A temperature control system and a temperature control method

Abstract

Embodiments of the present application provide a temperature control system and a temperature control method, and relate to the technical field of semiconductor temperature control. The temperature control system comprises a refrigeration system, a cooling load system and a circulation system. The refrigeration system comprises a refrigeration main circuit and a first branch circuit and a second branch circuit connected to the refrigeration main circuit and arranged in parallel. The circulation system comprises a circulation main circuit and a third branch circuit, a fourth branch circuit and a fifth branch circuit connected to the circulation main circuit and arranged in parallel. The first branch circuit exchanges heat with the fifth branch circuit. The second branch circuit exchanges heat with the cooling load system. The cooling load system exchanges heat with the third branch circuit. The fourth branch circuit exchanges heat with the refrigeration main circuit. The circulating liquid of the circulation system can selectively pass through the third branch circuit, the fourth branch circuit or the fifth branch circuit. Valves are arranged on the first branch circuit, the second branch circuit, the third branch circuit, the fourth branch circuit and the fifth branch circuit. The present application can quickly switch temperature, stabilize output liquid supply temperature, reduce equipment energy consumption, improve production efficiency and product quality, and reduce cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor temperature control, in particular to a temperature control system and a temperature control method. BACKGROUND

[0002] In the process of semiconductor manufacturing, temperature control is a crucial link, especially in the process of chip production. In order to ensure the quality and performance of the chip, accurate and stable temperature control is needed to adjust the temperature of the circulating liquid. Because different chip processing technologies have different requirements for the temperature of the circulating liquid, and in the actual production process, the state of the load will also change.

[0003] The existing temperature control system is not sensitive enough when facing load changes, resulting in large temperature fluctuations of the temperature control system, affecting production efficiency and product quality. In addition, the existing temperature control system has high energy consumption when the temperature changes, and the long-term operation cost of the equipment is high. SUMMARY

[0004] The purpose of the present application includes providing a temperature control system and method which can quickly switch the temperature of the circulating liquid in the face of load changes, reduce the energy consumption of the equipment, improve production efficiency and product quality, and reduce costs.

[0005] Embodiments of the present application can be implemented as follows:

[0006] In a first aspect, the present application provides a temperature control system, comprising a refrigeration system, a cooling system and a circulating system, the refrigeration system comprising a refrigeration main circuit and a first branch circuit and a second branch circuit connected to the refrigeration main circuit in parallel, the circulating system comprising a circulating main circuit and a third branch circuit, a fourth branch circuit and a fifth branch circuit connected to the circulating main circuit in parallel, the first branch circuit exchanging heat with the fifth branch circuit through a first evaporator, the second branch circuit exchanging heat with the cooling system through a second evaporator, the cooling system exchanging heat with the third branch circuit through a first heat exchanger, and the fourth branch circuit exchanging heat with the refrigeration main circuit through a first condenser, wherein the circulating liquid of the circulating system can selectively pass through the third branch circuit, the fourth branch circuit or the fifth branch circuit, and valves are provided on the first branch circuit, the second branch circuit, the fifth branch circuit, the third branch circuit and the fourth branch circuit.

[0007] In a second aspect, the present application provides a temperature control method applied to the temperature control system of the preceding embodiments, the method comprising:

[0008] obtaining a second temperature set value SV0 of the second temperature sensor;

[0009] obtaining a second temperature measurement value PV0 of the second temperature sensor in real time;

[0010] calculating a difference X between the second temperature set value SV0 and the second temperature measured value PV0;

[0011] if a≤X<a+A, the opening of the first expansion valve is increased by M%;

[0012] if a+A≤X<a+B, the opening of the first expansion valve is increased by N%;

[0013] if a+B≤X≤b-B, the opening of the first expansion valve is unchanged;

[0014] if b-B<X≤b-A, the opening of the first expansion valve is decreased by M%;

[0015] if b-A<X≤b, the opening of the first expansion valve is decreased by N%;

[0016] if X<a, the opening of the first expansion valve is increased by H%;

[0017] if X>b, the opening of the first expansion valve is decreased by H%; wherein a<0<A<B<b.

