Directional installation semiconductor test probe set

Abstract

The invention discloses a directionally-installed semiconductor test probe set, and relates to the technical field of semiconductor detection, and the directionally-installed semiconductor test probe set comprises three sets of needle tubes, the top end of each set of needle tubes is fixedly connected with a detector, the bottom end of each detector abuts against and is connected with a needle shaft, the needle shafts are arranged in the needle tubes, and the bottom ends of the needle shafts are fixedly connected with springs; the spring is arranged in the needle tube, the bottom end of the spring is fixedly connected with a connecting column, the connecting column is in sliding connection with the inner wall of the needle tube, the bottom end of the connecting column is fixedly connected with a probe, the inner wall of the center of the directional mounting base is fixedly connected with the needle tube, sliding grooves are formed in the two ends of the directional mounting base respectively, and the two sets of sliding bases are in sliding connection with the inner walls of the sliding grooves respectively. The inner wall of the sliding seat is fixedly connected with the needle tube; three groups of probes are arranged to detect the solder balls, and when one group of probes misses the solder balls, the other two groups of probes still can be in contact with the solder balls.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor detection, and in particular to a semiconductor test probe group installed in a directional manner. Background Art

[0002] Semiconductor testing refers to a series of inspection and testing activities carried out on semiconductor materials, devices, integrated circuits, etc. during the semiconductor manufacturing process. These inspection activities are aimed at ensuring that semiconductor products meet specific performance and quality standards at various stages such as design, production, packaging and testing.

[0003] In the prior art, semiconductors are inspected by testing machines, sorting machines and probe machines respectively. The probe machine is mainly composed of a probe, a needle shaft, a needle tube and a spring. When the needle tip of the probe contacts the solder ball, the needle tip compresses the spring in the needle tube, and the stress generated by the spring supports the needle shaft for testing.

[0004] However, when only one probe is used in existing semiconductor inspection, the solder balls are small in size, some solder balls are closer to the lower limit in size, or the position deviation of the solder balls when implanted in the chip is large. As a result, the existing semiconductor probe cannot guarantee that all test needles can contact the solder balls during the chip testing process, resulting in the misjudgment of good products as defective products, which in turn reduces the chip yield and causes the chip testing accuracy to fail to meet actual usage requirements. Summary of the invention

[0005] The purpose of the present invention is to provide a semiconductor test probe group that is installed in a direction to solve the technical problem in the prior art that when only one probe is used for existing semiconductor detection, due to the small size of the solder balls themselves, the size of some solder balls is closer to the lower limit, or the position deviation of the solder balls when implanted into the chip is large, the existing semiconductor probe cannot ensure that all test needles can contact the solder balls during the chip testing process, resulting in the misjudgment of good products as defective products, which in turn leads to a reduction in chip yield and causes the chip testing accuracy to fail to meet actual usage requirements.

[0006] The technical problem to be solved by the present invention can be achieved by the following technical solutions:

[0007] Directional mounting semiconductor test probe set, including:

[0008] Needle tubes, the needle tubes are provided with three groups, the top of each group of needle tubes is fixedly connected to a detector, the bottom of the detector is abutted and connected to a needle shaft, the needle shaft is arranged in the needle tube and the bottom is fixedly connected to a spring, the spring is arranged in the needle tube and the bottom is fixedly connected to a connecting column, the connecting column is slidably connected to the inner wall of the needle tube and the bottom is fixedly connected to a probe;

[0009] A directional mounting seat, wherein the central inner wall of the directional mounting seat is fixedly connected to the needle tube, and sliding grooves are respectively provided at both ends of the directional mounting seat;

[0010] The slide seat is provided with two groups, the two groups of slide seats are respectively slidably connected to the inner wall of the slide groove, and the inner wall of the slide seat is fixedly connected to the needle tube.

[0011] As a further solution of the present invention: a connector in the shape of a hemisphere is fixedly connected to the bottom end of the probe.

[0012] As a further solution of the present invention: threaded holes are respectively formed at both ends of the slide seat in a direction perpendicular to the axis of the needle tube, and a threaded rod is threadedly connected to the inner wall of the threaded hole, and the threaded rod is parallel to the direction of the axis of the directional mounting seat.

[0013] As a further solution of the present invention: a hemispherical positioning seat is fixedly connected to the side end of the threaded rod, a positioning groove is opened at the side end of the directional mounting seat, and the positioning seat is rotatably connected to the inner wall of the positioning groove.

