A decoupled XYZ three-axis motion platform structure

Abstract

A decoupled XYZ three-axis motion platform structure, comprising an X-axis mechanism, a Y-axis mechanism, a Z-axis mechanism, a decoupling mechanism and a counteracting shock absorption mechanism. The X-axis mechanism includes an X-axis base, an X-axis main slide rail, an X-axis main slide block and an X-axis auxiliary slide rail and an X-axis auxiliary slide block; the Y-axis mechanism includes a Y-axis base, a Y-axis main slide rail, a Y-axis main slide block and a Y-axis auxiliary slide rail and a Y-axis auxiliary slide block; the Z-axis mechanism includes a Z-axis base, a Z-axis main slide rail and a Z-axis main slide block. The Y-axis base is hoisted on the X-axis main slide block, and the Y-axis auxiliary slide block is installed with a mounting head; the Z-axis base is fixedly connected to the X-axis auxiliary slide block. The decoupling mechanism includes a decoupling slide rail and a decoupling bearing block that are slidably mated; the decoupling slide rail is fixedly arranged on the Z-axis main slide block; a pair of bearings are arranged on the decoupling bearing block, and the pair of bearings are respectively in contact with the upper and lower surfaces of the decoupling slide rail; the decoupling bearing block is connected to the mounting head through a connecting rod. The platform mechanism ensures the stability of the platform operation through the decoupling mechanism and the counteracting shock absorption mechanism.

Description

Technical Field

[0001] The present invention relates to the field of die bonding and chip mounting equipment, and in particular to a decoupled XYZ three-axis motion platform structure. Background Art

[0002] In the chip die bonding industry, an XYZ three-axis motion platform is required to drive the mounting bonding head to move, so that the chip adsorbed on the suction nozzle of the mounting bonding head is mounted on the substrate. In a traditional XYZ three-axis motion platform, when the Z-axis base and the Y-axis base perform low-frequency motion in the X-axis direction, since the reciprocating motion frequency is low, the influence on the stability of the platform is not significant; however, in the traditional XYZ three-axis motion platform, the Z-axis mechanism is integrally fixed on the Y-axis main slide of the Y-axis mechanism. When the Z-axis mechanism as a whole follows the Y-axis main slide to perform high-frequency reciprocating motion in the Y-axis direction, due to the large overall weight of the Z-axis mechanism, the three-axis motion platform will be unstable when performing high-frequency reciprocating motion, thereby causing inaccurate positioning of the mounting bonding head and seriously reducing the chip mounting accuracy. Summary of the Invention

[0003] Aiming at the deficiencies of the prior art, the present invention provides a decoupled XYZ three-axis motion platform structure to overcome the deficiencies in the prior art.

[0004] To achieve the above object, the present invention is realized through the following technical solutions:

[0005] A decoupled XYZ three-axis motion platform structure includes an X-axis mechanism, a Y-axis mechanism, a Z-axis mechanism, and a decoupling mechanism; the X-axis mechanism, the Y-axis mechanism, and the Z-axis mechanism are combined to form a three-axis motion platform that reciprocates along the X-axis, Y-axis, and Z-axis.

[0006] The X-axis mechanism includes an X-axis base fixedly arranged on the frame; at the bottom of the X-axis base, an X-axis main slide rail and an X-axis main slide are arranged in sliding fit in the left-right direction, the X-axis main slide rail is fixed on the X-axis base, and the Y-axis mechanism is hoisted on the X-axis main slide; on the top surface of the X-axis base, an X-axis auxiliary slide rail and an X-axis auxiliary slide are arranged in sliding fit in the left-right direction, and the X-axis auxiliary slide rail is fixed on the X-axis base;

[0007] The Y-axis mechanism includes a Y-axis base hoisted on the X-axis main slide; on the Y-axis base, a Y-axis main slide rail and a Y-axis main slide are arranged in sliding fit in the front-back direction; the Y-axis main slide rail is fixed on the Y-axis base, on the Y-axis main slide, a Y-axis auxiliary slide rail and a Y-axis auxiliary slide are arranged in the vertical direction, the Y-axis auxiliary slide rail is fixed on the Y-axis main slide, and a mounting bonding head is installed on the Y-axis auxiliary slide;

