Apparatus and method for manufacturing optical device

Abstract

The invention relates to an apparatus and a method for manufacturing an optical device. The apparatus for manufacturing an optical device including a barrel portion and a first lens disposed in the barrel portion includes a light simulation portion that receives an initial design value for the optical device and simulates light passing through the optical device, and a Monte Carlo simulation portion that simulates the initial design value for the optical device, the Monte Carlo simulation section determines whether the initial design value is appropriate by using Monte Carlo simulation.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of Korean Patent Application No. 10-2023-0122042 filed in the Korean Intellectual Property Office (KIPO) on September 13, 2023, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present disclosure relates to an apparatus and method for manufacturing an optical device. Background Art

[0004] Electronic devices based on mobility are widely used. As mobile electronic devices, in addition to small electronic devices such as mobile phones, tablet personal computers (PCs) have been widely used in recent years.

[0005] Mobile electronic devices include display devices that provide users with visual information such as images or videos and support various functions. Recently, as the size of other components for driving the display device decreases, the proportion of display devices in electronic devices has gradually increased, and a structure that can be bent at a certain angle from a flat state has been developed. Summary of the invention

[0006] Embodiments include an apparatus for manufacturing an optical device by predicting performance trends of the optical device using Monte Carlo simulation without actually manufacturing the optical device.

[0007] However, the purpose and scope of the present disclosure are not limited thereto.

[0008] Additional aspects will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the disclosed embodiments.

[0009] According to an embodiment, an apparatus for manufacturing an optical device including a barrel portion and a first lens arranged in the barrel portion includes: a light simulation unit that receives initial design values ​​for the optical device and simulates light passing through the optical device; and a Monte Carlo simulation unit that determines whether the initial design values ​​are appropriate by using Monte Carlo simulation.

[0010] In an embodiment, the light simulation section may include: an initial value input section, receiving a first-first value and a first-second value for each of a plurality of first variables, the plurality of first variables being design variables of the optical device, the first-first value being an initial standard dimension, and the first-second value being an initial tolerance value; and an ideal light value extraction section, extracting an ideal second-first value of a second variable for light passing through the optical device, the ideal second-first value being expected to be obtained when the optical device is manufactured with the first-first value and the first-second value for each of the plurality of first variables. The Monte Carlo simulation unit may include: a random value extraction unit, for each of the plurality of first variables, randomly extracting a first-31 value and a first-32 value, wherein the absolute value of each of the first-31 value and the first-32 value is smaller than the absolute value of the first-second value; a first case extraction unit, for each of the plurality of first variables, extracting a second-21 value of the second variable, wherein the second-21 value is expected to be obtained when the optical device is manufactured under the first case where the standard dimension is the first-first value and the design error is the first-31 value; and a second case extraction unit, for each of the plurality of first variables, extracting a second-22 value of the second variable, wherein the second-22 value is expected to be obtained under the first case where the standard dimension is the first-first value and the design error is the first-31 value. is obtained when the optical device is manufactured under the second case where the optical device has a first-first value and a design error is a first-32 value; a case selection unit, which selects one of the first case and the second case by determining a value closer to the ideal second-first value among the second-21 value and the second-22 value; a spot size extraction unit, which extracts the spot size of the light that has passed through the optical device for one of the first case and the second case selected by the case selection unit; a uniformity calculation unit, which calculates the uniformity of the spot size of the light that has passed through the optical device; and a determination unit, which determines whether the first-first value and the first-second value are appropriate based on the uniformity calculated by the uniformity calculation unit.

[0011] In an embodiment, the spot size extraction unit may extract the spot size of light that has passed through the optical device in a first direction and the spot size of light that has passed through the optical device in a second direction intersecting the first direction, and the uniformity calculation unit may include: a first size value calculation unit, which calculates a first size value, the first size value being a larger value between a maximum value of the spot size in the first direction and a maximum value of the spot size in the second direction; a second size value calculation unit, which calculates a second size value, the second size value being a smaller value between a minimum value of the spot size in the first direction and a minimum value of the spot size in the second direction; and a deviation calculation unit, which calculates the deviation of each of the first size value and the second size value.

[0012] In an embodiment, the determination section may further determine that the first-first value and the first-second value are appropriate if the deviation is within a range from 0 to a specified value.

[0013] In an embodiment, the plurality of first variables may include at least one of a curvature of the first lens, a center thickness of the first lens, and a diameter of the first lens.

[0014] In an embodiment, the plurality of first variables may include at least one of an angle at which the first lens is tilted from the barrel portion, a distance from a central axis of the barrel portion to a center of the first lens, a distance from an opening portion of the barrel portion to the first lens, and a diameter of the opening portion of the barrel portion.

[0015] In an embodiment, the second variable may include a root mean square (RMS) radius of the light spot.

[0016] In an embodiment, the second variable may include a root mean square (RMS) wavefront aberration value.

[0017] According to an embodiment, a method for manufacturing an optical device including a barrel portion and a first lens arranged in the barrel portion may include: a light simulation operation of receiving initial design values ​​for the optical device and simulating light passing through the optical device; and a Monte Carlo simulation operation of determining whether the initial design values ​​are appropriate by using Monte Carlo simulation.

[0018] In an embodiment, the light simulation operation may include: an initial value input operation of receiving a first-first value and a first-second value for each of a plurality of first variables, the plurality of first variables being design variables of the optical device, the first-first value being an initial standard dimension, and the first-second value being an initial tolerance value; and an ideal light value extraction operation of extracting an ideal second-first value for a second variable of light passing through the optical device, the ideal second-first value being expected to be obtained when the optical device is manufactured with the first-first value and the first-second value for each of the plurality of first variables. The Monte Carlo simulation operation may include: a random value extraction operation, for each of the plurality of first variables, randomly extracting a first-31 value and a first-32 value, the absolute value of each of the first-31 value and the first-32 value being less than the absolute value of the first-second value; a first case extraction operation, for each of the plurality of first variables, extracting a second-21 value of the second variable, the second-21 value being expected to be obtained when the optical device is manufactured under the first case where the standard dimension is the first-first value and the design error is the first-31 value; a second case extraction operation, for each of the plurality of first variables, extracting a second-22 value of the second variable, the second-22 value being expected to be obtained when the standard dimension is the first-first value and the design error is the first-31 value. a first-first value and a second-second value having a design error of a first-32 value when the optical device is manufactured; a case selection operation of selecting one of the first case and the second case by determining a value closer to the ideal second-first value among the second-21 value and the second-22 value; a spot size extraction operation of extracting the spot size of the light that has passed through the optical device for one of the first case and the second case selected in the case selection operation; a uniformity calculation operation of calculating the uniformity of the spot size of the light that has passed through the optical device; and a determination operation of determining whether the first-first value and the first-second value are appropriate based on the uniformity calculated in the uniformity calculation operation.

[0019] In an embodiment, a light spot size extraction operation may include extracting a light spot size in a first direction of light that has passed through the optical device and a light spot size in a second direction that intersects the first direction of light that has passed through the optical device, and a uniformity calculation operation may include: a first size value calculation operation, calculating a first size value, the first size value being a larger value between a maximum value of the light spot size in the first direction and a maximum value of the light spot size in the second direction; a second size value calculation operation, calculating a second size value, the second size value being a smaller value between a minimum value of the light spot size in the first direction and a minimum value of the light spot size in the second direction; and a deviation calculation operation, calculating a deviation of each of the first size value and the second size value.

[0020] In an embodiment, the determining operation may include determining that the first-first value and the first-second value are appropriate if the deviation is within a range from 0 to a specified value.

[0021] In an embodiment, the plurality of first variables may include at least one of a curvature of the first lens, a center thickness of the first lens, and a diameter of the first lens.

