A calibration and repair method and device for a planar carrier plate of an exposure machine

Abstract

The present invention discloses a calibration and repair method and device for a planar carrier plate of an exposure machine. The present invention relates to the technical field of exposure machines; it includes scanning the planar carrier plate of the exposure machine and obtaining the position to be repaired on the planar carrier plate of the exposure machine; moving the calibration and repair device to the position to be repaired; drilling the bumps at the position to be repaired according to a preset aperture, and simultaneously collecting the waste materials and dust generated during drilling; sending a replacement part to directly above the drilled hole corresponding to the position to be repaired and pressing it into the drilled hole; after the repair is completed, re-scanning and re-inspecting are carried out. The present invention can quickly locate and repair the bump problem on the planar carrier plate of the exposure machine, without the need for overall disassembly, with short repair time and high repair efficiency; waste materials and dust are collected in a timely manner during the drilling process, avoiding pollution to the working environment and equipment, without the need to replace the entire planar carrier plate, reducing the repair cost, and helping to improve the service life and stability of the equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of exposure machines, and specifically to a method and device for correcting and repairing a planar carrier plate of an exposure machine. Background Art

[0002] The planar carrier plate of an exposure machine is a key component in the exposure machine, which is used to carry the planar carrier plate of the glass and absorb some spectra. The sizes of the glass it carries are different. The weight of the planar carrier plate is generally more than one ton, and it is made of aluminum or ceramic materials. There are many pure black square or circular convex points (about 0.3 - 0.5 mm in height) on the flat carrier plate.

[0003] After the planar carrier plate is used for a long time, the convex points will be worn, resulting in glass reflection or poor exposure. Most existing manufacturers cannot repair it by themselves. They need to remove the entire planar carrier plate and return it to the factory for overall replacement and repair. This repair method leads to repair monopoly, making it difficult for most manufacturers to repair by themselves. Returning it to the factory for repair is also time-consuming and laborious. Therefore, in view of this problem, the present invention provides a method and device for correcting and repairing a planar carrier plate of an exposure machine. Summary of the Invention

[0004] The purpose of the present invention is to propose a method and device for correcting and repairing a planar carrier plate of an exposure machine in order to solve the problems mentioned in the above background art.

[0005] The purpose of the present invention can be achieved by the following technical solutions:

[0006] In the first aspect, the present invention provides a method for correcting and repairing a planar carrier plate of an exposure machine, including the following steps:

[0007] Scan the planar carrier plate of the exposure machine and obtain the position to be repaired on the planar carrier plate of the exposure machine;

[0008] Move the correction and repair device to the position to be repaired;

[0009] Repair the position to be repaired;

[0010] After the repair is completed, perform a re-scan for re-inspection.

[0011] As a preferred embodiment of the present invention, the specific process of repairing the position to be repaired is as follows:

[0012] Drill holes in the convex points at the position to be repaired by the correction and repair device according to a preset aperture, and collect the waste materials and dust generated during the drilling at the same time;

[0013] Send the replacement part to directly above the hole corresponding to the position to be repaired and press it into the hole.

[0014] As a preferred embodiment of the present invention, the specific process of repairing the position to be repaired is as follows:

[0015] The glue injection repair is carried out on the position to be repaired through a calibration repair device.

[0016] As a preferred embodiment of the present invention, the specific process of drilling the bumps at the position to be repaired through a calibration repair device according to a preset aperture and simultaneously collecting the waste materials and dust generated during drilling is as follows:

