Correction sensor control system and control method

Abstract

This application provides a polarization correction sensor control system and control method, wherein the control system includes a transmitting module, a receiving module, and a relay module; the transmitting module is used to transmit optical pulse signals; the receiving module is provided with a receiving unit for receiving optical pulse signals, a first main control unit for converting optical pulse signals into data information, and a first communication unit for transmitting data information to the relay module; the relay module is provided with a laser driving unit for driving the transmitting module to transmit optical pulse signals, a second communication unit connected to the first communication unit for receiving data information, and a third communication unit connected to an external controller for transmitting data information received by the second communication unit to the external controller; the polarization correction sensor provided by this application is small in size, suitable for confined testing environments, and the receiving unit and the first main control unit will not be interrupted by the external controller, enabling high-speed operation and rapid response.

Description

Technical Field

[0001] This application belongs to the field of sensor detection technology, specifically relating to a correction sensor control system and control method. Background Technology

[0002] Currently, sensors have evolved into sensors with different technical directions such as mechanics, vision, and laser. As a subset of laser sensors, the correction sensor plays an important role in many fields such as industrial automation, robotics, automobile manufacturing and navigation, aerospace, rail transportation, building monitoring, and new energy manufacturing. In particular, it plays a key role in measuring and controlling the position of electrode edges in the manufacturing industry such as lithium batteries and photovoltaics. In lithium battery manufacturing, the correction sensor can detect and control the neatness of electrode edges and detect whether the electrode and separator are damaged through laser detection, thereby ensuring the yield and performance of battery production.

[0003] Existing optical correction sensors typically house the transmitting and receiving components within corresponding transmitting and receiving housings. This results in a large overall size for the correction sensor, making it unsuitable for applications with limited space. Furthermore, the receiving component needs to communicate directly with an external controller while processing and analyzing the optical pulse signal, making its information processing operations easily interrupted by external communication. This compromises the high-speed operation and rapid response of the correction sensor. Summary of the Invention

[0004] This application provides a correction sensor control system and control method to solve the problems of large overall size of correction sensors, inability of the receiving part to operate at high speed and respond quickly in the prior art.

[0005] To address the aforementioned technical problems, this application provides a correction sensor control system, including a transmitting module, a receiving module, and a relay module;

[0006] The transmitting module is used to transmit optical pulse signals;

[0007] The receiving module includes a receiving unit for receiving the optical pulse signal, a first main control unit for converting the optical pulse signal into data information, and a first communication unit for transmitting the data information to the relay module.

[0008] The relay module includes a laser driving unit for driving the transmitting module to emit optical pulse signals, a second communication unit connected to the first communication unit for receiving the data information, and a third communication unit connected to an external controller for transmitting the data information received by the second communication unit to the external controller.

[0009] As a further improvement of this application, the third communication unit is also used to receive control signals sent by the external controller and transmit the control signals to the first communication unit through the second communication unit, so as to enable bidirectional communication between the receiving module and the external controller.

[0010] As a further improvement of this application, the transmitting module includes a transmitting unit for transmitting the optical pulse signal, the transmitting unit being provided with a first laser diode, and the optical pulse signal emitted by the first laser diode being collimated into a rectangular spot or a strip-shaped spot.

[0011] As a further improvement of this application, the receiving unit includes a CMOS linear image sensor for receiving the optical pulse signal;

[0012] The CMOS linear image sensor outputs a first level in the region where the light pulse signal is not received, and outputs a second level in the region where the light pulse signal is received, so that the first main control unit can determine the data information of the target object by the region where the output is the first level.

[0013] As a further improvement of this application, the receiving module further includes a first power supply unit, a first indicator light unit, and a first programming unit;

[0014] The first power supply unit is used to supply power to the receiving module;

[0015] The first indicator light unit is used to indicate whether the receiving unit is aligned and installed with the transmitting module;

[0016] The first programming unit is used to program external programs for use by the receiving module.

[0017] As a further improvement of this application, the laser driving unit includes an operational amplifier connected to a power supply voltage, a first transistor disposed at the output terminal of the operational amplifier, and a second laser diode disposed at the collector of the first transistor.

[0018] An adjustable load resistor is provided between the emitter of the first transistor and the PD receiver of the second laser diode. A first drive signal is output between the non-inverting input of the operational amplifier and the adjustable load resistor. A second drive signal is output between the base of the first transistor and the power supply voltage. The PD receiver of the first laser diode is used to receive the first drive signal, and the LD emitter of the first laser diode is used to receive the second drive signal. The first drive signal and the second drive signal are used to drive the transmitting unit to emit the required optical pulse signal, and the emission intensity of the optical pulse signal is adjusted by adjusting the resistance value of the adjustable load resistor.

[0019] As a further improvement of this application, the relay module further includes a second main control unit, which is used to control the relay module to communicate with the receiving module through the second communication unit, and to control the relay module to communicate with the external controller through the third communication unit.

[0020] As a further improvement to this application, the relay module further includes a second power supply unit and a second programming unit;

[0021] The second power supply unit is used to supply power to the relay module;

[0022] The second programming unit is used to program external programs for use by the relay module.

[0023] As a further improvement of this application, the communication methods between the first communication unit and the second communication unit, the second communication unit and the third communication unit, and the third communication unit and the external controller are RS485 communication or RS232 communication.