[0008] The Z-axis mechanism includes a Z-axis base; a Z-axis main slide rail and a Z-axis main slide block are vertically arranged on the Z-axis base, the Z-axis main slide rail is fixed on the Z-axis base, and the Z-axis base is installed on the X-axis auxiliary slide block and moves with the X-axis auxiliary slide block; the decoupling mechanism is installed on the Z-axis main slide block;

[0009] The decoupling mechanism includes a decoupling slide rail and a decoupling bearing block that are slidably mated; the decoupling slide rail is fixedly arranged on the Z-axis main slide block in the front-back direction; a pair of bearings are arranged on the decoupling bearing block at intervals in the up-down direction, and the pair of bearings are respectively in contact with the upper and lower surfaces of the decoupling slide rail; the decoupling bearing block is connected by a vertically arranged connecting rod and drives the bonding head.

[0010] Further, a decoupled XYZ three-axis motion platform structure in this case further includes a pair of impact damping mechanisms; the impact damping mechanism includes a damping base, and a damping slide rail and a damping slide block that are slidably mated are arranged on the damping base.

[0011] Further, a balance weight is arranged on the damping slide block.

[0012] Preferably, the damping slide block is driven by a damping drive motor, and the damping drive motor drives the damping slide block to perform a counteracting motion in the opposite direction to the Y-axis auxiliary slide block.

[0013] Preferably, the impact damping mechanism and the three-axis motion platform are arranged side by side on the ceiling of the frame.

[0014] Preferably, an X-axis drive motor is arranged at the outer end of the X-axis base.

[0015] Preferably, the Y-axis main slide block is driven by a Y-axis drive motor.

[0016] Preferably, a Z-axis drive motor is arranged on the Z-axis base.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0018] 1) For a decoupled XYZ three-axis motion platform structure in this case, the decoupling mechanism is used as an intermediate docking component, and the Z-axis mechanism and the Y-axis mechanism are respectively docked through the decoupling mechanism, so that the heavy components in the Z-axis mechanism (such as the Z-axis base, the Z-axis drive motor, the Z-axis main slide rail and the Z-axis main slide block) are respectively installed on the Y-axis base and the X-axis auxiliary slide block, thereby avoiding the high-frequency reciprocating motion of the heavy components in the Z-axis mechanism following the Y-axis main slide block, which causes instability of the three-axis motion platform, thereby ensuring the positioning accuracy of the bonding head and effectively enhancing the product processing accuracy.

[0019] 2) A decoupled XYZ three-axis motion platform structure in this case, where the X-axis mechanism is connected to the Y-axis mechanism and the Z-axis mechanism respectively through a double-rail method. Specifically, the X-axis main slide is connected to the Y-axis base, and the X-axis auxiliary slide is connected to the Z-axis base. The double-rail method shares the weights of the Y-axis mechanism and the Z-axis mechanism, further enhancing the stability of the three-axis motion platform during reciprocating motion.

[0020] 3) A decoupled XYZ three-axis motion platform structure in this case. By setting a balance weight in the counter-shock damping mechanism, the damping drive motor drives the balance weight on the damping slide to perform a counter-motion in the opposite direction to the Y-axis auxiliary slide, thereby damping the three-axis motion platform and further ensuring the stability of the high-frequency reciprocating operation of the three-axis motion platform when processing products.

[0021] In order to understand the present invention more clearly, the preferred embodiments of the present invention will be described below in conjunction with the accompanying drawings. Description of the Drawings

[0022] Figure 1 is the overall structural schematic diagram of the present invention;

[0023] Figure 2 is the installation position schematic diagram of the decoupling mechanism of the present invention.

[0024] Reference Signs in the Drawings:

[0025] 11 - X-axis base, 13 - X-axis main slide, 15 - X-axis auxiliary slide, 16 - X-axis drive motor; 21 - Y-axis base, 22 - Y-axis main slide rail, 23 - Y-axis main slide, 25 - Y-axis auxiliary slide; 31 - Z-axis base, 33 - Z-axis main slide, 34 - Z-axis drive motor; 41 - decoupling slide rail, 42 - decoupling bearing seat, 421 - bearing, 43 - connecting rod; 51 - damping base, 52 - damping slide, 53 - balance weight; 9 - mounting bonder head. Detailed Embodiments

[0026] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In the description of the present invention, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0027] In addition, terms such as "first" and "second" are for descriptive purposes only, mainly used to distinguish different devices, components or parts (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, components or parts, and should not be construed as indicating or implying relative importance.