[0017] Install the two Y-direction displacement components on both sides of the exposure machine flat plate. Then, through the Z-direction displacement component, the scanning unit is sent to the corresponding position above the exposure machine flat plate. Then, the two Y-direction displacement components and the X-direction displacement component drive the scanning unit to move, so that the scanning unit performs a planar scan on the exposure machine flat plate and records the position to be repaired. After the scan is completed, the laser drilling component is successively moved to the corresponding position of the position to be repaired. Then, the laser is used to drill the bumps at the position to be repaired. At the same time, the laser vaporizes the bumps to obtain waste materials and dust. Then, the waste materials and dust inside the dust suction cover are sucked out through the dust suction pipe by a vacuum cleaner; after drilling is completed, the laser drilling component is removed from the Z-direction displacement component, and the pressing component and the feeding component are installed on the Z-direction displacement component. Then, through the two Y-direction displacement components, the X-direction displacement component and the Z-direction displacement component, the pressing component is driven to the corresponding position above the drill hole. Then, the first cylinder works, and the first cylinder drives the pressing terminal to move downward through the piston rod, and presses the replacement part into the corresponding drill hole to complete the repair; then, the motor drives the feeding rack to rotate, so that the next feeding unit with the replacement part is located directly below the pressing terminal; then, when the feeding unit without the replacement part moves to directly below the storage through hole, the replacement part inside the storage through hole falls into the feeding unit for the next repair.

[0018] As a preferred embodiment of the present invention, the specific process of injecting glue to repair the position to be repaired through a calibration repair device is as follows: The glue spraying head is driven downward by the second cylinder, so that the bump model groove is stuck on the bump to be repaired. Then, the transfer pump is started, and the transfer pump sends the glue material inside the storage tank into the material hole through the material conveying pipe and then flows into the bump model groove. After the glue material solidifies, the repair is completed.

[0019] In a second aspect, the present invention provides a calibration repair device for an exposure machine flat plate, including two Y-direction displacement components installed on both sides of the exposure machine flat plate, an X-direction displacement component installed on the two Y-direction displacement components, a Z-direction displacement component installed on the X-direction displacement component, and a scanning unit installed at the bottom of the Z-direction displacement component. The scanning unit is used to scan the exposure machine flat plate.

[0020] As a preferred embodiment of the present invention, a laser drilling assembly is installed on the Z-direction displacement assembly. The laser drilling assembly is used for laser drilling on the bumps at the positions to be repaired on the flat plate of the exposure machine. After the laser drilling assembly is removed from the Z-direction displacement assembly, a pressing-in assembly is installed on the Z-direction displacement assembly, and a feeding assembly is installed on one side of the pressing-in assembly. The pressing-in assembly is used for pressing a replacement part into the drilled hole, and the feeding assembly is used for sending the replacement part to directly above the drilled hole.

[0021] As a preferred embodiment of the present invention, the laser drilling assembly includes a laser, a dust suction hood, and a dust suction pipe. The dust suction hood is installed outside the laser, and one end of the dust suction pipe is installed on the dust suction hood. The pressing-in assembly includes a first cylinder mounting plate, a first cylinder, and a pressing-in terminal. The first cylinder mounting plate is provided with the first cylinder, and the bottom end of the piston rod of the first cylinder is installed with the pressing-in terminal. The feeding assembly includes a motor, an arc-shaped storage plate, and a feeding rack. The output shaft end of the motor is fixedly connected to the center of the upper end surface of the feeding rack. One side of the motor is connected to the side wall of the arc-shaped storage plate through a connecting rod. A number of storage through holes are provided on the arc-shaped storage plate. A number of part placement units are installed on the feeding rack, and the part placement units are used for placing replacement parts. The top end of the motor is fixedly connected to the first cylinder through a fixing member.

[0022] As a preferred embodiment of the present invention, a rectangular groove is provided inside the part placement unit, and movable plates are symmetrically installed inside the rectangular groove. Semi-circular grooves are provided on both movable plates, and the centers of the two semi-circular grooves coincide. Two elastic support members are installed between the bottoms of the two movable plates and the corresponding side walls of the rectangular groove. The elastic support members are used for supporting the movable plates and resetting them after being pressed.

[0023] As a preferred embodiment of the present invention, a glue spraying assembly is installed on the Z-direction displacement assembly. The glue spraying assembly includes a second cylinder mounting plate, a second cylinder, a storage tank, a transfer pump, a feed pipe, and a glue spraying head. The second cylinder mounting plate is installed on the Z-direction displacement assembly through bolts. The second cylinder is installed on the second cylinder mounting plate. A storage tank is installed on one side of the second cylinder. A transfer pump is installed at the bottom of the storage tank. The feed pipe is installed on the transfer pump. The bottom end of the piston rod of the second cylinder is installed with the glue spraying head. The glue spraying head is connected to the transfer pump through the feed pipe. A bump model groove is provided at the center inside the glue spraying head, and a material hole is provided above the bump model groove.

