A process for making a nonwoven abrasive pad and product

Abstract

The application relates to the field of abrasive materials, and discloses a preparation process and product of a non-woven fabric abrasive pad. The preparation process of the non-woven fabric abrasive pad comprises the following steps: S1, soaking a dry-formed polyester non-woven fabric by using a pretreatment agent to obtain pretreated polyester non-woven fabric; S2, impregnating the pretreated polyester non-woven fabric by using a water-based polyurethane impregnation solution, and performing rolling and drying to obtain impregnated polyester non-woven fabric; and S3, performing shaping, sanding, grooving, washing and drying on the obtained impregnated polyester non-woven fabric to obtain the non-woven fabric abrasive pad. According to the preparation process, the dry-formed polyester non-woven fabric is pretreated first, then impregnated, shaped, sanded and grooved, and the prepared non-woven fabric abrasive pad has good flow and penetration performance of the grinding liquid in the grinding process, high grinding efficiency and long service life of the grinding pad.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of abrasive materials, more particularly, it relates to a preparation process and product of a non-woven abrasive pad. BACKGROUND

[0002] Chemical mechanical polishing (CMP) is one of the key technologies for the surface processing of semiconductor wafers and the planarization between multi-layer wiring layers, which has been widely used in recent years. The abrasive pad is an important component of the CMP system, and the material properties and structure of the abrasive pad directly affect the performance of the abrasive pad, and further affect the CMP process and processing effect.

[0003] The non-woven abrasive pad is one of the abrasive pads. The non-woven fabric (Non Woven) is composed of oriented or random fibers, which is a new generation of environmentally friendly materials with low price and recyclable characteristics. The non-woven abrasive pad has strong abrasive liquid holding capacity, good mechanical properties, and can achieve good abrasive efficiency and service life, and is widely used in precision optical, flat glass, LCD, FPD, storage disk drive, semiconductor ceramic substrate, optical glass, LED sapphire substrate, crystal and other grinding fields. It can grind various materials such as silicon wafers, gallium arsenide, quartz crystals, sapphire, metals, and semiconductor materials.

[0004] The common non-woven abrasive pad is prepared by coating or impregnating polyurethane material on the non-woven fabric layer and drying, which improves the hardness, density and mechanical properties of the non-woven abrasive pad. However, after the polyurethane material is filled into the non-woven fabric, the permeability and flow performance of the abrasive liquid on the non-woven abrasive pad are reduced, and the abrasive efficiency and service life of the non-woven abrasive pad are also reduced. SUMMARY

[0005] In order to solve the problem that the conventional non-woven abrasive pad has low permeability and flow performance of the abrasive liquid, and further reduces the abrasive efficiency and service life of the non-woven abrasive pad, the present application provides a preparation process and product of a non-woven abrasive pad.

[0006] In a first aspect, the present application provides a preparation process of a non-woven abrasive pad, which adopts the following technical scheme:

[0007] A preparation process of a non-woven abrasive pad, comprising the following steps:

[0008] S1, soaking a dry-formed polyester non-woven fabric with a pretreatment agent to obtain a pretreated polyester non-woven fabric;

[0009] S2, impregnating the pretreated polyester non-woven fabric with a water-based polyurethane impregnating solution, rolling, and drying to obtain an impregnated polyester non-woven fabric;

[0010] S3, the prepared impregnated polyester non-woven fabric is shaped, napped, grooved, washed, dried to prepare a non-woven fabric polishing pad.

[0011] By adopting the above technical scheme, the polyester non-woven fabric formed by dry molding is used as a carrier, which has good air permeability, elasticity and mechanical strength, and can improve the overall strength of the prepared non-woven fabric polishing pad; first, the polyester non-woven fabric is pretreated with a pretreatment agent, the pretreatment agent can penetrate into the fiber structure of the polyester non-woven fabric, and improve the bonding performance between the water-based polyurethane impregnating solution and the polyester non-woven fabric fibers in the subsequent treatment; then, the prepared pretreated polyester non-woven fabric is impregnated with a water-based polyurethane impregnating solution, so that the water-based polyurethane impregnating solution penetrates and gathers into the polyester non-woven fabric fiber structure, forming a stable skeleton structure, and at the same time, the fiber pore structure of the polyester non-woven fabric is not affected, further improving the flexibility and polishing strength of the prepared non-woven fabric polishing pad; finally, shaping, napping and grooving treatment are carried out, shaping can improve the dimensional stability of the non-woven fabric polishing pad, napping can improve the surface flatness of the non-woven fabric polishing pad, and grooving can reduce the heat accumulation of the non-woven fabric polishing pad, improve the flowability of the polishing liquid, further improve the polishing efficiency of the non-woven fabric polishing pad, and further improve the comprehensive performance of the non-woven fabric polishing pad. The non-woven fabric polishing pad prepared in this way has good flow and permeability to the polishing liquid, improves the polishing efficiency and service life of the non-woven fabric polishing pad.

