Ultra-clean double-corrugated-pipe corrugated pipe valve for semiconductor manufacturing

Abstract

The invention discloses an ultra-clean double-corrugated-pipe type corrugated pipe valve for semiconductor manufacturing. The ultra-clean double-corrugated-pipe type corrugated pipe valve comprises a valve seat, a valve body air inlet, a valve body air outlet and a valve body, wherein the valve body air inlet and the valve body air outlet are communicated with the valve seat, and the valve body is obliquely arranged on the valve seat. The valve body comprises a valve rod and a valve body, a first corrugated pipe and a second corrugated pipe are arranged between the valve rod and the valve body, the lower end of the valve rod is further connected with a sealing plug, and the sealing plug controls opening and closing of the corrugated pipe valve. According to the technical scheme, the service life of the corrugated pipe of the corrugated pipe valve can be effectively prolonged, the sealing performance and reliability are improved, and the corrugated pipe does not serve as a guide rail any more.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to an ultra-clean double-bellows bellows valve for semiconductor manufacturing. Background Art

[0002] Ultra-clean valves for semiconductor gas circuits are primarily divided into diaphragm valves and bellows valves. Because bellows can expand and contract more than the diaphragm of a diaphragm valve, bellows valves are often used to control the opening and closing of semiconductor gas circuits with relatively large amplitudes.

[0003] Traditional bellows valves utilize a screw structure to drive the opening and closing of the sealing plug and the valve seat. Specifically, in the screw structure, the bellows acts as a non-rotatable guide for the sealing plug.

[0004] However, this will undoubtedly introduce circumferential rotational force and a tendency for the bellows to rotate when the screw is manually tightened. Over time, the bellows are prone to damage and leakage, affecting the safety, stability, and variability of particulate matter in the semiconductor gas path. Summary of the Invention

[0005] In order to solve the above problems, the present invention provides an ultra-clean double-bellows bellows valve for semiconductor manufacturing, which can extend the life of the bellows of the bellows valve, increase the sealing and reliability of the bellows valve, and no longer require the bellows to serve as a guide rail.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] An ultra-clean double-bellows bellows valve for semiconductor manufacturing, comprising a valve seat, a valve body air inlet and a valve body air outlet respectively connected to the valve seat, and a valve body obliquely arranged on the valve seat;

[0008] The valve body includes a valve stem and a valve body, and a first bellows and a second bellows are respectively arranged between the valve stem and the valve body. The lower end of the valve stem is also connected to a sealing plug, and the sealing plug controls the opening and closing of the bellows valve.

[0009] The second bellows serves as a guide rail to guide the sealing plug to control the opening and closing of the bellows valve.

[0010] In an alternative embodiment, the lower opening of the first bellows is fixedly connected to the outer edge of the sealing plug, and the lower opening of the second bellows is fixedly connected to the inner side of the sealing plug.

[0011] In an alternative embodiment, the valve body is further configured with a plurality of guide rods and guide cylinders in pairs, the guide rods and guide cylinders are arranged between the first bellows and the second bellows, and the guide rods are fixed on the sealing plug.

[0012] In an alternative embodiment, the valve body further includes a flange cover and a sleeve, the flange cover is sleeved on the valve stem, the sleeve is sleeved on the flange cover, and the outer flange of the sleeve is clamped between the valve body and the flange cover.

[0013] In an alternative embodiment, the upper opening of the first bellows is fixedly connected to the outer edge of the lower end of the sleeve.

[0014] In a replaceable embodiment, an internally threaded nut is fixed to the lower end of the sleeve, the internally threaded nut is arranged in the first bellows, the internal thread of the internally threaded nut is connected to the externally threaded nut, the externally threaded nut is sleeved on the valve stem, the upper opening of the second bellows is fixedly connected to the externally threaded nut, and the guide sleeve is fixedly connected to the internally threaded nut.

[0015] In an alternative embodiment, an accommodating cavity is provided on the upper surface of the sealing plug, the bottom of the accommodating cavity is a circular groove, and the stem shaft end of the valve stem is arranged in the circular groove.

[0016] In an alternative embodiment, an open retaining ring is further clamped on the shaft end of the valve stem, and an annular boss is further provided at the upper end of the accommodating cavity of the sealing plug, and the open retaining ring is fixed in the annular boss.

[0017] In an alternative embodiment, the upper end of the valve stem is further connected to a handle, and the handle drives the valve stem to rotate.

[0018] In an alternative embodiment, when the handle is rotated clockwise, the sealing plug approaches the valve seat, the valve body air inlet and the valve body air outlet are separated, and the bellows valve is closed; when the handle is rotated counterclockwise, the sealing plug moves away from the valve seat, the valve body air inlet and the valve body air outlet are connected, and the bellows valve is opened.