[0024] As a further improvement of this application, this application also provides a correction sensor control method, applied to the correction sensor control system described in any of the above claims, the control method comprising the following steps:

[0025] The driving unit emits an optical pulse signal, and the optical pulse signal is collimated;

[0026] Receive the light pulse signal and determine the data information of the target object based on the size of the region where the output is at the first level;

[0027] The data information of the target object is transmitted through the first communication unit to the second communication unit in the relay module, and then through the third communication unit in the relay module to transmit the data information received by the second communication unit to the external controller.

[0028] Compared with existing technologies, the correction sensor control system and method provided in this application converts the received optical pulse signal into data information through a first main control unit, transmits the data information to a second communication unit through a first communication unit, and then transmits the data information to a third communication unit and an external controller through the second communication unit. It can also receive control signals transmitted by the external controller through the third communication unit and transmit these control signals to the first communication unit through the second communication unit, thus realizing bidirectional communication between the receiving module and the external controller. The inclusion of a relay module reduces the data processing pressure on the first main control unit, ensuring high-speed operation of the receiving module and achieving more accurate and faster response. This application places the transmitting module in a transmitting box, the receiving module in a receiving box, and the relay module and the laser driving unit that drives the transmitting unit to emit optical pulse signals in an output box. The transmitting box, receiving box, and output box are connected via terminals, significantly reducing the size of the correction sensor and making it suitable for more confined installation environments, meeting more precise detection requirements. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the structure of the correction sensor control system provided in the embodiments of this application;

[0031] Figure 2 This is a schematic diagram of the data information transmission process in the correction sensor control system provided in the embodiments of this application;

[0032] Figure 3 This is a schematic diagram of the receiving module in the correction sensor control system provided in the embodiments of this application;

[0033] Figure 4 This is a schematic diagram of the relay module in the correction sensor control system provided in the embodiments of this application;

[0034] Figure 5 This is a schematic diagram of the collimated light spot structure in the correction sensor control system provided in the embodiments of this application;

[0035] Figure 6 A circuit diagram of the transmitting unit in the correction sensor control system provided in this application embodiment;

[0036] Figure 7A circuit diagram of the first power supply unit in the correction sensor control system provided in this application embodiment;

[0037] Figure 8 A circuit diagram of the first indicator light unit in the correction sensor control system provided in this application embodiment;

[0038] Figure 9 A circuit diagram of the first communication unit in the correction sensor control system provided in this application embodiment;

[0039] Figure 10 A circuit diagram of the receiving unit in the correction sensor control system provided in this application embodiment;

[0040] Figure 11 A circuit diagram of the first main control unit in the correction sensor control system provided in this application embodiment;

[0041] Figure 12 A circuit diagram of the first programming unit in the correction sensor control system provided in this application embodiment;

[0042] Figure 13 A circuit diagram of the first shielding unit in the correction sensor control system provided in this application embodiment;

[0043] Figure 14 A circuit diagram of the second power supply unit in the correction sensor control system provided in this application embodiment;

[0044] Figure 15 A circuit diagram of the laser driving unit in the correction sensor control system provided in this application embodiment;

[0045] Figure 16 A circuit diagram of the second shielding unit in the correction sensor control system provided in this application embodiment;

[0046] Figure 17 A circuit diagram of the second main control unit in the correction sensor control system provided in this application embodiment;

[0047] Figure 18 A circuit diagram of the second programming unit in the correction sensor control system provided in this application embodiment;

[0048] Figure 19 A circuit diagram of the second indicator light unit in the correction sensor control system provided in this application embodiment;

[0049] Figure 20 A circuit diagram of the second communication unit in the correction sensor control system provided in this application embodiment;

[0050] Figure 21 A circuit diagram of the third communication unit in the correction sensor control system provided in this application embodiment;

[0051] Figure 22 Experimental testing of the correction sensor control system provided in the embodiments of this application Figure 1 ;

[0052] Figure 23 Experimental testing of the correction sensor control system provided in the embodiments of this application Figure 2 ;

[0053] Figure 24 This is a schematic diagram of the structure of the correction sensor provided in the embodiments of this application;

[0054] Figure 25 This is a schematic diagram of the transmitter and receiver boxes in the correction sensor provided in the embodiments of this application;

[0055] Figure 26 This is a schematic diagram of the output box in the correction sensor provided in the embodiments of this application;

[0056] Figure 27 A flowchart of the correction sensor control method provided in the embodiments of this application;

[0057] Explanation of reference numerals in the attached figures:

[0058] 10-Transmitter box; 20-Receiver box; 30-Outgoing cable box; 40-Terminal block. Detailed Implementation

[0059] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the embodiments of this application will be further described in detail below with reference to the accompanying drawings and specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the embodiments of this application and are not intended to limit the embodiments of this application.

[0060] In the description of the embodiments of this application, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. All directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this application are only used to explain the relative positional relationships and movement of the components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0061] To make the description of this disclosure more detailed and complete, illustrative descriptions of implementation methods and specific embodiments of the present application are provided below; however, this is not the only form of implementing or utilizing the specific embodiments of the present application. The implementation methods cover features of multiple specific embodiments and methods and steps for constructing and operating these specific embodiments, as well as their order. However, other specific embodiments may also be used to achieve the same or equivalent functions and step sequences.