[0028] In addition, it should be noted that unless otherwise clearly specified and limited, terms such as "installed", "equipped with", "sheathed / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and can be the communication inside two components; for those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] Please refer to Figure 1-2 , the present invention provides a decoupled XYZ three-axis motion platform structure, including an X-axis mechanism, a Y-axis mechanism, a Z-axis mechanism, a decoupling mechanism, and a counteracting shock absorption mechanism; the X-axis mechanism, Y-axis mechanism, and Z-axis mechanism are combined into a three-axis motion platform that reciprocates along the X-axis, Y-axis, and Z-axis. The three-axis motion platform and the counteracting shock absorption mechanism are installed side by side on the ceiling of the frame. The counteracting shock absorption mechanism shocks the three-axis motion platform through the action of counteracting motion to ensure the stability of the operation of the three-axis motion platform when processing products, thereby also ensuring the accuracy of the processed products; the decoupling mechanism is connected to the Y-axis mechanism and the Z-axis mechanism; a bonding head (9) is butt-mounted on the decoupling mechanism and the Y-axis mechanism. The three-axis motion platform drives the bonding head (9) to reciprocate along the X-axis, Y-axis, and Z-axis to process products.

[0030] The X-axis mechanism includes an X-axis base (11) fixedly arranged on the frame; a main X-axis slide rail and a main X-axis slide block (13) that are slidably matched are arranged along the left-right direction at the bottom of the X-axis base (11). The main X-axis slide rail is fixed on the X-axis base (11), and the Y-axis mechanism is hoisted on the main X-axis slide block (13); an auxiliary X-axis slide rail and an auxiliary X-axis slide block (15) that are slidably matched are arranged along the left-right direction on the top surface of the X-axis base (11). The auxiliary X-axis slide rail is fixed on the X-axis base (11), and the auxiliary X-axis slide block (15) is connected to the Z-axis mechanism; an X-axis driving motor (16) is arranged at the outer end of the X-axis base (11). The output shaft of the X-axis driving motor (16) is connected to the Y-axis mechanism and drives the Y-axis mechanism to reciprocate along the X-axis direction.

[0031] The Y-axis mechanism includes a Y-axis base (21) hoisted on the X-axis main slide (13). The Y-axis base (21) reciprocates in the X-axis direction following the X-axis main slide (13). Along the front-back direction on the Y-axis base (21), there are a slidably mated Y-axis main slide rail (22) and a Y-axis main slide (23). The Y-axis main slide rail (22) is fixed on the Y-axis base (21), and the Y-axis main slide (23) is driven by a Y-axis drive motor (not shown in the figure). Along the vertical direction on the Y-axis main slide (23), there are a Y-axis auxiliary slide rail and a Y-axis auxiliary slide (25). The Y-axis auxiliary slide rail is fixed on the Y-axis main slide (23), and the Y-axis auxiliary slide (25) is mounted with a bonding head (9), so that the bonding head (9) can reciprocate in the Y-axis direction or the Z-axis direction following the Y-axis main slide (23) and the Y-axis auxiliary slide (25).

[0032] The Z-axis mechanism includes a Z-axis base (31). The Z-axis base (31) is fixedly connected to the X-axis auxiliary slide (15), so that the Z-axis base (31) reciprocates in the X-axis direction following the X-axis auxiliary slide (15). Along the vertical direction on the Z-axis base (31), there are a Z-axis main slide rail and a Z-axis main slide (33). The Z-axis main slide rail is fixed on the Z-axis base (31), and the Z-axis main slide (33) is connected to a decoupling mechanism. A Z-axis drive motor (34) is provided on the Z-axis base (31). The output end of the Z-axis drive motor (34) is connected to the Z-axis main slide (33), and the Z-axis drive motor (34) drives the Z-axis main slide (33) to reciprocate in the Z-axis direction.

