A semiconductor high-cleanliness vacuum transmission valve

Abstract

The present invention discloses a semiconductor high-cleanliness vacuum transmission valve, which relates to the technical field of vacuum transmission valves, and includes a valve seat, a sealing shell and a connecting flange plate, wherein the sealing shell is arranged above the valve seat, the connecting flange plate is fixedly installed on the top of the valve seat, the sealing shell is movably installed on the connecting flange plate, a valve port is provided on the valve seat, a valve plate is movably installed inside the valve seat, a first telescopic rod is fixedly installed inside the sealing shell, a valve stem is fixedly installed on the output end of the first telescopic rod, a connecting groove is provided on the top of the valve plate, a connecting spring is installed inside the connecting groove, the bottom of the valve stem is connected to the connecting spring, and a sealing mechanism and an exhaust mechanism are arranged inside the valve seat. The present invention reduces the fine particles generated inside the valve body through the arrangement of the sealing mechanism and the exhaust mechanism, ensures the high cleanliness inside the transmission valve, and can also automatically clean the fine particles generated, and has the effect of dissipating heat for the transmission valve when used at high frequency.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum transmission valves, and in particular to a semiconductor high-cleanliness vacuum transmission valve. Background Art

[0002] Vacuum transfer valves play a vital role in semiconductor manufacturing, especially in the purification, deposition and etching steps during wafer processing.

[0003] After searching the Chinese patent with publication number CN117869651A, a transmission vacuum valve is disclosed, including a valve body and an elliptical cylinder arranged at the top end of the valve body, a bracket is vertically arranged inside the valve body, and a first slide plate and a second slide plate are vertically arranged on both sides of the bracket, and the elliptical cylinder and the bracket are drivingly connected, the first slide plate and the second slide plate are aligned with each other, and the first slide plate and the second slide plate are vertically arranged on both sides of the inside of the valve body, a spring plate is arranged between the bracket and the first slide plate and the second slide plate, and the two sides of the spring plate are elastically connected to the first slide plate and the second slide plate, and the first slide plate and the second slide plate are elastically fitted to the two sides of the bracket through the spring plate, and the bracket is elastically lifted and lowered between the first slide plate and the second slide plate through the spring plate, so that the bracket is driven to move smoothly inside the valve body through the elliptical cylinder, and the position state between the bracket and the first slide plate and the second slide plate is changed, thereby adjusting the working state of the valve body.

[0004] However, the above invention has the following disadvantages:

[0005] In the prior art, the sealing member of the transmission valve is generally made of rubber material. When the transmission valve is closed, the valve body and the sealing member will slide and rub violently. In the process of friction between the sealing member and the valve body, extremely fine rubber particles will be generated, resulting in an increase in the particle size in the cavity or pipeline of the vacuum system, thereby reducing the cleanliness of the vacuum system. At the same time, when the transmission valve is used at a high frequency, a certain amount of heat will be generated inside the transmission valve, affecting the use of the transmission valve. Summary of the invention

[0006] The object of the present invention is to provide a semiconductor high-purity vacuum transmission valve to solve the problems raised in the above background technology.

[0007] The technical scheme of the present invention is: a semiconductor high-purity vacuum transmission valve, comprising a valve seat, a sealing shell and a connecting flange plate, wherein the sealing shell is arranged above the valve seat, the connecting flange plate is fixedly installed on the top of the valve seat, the sealing shell is movably installed on the connecting flange plate, a valve port is provided on the valve seat, a valve plate is movably installed inside the valve seat, a first telescopic rod is fixedly installed inside the sealing shell, a valve stem is fixedly installed on the output end of the first telescopic rod, a connecting groove is provided on the top of the valve plate, a connecting spring is installed inside the connecting groove, the bottom of the valve stem is connected to the connecting spring, a vacuum tube is installed on the sealing shell, and a sealing mechanism and an exhaust mechanism are provided inside the valve seat;