[0014] As a further solution of the present invention: limiting holes are respectively opened on both sides of the center of the directional mounting seat in a direction perpendicular to the axis of the needle tube, the limiting holes are rotatably connected to the inner wall of the threaded rod, and rotation grooves are respectively opened on both sides of the center of the directional mounting seat along the axis of the threaded rod.

[0015] As a further solution of the present invention: the rotating groove and the limiting hole are communicated with each other, a rotating plate is rotatably connected to the inner wall of the rotating groove, and the rotating plate is fixedly connected to the outer wall of the threaded rod.

[0016] As a further solution of the present invention: a heat-insulating shell is provided outside the needle tube, an inner wall of the heat-insulating shell is fixedly connected to a directional mounting seat, and a driving assembly is fixedly connected to a side end of the threaded rod.

[0017] As a further solution of the present invention: an open groove is opened at the bottom of the insulation shell along the direction of the axis of the directional mounting seat, the inner wall of the open groove is slidably connected to the needle tube, and the side end of the directional mounting seat is fixedly connected to a temperature control component.

[0018] As a further solution of the present invention: the temperature control component is arranged in the heat-insulating shell, and the temperature control component includes: a heating conductor and a sensor, and the heating conductor and the top of the sensor are respectively fixedly connected to the directional mounting seat.

[0019] As a further solution of the present invention: the driving assembly includes: a driven wheel, a servo motor, a connecting belt and a rotating shaft, the threaded rod is provided with two groups, the driven wheels are provided with two groups and are respectively fixedly connected to the side ends of the threaded rods, the insulation shell is respectively provided with rotating holes on both sides of an end close to the servo motor, the inner walls of the rotating holes are rotatably connected to the threaded rods, the connecting belts are respectively sleeved and connected to the two groups of driven wheels and the rotating shaft, the servo motor is fixedly connected to the rotating shaft, a number of support rods are provided between the servo motor and the insulation shell, the several support rods are respectively located around the servo motor and the two ends are respectively fixedly connected to the insulation shell and the servo motor.

[0020] Beneficial effects of the present invention:

[0021] 1. In order to prevent a single probe from missing the solder ball, three groups of probes are set to detect the solder ball. When one group of probes misses the solder ball, the other two groups of probes can still contact the solder ball. When the probes and the solder ball are against each other, the probes move upward to press against the connecting column. The connecting column slides along the inner wall of the needle tube to compress the spring. The spring converts the pressing force into elastic force, and then transmits the elastic force to the needle shaft. The needle shaft presses against the detector, and the detector detects the pressing force. Setting the servo motor group probe can avoid the phenomenon of not being able to contact the solder ball, thereby ensuring the adequacy of semiconductor detection.

[0022] 2. In order to detect solder balls of different diameters, the slide can be controlled to slide along the inner wall of the slide groove, so that the slide carries the two sets of needle tubes to move toward the needle tubes fixed in the center of the directional mounting seat, thereby adjusting the distance between the three sets of probes to ensure that the three sets of probes can detect solder balls of different diameters and avoid the phenomenon of probes missing and solder balls being held together due to the large distance between the three sets of probes. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The present invention will be further described below in conjunction with the accompanying drawings.

[0024] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0025] Figure 2 It is a top view of the overall structure of the present invention;

[0026] Figure 3 It is the AA cross-sectional view of the overall structure of the present invention;

[0027] Figure 4 It is a cross-sectional view of the overall structure BB of the present invention;

[0028] Figure 5 It is a cross-sectional view of the overall structure CC of the present invention;

[0029] Figure 6 For the present invention Figure 4 A schematic diagram of the structure at A;

[0030] Figure 7 For the present invention Figure 5 A schematic diagram of the structure at B;

[0031] Figure 8 It is a schematic diagram of the structure of the driving assembly of the present invention;

[0032] Fig. 9 It is a schematic diagram of the slide structure of the present invention;

[0033] Fig.10 It is a schematic diagram of the structure of the directional mounting seat of the present invention.

[0034] In the figure: 1. insulation shell; 2. driven wheel; 3. servo motor; 4. connecting belt; 5. probe; 6. connector; 7. connecting column; 8. needle tube; 9. spring; 10. heating conductor; 11. sensor; 12. directional mounting seat; 13. needle shaft; 14. detector; 15. threaded rod; 16. slide groove; 17. open groove; 18. rotating shaft; 19. support rod; 20. rotating hole; 21. sliding seat; 22. threaded hole; 23. positioning seat; 24. positioning groove; 25. limiting hole; 26. rotating plate; 27. rotating groove. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] like Figure 1-Figure 10 As shown, the semiconductor test probe set for directional installation includes: a needle tube 8, a directional installation seat 12 and a slide seat 21.