[0033] The decoupling mechanism includes a slidably mated decoupling slide rail (41) and a decoupling bearing block (42). The decoupling slide rail (41) is fixedly arranged in the front-back direction on the Z-axis main slide (33) and reciprocates in the Z-axis direction following the Z-axis main slide (33). A pair of bearings (421) are arranged at an upper-lower interval on the decoupling bearing block (42). The pair of bearings (421) are respectively in contact with the upper and lower surfaces of the decoupling slide rail (41), so that the decoupling bearing block (42) can slide in the front-back direction on the decoupling slide rail (41). The decoupling bearing block (42) is connected to the bonding head (9) through a vertically arranged connecting rod (43), so that the decoupling bearing block (42) reciprocates synchronously with the bonding head (9).

[0034] The counter-shock damping mechanism includes a damping base (51). On the damping base (51), there are a slidably mated damping slide rail and a damping slide (52). A balance weight (53) is provided on the damping slide (52). The damping slide (52) is driven by a damping drive motor (not shown in the figure), and the damping drive motor drives the damping slide (52) to perform a counter movement in the opposite direction to the Y-axis auxiliary slide (25), thereby damping the three-axis motion platform and further ensuring the stability of the high-frequency reciprocating operation of the three-axis motion platform when processing products.

[0035] A decoupled XYZ three-axis motion platform structure in this case, its working principle or operation process is as follows:

[0036] 1. Take the decoupling mechanism as an intermediate docking component, and connect the Z-axis mechanism and the Y-axis mechanism through the decoupling mechanism respectively. Thus, the heavy components in the Z-axis mechanism (such as the Z-axis base (31), the Z-axis drive motor (34), the Z-axis main slide rail and the Z-axis main slide block (33)) are installed on the Y-axis base (21) and the X-axis auxiliary slide block (15) respectively, so as to prevent the heavy components in the Z-axis mechanism from following the Y-axis main slide block (23) to make high-frequency reciprocating motions, which may cause the instability of the three-axis motion platform.

[0037] 2. The operation process of the three-axis motion platform and the decoupling mechanism is as follows:

[0038] In the Y-axis direction: The Y-axis drive motor drives the bonding head (9) on the Y-axis main slide block (23) to make high-frequency reciprocating motions in the Y-axis direction. At the same time, the bonding head (9) makes synchronous high-frequency reciprocating motions on the decoupling slide rail (41) through the decoupling bearing block (42). During this process, when the bonding head (9) makes reciprocating motions in the Y-axis direction, the heavy components in the Z-axis mechanism remain stationary.

[0039] In the Z-axis direction: The Z-axis drive motor (34) drives the decoupling slide rail (41) on the Z-axis main slide block (33) to make reciprocating motions in the Z-axis direction. The decoupling slide rail (41) drives the decoupling bearing block (42) to make synchronous reciprocating motions, and then drives the bonding head (9) to reciprocate on the Y-axis auxiliary slide block (25). During this process, when the bonding head (9) makes reciprocating motions in the Z-axis direction, the other heavy components in the Z-axis mechanism except the Z-axis main slide block (33) remain stationary.

[0040] In the X-axis direction: The X-axis drive motor (16) drives the Y-axis mechanism and the Z-axis mechanism to make low-frequency reciprocating motions in the X-axis direction. Since it is a low-frequency motion, it has almost no impact on the overall stability of the processing platform. And the X-axis mechanism also connects the Y-axis mechanism and the Z-axis mechanism respectively in a double-rail manner. Specifically, the X-axis main slide block (13) connects the Y-axis base (21), and the X-axis auxiliary slide block (15) connects the Z-axis base (31). The double-rail method shares the weights of the Y-axis mechanism and the Z-axis mechanism, further ensuring the stability of the three-axis motion platform.

[0041] Compared with the prior art, a decoupled XYZ three-axis motion platform structure in this case ensures the stability of the platform operation through the decoupling mechanism and the anti-pulse shock absorption mechanism. And the X-axis mechanism connects the Y-axis mechanism and the Z-axis mechanism respectively in a double-rail manner. The double-rail method shares the weights of the Y-axis mechanism and the Z-axis mechanism, further enhancing the stability of the three-axis motion platform during reciprocating motions.