[0022] In an embodiment, the plurality of first variables may include at least one of an angle at which the first lens is tilted from the barrel portion, a distance from a central axis of the barrel portion to a center of the first lens, a distance from an opening portion of the barrel portion to the first lens, and a diameter of the opening portion of the barrel portion.

[0023] In an embodiment, the second variable may include the light spot RMS radius.

[0024] In an embodiment, the second variable may include an RMS wavefront aberration value.

[0025] Other aspects, features, and advantages besides those described above will become apparent from the accompanying drawings, claims and detailed description of the disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The above and other aspects, features and advantages of the embodiments of the present disclosure will become more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0027] Figure 1 is a schematic block diagram of an optical system according to an embodiment;

[0028] Figure 2 is a schematic cross-sectional view of an optical device according to an embodiment;

[0029] Figure 3 is a plan view of a display substrate irradiated with light according to an embodiment;

[0030] Figure 4 is a graph showing spot intensity of light according to an embodiment;

[0031] Figure 5 is a schematic block diagram of an apparatus for manufacturing an optical device according to an embodiment;

[0032] Figure 6 is a schematic block diagram of a light simulation unit according to an embodiment;

[0033] Figure 7 is a schematic block diagram of a Monte Carlo simulation unit according to an embodiment;

[0034] Figure 8 is a schematic flow chart showing a method of manufacturing an optical device according to an embodiment;

[0035] Fig. 9 is a schematic plan view of a display device according to an embodiment;

[0036] Fig.10 is a schematic cross-sectional view of a display device according to an embodiment; and

[0037] Fig.11 is a schematic diagram of an equivalent circuit of a pixel of a display panel according to an embodiment. DETAILED DESCRIPTION

[0038] Now will be referred to in detail embodiments, these embodiments are shown in the accompanying drawings, wherein the same reference numerals represent the same elements throughout the text. In this respect, the embodiments may have different forms and should not be construed as being limited to the description set forth herein. Therefore, the following description of these embodiments is only by reference to the accompanying drawings to explain the aspects of the description. In the specification and claims, for the purpose of its meaning and interpretation, the phrase "at least one of ... " is intended to include the meaning of "selected from at least one of the ... group". For example, "at least one of A and B" may be understood to mean "A, B, or A and B". In the specification and claims, for the purpose of its meaning and interpretation, the term "and / or" is intended to include any combination of the terms "and" and "or". For example, "A and / or B" may be understood to mean "A, B, or A and B". The terms "and" and "or" may be used in the sense of conjunctions or antonymous conjunctions, and may be understood to be equivalent to "and / or".

[0039] Since the present disclosure allows various changes and multiple embodiments, specific embodiments will be shown in the drawings and described in detail in the written description. The effects and features of the present disclosure and the methods for achieving the same will be apparent with reference to the embodiments and drawings described in detail below. However, the present disclosure can be implemented in many different forms and should not be construed as being limited to the embodiments set forth herein.

[0040] The present disclosure will now be described more fully with reference to the accompanying drawings, in which embodiments of the present disclosure are shown. Like reference numerals in the drawings represent like elements, and thus description thereof will not be repeated.

[0041] Although the terms "first", "second", etc. can be used in this article to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another element. Therefore, without departing from the teachings of the present disclosure, the first element discussed below can be referred to as the second element.

[0042] The terms used herein are for the purpose of describing a particular embodiment, rather than being intended to be limiting. Unless the context clearly indicates otherwise, as used herein, the singular forms "one", "an" and "the" are intended to also include plural forms. In addition, when used in this specification, the terms "comprise", "comprises", "includes" and / or "includes" represent the existence of stated features, integral bodies, steps, operations, elements, parts and / or its groups, but do not exclude the existence or addition of one or more other features, integral bodies, steps, operations, elements, parts and / or its groups. It should also be noted that, as used herein, the terms "substantially", "about" and other similar terms are used as approximate terms and not as degree terms, and are therefore used to allow for the inherent deviations in the measured values, calculated values ​​and / or provided values ​​that will be recognized by those of ordinary skill in the art.

[0043] Spatially relative terms such as "beneath," "below," "under," "lower," "above," "upper," "over," "higher," "side" (e.g., as in "sidewall"), and the like may be used herein for descriptive purposes, and thereby to describe the relationship of one element to another element(s) as shown in the accompanying drawings. Spatially relative terms are intended to encompass different orientations of the device in use, operation, and / or manufacture in addition to the orientation depicted in the accompanying drawings. For example, if the device in the accompanying drawings is turned over, elements described as being "below" or "beneath" other elements or features would then be oriented to be "above" the other elements or features. Thus, the exemplary term "below" may encompass both the above and below orientations. Furthermore, the device may be otherwise oriented (e.g., rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0044] When an element or layer is referred to as being "on," "connected to," or "coupled to" another element or layer, it may be directly on, directly connected to, or coupled to another element or layer, or there may be intervening elements or layers. However, when an element or layer is referred to as being "directly on," "directly connected to," or "directly coupled to" another element or layer, there are no intervening elements or layers. For this purpose, the term "connected" may refer to a physical connection, an electrical connection, and / or a fluid connection with or without the presence of intervening elements.

[0045] For convenience of explanation, the sizes of elements in the drawings may be exaggerated. In other words, since the sizes and thicknesses of components in the drawings are arbitrarily shown for convenience of explanation, the following embodiments are not limited thereto.

[0046] The x-axis, y-axis, and z-axis are not limited to the three axes on the orthogonal coordinate system, and can be interpreted in a broad sense including them. For example, the x-axis, y-axis, and z-axis can be perpendicular to each other, or can represent different directions that are not perpendicular to each other.

[0047] When a specific embodiment can be implemented differently, a specific processing order can be performed differently from the described order. For example, two processes described in succession can be performed substantially simultaneously, or in the reverse order of the described order.

[0048] Unless otherwise defined or implied herein, all terms (including technical and scientific terms) used have the same meaning as those commonly understood by those skilled in the art to which the present disclosure belongs. It will also be understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted as an ideal or overly formal meaning unless clearly defined in the specification.

[0049] Figure 1 is a schematic block diagram of an optical system OST according to an embodiment.

[0050] refer to Figure 1 , the optical system OST may include a light source LS, a homogenizer HG, a field lens unit FL, a slit SLT and a projection lens unit PL.

[0051] The light source LS may emit light LT. For example, an excimer laser beam may be emitted. The light source LS may include a resonator. Typically, most of the light LT spontaneously emitted or stimulated from a medium may not have a specific direction and may be scattered in all directions. Therefore, in order to make the light LT oscillate, it may be desirable to return the scattered light LT to the medium and stimulate atoms or molecules that are still in an excited state to continue stimulated emission. To this end, a mirror may be arranged on the side to continuously return the light LT, which is called a laser resonator. The light LT may be light LT in a resonant state, which is emitted in small quantities from the laser resonator through a mirror that partially transmits the light LT.

[0052] The homogenizer HG may be located in the path of the light LT emitted from the light source LS. The homogenizer HG may be used to equalize the intensity of the light LT in a two-dimensional space. For example, the intensity distribution of the laser beam may be made uniform in a two-dimensional space (which is a cross section of the light LT incident on the homogenizer HG). To this end, the optical system OST may also be provided with two homogenizers HG.

[0053] The homogenizer HG may have a fly-eye lens to separate the incident laser beam into a plurality of laser beams. The laser beam may pass through a lens such as a convex lens and a field lens unit FL, and the light LT may be irradiated onto the display substrate DS. Through this process, the intensity distribution of the laser beam may be made uniform in a two-dimensional space (which is a cross section of the light LT incident on the homogenizer HG). This means that the laser beam incident on the amorphous silicon layer on the display substrate DS may have a uniform intensity distribution within the laser irradiation region of the amorphous silicon layer. Therefore, the polycrystalline silicon layer formed after the amorphous silicon layer is crystallized may have uniform characteristics at various points. For example, the optical system OST may produce polycrystalline silicon having uniform characteristics by crystallizing the amorphous silicon layer on the display substrate DS.