[0062] Please refer to Figures 1-27 This application provides a control system and method for a correction sensor, addressing the problems of large overall size, inability of the receiving part to operate at high speed, and lack of rapid response in existing correction sensors. Please refer to... Figure 1 This is a schematic diagram of the structure of the correction sensor control system provided in the embodiment of this application. The correction sensor control system provided in the embodiment of this application includes a transmitting module, a receiving module, and a relay module.

[0063] In this embodiment, the transmitting module transmits the required optical pulse signal, and the receiving module is provided with a receiving unit, a first main control unit and a first communication unit. The receiving unit receives the optical pulse signal transmitted by the transmitting module, the first main control unit converts the received optical pulse signal into corresponding data information, and the first communication unit transmits the data information to the relay module.

[0064] Furthermore, the present application includes a laser driving unit in the relay module for driving the transmitting module to emit optical pulse signals, a second communication unit connected to the first communication unit for receiving data information corresponding to the optical pulse signals, and a third communication unit bidirectionally connected to an external controller for transmitting the data information received by the second communication unit to the external controller.

[0065] It is understood that this application provides a first communication unit in the receiving module and a second and a third communication unit in the relay module. The first and second communication units enable bidirectional communication between the receiving module and the relay module. Similarly, the third communication unit enables bidirectional communication between the third and second communication units and an external controller.

[0066] Therefore, please refer to Figure 2This is a schematic diagram of the data information transmission process in the correction sensor control system provided in this application embodiment. Not only can the received optical pulse signal be converted into data information by the first main control unit, and the data information be transmitted to the second communication unit by the first communication unit, and then to the third communication unit and the external controller by the second communication unit, but the control signal transmitted by the external controller can also be received by the third communication unit and transmitted to the first communication unit by the second communication unit. This realizes a bidirectional communication connection between the receiving module and the external controller. The setting of the relay module reduces the data processing pressure of the first main control unit, ensuring that the receiving module can operate at high speed and achieve a more accurate and faster response.

[0067] For example, the control signal mentioned above can be a receiving instruction sent by an external controller to the receiving module, controlling the receiving module to start receiving optical pulse signals, or it can be a communication request sent by an external controller to the receiving module before formal testing. This communication request passes through the third and second communication units of the relay module in sequence, then enters the first communication unit, and then enters the first main control unit through the first communication unit, so that the receiving module responds to the communication request, thereby realizing a bidirectional communication connection between the receiving module and the external controller.

[0068] As an optional implementation, the transmitting module provided in this application includes a transmitting unit for transmitting optical pulse signals. The required optical pulse signals are emitted by arranging a first laser diode within the transmitting unit. Please refer to [reference needed]. Figure 5 The diagram below shows the structure of the collimated light spot in the polarization correction sensor control system provided in this application embodiment. Preferably, the light pulse signal emitted by the first laser diode is collimated into a rectangular light spot or a long strip light spot. In principle, it is sufficient to ensure that the brightness of the rectangular light spot or the long strip light spot is uniform, so as to avoid the product performance of the polarization correction sensor due to the uniformity of the light spot.

[0069] In an optional embodiment, please refer to Figure 6 The circuit diagram of the transmitting unit in the correction sensor control system provided in this application embodiment shows that the transmitting unit is provided with a first laser diode LD1. The first laser diode LD1 is provided with a corresponding LD transmitting end and PD receiving end. This application also provides TVS tubes D1 and D2 in the transmitting unit to protect the first laser diode LD1. TVS tube D1 is placed on both sides of the LD transmitting end, and TVS tube D2 is placed between the LD transmitting end and the PD receiving end.

[0070] Specifically, in this application, the cathodes of the first laser diode LD1 and TVS tube D1 are connected together and then connected to interface J1; the cathode of TVS tube D2 is connected together with the PD receiver and then connected to interface J2; and the anode of TVS tube D2 is connected together with the LD transmitter and then connected to interface J3. TVS tubes D1 and D2 serve as electrostatic protection, thereby protecting the first laser diode LD1.

[0071] As an alternative implementation, the receiving unit provided in this application includes a CMOS linear image sensor for receiving the light pulse signal. The CMOS linear image sensor is formed by an array of small PD receivers. When there is no target object between the transmitting unit and the receiving unit, the uniform brightness light spot emitted by the transmitting unit will hit the CMOS linear image sensor directly, and the PD receiver in the CMOS linear image sensor will continuously receive the light pulse signal.

[0072] When a target detection object is placed between the transmitting unit and the receiving unit, the target detection object will block part of the light pulse signal, so that some PD receivers in the CMOS linear image sensor cannot receive the light pulse signal. At this time, the PD receiver area in the CMOS linear image sensor that does not receive the light pulse signal will output the first level, and the area that receives the light pulse signal will output the second level. The first main control unit can determine the size of the target detection object by the area corresponding to the PD receiver that outputs the first level. In other words, the size of the target detection object is the data information corresponding to the received light pulse signal.

[0073] For example, in a CMOS linear image sensor, the output of the area that does not receive the light pulse signal can be set to a low level, and the output of the area that receives the light pulse signal can be set to a high level. In this case, the size information of the target object can be determined by the area of ​​the PD receiver corresponding to the low level, which is the required data information. Alternatively, the output of the area that does not receive the light pulse signal can be set to a high level, and the output of the area that receives the light pulse signal can be set to a low level. In this case, the data information of the target object can be determined by the area of ​​the PD receiver corresponding to the high level.

