 is a capacitor and resistor module for electrostatic discharge pulse charging and discharging. The replaceable resistor-capacitor module 6 can be stably placed in the gun body 4 and matched with the electrostatic discharge pulse transmission path in the gun body 4. The end of the replaceable resistor-capacitor module 6 has a cover for reliably fixing it on the gun body 4. In an embodiment of the present invention, the end cover of the replaceable resistor-capacitor module 6 is an internal (or external) threaded interface or snap-on interface that matches the external (or internal) threaded interface or snap-on interface at the rear end of the gun body 4. The capacitance and resistance values ​​of the replaceable resistor-capacitor module 6 can be replaced according to the test requirements, usually 75pF / 100Ω, 150pF / 330Ω, 330pF / 330Ω, 150pF / 2000Ω, 330pF / 2000Ω, etc.

[0042] The gun body adapter plate 7 is made of a hard material and is used to reinforce the gun body 4 and fix it to the gun body bracket 8.

[0043] The gun body bracket 8 is made of a rigid material and is used to support the gun body 4 with the gun body adapter plate 7. It is used to secure the gun body 4 on the connecting bevel at an angle equal to the inner angle of the angled gun tip adapter 2 minus 90°, ensuring that the micro-sized gun tip 1 is oriented vertically downward. The connecting bevel of the gun body bracket 8 has an angle greater than 0° to keep the gun body 4 as far away from the test table ground plane as possible, reducing parasitic effects. Furthermore, the connecting bevel of the gun body bracket 8 has an angle less than 90° to better support the gun body 4, preventing the weight of the gun body 4 from applying stress to the pins of the IC under test and reducing the risk of mechanical damage to the IC under test.

[0044] The gun body adapter plate 7 and the gun body bracket 8 are made of the same hard material, and good conductor metal or plastic can be selected according to different application scenarios, wherein: when the electrostatic discharge circuit of the gun body 4 is at the proximal end, the gun body adapter plate 7 and the gun body bracket 8 are made of good conductor metal, and are connected to the electrostatic discharge circuit inside the gun body 4 with low impedance to jointly form the electrostatic discharge circuit of the gun body 4; when the electrostatic discharge circuit of the gun body 4 is at the distal end, the gun body adapter plate 7 and the gun body bracket 8 are made of hard plastic.

[0045] The electrostatic discharge gun connection line 9 includes a high-voltage power supply line, a high-voltage relay control line, and an electrostatic discharge return line can be added according to the application scenario. When the electrostatic discharge circuit of the gun body 4 is at the proximal end, the electrostatic discharge gun connection line 9 does not need to add an electrostatic discharge return line; when the electrostatic discharge circuit of the gun body 4 is at the distal end, the electrostatic discharge gun connection line 9 adds an electrostatic discharge return line.

[0046] The high-voltage power supply line of the electrostatic discharge gun connection line 9 is wrapped with a reliable insulation layer to isolate the high voltage. The high-voltage power supply line of the electrostatic discharge gun connection line 9 and the high-voltage relay control line are routed together, and the electrostatic discharge return line that can be added according to the application scenario is routed separately.

[0047] The electrostatic discharge generator host 10 is used to generate the high voltage required by the gun body 4 to generate electrostatic discharge pulses, and to control parameters such as the voltage level, discharge interval time, polarity and number of the electrostatic discharge pulses.

[0048] The control computer 11 is communicatively connected to the ESD generator host 10 and serves as a host computer to control the ESD generator host 10 for editing ESD pulses with specific parameter requirements, such as ESD pulse groups.

[0049] A second aspect of an embodiment of the present invention provides a control method for an electrostatic discharge generator for integrated circuit testing, which uses the electrostatic discharge generator for integrated circuit testing provided by the first aspect of the present invention, including:

[0050] Step 1: The ESD generator for integrated circuit testing is turned on and connected to a control host computer. The control host computer is typically a computer. Alternatively, the control functions implemented by the control host computer can be built into the host interface of the ESD generator for integrated circuit testing.

[0051] Step 2: Set the voltage, polarity, interval, and number of ESD single pulses on the host computer interface to control the ESD single pulse test. The voltage of an ESD single pulse is typically 100V to 30kV, the polarity is typically positive (+) or negative (-), and the interval is typically 50ms to 10s. The number of ESD single pulses can be set as needed, for example, from 1 to 100.

[0052] Step 3: Multiple single ESD pulses set in step 2 constitute a string of ESD pulses, namely, an ESD pulse train or an ESD pulse group. For example, 10 times constitutes an ESD pulse train or an ESD pulse group containing 10 single ESD pulses.

[0053] By setting the number and interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group on the host computer interface, the test control of the electrostatic discharge pulse train or electrostatic discharge pulse group can be realized, wherein the interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group is usually greater than the interval time of the electrostatic discharge single pulse contained therein.

