Micro-sized lens array machining device and method based on micro-forming tool

Abstract

The invention discloses a micron-sized lens array machining device and method based on a micro-forming tool, and relates to the technical field of micron-sized lens array machining, the micron-sized lens array machining device comprises an ultra-precision machine tool with a Y axis, a lifting tool rest and an arc tool, a vacuum chuck on the Y axis of the ultra-precision machine tool is used for installing a workpiece, and the lifting tool rest is used for installing the arc tool; the lifting tool rest can drive the arc tool to ascend and descend in the Y direction and enable the arc tool to machine the surface of a workpiece to form a micro-lens unit, and the ultra-precision machine tool can drive the workpiece to move in the X direction, the Y direction and the Z direction relative to the arc tool and enable the arc tool to machine the surface of the workpiece to form a micro-lens array. And the radius of a cutting edge of the arc cutter is equal to the curvature radius of the micro-lens unit. According to the invention, high-quality and high-uniformity micron-sized lens array processing can be realized.

Description

Technical Field

[0001] The present invention relates to the technical field of micron-level lens array processing, and in particular to a micron-level lens array processing device and method based on a micro-molding tool. Background Art

[0002] Microlens array is an optical element widely used in micro-optical systems, with excellent optical performance, compactness and simple structure. However, with the development of science and technology, its complex structure and the required high profile accuracy as well as the miniaturization of microlens units have brought major challenges to existing processing technology.

[0003] In the process of processing microlens arrays, the consistency and shape accuracy of the microlens arrays are important evaluation criteria. The existence of tool setting errors leads to a decrease in the processing quality of the microlens arrays, and even causes processing failure. Therefore, the key technical difficulty of high-quality and high-consistency ultra-precision processing of microlens arrays is how to reduce tool setting errors and ensure the processing path of each microlens unit. To solve this problem, the use of B-axis swing processing is a way to reduce the impact of cutting paths on the processing of smaller-sized microlens arrays. B-axis swing processing refers to the installation position of the arc tool rotated 90° around the Z axis compared to the traditional installation position and installed on a specific tool holder fixed to the B axis. The linkage between the B axis and the Z axis realizes real-time monitoring of the tool position, and the linkage between the X axis and the C axis realizes the positioning of the microlens unit. Relying on the B-axis swing processing method, the problem of microlens array shape distortion caused by tool setting errors is solved. However, B-axis swing processing still requires precise tool setting, otherwise it will cause deformation of the adjacent positions of the microlens array. Summary of the invention

[0004] The purpose of the present invention is to provide a micron-level lens array processing device and method based on a micro-molding tool, so as to solve the problems existing in the above-mentioned prior art and realize high-quality and high-uniformity micron-level lens array processing.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] The present invention provides a micron-level lens array processing device based on a micro-molding tool, comprising an ultra-precision machine tool including a Y-axis, a lifting tool holder and an arc tool, wherein the vacuum suction cup on the Y-axis of the ultra-precision machine tool is used to install a workpiece, and the lifting tool holder is used to install the arc tool, the lifting tool holder can drive the arc tool to rise and fall along the Y direction, and enable the arc tool to process the surface of the workpiece to form a microlens unit, the ultra-precision machine tool can drive the workpiece to move along the X direction, the Y direction and the Z direction compared with the arc tool, and enable the arc tool to process the surface of the workpiece to form a microlens array, and the cutting edge radius of the arc tool is equal to the curvature radius of the microlens unit.

[0007] Preferably, the ultra-precision machine tool includes an X-axis, a Y-axis, a Z-axis and a C-axis, the X-axis, the Y-axis and the Z-axis are linear axes, the C-axis is a rotational axis, the Z-axis can translate along the Z direction, the X-axis is connected to the lower end of the Y-axis and can drive the Y-axis to translate along the X direction, the Y-axis is connected to the C-axis and can drive the C-axis to rise and fall along the Y direction, and the C-axis is connected to a workpiece.