[0074] In the above, it is feasible to set the first level and the second level to either high level or low level, as long as it is ensured that the area receiving the light pulse signal outputs the first level and the area receiving the light pulse signal outputs the second level, which is different from the first level. In this way, the data information of the target object can be determined by the area of ​​the PD receiver corresponding to the two different levels. This application does not impose any further restrictions on this.

[0075] In an optional embodiment, please refer to Figure 10 The diagram shows the circuit schematic of the receiving unit in the correction sensor control system provided in this application embodiment. U1 in the diagram is a CMOS linear image sensor. This application uses the CMOS linear image sensor U1 to receive the light pulse signal emitted by the first laser diode PD1 in the transmitting unit.

[0076] Furthermore, matching resistors R15, R16, R17, and R18, as well as a ferrite bead FB3, are provided to isolate the power supply VDD. Additionally, capacitors C43 and C44 are provided between the ferrite bead FB3 and the power supply VDD, with the other ends of capacitors C43 and C44 grounded to achieve effective isolation of the power supply VDD.

[0077] In this application embodiment, the communication methods between the first communication unit and the second communication unit, the second communication unit and the third communication unit, and the third communication unit and the external controller are RS485 communication or RS232 communication. Since RS485 communication can demonstrate stronger anti-interference capability in industrial environment, this application preferably uses RS485 communication. The following explanation will also use RS485 communication as an example. For the specific implementation of RS232 communication, please refer to the relevant description of RS485 communication. This application will not elaborate on it separately.

[0078] In an optional embodiment, please refer to Figure 9 The circuit diagram of the first communication unit in the correction sensor control system provided in this application embodiment shows that the first communication unit includes a serial-to-RS485 communication chip U3. The serial-to-RS485 communication chip U3 outputs two signals, RS485_B_I and RS485_A_I. This application sets a bidirectional breakdown diode D5 between these two signals to enhance the surge resistance of the serial-to-RS485 communication chip U3. It also sets self-resetting fuses F1 and F2 to prevent short circuits in the communication interface of the serial-to-RS485 communication chip U3, thereby burning out the equipment and improving the reliability of the equipment.

[0079] As an optional implementation method, please refer to Figure 3 This is a schematic diagram of the receiving module in the correction sensor control system provided in this application embodiment. The receiving module provided in this application also includes a first power supply unit, a first indicator light unit, a first programming unit, and a first shielding unit.

[0080] In this embodiment, the first power supply unit is used to supply power to the receiving module, the first indicator light unit is used to indicate whether the receiving unit is aligned and installed with the transmitting module, the first programming unit is used to program an external program for use by the receiving module, and the first shielding unit is used to connect the receiving module to the metal casing and shield against external electromagnetic interference.

[0081] In an optional embodiment, please refer to Figure 11 The circuit diagram of the first main control unit in the correction sensor control system provided in this application embodiment shows that the first main control unit includes an MCU chip U9. The MCU chip U9 controls the CMOS linear image sensor U1 to communicate with the relay module via RS485. In addition, the first main control unit is equipped with a crystal oscillator XL1, which together with capacitors C20 and C21 constitutes a crystal oscillation circuit.

[0082] Furthermore, this application also includes a reset circuit for the MCU chip U9 within the first main control unit. The reset circuit includes a resistor R12 and a capacitor C23 connected in sequence. One end of the capacitor C23 is grounded, and the other end of the capacitor C23 is connected together with the resistor R12 and then connected to the reset pin nRST of the MCU chip U9. In addition, this application provides corresponding filter capacitors for the power supply pins VDDA, VDD_2 and VDD_3 of the MCU chip U9.

[0083] Specifically, filter capacitors C28 and C62 are located at the power supply pin VDDA of MCU chip U9. The other ends of filter capacitors C28 and C62 are connected to ground. Filter capacitors C63 and C36 are located at the power supply pin VDD_2 of MCU chip U9. The other ends of filter capacitors C63 and C36 are connected to ground. Filter capacitors C61 and C32 are located at the power supply pin VDD_3 of MCU chip U9. Similarly, the other ends of filter capacitors C61 and C32 are connected to ground. For the specific connection methods between other components in the first main control unit, please refer to the appendix. Figure 9 The circuit schematic shown will not be described in detail here.

[0084] In the embodiments of this application, please refer to Figure 7 The circuit diagram of the first power supply unit in the correction sensor control system provided in this application embodiment shows that the first power supply unit provided in this application is used to convert the power supply voltage V5P2 into V3P3 required by the receiving module. For example, in a specific embodiment provided in this application, it is necessary to convert the +5V power supply voltage into the 3.3V voltage required by the receiving module.

[0085] The aforementioned first power supply unit specifically includes a power chip U2. The IN pin of the power chip U2 is connected to the J1 interface through a resistor R1. The EN pin of the power chip U2 is connected to the J2 interface after being connected to a capacitor C5. In this application, a capacitor C4 is also provided between the IN pin and the resistor R1. The capacitor C4 and the capacitor C5 are connected together and then grounded. In addition, a bidirectional breakdown diode D9 is also provided between the J2 interface and the resistor R1.