[0019] Beneficial effects of the present invention:

[0020] The ultra-clean double-bellows bellows valve for semiconductor manufacturing provided by the present invention can extend the life of the bellows of the bellows valve, increase the sealing performance and reliability of the bellows valve, and no longer require the bellows to serve as a guide rail. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic structural diagram of a bellows valve in the form of a double bellows according to the present invention in a closed state;

[0022] Figure 2 A schematic structural diagram of a bellows valve in the form of a double bellows according to the present invention in an open state;

[0023] Figure 3A cross-sectional view of a bellows valve in a double-bellows configuration according to the present invention in a closed state;

[0024] Figure 4 A cross-sectional view of a bellows valve in the form of a double bellows according to the present invention in an open state;

[0025] Figure 5 A top view of a bellows valve in the form of a double bellows according to the present invention;

[0026] Figure 6 It is a front view of a bellows valve in the form of a double bellows according to the present invention.

[0027] Figure markings: 101-valve body air inlet; 102-valve body air outlet; 103-valve seat; 111-valve body; 112-flange cover; 113-sleeve; 201-handle; 202-valve stem; 203-valve stem shaft end; 204-sealing plug; 205-opening retaining ring; 206-circular groove; 207-annular boss; 310-first bellows; 320-second bellows; 410-guide rod; 420-guide cylinder; 510-inner thread nut; 520-outer thread nut. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solutions and advantages of this application more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0029] Embodiments of the present invention, examples of which are illustrated in the accompanying drawings, are described throughout, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions. The terms "first," "second," "third," and so forth (if any) in the specification and claims of the present invention, as well as in the accompanying drawings, are used to distinguish similar items and are not necessarily used to describe a particular order or precedence. It should be understood that the items described in this manner are interchangeable where appropriate. Furthermore, the terms "including," "having," and any variations thereof are intended to cover non-exclusive inclusions. Directional terms used herein, such as "up," "down," "left," "right," "front," "back," "inside," "outside," and "side," are intended to refer only to the directions in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are illustrative and intended solely to explain the present invention and are not to be construed as limiting the present invention. Furthermore, reference numbers and / or reference letters are repeated throughout the various examples. This repetition is for simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations discussed. Furthermore, while the present invention provides examples of various specific processes and materials, those skilled in the art will appreciate the application of other processes and / or the use of other materials.

[0030] like Figures 1-6 As shown, the present invention discloses an ultra-clean double-bellows bellows valve for semiconductor manufacturing. This ultra-clean double-bellows bellows valve for semiconductor manufacturing includes at least a valve seat 103 and a valve body. Valve seat 103 communicates with a valve body air inlet 101 and a valve body air outlet 102. The valve body is tilted on valve seat 103 and located at the junction of valve body air inlet 101 and valve body air outlet 102.

[0031] Specifically, the valve body includes at least a valve stem 202 and a valve body 111. The valve stem 202 is centrally disposed within the valve body 111. A first bellows 310 and a second bellows 320 are disposed between the valve stem 202 and the valve body 111, respectively.

[0032] The first bellows 310 and the second bellows 320 are both fixed on the sealing plug 204 . Preferably, the lower opening of the first bellows 310 is fixedly connected to the outer edge of the sealing plug 204 , and the lower opening of the second bellows 320 is fixedly connected to the inner side of the sealing plug 204 .

[0033] Preferably, the outer edge of the sealing plug 204 and the lower side of the first bellows 310 are sealed by welding.

[0034] Furthermore, since the second bellows 320 is sleeved outside the valve stem 202 and inside the first bellows 310, the second bellows 320 can serve as a guide to guide the movement direction of the sealing plug 204, thereby controlling the opening and closing of the bellows valve of the present invention.

[0035] In order to further guide the movement of the valve stem 202, avoid excessive use of the second bellows 320, and extend the service life of the first bellows 310 and the second bellows 320, the valve body of the present application is further configured with a plurality of guide rods 410 and guide cylinders 420 in pairs. The guide rods 410 move along the guide cylinders 420, wherein the guide rods 410 are fixed to the sealing plug 204.

[0036] Specifically, the guide rod 410 and the guide cylinder 420 are disposed between the first bellows 310 and the second bellows 320 , and are installed outside the second bellows 320 and inside the first bellows 310 .

[0037] See attached Figure 1 The valve body also includes a flange cover 112 and a sleeve 113. The flange cover 112 is sleeved on the valve stem 202, and the sleeve 113 is sleeved on the flange cover 112. The outer flange of the sleeve 113 is clamped between the valve body 111 and the flange cover 112. The flange of the flange cover 112 and the flange of the valve body 111 are fixed by bolts to form a whole.