[0054] The laser beam having passed through the field lens unit FL may sequentially pass through the slit SLT and the projection lens unit PL. Figure 1 One field lens unit FL is schematically shown, but the present disclosure is not limited thereto, and in another embodiment, the field lens unit FL may include a plurality of lenses, such as a convex lens and / or a concave lens. The projection lens unit PL may be positioned on the path of the light LT that has passed through the homogenizer HG. The projection lens unit PL may include one lens or may include a plurality of lenses. For example, the projection lens unit PL may include a convex lens, a convex lens having a flat side, and / or a concave lens, etc.

[0055] Figure 2 is a schematic cross-sectional view of an optical device ODV according to an embodiment.

[0056] refer to Figure 2 , the optical device ODV may include a barrel portion BT and a first lens LN1.

[0057] Optical device ODV can be the above reference Figure 1 At least one of the light source LS, the homogenizer HG, the field lens unit FL, the slit SLT and the projection lens unit PL is described.

[0058] The barrel portion BT may form the appearance of the optical device ODV. The barrel portion BT may provide an internal space for the first lens LN1 disposed in the barrel portion BT. The barrel portion BT may protect the first lens LN1 from external impact. In addition, the barrel portion BT may reduce the contamination of the first lens LN1 by external foreign matter. The barrel portion BT may be provided in a shape symmetrical with respect to the central axis BTC. For example, the barrel portion BT may be provided in a cylindrical shape. However, the shape of the barrel portion BT is not limited thereto.

[0059] One side of the barrel portion BT may have an opening portion OPB. Therefore, the light LT may pass through the opening portion OPB of the barrel portion BT. The shape of the opening portion OPB may correspond to the shape of the first lens LN1. For example, the plane shape of the opening portion OPB may be circular. Figure 2 It is shown that one opening portion OPB is provided on the lower surface of the barrel portion BT, but the present disclosure is not limited thereto, and a plurality of opening portions OPB may be provided and arranged at various positions of the barrel portion BT.

[0060] The first lens LN1 may be arranged in an inner space of the barrel portion BT. The first lens LN1 may be fixed to the barrel portion BT to overlap with the opening portion OPB of the barrel portion BT in a plan view. The first lens LN1 may be provided in a shape symmetrical with respect to the central axis LNC. The first lens LN1 may include a first surface LNS1 and a second surface LNS2. The first surface LNS1 and the second surface LNS2 may form opposing surfaces of the first lens LN1. Light LT may be incident on the first surface LNS1, emitted from the second surface LNS2, and pass through the opening portion OPB of the barrel portion BT.

[0061] For example, each of the first surface LNS1 and the second surface LNS2 may be a curved surface. For example, each of the first surface LNS1 and the second surface LNS2 may be a convex surface. For example, the first lens LN1 may be a convex lens. However, the type of the first lens LN1 is not limited thereto. For example, at least one of the first surface LNS1 and the second surface LNS2 may be a flat surface, or at least one of the first surface LNS1 and the second surface LNS2 may be a concave surface.

[0062] Figure 2 Only the barrel portion BT and the first lens LN1 are illustrated, but the present disclosure is not limited thereto, and the optical device ODV may further include various types of lenses, mirrors, and electronic devices.

[0063] When designing an optical device ODV, multiple design variables may be considered. The design variable of the optical device ODV may be referred to as a first variable.

[0064] For example, the first variable may include a curvature of the first lens LN1. The curvature of the first lens LN1 may be a curvature of the first surface LNS1 and the second surface LNS2. The first variable may include a center thickness d1 of the first lens LN1. The center thickness d1 of the first lens LN1 may be a distance between two points where a center axis LNC of the first lens LN1 intersects the first surface LNS1 and the second surface LNS2 of the first lens LN1. The first variable may be a diameter d2 of the first lens LN1. The plane shape of the first lens LN1 may be a circle, and the diameter d2 of the first lens LN1 may be a diameter of the plane shape of the first lens LN1.

[0065] The first variable may include an angle an1 at which the first lens LN1 is tilted from the barrel portion BT. The angle an1 at which the first lens LN1 is tilted from the barrel portion BT may be an angle between a center axis BTC of the barrel portion BT and a center axis LNC of the first lens LN1. The first variable may include a distance d3 from the center axis BTC of the barrel portion BT to a center C of the first lens LN1. The first variable may include a distance d4 from an opening portion OPB of the barrel portion BT to a center C of the first lens LN1. The first variable may include a diameter of an opening portion OPB of the barrel portion BT.

[0066] In other words, the first variable may include at least one of the curvature of the first lens LN1, the center thickness d1 of the first lens LN1, the diameter d2 of the first lens LN1, the angle an1 at which the first lens LN1 is tilted from the barrel portion BT, the distance d3 from the center axis BTC of the barrel portion BT to the center C of the first lens LN1, the distance d4 from the opening portion OPB of the barrel portion BT to the center C of the first lens LN1, and the diameter of the opening portion OPB of the barrel portion BT. When designing the optical device ODV, a plurality of first variables may be considered.

[0067] Figure 3 is a plan view of a display substrate DS irradiated with light LT according to an embodiment, and Figure 4 is a graph showing the light spot intensity of the light LT according to the embodiment.

[0068] refer to Figures 2 to 4 , the light LT having passed through the optical device ODV may be irradiated to the display substrate DS.

[0069] like Figure 3 As shown, the light LT irradiated on the display substrate DS may be formed into a beam shape. Figure 3 It is shown that the shape of the light LT irradiated on the display substrate DS is rectangular in a plan view, but the shape of the light LT is not limited thereto.

[0070] Figure 4is a graph showing the light spot intensity of the light LT at the position on the display substrate DS. The horizontal axis represents the position, and the vertical axis represents the intensity of the light LT. Specifically, the vertical axis shows a relative value with the maximum value of the intensity of the light LT set to 1. The horizontal axis may be a position in a first direction (e.g., an x-axis direction) or a position in a second direction (e.g., a y-axis direction). The first direction (e.g., the x-axis direction) and the second direction (e.g., the y-axis direction) may be directions intersecting each other.

[0071] The intensity of the light LT may be symmetrical with respect to the optical axis LTC. The intensity of the light LT may be highest at the optical axis LTC, and the intensity of the light LT may decrease as the distance from the optical axis LTC increases. Figure 4 shows that the intensity of light LT reaches The values ​​of the two points SL, and the distance SL between the two points is called the spot size.

[0072] Reference again Figure 3 , displays shadows based on the light spot size. Figure 3 It is shown that the spot size varies depending on the position of the display substrate DS where the irradiation light LT is applied. Specifically, Figure 3 It is shown that the spot size is smaller at the center portion, and the spot size increases as the distance from the center portion increases. The minimum value among the spot sizes in the first direction or the second direction is referred to as the first value VA1, and the maximum value among the spot sizes in the first direction or the second direction is referred to as the second value VA2. The smaller value among the first values ​​VA1 in the first direction and the second direction is referred to as the second size value, and the larger value among the second values ​​VA2 in the first direction and the second direction is referred to as the first size value.

[0073] The spot size uniformity of the light LT may be calculated based on the deviation between the first value VA1 and the second value VA2. For example, the spot size uniformity of the light LT may improve as the deviation between the first value VA1 and the second value VA2 decreases, and the spot size uniformity of the light LT may decrease as the deviation between the first value VA1 and the second value VA2 increases.

[0074] Table 1 below shows an example of calculation of the spot size according to an embodiment.

