Hemispherical harmonic oscillator precision trimming device and method based on femtosecond laser

Abstract

The invention provides a femtosecond laser-based hemispherical harmonic oscillator precision trimming device and method. The femtosecond laser-based hemispherical harmonic oscillator precision trimming device comprises a vacuum system, a femtosecond laser trimming system, a clamp, a workpiece movement system and a mass imbalance test system, the femtosecond laser trimming system comprises a focusing module, a laser light path, a femtosecond laser, a femtosecond laser energy continuous regulation and control module and a femtosecond laser patterning and control system; the workpiece movement system comprises a workpiece autorotation mechanism and a workpiece translation mechanism; the workpiece autorotation mechanism is used for realizing autorotation movement of the clamp and the hemispherical harmonic oscillator; the workpiece translation mechanism is connected with the workpiece autorotation mechanism and is used for realizing three-direction translation motion of the hemispherical harmonic oscillator and the workpiece autorotation mechanism; the mass imbalance test system comprises a harmonic oscillator excitation module and a test module. The harmonic oscillator excitation module is used for exciting the hemispherical harmonic oscillator; and the test module is used for detecting the vibration of the excited hemispherical harmonic oscillator. According to the invention, the influence on the stability of the standing wave of the harmonic oscillator and the precision of the gyroscope caused by an overhaul pit is effectively reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of hemispherical resonator gyroscopes, and in particular relates to a femtosecond laser-based hemispherical resonator precision adjustment device and method. Background Art

[0002] The hemispherical resonator gyroscope is a vibrating gyroscope that utilizes the precession effect of the lip vibration standing wave of the hemispherical resonator to rotate the sensitive base. It has the advantages of high precision, long life, small size and simple structure. It has broad application prospects in both military and civilian fields and has become a hot spot in the research and application of inertial technology.

[0003] The realization of a high-precision rate-integrating hemispherical resonator gyroscope requires that the hemispherical resonator have a highly uniform circumferential mass distribution. In fact, factors such as insufficient processing accuracy or uneven material density during the molding process can cause the resonator to have mass imbalance, seriously affecting the accuracy and reliability of the gyroscope, so it needs to be leveled.

[0004] The current leveling method is achieved through mass removal. Common mass removal methods include chemical etching, picosecond laser, ion beam etching and femtosecond laser. Chemical etching is mainly immersion-based. Due to the instability of chemical solutions, there are problems such as a large deweighting range and low leveling accuracy. Picosecond laser has high laser energy, low removal resolution, and a large impact on the performance parameters of the resonator. Ion beam etching has low efficiency and accumulated thermal effects when leveling large unbalanced masses. Femtosecond laser has the advantages of low thermal effect, high precision, and high efficiency, and has become a hot spot in the current rapid adjustment research.

[0005] At present, femtosecond laser trimming adopts point (or small surface scanning) mass removal method. After completing the unbalanced mass trimming of each harmonic, there are inevitably laser trimming pits of various sizes and types in the circumference of the resonator. When there is a large unbalanced mass, it is necessary to scan the same area multiple times, and the depth of the trimming pit is relatively large. In addition, when the depth exceeds a certain level, the trimming amount will have a great impact on the stability of the resonator standing wave and the gyroscope accuracy. Therefore, the existing technology needs to be improved and further optimized. Summary of the invention

[0006] The present invention aims to solve at least one of the technical problems existing in the prior art.