[0012] Preferably, the pretreatment agent of the S1 step is prepared from the following raw materials by weight percentage:

[0013] N, N-methylene bisacrylamide 8-10%

[0014] Long-chain alkyl silane coupling agent 3-5%

[0015] Allyl polyethylene glycol 2-3%

[0016] Chitosan quaternary ammonium salt 1-3%

[0017] Sodium diisooctyl sulfosuccinate 1-2%

[0018] Water balance.

[0019] By adopting the above technical scheme, the relatively optimal weight ratio of N, N-methylene bisacrylamide, long-chain alkyl silane coupling agent, allyl polyethylene glycol, chitosan quaternary ammonium salt and sodium diisooctyl sulfosuccinate is compounded, which has good synergistic effect, can penetrate and disperse into the fiber structure of the polyester non-woven fabric, improve the loose and adsorption performance of the polyester non-woven fabric, and then improve the combination performance between the subsequent water-based polyurethane impregnating solution and the fibers of the polyester non-woven fabric, so that the prepared non-woven fabric polishing pad has good elasticity, flexibility and strength, forms a pore structure, improves the flow and penetration performance of the polishing liquid during use, and then improves the polishing efficiency and service life of the non-woven fabric polishing pad; wherein the long-chain alkyl silane coupling agent is a silane coupling agent with 8-16 alkyl groups, which can significantly improve the adsorption and penetration performance of the polyester non-woven fabric fibers to the water-based polyurethane impregnating solution.

[0020] Preferably, the soaking temperature in the S1 step is 50-60℃, and the soaking time is 20-40min.

[0021] By adopting the above technical scheme, the uniform penetration of the pretreatment agent in the polyester non-woven fabric is improved by controlling the optimal soaking conditions.

[0022] Preferably, the thickness of the polyester non-woven fabric in the S1 step is 1-1.5mm, and the grammage is 300-350g / m 2 .

[0023] By adopting the above technical scheme, the optimal specification size of the polyester non-woven fabric is controlled, which can save materials while fully impregnating and forming the polyester non-woven fabric, thereby improving the polishing efficiency and service life of the prepared non-woven fabric polishing pad.

[0024] Preferably, the water-based polyurethane impregnating solution in the S2 step is prepared from the following raw materials in the following weight percentages:

[0025] Water-based polyurethane emulsion 30-40%

[0026] Methylphenyl silicone resin emulsion 5-8%

[0027] Ethylene-vinyl acetate copolymer emulsion 3-6%

[0028] Filling material 10-15%

[0029] 1,4-Butanediol dimethacrylate 3-5%

[0030] Viscosity modifier 2-4%

[0031] Curing agent 1-3%

[0032] Water balance.

[0033] By adopting the technical scheme, the water-based polyurethane impregnating solution takes the water-based polyurethane emulsion as a main body and has good elasticity and flexibility, but in the process of grinding, the non-woven fabric grinding pad generates heat due to grinding, thereby reducing the hardness and wear resistance of the grinding pad, thereby affecting the grinding efficiency, therefore, the methylphenyl organosilicon resin emulsion and the ethylene-vinyl acetate copolymer emulsion are compounded in the water-based polyurethane emulsion in an optimal amount, the three have a good synergistic effect, the prepared non-woven fabric grinding pad has good flexibility and elasticity and can maintain good heat resistance and grinding strength in the process of grinding; the 1,4-butanediol dimethacrylate can further crosslink with the emulsion system, and under the synergistic action of the filler, the strength and grinding efficiency of the non-woven fabric grinding pad are further improved. The viscosity regulator can better improve the viscosity of the water-based polyurethane impregnating solution, in the actual test process, when the emulsion amount reaches an optimal ratio, the system viscosity of the water-based polyurethane impregnating solution is high, the stability and timeliness of the impregnation treatment are reduced, therefore, the emulsion system can maintain good strength and crosslinking stability while having good dispersion and wettability through the viscosity regulator.

