Wear-resistant rubber-coated fastening steel ring and preparation method thereof

Abstract

The invention belongs to the technical field of chip processing, and particularly discloses a wear-resistant rubber-coated fastening steel ring and a preparation method thereof, the wear-resistant rubber-coated fastening steel ring is applied to a fastening steel ring with an additional silica gel protection layer for grinding a silicon wafer CMP, the diameter of the fastening steel ring is 150-300mm, the thickness of the fastening steel ring is 1.5-4mm, the fastening steel ring comprises a steel ring body and the silica gel protection layer, and the silica gel protection layer is coated on the outer surface of the steel ring body. According to the wear-resistant rubber-coated fastening steel ring and the preparation method thereof disclosed by the invention, the wear-resistant rubber-coated fastening steel ring is applied to a fastening steel ring of an additional silica gel protective layer required by grinding a silicon wafer CMP, and the fastening steel ring and silica gel are combined as raw materials through a plate vulcanization method to prepare the high-performance silica gel-coated fastening steel ring for CMP grinding; a layer of product coated with silica gel is additionally arranged on the surface of the fastening steel ring, so that the fastening steel ring is physically isolated due to the coating of the silica gel when the fastening steel ring touches an external retainer metal ring, and the problem that the fastening steel ring is scratched is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of chip processing, and in particular to a wear-resistant rubber-coated fastening steel ring and a preparation method thereof. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits (chips). It is a thin, round, high-purity silicon wafer. Its original material is silicon, which is formed after a series of complex processes such as purification, crystal pulling, grinding, polishing, and slicing. Chips are integrated circuits made on wafers using a variety of semiconductor manufacturing processes such as photolithography, etching, and ion implantation. Wafers are the carrier and raw material of chips, and chips are finished products with specific functions obtained after a series of processing of wafers.

[0003] During the production process of wafers, the wafers need to be ground and polished. The grinding head is one of the key components to perform this operation. The grinding head presses the wafer onto the grinding pad or polishing pad through rotation and other movements, and drives the wafer to rotate. At the same time, it cooperates with the grinding liquid or polishing liquid to use mechanical force and chemical action to remove excess material on the surface of the wafer or improve the surface quality of the wafer, so that the wafer reaches the required flatness and roughness.

[0004] During the chip grinding process, the grinding head assembly is connected to the gas to control the adsorption and unloading of the pressure membrane on the wafer, so that the wafer rubs on the grinding pad to achieve the purpose of polishing. When the pressure membrane works in the grinding head assembly, it needs to cooperate with the fastening steel ring. The fastening steel ring is set on the outside of the inflated pressure membrane. The function of the fastening steel ring is to enhance the compressive strength of the side wall of the pressure membrane so that the side wall of the pressure membrane does not deform when it is inflated. During the grinding process, since the pressure membrane constantly adsorbs the wafer and deflates and unloads the wafer after grinding, the side wall of the pressure membrane is constantly in contact with the fastening steel ring.

[0005] The existing technology uses a bare fastening steel ring prepared by traditional technology to be sleeved on the outside of the pressure membrane. During the grinding process, since the fastening steel ring is in direct contact with the external guard metal ring, the outer side of the fastening steel ring will be touched during the grinding process, which will cause the risk of metal debris falling, resulting in the scrapping of the entire wafer and reduced efficiency. This seriously affects the improvement of the quality and efficiency of chip processing. Therefore, a wear-resistant fastening steel ring is needed to improve the quality and efficiency of chip processing. Summary of the invention

[0006] The purpose of the present invention is to provide a wear-resistant rubber-coated fastening steel ring and a preparation method thereof, which is applied to a fastening steel ring with an additional silicone protective layer required for CMP grinding of silicon wafers, and a high-performance silicone-coated fastening steel ring for CMP grinding is prepared by combining the fastening steel ring and silicone as raw materials through a flat plate vulcanization method, and a layer of silicone-coated product is added to the surface of the fastening steel ring, so that when it touches the external protective ring metal ring, the fastening steel ring is physically isolated due to the silicone wrapping, thereby solving the problem of the fastening steel ring being scratched.

[0007] To achieve the above-mentioned purpose, the present invention provides a wear-resistant rubber-coated fastening steel ring, which is a fastening steel ring with an additional silicone protective layer used for CMP grinding of silicon wafers. The fastening steel ring has a diameter of 150~300mm and a thickness of 1.5~4mm, and includes a steel ring body and a silicone protective layer, and the silicone protective layer is coated on the outer surface of the steel ring body.

[0008] Preferably, the longitudinal section of the steel ring body is rectangular, and the surface of the steel ring body is sandblasted.

[0009] Preferably, the sandblasted outer surface of the steel ring body is coated with silicone adhesive.

[0010] Preferably, the bottom of the steel ring body covered by the silicone protective layer is exposed.