[0018] The temperature control system and method provided by the embodiments of the present application have the following advantages:

[0019] The temperature control system of the present application comprises a refrigeration system, a circulation system and a cooling system. The refrigerant of the refrigeration system flows into the first branch and the second branch from the refrigeration main line and then returns to the refrigeration main line. The circulating liquid of the circulation system flows into multiple branches from the circulation main line and then returns to the circulation main line. The cooling system exchanges heat with the second branch and then exchanges heat with one of the branches of the circulation system. The multiple branches of the circulation system can exchange heat with the first branch, the cooling system and the refrigeration main line, respectively. The state of the valve in each branch (including whether to be turned on, to be turned on alternatively, the opening degree, etc.) can be controlled to accurately control the temperature of the circulating liquid in the circulation system, quickly switch the temperature, adapt to the temperature control requirements of the load, and reduce the energy consumption of the equipment. The temperature control system of the present application can quickly switch the temperature, stably output the liquid supply temperature, reduce the energy consumption of the equipment, improve the production efficiency and product quality, and reduce the cost. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0021] Figure 1The structure schematic diagram of the temperature control system provided for the embodiment is shown.

[0022] Icon: 100-temperature control system; 10-refrigeration system; 11-compressor; 111-first temperature sensor; 112-first pressure sensor; 113-third temperature sensor; 114-second pressure sensor; 12-first condenser; 13-second condenser; 14-accumulator; 141-fourth temperature sensor; 15-first expansion valve; 16-first evaporator; 17-second expansion valve; 18-second evaporator; 20-cold carrier system; 21-energy storage tank; 211-first inlet; 212-first outlet; 213-second inlet; 214-second outlet; 22-first electromagnetic valve; 23-first heat exchanger; 30-circulation system; 31-expansion tank; 32-circulation pump; 33-second temperature sensor; 35-load end; 37-second electromagnetic valve; 38-three-way valve; 381-third inlet; 382-third outlet; 383-fourth outlet; 39-third electromagnetic valve; 391-second heat exchanger; 40-cooling water system. DETAILED DESCRIPTION

[0023] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will be combined with the accompanying drawings to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the accompanying drawings can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0025] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0026] In the description of the present application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the present application is used, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the present application.

[0027] In addition, the terms "first", "second", and the like in the description and in the claims are used for distinguishing between similar elements and not necessarily for describing a sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the descriptive terms "first", "second", etc., are to be interpreted, by those skilled in the art, as a structural or positional description and not by their reference

[0028] It should be noted that the features of the embodiments of the present application can be combined if there is no conflict.

[0029] Please refer to Figure 1 The temperature control system 100 provided by the embodiments of the present application comprises a refrigeration system 10, a cooling medium system 20 and a circulation system 30.

[0030] The refrigeration system 10 is used for circulating refrigerant and cooling the refrigerant, so that the cold energy of the refrigerant is transferred to the circulation system 30. The cooling medium system 20 is used for circulating cooling medium, which acts as an intermediate medium to transfer the cold energy of the refrigerant to the circulation system 30. The circulation system 30 is used for circulating circulating liquid, which obtains cold energy from the refrigerant and the cooling medium, and cools the load end 35.

[0031] The refrigeration system 10 comprises a refrigeration main circuit and a first branch circuit and a second branch circuit connected to the refrigeration main circuit and arranged in parallel. The circulation system 30 comprises a circulation main circuit and a third branch circuit, a fourth branch circuit and a fifth branch circuit connected to the circulation main circuit and arranged in parallel. The first branch circuit exchanges heat with the fifth branch circuit through a first evaporator 16. The second branch circuit exchanges heat with the cooling medium system 20 through a second evaporator 18. The cooling medium system 20 exchanges heat with the third branch circuit through a first heat exchanger 23. The fourth branch circuit exchanges heat with the refrigeration main circuit through a first condenser 12. The circulating liquid of the circulation system 30 can pass through the third branch circuit, the fourth branch circuit or the fifth branch circuit selectively. Valves are arranged on the first branch circuit, the second branch circuit, the fifth branch circuit, the third branch circuit and the fourth branch circuit. The mass flow rates of the refrigerant and the circulating liquid can be controlled by adjusting the states of the valves, such as whether to be turned on, to be turned on selectively, the opening degree, etc., so as to control the refrigerating capacity of the temperature control system 100.

[0032] Specifically, the refrigeration system 10 comprises a compressor 11, a first condenser 12, a second condenser 13 and a liquid accumulator 14 arranged in sequence on the refrigeration main circuit, a first expansion valve 15 and a first evaporator 16 arranged on the first branch circuit, and a second expansion valve 17 and a second evaporator 18. The outlet of the compressor 11 on the refrigeration main circuit is in communication with the first side inlet of the first condenser 12. The first side outlet of the first condenser 12 is in communication with the first side inlet of the second condenser 13. The first side outlet of the second condenser 13 is in communication with the inlet of the liquid accumulator 14. The outlet of the liquid accumulator 14 is connected with the first branch circuit and the second branch circuit.