[0008] The sealing mechanism includes a sealing roller, a first sealing strip, a second sealing strip, a first transmission block, a first transmission strip, a second transmission block and a second transmission strip. There are two sealing rollers in total. The two sealing rollers are movably mounted on both sides of the upper part of the valve seat, and the sealing roller is in contact with the valve plate. A first mounting groove is provided on the bottom wall of the valve seat, and the first sealing strip is fixedly mounted in the first mounting groove. A group of second mounting grooves is provided on the side of the valve seat close to the vacuum system, and there are two second mounting grooves in total. Two second sealing strips are movably mounted in the two second mounting grooves, and the two second sealing strips are in contact with the first sealing strip. The bottom of the valve seat Two first transmission grooves are opened below the wall surface, there are two first transmission blocks in total, and the two first transmission blocks are movably installed on the upper part of the two first transmission grooves respectively, there are two first transmission bars in total, and the two first transmission bars are movably installed in the two first transmission grooves respectively, two second transmission grooves are opened inside the valve seat, there are two second transmission blocks in total, the two second transmission blocks are respectively located inside the two second transmission grooves, and are fixedly connected to the two second sealing strips respectively, a third transmission groove is opened inside the valve seat at a position corresponding to the second transmission groove, the number of the second transmission bars is consistent with the third transmission groove, and the second transmission bar is movably installed inside the third transmission groove.

[0009] Preferably, there are two groups of exhaust mechanisms, the exhaust mechanisms include two gas bins, a piston plate, a piston rod, an intake pipe and a first check valve, the two gas bins are fixedly mounted inside the sealing shell, the two piston plates are movably mounted inside the two gas bins, the two piston rods are fixedly mounted on the bottom walls of the two piston plates, a connecting rod is fixedly mounted between the two piston rods and the valve stem, the two intake pipes are fixedly mounted above the side walls of the two gas bins and connected to the interior of the gas bins, the bottom of the intake pipe extends to the position of the sealing mechanism below the inner part of the valve seat, there are multiple first check valves, and the multiple first check valves are fixedly mounted at the upper and lower ends of the two intake pipes.

[0010] Preferably, the exhaust mechanism also includes a heat dissipation bin, an exhaust pipe, a second check valve and a heat dissipation plate. The heat dissipation bin is fixedly installed on the top of the gas bin, the exhaust pipe is fixedly installed on the side wall of the heat dissipation bin and is connected to the outside, the second check valve is fixedly installed between the gas bin and the heat dissipation bin, and there are a plurality of heat dissipation plates, which are evenly distributed and fixedly installed on the side wall of the first telescopic rod, and one end of the heat dissipation plate is located inside the heat dissipation bin.

[0011] Preferably, one side wall surface of the two first transmission bars close to the first transmission block is an inclined surface, one side wall surface of the second transmission block facing the third transmission groove is an inclined surface, and one side wall surface of the second transmission bar facing the first transmission bar is an inclined surface.

[0012] Preferably, a mounting spring is installed inside the first transmission groove, the first transmission block is installed inside the first transmission groove through the mounting spring, a reset groove is opened inside the valve seat corresponding to the position of the second transmission block and the third transmission groove, reset blocks are movably installed inside the reset groove, multiple reset blocks are respectively fixedly connected to the second transmission block and the second transmission bar, and a reset spring connected to the reset block is installed inside the reset groove.

[0013] Preferably, a plurality of connecting bolts are fixedly installed on the top of the connecting flange plate, threads are provided on the connecting bolts, a circular hole is provided on the sealing shell, the connecting bolts pass through the circular hole provided on the sealing shell, connecting nuts are movably installed on the connecting bolts through threads, and connecting flange holes are provided on both side walls of the valve seat.

[0014] Preferably, a limiting groove is provided on the side wall of the valve stem, a second telescopic rod is inlaid and installed inside the valve seat at a position corresponding to the limiting groove, and a clamping block is fixedly installed on the output end of the second telescopic rod, and the size of the clamping block is adapted to the limiting groove.

[0015] Preferably, a slide groove is provided on the inner wall of the valve seat, a slider is provided inside the slide groove, and the slider is fixedly connected to the valve plate.

[0016] Preferably, a rotating shaft is movably installed inside the sliding block, a pulley is sleeved on the rotating shaft, and the side wall of the pulley is in contact with the inner wall of the sliding groove.

[0017] The present invention provides a semiconductor high-cleanliness vacuum transmission valve through improvement, which has the following improvements and advantages compared with the prior art:

[0018] First, the present invention sets a sealing mechanism. When the first telescopic rod is started, the first telescopic rod drives the valve plate to move downward through the valve stem to seal the valve port. The valve plate contacts the first sealing strip, and then squeezes the first sealing strip. The first sealing strip is deformed after being compressed, thereby sealing the lower part of the valve port. At the same time, the valve plate squeezes the first transmission block, and the first transmission block moves downward inside the first transmission groove, thereby squeezing the inclined surface of the first transmission strip. After the inclined surface of the first transmission strip is squeezed, the two first transmission strips move toward the direction of the second transmission strip, thereby By squeezing the inclined surface of the second transmission bar, the second transmission bar will move upward. The upward movement of the second transmission bar can squeeze the inclined surface of the second transmission block, and the two second transmission blocks will drive the second sealing strips to move closer to each other, so that the two second sealing strips and the side wall of the valve plate can be squeezed against each other, thereby sealing the side of the valve port close to the vacuum system. This achieves the goal of reducing the friction between the valve plate and the first sealing strip and the second sealing strip while sealing, greatly reducing the number of fine particles generated when the first sealing strip and the second sealing strip are rubbed, and ensuring the high cleanliness of the inside of the transmission valve.