[0034] Preferably, the filler is white carbon black and / or zinc oxide.

[0035] By adopting the technical scheme, the filler is white carbon black and / or zinc oxide, which can improve the strength and wear resistance of the non-woven fabric grinding pad, reduce wear and tear in the grinding process, and prolong the service life of the non-woven fabric grinding pad.

[0036] Preferably, the viscosity regulator is composed of allyl glycidyl ether and 2-acrylamide-2-methylpropane sulfonic acid in a weight ratio of 1:(1-3).

[0037] By adopting the technical scheme, the viscosity regulator is composed of allyl glycidyl ether and 2-acrylamide-2-methylpropane sulfonic acid in an optimal weight ratio, which can improve the viscosity of the water-based polyurethane impregnating solution, make it uniformly adsorbed on the fiber structure of the polyester non-woven fabric during impregnation, and improve the curing crosslinking degree when the water-based polyurethane impregnating solution is cured, thereby improving the mechanical strength of the non-woven fabric grinding pad while maintaining good grinding fluid permeability and flow performance, thereby improving the grinding efficiency and prolonging the service life.

[0038] Preferably, the curing agent is an isocyanate curing agent and / or an aziridine curing agent.

[0039] By adopting the technical scheme, the isocyanate curing agent and / or the aziridine curing agent can effectively improve the curing efficiency of the water-based polyurethane impregnating solution, thereby improving the mechanical properties and durability of the non-woven fabric grinding pad.

[0040] Preferably, the time of the impregnation treatment in the S2 step is 30-60 min, and the temperature of the impregnation treatment is 70-80℃.

[0041] By adopting the above technical solution, the preferable impregnation treatment condition enables the water-based polyurethane impregnation liquid to fully penetrate into the polyester non-woven fabric, thereby improving the uniformity and density of the prepared non-woven fabric polishing pad.

[0042] In a second aspect, the application provides a non-woven fabric polishing pad, which adopts the following technical solution:

[0043] A non-woven fabric polishing pad prepared by the above preparation process.

[0044] By adopting the above technical solution, the non-woven fabric polishing pad prepared by the application has good flow and penetration performance of the polishing liquid in the polishing process, high polishing efficiency, and long service life of the polishing pad.

[0045] In summary, the application has the following beneficial effects:

[0046] 1. The preparation process of the non-woven fabric polishing pad of the application uses a pretreatment agent to pretreat the dry-formed polyester non-woven fabric, then uses a water-based polyurethane impregnation liquid for impregnation treatment, and finally performs shaping, sanding, and grooving treatment, so that the prepared non-woven fabric polishing pad has good flow and penetration performance of the polishing liquid in the polishing process, high polishing efficiency, and long service life of the polishing pad.

[0047] 2. By using the pretreatment agent prepared from N, N-methylenebisacrylamide, long-chain alkyl silane coupling agent, allyl polyethylene glycol, chitosan quaternary ammonium salt, sodium diisooctyl sulfosuccinate, and water, the porosity and adsorption performance of the polyester non-woven fabric are improved, thereby improving the bonding performance between the water-based polyurethane impregnation liquid and the polyester non-woven fabric fibers in the subsequent treatment, so that the prepared non-woven fabric polishing pad has good elasticity, flexibility, and strength, forms a pore structure, improves the flow and penetration performance of the polishing liquid during use, and further improves the polishing efficiency and service life of the non-woven fabric polishing pad.

[0048] 3. By using the water-based polyurethane impregnation liquid prepared from water-based polyurethane emulsion, methylphenyl silicone resin emulsion, ethylene-vinyl acetate copolymer emulsion, filler, 1, 4-butanediol dimethacrylate, viscosity regulator, curing agent, and water, the water-based polyurethane impregnation liquid penetrates and aggregates into the polyester non-woven fabric fiber structure to form a stable skeleton structure, without affecting the fiber pore structure of the polyester non-woven fabric, thereby further improving the flexibility and polishing strength of the prepared non-woven fabric polishing pad.