[0024] Compared with the prior art, the beneficial effects of the present invention are:

[0025] 1. Through clear steps and processes, the bump problems on the flat plate of the exposure machine can be quickly located and repaired without overall disassembly, with short repair time and high repair efficiency.

[0026] 2. During the drilling process, waste materials and dust can be collected in a timely manner, which can avoid pollution to the working environment and equipment.

[0027] 3. Unnecessary replacement of the entire planar carrier plate reduces the repair cost and helps to extend the service life and stability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] For the convenience of those skilled in the art to understand, the present invention will be further described below in conjunction with the accompanying drawings.

[0029] Figure 1 is the flowchart of the method of the present invention;

[0030] Figure 2 is the installation schematic diagram of the laser drilling assembly of the present invention;

[0031] Figure 3 is the installation schematic diagram of the laser of the present invention;

[0032] Figure 4 is the installation schematic diagram of the press-in assembly of the present invention;

[0033] Figure 5 is the structural schematic diagram of the press-in assembly of the present invention;

[0034] Figure 6 is the structural schematic diagram of the feeding assembly of the present invention;

[0035] Figure 7 is the structural schematic diagram of the blanking unit of the present invention;

[0036] Figure 8 is the bottom structural schematic diagram of the blanking unit of the present invention;

[0037] Figure 9 is the drilling processing schematic diagram of the present invention;

[0038] Figure 10 is the installation schematic diagram of the glue spraying assembly of the present invention;

[0039] Figure 11 is the structural schematic diagram of the glue spraying assembly of the present invention;

[0040] Figure 12 is the cross-sectional view of the structure of the glue spraying head of the present invention;

[0041] Figure 13 is the schematic diagram before and after glue spraying of the present invention.

[0042] Reference Signs:

[0043] 1. Y-direction displacement component; 2. X-direction displacement component; 3. Z-direction displacement component; 4. Laser drilling component; 5. Scanning unit; 6. Pressing-in component; 7. Feeding component; 8. Replacement part; 9. Exposure machine flat carrier plate; 41. Laser; 42. Dust suction hood; 43. Dust suction pipe; 61. Cylinder mounting plate 1; 62. Cylinder 1; 63. Pressing-in terminal; 64. Fixing part; 71. Motor; 72. Arc-shaped storage plate; 73. Storage through-hole; 74. Feeding rack; 75. Feeding unit; 751. Rectangular groove; 752. Movable plate; 753. Semi-circular groove; 754. Elastic support; 10. Glue spraying component; 101. Cylinder mounting plate 2; 102. Cylinder 2; 103. Storage tank; 104. Delivery pump; 105. Feed pipe; 106. Glue spraying head; 107. Material hole; 108. Convex point model groove. Detailed implementation manners

[0044] The technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0045] Embodiment 1

[0046] Please refer to Figure 1 As shown, a calibration and repair method for the exposure machine flat carrier plate includes the following steps:

[0047] Step 1: Scan the exposure machine flat carrier plate and obtain the position to be repaired on the exposure machine flat carrier plate;

[0048] Step 2: Move the calibration and repair device to the position to be repaired;

[0049] Step 3: Drill holes in the convex points at the position to be repaired according to a preset hole diameter, and collect the waste materials and dust generated during drilling at the same time;

[0050] Step 4: Send the replacement part to directly above the hole corresponding to the position to be repaired and press it into the hole;

[0051] Step 5: After the repair is completed, perform a re-scanning and re-inspection.

[0052] Embodiment 2

[0053] Please refer to Figures 2 - 4As shown in the figure, a calibration and repair device for the flat carrier plate of an exposure machine includes two Y-direction displacement components 1 installed on both sides of the flat carrier plate 9 of the exposure machine. An X-direction displacement component 2 is installed on the two Y-direction displacement components 1. The two ends of the X-direction displacement component 2 are slidably installed on the two Y-direction displacement components 1, and the two Y-direction displacement components 1 drive the X-direction displacement component 2 to move in the Y direction. An Z-direction displacement component 3 is installed on the X-direction displacement component 2, and the X-direction displacement component 2 drives the Z-direction displacement component 3 to move in the X direction, thereby driving the laser drilling component 4 or the pressing component 6 or the glue spraying component 10 to move in the X direction.