[0019] Secondly, the present invention is provided with an exhaust mechanism. When the valve plate moves downward to seal the valve port, the valve stem will drive the piston plate to move inside the gas bin through the piston rod, thereby generating suction inside the gas bin. At this time, air can be sucked into the position of the sealing mechanism inside the valve seat away from the vacuum system through the air intake pipe, so that fine particles generated by the friction between the first sealing strip and the second sealing strip can be sucked into the air intake pipe and then stored in the gas bin. When the valve plate opens the valve port upward, the piston plate squeezes the air inside the gas bin, thereby transporting the air with particles inside the gas bin to the inside of the heat dissipation bin, and then discharged to the outside through the exhaust pipe, thereby achieving the effect of automatically cleaning the fine particles inside the valve seat.

[0020] Third: In the present invention, when the first telescopic rod is frequently opened and closed to open and close the valve seat, a large amount of heat will be generated on the first telescopic rod and inside the valve port. When the air intake pipe sucks in the fine particles, the heat can also be sucked in, and then discharged from the heat dissipation bin together. At the same time, the heat generated by the first telescopic rod will also be conducted to the heat dissipation plate. The air moves inside the heat dissipation bin, and the heat on the heat dissipation plate can also be driven to dissipate to the outside, thereby achieving the effect of dissipating fine particles while dissipating heat from the device.

[0021] Fourthly, in the present invention, after the valve stem drives the valve plate downward to seal the valve port, the second telescopic rod can be started, and the second telescopic rod will drive the blocking block to move toward the inside of the limiting groove. When the blocking block moves to the inside of the limiting groove, the valve stem will be limited. At this time, the valve plate will be locked inside the valve port, avoiding the situation where the valve plate is opened due to the accidental start-up of the first telescopic rod, thereby further increasing the sealing effect of the valve plate on the valve port. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a schematic diagram of the overall structure of the front side of the present invention;

[0024] Figure 2 It is a side sectional view of the internal structure of the present invention;

[0025] Figure 3 It is a front sectional view of the internal structure of the present invention;

[0026] Figure 4 For the present invention Figure 2 Enlarged view of point A in the middle;

[0027] Figure 5 For the present invention Figure 2 Enlarged view of point B in the middle;

[0028] Figure 6 It is a schematic diagram of the exhaust mechanism structure in the present invention;

[0029] Figure 7 For the present invention Figure 3 Enlarged view of point C in the middle;

[0030] Figure 8 For the present invention Figure 3 Enlarged view of point D in the middle.

[0031] Reference numerals:

[0032] 1. Valve seat; 2. Sealing shell; 3. Connecting flange plate; 4. Valve port; 5. Valve plate; 6. First telescopic rod; 7. Valve stem; 8. Vacuum tube; 9. First mounting groove; 10. First sealing strip; 11. Second mounting groove; 12. Second sealing strip; 13. First transmission groove; 14. First transmission block; 15. First transmission strip; 16. Second transmission groove; 17. Second transmission block; 18. Third transmission groove; 19. Second transmission strip; 20. Mounting spring; 21. Reset groove; 22. Reset block; 23. Return spring; 24, air chamber; 25, piston plate; 26, piston rod; 27, air inlet pipe; 28, first non-return valve; 29, heat dissipation chamber; 30, exhaust pipe; 31, second non-return valve; 32, heat dissipation plate; 33, limit groove; 34, second telescopic rod; 35, block; 36, connecting bolt; 37, connecting nut; 38, connecting flange hole; 39, slide groove; 40, slider; 41, rotating shaft; 42, pulley; 43, sealing roller; 44, connecting groove; 45, connecting spring; 46, connecting rod. DETAILED DESCRIPTION

[0033] The present invention is described in detail below, and the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] The present invention provides a semiconductor high-cleanliness vacuum transmission valve through improvement. The technical solution of the present invention is:

[0035] like Figures 1 to 8 As shown, an embodiment of the present invention provides a semiconductor high-cleanliness vacuum transmission valve, comprising a valve seat 1, a sealing shell 2 and a connecting flange plate 3, wherein the valve seat 1 is a hollow rectangular structure, the sealing shell 2 is arranged above the valve seat 1, the connecting flange plate 3 is fixedly installed on the top of the valve seat 1, the sealing shell 2 is movably installed on the connecting flange plate 3, a valve port 4 is provided on the valve seat 1, the valve port 4 is a groove of a rectangular structure, a valve plate 5 is movably installed inside the valve seat 1, the valve plate 5 is a rectangular plate adapted to the valve port 4, a first telescopic rod 6 is fixedly installed inside the sealing shell 2, a valve stem 7 is fixedly installed on the output end of the first telescopic rod 6, the valve stem 7 is a cylindrical structure, a connecting groove 44 is provided on the top of the valve plate 5, a connecting spring 45 is installed inside the connecting groove 44, the bottom of the valve stem 7 is connected to the connecting spring 45, a vacuum tube 8 is installed on the sealing shell 2, and a sealing mechanism and an exhaust mechanism are provided inside the valve seat 1;

[0036] The sealing mechanism includes a sealing roller 43, a first sealing strip 10, a second sealing strip 12, a first transmission block 14, a first transmission strip 15, a second transmission block 17 and a second transmission strip 19. There are two sealing rollers 43, which are movably mounted on both sides of the upper part of the valve seat 1. The sealing roller 43 fits with the valve plate 5, and can seal the upper part of the valve port 4. The bottom wall of the valve seat 1 is provided with a first mounting groove 9, which is a groove of a rectangular structure. The first sealing strip 10 is a rectangular strip of rubber material. The first sealing strip 10 is fixedly mounted inside the first mounting groove 9. A group of second mounting grooves 11 are provided on one side of the valve seat 1 close to the vacuum system. The second mounting grooves 11 are a groove of a rectangular structure. There are two second mounting grooves 11 in a group. The second sealing strip 12 is a rectangular strip of rubber material. The number of the second sealing strips 12 is the same as that of the second mounting grooves 11. Both second sealing strips 12 fit with the first sealing strip 10.The two second sealing strips 12 are movably mounted inside the two second mounting grooves 11, respectively. Two first transmission grooves 13 are provided below the bottom wall inside the valve seat 1. The first transmission block 14 is a block of rectangular structure. There are two first transmission blocks 14. The two first transmission blocks 14 are movably mounted above the inside of the two first transmission grooves 13, respectively. The first transmission bar 15 is a long strip of trapezoidal structure. There are two first transmission bars 15. The two first transmission bars 15 are movably mounted inside the two first transmission grooves 13, respectively. One side wall of the two first transmission bars 15 close to the first transmission block 14 is an inclined surface. Two second transmission grooves 16 are provided inside the valve seat 1 at positions corresponding to the second sealing strips 12. The second transmission groove 16 is a groove of rectangular structure, and there are two second transmission blocks 17. The two second transmission blocks 17 are respectively located inside the two second transmission grooves 16 and are respectively fixedly connected to the two second sealing strips 12. The inside of the valve seat 1 is provided with a third transmission groove 18 at a position corresponding to the second transmission groove 16. The third transmission groove 18 is a groove of rectangular structure. The third transmission groove 18 is connected to the inside of the second transmission groove 16 and the first transmission groove 13. The second transmission bar 19 is a trapezoidal structure. The number of the second transmission bars 19 is consistent with that of the third transmission groove 18. The second transmission bar 19 is movably installed inside the third transmission groove 18, and the side wall of the second transmission block 17 facing the third transmission groove 18 is an inclined surface. The side wall of the second transmission bar 19 facing the first transmission bar 15 is an inclined surface. Through the setting of the sealing mechanism, when the first telescopic rod 6 is started, the first telescopic rod 6 drives the valve plate 5 to move downward through the valve stem 7 to seal the valve port 4, the valve plate 5 contacts the first sealing strip 10, and then squeezes the first sealing strip 10. The first sealing strip 10 is deformed after being compressed, thereby sealing the lower part of the inner part of the valve port 4. At the same time, the valve plate 5 squeezes the first transmission block 14, and the first transmission block 14 will move downward inside the first transmission groove 13, and then squeeze the inclined surface of the first transmission bar 15. After the inclined surface of the first transmission bar 15 is squeezed, the first transmission bar 15 will move toward the second The transmission bar 19 moves in the direction of the first transmission bar 19, and then the inclined surface of the second transmission bar 19 can be squeezed, and the second transmission bar 19 will move upward. The upward movement of the second transmission bar 19 can squeeze the inclined surface of the second transmission block 17, and the second transmission block 17 will drive the second sealing strip 12 to move, and then the two second sealing strips 12 and the side wall of the valve plate 5 can be squeezed against each other, so as to seal the side of the valve port 4 close to the vacuum system, thereby achieving the purpose of reducing the friction between the valve plate 5 and the first sealing strip 10 and the second sealing strip 12 while sealing, greatly reducing the number of fine particles generated when the first sealing strip 10 and the second sealing strip 12 are rubbed, and ensuring the high cleanliness inside the transmission valve.