[0007] According to one aspect of the present invention, a femtosecond laser-based hemispherical resonator precision adjustment device is provided, and the femtosecond laser-based hemispherical resonator precision adjustment device comprises: a vacuum system, a femtosecond laser adjustment system, a fixture, a workpiece motion system and a mass imbalance test system; the vacuum system is used to provide a vacuum environment for the test of the hemispherical resonator; the femtosecond laser adjustment system comprises an automatic focusing module, a laser optical path, a femtosecond laser, a femtosecond laser energy continuous control module and a femtosecond laser graphics and control system; the femtosecond laser is used to generate a femtosecond laser; the femtosecond laser energy continuous control module is connected to the femtosecond laser for adjusting the output energy of the femtosecond laser; the laser optical path is connected to the femtosecond laser for adjusting the femtosecond laser and transmitting it to the automatic focusing module; the automatic focusing module is used to adjust the femtosecond laser in the hemispherical resonator The focal length of the surface; the femtosecond laser graphics and control system is connected to the femtosecond laser energy continuous control module, which is used to draw laser processing graphics and set scanning parameters, and control the femtosecond laser processing of the hemispherical resonator; the fixture is placed in the vacuum system to fix the hemispherical resonator; the workpiece motion system is arranged in the vacuum system, including a workpiece rotation mechanism and a workpiece translation mechanism, the fixture is arranged on the workpiece rotation mechanism, and the workpiece rotation mechanism is used to realize the rotation movement of the fixture and the hemispherical resonator; the workpiece translation mechanism is connected to the workpiece rotation mechanism to realize the three-directional translation movement of the hemispherical resonator and the workpiece rotation mechanism; the mass imbalance test system includes a resonator excitation module and a test module; the resonator excitation module is arranged in the vacuum system to excite the hemispherical resonator; the test module is used to detect the vibration of the excited hemispherical resonator.

[0008] Furthermore, the vacuum system includes a vacuum chamber, a compound vacuum gauge and a dry pump-molecular pump combination pump group system, the dry pump-molecular pump combination pump group system is used to draw the vacuum degree in the vacuum chamber to a set vacuum degree, and the compound vacuum gauge is used to detect the vacuum degree in the vacuum chamber.

[0009] Furthermore, the excitation method of the resonator excitation module includes hammering, piezoelectricity, ultrasound, interdigital electrodes or capacitance.

[0010] Furthermore, the femtosecond laser-based hemispherical resonator precision tuning device also includes a vibration isolation platform, and the vacuum system, femtosecond laser tuning system, fixture, workpiece motion system and mass imbalance testing system are all located on the vibration isolation platform.

[0011] According to another aspect of the present invention, a femtosecond laser-based hemispherical resonator precision adjustment method is provided, and the method uses the femtosecond laser-based hemispherical resonator precision adjustment device as described above to achieve precision adjustment of the hemispherical resonator.

[0012] Furthermore, the femtosecond laser-based hemispherical resonator precision tuning method includes:

[0013] S1. Install the hemispherical resonator to be tested and adjusted on the fixture, and control the vacuum system to a preset vacuum degree;

[0014] S2. Obtain the mass parameters and angle parameters of the unbalanced mass of the hemispherical resonator through the mass unbalance test system, and calculate the circumferential laser energy adjustment parameters of the resonator;

[0015] S3, start the femtosecond laser, adjust the laser optical path, set the laser energy according to the circumferential laser energy adjustment parameters of the resonator, and realize the rapid and continuous adjustment and control of the femtosecond laser output energy through the femtosecond laser energy continuous control module; realize the rotation of the resonator by controlling the workpiece rotation mechanism, and the resonator rotation angle and the laser energy parameter correspond one to one to ensure the synchronization of the angle; adjust the focal length of the resonator surface through the automatic focusing module and the workpiece translation mechanism, and continuously adjust the hemispherical resonator circumferentially through the femtosecond laser graphics and control system;

[0016] S4. Repeat S2-S3 until the quality parameters of the unbalanced mass obtained meet the adjustment requirements.

[0017] Furthermore, step S2 specifically includes:

[0018] S21, exciting the resonator to reach a preset amplitude through the resonator excitation module, and obtaining the mass parameter and angle parameter of the unbalanced mass of the hemispherical resonator through the test module;

[0019] S22. According to Calculate the laser energy parameters used for circumferential tuning of the resonator, where: The angle of the lip edge of the hemispherical resonator is The laser energy parameters are is the angle of the lip of the hemispherical resonator, T0 is the laser energy regulation cycle; k is the set speed of the workpiece rotation mechanism; m i is the quality parameter of the i-th harmonic unbalance quality, is the angle parameter of the i-th harmonic unbalance quality; l is the coefficient between the laser energy and the de-weighting quality.