[0008] Preferably, the lifting tool holder is fixedly mounted on the Z-axis and arranged opposite to the Y-axis.

[0009] Preferably, the Z-axis and the X-axis, the X-axis and the Y-axis stage, and the Y-axis and the C-axis are all movably connected.

[0010] Preferably, a clamp for clamping a workpiece is provided on the C-axis.

[0011] Preferably, the cutting edge waviness of the arc tool is less than 50 nm.

[0012] Preferably, the arc tool is made of diamond material.

[0013] The present invention also provides a micron-level lens array processing method based on a micro-molding tool, using a micron-level lens array processing device based on a micro-molding tool as described in any one of the above technical solutions, comprising the following steps:

[0014] S1. Calculate the machining trajectory points, calculate the machining trajectory points of the arc tool according to the design parameters of the microlens array, write a machining program, and ensure that the machining trajectory radius of the arc tool, the cutting edge radius of the arc tool and the curvature radius of the microlens unit are the same;

[0015] S2. Ensure that the workpiece surface is flat. After the arc tool is roughly aligned, the workpiece surface is roughly machined with the arc tool to eliminate the tilt error, obtain a workpiece with a flat surface, and set the workpiece surface as Z0 of the programming coordinate system;

[0016] S3. Processing the microlens unit, moving the cutting edge of the arc tool to the edge coordinate P0 (X0, Y0, Z0) of the first microlens unit to be processed, realizing the linkage between the Y axis and the Z axis through the ultra-precision machine tool, and completing the processing of a single microlens unit according to the processing program written in S1;

[0017] S4. Process the microlens array. According to the design requirements of the microlens array, the workpiece is first offset n times in the Y direction driven by the ultra-precision machine tool to realize the processing of a single-row microlens unit. After completing the processing of the single-row microlens unit, it is moved in the X direction until the processing process of the single-row microlens unit is repeated n times, and a microlens array that meets the design requirements is obtained.

[0018] Preferably, in S3, the first microlens unit to be processed is located at the lower left corner of the workpiece, and the edge coordinate P0 (X0, Y0, Z0) of the first microlens unit to be processed is the lowermost end of the first microlens unit to be processed.

[0019] Preferably, in S4, the arc tool processes the microlens array on the workpiece surface in the following order: the arc tool takes P0 (X0, Y0, Z0) as the starting point, and sequentially cuts the microlens units in the first column from bottom to top, then the arc tool retracts along the Z axis, and moves from top to bottom to the bottom of the first column of microlens units, then the arc tool feeds along the X axis until it reaches the bottom of the second column of microlens units, and sequentially cuts the microlens units in the second column from bottom to top, and this process is repeated until the nth column of microlens units is cut, thereby finally obtaining a microlens array.

[0020] Compared with the prior art, the present invention has achieved the following technical effects:

[0021] The micron-level lens array processing device and method based on the micro-molding tool provided by the present invention can be applied to an ultra-precision machine tool with a Y-axis, the vacuum suction cup on the Y-axis is used to install the workpiece, the lifting tool holder is used to install the arc tool, the lifting tool holder can drive the arc tool to rise and fall along the Y direction, and make the arc tool process the workpiece surface to form a microlens unit, the ultra-precision machine tool can drive the workpiece to move along the X direction, the Y direction and the Z direction compared with the arc tool, and make the arc tool process the workpiece surface to form a microlens array, because the procedure for processing each microlens unit is the same, and the shape of the arc tool processed thereon is the same, therefore, the microlens array can be effectively improved. At the same time, since the arc tool no longer needs to rotate during the processing, the problems caused by the tool setting error are effectively avoided, the shape distortion of the microlens array caused by the tool setting error is avoided, and the shape accuracy of the microlens array is effectively improved. The cutting edge radius of the arc tool is equal to the curvature radius of the microlens unit, and the processing of a single microlens unit can be completed through one feed. Compared with the traditional slow tool servo processing method, it can effectively reduce the tool cutting distance, reduce or avoid tool wear, save processing time and processing costs, and finally achieve high-quality and high-uniformity processing of the microlens array. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1It is a structural schematic diagram of a micron-level lens array processing device based on a micro-molding tool in Example 1;