[0086] Furthermore, by grounding the GND pin of power chip U2 and connecting the BYP pin of power chip U2 to capacitor C60 and then grounding it, it can be observed that the OUT pin of power chip U2 is connected to ferrite beads FB1 and FB2 respectively. The setting of ferrite beads FB1 and FB2 here is to ensure that the analog power supply V3P3A and the digital power supply V3P3D do not interfere with each other. In addition, this application also sets a capacitor C12 between ferrite bead FB2 and the OUT pin, and grounds the other end of the capacitor C12.

[0087] It is understandable that the resistor R1 is a current-limiting resistor, the bidirectional breakdown diode D9 is used to prevent the introduction of static electricity during the insertion and removal of interfaces J1 and J2, which could damage the power chip U2, and the capacitors C4 and C5 are filter capacitors to prevent excessive external input power ripple from affecting the stability of the receiving module.

[0088] The power chip U2 is an LDO step-down chip that can linearly step down the input voltage V5P2 to the V3P3 required by the receiving module. The capacitor C12 is a filter capacitor used to ensure the stability of the power supply after step-down. Ferrite beads FB1 and FB2 are used to isolate the analog power supply V3P3A and the digital power supply V3P3D, ensuring that the analog power supply V3P3A and the digital power supply V3P3D do not interfere with each other.

[0089] In an optional embodiment, please refer to Figure 8 The above is a circuit diagram of the first indicator light unit in the correction sensor control system provided in this application embodiment. The first indicator light unit is used to indicate whether the transmitting unit and the receiving unit are aligned and installed. The first indicator light unit includes a first light-emitting diode LED1 and a second light-emitting diode LED2.

[0090] In this application, the first light-emitting diode LED1 is connected to the MCU chip U9 via resistor R14, and the second light-emitting diode LED2 is connected to the MCU chip U9 via resistor R13. The first light-emitting diode LED1 and the second light-emitting diode LED2 can be set to output the same color, or the first light-emitting diode LED1 and the second light-emitting diode LED2 can be set to output different colors.

[0091] For example, when the first LED1 and the second LED2 are set to output the same color, if the transmitting unit and the receiving unit are aligned, both LED1 and LED2 will be lit simultaneously. If there is a positional deviation between the transmitting unit and the receiving unit, only LED1 or only LED2 will be lit. If the positions of the transmitting unit and the receiving unit are completely misaligned, neither LED1 nor LED2 will be lit. Here, resistors R14 and R13 are set as current-limiting resistors. By adjusting the resistance values ​​of resistors R14 and R13, the brightness of LED1 and LED2 can be adjusted.

[0092] As an optional implementation method, please refer to Figure 12 The above is a circuit diagram of the first programming unit in the correction sensor control system provided in this application embodiment. This application uses the first programming unit to perform external programming for use by the receiving module. Of course, other programming circuit configurations that can realize external programming are also feasible, and this application does not impose further restrictions on them.

[0093] Further, please refer to Figure 13 The diagram shows the circuit schematic of the first shielding unit in the correction sensor control system provided in this application embodiment. This application also includes a first shielding unit, which includes a capacitor C33 and a resistor R64. The capacitor C33 and the resistor R64 form an RC filter, which effectively releases external electromagnetic interference such as static electricity. In the actual application of the correction sensor, the receiving module provided in this application needs to be integrated on the circuit board and fixed in the metal housing to shield against external electromagnetic interference.

[0094] As a further improvement of this application, the laser driving unit provided in this application includes an operational amplifier connected to a power supply voltage, a first transistor disposed at the output terminal of the operational amplifier, and a second laser diode disposed at the collector of the first transistor.

[0095] An adjustable load resistor is provided between the emitter of the first transistor and the PD receiver of the second laser diode. A first drive signal is output between the non-inverting input of the operational amplifier and the adjustable load resistor. A second drive signal is output between the base of the first transistor and the power supply voltage. The PD receiver of the first laser diode is used to receive the first drive signal, and the LD emitter of the first laser diode is used to receive the second drive signal. The first and second drive signals are used to drive the transmitting unit to emit the required optical pulse signal, and the intensity of the optical pulse signal emission is adjusted by adjusting the resistance value of the adjustable load resistor.

[0096] For details, please refer to Figure 15 The above is a circuit diagram of the laser driving unit in the correction sensor control system provided in this application embodiment. The laser driving unit provided in this application includes an operational amplifier U9B connected to the power supply voltage V3P30, a first transistor Q15 disposed at the output terminal of the operational amplifier U9B, and a second laser diode LD2 disposed at the collector of the first transistor Q15.

[0097] It can be observed that the non-inverting input terminal of operational amplifier U9B is connected to the power supply voltage V3P30 through resistors R104 and R112. Resistor R105 is also connected between resistor R104 and the non-inverting input terminal of operational amplifier U9B. A capacitor C77 is connected in parallel across the two ends of resistor R105. The capacitor C77 and resistor R105 are connected together and then grounded.

[0098] Furthermore, a capacitor C77 is connected between the inverting input terminal and the output terminal of the operational amplifier U9B. The output terminal of the operational amplifier U9B is also connected to the base of the first transistor Q15 through a resistor R106. A resistor R107 is connected to the emitter of the first transistor Q15. The collector of the first transistor Q15 is connected to the LD emitter terminal of the second laser diode LD2. A capacitor C79 is connected in parallel on both sides of the LD emitter terminal of the second laser diode LD2.