[0033] On the first branch, the first expansion valve 15, the first side of the first evaporator 16, and the inlet of the compressor 11 are sequentially communicated. Specifically, the outlet of the liquid accumulator 14 is communicated with the inlet of the first expansion valve 15. The outlet of the first expansion valve 15 is communicated with the first side inlet of the first evaporator 16. The first side outlet of the first evaporator 16 is communicated with the inlet of the compressor 11.

[0034] On the second branch, the second expansion valve 17, the first side of the second evaporator 18, and the inlet of the compressor 11 are sequentially communicated. Specifically, the outlet of the liquid accumulator 14 is communicated with the inlet of the second expansion valve 17. The outlet of the second expansion valve 17 is communicated with the first side inlet of the second evaporator 18. The first side outlet of the second evaporator 18 is communicated with the inlet of the compressor 11.

[0035] It can be understood that the refrigerant is compressed by the compressor 11 to form high-temperature and high-pressure refrigerant gas, sequentially passes through the first condenser 12 for preliminary condensation, and then enters the second condenser 13 for further condensation into liquid, and is stored in the liquid accumulator 14. After the refrigerant comes out of the liquid accumulator 14, it is divided into two paths. One path is that the refrigerant passes through the first expansion valve 15 into the first evaporator 16 for evaporation and temperature rise. The high-temperature refrigerant vapor comes out of the first evaporator 16 and returns to the compressor 11. The other path is that the refrigerant passes through the second expansion valve 17 into the second evaporator 18 for evaporation and heat absorption to rise in temperature, and the refrigerant vapor comes out of the second evaporator 18 and returns to the compressor 11.

[0036] In this embodiment, the refrigerant is divided into two paths and passes through the first evaporator 16 and the second evaporator 18, respectively. The first evaporator 16 is used for heat exchange with the circulating system 30 to take away the heat of the circulating liquid in the circulating system 30, so that the circulating liquid is cooled. The second evaporator 18 is used for heat exchange with the cold carrier system 20 to take away the heat of the cold carrier in the cold carrier system 20, so that the cold carrier is cooled.

[0037] Further, the inlet of the compressor 11 is provided with a first temperature sensor 111 and a first pressure sensor 112. The first temperature sensor 111 facilitates temperature detection of the refrigerant entering the compressor 11. The first pressure sensor 112 can detect the pressure of the refrigerant entering the compressor 11. According to the physical properties of the refrigerant, the corresponding temperature value at the saturation state can be obtained at this pressure. The corresponding temperature value at the saturation state is compared with the actual measurement value of the first temperature sensor 111, which can ensure that the compressor 11 can still work normally, thereby ensuring the accuracy of temperature control.

[0038] In the embodiment, a third temperature sensor 113 and a second pressure sensor 114 are arranged at the outlet of the compressor 11. It can be understood that the third temperature sensor 113 is used to detect the temperature of the refrigerant discharged by the compressor 11. The second pressure sensor 114 is used to detect the pressure of the refrigerant discharged by the compressor 11, so as to detect the working state of the compressor 11.

[0039] Further, a fourth temperature sensor 141 is arranged at the outlet of the liquid accumulator 14. The fourth temperature sensor 141 is used to detect the temperature of the refrigerant discharged by the liquid accumulator 14.

[0040] Specifically, the cooling system 20 comprises an energy storage tank 21, a first electromagnetic valve 22 and a first heat exchanger 23. The energy storage tank 21 is provided with a first inlet 211, a first outlet 212, a second inlet 213 and a second outlet 214. The second side outlet of the second evaporator 18 is communicated with the first inlet 211. The second side inlet of the second evaporator 18 is communicated with the first outlet 212. The second outlet 214 is communicated with the inlet of the first electromagnetic valve 22. The outlet of the first electromagnetic valve 22 is communicated with the first side inlet of the first heat exchanger 23. The first side outlet of the first heat exchanger 23 is communicated with the second inlet 213.

[0041] It can be understood that the cooling medium in the energy storage tank 21 flows out from the first outlet 212, is cooled in the second side of the second evaporator 18, and then flows back to the energy storage tank 21 from the first inlet 211. The cooled cooling medium in the energy storage tank 21 exchanges heat in the first heat exchanger 23 through the second outlet 214 and the first electromagnetic valve 22, and then flows back to the energy storage tank 21 through the second inlet 213 after being warmed, and circulates in turn.