[0024] Figure 2 A diagram showing the machining trajectory of the arc tool when machining a single microlens unit in Example 2;

[0025] Figure 3 The moving trajectory diagram of the arc tool when processing the microlens array in the second embodiment;

[0026] In the figure: 1-X axis, 2-Y axis, 3-Z axis, 4-C axis, 5-lifting tool holder, 6-workpiece, 7-arc tool, 8-microlens unit. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] The purpose of the present invention is to provide a micron-level lens array processing device and method based on a micro-molding tool, so as to solve the problems existing in the prior art and achieve high-quality and high-uniformity micron-level lens array processing.

[0029] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] Embodiment 1

[0031] like Figure 1As shown, the present embodiment provides a micron-level lens array processing device based on a micro-molding tool, including an ultra-precision machine tool with a Y-axis, a lifting tool holder 5 and an arc tool 7, wherein the position accuracy of the ultra-precision machine tool is 1 arc second, and the feedback resolution is 0.01 arc second. The ultra-precision machine tool is used to install a workpiece 6, and the lifting tool holder 5 is used to install the arc tool 7. The lifting tool holder 5 can drive the arc tool 7 to rise and fall along the Y direction, and the arc tool 7 processes the surface of the workpiece 6 to form a microlens unit 8. The ultra-precision machine tool can drive the workpiece 6 to move along the X direction, the Y direction and the Z direction compared to the arc tool 7, and the arc tool 7 processes the surface of the workpiece 6 to form a microlens array. Since the procedure for processing each microlens unit 8 is the same, and the processing thereof is performed The shape of the arc tool 7 is the same as that of the microlens unit 8, so the processing accuracy and consistency of the microlens array can be effectively improved. At the same time, since the arc tool 7 no longer needs to rotate during the processing, the problems caused by the tool setting error are effectively avoided, and the shape distortion of the microlens array caused by the tool setting error is avoided, and the shape accuracy of the microlens array is effectively improved. The cutting edge radius of the arc tool 7 is equal to the curvature radius of the microlens unit 8, and the processing of a single microlens unit 8 can be completed by one feed. Compared with the traditional slow tool servo processing method, the tool cutting distance can be effectively reduced, the tool wear can be reduced or avoided, the processing time and processing cost can be saved, and finally the microlens array can be processed with high quality and high uniformity.

[0032] Specifically, the ultra-precision machine tool includes an X-axis 1, a Y-axis 2, a Z-axis 3 and a C-axis 4. The X-axis 1, the Y-axis 2 and the Z-axis 3 are linear axes, the C-axis 4 is a rotational axis, the Z-axis 3 translates along the Z direction, the X-axis 1 is connected to the lower end of the Y-axis 2, and can drive the Y-axis 2 to translate along the X direction, the Y-axis 2 is connected to the C-axis 4, and can drive the C-axis 4 to rise and fall along the Y direction, the C-axis 4 is connected to the workpiece 6, and then through the multi-directional movement of the workpiece 6, the multi-directional displacement of the arc tool 7 relative to the workpiece 6 is realized, and the C-axis is the machine tool spindle.

[0033] The lifting tool holder 5 can drive the arc tool 7 to move up and down within a small range, and thus can adjust the horizontality of the arc tool 7 and the microlens unit 8 .

[0034] The lifting tool holder 5 is fixedly mounted on the Z axis 3 and arranged opposite to the Y axis 2, so that the arc tool 7 can process a single microlens unit 8 through relative displacement of the Z axis.