[0075] [Table 1]

[0076] Spot size in the first direction Spot size in the second direction Second value VA2 8.06μm 8.12μm First value VA1 7.53μm 8.01μm

[0077] In an embodiment, as shown in Table 1, the light spot size may be analyzed as the light spot size in a first direction (eg, x-axis direction) and the light spot size in a second direction (eg, y-axis direction).

[0078] The uniformity of the light spot size can be calculated by the deviation (8.12μm-7.53μm=0.59μm) between the first size value (8.12μm) and the second size value (7.53μm), wherein the first size value (8.12μm) is the larger value between the second value VA2 (8.06μm) in the first direction (e.g., the x-axis direction) and the second value VA2 (8.12μm) in the second direction (e.g., the y-axis direction), and the second size value (7.53μm) is the smaller value between the first value VA1 in the first direction (e.g., the x-axis direction) and the first value VA1 in the second direction (e.g., the y-axis direction).

[0079] Table 2 below shows an example of calculation of the spot size according to an embodiment.

[0080] [Table 2]

[0081]

[0082] The positional relationship between the optical device ODV and the display substrate DS may be variously adjusted.

[0083] FOCUS refers to a situation where the positional relationship between the optical device ODV and the display substrate DS is set so that the light LT having passed through the optical device ODV is accurately focused on the display substrate DS.

[0084] DOF refers to depth of field. The DOF upper limit refers to a case where the positional relationship between the optical device ODV and the display substrate DS is set immediately before the light LT irradiated on the display substrate DS becomes blurred when the optical device ODV and the display substrate DS are arranged to gradually move away from each other. The DOF lower limit refers to a case where the positional relationship between the optical device ODV and the display substrate DS is set immediately before the light LT irradiated on the display substrate DS becomes blurred when the optical device ODV and the display substrate DS are arranged to gradually move closer to each other.

[0085] Table 2 above can be organized into Table 3 below.

[0086] [Table 3]

[0087] Maximum 8.38μm Minimum 7.48μm deviation 8.38-7.48=0.9μm

[0088] The maximum value may refer to the maximum value among the second value VA2 of FOCUS, DOF upper limit and DOP lower limit, the minimum value may refer to the minimum value among the first value VA1 of FOCUS, DOF upper limit and DOF lower limit, and the deviation may refer to the difference between the maximum value and the minimum value. As the deviation decreases, the uniformity of the spot size can be improved.

[0089] The embodiments of the present disclosure are directed to setting respective values ​​of a plurality of first variables so that the uniformity of the light spot size is maintained at a certain quality or higher.

[0090] Figure 5 is a schematic block diagram of an apparatus 1 for manufacturing an optical device according to an embodiment, Figure 6 is a schematic block diagram of a light simulation unit 11 according to an embodiment, and Figure 7 is a schematic block diagram of the Monte Carlo simulation unit 12 according to an embodiment.

[0091] refer to Figures 2 to 7 The apparatus 1 for manufacturing an optical device may include a light simulation unit 11 and a Monte Carlo simulation unit 12 .

[0092] The light simulation unit 11 may receive an initial design value of the optical device ODV and simulate the light LT passing through the optical device ODV. For example, the light simulation unit 11 may receive a value of each of a plurality of first variables to simulate at least one of an ideal light spot root mean square (RMS) radius and an RMS wavefront aberration value. The light simulation unit 11 may include an initial value input unit 111 and an ideal light value extraction unit 112.

[0093] The initial value input unit 111 may receive a first-1 value (first-first value) which is an initial standard dimension and a first-2 value (first-second value) which is an initial tolerance value for each of the first variables.

[0094] The first variable can be as mentioned above Figure 2 Various embodiments are described, but for convenience of explanation, an embodiment is described in which the first variable includes two variables, which are the center thickness d1 of the first lens LN1 and the diameter d2 of the first lens LN1.

[0095] Table 4 shows an example of the first-1 value and the first-2 value input to the initial value input unit 111 .

[0096] [Table 4]

[0097]

[0098] For example, the initial value input unit 111 may receive a variable in which the first-1 value and the first-2 value of the center thickness d1 of the first lens LN1 among the first variables are 10 mm and ±0.5 mm, respectively. In addition, the initial value input unit 111 may receive a variable in which the first-1 value and the first-2 value of the diameter d2 of the first lens LN1 among the first variables are 100 mm and ±3 mm, respectively.

[0099] The ideal light value extraction unit 112 may extract an ideal second-1 value (second-first value) for a second variable of the light LT passing through the optical device ODV, which is expected to be obtained when the optical device ODV is manufactured with the first-1 value and the first-2 value for each of the first variables. For example, the second variable may be the light spot RMS radius.

[0100] For example, the ideal light value extraction unit 112 may simulate the light spot RMS radius of the light LT irradiated on the display substrate, which is expected to be obtained when the optical device ODV is manufactured with the first-1 value and the first-2 value listed in Table 4.

[0101] Table 5 shows the second-1 value of the second variable which is expected to be obtained when the optical device ODV is manufactured with the values ​​listed in Table 4. Here, the second-1 value is the RMS radius of the spot of the light LT irradiated on the display substrate.

[0102] [Table 5]

[0103] Nominal RMS spot radius 0.00022664m Estimated changes 0.00096268m Second -1 value 0.00118931m

[0104] The nominal spot RMS radius is an expected spot RMS radius value of the light LT when the center thickness d1 of the first lens LN1 and the diameter d2 of the first lens LN1 are each manufactured without error according to the standard dimension of the first-1 value. The estimated variation is a spot RMS radius variation value of the ideal light LT when the tolerance value is the first-2 value. The second-1 value is a value obtained by adding the estimated variation to the nominal spot RMS radius.

[0105] The second -1 value is only an ideal value calculated theoretically, and in reality, when the optical device ODV is manufactured, the RMS radius of the light spot of the light LT may vary and may not be exactly the second -1 value.

[0106] The Monte Carlo simulation unit 12 may determine whether the initial design values ​​(eg, the first-1 value and the first-2 value) are appropriate by using the Monte Carlo simulation. Actually manufacturing the optical device ODV and evaluating the performance of the optical device ODV may waste time and cost.

[0107] The Monte Carlo simulation unit 12 can predict a performance trend that is expected to be obtained when the optical device ODV is manufactured with a tolerance value by using Monte Carlo simulation without actually manufacturing the optical device ODV. The Monte Carlo simulation unit 12 can determine whether the initial design values ​​(e.g., the first-1 value and the first-2 value) are appropriate. The performance of the optical device ODV can be the uniformity of the spot size.

[0108] The Monte Carlo simulation unit 12 may include a random value extraction unit 121, a first situation extraction unit 1221, a second situation extraction unit 1222, a third situation extraction unit 1223, ... and an Nth situation extraction unit 122N, a situation selection unit 123, a light spot size extraction unit 124, a uniformity calculation unit 125, and a determination unit 126.

[0109] The random value extraction unit 121 may randomly extract a first -31 value, a first -32 value, a first -33 value, . . . , and a first -3N value, each of which has an absolute value smaller than that of the first -2 value, for each of the first variables.

[0110] Table 6 shows the first -31 value, the first -32 value, the first -33 value, . . . , and the first -3N value extracted by the random value extraction unit 121 .

[0111] [Table 6]

[0112]

[0113] Because the absolute value of each of the first -31 value, the first -32 value, the first -33 value, ... and the first -3N value is smaller than the first -2 value (which is the tolerance value), errors in the first -31 value, the first -32 value, the first -33 value, ... and the first -3N value may occur when actually manufactured by setting the first -2 value to the tolerance value.

[0114] The first case extraction unit 1221 may extract, for each of the first variables, a second -21 value of the second variable that is expected to be obtained when the optical device ODV is manufactured in the first case where the standard dimension is the first -1 value and the design error is the first -31 value.

[0115] The second case extraction unit 1222 may extract, for each of the first variables, a second -22 value of the second variable that is expected to be obtained when the optical device ODV is manufactured in the second case where the standard dimension is the first -1 value and the design error is the first -32 value.