[0037] There are two groups of exhaust mechanisms, which include two gas chambers 24, a piston plate 25, a piston rod 26, an air intake pipe 27 and a plurality of first check valves 28. The gas chamber 24 is a hollow cylindrical structure. The two gas chambers 24 are fixedly mounted inside the sealing shell 2. The piston plate 25 is a circular plate of the same size as the inside of the gas chamber 24. The two piston plates 25 are movably mounted inside the two gas chambers 24. The piston rod 26 is a cylindrical structure. The two piston rods 26 are fixedly mounted on the bottom wall of the two piston plates 25. A connecting rod 46 is fixedly mounted between the two piston rods 26 and the valve stem 7. The air intake pipe 27 is a tubular structure. The two air intake pipes 27 are fixedly mounted on the side walls of the two gas chambers 24 and are connected to the inside of the gas chamber 24. The bottom of the air intake pipe 27 extends to the position of the sealing mechanism corresponding to the inside of the valve seat 1. The plurality of first check valves 28 are divided into The first check valve 28 is fixedly installed at the upper and lower ends of the two air inlet pipes 27. The first check valve 28 can seal the upper and lower ends of the air inlet pipe 27, so that air can only be taken in from the bottom of the air inlet pipe 27, but not from the top of the air inlet pipe 27, that is, the air inside the air chamber 24 cannot enter the inside of the air inlet pipe 27 again. Through the setting of the exhaust mechanism, when the valve plate 5 moves downward to seal the valve port 4, the valve stem 7 will drive the piston plate 25 to move inside the air chamber 24 through the piston rod 26. When the valve plate 5 moves to the bottom of the valve port 4, the valve stem 7 can continue to move downward, thereby generating suction inside the air chamber 24. At this time, the position of the sealing mechanism inside the valve seat 1 far away from the vacuum system can be sucked through the air inlet pipe 27, so that the fine particles generated by the friction between the first sealing strip 10 and the second sealing strip 12 can be sucked into the inside of the air inlet pipe 27, and then stored in the inside of the air chamber 24.

[0038] The exhaust mechanism also includes a heat dissipation bin 29, an exhaust pipe 30, a second check valve 31 and a heat dissipation plate 32. The heat dissipation bin 29 is a hollow rectangular structure. The heat dissipation bin 29 is fixedly installed on the top of the gas bin 24. The exhaust pipe 30 is a cylindrical pipe. The exhaust pipe 30 is fixedly installed on the side wall of the heat dissipation bin 29 and is connected to the outside. The second check valve 31 is fixedly installed between the gas bin 24 and the heat dissipation bin 29. The heat dissipation plate 32 is a metal plate with good thermal conductivity. There are a plurality of heat dissipation plates 32. The plurality of heat dissipation plates 32 are evenly distributed and fixedly installed on the side wall of the first telescopic rod 6, and one end of the heat dissipation plate 32 is located inside the heat dissipation bin 29. When the valve plate 5 opens the valve port 4 upward, the piston plate 25 squeezes the air inside the gas bin 24 inside the gas bin 24. , and the air with particles inside the air bin 24 can be transported to the inside of the heat dissipation bin 29, and then discharged to the outside through the exhaust pipe 30, thereby achieving the effect of automatically cleaning the fine particles inside the valve seat 1. At the same time, when the first telescopic rod 6 is frequently opened and closed to switch the valve seat 1, a large amount of heat will be generated on the first telescopic rod 6 and inside the valve port 4. When the air inlet pipe 27 inhales the fine particles, it can also inhale the heat, and then discharge it from the inside of the heat dissipation bin 29 together. At the same time, the heat generated by the first telescopic rod 6 will also be conducted to the heat dissipation plate 32. The air moves inside the heat dissipation bin 29, and can also drive the heat on the heat dissipation plate 32 to be dissipated to the outside, thereby achieving the effect of dissipating fine particles while also dissipating the heat of the device.