[0042] The first heat exchanger 23 is used to exchange heat with the circulating system 30. Specifically, the circulating system 30 comprises an expansion tank 31, a circulating pump 32, a second temperature sensor 33 and a load end 35 arranged in sequence on a circulating main line, a second electromagnetic valve 37 arranged on a fifth branch line, and a three-way valve 38 arranged on a third branch line and a fourth branch line. The circulating main line is selectively conducted with the third branch line or the fourth branch line through the three-way valve 38, wherein the three-way valve 38 comprises a third inlet 381, a third outlet 382 and a fourth outlet 383; the outlet of the expansion tank 31 on the circulating main line is communicated with the inlet of the circulating pump 32. The outlet of the circulating pump 32 is communicated with the inlet of the load end 35. The second temperature sensor 33 is arranged at the outlet of the circulating pump 32. The outlet of the load end 35 is communicated with the inlet of the second electromagnetic valve 37 and the third inlet 381 of the three-way valve 38, respectively; the outlet of the second electromagnetic valve 37 on the fifth branch line is communicated with the second side inlet of the first evaporator 16. The second side outlet of the first evaporator 16 is communicated with the inlet of the expansion tank 31.

[0043] The embodiment replaces the water tank of the circulation system 30 with an expansion tank 31, and the liquid filling amount is about 1 / 3 of the water tank, so that the overall capacity is reduced, the energy consumption is reduced, and the reaction speed is fast.

[0044] Further, the third inlet 381 of the three-way valve 38 is communicated with the third outlet 382 on the third branch, the third outlet 382 is communicated with the second side inlet of the first heat exchanger 23, and the second side outlet of the first heat exchanger 23 is communicated with the inlet of the expansion tank 31. The third inlet 381 of the three-way valve 38 is communicated with the fourth outlet 383 on the fourth branch, and the fourth outlet 383 is communicated with the second side inlet of the first condenser 12. The second side outlet of the first condenser 12 is communicated with the inlet of the expansion tank 31.

[0045] It can be understood that in the circulation system 30, the circulating liquid is divided into two paths after being heated by the load end 35. One path is cooled in the first evaporator 16 through the second electromagnetic valve 37, and then returns to the expansion tank 31. After being pressurized by the circulation pump 32, it reaches the load end 35. The other path enters the third inlet 381 of the three-way valve 38 from the load end 35, enters the third outlet 382 of the three-way valve 38, enters the second side of the first heat exchanger 23, and is heated by the load system 20. After being heated, it enters the expansion tank 31, and then sequentially passes through the circulation pump 32 to reach the load end 35. Or, it enters the third inlet 381 of the three-way valve 38, enters the fourth outlet 383 of the three-way valve 38, enters the second side of the first condenser 12, and is heated by the refrigerant of the refrigeration system 10. After being heated, it enters the expansion tank 31, and then sequentially passes through the circulation pump 32 to reach the load end 35.

[0046] The embodiment realizes multiple refrigeration of the circulation system 30, the first condenser 12, the first heat exchanger 23, and the first evaporator 16 by arranging multiple branches in the circulation system 30. By arranging the expansion valve, the electromagnetic valve, or the three-way valve 38 on each branch, the state of each valve (including whether to be turned on, to be turned on alternatively, to be adjusted in opening degree, etc.) is adjusted, so that the temperature of the circulating liquid is adjusted, the temperature can be quickly switched, the output liquid supply temperature is stable, the multiple refrigeration reduces the power of the compressor 11, reduces the energy consumption of the equipment, improves the production efficiency and product quality, and reduces the cost.

[0047] Further, the circulation system 30 further includes a sixth branch connected to the circulation main branch and parallel to the fifth branch. The sixth branch is provided with a second heat exchanger 391 and a third electromagnetic valve 39. Specifically, the outlet of the load end 35 is further communicated with the inlet of the third electromagnetic valve 39. The outlet of the third electromagnetic valve 39 is communicated with the first side inlet of the second heat exchanger 391. The first side outlet of the second heat exchanger 391 is communicated with the inlet of the expansion tank 31.

[0048] It can be understood that the circulating liquid of the circulating system 30 in the embodiment is provided with a sixth branch after being discharged from the load end 35. After being discharged from the load end 35, the circulating liquid enters the second heat exchanger 391 to exchange heat, is cooled after being cooled, enters the expansion tank 31, and then sequentially passes through the circulating pump 32 and returns to the load end 35.