[0099] Furthermore, this application provides an adjustable load resistor RT3 between the emitter of the first transistor Q15 and the PD receiver of the second laser diode LD2. The adjustable load resistor RT3 is connected to resistor R108 and then grounded together with resistor R107.

[0100] It can be observed that a first driving signal PD+ is output between the non-inverting input terminal of operational amplifier U9B and the adjustable load resistor RT3; a second driving signal LD- is output between the base of the first transistor Q15 and the power supply voltage V3P30; and a third driving signal PD+LD- is output between the power supply voltage V3P30 and the second laser diode LD2. The first driving signal PD+ is connected to port J9, the second driving signal LD- is connected to port J10, and the third driving signal PD+LD- is connected to port J8. Corresponding to the transmitting unit, the first driving signal PD+ is connected to the PD receiving terminal of the first laser diode LD1, and the second driving signal LD- is connected to the LD transmitting terminal of the first laser diode LD1. The first driving signal PD+ and the second driving signal LD- drive the first laser diode LD1 in the transmitting unit to emit the required optical pulse signal. The emission intensity of the optical pulse signal emitted by the first laser diode LD1 can also be adjusted by adjusting the resistance value of the adjustable load resistor RT3.

[0101] In this embodiment, the voltage at the non-inverting input terminal of operational amplifier U9B is

[0102] V3P3D*R105 / (R112+R104+R105)=1.65V, which is about half of the power supply voltage V3P30. Capacitor C78 is set to prevent the operational amplifier U9B from oscillating. Capacitor C79 is set to prevent the surge current from impacting the second laser diode LD2. If it is a high-speed pulse drive, capacitor C79 can be removed as needed.

[0103] In an optional embodiment, please refer to Figure 20 This is a circuit diagram of the second communication unit in the correction sensor control system provided in this application embodiment. The second communication unit includes a serial-to-RS485 communication chip U11, which receives two signals.

[0104] The Receiver_RS485_B_I and Receiver_RS485_A_I signals are used to receive data from the first communication unit. This application includes a bidirectional breakdown diode D16 between these two signals to enhance the surge protection capability of the serial-to-RS485 communication chip U11. Furthermore, self-resetting fuses F3 and F4 are provided to prevent short circuits in the communication interface of the serial-to-RS485 communication chip U11, which could damage the device and improve its reliability.

[0105] Further, please refer to Figure 21 This is a circuit diagram of the third communication unit in the correction sensor control system provided in this application embodiment. The third communication unit includes a serial-to-RS485 communication chip U13. The serial-to-RS485 communication chip U13 outputs two signals, namely RS485_B_I and RS485_A_I, thereby transmitting data information to an external controller. This application sets a bidirectional breakdown diode D17 between these two signals to enhance the surge resistance of the serial-to-RS485 communication chip U13. It also sets self-resetting fuses F5 and F6 to prevent short circuits in the communication interface of the serial-to-RS485 communication chip U13, thereby burning out the equipment and improving the reliability of the equipment.

[0106] This application sets up a second communication unit and a third communication unit to send the data information transmitted by the receiving module to the external controller via RS485 communication, thereby reducing the amount of data processed by the first main control unit and improving the information processing speed of the entire control system.

[0107] As an optional implementation method, please refer to Figure 4This is a schematic diagram of the structure of the relay module in the correction sensor control system provided in this application embodiment. The relay module provided in this application also includes a second main control unit, which is used to control the relay module to communicate with the receiving module through the second communication unit, and to control the relay module to communicate with the external controller through the third communication unit.

[0108] For details, please refer to Figure 17 The circuit diagram of the second main control unit in the correction sensor control system provided in this application embodiment shows that the second main control unit provided in this application includes an MCU chip U4. The MCU chip U4 controls the relay module to communicate with the receiving unit through the second communication unit, and controls the relay module to communicate with the external controller through the third communication unit.

[0109] This application includes a crystal oscillator XL2 in the second communication unit, which together with capacitors C31 and C32 forms a crystal oscillation circuit. It also includes a reset circuit and a filter capacitor for the MCU chip U4 in the first main control unit. For the specific connection relationship between the reset circuit, the filter capacitor and the MCU chip U4, please refer to the description in the first communication unit above. This application will not elaborate further here.

[0110] As an optional implementation method, please continue to refer to Figure 4 The relay module provided in this application also includes a second power supply unit, a second programming unit, a second indicator light unit, and a second programming unit.

[0111] Please refer to Figure 19 This is a circuit diagram of the second indicator light unit in the correction sensor control system provided in this application embodiment. The second indicator light unit is also used to indicate whether the transmitting unit and the receiving unit are aligned and installed. The second indicator light unit specifically includes a third light-emitting diode LED3 and a fourth light-emitting diode LED4. In this application, the third light-emitting diode LED3 is connected to the MCU chip U4 after being connected to the resistor R23. Similarly, the fourth light-emitting diode LED4 is connected to the MCU chip U4 after being connected to the resistor R24. Here, the third light-emitting diode LED3 and the fourth light-emitting diode LED4 can be set to output the same color, or they can be set to output different colors.