[0038] Preferably, the valve stem 202 is connected to the flange cover 112 via threads, and the valve stem 202 can move axially within the flange cover 112 by rotating.

[0039] Furthermore, the upper opening of the first bellows 310 is fixedly connected to the outer edge of the lower end of the sleeve 113. Thus, the first bellows 310 is fixed in the valve body 111 through the sleeve 113 and the sealing plug 204, and a closed space is formed inside the first bellows 310.

[0040] An internally threaded nut 510 is also fixed to the lower end of the sleeve 113. The internally threaded nut 510 is arranged in the first bellows 310. The internal thread of the internally threaded nut 510 is connected to the externally threaded nut 520. The externally threaded nut 520 is sleeved on the valve stem 202. The upper opening of the second bellows 320 is fixedly connected to the externally threaded nut 520, and the guide sleeve 420 is fixedly connected to the externally threaded nut 520 or the sleeve 113.

[0041] Preferably, the threads of the externally threaded nut 510 and the internally threaded nut 520 have a relatively large helix angle, thereby avoiding self-locking.

[0042] At the same time, the circumferential movement trend brought about by the axial movement is transmitted to the sealing plug 204, thereby avoiding the possible relative circumferential rotation of the sealing plug 204 and the valve seat 103 due to the clearance between the guide rod 410 and the guide cylinder 420, thereby preventing the first bellows 310 from being subjected to a large circumferential rotation force.

[0043] Specifically, the circumferential rotation force transmitted by the second bellows 320 offsets a portion of the circumferential rotation force of the first bellows 310 , thereby increasing the service life of the first bellows 310 .

[0044] The torsional elastic stiffness of the first bellows 310 is greater than or much greater than that of the second bellows 320, or the torsional elastic stiffness of the first bellows 310 is less than or much less than that of the second bellows 320. As a result, the friction positions of the guide rod 410 and the guide cylinder 420 are located on the same side of the valve stem 202 in the circumferential direction. That is, the guide rod 410 and the guide cylinder 420 always wear eccentrically, thereby reducing or eliminating clearance.

[0045] See attached Figure 3 The lower end of the valve stem 202 is also connected to a sealing plug 204, which controls the opening and closing of the ultra-clean double-bellows bellows valve for semiconductor manufacturing of the present invention by moving away from or close to the valve seat 103.

[0046] Furthermore, an accommodating cavity is defined on the upper surface of the sealing plug 204 , the bottom of which is a circular groove 206 , and the valve stem 202 has a valve stem shaft end 203 , which is rotatably disposed in the circular groove 206 .

[0047] Furthermore, the valve stem shaft end 203 has a circle of annular steps, and an open retaining ring 205 is clamped on the annular step of the valve stem shaft end 203 , and the open retaining ring 205 is sleeved on the valve stem 202 .

[0048] Optionally, an annular boss 207 is further provided at the upper end of the accommodating cavity of the sealing plug 204, and an open retaining ring 205 is fixedly engaged in the annular boss 207. Since the valve stem 202 can drive the valve stem shaft end 203 to rotate, and the open retaining ring 205 limits the axial displacement of the valve stem shaft end 203 of the valve stem 202, it is equivalent to the valve stem shaft end 203 and the sealing plug 204 being connected by a bearing, and the valve stem shaft end 203 can drive the sealing plug 204 to move axially at the same time.

[0049] Furthermore, the upper end of the valve stem 202 is also connected to a handle 201, and the handle 201 drives the valve stem 202 to rotate. By rotating the handle 201, the technical effect of opening or closing the bellows valve is achieved.

[0050] Specifically, the handle 201 rotates clockwise, the sealing plug 204 approaches the valve seat 103, the valve body air inlet 101 and the valve body air outlet 102 are separated, and the bellows valve is closed.

[0051] The handle 201 rotates counterclockwise, the sealing plug 204 moves away from the valve seat 103, the valve body air inlet 101 and the valve body air outlet 102 are connected, and the bellows valve is opened.

[0052] The working process of the ultra-clean bellows valve for semiconductor manufacturing of the present invention is as follows:

[0053] When the bellows valve is closed, the valve seat 103 and the sealing plug 204 are close to each other:

[0054] Rotate the handle 201 in the clockwise direction, the handle 201 drives the valve stem 202 to rotate, and the valve stem 202 drives the valve stem shaft end 203 to rotate. By cooperating with the flange cover 112, the valve stem shaft end 203 drives the sealing plug 204 to move downward along the axis, close to the valve seat 103, and separates the connection between the valve body air inlet 101 and the valve body air outlet 102, thereby completing the closing operation of the bellows valve.