[0049] 4. By using allyl glycidyl ether and 2-acrylamide-2-methylpropanesulfonic acid in a better weight ratio as viscosity modifiers, the viscosity of the water-based polyurethane impregnation liquid can be improved, allowing it to be uniformly adsorbed onto the fiber structure of the polyester nonwoven fabric during impregnation. This improves the mechanical strength of the nonwoven abrasive pad while maintaining good abrasive liquid permeability and flow performance, thereby enhancing abrasive efficiency and extending service life. Attached Figure Description

[0050] Appendix Figure 1 This is a scanning electron microscope image of the nonwoven abrasive pad of this application at 100 μm. Detailed Implementation

[0051] The following is in conjunction with the appendix Figure 1 The present application will be further described in detail with reference to the embodiments.

[0052] The following are some of the sources and specifications of the raw materials used in this application. The raw materials used in the preparation examples and embodiments of this application can all be obtained commercially, including but not limited to the following models and manufacturers of raw materials. Raw materials with equivalent performance can also be used:

[0053] 1. Chitosan quaternary ammonium salt: Tosoh Chemical HACC-102;

[0054] 2. Waterborne polyurethane emulsion: Anda Huatai AH-1619;

[0055] 3. Methylphenyl silicone resin emulsion: Sihai SH-9608;

[0056] 4. Ethylene-vinyl acetate copolymer emulsion: Wacker Chemie EP701K (Germany);

[0057] 5. Silica: Fumed silica, particle size 100-200nm;

[0058] 6. Zinc oxide: Particle size 100-200nm;

[0059] 7. 1,4-Butanediol dimethacrylate: CAS No. 2082-81-7, purity 99%;

[0060] 8. 2-Acrylamide-2-methylpropanesulfonic acid: CAS No. 15214-89-8, purity 99%;

[0061] 9. Isocyanate curing agent: Bayhydur 304;

[0062] 10. Aziridine curing agent: XR-100.

[0063] Example of pretreatment agent preparation

[0064] Preparation Example 1

[0065] Preparation Example 1 discloses a pretreatment agent prepared by the following steps:

[0066] 0.8 kg of N,N-methylene bisacrylamide, 0.3 kg of dodecyltrimethoxysilane as a long-chain alkyl silane coupling agent, 0.3 kg of allyl polyethylene glycol, 0.1 kg of chitosan quaternary ammonium salt, and 0.1 kg of sodium diisooctyl sulfosuccinate were added to 8.4 kg of water, and stirred uniformly to prepare the pretreatment agent.

[0067] Preparation Example 2-3

[0068] Preparation Example 2-3 is different from Preparation Example 1 in that the raw material usage and preparation conditions are different, and specific reference can be made to Table 1 below.

[0069] Table 1: Parameter table of Preparation Examples 1-3

[0070]

[0071]

[0072] Preparation Comparative Example 1

[0073] Preparation Comparative Example 1 is different from Preparation Example 1 in that N,N-methylene bisacrylamide is replaced by an equal amount of N,N-dimethylformamide, and the others are the same as Preparation Example 1.

[0074] Preparation Comparative Example 2

[0075] Preparation Comparative Example 2 is different from Preparation Example 1 in that the long-chain silane coupling agent is replaced by an equal amount of a short-chain silane coupling agent, and the short-chain silane coupling agent is vinyltrimethoxysilane, and the others are the same as Preparation Example 1.

[0076] Preparation Comparative Example 3

[0077] Preparation Comparative Example 3 is different from Preparation Example 1 in that chitosan quaternary ammonium salt is replaced by an equal amount of allyl polyethylene glycol, and the others are the same as Preparation Example 1.

[0078] Preparation Comparative Example 4

[0079] Preparation Comparative Example 4 is different from Preparation Example 1 in that allyl polyethylene glycol is replaced by an equal amount of N,N-methylene bisacrylamide, and the others are the same as Preparation Example 1.