[0037] The needle tubes 8 are provided with three groups, each group of needle tubes 8 has a detector 14 fixedly connected to the top, the detector 14 has a needle shaft 13 abutted against the bottom, the needle shaft 13 is arranged in the needle tube 8 and has a spring 9 fixedly connected to the bottom, the spring 9 is arranged in the needle tube 8 and has a connecting column 7 fixedly connected to the bottom, the connecting column 7 is slidably connected to the inner wall of the needle tube 8 and has a probe 5 fixedly connected to the bottom, the central inner wall of the directional mounting seat 12 is fixedly connected to the needle tube 8, the two ends of the directional mounting seat 12 are respectively provided with slide grooves 16, the slide seat 21 is provided with two groups, the two groups of slide seats 21 are respectively slidably connected to the inner wall of the slide groove 16, the inner wall of the slide seat 21 is fixedly connected to the needle tube 8, in order to In order to avoid a single probe 5 missing the solder ball, three groups of probes 5 are set to detect the solder ball. When one group of probes 5 misses the solder ball, the other two groups of probes 5 can still contact the solder ball. When the probes 5 and the solder ball are against each other, the probes 5 move upward to abut against the connecting column 7. The connecting column 7 slides along the inner wall of the needle tube 8 to compress the spring 9. The spring 9 converts the abutting force into an elastic force, and then transmits the elastic force to the needle shaft 13. The needle shaft 13 abuts against the detector 14. The detector 14 detects the abutting force. The servo motor and three groups of probes 5 can avoid the phenomenon of not being able to contact the solder ball, thereby ensuring the adequacy of semiconductor detection.

[0038] In order to detect solder balls of different diameters, the slide 21 can be controlled to slide along the inner wall of the slide groove 16, so that the slide 21 carries the two groups of needle tubes 8 to move toward the needle tube 8 fixed in the center of the directional mounting seat 12, thereby adjusting the distance between the three groups of probes 5 to ensure that the three groups of probes 5 can detect solder balls of different diameters and avoid the phenomenon that the probes 5 miss and resist the solder balls due to the large distance between the three groups of probes 5.

[0039] In some specific embodiments, a hemispherical connector 6 is fixedly connected to the bottom of the probe 5. When the probe 5 contacts the semiconductor, the connector 6 fixed to the bottom of the probe 5 can contact the semiconductor. The shape of the connector 6 can avoid scratching the semiconductor.

[0040] In some specific embodiments, threaded holes 22 are respectively provided at both ends of the slide 21 in a direction perpendicular to the axis of the needle tube 8, and a threaded rod 15 is threadedly connected to the inner wall of the threaded hole 22. The threaded rod 15 is parallel to the direction of the axis of the directional mounting seat 12. When the slide 21 carries the needle tube 8 for spacing adjustment, the thread lines of the threaded holes 22 opened in the two groups of slides 21 are in opposite directions. When the threaded rod 15 rotates, the threaded rod 15 carries the slide 21 to slide along the inner wall of the slide groove 16 through the threaded connection with the threaded hole 22.

[0041] In some specific embodiments, a hemispherical positioning seat 23 is fixedly connected to the side end of the threaded rod 15, and a positioning groove 24 is opened at the side end of the directional mounting seat 12. The positioning seat 23 is rotatably connected to the inner wall of the positioning groove 24. When the threaded rod 15 rotates, the threaded rod 15 rotates on the inner wall of the positioning groove 24 with the positioning seat 23. The abutment between the positioning seat 23 and the inner wall of the positioning groove 24 can provide a limiting support for the threaded rod 15, thereby avoiding the deviation of the side end of the threaded rod 15.

[0042] In some specific embodiments, limiting holes 25 are respectively provided on both sides of the center of the directional mounting seat 12 in a direction perpendicular to the axis of the needle tube 8, the limiting holes 25 are rotatably connected to the inner wall of the threaded rod 15, and rotation grooves 27 are respectively provided on both sides of the center of the directional mounting seat 12 along the axis of the threaded rod 15. When the threaded rod 15 rotates, the threaded rod 15 rotates along the inner wall of the limiting hole 25, and the inner wall of the limiting hole 25 limits the threaded rod 15, thereby avoiding vibration in the center of the threaded rod 15.