[0049] Specifically, in the embodiment, the first side of the second heat exchanger 391 is connected with the circulating liquid, and the second side of the second heat exchanger 391 is connected with the cooling water system 40. The cooling water is introduced into the second side of the second heat exchanger 391 to take away the temperature of the circulating liquid, so as to cool the circulating liquid.

[0050] In the embodiment, the temperature of multiple positions in the temperature control system 100 is monitored to control the temperature and improve the temperature control accuracy. In addition to the above-mentioned temperature sensor setting positions, one or more temperature sensors or pressure sensors can also be arranged at other positions, which is determined according to actual needs and is not limited herein.

[0051] The temperature control system 100 of the embodiment further comprises a cooling water system 40. The cooling water system 40 is in communication with the second side of the second heat exchanger 391. The cooling water system 40 is also in communication with the second side of the second condenser 13. The cooling water provided by the cooling water system 40 can exchange heat with the refrigerant of the refrigeration system 10 and the circulating liquid of the circulating system 30 respectively, so as to reduce the temperature of the refrigerant and the circulating liquid. At the same time, the heat of the entire temperature control system 100 is taken away to realize heat exchange between the temperature control system 100 and the outside, and improve the heat dissipation efficiency.

[0052] The working principle and process of the temperature control system 100 provided by the embodiment are as follows:

[0053] The refrigerant flow path is as follows: the refrigerant is compressed by the compressor 11 to form high-temperature and high-pressure refrigerant gas, enters the first condenser 12 to be preliminarily condensed, then enters the second condenser 13 to be further condensed into liquid, enters the liquid storage tank 14 for storage, and then is divided into two paths. One path enters the first expansion valve 15 to be throttled and decompressed, enters the first evaporator 16 to be evaporated and refrigerated into refrigerant vapor, and returns to the compressor 11. The other path passes through the second expansion valve 17 to be throttled and decompressed, enters the second evaporator 18 to be evaporated and refrigerated into refrigerant vapor, and returns to the compressor 11.

[0054] The flow path of the secondary refrigerant is as follows: the secondary refrigerant in the energy storage tank 21 enters the second evaporator 18 to exchange heat with the refrigerant and is cooled, then returns to the energy storage tank 21. The secondary refrigerant enters the first heat exchanger 23 from the other side of the energy storage tank 21 to exchange heat, so that the circulating liquid on the second side of the first heat exchanger 23 is cooled, and the secondary refrigerant is warmed and returns to the energy storage tank 21.

[0055] The circulating liquid flow path is as follows: the circulating liquid is divided into four paths after being heated by the load end 35. One path goes out of the load end 35, enters the second electromagnetic valve 37, and then enters the first evaporator 16 to be cooled, and then enters the expansion tank 31. After being pressurized by the circulating pump 32, the circulating liquid reaches the load end 35. The second path goes out of the load end 35, enters the third inlet 381 of the three-way valve 38, and then enters the second side of the first heat exchanger 23 through the third outlet 382. After being heated by the load system 20, the circulating liquid enters the expansion tank 31, and then reaches the load end 35 after being pressurized by the circulating pump 32. The third path goes out of the load end 35, enters the third inlet 381 of the three-way valve 38, and then enters the second side of the first condenser 12 through the fourth outlet 383. After being heated by the refrigerant of the refrigeration system 10, the circulating liquid enters the expansion tank 31, and then reaches the load end 35 after being pressurized by the circulating pump 32. The fourth path goes out of the load end 35, enters the second heat exchanger 391 through the third electromagnetic valve 39, and then enters the expansion tank 31 after being cooled. Subsequently, the circulating liquid reaches the load end after being pressurized by the circulating pump 32.

[0056] The cooling water flow path: the cooling water system 40 in the embodiment includes two cooling water circuits, which are in communication with the second side of the second condenser 13 and the second side of the second heat exchanger 391, respectively.

[0057] The embodiment also provides a temperature control method applied to the temperature control system 100 in the above embodiment. Specifically, the temperature control method includes the following steps.

[0058] The second temperature set value SV0 of the second temperature sensor 33 is obtained.

[0059] The second temperature measured value PV0 of the second temperature sensor 33 is obtained in real time.

[0060] The difference X between the second temperature set value SV0 and the second temperature measured value PV0 is calculated, i.e., X = SV0-PV0.

[0061] If a≤X<a+A, the opening of the first expansion valve 15 is increased by M%.

[0062] If a+A≤X<a+B, the opening of the first expansion valve 15 is increased by N%.