[0116] The third case extracting unit 1223 may extract, for each of the first variables, a second -23 value that is expected to be obtained when the optical device ODV is manufactured in a third case where the standard dimension is the first -1 value and the design error is the first -33 value.

[0117] The Nth case extraction unit 122N may extract, for each of the first variables, a second -2N value that is expected to be obtained when the optical device ODV is manufactured in the Nth case where the standard dimension is the first -1 value and the design error is the first -3N value.

[0118] As mentioned above, the second variable may be the light spot RMS radius.

[0119] Table 7 shows examples of values ​​extracted by the first case extracting unit 1221 , the second case extracting unit 1222 , the third case extracting unit 1223 , . . . , and the Nth case extracting unit 122N.

[0120] [Table 7]

[0121]

[0122] The first case extraction unit 1221 can extract 0.00102341m (second-21 value), which is the expected RMS radius of the light spot when manufacturing the optical device ODV in the first case, in which the standard dimension of the center thickness d1 of the first lens LN1 is 10mm (first-1 value) and the design error is 0.3mm (first-31 value), and the standard dimension of the diameter d2 of the first lens LN1 is 100mm (first-1 value) and the design error is 2mm (first-31 value).

[0123] The second situation extraction unit 1222 can extract 0.00923421m (second -22 value), which is the expected RMS radius of the light spot when manufacturing the optical device ODV in the second situation, in which the standard dimension of the center thickness d1 of the first lens LN1 is 10mm (first -1 value) and the design error is -0.2mm (first -32 value), and the standard dimension of the diameter d2 of the first lens LN1 is 100mm (first -1 value) and the design error is -1mm (first -32 value).

[0124] The third case extraction unit 1223 can extract 0.00913423m (second -23 value), which is the expected RMS radius of the light spot when manufacturing the optical device ODV in the third case, wherein the standard dimension of the center thickness d1 of the first lens LN1 is 10mm (first -1 value) and the design error is -0.4mm (first -33 value), and the standard dimension of the diameter d2 of the first lens LN1 is 100mm (first -1 value) and the design error is -2.5mm (first -33 value).

[0125] The Nth case extraction unit 122N can extract 0.00812342m (second -2N value), which is the expected RMS radius of the light spot when manufacturing the optical device ODV in the Nth case, in which the standard dimension of the center thickness d1 of the first lens LN1 is 10mm (first -1 value) and the design error is -0.1mm (first -3N value), and the standard dimension of the diameter d2 of the first lens LN1 is 100mm (first -1 value) and the design error is 1mm (first -3N value).

[0126] The case selection unit 123 may select one of the first case, the second case, the third case, ... and the Nth case by determining a value close to the second -1 value among the second -21 value, the second -22 value, the second -23 value, ... and the second -2N value.

[0127] For example, in the case where the results shown in Tables 4 to 7 are obtained, the second-1 value, the second-21 value, the second-22 value, the second-23 value, . . . , and the second-2N value may be summarized as in Table 8.

[0128] [Table 8]

[0129]

[0130]

[0131] The case selection unit 123 may select the first case because the second -21 value is closest to the second -1 value.

[0132] The spot size extraction unit 124 may extract the spot size of the light LT having passed through the optical device ODV for the case selected by the case selection unit 123 .

[0133] In Table 8, because the first case is selected, when the center thickness d1 of the first lens LN1 is manufactured to be 10.3 mm and the diameter d2 of the first lens LN1 is manufactured to be 102 mm, the spot size of the light LT having passed through the optical device ODV may be extracted as shown in Table 7. The spot size extraction unit 124 may extract the spot size of the light LT having passed through the optical device ODV in a first direction (e.g., x-axis direction) and the spot size of the light LT having passed through the optical device ODV in a second direction (e.g., y-axis direction).

[0134] The uniformity calculation unit 125 may calculate the uniformity of the spot size extracted by the spot size extraction unit 124. The uniformity calculation unit 125 may include a first size value calculation unit 1251 that calculates a first size value, a second size value calculation unit 1252 that calculates a second size value, and a deviation calculation unit 1253 that calculates a deviation of each of the first size value and the second size value. Figure 3 A method of extracting a spot size and calculating uniformity of the spot size is described, and thus a detailed description thereof is omitted.

[0135] The determination unit 126 may determine whether the first-1 value and the first-2 value are appropriate based on the uniformity extracted by the uniformity calculation unit 125. The determination unit 126 may determine that the first-1 value and the first-2 value are appropriate if the deviation calculated by the deviation calculation unit 1253 is between 0 and a specified value.

[0136] On the contrary, when the deviation calculated by the deviation calculation unit 1253 is greater than a specific value, the determination unit 126 can determine that at least one of the first-1 value and the first-2 value is not appropriate, and can redesign at least one of the first-1 value and the first-2 value.

[0137] The description is made based on an embodiment in which the second variable is the RMS radius of the light spot, but the type of the second variable is not limited thereto. The same description can be applied even in the case in which the second variable is the RMS wavefront aberration value.

[0138] Figure 8 is a schematic flow chart showing a method 2 of manufacturing an optical device according to an embodiment.

[0139] exist Figure 8 In, with Figures 1 to 7 The same reference numerals in the drawings denote the same components, and redundant descriptions thereof are omitted.

[0140] The method 2 for manufacturing an optical device may include a light simulation operation S1 and a Monte Carlo simulation operation S2 .

[0141] The light simulation operation S1 may be an operation of receiving an initial design value of an optical device and simulating light passing through the optical device. The light simulation operation S1 may include an initial value input operation S11 and an ideal light value extraction operation S12.

[0142] The initial value input operation S11 may be an operation of receiving a first-1 value and a first-2 value for each of a plurality of first variables, wherein the plurality of first variables are design variables of the optical device, the first-1 value is an initial standard dimension, and the first-2 value is an initial tolerance value.

[0143] The ideal light value extraction operation S12 may be an operation of extracting an ideal second-1 value of a second variable for light passing through the optical device, the ideal second-1 value expected to be obtained when the optical device is manufactured with the first-1 value and the first-2 value for each of the first variables.

[0144] The Monte Carlo simulation operation S2 may be an operation of determining whether the initial design value is appropriate by using Monte Carlo simulation. The Monte Carlo simulation operation S2 may include a random value extraction operation S21, a first case extraction operation S221, a second case extraction operation S222, a third case extraction operation S223, ... and an Nth case extraction operation S22N, a case selection operation S23, a spot size extraction operation S24, a uniformity calculation operation S25, and a determination operation S26.

[0145] The random value extraction operation S21 can be an operation of a first -31 value, a first -32 value, a first -33 value, ... and a first -3N value randomly extracted for each of the first variables, wherein the first -31 value, the first -32 value, the first -33 value, ... and the first -3N value are smaller than the absolute value of the first -2 value.

[0146] The first case extraction operation S221 may be an operation of extracting, for each of the first variables, a second -21 value of the second variable that is expected to be obtained when the optical device is manufactured in the first case where the standard dimension is the first -1 value and the design error is the first -31 value.

[0147] The second case extraction operation S222 may be an operation of extracting a second -22 value of the second variable for each of the first variables, the second -22 value expected to be obtained when the optical device is manufactured in the second case where the standard dimension is the first -1 value and the design error is the first -32 value.

[0148] The third case extraction operation S223 may be an operation of extracting a second -23 value of the second variable for each of the first variables, the second -23 value expected to be obtained when the optical device is manufactured in a third case where the standard dimension is the first -1 value and the design error is the first -33 value.

[0149] The Nth case extraction operation S22N may be an operation of extracting a second -2N value of a second variable for each of the first variables, the second -2N value expected to be obtained when the optical device is manufactured in the Nth case where the standard dimension is the first -1 value and the design error is the first -3N value.