[0043] In some specific embodiments, the rotating groove 27 and the limiting hole 25 are interconnected, and the inner wall of the rotating groove 27 is rotatably connected to a rotating plate 26, and the rotating plate 26 is fixedly connected to the outer wall of the threaded rod 15. When the threaded rod 15 rotates, the threaded rod 15 rotates along the inner wall of the rotating groove 27 with the rotating plate 26, wherein the rotating plate 26 and the inner wall of the rotating groove 27 abut against each other to provide a limiting effect for the threaded rod 15, thereby preventing the threaded rod 15 from being laterally offset when the threaded rod 15 drives the slide seat 21 to move.

[0044] In some specific embodiments, an insulation shell 1 is provided on the outside of the needle tube 8, the inner wall of the insulation shell 1 is fixedly connected to the directional mounting seat 12, and the side end of the threaded rod 15 is fixedly connected to a driving assembly. When the threaded rod 15 needs to rotate, the driving assembly can drive the threaded rod 15 to rotate. The insulation shell 1 can provide a constant temperature environment for the connecting column 7, the needle tube 8, the spring 9, the needle shaft 13 and the detector 14, and insulation material can be added inside the insulation shell 1 to prevent the external environment temperature from being too low and affecting the normal operation of the connecting column 7, the needle tube 8, the spring 9, the needle shaft 13 and the detector 14.

[0045] In some specific embodiments, an open groove 17 is opened at the bottom of the insulation shell 1 along the direction of the axis of the directional mounting seat 12, and the inner wall of the open groove 17 is slidably connected to the needle tube 8. The side end of the directional mounting seat 12 is fixedly connected with a temperature control component. When the slide seat 21 moves with the needle tube 8, the needle tube 8 can slide along the inner wall of the open groove 17, and the inner wall of the open groove 17 limits the two sides of the needle tube 8. When the external low-temperature air enters the insulation shell 1 through the open groove 17, the temperature control component detects that the temperature inside the insulation shell 1 is too low, and the temperature control component operates to heat the insulation shell 1, thereby ensuring that the temperature inside the insulation shell 1 is in a constant temperature state.

[0046] In some specific embodiments, a temperature control component is disposed in the insulation shell 1, and the temperature control component includes: a heating conductor 10 and a sensor 11. The top ends of the heating conductor 10 and the sensor 11 are respectively fixedly connected to a directional mounting seat 12. When the sensor 11 detects that the temperature inside the insulation shell 1 is too low, the heating conductor 10 operates and heats the insulation shell 1, thereby ensuring that the insulation shell 1 is in a constant temperature state. The sensor 11 can be installed and fixed at a position close to the needle tube 8.

[0047] In some specific embodiments, the driving assembly includes: a driven wheel 2, a servo motor 3, a connecting belt 4 and a rotating shaft 18, the threaded rod 15 is provided with two groups, the driven wheel 2 is provided with two groups and is respectively fixedly connected to the side ends of the threaded rod 15, the heat preservation shell 1 is provided with rotating holes 20 on both sides of one end close to the servo motor 3, the inner wall of the rotating hole 20 is rotatably connected to the threaded rod 15, the connecting belt 4 is respectively sleeved and connected to the two groups of driven wheels 2 and the rotating shaft 18, the servo motor 3 is fixedly connected to the rotating shaft 18, and the servo motor 3 and the heat preservation shell 1 are respectively provided with rotating holes 20. A plurality of support rods 19 are arranged in between, and the plurality of support rods 19 are respectively located around the servo motor 3 and the two ends are respectively fixedly connected to the insulation shell 1 and the servo motor 3. When the threaded rod 15 needs to rotate, the servo motor 3 runs, and the servo motor 3 drives the rotating shaft 18 to rotate, and the rotating shaft 18 drives the sleeved connecting belt 4 to move, and the connecting belt 4 drives the two sets of driven wheels 2 to rotate, and the driven wheel 2 drives the threaded rod 15 to rotate, wherein the servo motor 3 can be fixed on the insulation shell 1 by the support rods 19.