[0020] By applying the technical solution of the present invention, a femtosecond laser-based hemispherical resonator precision adjustment device and method are provided. The femtosecond laser-based hemispherical resonator precision adjustment device of the present invention can realize rapid adjustment of laser energy through a femtosecond laser energy continuous high-speed control module, and realize circumferential harmonic adjustment of the resonator through the rotation of the workpiece, thereby effectively reducing the influence of large adjustment pits on the stability of the resonator standing wave and the gyroscope accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The included drawings are used to provide a further understanding of the embodiments of the present invention, which constitute a part of the specification, are used to illustrate the embodiments of the present invention, and together with the text description, explain the principles of the present invention. Obviously, the drawings in the following description are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0022] Figure 1 A schematic structural diagram of a femtosecond laser-based hemispherical resonator precision adjustment device provided according to a specific embodiment of the present invention is shown.

[0023] The above drawings include the following reference numerals:

[0024] 1. Vacuum chamber; 2. Compound vacuum gauge; 3. Dry pump-molecular pump combination pump system; 4. Automatic focusing module; 5. Laser optical path; 6. Femtosecond laser; 7. Femtosecond laser energy continuous regulation module; 8. Femtosecond laser graphics and control system; 9. Fixture; 10. Hemispherical resonator; 11. Workpiece rotation mechanism; 12. Workpiece translation mechanism; 13. Resonator excitation module; 14. Test module; 15. Vibration isolation platform. DETAILED DESCRIPTION

[0025] It should be noted that, in the absence of conflict, the embodiments in this application and the features in the embodiments can be combined with each other. The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0027] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to actual proportional relationships. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values.

[0028] like Figure 1 As shown, according to a specific embodiment of the present invention, a femtosecond laser-based hemispherical resonator precision adjustment device is provided, the device comprising: a vacuum system, a femtosecond laser adjustment system, a fixture 9, a workpiece motion system and a mass imbalance test system;

[0029] The vacuum system is used to provide a vacuum environment for testing the hemispherical resonator;

[0030] The femtosecond laser adjustment system comprises an automatic focusing module 4, a laser optical path 5, a femtosecond laser 6, a femtosecond laser energy continuous control module 7 and a femtosecond laser graphics and control system 8; the femtosecond laser 6 is used to generate a femtosecond laser; the femtosecond laser energy continuous control module 7 is connected to the femtosecond laser 6 and is used to adjust the femtosecond laser output energy; the laser optical path 5 is connected to the femtosecond laser 6 and is used to adjust the femtosecond laser and transmit it to the automatic focusing module 4; the automatic focusing module 4 is used to adjust the focal length of the femtosecond laser on the surface of the hemispherical resonator; the femtosecond laser graphics and control system 8 is connected to the femtosecond laser energy continuous control module 7 and is used to draw laser processing graphics and set scanning parameters to control the femtosecond laser to process the hemispherical resonator;

[0031] The fixture 9 is placed in the vacuum system and is used to fix the hemispherical resonator 10;

[0032] The workpiece motion system is arranged in the vacuum system, and includes a workpiece rotation mechanism 11 and a workpiece translation mechanism 12. The fixture 9 is arranged on the workpiece rotation mechanism 11, and the workpiece rotation mechanism 11 is used to realize the rotation motion of the fixture 9 and the hemispherical resonator 10; the workpiece translation mechanism 12 is connected to the workpiece rotation mechanism 11, and is used to realize the three-directional translation motion of the hemispherical resonator 10 and the workpiece rotation mechanism 11;

[0033] The mass imbalance test system comprises a resonator excitation module 13 and a test module 14 ; the resonator excitation module 13 is arranged in a vacuum system and is used to excite the hemispherical resonator 10 ; the test module 14 is used to detect the vibration of the excited hemispherical resonator 10 .

[0034] By applying this configuration, a femtosecond laser-based hemispherical resonator precision adjustment device is provided. The device can achieve rapid adjustment of laser energy through a femtosecond laser energy continuous high-speed control module, and achieve circumferential harmonic adjustment of the resonator through the rotation of the workpiece, effectively reducing the influence of large adjustment pits on the stability of the resonator standing wave and the gyroscope accuracy.