[0150] The case selection operation S23 may be an operation of selecting any one of the first case, the second case, the third case, ... and the Nth case by determining a value close to the second -1 value among the second -21 value, the second -22 value, the second -23 value, ... and the second -2N value.

[0151] The spot size extraction operation S24 may be an operation of extracting the spot size of the light that has passed through the optical device for any one of the cases selected in the case selection operation S23. The spot size selection operation S24 may be an operation of extracting the spot size of the light that has passed through the optical device in a first direction (e.g., x-axis direction) and the spot size of the light that has passed through the optical device in a second direction (e.g., y-axis direction).

[0152] The uniformity calculation operation S25 may be an operation of calculating the uniformity of the spot size of the light that has passed through the optical device. The uniformity calculation operation S25 may include a first size value calculation operation S251 of calculating a first size value, a second size value calculation operation S252 of calculating a second size value, and a deviation calculation operation S253 of calculating the deviation of each of the first size value and the second size value.

[0153] The determination operation S26 may be an operation of determining whether the first-1 value and the first-2 value are appropriate based on the uniformity extracted in the uniformity calculation operation S25. The determination operation S26 may be an operation of determining that the first-1 value and the first-2 value are appropriate when the deviation of each of the first size value and the first size value is between 0 and a specified value.

[0154] Fig. 9 is a schematic plan view of a display device 3 according to the embodiment.

[0155] refer to Fig. 9 The display device 3 manufactured according to the embodiment may include a display area DA and a peripheral area PA adjacent to the display area DA. The display device 3 may provide an image through an array of a plurality of pixels PX that are two-dimensionally arranged in the display area DA.

[0156] The peripheral area PA may be an area where no image is provided, and may completely or partially surround the display area DA in a plan view. A driver configured to provide an electrical signal or power to a pixel circuit corresponding to each of the pixels PX, etc. may be arranged in the peripheral area PA. A pad may be arranged in the peripheral area PA, and the pad is an area to which an electronic device or a printed circuit board can be electrically connected.

[0157] In the following, although the display device 3 is described as including an organic light emitting diode as a light emitting element, the display device 3 is not limited thereto. In another embodiment, the display device 3 may be a light emitting display device including an inorganic light emitting diode, such as an inorganic light emitting display device. The inorganic light emitting diode may include a PN junction diode, which includes a material based on an inorganic semiconductor. In the case of applying a voltage to the PN junction diode in the forward direction, holes and electrons may be injected, and the energy generated by the recombination of holes and electrons may be converted into light energy to emit light of a specific color. The inorganic light emitting diode described above may have a width of several microns to hundreds of microns, and in an embodiment, the inorganic light emitting diode may be referred to as a micro light emitting diode (LED). In another embodiment, the display device 3 may be a quantum dot light emitting display device.

[0158] The display device 3 may be a portable electronic device such as a mobile phone, a smart phone, a desktop personal computer, a mobile communication terminal, an electronic notebook, an electronic book, a portable multimedia player (PMP), a navigation device, an ultra mobile personal computer (UMPC), etc., or may be used as a display screen of various products such as a television, a laptop computer, a monitor, an advertising board, an Internet of Things (IoT) device, etc. The display device 3 according to the embodiment may be used as a wearable device such as a smart watch, a watch phone, a glasses-type display, and a head mounted display (HMD). The display device 3 according to the embodiment may be applied to a dashboard of a vehicle, a central instrument panel of a vehicle, a central information display (CID) provided on the dashboard, a rearview mirror display replacing a side mirror of a vehicle, and a display screen provided on the rear surface of a front seat for entertaining passengers in a rear seat of the vehicle.

[0159] Fig.10 It is along Fig. 9 A schematic cross-sectional view of the display device 3 according to the embodiment, taken along line IX-IX'.

[0160] refer to Fig.10 The display device 3 may include a stacked structure of a substrate 100 , a pixel circuit layer PCL, a display element layer DEL, and an encapsulation layer 300 .

[0161] The substrate 100 may have a multilayer structure including a base layer and an inorganic layer, the base layer including a polymer resin. For example, the substrate 100 may include a base layer including a polymer resin, and a barrier layer of an inorganic insulating layer. For example, the substrate 100 may include a first base layer 101, a first barrier layer 102, a second base layer 103, and a second barrier layer 104 stacked sequentially. Each of the first base layer 101 and the second base layer 103 may include polyimide (PI), polyethersulfone (PES), polyarylate, polyetherimide (PEI), polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polyphenylene sulfide (PPS), polycarbonate, triacetyl cellulose (TAC), cellulose acetate propionate (CAP), etc. The first barrier layer 102 and the second barrier layer 104 may each include an inorganic insulating material such as silicon oxide, silicon nitride and / or silicon oxynitride. The substrate 100 may be flexible.

[0162] The pixel circuit layer PCL may be disposed on the substrate 100. In an implementation, the pixel circuit layer PCL may include a thin film transistor TFT, a buffer layer 1111, a first gate insulating layer 1121, a second gate insulating layer 113, an interlayer insulating layer 114, a first planarizing insulating layer 115, and a second planarizing insulating layer 116, wherein the buffer layer 1111, the first gate insulating layer 1121, the second gate insulating layer 113, the interlayer insulating layer 114, the first planarizing insulating layer 115, and the second planarizing insulating layer 116 may be disposed below or / and above components of the thin film transistor TFT.

[0163] The buffer layer 1111 may reduce or prevent penetration of foreign matter, moisture, or external air from a lower portion of the substrate 100, and may provide a flat surface on the substrate 100. The buffer layer 1111 may include an inorganic insulating material such as silicon oxide, silicon oxynitride, and silicon nitride, and may include a single-layer structure or a multi-layer structure each including the above-mentioned materials.

[0164] The thin film transistor TFT disposed on the buffer layer 1111 may include a semiconductor layer Act, and the semiconductor layer Act may include polycrystalline silicon (poly-Si). In another embodiment, the semiconductor layer Act may include amorphous silicon (a-Si), an oxide semiconductor, an organic semiconductor, etc. The semiconductor layer Act may include a channel region C, a drain region D, and a source region S, and the drain region D and the source region S may be arranged on the sides of the channel region C, respectively. The gate electrode GE of the thin film transistor TFT may overlap the channel region C in a plan view.

[0165] The gate electrode GE may include a low resistance metal material. The gate electrode GE may include a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and may be a multilayer or single layer each including the above-mentioned materials.

[0166] The first gate insulating layer 1121 between the semiconductor layer Act and the gate electrode GE may include an inorganic insulating material such as silicon oxide (SiO 2 ), silicon nitride (SiN x ), silicon oxynitride (SiON), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), Tantalum Oxide (Ta 2 O 5 ), hafnium oxide (HfO 2 ), zinc oxide (ZnO x ) etc. Zinc oxide (ZnO x ) can be zinc oxide (ZnO) and / or zinc peroxide (ZnO 2 ).

[0167] The second gate insulating layer 113 may cover the gate electrode GE. Similar to the first gate insulating layer 1121, the second gate insulating layer 113 may include an inorganic insulating material such as silicon oxide (SiO 2 ), silicon nitride (SiN x ), silicon oxynitride (SiON), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), Tantalum Oxide (Ta 2 O 5 ), hafnium oxide (HfO 2 ), zinc oxide (ZnO x ) etc. Zinc oxide (ZnO x ) can be zinc oxide (ZnO) and / or zinc peroxide (ZnO 2 ).

[0168] The upper electrode Cst2 of the storage capacitor Cst may be disposed on the second gate insulating layer 113. In a plan view, the upper electrode Cst2 may overlap the gate electrode GE. The gate electrode GE and the upper electrode Cst2 may overlap each other and may form a storage capacitor Cst together with the second gate insulating layer 113 between the gate electrode GE and the upper electrode Cst2. For example, the gate electrode GE may serve as the lower electrode Cst1 of the storage capacitor Cst.