[0063] If a+B≤X≤b-B, the opening of the first expansion valve 15 is unchanged.

[0064] If b-B<X≤b-A, the opening of the first expansion valve 15 is decreased by M%.

[0065] If b-A<X≤b, the opening of the first expansion valve 15 is decreased by N%.

[0066] If X<a, the opening of the first expansion valve 15 is increased by H%.

[0067] If X>b, the opening of the first expansion valve 15 is reduced by H%; wherein a<0<A<B<b.

[0068] Specifically, in the embodiment, a=-1, b=1, A=0.5, B=0.9, M=2, N=1, and H=5, that is:

[0069] If -1X<-0.5, the opening of the first expansion valve 15 is increased by 2%;

[0070] If -0.5X<-0.1, the opening of the first expansion valve 15 is increased by 1%;

[0071] If -0.1X≤0.1, the opening of the first expansion valve 15 is unchanged;

[0072] If 0.1X<0.5, the opening of the first expansion valve 15 is reduced by 1%;

[0073] If 0.5X≤1, the opening of the first expansion valve 15 is reduced by 2%;

[0074] If X<-1, the opening of the first expansion valve 15 is increased by 5%;

[0075] If X>1, the opening of the first expansion valve 15 is reduced by 5%.

[0076] Through the step-by-step adjustment, energy saving and consumption reduction can be achieved, and the accuracy of temperature control can be improved.

[0077] It can be understood that X is the difference between the set temperature value and the measured temperature value. When X is greater than the preset range, for example, when X is greater than 0.1, it indicates that the actual temperature value is low, at this time, by adjusting the opening of the first expansion valve 15, the opening of the first expansion valve 15 is reduced, the refrigerating capacity is reduced, the measured temperature value is increased, and thus the value of X is reduced; when X is less than 0.1, it indicates that the actual temperature value is high, at this time, by adjusting the opening of the first expansion valve 15, the opening of the first expansion valve 15 is increased, the measured temperature value is reduced, and thus the value of X is increased, and finally the value of X is stabilized between ±0.1.

[0078] Further, the opening of the first expansion valve 15 is different when different ranges are set. The greater the opening adjustment value of the first expansion valve 15 is when X deviates from the preset range, that is, ±0.1.

[0079] It should be noted that the opening adjustment value of the first expansion valve 15 refers to the value of the first expansion valve 15 each time. In the embodiment, the opening of the first expansion valve 15 is gradually adjusted, for example, adjusted once after a certain time, which can be 1s.

[0080] Of course, the above values can also be set to other values, which can be determined according to needs and system circuits, and are not limited herein.

[0081] It can be understood that by comparing the actual temperature of the circulating liquid with the preset temperature, the opening degree of the first expansion valve 15 is adjusted, so that the temperature of the circulating liquid is maintained within a certain range of the preset temperature, and precise temperature control is realized.

[0082] Further, the temperature control method of the embodiment further comprises:

[0083] In the case of a≤X≤b, the first temperature measurement value PV1 of the first temperature sensor 111 and the first pressure measurement value PV2 of the first pressure sensor 112 are acquired in real time;

[0084] According to the pressure-enthalpy diagram, the first pressure measurement value PV2 is converted into a saturated state temperature value PV2';

[0085] The difference Y between the saturated state temperature value PV2' and the first temperature measurement value PV1 is calculated, i.e. Y=PV2'-PV1;

[0086] If c≤Y≤d, the opening degree of the first expansion valve 15 is unchanged;

[0087] If e≤Y

[0088] If d

[0089] Specifically, in the embodiment, c=-9, d=-5, e=-15, P=1, and Q=5, i.e.

[0090] If -9≤Y≤-5, the opening degree of the first expansion valve 15 is unchanged;

[0091] If -15≤Y

[0092] If -5

[0093] The temperature control method of the embodiment further comprises:

[0094] If X

[0095] If a≤X≤b, the speed of the compressor 11 is unchanged;

[0096] If b

[0097] Further, the temperature control method of the embodiment further comprises:

[0098] When the second temperature set value SV0 is greater than the second temperature measured value PV0, i.e., X>0, the third inlet 381 is connected to the fourth outlet 383;

[0099] The opening degree of the second expansion valve 17 is controlled according to the PID control program until SV0-1=PV0, and the opening degree of the second expansion valve 17 is adjusted according to the value of Y;

[0100] If c≤Y≤d, the opening degree of the second expansion valve 17 is unchanged;

[0101] If e≤Y

[0102] If d

[0103] Specifically, if -9≤Y≤-5, the opening degree of the second expansion valve 17 is unchanged;

[0104] If -15≤Y

[0105] If -5

[0106] The temperature control method of the embodiment further comprises:

[0107] When -10℃<SV0<30℃, the third inlet 381 is connected to the third outlet 382, and the opening degree of the first electromagnetic valve 22 is controlled by calling the PID control program;

[0108] Until SV0-1=PV0, the output value of the first electromagnetic valve 22 is reduced to the current 50% to keep running.