[0035] Furthermore, in the present invention, the configurable vacuum system includes a vacuum chamber 1, a compound vacuum gauge 2 and a dry pump-molecular pump combination pump group system 3, wherein the dry pump-molecular pump combination pump group system 3 is used to draw the vacuum degree in the vacuum chamber to a set vacuum degree, and the compound vacuum gauge 2 is used to detect the vacuum degree in the vacuum chamber 1.

[0036] As a specific embodiment of the present invention, the configurable laser optical path 5 includes a control switch, a reflector, an optical path parameter adjustment module, a galvanometer scanning module, etc., and the connection of each component can be conventionally set.

[0037] As a specific embodiment of the present invention, the configurable workpiece translation mechanism 12 includes X-axis, Y-axis and Z-axis translation structures.

[0038] As a specific embodiment of the present invention, the excitation mode of the resonator excitation module 13 includes hammering, piezoelectricity, ultrasound, interdigital electrodes or capacitance, etc.

[0039] Furthermore, in the present invention, the femtosecond laser-based hemispherical resonator precision tuning device also includes a vibration isolation platform 15, and the vacuum system, femtosecond laser tuning system, fixture 9, workpiece motion system and mass imbalance test system are all located on the vibration isolation platform 15, which helps to isolate external vibrations so that the system can always be in a stable and excellent working state.

[0040] According to another aspect of the present invention, a method for fine tuning a hemispherical resonator based on femtosecond laser is provided, wherein the method uses the above-mentioned device for fine tuning a hemispherical resonator based on femtosecond laser to achieve fine tuning of the hemispherical resonator. Specifically, the method comprises:

[0041] S1, install the hemispherical resonator to be tested and adjusted on the fixture 9, and control the vacuum system to a preset vacuum degree;

[0042] S2. Obtain the mass parameters and angle parameters of the unbalanced mass of the hemispherical resonator through the mass unbalance test system, and calculate the circumferential laser energy adjustment parameters of the resonator;

[0043] S3, start the femtosecond laser 6, adjust the laser optical path 5, set the laser energy according to the circumferential laser energy adjustment parameter of the resonator, and realize the rapid and continuous adjustment and control of the femtosecond laser output energy through the femtosecond laser energy continuous control module 7; realize the rotation of the resonator by controlling the workpiece rotation mechanism 11, and the rotation angle of the resonator corresponds to the laser energy parameter one by one to ensure the synchronization of the angle; realize the focal length adjustment of the resonator surface by the automatic focusing module 4 and the workpiece translation mechanism 12, and realize the continuous circumferential adjustment of the hemispherical resonator by the femtosecond laser graphics and control system 8;

[0044] S4. Repeat S2-S3 until the quality parameters of the unbalanced mass obtained meet the adjustment requirements.

[0045] Furthermore, in the present invention, step S2 specifically includes:

[0046] S21, exciting the resonator to reach a preset amplitude through the resonator excitation module 13, and testing the mass parameter and angle parameter of the unbalanced mass of the hemispherical resonator through the testing module 14;

[0047] S22. According to Calculate the laser energy parameters used for circumferential tuning of the resonator, where: The angle of the lip edge of the hemispherical resonator is The laser energy parameters are is the angle of the lip of the hemispherical resonator, T0 is the laser energy regulation cycle; k is the set speed of the workpiece rotation mechanism; m i is the quality parameter of the i-th harmonic unbalance quality, is the angle parameter of the i-th harmonic unbalance quality; l is the coefficient between the laser energy and the de-weighting quality.

[0048] In order to further understand the present invention, the following Figure 1 The femtosecond laser-based hemispherical resonator precision adjustment device of the present invention is described in detail.

[0049] like Figure 1 As shown, according to a specific embodiment of the present invention, a femtosecond laser-based hemispherical resonator precision tuning device is provided, including: a vacuum system, a femtosecond laser tuning system, a fixture 9, a workpiece motion system, a mass imbalance testing system and a vibration isolation platform 15.