[0169] Thus, in a plan view, the storage capacitor Cst and the thin film transistor TFT may overlap each other. In an embodiment, the storage capacitor Cst may not overlap the thin film transistor TFT.

[0170] The upper electrode Cst2 may include Al, platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), Mo, Ti, tungsten (W) and / or Cu, and may be a single layer or multiple layers each including the above-mentioned materials.

[0171] The interlayer insulating layer 114 may cover the upper electrode Cst2. The interlayer insulating layer 114 may include an inorganic insulating material such as silicon oxide (SiO 2 ), silicon nitride (SiN x ), silicon oxynitride (SiON), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), Tantalum Oxide (Ta 2 O 5 ), hafnium oxide (HfO 2 ), zinc oxide (ZnO x ) etc. Zinc oxide (ZnO x ) can be zinc oxide (ZnO) and / or zinc peroxide (ZnO 2 ). The interlayer insulating layer 114 may include a single layer or a plurality of layers each including the above-mentioned inorganic insulating material.

[0172] Each of the drain electrode DE and the source electrode SE of the thin film transistor TFT may be disposed on the interlayer insulating layer 114. The drain electrode DE and the source electrode SE may be connected to the drain region D and the source region S, respectively, through contact holes formed in the insulating layer below the drain electrode DE and the source electrode SE. The drain electrode DE and the source electrode SE may each include a material having good electrical conductivity. The drain electrode DE and the source electrode SE may each include a conductive material including Mo, Al, Cu, Ti, etc., and may include a multilayer or a single layer each including the above-mentioned materials. In an embodiment, the drain electrode DE and the source electrode SE may each have a multilayer structure of Ti / Al / Ti.

[0173] The first planarization insulating layer 115 may cover the drain electrode DE and the source electrode SE. The first planarization insulating layer 115 may include a common commercial polymer such as poly(methyl methacrylate) (PMMA) or polystyrene (PS), a polymer derivative having a phenolic group, and an organic insulating material such as an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluoropolymer, a p-xylene polymer, a vinyl alcohol polymer, and a mixture thereof.

[0174] The second planarization insulating layer 116 may be disposed on the first planarization insulating layer 115. The second planarization insulating layer 116 and the first planarization insulating layer 115 may include the same material. For example, the second planarization insulating layer 116 may include a common commercial polymer such as PMMA or PS, a polymer derivative having a phenol group, and a polymer derivative having a phenol group, and an organic insulating material such as an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluoropolymer, a p-xylene polymer, a vinyl alcohol polymer, and a mixture thereof.

[0175] The display element layer DEL may be disposed on the pixel circuit layer PCL having the structure described above. The display element layer DEL may include an organic light emitting diode OLED as a display element (e.g., a light emitting element), and the organic light emitting diode OLED may include a stacked structure of a pixel electrode 210, an intermediate layer 220, and a common electrode 230. The organic light emitting diode OLED may emit, for example, red light, green light, or blue light, or may emit red light, green light, blue light, or white light. The organic light emitting diode OLED may emit light through an emission region, and the emission region is defined as a pixel PX.

[0176] The pixel electrode 210 of the organic light emitting diode OLED may be electrically connected to the thin film transistor TFT through a contact hole formed in the second planarization insulating layer 116 and the first planarization insulating layer 115 and a contact metal CM disposed on the first planarization insulating layer 115 .

[0177] The pixel electrode 210 may include a conductive oxide such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In 2 O 3 ), indium gallium oxide (IGO) or zinc aluminum oxide (AZO). In another embodiment, the pixel electrode 210 may include a reflective film including Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr or a compound thereof. In another embodiment, the pixel electrode 210 may also include a reflective film including ITO, IZO, ZnO or In above / below the reflective film described above. 2 O 3 membrane.

[0178] A bank layer 117 having an opening 117OP exposing a central portion of the pixel electrode 210 may be disposed on the pixel electrode 210. The bank layer 117 may include an organic insulating material and / or an inorganic insulating material. The opening 117OP may define an emission region of light emitted from the organic light emitting diode OLED. For example, the size / width of the opening 117OP may correspond to the size / width of the emission region. Therefore, the size and / or width of the pixel PX may depend on the size and / or width of the opening 117OP of the bank layer 117.

[0179] The intermediate layer 220 may include an emission layer 222 formed to correspond to the pixel electrode 210. The emission layer 222 may include a polymer organic material or a low molecular weight organic material that emits light of a specific color. In another embodiment, the emission layer 222 may include an inorganic light emitting material or a quantum dot.

[0180] In an embodiment, the intermediate layer 220 may include a first functional layer 221 and a second functional layer 223 disposed below and on the emission layer 222, respectively. The first functional layer 221 may include a hole transport layer (HTL), or may include an HTL and a hole injection layer (HIL). The second functional layer 223 may be a component disposed on the emission layer 222, and may include an electron transport layer (ETL) and / or an electron injection layer (EIL). Similar to the common electrode 230 described below, the first functional layer 221 and / or the second functional layer 223 may be a common layer that completely covers the substrate 100.

[0181] The common electrode 230 may be disposed above the pixel electrode 210 and overlap the pixel electrode 210 in a plan view. The common electrode 230 may include a conductive material having a low work function. For example, the common electrode 230 may include a (semi) transparent layer including Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr, lithium (Li), Ca, etc., or an alloy thereof. In an embodiment, the common electrode 230 may also include a (semi) transparent layer including ITO, IZO, ZnO or In above the (semi) transparent layer including the above-mentioned materials. 2 O 3 The common electrode 230 may be integrally formed to completely cover the substrate 100 .

[0182] The encapsulation layer 300 may be disposed on the display element layer DEL and cover the display element layer DEL. The encapsulation layer 300 may include at least one inorganic encapsulation layer and at least one organic encapsulation layer, and Fig.10 As shown in the embodiment of FIG. 1 , the encapsulation layer 300 may include a first inorganic encapsulation layer 310 , an organic encapsulation layer 320 , and a second inorganic encapsulation layer 330 , which are sequentially stacked.

[0183] The first inorganic encapsulation layer 310 and the second inorganic encapsulation layer 330 may each include at least one inorganic material of aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride. The organic encapsulation layer 320 may include a polymer-based material. The polymer-based material may include acrylic resin, epoxy resin, polyimide, polyethylene, etc. In an embodiment, the organic encapsulation layer 320 may include acrylate. The organic encapsulation layer 320 may be formed by curing a monomer or coating a polymer. The organic encapsulation layer 320 may have transparency.

[0184] Despite Fig.10 Although not shown in the figure, a touch sensor layer may be provided on the encapsulation layer 300, and an optical functional layer may be provided on the touch sensor layer. The touch sensor layer may obtain coordinate information based on external input (e.g., a touch event). The optical functional layer may reduce the reflectivity of light (external light) incident from the outside toward the display device, and / or improve the color purity of light emitted by the display device. In an embodiment, the optical functional layer may include a retarder and / or a polarizer. The retarder may be a film type or a liquid crystal coating type, and may include a λ / 2 retarder and / or a λ / 4 retarder. The polarizer may also be a film type or a liquid crystal coating type. A film type polarizer may include a stretched synthetic resin film, and a liquid crystal coating type polarizer may include liquid crystals in a specific arrangement. The retarder and the polarizer may also include a protective film.

[0185] The adhesive member may be disposed between the touch sensor layer and the optical function layer. As the adhesive member, a general adhesive member may be used, but is not limited thereto. The adhesive member may be a pressure sensitive adhesive (PSA).

[0186] Reference above Figures 1 to 8 The depicted display substrate DS may include at least one of a substrate 100 , a pixel circuit layer PCL, a display element layer DEL, and an encapsulation layer 300 .

