Physical vapor deposition (PVD) coating tissue biopsy medical instrument

Abstract

The invention discloses a PVD (Physical Vapor Deposition) coating tissue biopsy medical instrument which is prepared by the following steps: S1, putting a tool into an ultrasonic cleaning machine for cleaning, and putting the tool into a special jig for a vacuum chamber; s2, vacuumizing the vacuum chamber, introducing negative voltage into the tool, introducing CF4 or CCl4 and O2 gas, continuously working for 30-100 minutes, completely closing reaction gas, and completing the lotus leaf structure; and S3, after the lotus leaf structure is completed, a metal ceramic film is plated on the tool, and all sources and power sources are turned off. According to the PVD coating tissue biopsy medical instrument, negative voltage is introduced into a tool, different reaction times are controlled according to different gas flows, so that a layer of metal ceramic film is plated on the tool, and the total thickness of the metal ceramic film is controlled to be 0.5-1.5 microns. According to the PVD coating tissue biopsy medical instrument, a layer of lotus leaf-like structure is formed on the surface of the tool through etching by ionizing a gas medium; and then plating a layer of metal ceramic film with nano thickness on the surface of the structure by adopting a high-energy pulse magnetron sputtering technology.

Description

Technical Field

[0001] The invention relates to the technical field of medical tissue biopsy tools, in particular to a PVD-coated tissue biopsy medical device. Background Art

[0002] Biopsy medical devices are usually made of metal. There are many types of biopsy medical devices now. They are mainly used by doctors when diagnosing and treating patients. Therefore, biopsy medical devices usually come into contact with tissue and skin. After the biopsy medical device comes into contact with skin tissue, the tissue will adhere to the biopsy medical device, and then gradually corrode the biopsy medical device, causing the coating on the surface of the biopsy medical device to disappear, thereby damaging the biopsy medical device. Even after the coating on the biopsy medical device is damaged, the doctor's use of the biopsy medical device will cause physical effects on the patient.

[0003] Biopsy medical instrument tools are metal steel parts, which are easily adhered to tissues and corroded and worn during use, causing the coating on the surface of the biopsy medical instrument tools to be corroded and worn away. Therefore, this solution uses PVD technology to manufacture a layer of special structure and material on the surface of the biopsy medical instrument tools to solve the problem of wear and corrosion on the surface of the biopsy medical instrument tools. Summary of the invention

[0004] The object of the present invention is to provide a PVD coated tissue biopsy medical device to solve the problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: a PVD coated tissue biopsy medical device, comprising the following steps:

[0006] S1: Put the tool into the ultrasonic cleaning machine to clean it, and then install it into the special fixture for the vacuum chamber;

[0007] S2: Evacuate the vacuum chamber, introduce negative voltage to the tool, and pass CF 4 or CCl 4 , O 2 Gas, continue to work for 30-100 minutes, completely shut down the reaction gas, and the lotus leaf structure is completed;

[0008] S3: After the lotus leaf structure is completed, the tool is plated with a metal ceramic film, all sources and power supplies are turned off, and the vacuum is continued to be evacuated to below 10E-3, and heated to 300-400℃;

[0009] S4: Then introduce negative voltage to the tool, frequency 60KHz, voltage 200-600V, keep the power supply working and then introduce H 2 When the pressure reaches 1-2 Pa, maintain it for 10-30 minutes to complete the surface atomic activation and prepare for the coating of metal ceramic film;

[0010] S5: Close H 2 , turn on Ar, N 2 , CH 4 Gas, working pressure is controlled at 0.5-0.8Pa, the evaporation source is chromium, titanium or one of them, working current is 30-100A; negative voltage is introduced into the tool, and different reaction times are controlled according to different gas flow rates, so as to coat a layer of metal ceramic film on the tool, and the total thickness of the metal ceramic film is controlled at 0.5-1.5um.

[0011] Preferably, in step S2, the vacuum pressure is maintained below 10E-3Pa.

[0012] Preferably, the frequency of the negative voltage in step S2 is 100KHZ and the voltage is 100-500V.