[0055] When the bellows valve is open, the valve seat 103 and the sealing plug 204 are away from each other:

[0056] Rotate the handle 201 counterclockwise, the handle 201 drives the valve stem 202 to rotate, and the valve stem 202 drives the valve stem shaft end 203 to rotate. By cooperating with the flange cover 112, the valve stem shaft end 203 drives the sealing plug 204 to move upward along the axis, away from the valve seat 103, and open the connection between the valve body air inlet 101 and the valve body air outlet 102, thereby completing the opening operation of the bellows valve in the form of a double bellows of the present invention.

[0057] The ultra-clean, dual-bellows bellows valve for semiconductor manufacturing of the present invention utilizes externally and internally threaded nuts with large helix angles to prevent self-locking. Furthermore, the circumferential motion generated by axial motion is transferred to the sealing plug, preventing the sealing plug from rotating relative to the valve seat due to the play created by the intermittent fit between the guide rod and the guide cylinder, thereby protecting the first bellows from significant circumferential rotational forces. This results in a longer bellows lifespan, improved sealing, and enhanced reliability, while eliminating the need for the bellows to act as a guide rail.

[0058] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

Claims

1. An ultra-clean double-bellows bellows valve for semiconductor manufacturing, characterized in that: The bellows valve comprises a valve seat (103), a valve body air inlet (101) and a valve body air outlet (102) respectively connected to the valve seat (103), and a valve body obliquely arranged on the valve seat (103); The valve body comprises a valve stem (202) and a valve body (111), a first bellows (310) and a second bellows (320) are respectively arranged between the valve stem (202) and the valve body (111), and a sealing plug (204) is further connected to the lower end of the valve stem (202), and the sealing plug (204) controls the opening and closing of the bellows valve; The second bellows (320) is sleeved on the outside of the valve stem (202) and is arranged on the inside of the first bellows (310). The second bellows (320) serves as a guide rail to guide the sealing plug (204) to control the opening and closing of the bellows valve.

2. The bellows valve according to claim 1, characterized in that The lower opening of the first bellows (310) is fixedly connected to the outer edge of the sealing plug (204), and the lower opening of the second bellows (320) is fixedly connected to the inner side of the sealing plug (204).

3. The bellows valve according to claim 1, characterized in that The valve body is further configured with a plurality of guide rods (410) and guide cylinders (420) in pairs. The guide rods (410) and guide cylinders (420) are arranged between the first bellows (310) and the second bellows (320). The guide rods (410) are fixed on the sealing plug (204), and the guide cylinders (420) are fixedly connected to the internal threaded nut (510).

4. The bellows valve according to claim 1, wherein: The valve body further comprises a flange cover (112) and a sleeve (113), wherein the flange cover (112) is sleeved on the valve stem (202), and the sleeve (113) is sleeved on the flange cover (112), and the outer flange of the sleeve (113) is clamped between the valve body (111) and the flange cover (112).

5. The bellows valve according to claim 4, characterized in that The upper opening of the first bellows (310) is fixedly connected to the outer edge of the lower end of the sleeve (113), and the guide sleeve (420) is fixedly connected to the internal thread nut (510) or the sleeve (113).

6. The bellows valve according to claim 5, characterized in that An internally threaded nut (510) is fixed to the lower end of the sleeve (113), and the internally threaded nut (510) is arranged in the first bellows (310). The internal thread of the internally threaded nut (510) is connected to an externally threaded nut (520), and the externally threaded nut (520) is sleeved on the valve stem (202). The upper opening of the second bellows (320) is fixedly connected to the externally threaded nut (520).

7. The bellows valve according to claim 1, characterized in that An accommodating cavity is provided on the upper surface of the sealing plug (204), the bottom of the accommodating cavity is a circular groove (206), and the valve stem shaft end (203) of the valve stem (202) is arranged in the circular groove (206).

8. The bellows valve according to claim 7, characterized in that An opening retaining ring (205) is also clamped on the valve stem shaft end (203), and an annular boss (207) is also provided at the upper end of the accommodating cavity of the sealing plug (204), and the opening retaining ring (205) is fixed in the annular boss (207).

9. The bellows valve according to claim 1, wherein: The upper end of the valve stem (202) is also connected to a handle (201), and the handle (201) drives the valve stem (202) to rotate.

10. The bellows valve according to claim 9, characterized in that When the handle (201) is rotated clockwise, the sealing plug (204) approaches the valve seat (103), the valve body air inlet (101) and the valve body air outlet (102) are separated, and the bellows valve is closed; when the handle (201) is rotated counterclockwise, the sealing plug (204) moves away from the valve seat (103), the valve body air inlet (101) and the valve body air outlet (102) are connected, and the bellows valve is opened.

Images