[0054] A scanning unit 5 is installed at the bottom of the Z-direction displacement component 3. The scanning unit 5 is used to scan the flat carrier plate 9 of the exposure machine, including a uniformity instrument and a spectrometer, to scan several bumps on the surface of the flat carrier plate 9 of the exposure machine, and determine whether the bumps need to be repaired. Specifically: the three-dimensional shape of the bumps is obtained by scanning the bumps with the uniformity instrument, and the three-dimensional shape is compared with the standard shape of the bumps, and the deviation between the two is calculated. When the deviation is greater than the set threshold, it is determined that the bump is a bump to be repaired, and the coordinates of the bump to be repaired are marked as the position to be repaired. A laser drilling component 4 is installed on the Z-direction displacement component 3. The Z-direction displacement component 3 is used to drive the laser drilling component 4 to move up and down. The laser drilling component 4 is used to laser drill the bumps at the position to be repaired on the flat carrier plate 9 of the exposure machine; after the laser drilling component 4 is removed from the Z-direction displacement component 3, a pressing component 6 is installed on the Z-direction displacement component 3, and a feeding component 7 is installed on one side of the pressing component 6; the pressing component 6 presses the replacement part 8 into the drilled hole, and the feeding component 7 sends the replacement part 8 to directly above the drilled hole.

[0055] Please refer to Figure 4 As shown in the figure, the laser drilling component 4 includes a laser 41, a dust suction hood 42 and a dust suction pipe 43. The dust suction hood 42 is installed outside the laser 41. One end of the dust suction pipe 43 is installed on the dust suction hood 42, and the other end of the dust suction pipe 43 is connected to a vacuum cleaner (not shown in the figure). The laser 41 is used to laser drill the bumps at the position to be repaired on the flat carrier plate 9 of the exposure machine. At the same time, the bumps and a part of the flat carrier plate 9 are vaporized by the laser to obtain waste materials and dust, and then the waste materials and dust inside the dust suction hood 42 are sucked out through the dust suction pipe 43 by the vacuum cleaner.

[0056] Please refer to Figure 5 As shown in the figure, the pressing component 6 includes a first cylinder mounting plate 61, a first cylinder 62 and a pressing terminal 63. The first cylinder 62 is installed on the first cylinder mounting plate 61, and the bottom end of the piston rod of the first cylinder 62 is installed with the pressing terminal 63. The specific working process of the pressing component 6 is as follows: the first cylinder 62 works, drives the pressing terminal 63 to move downward through the piston rod, and then presses the replacement part 8 into the corresponding drilled hole (as Figure 9 shown in the figure).

[0057] Please refer to Figure 6 As shown, the feeding component 7 includes a motor 71, an arc-shaped storage plate 72 and a feeding rack 74. The output shaft end of the motor 71 is fixedly connected to the center of the upper end surface of the feeding rack 74. One side of the motor 71 is connected to the side wall of the arc-shaped storage plate 72 through a connecting rod 76. A number of storage through holes 73 are provided on the arc-shaped storage plate 72. A number of feeding units 75 are installed on the feeding rack 74, and the feeding units 75 are used to place the replacement parts 8. The top of the motor 71 is fixedly connected to the first cylinder 62 through a fixing member 64.

[0058] Please refer to Figures 7 - 8 As shown, a rectangular groove 751 is provided inside the feeding unit 75. Two movable plates 752 are symmetrically installed inside the rectangular groove 751. Semi-circular grooves 753 are provided on both of the two movable plates 752, and the centers of the two semi-circular grooves 753 coincide. Two elastic support members 754 are installed on the bottom of the two movable plates 752 and the corresponding side walls of the rectangular groove 751. The elastic support members 754 are used to support the movable plates 752 and reset them after being pressed.