[0112] Regarding the description of how the third LED3 and the fourth LED4 indicate whether the transmitting unit and the receiving unit are aligned and installed, please refer to the relevant description in the first transmitting unit above. This application will not elaborate further here. Of course, it is also possible to set only the first indicator unit, set only the second indicator unit, or set both the first indicator unit and the second indicator unit simultaneously if cost permits. All of the above settings are feasible, and this application does not impose any further restrictions on them.

[0113] Please refer to Figure 14 This is a circuit diagram of the second power supply unit in the correction sensor control system provided in this application embodiment. The second power supply unit is used to supply power to the relay module. It can be observed that the second power supply unit provided in this application includes two parts: a DC-DC section and an LDO section. The power supply VIN in the DC-DC section comes from the power supply of the external controller. The voltage range of the power supply VIN can be 12-24V. The varistor RV1 can prevent the surge voltage of the power supply VIN from being too large and damaging the power chip U6. The current limiting resistor R1 and the Schottky diode can prevent the power supply VIN from being positively charged. If the negative connection is damaged, the FB pin of the power chip U6 is a feedback pin. The output voltage of the DC-DC circuit can be changed by adjusting the resistance values ​​of resistors R3 and R4. For example, in a specific embodiment provided in this application, the power supply VIN needs to be stepped down to 5.2V. The LDO section is equipped with an LDO step-down chip U5, which can linearly step down the power supply V5P2 provided by the DC-DC section to V3P3A and V3P3D. For specific details of the LDO section in the second power supply unit, please refer to the relevant description in the first power supply unit. This application will not elaborate further on this.

[0114] As an optional implementation method, please refer to Figure 18 The circuit diagram of the second programming unit in the correction sensor control system provided in this application embodiment shows that the relay module is also equipped with a second programming unit. The external programming program is performed through the second programming unit for use by the relay module. Of course, other programming circuit configurations that can realize external programming are also feasible, and this application does not impose further restrictions on them.

[0115] Further, please refer to Figure 16 This is a circuit diagram of the second shielding unit in the correction sensor control system provided in this application embodiment. For the specific implementation principle of the second shielding unit, please refer to the relevant description in the first shielding unit. This application will not elaborate further on this.

[0116] In the embodiments of this application, please refer to Figure 22 Experimental testing of the correction sensor control system provided in the embodiments of this application. Figure 1In this test environment, the size of a single pixel of the CMOS linear image sensor in the receiving unit, i.e., the size of a single PD receiver, is 7×125um. When the transmitting and receiving units are aligned and the distance between them is 40cm, the following results can be obtained: Figure 24 The test result image shows that the threshold is selected by subtracting the dark light value / 2 from the saturation value, i.e., 98 + (3127 - 898) / 2 = 2012. Therefore, the first point on both sides that is greater than 2012 is taken as the threshold, i.e., 2167 (corresponding to Y of 2103) - 190 (corresponding to Y of 2018) = 1,977 (pixels). The size corresponding to this pixel is 1977 × 7um = 13.839mm. Thus, the detection object size range of the correction sensor at this distance is 13.839mm.

[0117] In the above Figure 22 Based on the test environment, please refer to Figure 23 Experimental testing of the correction sensor control system provided in the embodiments of this application. Figure 2 In this application, a target detection object of approximately 0.5 mm is placed between the transmitting unit and the receiving unit for further testing. It can be observed that the X-axis data of the pixel positions corresponding to the dark pattern are 1246, 1324, 1214, and 1358, respectively. At this time, the calculated pixel count of the target detection object is 1324-1246=78 pixels, and the size corresponding to this pixel is 78 x 7 μm=0.546 mm, which is close to the preset 0.5 mm, proving that the correction sensor provided in this application can achieve high-precision detection.

[0118] It is understandable that dark ripples represent the positions where light does not illuminate the light pulse signal, while bright ripples represent the positions where the light pulse signal does illuminate. The strength of the light pulse signal received by the CMOS linear image sensor can be represented by the bright and dark ripples.

[0119] Based on the above-mentioned correction sensor control system, please refer to Figure 24 The diagram below is a structural schematic of the correction sensor provided in the embodiment of this application. This application also provides a correction sensor, which includes a transmitter box 10 and a receiver box 20 arranged opposite to each other, and an output box 30 connected to the transmitter box 10 and the receiver box 20 through corresponding wiring terminals 40. The end of the output box 30 away from the transmitter box 10 and the receiver box 20 is also connected to an external controller through wiring terminals 40.

[0120] In the embodiments of this application, please refer to Figure 25This is a schematic diagram of the structure of the transmitter box and receiver box in the correction sensor provided in this application embodiment. In this application, the transmitter module is set in the transmitter box 10 and the receiver module is set in the receiver box 20. The transmitter box 10 and the receiver box 20 are set opposite to each other, so as to ensure that the receiver unit can be set directly opposite the transmitter unit and receive the light pulse signal emitted by the transmitter unit through the receiver unit.

[0121] Please refer to Figure 26 This is a schematic diagram of the output box in the correction sensor provided in this application embodiment. In this application, the relay module is set in the output box 30, which reduces the size of the transmitter box 10 and the receiver box 20, making the correction sensor more elongated overall. It is suitable for some edge positions, such as measuring the edge position of the electrode, detecting electrode damage, wafer positioning and other scenarios, and meets the requirements of narrow installation environments.

[0122] For other details regarding the implementation of the above technical solution by each unit in the correction sensor, please refer to the description in the correction sensor control system provided in the above application embodiments, which will not be repeated here.