Claims

1. An electrostatic discharge generator for integrated circuit testing, characterized in that: include: Micro-sized gun tip: The tip of the micro-sized gun tip is a needle-shaped good conductor metal, used to contact the pins of the integrated circuit under test; The angled gun tip adapter is made of angled good conductor metal and is used to connect the micro-sized gun tip and the gun tip base to ensure that the micro-sized gun tip is vertically downward; The gun tip base is a hard structure in the shape of a hollow flat cone, used to connect the angled gun tip adapter to the gun body; The gun body is a hard structural shell on the outside, and the inside of the gun body contains a high-voltage relay for controlling the discharge of electrostatic discharge pulses, a space for accommodating electrostatic discharge pulse charge and discharge resistor and capacitor modules, and necessary good conductor metal connection structures. The good conductor metal on the electrostatic discharge pulse transmission path inside the gun head base contacts the good conductor metal on the electrostatic discharge pulse transmission path inside the gun body with low impedance; Status indicator light, which is an LED indicator light, is used to display the working status of the electrostatic discharge generator; A replaceable resistance and capacitance module is a capacitor and resistance module for charging and discharging electrostatic discharge pulses, which can be stably placed in the gun body and matched with the electrostatic discharge pulse transmission path in the gun body; The gun body adapter plate is made of a hard material and is used to reinforce the gun body and fix it to the gun body bracket; The gun body bracket is made of a hard material and is used to support the gun body with the gun body adapter plate, and is used to fix the gun body on the connecting inclined surface at an angle equal to the inner angle of the angled gun head adapter minus 90 degrees, so as to ensure that the micro-sized gun head is vertically downward; The electrostatic discharge gun connection line includes a high-voltage power supply line, a high-voltage relay control line, and an electrostatic discharge return line can be added according to the application scenario. When the electrostatic discharge circuit of the gun body is at the proximal end, the electrostatic discharge gun connection line does not need to be added with an electrostatic discharge return line; when the electrostatic discharge circuit of the gun body is at the distal end, the electrostatic discharge gun connection line is added with an electrostatic discharge return line. An electrostatic discharge generator host, used to generate the high voltage required for the gun body to generate electrostatic discharge pulses and control related parameters; The control computer is communicatively connected to the electrostatic discharge generator host and serves as a host computer to control the electrostatic discharge generator host and is used to edit electrostatic discharge pulses with specific parameter requirements.

2. An electrostatic discharge generator for integrated circuit testing as claimed in claim 1, characterized in that: The tip diameter of the micro-sized gun head is less than 1 mm; the length of the micro-sized gun head is adjustable according to the processing technology and the coordination with the mechanical strength of the gun body.

3. The electrostatic discharge generator for integrated circuit testing according to claim 1, wherein: The angled gun tip adapter and the micro-sized gun tip are fixedly connected with each other through metal screws with low impedance.

4. The electrostatic discharge generator for integrated circuit testing according to claim 1, wherein: The small diameter end of the gun head base is fixedly connected to the angled gun head adapter, and the large diameter end is reliably connected to the gun body through a threaded interface or a snap interface.

5. The electrostatic discharge generator for integrated circuit testing according to claim 1, wherein: The gun head base and the gun body are plastic structures.

6. The electrostatic discharge generator for integrated circuit testing according to claim 1, wherein: The hollow inner wall of the gun head base is sprayed with a metal shielding coating process to reduce the external radiation effect on the electrostatic discharge pulse transmission path, and the metal shielding coating on the hollow inner wall of the gun head base does not contact the conductor of the angled gun head adapter.

7. The electrostatic discharge generator for integrated circuit testing according to claim 1, wherein: The front end of the gun body is a threaded interface or a snap interface that matches the threaded interface or the snap interface of the gun head base, and the rear end is a threaded interface or a snap interface that is convenient for reliable connection to the replaceable resistor-capacitor module.

8. The electrostatic discharge generator for integrated circuit testing according to claim 1, wherein: The inner wall of the gun body shell is sprayed with a metal shielding coating process, and the metal shielding coating on the inner wall of the gun body shell does not contact the conductor on the direct transmission channel of the electrostatic discharge pulse.

9. The electrostatic discharge generator for integrated circuit testing according to claim 1, wherein: The gun body adapter plate and the gun body bracket are made of the same hard material, and good conductor metal or plastic can be selected according to different application scenarios, wherein: when the electrostatic discharge circuit of the gun body is at the proximal end, the gun body adapter plate and the gun body bracket are made of good conductor metal, and are connected to the electrostatic discharge circuit inside the gun body with low impedance to jointly form the electrostatic discharge circuit of the gun body; when the electrostatic discharge circuit of the gun body is at the distal end, the gun body adapter plate and the gun body bracket are made of hard plastic.

10. A control method for an electrostatic discharge generator for integrated circuit testing according to claim 1, characterized in that: The following steps are involved: Step 1: The electrostatic discharge generator for integrated circuit testing is turned on and connected to a control host computer; Step 2: Set the voltage, polarity, interval time, and number of ESD single pulses on the host computer interface to achieve ESD single pulse test control. Step 3: Multiple single electrostatic discharge pulses set in step 2 constitute a series of electrostatic discharge pulses, namely, an electrostatic discharge pulse train or an electrostatic discharge pulse group; By setting the number and interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group on the host computer interface, the test control of the electrostatic discharge pulse train or electrostatic discharge pulse group can be realized, wherein the interval time of the electrostatic discharge pulse train or electrostatic discharge pulse group is usually greater than the interval time of the electrostatic discharge single pulse contained therein.

Images