[0059] When the present invention is in use, the specific process is as follows:

[0060] Install two Y-direction displacement components 1 on both sides of the exposure machine flat plate 9 respectively. Then, use the Z-direction displacement component 3 to send the scanning unit 5 to the corresponding position above the exposure machine flat plate 9. Then, drive the scanning unit 5 to move through the two Y-direction displacement components 1 and the X-direction displacement component 2, so that the scanning unit 5 performs a planar scan on the exposure machine flat plate 9 and records the positions to be repaired. After the scanning is completed, move the laser drilling component 4 to the corresponding positions of the positions to be repaired in sequence. Then, use the laser 41 to drill the bumps at the positions to be repaired. At the same time, the laser vaporizes the bumps to obtain waste materials and dust. Then, use a vacuum cleaner to suck out the waste materials and dust inside the dust suction hood 42 through the dust suction pipe 43. After the drilling is completed, remove the laser drilling component 4 from the Z-direction displacement component 3 and install the pressing component 6 and the feeding component 7 on the Z-direction displacement component 3. Then, drive the pressing component 6 to the corresponding position above the drilling through the two Y-direction displacement components 1, the X-direction displacement component 2 and the Z-direction displacement component 3. Then, the first cylinder 62 works. The first cylinder 62 drives the pressing terminal 63 to move downward through the piston rod, and presses the replacement part 8 into the corresponding drilling hole to complete the repair. Then, the motor 71 drives the feeding frame 74 to rotate, so that the next feeding unit 75 with the replacement part 8 is located directly below the pressing terminal 63. Then, when the feeding unit 75 without the replacement part 8 moves to directly below the storage through hole 73, the replacement part 8 inside the storage through hole 73 falls into the feeding unit 75 for the next repair. Among them, when the pressing terminal 63 presses the replacement part 8 into the drilling hole, the pressing terminal 63 will squeeze the two movable plates 752 to move downward, so that the replacement part 8 can better fall into the drilling hole. After the pressing is completed, the two movable plates 752 are reset through the elastic support member 754, and then it is convenient to place the next replacement part 8.

[0061] Embodiment 3: A method for calibrating and repairing an exposure machine flat plate, comprising the following steps:

[0062] Step 1: Scan the exposure machine flat plate and obtain the positions to be repaired on the exposure machine flat plate;

[0063] Step 2: Move the calibration and repair device to the positions to be repaired;

[0064] Step 3: Perform glue injection repair on the positions to be repaired through the calibration and repair device;

[0065] Step 4: After the repair is completed, perform a re-scan for re-inspection.

[0066] Please refer to Figure 10As shown in the figure, the calibration and repair device includes two Y-direction displacement components 1 installed on both sides of the flat plate 9 of the exposure machine. An X-direction displacement component 2 is installed on the two Y-direction displacement components 1. The two ends of the X-direction displacement component 2 are slidably installed on the two Y-direction displacement components 1, and the two Y-direction displacement components 1 drive the X-direction displacement component 2 to move in the Y direction. A Z-direction displacement component 3 is installed on the X-direction displacement component 2, and the X-direction displacement component 2 drives the Z-direction displacement component 3 to move in the X direction, thereby driving the laser drilling component 4 or the pressing component 6 to move in the X direction. A scanning unit 5 is installed at the bottom of the Z-direction displacement component 3. The scanning unit 5 is used to scan the flat plate 9 of the exposure machine, including a uniformity instrument and a spectrometer, and is used to scan several bumps on the surface of the flat plate 9 of the exposure machine and determine whether the bumps need to be repaired. Specifically, the three-dimensional shape of the bump is obtained by scanning the bump with the uniformity instrument, and the three-dimensional shape is compared with the standard shape of the bump, and the deviation between the two is calculated. When the deviation is greater than the set threshold, it is determined that the bump is a bump to be repaired, and the coordinates of the bump to be repaired are marked as the position to be repaired. A glue spraying component 10 is installed on the Z-direction displacement component 3. The Z-direction displacement component 3 is used to drive the glue spraying component 10 to move up and down. The glue spraying component 10 is used to spray glue on the bumps at the positions to be repaired on the flat plate 9 of the exposure machine.