[0035] The Z axis 3 and the X axis 1, the X axis 1 and the Y axis 2, and the Y axis 2 and the C axis 4 are all movably connected to improve the movement stability. In this embodiment, the ultra-precision machine tool can be an ultra-precision five-axis machine tool, and other forms of machine tools can also be used as long as they can meet the use requirements.

[0036] The C-axis 4 is provided with a fixture for clamping the workpiece 6 to improve the stability of the workpiece 6 during the cutting process and ensure the cutting accuracy.

[0037] The cutting edge waviness of the arc tool 7 is less than 50 nm, which ensures the surface shape of the microlens array and realizes the processing of the microlens array with high precision.

[0038] The arc cutter 7 is made of diamond material.

[0039] Embodiment 2

[0040] like Figure 2-Figure 3 As shown, this embodiment provides a micron-level lens array processing method based on a micro-molding tool, using the micron-level lens array processing device based on a micro-molding tool in Embodiment 1, comprising the following steps:

[0041] S1. Calculation of machining trajectory points: Calculate the machining trajectory of the arc tool 7 according to the design parameters of the microlens array, write a machining program, and ensure that the machining trajectory radius of the arc tool 7, the cutting edge radius of the arc tool 7 and the curvature radius of the microlens unit 8 are the same; in this step, a reasonable number of machining trajectory positioning points are obtained through calculation software, and the calculation method is a conventional mature technology;

[0042] S2. Ensure that the surface of the workpiece 6 is flat. After the arc tool 7 is roughly aligned, the arc tool 7 is used to rough-process the surface of the workpiece 6 to eliminate the tilt error, obtain a flat surface of the workpiece 6, and set the surface of the workpiece 6 to Z0 of the programming coordinate system;

[0043] S3. Processing the microlens unit 8, moving the cutting edge of the arc tool 7 to the edge coordinate P0 (X0, Y0, Z0) of the first microlens unit 8 to be processed, realizing the linkage between the Y axis and the Z axis through the ultra-precision machine tool, and completing the processing of a single microlens unit 8 according to the processing program written in S1, such as Figure 2 As shown, the dotted line in the figure represents the processing trajectory of the arc tool 7 when processing a single microlens unit 8;

[0044] S4. Processing the microlens array. According to the design requirements of the microlens array, the workpiece 6 is first shifted n times in the Y direction under the drive of the ultra-precision machine tool to realize the processing of a single-row microlens unit 8. After the processing of the single-row microlens unit 8 is completed, it is moved in the X direction until the processing process of the single-row microlens unit 8 is repeated n times, and a microlens array that meets the design requirements is obtained. Figure 3 As shown in the figure, the solid line and dotted line with arrows represent the trajectory of the arc tool 7 when continuously processing multiple microlens units 8, wherein the solid line represents the trajectory during actual processing, and the dotted line represents the trajectory when the tool is retracted.

[0045] This embodiment adopts the above-mentioned processing method to process the microlens array, abandons the use of the C-axis, directly avoids the tool error transmission caused by the rotation of the C-axis, and eliminates the problems of poor positioning accuracy, reduced processing accuracy, shape distortion, etc. caused by the existence of the tool error; at the same time, it effectively reduces the cutting distance of the arc tool 7, reduces or avoids tool wear, and thus avoids processing quality problems caused by tool wear, and also avoids the need for mid-process tool change due to tool wear, thereby avoiding waste of resources and saving time and cost.

[0046] Specifically, in S3 , the first microlens unit 8 to be processed is located at the lower left corner of the workpiece 6 , and the edge coordinate P0 (X0 , Y0 , Z0 ) of the first microlens unit 8 to be processed is the lowermost end of the first microlens unit 8 to be processed.