[0013] Preferably, the CF 4 or CCl 4 , O 2 The gas pressure is controlled at 0.5-5Pa

[0014] Preferably, the frequency of the negative voltage in step S5 is 20-60KHZ, and the voltage is 80-200V.

[0015] Preferably, in step S5, the gas flow rate is 1:0:0 for 1-10 minutes, the flow rate is 1:0.5:0 for 1-10 minutes, the flow rate is 1:5:0 for 1-10 minutes, the flow rate is 0:1:0 for 1-10 minutes, and the flow rate is 0:1:0.1 for 1-10 minutes, thereby coating a layer of metal ceramic film on the tool, and the total thickness of the metal ceramic film is controlled at 0.5-1.5um.

[0016] Compared with the prior art, the present invention has the following beneficial effects: the PVD coated tissue biopsy medical device first uses a high-energy ion source, puts the tool into an ultrasonic cleaning machine for cleaning, and then installs it on a special fixture for a vacuum chamber, evacuates the vacuum chamber, introduces a negative voltage into the tool, and passes CF 4 or CCl 4 , O 2 Gas, continue working for 30-100 minutes, completely turn off the reaction gas, the lotus leaf structure is completed, after the lotus leaf structure is completed, the tool is plated with a metal ceramic film, all sources and power supplies are turned off, continue to evacuate to below 10E-3, and heat to 300-400℃, then introduce negative voltage to the tool, frequency 60KHz, voltage 200-600V, keep the power supply working and then introduce H 2 When the pressure is 1-2 Pa, maintain it for 10-30 minutes to complete the surface atomic activation and prepare for the coating of metal ceramic film. 2 , turn on Ar, N2 , CH 4 Gas, the working pressure is controlled at 0.5-0.8Pa, the evaporation source is chromium, titanium or one of them, and the working current is 30-100A; a negative voltage is introduced into the tool, and different reaction times are controlled according to different gas flow rates, so that a layer of metal ceramic film is plated on the tool, and the total thickness of the metal ceramic film is controlled at 0.5-1.5um. The present invention etches a layer of lotus leaf-like structure on the surface of the tool through ionized gas medium, and then uses high-energy pulse magnetron sputtering technology to plate a layer of nanometer-thick metal ceramic film on the surface of the structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the process distribution of the present invention. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] Example 1: Please refer to Figure 1 The present invention provides a technical solution: a PVD coated tissue biopsy medical device, comprising the following steps:

[0020] S1: Put the tool into the ultrasonic cleaning machine to clean it, and then install it into the special fixture for the vacuum chamber;

[0021] S2: Evacuate the vacuum chamber, introduce negative voltage to the tool, and pass CF 4 or CCl 4 , O 2 Gas, completely shut off the reaction gas, and the lotus leaf structure is completed;

[0022] S3: After the lotus leaf structure is completed, the tool is plated with a metal ceramic film, all sources and power supplies are turned off, and the vacuum chamber is heated after the vacuum is continued to be evacuated to a certain pressure;

[0023] S4: Then introduce negative voltage into the tool, keep the power supply working and then introduce H 2 , until the surface atomic activation is completed, ready for coating of metal ceramic film.

[0024] S5: Close H 2 , turn on Ar, N 2 , CH 4Gas is introduced into the tool and reacts under a suitable working pressure, where the evaporation source is chromium, titanium or one of them; then a negative voltage is introduced into the tool, and different reaction times are controlled according to different gas flow rates, thereby coating a metal ceramic film on the tool.

[0025] Example 2: A PVD coated tissue biopsy medical device, comprising the following steps:

[0026] S1: Put the tool into the ultrasonic cleaning machine to clean it, and then install it into the special fixture for the vacuum chamber;

[0027] S2: Evacuate the vacuum chamber, keep the vacuum pressure below 10E-3Pa, and introduce negative voltage into the tool, the frequency of the negative voltage is 100KHZ and the voltage is 100-500V, and pass CF 4 or CCl 4 , O 2 Gas, CF 4 or CCl 4 , O 2 The gas pressure is controlled at 0.5-5Pa, and the operation is continued for 30-100 minutes. The reaction gas is completely shut off, and the lotus leaf structure is completed.