[0187] Fig.11 is a schematic diagram of an equivalent circuit of a pixel of a display panel according to an embodiment.

[0188] Each pixel PX may include a pixel circuit PC and a display element (e.g., an organic light emitting diode OLED) connected to the pixel circuit PC. The pixel circuit PC may include a first thin film transistor T1, a second thin film transistor T2, and a storage capacitor Cst. Each pixel PX may emit, for example, red light, green light, blue light, or white light through the organic light emitting diode OLED.

[0189] The second thin film transistor T2 may be a switching thin film transistor, which may be connected to the scan line SL and the data line DL, and is configured to transfer a data voltage input from the data line DL to the first thin film transistor T1 based on a switching voltage input from the scan line SL. The storage capacitor Cst may be connected to the second thin film transistor T2 and the driving voltage line PLL, and stores a voltage corresponding to a difference between a voltage received from the second thin film transistor T2 and a first power supply voltage ELVDD supplied to the driving voltage line PLL.

[0190] The first thin film transistor T1 may be a driving thin film transistor, which may be connected to the driving voltage line PLL and the storage capacitor Cst, and controls the driving current flowing from the driving voltage line PLL through the organic light emitting diode OLED according to the voltage value stored in the storage capacitor Cst. The organic light emitting diode OLED may emit light having a brightness according to the driving current. An opposite electrode (e.g., a cathode) of the organic light emitting diode OLED may receive a second power supply voltage ELVSS.

[0191] Fig.11 The pixel circuit PC is shown to include two thin film transistors and one storage capacitor, but the present disclosure is not limited thereto. The number of thin film transistors and the number of storage capacitors may be changed differently according to the design of the pixel circuit PC. For example, in addition to the two thin film transistors mentioned above, the pixel circuit PC may also include four or more thin film transistors.

[0192] According to an embodiment, time and cost can be reduced when setting various design values ​​required to manufacture an optical device.

[0193] The above description is an example of the technical features of the present disclosure, and those skilled in the art to which the present disclosure belongs will be able to make various modifications and changes.Therefore, the embodiments of the present disclosure described above can be implemented separately or in combination with each other.

[0194] Therefore, the embodiments disclosed in the present disclosure are not intended to limit the technical spirit of the present disclosure, but to describe the technical spirit of the present disclosure, and the scope of the technical spirit of the present disclosure is not limited by these embodiments. The protection scope of the present disclosure should be interpreted by the attached claims, and should be interpreted as that all technical spirits within the equivalent scope are included in the scope of the present disclosure.

Claims

1. An apparatus for manufacturing an optical device, the optical device comprising a barrel portion and a first lens arranged in the barrel portion, the apparatus comprising: A light simulation unit, receiving an initial design value for the optical device and simulating light passing through the optical device; as well as The Monte Carlo simulation unit determines whether the initial design value is appropriate by using the Monte Carlo simulation.

2. The device according to claim 1, wherein: The light simulation unit comprises: an initial value input section receiving a first-first value and a first-second value for each of a plurality of first variables, the plurality of first variables being design variables of the optical device, the first-first value being an initial standard dimension, and the first-second value being an initial tolerance value; and an ideal light value extracting section that extracts an ideal second-first value of a second variable for light passing through the optical device, the ideal second-first value expected to be obtained when the optical device is manufactured with the first-first value and the first-second value for each of the plurality of first variables, and The Monte Carlo simulation unit comprises: a random value extraction unit that randomly extracts a first-31 value and a first-32 value for each of the plurality of first variables, wherein an absolute value of each of the first-31 value and the first-32 value is smaller than an absolute value of the first-second value; a first situation extracting section, for each of the plurality of first variables, extracting a second -21 value of the second variable, the second -21 value expected to be obtained when the optical device is manufactured under a first situation in which the standard dimension is the first -first value and the design error is the first -31 value; a second case extracting section, for each of the plurality of first variables, extracting a second -22 value of the second variable, the second -22 value expected to be obtained when the optical device is manufactured in a second case where the standard dimension is the first - first value and the design error is the first -32 value; a case selection unit, which selects one of the first case and the second case by determining a value closer to the ideal second-first value between the second-21 value and the second-22 value; a spot size extraction section that extracts a spot size of light that has passed through the optical device for the one of the first case and the second case selected by the case selection section; a uniformity calculation section that calculates uniformity of a spot size of light that has passed through the optical device; and A determination section determines whether the first-first value and the first-second value are appropriate based on the uniformity calculated by the uniformity calculation section.

3. The device according to claim 2, wherein: The light spot size extraction section extracts the light spot size of the light having passed through the optical device in a first direction and the light spot size of the light having passed through the optical device in a second direction intersecting the first direction, and The uniformity calculation unit comprises: a first size value calculation unit, which calculates a first size value, wherein the first size value is a larger value between a maximum value of the light spot size in the first direction and a maximum value of the light spot size in the second direction; a second size value calculation unit that calculates a second size value, the second size value being a smaller value between a minimum value of the light spot size in the first direction and a minimum value of the light spot size in the second direction; and The deviation calculation unit calculates a deviation between each of the first size value and the second size value.

4. The device according to claim 3, wherein: The determination section further determines that the first-first value and the first-second value are appropriate if the deviation is within a range from 0 to a specified value.

5. The device according to claim 2, wherein: The plurality of first variables include at least one of a curvature of the first lens, a center thickness of the first lens, and a diameter of the first lens.

6. The device according to claim 2, wherein: The multiple first variables include at least one of an angle at which the first lens is tilted from the barrel portion, a distance from a central axis of the barrel portion to a center of the first lens, a distance from an opening portion of the barrel portion to the first lens, and a diameter of the opening portion of the barrel portion.

7. The device according to claim 2, wherein: The second variable comprises the light spot root mean square radius.

8. The device according to claim 2, wherein: The second variable includes a root mean square wavefront aberration value.

9. A method for manufacturing an optical device, the optical device comprising a barrel portion and a first lens arranged in the barrel portion, the method comprising: a light simulation operation, receiving initial design values ​​for the optical device and simulating light passing through the optical device; as well as The Monte Carlo simulation operation determines whether the initial design values ​​are appropriate by using Monte Carlo simulation.

10. The method according to claim 9, wherein: The light simulation operation includes: an initial value input operation of receiving a first-first value and a first-second value for each of a plurality of first variables, the plurality of first variables being design variables of the optical device, the first-first value being an initial standard dimension, and the first-second value being an initial tolerance value; and an ideal light value extraction operation of extracting an ideal second-first value for a second variable of light passing through the optical device, the ideal second-first value expected to be obtained when the optical device is manufactured with the first-first value and the first-second value for each of the plurality of first variables, and The Monte Carlo simulation operation includes: a random value extraction operation of randomly extracting a first-31 value and a first-32 value for each of the plurality of first variables, wherein an absolute value of each of the first-31 value and the first-32 value is smaller than an absolute value of the first-second value; A first case extraction operation, for each of the plurality of first variables, extracting a second -21 value of the second variable, the second -21 value expected to be obtained when the optical device is manufactured in a first case where the standard dimension is the first -first value and the design error is the first -31 value; a second case extraction operation, for each of the plurality of first variables, extracting a second -22 value of the second variable, the second -22 value expected to be obtained when the optical device is manufactured in a second case where the standard dimension is the first - first value and the design error is the first -32 value; a case selection operation of selecting one of the first case and the second case by determining a value closer to the ideal second-first value among the second-21 value and the second-22 value; a light spot size extraction operation of extracting a light spot size of light having passed through the optical device for the one of the first case and the second case selected in the case selection operation; a uniformity calculation operation of calculating uniformity of a spot size of light that has passed through the optical device; and A determining operation of determining whether the first-first value and the first-second value are appropriate based on the uniformity calculated in the uniformity calculating operation.

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