[0067] Please refer to Figures 11 - 12 As shown in the figure, the glue spraying component 10 includes a cylinder mounting plate two 101, a cylinder two 102, a storage tank 103, a delivery pump 104, a feed pipe 105 and a glue spraying head 106. The cylinder mounting plate two 101 is installed on the Z-direction displacement component 3 by bolts. A cylinder two 102 is installed on the cylinder mounting plate two 101. A storage tank 103 is installed on one side of the cylinder two 102. A delivery pump 104 is installed at the bottom of the storage tank 103. A feed pipe 105 is installed on the delivery pump 104. The bottom end of the piston rod of the cylinder two 102 is installed with a glue spraying head 106. The glue spraying head 106 is connected to the delivery pump 104 through the feed pipe 105. A bump model groove 108 is opened at the center of the inside of the glue spraying head 106, and a material hole 107 is opened above the bump model groove 108.

[0068] The specific process of the glue spraying component 10 spraying glue on the bumps at the positions to be repaired on the flat plate 9 of the exposure machine is as follows: The cylinder two 102 drives the glue spraying head 106 to move downward, so that the bump model groove 108 is stuck on the bump to be repaired. Then the delivery pump 104 is started, and the delivery pump 104 sends the glue material inside the storage tank 103 into the material hole 107 through the feed pipe 105, and then flows into the bump model groove 108. After the glue material solidifies, the repair is completed (as Figure 13 shown). The performance parameters corresponding to the glue material after solidification are the same as those of the bump.

[0069] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to only the specific embodiments. Obviously, many modifications and variations can be made according to the content of this specification. These embodiments are selected and specifically described in this specification in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can well understand and utilize the present invention. The present invention is only limited by the claims and their full scope and equivalents.

Claims

1. A calibration and repair method for a flat carrier plate of an exposure machine, characterized in that, Including the following steps: Scan the flat plate (9) of the exposure machine and obtain the position to be repaired on the flat plate (9) of the exposure machine; Move the calibration and repair device to the position to be repaired; Repair the position to be repaired; the specific process is as follows: Drill the bumps at the position to be repaired according to a preset aperture, and collect the waste materials and dust generated during drilling; Send the replacement part (8) to directly above the corresponding drilled hole at the position to be repaired and press it into the drilled hole; The specific process of drilling the bumps at the position to be repaired according to a preset aperture and collecting the waste materials and dust generated during drilling is as follows: Install two Y-direction displacement components (1) on both sides of the flat plate (9) of the exposure machine, then send the scanning unit (5) to the corresponding position above the flat plate (9) of the exposure machine through the Z-direction displacement component (3), and then drive the scanning unit (5) to move through the two Y-direction displacement components and the X-direction displacement component (2), so that the scanning unit (5) performs a planar scan on the flat plate (9) of the exposure machine and records the position to be repaired. After the scan is completed, move the laser drilling component (4) to the corresponding position of the position to be repaired in sequence, and then use the laser (41) to perform laser drilling on the bumps at the position to be repaired. At the same time, the laser vaporizes the bumps to obtain waste materials and dust, and then use a vacuum cleaner to suck out the waste materials and dust inside the dust suction hood (42) through the dust suction pipe (43); after drilling is completed, remove the laser drilling component (4) from the Z-direction displacement component (3) and install the pressing component (6) and the feeding component (7) on the Z-direction displacement component (3), and then drive the pressing component (6) to the corresponding position above the drilled hole through the two Y-direction displacement components, the X-direction displacement component (2) and the Z-direction displacement component (3), and then the first cylinder (62) works. The first cylinder (62) drives the pressing terminal (63) to move downward through the piston rod, presses the replacement part (8) into the corresponding drilled hole to complete the repair; then the motor (71) drives the feeding rack (74) to rotate, so that the next feeding unit (75) with the replacement part (8) placed on it is located directly below the pressing terminal (63); then when the feeding unit (75) without the replacement part (8) moves to directly below the storage through hole (73), the replacement part (8) inside the storage through hole (73) falls into the feeding unit (75) for the next repair; After the repair is completed, perform a re-scan for re-inspection.

2. The calibration and repair method for the flat carrier plate of an exposure machine according to claim 1, wherein The specific process of repairing the position to be repaired is as follows: Perform glue injection repair on the position to be repaired.