[0123] Based on the above-mentioned correction sensor control system, please refer to Figure 27 The above is a flowchart of the correction sensor control method provided in the embodiments of this application. This application also provides a correction sensor control method, which includes the following steps:

[0124] Step S1: Drive the transmitting unit to emit an optical pulse signal, and collimate the optical pulse signal;

[0125] In this embodiment, the laser driving unit in the output box 30 drives the transmitting unit to emit light pulse signals. Before the formal test, the light pulse signals need to be collimated to make the light spot distribution uniform.

[0126] Step S2: Receive the light pulse signal and determine the data information of the target object based on the size of the region where the output is at the first level;

[0127] In this embodiment, the receiving unit and the transmitting unit are arranged opposite to each other. The receiving unit receives the corresponding optical pulse signal, and the first main control unit determines the data information of the target detection object based on the size of the area in the receiving unit that outputs a first level.

[0128] Step S3: The data information of the target detected object is transmitted to the second communication unit in the relay module through the first communication unit, and then the data information received by the second communication unit is transmitted to the external controller through the third communication unit in the relay module.

[0129] As an optional implementation, after the first main control unit determines the data information of the target object, it transmits the data information to the second communication unit in the relay module through the first communication unit, then the main control unit in the relay module transmits the data information to the fourth and third communication units, and finally the third communication unit transmits the data information to the external controller.

[0130] For other details regarding the implementation of the above technical solution in each step of the correction sensor control method, please refer to the description in the correction sensor control system provided in the above application embodiments, which will not be repeated here.

[0131] It is understood that the technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0132] The above embodiments are merely exemplary implementations used to illustrate the principles of the embodiments of this application; however, the embodiments of this application are not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the embodiments of this application, and these modifications and improvements are also considered to be within the protection scope of the embodiments of this application.

Claims

1. A correction sensor control system, characterized in that, This includes a transmitting module, a receiving module, and a relay module; The transmitting module is used to transmit optical pulse signals; the transmitting module includes a transmitting unit for transmitting the optical pulse signals, the transmitting unit is provided with a first laser diode, and the optical pulse signals emitted by the first laser diode are collimated into rectangular or elongated light spots; The receiving module includes a receiving unit for receiving the light pulse signal, a first main control unit for converting the light pulse signal into data information, and a first communication unit for transmitting the data information to the relay module. The receiving unit includes a CMOS linear image sensor for receiving the light pulse signal. The CMOS linear image sensor outputs a first level in areas where the light pulse signal is not received, and outputs a second level in areas where the light pulse signal is received, so that the first main control unit determines the data information of the target detection object through the areas that output the first level. The relay module includes a laser driving unit for driving the transmitting module to emit light pulse signals, a second communication unit connected to the first communication unit for receiving data information, and a third communication unit connected to an external controller for transmitting the data information received by the second communication unit to the external controller. The third communication unit is also used to receive control signals sent by the external controller and transmit the control signals to the first communication unit through the second communication unit, so that the receiving module and the external controller can have a bidirectional communication connection. The relay module further includes a second main control unit, which is used to control the relay module to communicate with the receiving module through the second communication unit, and to control the relay module to communicate with the external controller through the third communication unit.

2. The correction sensor control system as described in claim 1, characterized in that, The receiving module also includes a first power supply unit, a first indicator light unit, and a first programming unit; The first power supply unit is used to supply power to the receiving module; The first indicator light unit is used to indicate whether the receiving unit is aligned and installed with the transmitting module; The first programming unit is used to program external programs for use by the receiving module.

3. The correction sensor control system as described in claim 1, characterized in that, The laser driving unit includes an operational amplifier connected to a power supply voltage, a first transistor disposed at the output terminal of the operational amplifier, and a second laser diode disposed at the collector of the first transistor. An adjustable load resistor is provided between the emitter of the first transistor and the PD receiver of the second laser diode. A first drive signal is output between the non-inverting input of the operational amplifier and the adjustable load resistor. A second drive signal is output between the base of the first transistor and the power supply voltage. The PD receiver of the first laser diode is used to receive the first drive signal, and the LD emitter of the first laser diode is used to receive the second drive signal. The first drive signal and the second drive signal are used to drive the transmitting unit to emit the required optical pulse signal, and the emission intensity of the optical pulse signal is adjusted by adjusting the resistance value of the adjustable load resistor.

4. The correction sensor control system as described in claim 1, characterized in that, The relay module also includes a second power supply unit and a second programming unit; The second power supply unit is used to supply power to the relay module; The second programming unit is used to program external programs for use by the relay module.

5. The correction sensor control system as described in claim 1, characterized in that, The communication methods between the first communication unit and the second communication unit, the second communication unit and the third communication unit, and the third communication unit and the external controller are RS485 communication or RS232 communication.

6. A method for controlling a correction sensor, applied to the correction sensor control system as described in any one of claims 1-5, characterized in that, The control method includes the following steps: The driving unit emits an optical pulse signal, and the optical pulse signal is collimated; Receive the light pulse signal and determine the data information of the target object based on the size of the region where the output is at the first level; The data information of the target object is transmitted through the first communication unit to the second communication unit in the relay module, and then through the third communication unit in the relay module to transmit the data information received by the second communication unit to the external controller.

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