[0039] A mounting spring 20 is installed inside the first transmission groove 13, and the first transmission block 14 is installed inside the first transmission groove 13 through the mounting spring 20. A reset groove 21 is opened inside the valve seat 1 at the position corresponding to the second transmission block 17 and the third transmission groove 18. The reset groove 21 is a groove with a rectangular structure. Reset blocks 22 are movably installed inside the reset groove 21. The reset blocks 22 are blocks with a rectangular structure. Multiple reset blocks 22 are respectively fixedly connected to the second transmission block 17 and the second transmission bar 19. A reset spring 23 connected to the reset block 22 is installed inside the reset groove 21. When the valve plate 5 is separated from the first transmission block 14, the first transmission block 14 will be reset under the action of the mounting spring 20, and the second transmission block 17 and the second transmission bar 19 will also be reset under the action of the reset block 22 and the reset spring 23.

[0040] A plurality of connecting bolts 36 are fixedly installed on the top of the connecting flange plate 3, and threads are provided on the connecting bolts 36. A circular hole is provided on the sealing shell 2, and the connecting bolts 36 pass through the circular hole provided on the sealing shell 2. A connecting nut 37 is movably installed on the connecting bolt 36 through a thread. The sealing shell 2 is installed on the connecting flange plate 3 through the connecting bolts 36 and the connecting nut 37. Connecting flange holes 38 are provided on the two side walls of the valve seat 1, and the valve seat 1 is connected to the external conveying equipment through the connecting flange holes 38.

[0041] The limiting groove 33 is provided on the side wall of the valve stem 7. The limiting groove 33 is a groove of a rectangular structure. A second telescopic rod 34 is inlaid and installed in the position corresponding to the limiting groove 33 inside the valve seat 1. A clamping block 35 is fixedly installed on the output end of the second telescopic rod 34. The clamping block 35 is a block of a rectangular structure. The size of the clamping block 35 is adapted to the limiting groove 33. Through the arrangement of the second telescopic rod 34 and the clamping block 35, when the valve stem 7 drives the valve plate 5 downward to seal the valve port 4, the second telescopic rod 34 can be started, and the second telescopic rod 34 will drive the clamping block 35 to move toward the inside of the limiting groove 33. When the clamping block 35 moves to the inside of the limiting groove 33, the valve stem 7 will be limited. At this time, the valve plate 5 will be locked inside the valve port 4, avoiding the situation where the valve plate 5 is opened due to the accidental start of the first telescopic rod 6, thereby further increasing the sealing effect of the valve plate 5 on the valve port 4.

[0042] A slide groove 39 is provided on the inner wall of the valve seat 1. The slide groove 39 is a groove of a rectangular structure. A slider 40 is provided inside the slide groove 39. The slider 40 is a hollow rectangular structure. The slider 40 is fixedly connected to the valve plate 5. A rotating shaft 41 is movably installed inside the slider 40. The rotating shaft 41 is a cylindrical structure. A pulley 42 is sleeved on the rotating shaft 41. The pulley 42 is a circular structure, and the side wall of the pulley 42 fits with the inner wall of the slide groove 39. When the valve plate 5 moves inside the valve seat 1, the pulley 42 will contact and rotate with the inner wall of the slide groove 39, thereby reducing the friction generated by the movement of the valve plate 5 and guiding the movement of the valve plate 5.

[0043] Specific implementation steps: through the setting of the sealing mechanism, when the first telescopic rod 6 is started, the first telescopic rod 6 drives the valve plate 5 to move downward through the valve stem 7 to seal the valve port 4, the valve plate 5 contacts the first sealing strip 10, and then squeezes the first sealing strip 10. The first sealing strip 10 is deformed after being compressed, thereby sealing the bottom of the valve port 4. At the same time, the valve plate 5 squeezes the first transmission block 14, and the first transmission block 14 will move downward inside the first transmission groove 13, and then squeeze the inclined surface of the first transmission bar 15. After the inclined surface of the first transmission bar 15 is squeezed, the two first transmission bars 15 will move toward the direction of the second transmission bar 19, so that The inclined surface of the second transmission bar 19 is squeezed, and the second transmission bar 19 moves upward. The upward movement of the second transmission bar 19 can squeeze the inclined surface of the second transmission block 17, and the two second transmission blocks 17 on both sides will drive the second sealing strips 12 to move closer to each other, so that the multiple second sealing strips 12 and the side wall of the valve plate 5 can be squeezed against each other, so as to seal the side of the valve port 4 close to the vacuum system, thereby achieving the effect of reducing the friction between the valve plate 5 and the first sealing strip 10 and the second sealing strip 12 while sealing, greatly reducing the number of fine particles generated when the first sealing strip 10 and the second sealing strip 12 are rubbed, and ensuring the high cleanliness inside the transmission valve;