[0080] Preparation Example of an aqueous polyurethane impregnating solution

[0081] Preparation Example 4

[0082] Preparation Example 4 discloses an aqueous polyurethane impregnating solution prepared by the following steps:

[0083] Into 3.9 kg of water, 3 kg of aqueous polyurethane emulsion, 0.8 kg of methyl phenyl silicone resin emulsion, 0.6 kg of ethylene-vinyl acetate copolymer emulsion, 0.3 kg of dimethyl 1,4-butanediol acrylate, and 1 kg of white carbon black as a filler were added, and stirred at a stirring rate of 400 r / min for 30 min; 0.3 kg of viscosity modifier (consisting of 0.15 kg of allyl glycidyl ether and 0.15 kg of polyethylene glycol 400) and 0.1 kg of curing agent (consisting of 0.05 kg of isocyanate curing agent and 0.05 kg of aziridine curing agent) were added, and stirred at a stirring rate of 400 r / min for 20 min, to prepare an aqueous polyurethane impregnating solution.

[0084] Preparation Example 5-6

[0085] Preparation Example 5-6 is different from Preparation Example 4 in that the raw material usage amount and the preparation conditions are different, and see Table 2 below for details.

[0086] Table 2: Parameter table of Preparation Examples 4-6

[0087]

[0088] Preparation Example 7

[0089] Preparation Example 7 is different from Preparation Example 4 in that the viscosity modifier consists of allyl glycidyl ether and 2-acrylamido-2-methylpropanesulfonic acid at a weight ratio of 1:1, and the others are the same as Preparation Example 4.

[0090] Preparation Example 8

[0091] Preparation Example 8 is different from Preparation Example 4 in that the viscosity modifier consists of allyl glycidyl ether and 2-acrylamido-2-methylpropanesulfonic acid at a weight ratio of 1:3, and the others are the same as Preparation Example 4.

[0092] Preparation Comparative Example 5

[0093] Preparation Comparative Example 5 is different from Preparation Example 7 in that the ethylene-vinyl acetate copolymer emulsion is replaced by an equal amount of methyl phenyl silicone resin emulsion, and the others are the same as Preparation Example 4.

[0094] Preparation Comparative Example 6

[0095] Preparation Comparative Example 6 is different from Preparation Example 7 in that the methyl phenyl silicone resin emulsion is replaced by an equal amount of aqueous polyurethane emulsion, and the others are the same as Preparation Example 4.

[0096] Preparation Comparative Example 7

[0097] Preparation Comparative Example 7 is different from Preparation Example 7 in that the dimethyl 1,4-butanediol acrylate is replaced by an equal amount of methyl phenyl silicone resin emulsion, and the others are the same as Preparation Example 4.

[0098] Embodiment

[0099] Embodiment 1

[0100] Embodiment 1 discloses a preparation process of a non-woven abrasive pad, comprising the following steps:

[0101] S1, using the pretreatment agent prepared in Preparation Example 1, a dry-formed polyester non-woven fabric with a thickness of 1.5 mm and a grammage of 350 g / m 2 was soaked at a temperature of 50℃ for 20 min, drained, and a pretreated polyester non-woven fabric was prepared;

[0102] S2, using a commercially available water-based polyurethane impregnating solution, the pretreated polyester non-woven fabric was impregnated and treated, the temperature of the impregnation treatment was controlled at 70℃, after impregnation for 30 min, using a rolling device, the rolling speed was 2 m / min, the pressure was 0.2 KPa, the excess water-based polyurethane impregnating solution was squeezed out, and then dried at a temperature of 70℃ for 2 h, an impregnated polyester non-woven fabric was prepared.

[0103] S3, the prepared impregnated polyester non-woven fabric was shaped under steam at a temperature of 160℃, then roughened using a sanding device with a roughness of 400 mesh, slotted using a slotting device, the width of the slotting was 1 mm, the slotting size was 10*10 mm, then water-based and dried at a temperature of 80℃ for 60 min, cut, and a non-woven abrasive pad was prepared; wherein the commercially available water-based polyurethane impregnating solution was Xinyihuan PU667.

[0104] Embodiments 2-4

[0105] Embodiments 2-4 are different from Embodiment 1 in that the process parameters are different, and the sources of the pretreatment agent and the water-based polyurethane impregnating solution are also different, see Table 3 below.

[0106] Table 3 Parameter table of Embodiments 1-4

[0107]

[0108]

[0109] Embodiments 5-9

[0110] Embodiments 5-9 are different from Embodiment 2 in that the sources of the water-based polyurethane impregnating solution are different, see Table 4 below.

[0111] Table 4 Source table of water-based polyurethane impregnating solution of Embodiments 5-9

[0112]

[0113]

[0114] Examples 10-13

[0115] Examples 10-13 differ from Example 2 in that the source of the pretreatment agent is different, see Table 5 below.