[0050] The vacuum system comprises a vacuum chamber 1, a compound vacuum gauge 2 and a dry pump-molecular pump combination pump system 3. The dry pump-molecular pump combination pump system 3 is used to draw the vacuum degree in the vacuum chamber to a set vacuum degree, and the compound vacuum gauge 2 is used to detect the vacuum degree in the vacuum chamber 1.

[0051] The femtosecond laser adjustment system comprises an automatic focusing module 4, a laser optical path 5, a femtosecond laser 6, a femtosecond laser energy continuous high-speed control module 7, and a femtosecond laser graphics and control system 8. The femtosecond laser 6 is used to generate a femtosecond laser; the laser optical path 5 comprises a control switch, a reflector, an optical path parameter adjustment module, a galvanometer scanning module, etc., which are used to adjust the processing laser; the workpiece translation mechanism 12 coordinated with the automatic focusing module 4 realizes the focal length adjustment of the surface of the hemispherical resonator to be tested and adjusted; the femtosecond laser energy continuous high-speed control module 4 is used to realize the rapid and continuous adjustment and control of the femtosecond laser output energy; the femtosecond laser graphics and control system 8 is used to draw the laser processing graphics and set the parameters such as the scanning speed, the scanning path and the number of cycles, so as to control the femtosecond laser processing of the hemispherical resonator.

[0052] The fixture 9 is arranged inside the vacuum chamber, and the hemispherical resonator 10 to be tested and adjusted is fixedly arranged on the fixture.

[0053] The workpiece motion system is arranged inside the vacuum chamber 1, and includes a workpiece rotation mechanism 11 and a workpiece translation mechanism 12. The fixture 9 is arranged on the workpiece rotation mechanism 11. The workpiece rotation mechanism 11 is used to realize the rotation movement of the fixture 9 and the hemispherical resonator 10. The workpiece translation mechanism 12 is connected to the workpiece rotation mechanism 11, and is used to realize the three-directional translation movement of the hemispherical resonator 10 and the workpiece rotation mechanism 11.

[0054] The mass imbalance test system includes a resonator excitation module 13 and a test module 14. The resonator excitation module 13 is arranged in the vacuum chamber 1, and is used to excite the hemispherical resonator 10 to be tested and adjusted, including excitation methods such as hammering, piezoelectric, ultrasonic, interdigital electrode, and capacitance; the test module 14 is used to detect the vibration of the excited hemispherical resonator 10 to obtain the mass parameters and angle parameters of the unbalanced mass of the hemispherical resonator.

[0055] All components are placed on a vibration isolation platform 15, which helps to isolate external vibrations so that the system can always be in a stable and excellent working state.

[0056] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0057] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A femtosecond laser-based hemispherical resonator precision adjustment device, characterized in that: The femtosecond laser-based hemispherical resonator precision adjustment device comprises: a vacuum system, a femtosecond laser adjustment system, a fixture (9), a workpiece motion system and a mass imbalance test system; The vacuum system is used to provide a vacuum environment for testing the hemispherical resonator; The femtosecond laser adjustment system comprises an automatic focusing module (4), a laser optical path (5), a femtosecond laser (6), a femtosecond laser energy continuous control module (7) and a femtosecond laser graphics and control system (8); the femtosecond laser (6) is used to generate a femtosecond laser; the femtosecond laser energy continuous control module (7) is connected to the femtosecond laser (6) and is used to adjust the output energy of the femtosecond laser; the laser optical path (5) is connected to the femtosecond laser (6) and is used to adjust the femtosecond laser and transmit it to the automatic focusing module (4); the automatic focusing module (4) is used to adjust the focal length of the femtosecond laser on the surface of the hemispherical resonator; the femtosecond laser graphics and control system (8) is connected to the femtosecond laser energy continuous control module (7) and is used to draw a laser processing pattern and set scanning parameters to control the femtosecond laser to process the hemispherical resonator; The fixture (9) is placed in the vacuum system and is used to fix the hemispherical resonator (10); The workpiece motion system is arranged in the vacuum system, and comprises a workpiece rotation mechanism (11) and a workpiece translation mechanism (12); the fixture (9) is arranged on the workpiece rotation mechanism (11); the workpiece rotation mechanism (11) is used to realize the rotation movement of the fixture (9) and the hemispherical resonator (10); the workpiece translation mechanism (12) is connected to the workpiece rotation mechanism (11) and is used to realize the three-directional translation movement of the hemispherical resonator (10) and the workpiece rotation mechanism (11); The mass imbalance test system comprises a resonator excitation module (13) and a test module (14); the resonator excitation module (13) is arranged in the vacuum system and is used to excite a hemispherical resonator (10); and the test module (14) is used to detect the vibration of the excited hemispherical resonator (10).