[0044] At the same time, an exhaust mechanism is provided. When the valve plate 5 moves downward to seal the valve port 4, the valve stem 7 drives the piston plate 25 to move inside the gas chamber 24 through the piston rod 26. When the valve plate 5 moves to the bottom of the valve port 4, the valve stem 7 can continue to move downward, thereby generating suction inside the gas chamber 24. At this time, the position of the sealing mechanism inside the valve seat 1 far away from the vacuum system can be sucked through the air inlet pipe 27, so that the fine particles generated by the friction between the first sealing strip 10 and the second sealing strip 12 can be sucked into the air inlet pipe 27 and then stored in the gas chamber 24. When the valve plate 5 opens the valve port 4 upward, the piston plate 25 squeezes the air inside the gas chamber 24, thereby the gas chamber 24 can be The air with particles inside is transported to the interior of the heat dissipation bin 29, and then can be discharged to the outside through the exhaust pipe 30, thereby achieving the effect of automatically cleaning the fine particles inside the valve seat 1. At the same time, when the first telescopic rod 6 is frequently opened and closed to switch the valve seat 1, a large amount of heat will be generated on the first telescopic rod 6 and inside the valve port 4. When the air intake pipe 27 inhales the fine particles, it can also inhale the heat and then discharge it from the inside of the heat dissipation bin 29 together. At the same time, the heat generated by the first telescopic rod 6 will also be conducted to the heat dissipation plate 32. The air moves inside the heat dissipation bin 29, and can also drive the heat on the heat dissipation plate 32 to be dissipated to the outside, thereby achieving the effect of dissipating fine particles while also dissipating heat from the device.

[0045] The above description enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A semiconductor high-cleanliness vacuum transmission valve, comprising a valve seat (1), a sealing shell (2) and a connecting flange plate (3), wherein the sealing shell (2) is arranged above the valve seat (1), the connecting flange plate (3) is fixedly mounted on the top of the valve seat (1), and the sealing shell (2) is movably mounted on the connecting flange plate (3), characterized in that: The valve seat (1) is provided with a valve port (4), a valve plate (5) is movably mounted inside the valve seat (1), a first telescopic rod (6) is fixedly mounted inside the sealing shell (2), a valve stem (7) is fixedly mounted on the output end of the first telescopic rod (6), a connecting groove (44) is provided on the top of the valve plate (5), a connecting spring (45) is mounted inside the connecting groove (44), the bottom of the valve stem (7) is connected to the connecting spring (45), a vacuum tube (8) is mounted on the sealing shell (2), and a sealing mechanism and an exhaust mechanism are arranged inside the valve seat (1); The exhaust mechanism comprises two groups, the exhaust mechanism comprising two gas chambers (24), a piston plate (25), a piston rod (26), an air intake pipe (27) and a first check valve (28). The two gas chambers (24) are fixedly mounted inside the sealing shell (2). The two piston plates (25) are movably mounted inside the two gas chambers (24). The two piston rods (26) are fixedly mounted on the bottom wall of the two piston plates (25). A connecting rod (46) is fixedly mounted between the two piston rods (26) and the valve stem (7). The two air intake pipes (27) are fixedly mounted above the side walls of the two gas chambers (24) and communicate with the inside of the gas chambers (24). The bottom of the air intake pipe (27) extends to the position of the sealing mechanism below the inside of the valve seat (1). There are a plurality of first check valves (28), and the plurality of first check valves (28) are fixedly mounted at the upper and lower ends of the two air intake pipes (27).