[0109] The temperature control method of the embodiment further comprises:

[0110] When SV0≥30℃, the opening degree of the third electromagnetic valve 39 is controlled by calling the PID control program;

[0111] Until SV0-1=PV0, the output value of the third electromagnetic valve 39 is reduced to the current 50% to keep running.

[0112] The temperature control system 100 and the temperature control method provided by the embodiment of the application have the following beneficial effects:

[0113] The temperature control system 100 of the present application comprises a refrigeration system 10, a circulation system 30 and a cooling medium system 20. The refrigerant of the refrigeration system 10 flows into the first branch and the second branch from the refrigeration main line respectively and then flows back to the refrigeration main line. The circulating liquid of the circulation system 30 flows into multiple branches from the circulation main line respectively and then flows back to the circulation main line. The cooling medium system 20 exchanges heat with the second branch and then exchanges heat with one of the branches of the circulation system 30 as an intermediate medium. The multiple branches of the circulation system 30 can exchange heat with the first branch, the cooling medium system 20 and the refrigeration main line respectively. By controlling the state of the valves on each branch (including whether to be turned on, to be turned on alternatively, opening degree, etc.), the temperature of the circulating liquid in the circulation system 30 can be precisely controlled. The temperature can be quickly switched to adapt to the temperature control requirements of the load. At the same time, the energy consumption of the equipment can be reduced. The temperature control system 100 of the present application can quickly switch the temperature, stably output the liquid supply temperature, reduce the energy consumption of the equipment, improve the production efficiency and product quality, and reduce the cost.

[0114] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any changes or replacements within the technical range disclosed by the present application can be easily thought of by those skilled in the art, which should be covered within the protection scope of the present application.

Claims

1. A temperature control system (100), characterized by, The application relates to a refrigeration system (10), a cooling system (20) and a circulation system (30), wherein the refrigeration system (10) comprises a refrigeration main circuit and parallelly arranged first and second branch circuits connected to the refrigeration main circuit; the circulation system (30) comprises a circulation main circuit and parallelly arranged third, fourth and fifth branch circuits connected to the circulation main circuit; the first branch circuit exchanges heat with the fifth branch circuit through a first evaporator (16); the second branch circuit exchanges heat with the cooling system (20) through a second evaporator (18); the cooling system (20) exchanges heat with the third branch circuit through a first heat exchanger (23); the fourth branch circuit exchanges heat with the refrigeration main circuit through a first condenser (12); the circulation liquid of the circulation system (30) can selectively pass through the third, fourth or fifth branch circuit; and valves are arranged on the first, second, third, fourth and fifth branch circuits. The refrigeration system (10) comprises a compressor (11), the first condenser (12), a second condenser (13) and a liquid accumulator (14) arranged on the refrigeration main circuit in sequence; a first expansion valve (15) and the first evaporator (16) arranged on the first branch circuit; and a second expansion valve (17) and the second evaporator (18) arranged on the second branch circuit; the outlet of the compressor (11) on the refrigeration main circuit is communicated with the first side inlet of the first condenser (12); the first side outlet of the first condenser (12) is communicated with the first side inlet of the second condenser (13); the first side outlet of the second condenser (13) is communicated with the inlet of the liquid accumulator (14); the outlet of the liquid accumulator (14) is connected with the first and second branch circuits; the first expansion valve (15), the first side of the first evaporator (16) and the inlet of the compressor (11) on the first branch circuit are communicated in sequence; the second expansion valve (17), the first side of the second evaporator (18) and the inlet of the compressor (11) on the second branch circuit are communicated in sequence. The cooling system (20) comprises an energy storage tank (21), a first electromagnetic valve (22) and the first heat exchanger (23); the energy storage tank (21) is provided with a first inlet (211), a first outlet (212), a second inlet (213) and a second outlet (214); the second side outlet of the second evaporator (18) is communicated with the first inlet (211); the second side inlet of the second evaporator (18) is communicated with the first outlet (212); the second outlet (214) is communicated with the inlet of the first electromagnetic valve (22); the outlet of the first electromagnetic valve (22) is communicated with the first side inlet of the first heat exchanger (23); and the first side outlet of the first heat exchanger (23) is communicated with the second inlet (213). The circulating system (30) comprises an expansion tank (31), a circulating pump (32), a second temperature sensor (33) and a load end (35) arranged on the circulating main line in sequence, a second electromagnetic valve (37) arranged on the fifth branch line, a three-way valve (38) arranged on the third branch line and the fourth branch line, and the circulating main line is selectively connected with the third branch line or the fourth branch line through the three-way valve (38), wherein the three-way valve (38) comprises a third inlet (381), a third outlet (382) and a fourth outlet (383); the outlet of the expansion tank (31) on the circulating main line is communicated with the inlet of the circulating pump (32), the outlet of the circulating pump (32) is communicated with the inlet of the load end (35), the second temperature sensor (33) is arranged at the outlet of the circulating pump (32), and the outlet of the load end (35) is communicated with the inlet of the second electromagnetic valve (37) and the third inlet (381) of the three-way valve (38) respectively; the outlet of the second electromagnetic valve (37) on the fifth branch line is communicated with the second side inlet of the first evaporator (16), and the second side outlet of the first evaporator (16) is communicated with the inlet of the expansion tank (31); the third inlet (381) of the three-way valve (38) on the third branch line is communicated with the third outlet (382), the third outlet (382) is communicated with the second side inlet of the first heat exchanger (23), the second side outlet of the first heat exchanger (23) is communicated with the inlet of the expansion tank (31), the third inlet (381) of the three-way valve (38) on the fourth branch line is communicated with the fourth outlet (383), the fourth outlet (383) is communicated with the second side inlet of the first condenser (12), and the second side outlet of the first condenser (12) is communicated with the inlet of the expansion tank (31).