[0028] S3: After the lotus leaf structure is completed, the tool is plated with a metal ceramic film, all sources and power supplies are turned off, and the vacuum is continued to be evacuated to below 10E-3, and heated to 300-400℃.

[0029] S4: Then introduce negative voltage to the tool, frequency 60KHz, voltage 200-600V, keep the power supply working and then introduce H 2 When the pressure reaches 1-2Pa, maintain it for 10-30 minutes to complete the surface atomic activation and prepare for the coating of metal ceramic film.

[0030] S5: Close H 2 , turn on Ar, N 2 , CH 4 Gas, working pressure is controlled at 0.5-0.8Pa, the evaporation source is chromium, titanium or one of them, working current is 30-100A; negative voltage is introduced into the tool, the frequency of the negative voltage is 20-60KHZ, the voltage is 80-200V, and different reaction times are controlled according to different flow rates, the flow rate is 1:0:0 ratio and works for 1-10 minutes, the flow rate is 1:0.5:0 and works for 1-10 minutes, the flow rate is 1:5:0 and works for 1-10 minutes, the flow rate is 0:1:0 and works for 1-10 minutes, the flow rate is 0:1:0.1 and works for 1-10 minutes, thereby coating a layer of metal ceramic film on the tool, and the total thickness of the metal ceramic film is controlled at 0.5-1.5um, thereby coating a layer of metal ceramic film on the tool, and the total thickness of the metal ceramic film is controlled at 0.5-1.5um.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A PVD coated tissue biopsy medical device, characterized in that: The following steps are involved: S1: Put the tool into the ultrasonic cleaning machine to clean it, and then install it into the special fixture for the vacuum chamber; S2: Evacuate the vacuum chamber, introduce negative voltage into the tool, introduce CF4 or CCl4, O2 gas, continue working for 30-100 minutes, completely turn off the reaction gas, and the lotus leaf structure is completed; S3: After the lotus leaf structure is completed, the tool is plated with a metal ceramic film, all sources and power supplies are turned off, and the vacuum is continued to be evacuated to below 10E-3, and heated to 300-400℃; S4: Then, negative voltage is introduced to the tool, the frequency is 60KHz, the voltage is 200-600V, the power supply is kept working, and H2 is introduced to the pressure of 1-2Pa, and maintained for 10-30 minutes to complete the surface atomic activation, in preparation for the coating of metal ceramic film; S5: Turn off H2, turn on Ar, N2, and CH4 gases, control the working pressure at 0.5-0.8Pa, the evaporation source is chromium, titanium or one of them, and the working current is 30-100A; introduce negative voltage into the tool, and control different reaction times according to different gas flow rates, so as to coat a layer of metal ceramic film on the tool, and the total thickness of the metal ceramic film is controlled at 0.5-1.5um.

2. A PVD coated tissue biopsy medical device according to claim 1, characterized in that: In step S2, the vacuum pressure is maintained below 10E-3Pa.

3. A PVD coated tissue biopsy medical device according to claim 1, characterized in that: The frequency of the negative voltage in step S2 is 100KHZ and the voltage is 100-500V.

4. A PVD coated tissue biopsy medical device according to claim 1, characterized in that: The gas pressure of the CF4 or CCl4, O2 gas is controlled at 0.5-5Pa.

5. A PVD coated tissue biopsy medical device according to claim 1, characterized in that: In step S5, the frequency of the negative voltage is 20-60KHZ, and the voltage is 80-200V.

6. A PVD coated tissue biopsy medical device according to claim 1, characterized in that: In the step S5, the gas flow rate is 1:0:0 for 1-10 minutes, the flow rate is 1:0.5:0 for 1-10 minutes, the flow rate is 1:5:0 for 1-10 minutes, the flow rate is 0:1:0 for 1-10 minutes, and the flow rate is 0:1:0.1 for 1-10 minutes, thereby coating a metal ceramic film on the tool, and the total thickness of the metal ceramic film is controlled at 0.5-1.5um.

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