[0116] Table 5 Source of pretreatment agent for Examples 1-13

[0117] Examples Source of pretreatment agent Example 10 Preparation Comparative Example 1 Example 11 Preparation Comparative Example 2 Example 12 Preparation Comparative Example 3 Example 13 Preparation Comparative Example 4

[0118] Comparative Example

[0119] Comparative Example 1

[0120] Comparative Example 1 differs from Example 2 in that the polyester nonwoven fabric is not subjected to the soaking treatment in Step S1, but is directly impregnated with the aqueous polyurethane impregnation solution, and is otherwise the same as Example 2.

[0121] Performance test

[0122] The nonwoven abrasive pads prepared in Examples 1-13 and Comparative Example 1 were tested for performance as follows:

[0123] 1. Hardness test:

[0124] The nonwoven abrasive pads were tested for hardness using a Shore A hardness tester, and the test results were recorded;

[0125] 2. Abrasion rate test:

[0126] Using an abrasive device, the device parameters were controlled as follows: the upper abrasive platen rotation speed was 40 r / min, the lower abrasive platen rotation speed was 40 r / min, and the abrasive pressure was 0.55 Mpa; the product silicon wafer had a diameter of 100 ± 0.5 mm and a thickness of 400 ± 1 μm; a commercially available abrasive liquid was used for rough grinding, and the commercially available abrasive liquid was sourced from Jicheng Electronics Semiconductor Silicon Wafer Abrasive Liquid, and the grinding time was controlled at 3 min; after grinding, the silicon wafer was tested for performance; the thickness of the same location on the silicon wafer before and after grinding was measured using the 3.1 discrete point method in GB / T 6618-2009 “Silicon Wafer Thickness and Total Thickness Variation Test Method”, and the results were calculated; the abrasion rate (unit: nm / min) = (thickness before grinding - thickness after grinding) / grinding time, and the test results were calculated and recorded;

[0127] 3. Water permeability test:

[0128] Referring to the test method in GB / T 4689.22, the water permeability (T, unit: mL / cm 2• h) the water permeability of the sample is calculated as T = 1800000 / (100t1- 50t0), wherein t1 is the time for 50 mL of water to pass through the sample, and t0 is the time for 50 mL of water to flow in the absence of the sample, the test is performed and the test result is calculated;

[0129] 4. Compression Elasticity Test:

[0130] Using a compression tester, a load of 1 kg, the nonwoven abrasive pad is tested for compression, after 2 min of compression, the compression is removed, and the nonwoven abrasive pad is allowed to rest for 5 s, the compression elasticity of the nonwoven abrasive pad is tested (unit: %), compression elasticity = thickness after compression / thickness before compression * 100%, the test is performed and the test result is recorded;

[0131] The following are the performance test data of the nonwoven abrasive pads of Examples 1-13 and Comparative Example 1, see Table 6 below for details.

[0132] Table 6 Performance data table of nonwoven abrasive pads of Examples 1-13 and Comparative Example 1

[0133]

[0134] In combination with Examples 1, Examples 2-4 and Comparative Example 1 and in combination with Table 6, it can be seen that the nonwoven abrasive pad prepared using the pretreatment agent prepared in Preparation Example 1 and the commercially available aqueous polyurethane impregnating solution in Example 1 has significantly improved hardness, reduced elasticity, and significantly reduced grinding efficiency and water permeability, which may be because when no pretreatment is performed, the aqueous polyurethane impregnating solution completely fills the gap between the polyester nonwoven fabric, resulting in reduced water permeability and grinding efficiency of the nonwoven abrasive pad; compared with Example 1, Examples 2-4 further optimize the use of the aqueous polyurethane impregnating solution prepared in the present application for impregnation treatment of the polyester nonwoven fabric, the hardness of the nonwoven abrasive pad prepared is improved, the compression elasticity is also improved, and the grinding efficiency and water permeability are also improved, indicating that the pretreatment agent and the aqueous polyurethane impregnating solution of the present application have good synergistic effect.