2. The femtosecond laser-based hemispherical resonator precision adjustment device according to claim 1, characterized in that: The vacuum system comprises a vacuum chamber (1), a compound vacuum gauge (2) and a dry pump-molecular pump combination pump system (3); the dry pump-molecular pump combination pump system (3) is used to evacuate the vacuum degree in the vacuum chamber to a set vacuum degree, and the compound vacuum gauge (2) is used to detect the vacuum degree in the vacuum chamber (1).

3. The femtosecond laser-based hemispherical resonator precision adjustment device according to claim 1, characterized in that: The excitation method of the resonator excitation module (13) includes hammering, piezoelectricity, ultrasound, interdigital electrodes or capacitance.

4. The femtosecond laser-based hemispherical resonator precision adjustment device according to claim 1, characterized in that: The femtosecond laser-based hemispherical resonator precision adjustment device also includes a vibration isolation platform (15), and the vacuum system, the femtosecond laser adjustment system, the fixture (9), the workpiece motion system and the mass imbalance test system are all located on the vibration isolation platform (15).

5. A femtosecond laser based hemispherical resonator precision adjustment method, characterized in that: The method uses the femtosecond laser-based hemispherical resonator precision adjustment device as described in claims 1 to 4 to achieve precision adjustment of the hemispherical resonator.

6. The femtosecond laser-based hemispherical resonator precision adjustment method according to claim 5, characterized in that: The femtosecond laser-based hemispherical resonator precision adjustment method comprises: S1, installing the hemispherical resonator to be tested and adjusted on the fixture (9), and controlling the vacuum system to a preset vacuum degree; S2. Obtain the mass parameters and angle parameters of the unbalanced mass of the hemispherical resonator through the mass unbalance test system, and calculate the circumferential laser energy adjustment parameters of the resonator; S3, start the femtosecond laser (6), adjust the laser optical path (5), set the laser energy according to the circumferential laser energy adjustment parameter of the resonator, and realize the rapid and continuous adjustment and control of the femtosecond laser output energy through the femtosecond laser energy continuous control module (7); realize the self-rotation of the resonator by controlling the workpiece rotation mechanism (11), and the self-rotation angle of the resonator corresponds to the laser energy parameter one by one to ensure the synchronization of the angle; adjust the focal length of the resonator surface through the automatic focusing module (4) and the workpiece translation mechanism (12), and continuously adjust the circumference of the hemispherical resonator through the femtosecond laser graphics and control system (8); S4. Repeat S2-S3 until the quality parameters of the unbalanced mass obtained meet the adjustment requirements.

7. The femtosecond laser-based hemispherical resonator precision adjustment method according to claim 6, characterized in that: Step S2 specifically includes: S21, exciting the resonator to reach a preset amplitude through the resonator excitation module (13), and obtaining the mass parameter and angle parameter of the unbalanced mass of the hemispherical resonator through the test module (14); S22, according to Calculate the laser energy parameters used for circumferential tuning of the resonator, where: The angle of the lip edge of the hemispherical resonator is The laser energy parameters are is the angle of the lip of the hemispherical resonator, T0 is the laser energy regulation cycle; k is the set speed of the workpiece rotation mechanism; m i is the quality parameter of the i-th harmonic unbalance quality, is the angle parameter of the i-th harmonic unbalance quality; l is the coefficient between the laser energy and the de-weighting quality.

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