[0042] The above-described embodiments merely represent several implementation manners of the present invention. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all fall within the protection scope of the present invention.

Claims

1. A decoupled XYZ three-axis motion platform structure, comprising an X-axis mechanism, a Y-axis mechanism, a Z-axis mechanism and a decoupling mechanism; the X-axis mechanism, the Y-axis mechanism and the Z-axis mechanism are combined to form a three-axis motion platform that reciprocates along the X-axis, Y-axis and Z-axis, and is characterized in that: The X-axis mechanism includes an X-axis base (11) fixedly arranged on the frame; at the bottom of the X-axis base (11), an X-axis main slide rail and an X-axis main slide block (13) which are in sliding fit are arranged in the left-right direction, the X-axis main slide rail is fixed on the X-axis base (11), and the Y-axis mechanism is hoisted on the X-axis main slide block (13); on the top surface of the X-axis base (11), an X-axis auxiliary slide rail and an X-axis auxiliary slide block (15) which are in sliding fit are arranged in the left-right direction, and the X-axis auxiliary slide rail is fixed on the X-axis base (11); The Y-axis mechanism includes a Y-axis base (21) hoisted on the X-axis main slide block (13); on the Y-axis base (21), a Y-axis main slide rail (22) and a Y-axis main slide block (23) which are in sliding fit are arranged in the front-back direction; the Y-axis main slide rail (22) is fixed on the Y-axis base (21), on the Y-axis main slide block (23), a Y-axis auxiliary slide rail and a Y-axis auxiliary slide block (25) are arranged in the vertical direction, the Y-axis auxiliary slide rail is fixed on the Y-axis main slide block (23), and a mounting and bonding head (9) is installed on the Y-axis auxiliary slide block (25); The Z-axis mechanism includes a Z-axis base (31); on the Z-axis base (31), a Z-axis main slide rail and a Z-axis main slide block (33) are arranged in the vertical direction, the Z-axis main slide rail is fixed on the Z-axis base (31), the Z-axis base (31) is installed on the X-axis auxiliary slide block (15) and moves along with the X-axis auxiliary slide block (15); the decoupling mechanism is installed on the Z-axis main slide block (33); The decoupling mechanism includes a decoupling slide rail (41) and a decoupling bearing block (42) which are in sliding fit; the decoupling slide rail (41) is fixedly arranged in the front-back direction on the Z-axis main slide block (33); a pair of bearings (421) are arranged at intervals up and down on the decoupling bearing block (42), and the pair of bearings (421) are respectively in contact with the upper and lower surfaces of the decoupling slide rail (41); the decoupling bearing block (42) is connected by a vertically arranged connecting rod (43) and drives the mounting and bonding head (9).

2. The decoupled XYZ three-axis motion platform structure according to claim 1, wherein: It further includes a pair of counter-shock damping mechanisms; each of the counter-shock damping mechanisms includes a damping base (51), and a damping slide rail and a damping slide block (52) which are in sliding fit are arranged on the damping base (51).

3. The decoupled XYZ three-axis motion platform structure according to claim 2, wherein: A balance weight (53) is arranged on the damping slide block (52).

4. A decoupled XYZ three-axis motion platform structure according to claim 3, characterized in that: The damping slide block (52) is driven by a damping driving motor, and the damping driving motor drives the damping slide block (52) to perform a counter movement in the opposite direction to the Y-axis auxiliary slide block (25).

5. A decoupled XYZ three-axis motion platform structure according to claim 3, characterized in that: The pair of counter-shock damping mechanisms and the three-axis motion platform are arranged side by side on the ceiling of the frame.

6. A decoupled XYZ three-axis motion platform structure according to claim 1, characterized in that: An X-axis driving motor (16) is arranged at the outer end of the X-axis base (11).

7. A decoupled XYZ three-axis motion platform structure according to claim 1, characterized in that: The Y-axis main slide block (23) is driven by a Y-axis driving motor.

8. The decoupled XYZ three-axis motion platform structure according to claim 1, characterized in that: A Z-axis driving motor (34) is arranged on the Z-axis base (31).

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