[0048] Several embodiments of the present invention are described in detail above, but the embodiments of the present invention are not limited thereto and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A semiconductor test probe assembly for directional installation, characterized in that: include: A needle tube (8), wherein the needle tube (8) is provided with three groups, the top end of each group of needle tubes (8) is fixedly connected to a detector (14), the bottom end of the detector (14) is abutted and connected to a needle shaft (13), the needle shaft (13) is arranged in the needle tube (8) and the bottom end is fixedly connected to a spring (9), the spring (9) is arranged in the needle tube (8) and the bottom end is fixedly connected to a connecting column (7), the connecting column (7) is slidably connected to the inner wall of the needle tube (8) and the bottom end is fixedly connected to a probe (5); A directional mounting seat (12), wherein the central inner wall of the directional mounting seat (12) is fixedly connected to the needle tube (8), and sliding grooves (16) are respectively provided at both ends of the directional mounting seat (12); The slide seat (21) is provided with two groups, and the two groups of slide seats (21) are respectively slidably connected to the inner wall of the slide groove (16), and the inner wall of the slide seat (21) is fixedly connected to the needle tube (8).

2. The semiconductor test probe assembly for directional installation according to claim 1, characterized in that: The bottom end of the probe (5) is fixedly connected to a connector (6) in the shape of a hemisphere.

3. The semiconductor test probe assembly for directional installation according to claim 1, characterized in that: The two ends of the slide seat (21) are respectively provided with threaded holes (22) in a direction perpendicular to the axis of the needle tube (8); the inner wall of the threaded hole (22) is threadedly connected with a threaded rod (15); and the threaded rod (15) is parallel to the direction of the axis of the directional mounting seat (12).

4. The semiconductor test probe assembly for directional installation according to claim 3, characterized in that: A hemispherical positioning seat (23) is fixedly connected to the side end of the threaded rod (15), a positioning groove (24) is provided at the side end of the directional mounting seat (12), and the positioning seat (23) is rotatably connected to the inner wall of the positioning groove (24).

5. The semiconductor test probe assembly for directional installation according to claim 3, characterized in that: The directional mounting seat (12) has two central sides respectively provided with limiting holes (25) penetrating in a direction perpendicular to the axis of the needle tube (8); the limiting holes (25) are rotatably connected to the inner wall of the threaded rod (15); and the directional mounting seat (12) has two central sides respectively provided with rotation grooves (27) along the axis of the threaded rod (15).

6. The semiconductor test probe assembly for directional installation according to claim 5, characterized in that: The rotating groove (27) and the limiting hole (25) are communicated with each other, and the inner wall of the rotating groove (27) is rotatably connected with a rotating plate (26), and the rotating plate (26) is fixedly connected to the outer wall of the threaded rod (15).

7. The semiconductor test probe assembly for directional installation according to claim 3, characterized in that: A heat-insulating shell (1) is disposed outside the needle tube (8), the inner wall of the heat-insulating shell (1) is fixedly connected to a directional mounting seat (12), and the side end of the threaded rod (15) is fixedly connected to a driving assembly.

8. The semiconductor test probe assembly for directional installation according to claim 7, characterized in that: An open groove (17) is provided at the bottom of the heat-insulating shell (1) along the direction of the axis of the directional mounting seat (12); the inner wall of the open groove (17) is slidably connected to the needle tube (8); and a temperature control component is fixedly connected to the side end of the directional mounting seat (12).

9. The semiconductor test probe assembly for directional installation according to claim 8, characterized in that: The temperature control component is arranged in the heat-insulating shell (1), and comprises: a heating conductor (10) and a sensor (11), wherein the top ends of the heating conductor (10) and the sensor (11) are respectively fixedly connected to a directional mounting seat (12).

10. The semiconductor test probe assembly for directional installation according to claim 7, characterized in that: The driving assembly comprises: a driven wheel (2), a servo motor (3), a connecting belt (4) and a rotating shaft (18); the threaded rod (15) is provided with two groups; the driven wheel (2) is provided with two groups and is respectively fixedly connected to the side ends of the threaded rod (15); the heat-insulating shell (1) is provided with rotating holes (20) on both sides of an end close to the servo motor (3); the inner wall of the rotating hole (20) is rotatably connected to the threaded rod (15); the connecting belt (4) is respectively sleeved and connected to the two groups of driven wheels (2) and the rotating shaft (18); the servo motor (3) is fixedly connected to the rotating shaft (18); a plurality of support rods (19) are provided between the servo motor (3) and the heat-insulating shell (1); the plurality of support rods (19) are respectively located around the servo motor (3) and the two ends are respectively fixedly connected to the heat-insulating shell (1) and the servo motor (3).

Images