2. The temperature control system (100) according to claim 1, characterized in that The circulating system (30) further comprises a sixth branch line connected to the circulating main line and connected in parallel with the fifth branch line, and a second heat exchanger (391) and a third electromagnetic valve (39) are arranged on the sixth branch line, the outlet of the load end (35) is communicated with the inlet of the third electromagnetic valve (39), the outlet of the third electromagnetic valve (39) is communicated with the first side inlet of the second heat exchanger (391), and the first side outlet of the second heat exchanger (391) is communicated with the inlet of the expansion tank (31).

3. The temperature control system (100) of claim 1, wherein, A first temperature sensor (111) and a first pressure sensor (112) are arranged at the inlet of the compressor (11).

4. The temperature control system (100) of claim 1, wherein, A third temperature sensor (113) and a second pressure sensor (114) are further arranged at the outlet of the compressor (11).

5. The temperature control system (100) of claim 1, wherein, A fourth temperature sensor (141) is further arranged at the outlet of the liquid accumulator (14).

6. A temperature control method characterized by, The method is applied to the temperature control system (100) of claim 3, and the method comprises the following steps: A second temperature setting value of the second temperature sensor (33) is obtained as SV0; acquiring a second temperature measurement value PV0 of the second temperature sensor (33) in real time; calculating a difference value X between the second temperature set value SV0 and the second temperature measurement value PV0; if a≤X<a+A, increasing the opening of the first expansion valve (15) by M%; if a+A≤X<a+B, increasing the opening of the first expansion valve (15) by N%; if a+B≤X≤b-B, keeping the opening of the first expansion valve (15) unchanged; if b-B<X≤b-A, decreasing the opening of the first expansion valve (15) by M%; if b-A<X≤b, decreasing the opening of the first expansion valve (15) by N%; if X<a, increasing the opening of the first expansion valve (15) by H%; if X>b, decreasing the opening of the first expansion valve (15) by H%; wherein a<0<A<B<b.

7. The temperature control method of claim 6, wherein, In the case of a≤X≤b, the method further comprises: acquiring a first temperature measurement value PV1 of the first temperature sensor (111) and a first pressure measurement value PV2 of the first pressure sensor (112) in real time; converting the first pressure measurement value PV2 into a saturated state temperature value PV2' according to a pressure-enthalpy diagram; calculating a difference value Y between the saturated state temperature value PV2' and the first temperature measurement value PV1; if c≤Y≤d, keeping the opening of the first expansion valve (15) unchanged; if e≤Y<c, increasing the opening of the first expansion valve (15) by P%; if d<Y≤0, decreasing the opening of the first expansion valve (15) by Q%.

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