2. A semiconductor high-cleanliness vacuum transfer valve according to claim 1, characterized in that: The sealing mechanism comprises a sealing roller (43), a first sealing strip (10), a second sealing strip (12), a first transmission block (14), a first transmission strip (15), a second transmission block (17) and a second transmission strip (19). There are two sealing rollers (43) in total. The two sealing rollers (43) are movably mounted on the upper two sides of the inside of the valve seat (1). The sealing rollers (43) are in contact with the valve plate (5). A first mounting groove (9) is provided on the bottom wall of the inside of the valve seat (1). The first sealing strip (10) is fixedly mounted inside the first mounting groove (9). A group of second mounting grooves (11) is provided on the side of the inside of the valve seat (1) close to the vacuum system. There are two second mounting grooves (11) in total. Two second sealing strips (12) are movably mounted inside the two second mounting grooves (11). The two second sealing strips (12) are in contact with the first sealing strip (10). The valve seat (1) Two first transmission grooves (13) are provided below the bottom wall surface of the interior, there are two first transmission blocks (14) in total, the two first transmission blocks (14) are movably mounted above the interior of the two first transmission grooves (13), there are two first transmission bars (15) in total, the two first transmission bars (15) are movably mounted inside the two first transmission grooves (13), two second transmission grooves (16) are provided inside the valve seat (1), there are two second transmission blocks (17) in total, the two second transmission blocks (17) are located inside the two second transmission grooves (16) and are fixedly connected to the two second sealing strips (12), a third transmission groove (18) is provided inside the valve seat (1) at a position corresponding to the second transmission groove (16), the number of the second transmission bars (19) is the same as that of the third transmission grooves (18), and the second transmission bars (19) are movably mounted inside the third transmission groove (18).

3. A semiconductor high-cleanliness vacuum transfer valve according to claim 1, characterized in that: The exhaust mechanism further comprises a heat dissipation bin (29), an exhaust pipe (30), a second non-return valve (31) and a heat dissipation plate (32); the heat dissipation bin (29) is fixedly mounted on the top of the gas bin (24); the exhaust pipe (30) is fixedly mounted on the side wall of the heat dissipation bin (29) and is in communication with the outside; the second non-return valve (31) is fixedly mounted between the gas bin (24) and the heat dissipation bin (29); there are a plurality of heat dissipation plates (32); the plurality of heat dissipation plates (32) are evenly distributed and fixedly mounted on the side wall of the first telescopic rod (6); and one end of the heat dissipation plate (32) is located inside the heat dissipation bin (29).

4. A semiconductor high-cleanliness vacuum transfer valve according to claim 2, characterized in that: One side wall surface of the two first transmission bars (15) close to the first transmission block (14) is an inclined surface, one side wall surface of the second transmission block (17) facing the third transmission groove (18) is an inclined surface, and one side wall surface of the second transmission bar (19) facing the first transmission bar (15) is an inclined surface.

5. The semiconductor high-cleanliness vacuum transfer valve according to claim 2, characterized in that: A mounting spring (20) is installed inside the first transmission groove (13); the first transmission block (14) is installed inside the first transmission groove (13) via the mounting spring (20); a reset groove (21) is provided inside the valve seat (1) at a position corresponding to the second transmission block (17) and the third transmission groove (18); reset blocks (22) are movably installed inside the reset groove (21); a plurality of reset blocks (22) are respectively fixedly connected to the second transmission block (17) and the second transmission bar (19); and a reset spring (23) connected to the reset block (22) is installed inside the reset groove (21).

6. The semiconductor high-purity vacuum transfer valve according to claim 1, characterized in that: A plurality of connecting bolts (36) are fixedly mounted on the top of the connecting flange plate (3), the connecting bolts (36) are provided with threads, a circular hole is provided on the sealing shell (2), the connecting bolts (36) pass through the circular hole provided on the sealing shell (2), connecting nuts (37) are movably mounted on the connecting bolts (36) through threads, and connecting flange holes (38) are provided on both side walls of the valve seat (1).

7. The semiconductor high-purity vacuum transfer valve according to claim 1, characterized in that: A limiting groove (33) is provided on the side wall of the valve stem (7); a second telescopic rod (34) is embedded and installed in the valve seat (1) at a position corresponding to the limiting groove (33); a clamping block (35) is fixedly installed on the output end of the second telescopic rod (34); the size of the clamping block (35) is adapted to the limiting groove (33).

8. The semiconductor high-purity vacuum transfer valve according to claim 1, characterized in that: A sliding groove (39) is provided on the inner wall of the valve seat (1), a sliding block (40) is provided inside the sliding groove (39), and the sliding block (40) is fixedly connected to the valve plate (5).

9. The semiconductor high-cleanliness vacuum transfer valve according to claim 8, characterized in that: A rotating shaft (41) is movably mounted inside the sliding block (40), a pulley (42) is sleeved on the rotating shaft (41), and a side wall of the pulley (42) is in contact with an inner wall of the sliding groove (39).

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