[0011] A method for preparing a wear-resistant rubber-coated fastening steel ring comprises the following steps: Step 1, preparation for dust removal of the fastening steel ring: first use 120 mesh corundum to remove stains on the steel ring surface, then use 24 mesh corundum to increase the surface roughness, and finally use 36 mesh corundum to sandblast the surface of the steel ring to a roughness of 6.5>Ra>5.0µm. After sandblasting, use pure water ultrasonic cleaning for 30 minutes to remove stains on the sandblasting layer of the fastening steel ring. After taking it out, blow it clean and bake it in an oven at 80 degrees for 10 minutes to remove moisture; Step 2, surface pretreatment: After the steel ring is cooled, brush a layer of silicone adhesive evenly on the surface of the steel ring and let it stand for 3-5 minutes to dry, then bake it in a 100-degree oven for 20 minutes; Step 3, vacuum hot molding: assemble the mold, the vacuum degree in the vacuum hot press is less than 10 -4 Pa, slowly and evenly heat up to 180°C within 0-18 minutes, open the mold again, measure the mold surface temperature in the 150-160°C range, put the surface pretreated steel ring into the mold, and weigh 120g of silicone into the mold for vacuum hot molding; Step 4, quality inspection: Observe visually whether the rubber material wraps the fastening steel ring completely, and whether there are any leaks. Use an optical magnifying glass to conduct a detailed inspection of the sample. Use a 2D projector to measure the outer diameter of the finished product, and check the inner and outer diameters of the product and the concentricity of the fastening steel ring in the silicone.

[0012] The advantages and beneficial effects of the present invention using the above-mentioned wear-resistant rubber-coated fastening steel ring and its preparation method are: 1. Solve the friction problem between the fastening steel ring and the pressure membrane accessories, and extend the service life of the pressure membrane.

[0013] 2. The rubber-coated fastening steel ring prevents the fastening steel ring from being corroded by the grinding fluid, and its service life is prolonged.

[0014] 3. The metal ring of the external guard ring on the grinding head will touch the fastening steel ring during the grinding process. The rubber coating solution solves the risk of metal debris falling due to scratches on the outer side of the fastening steel ring and the metal ring of the external guard ring.

[0015] 4. Attach a layer of silicone-coated product to the surface of the fastening steel ring so that when it touches the metal ring of the external protective ring, the fastening steel ring is physically isolated due to the silicone wrapping, thus solving the problem of the fastening steel ring being scratched.

[0016] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the fastening steel ring of the present invention; Figure 2 is a schematic cross-sectional view of a fastening steel ring of the present invention; Figure 3 This is a diagram showing the effect of the fastening steel ring and the retaining metal ring of the present invention being used in combination; Figure 4 It is a preparation flow chart of the fastening steel ring of the present invention. Description of Reference Numerals

[0018] 1. Fastening steel ring; 2. Silicone protective layer; 3. Steel ring body; 4. Guard metal ring. DETAILED DESCRIPTION

[0019] The technical solution of the present invention is further described below through the accompanying drawings and embodiments.

[0020] Unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0021] Example 1 like Figure 1 As shown, a wear-resistant rubber-coated fastening steel ring 1 is a fastening steel ring 1 with an additional silicone protective layer 2 used for CMP grinding of silicon wafers. A fastening steel ring 1 with high strength, corrosion resistance and wear resistance for use in silicon carbide CMP process is prepared by combining silicone and metal materials through a silicone vulcanization process. The fastening steel ring 1 can be prepared with a diameter of 150~300mm and a thickness of 1.5~4mm according to the silicon carbide process requirements. The fastening steel ring 1 includes a steel ring body 3 and a silicone protective layer 2, and the silicone protective layer 2 is coated on the outer surface of the steel ring body 3. The longitudinal section of the steel ring body 3 is rectangular, and the surface of the steel ring body 3 is sandblasted. The outer surface of the sandblasted steel ring body 3 is coated with silicone adhesive. The bottom of the steel ring body 3 coated with the silicone protective layer 2 is exposed. As shown Figure 2 As shown, the bottom of the steel ring body 3 is not covered with the silicone protective layer 2.

[0022] A method for preparing a wear-resistant rubber-coated fastening steel ring 1, such as Figure 4 As shown, the following steps are included: Step 1, dust removal preparation for fastening steel ring 1: first use 120 mesh corundum to remove stains on the steel ring surface, then use 24 mesh corundum to increase the surface roughness, and finally use 36 mesh corundum to sandblast the surface of the steel ring to a roughness of 6.5>Ra>5.0µm. After sandblasting, use pure water ultrasonic cleaning for 30 minutes to remove stains on the sandblasting layer of the fastening steel ring 1. After taking it out, blow it clean and bake it in an oven at 80 degrees for 10 minutes to remove moisture; Step 2, surface pretreatment: After the steel ring is cooled, brush a layer of silicone adhesive evenly on the surface of the steel ring and let it stand for 3-5 minutes to dry, then bake it in a 100-degree oven for 20 minutes; Step 3, vacuum hot molding: assemble the mold, the vacuum degree in the vacuum hot press is less than 10-4Pa, slowly and evenly heat up to 180°C within 0-18 minutes, open the mold again, measure the mold surface temperature in the range of 150-160°C, put the surface pretreated steel ring into the mold, and weigh 120 grams of silicone into the mold for vacuum hot molding; Step 4, quality inspection: Observe through visual inspection whether the rubber material wraps the fastening steel ring 1 completely, and whether there are any leaks. Use an optical magnifying glass to conduct a detailed inspection of the sample, and measure the outer diameter of the finished product with a 2D projector to detect the inner and outer diameters of the product and the concentricity of the fastening steel ring 1 in the silicone.