[0135] Further combining Example 2 and Examples 5-9 and Table 6, it can be concluded that further optimizing the components and proportions of the aqueous polyurethane impregnating solution applied can improve the comprehensive performance of the non-woven abrasive pad prepared; specifically, compared with Example 2, Examples 5-6 further optimize the components and proportions of the viscosity modifier, so that the hardness of the non-woven abrasive pad prepared is improved, the compression elastic modulus is also improved, and the grinding efficiency and the water permeability of the head are also improved, indicating that the better weight ratio of allyl glycidyl ether and 2-acrylamide-2-methylpropanesulfonic acid as the viscosity modifier has a better synergistic effect; while in Examples 7-9, the components of the aqueous polyurethane emulsion, the methylphenyl silicone resin emulsion, the ethylene-vinyl acetate copolymer emulsion and the 1,4-butanediol dimethacrylate are changed, and the performance of the non-woven abrasive pad prepared is reduced, thus indicating that optimizing the proportions of the above four can have a better synergistic effect, improving the hardness, water permeability, compression elastic modulus and grinding efficiency of the non-woven abrasive pad prepared.

[0136] Further combining Example 2 and Examples 10-13 and Table 6, it can be concluded that further optimizing the components and proportions of the pretreatment agent of the application can significantly improve the water permeability and grinding efficiency of the non-woven abrasive pad prepared; in Examples 10-13, the proportions of the pretreatment agent are changed, reducing the synergistic effect between the components, so that the water permeability and grinding efficiency of the non-woven abrasive pad are both significantly reduced, and the hardness is overall improved, which may be because the use of the pretreatment agent with changed component proportions reduces the adsorption and condensation performance of the aqueous polyurethane impregnating solution on the surface of the polyester non-woven fabric, thereby reducing the pore structure of the non-woven abrasive pad.

[0137] In summary, as shown in the accompanying drawings, Figure 1 The non-woven abrasive pad of the application has a fiber pore structure, so that the grinding liquid can fully penetrate into the non-woven abrasive pad during the grinding process, has good fluidity and permeability, and thus improves the grinding efficiency and service life of the non-woven abrasive pad.

[0138] The specific embodiments are merely an explanation of the application, and are not a limitation of the application, and those skilled in the art can make modifications to the embodiments without creative contribution after reading the specification, as long as the modifications are within the scope of the claims of the application and are protected by the patent law.

Claims

1. A process for making a nonwoven abrasive pad, comprising: The method comprises the following steps: S1, soaking the dry-formed polyester non-woven fabric with a pretreatment agent to obtain a pretreated polyester non-woven fabric; S2, impregnating the pretreated polyester non-woven fabric with a water-based polyurethane impregnating solution, followed by roller pressing and drying to obtain an impregnated polyester non-woven fabric; S3, shaping, sanding, grooving, washing and drying the obtained impregnated polyester non-woven fabric to obtain a non-woven abrasive pad. The pretreatment agent in the S1 step is prepared from the following raw materials in the following proportions by weight: N,N-methylene bisacrylamide 8-10% Long-chain alkyl silane coupling agent 3-5% Allyl polyethylene glycol 2-3% Chitosan quaternary ammonium salt 1-3% Sodium diisooctyl sulfosuccinate 1-2% Water balance. The water-based polyurethane impregnating solution in the S2 step is prepared from the following raw materials in the following proportions by weight: Water-based polyurethane emulsion 30-40% Methylphenyl silicone resin emulsion 5-8% Ethylene-vinyl acetate copolymer emulsion 3-6% Filler 10-15% 1,4-Butanediol dimethacrylate 3-5% Viscosity modifier 2-4% Curing agent 1-3% 2. The process of claim 1 wherein Water balance.

3. The process of claim 1 wherein , the thickness of the polyester nonwoven fabric in the S1 step is 1-1.5 mm, and the grammage is 300-350 g / m 2 .

4. The process of claim 1 wherein The soaking temperature in the S1 step is 50-60℃, and the soaking time is 20-40 min.

5. The process of claim 1 wherein The filler is white carbon black and / or zinc oxide.

6. The process of claim 1 wherein The viscosity modifier is composed of allyl glycidyl ether and 2-acrylamide-2-methylpropanesulfonic acid in a weight ratio of 1: (1-3).

7. The process of claim 1 wherein The curing agent is an isocyanate curing agent and / or an aziridine curing agent.

8. A nonwoven abrasive pad characterized by, The impregnating time in the S2 step is 30-60 min, and the impregnating temperature is 70-80℃. A non-woven abrasive pad prepared by the method of any one of claims 1-7.

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