3. A calibration and repair method for a planar carrier plate of an exposure machine according to claim 2, characterized in that, The specific process of performing glue injection repair on the position to be repaired is as follows: Drive the glue spraying head (106) to move downward through the second cylinder (102), so that the bump model groove (108) is stuck on the bump to be repaired, and then start the delivery pump (104). The delivery pump (104) sends the glue material inside the storage tank (103) into the material hole (107) through the feed pipe (105), and then flows into the bump model groove (108). After the glue material solidifies, the repair is completed.

4. A correction and repair device for a flat carrier plate of an exposure machine, characterized in that, It includes two Y-direction displacement components (1) installed on both sides of the exposure machine flat plate (9). An X-direction displacement component (2) is installed on the two Y-direction displacement components (1). A Z-direction displacement component (3) is installed on the X-direction displacement component (2). A scanning unit (5) is installed at the bottom of the Z-direction displacement component (3), and the scanning unit (5) is used to scan the exposure machine flat plate (8). A laser drilling component (4) is installed on the Z-direction displacement component (3), and the laser drilling component (4) is used to perform laser drilling on the bumps at the positions to be repaired on the exposure machine flat plate (9). After the laser drilling component (4) is removed from the Z-direction displacement component (3), a pressing-in component (6) is installed on the Z-direction displacement component (3), and a feeding component (7) is installed on one side of the pressing-in component (6). The pressing-in component (6) is used to press the replacement part (8) into the drilled hole, and the feeding component (7) is used to send the replacement part (8) to directly above the drilled hole. The laser drilling component (4) includes a laser (41), a dust suction hood (42) and a dust suction pipe (43). The dust suction hood (42) is installed on the outside of the laser (41), and one end of the dust suction pipe (43) is installed on the dust suction hood (42). The pressing-in component (6) includes a cylinder mounting plate one (61), a cylinder one (62) and a pressing-in terminal (63). The cylinder one (62) is installed on the cylinder mounting plate one (61), and the bottom end of the piston rod of the cylinder one (62) is installed with the pressing-in terminal (63). The feeding component (7) includes a motor (71), an arc-shaped storage plate (72) and a feeding rack (74). The output shaft end of the motor (71) is fixedly connected to the center of the upper end surface of the feeding rack (74). One side of the motor (71) is connected to the side wall of the arc-shaped storage plate (72) through a connecting rod (76). A number of storage through holes (73) are provided on the arc-shaped storage plate (72). A number of blanking units (75) are installed on the feeding rack (74), and the blanking units (75) are used to place the replacement part (8). The top end of the motor (71) is fixedly connected to the cylinder one (62) through a fixing member (64).

5. The calibration and repair device for the planar carrier plate of an exposure machine according to claim 4, wherein, A rectangular groove (751) is provided inside the blanking unit (75). Movable plates (752) are symmetrically installed inside the rectangular groove (751). Semi-circular grooves (753) are provided on both of the two movable plates (752), and the centers of the two semi-circular grooves (753) coincide. Two elastic support members (754) are installed between the bottom of the two movable plates (752) and the corresponding side walls of the rectangular groove (751). The elastic support members (754) are used to support the movable plates (752) and make them reset after being pressed.

6. The correction and repair device for the planar carrier plate of an exposure machine according to claim 4, wherein A glue spraying component (10) is installed on the Z-direction displacement component (3). The glue spraying component (10) includes a second cylinder mounting plate (101), a second cylinder (102), a storage tank (103), a transfer pump (104), a feed pipe (105) and a glue spraying head (106). The second cylinder mounting plate (101) is installed on the Z-direction displacement component (3) by bolts. A second cylinder (102) is installed on the second cylinder mounting plate (101). A storage tank (103) is installed on one side of the second cylinder (102). A transfer pump (104) is installed at the bottom of the storage tank (103). A feed pipe (105) is installed on the transfer pump (104). The bottom end of the piston rod of the second cylinder (102) is installed with a glue spraying head (106). The glue spraying head (106) is connected to the transfer pump (104) through the feed pipe (105). A bump model groove (108) is formed at the center inside the glue spraying head (106), and a material hole (107) is formed above the bump model groove (108).

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