[0023] The prior art adopts a bare fastening steel ring 1 prepared by traditional technology and is sleeved on the outside of the pressure membrane. During the grinding process, since the fastening steel ring 1 is in direct contact with the external guard metal ring 4, the outer side of the fastening steel ring 1 will be touched during the grinding process, and there will be a risk of metal debris falling, resulting in the scrapping of the entire wafer and reduced efficiency. Figure 3 As shown, the present invention adds a layer of silicone-coated product on the surface of the fastening steel ring 1, so that when it touches the external protective ring metal ring 4, the fastening steel ring 1 is physically isolated due to the silicone wrapping, thereby solving the problem of the fastening steel ring 1 being scratched.

[0024] The present invention is a new type of fastening steel ring 1 required for the silicon carbide CMP process, which has the advantages of collision resistance, high strength, corrosion resistance and wear resistance, and is an indispensable and important component of the CMP grinding process. After the surface of the fastening steel ring 1 is treated, a thin silicone layer is added to the surface of the fastening steel ring 1 by a flat vulcanization method under the action of a special silicone adhesive. A high-performance fastening steel ring 1 for CMP grinding is prepared from silicone combined with metal as raw materials, and the thin silicone layer added to the surface can greatly improve the collision resistance and will not scratch the surface of the fastening steel ring 1. Secondly, the fastening steel ring 1 prepared by the present invention also maintains the high wear resistance, high strength and corrosion resistance prepared by the traditional process.

[0025] Therefore, the present invention adopts the above-mentioned wear-resistant rubber-coated fastening steel ring and its preparation method, which are applied to the fastening steel ring with an additional silicone protective layer required for CMP grinding of silicon wafers, and combines the fastening steel ring and silicone as raw materials by the flat plate vulcanization method to prepare a high-performance silicone-coated fastening steel ring for CMP grinding, and adds a layer of silicone-coated product on the surface of the fastening steel ring, so that when it touches the external protective ring metal ring, the fastening steel ring is physically isolated due to the silicone wrapping, thereby solving the problem of the fastening steel ring being scratched.

[0026] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solution of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the present invention.

Claims

1. A wear-resistant rubber-coated fastening steel ring, characterized in that: A fastening steel ring with an additional silicone protective layer used for CMP grinding of silicon wafers comprises a steel ring body and a silicone protective layer. The steel ring body has a diameter of 150-300 mm and a thickness of 1.5-4 mm, and the silicone protective layer is coated on the outer surface of the steel ring body.

2. A wear-resistant rubber-coated fastening steel ring according to claim 1, characterized in that: The longitudinal section of the steel ring body is rectangular, and the surface of the steel ring body is sandblasted.

3. A wear-resistant rubber-coated fastening steel ring according to claim 2, characterized in that: The outer surface of the steel ring body treated with sandblasting is coated with silicone adhesive.

4. The wear-resistant rubber-coated fastening steel ring according to claim 1, characterized in that: The bottom of the steel ring body covered by the silicone protective layer is exposed.

5. A method for preparing a wear-resistant rubber-coated fastening steel ring according to any one of claims 1 to 4, characterized in that: The following steps are involved: Step 1, preparation for dust removal of the fastening steel ring: first use 120 mesh corundum to remove stains on the steel ring surface, then use 24 mesh corundum to increase the surface roughness, and finally use 36 mesh corundum to sandblast the surface of the steel ring to a roughness of 6.5>Ra>5.0µm. After sandblasting, use pure water ultrasonic cleaning for 30 minutes to remove stains on the sandblasting layer of the fastening steel ring. After taking it out, blow it clean and bake it in an oven at 80 degrees for 10 minutes to remove moisture; Step 2, surface pretreatment: After the steel ring is cooled, brush a layer of silicone adhesive evenly on the surface of the steel ring and let it stand for 3-5 minutes to dry, then bake it in a 100-degree oven for 20 minutes; Step 3, vacuum hot molding: assemble the mold, the vacuum degree in the vacuum hot press is less than 10 -4 Pa, slowly and evenly heat up to 180°C within 0-18 minutes, open the mold again, measure the mold surface temperature in the 150-160°C range, put the surface pretreated steel ring into the mold, and weigh 120g of silicone into the mold for vacuum hot molding; Step 4, quality inspection: Observe visually whether the rubber material wraps the fastening steel ring completely, and whether there are any leaks. Use an optical magnifying glass to conduct a detailed inspection of the sample. Use a 2D projector to measure the outer diameter of the finished product, and check the inner and outer diameters of the product and the concentricity of the fastening steel ring in the silicone.

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