[0047] In S4, the processing sequence of the arc tool 7 on the microlens array on the surface of the workpiece 6 is as follows: the arc tool 7 takes P0 (X0, Y0, Z0) as the starting point, and sequentially cuts the microlens units 8 in the first column from bottom to top, then the arc tool 7 retracts along the Z axis, and moves from top to bottom to the bottom of the first column of microlens units 8, then the arc tool 7 feeds along the X axis until it reaches the bottom of the second column of microlens units 8, and sequentially cuts the microlens units 8 in the second column from bottom to top, and repeats this process until the nth column of microlens units 8 is cut, and finally a microlens array is obtained.

[0048] The offset distances of the arc tool 7 in the Y direction and the X direction are equal to the design aperture of the microlens unit 8 (ie, the opening diameter of the microlens unit 8 ).

[0049] The micron-level lens array processing method based on the micro-molding tool in this embodiment is simple to operate, does not require a lot of calculations, and has the characteristics of high efficiency.

[0050] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A micron-level lens array processing device based on a micro-molding tool, characterized in that: The invention comprises an ultra-precision machine tool including a Y-axis, a lifting tool holder and an arc tool, wherein the vacuum suction cup on the Y-axis of the ultra-precision machine tool is used to install a workpiece, and the lifting tool holder is used to install the arc tool, and the lifting tool holder can drive the arc tool to rise and fall along the Y direction, and enable the arc tool to process the surface of the workpiece to form a microlens unit, and the ultra-precision machine tool can drive the workpiece to move along the X direction, the Y direction and the Z direction compared with the arc tool, and enable the arc tool to process the surface of the workpiece to form a microlens array, and the cutting edge radius of the arc tool is equal to the curvature radius of the microlens unit.

2. The micron-level lens array processing device based on a micro-molding tool according to claim 1 is characterized in that: The ultra-precision machine tool includes an X-axis, a Y-axis, a Z-axis and a C-axis, wherein the X-axis, the Y-axis and the Z-axis are linear axes, the C-axis is a rotational axis, the Z-axis can translate along the Z direction, the X-axis is connected to the lower end of the Y-axis and can drive the Y-axis to translate along the X direction, the Y-axis is connected to the C-axis and can drive the C-axis to rise and fall along the Y direction, and the C-axis is connected to a workpiece.

3. The micron-level lens array processing device based on a micro-molding tool according to claim 2, characterized in that: The lifting tool holder is fixedly mounted on the Z axis and is arranged opposite to the Y axis.

4. The micron-level lens array processing device based on a micro-molding tool according to claim 2, characterized in that: The Z axis and the X axis, the X axis and the Y axis, and the Y axis and the C axis are all movably connected.

5. The micron-level lens array processing device based on a micro-molding tool according to claim 2, characterized in that: The C-axis is provided with a fixture for clamping a workpiece.

6. The micron-level lens array processing device based on a micro-molding tool according to claim 1, characterized in that: The cutting edge waviness of the arc tool is less than 50 nm.

7. The micron-level lens array processing device based on a micro-molding tool according to claim 1 is characterized in that: The arc cutter is made of diamond material.

8. A method for processing a micron-level lens array based on a micro-molding tool, characterized in that: The micron-level lens array processing device based on a micro-molding tool according to any one of claims 1 to 7 comprises the following steps: S1. Calculate the machining trajectory points, calculate the machining trajectory points of the arc tool according to the design parameters of the microlens array, write a machining program, and ensure that the machining trajectory radius of the arc tool, the cutting edge radius of the arc tool and the curvature radius of the microlens unit are the same; S2. Ensure that the workpiece surface is flat. After the arc tool is roughly aligned, the workpiece surface is roughly machined with the arc tool to eliminate the tilt error, obtain a workpiece with a flat surface, and set the workpiece surface as Z0 of the programming coordinate system; S3. Processing the microlens unit, moving the cutting edge of the arc tool to the edge coordinate P0 (X0, Y0, Z0) of the first microlens unit to be processed, realizing the linkage between the Y axis and the Z axis through the ultra-precision machine tool, and completing the processing of a single microlens unit according to the processing program written in S1; S4. Process the microlens array. According to the design requirements of the microlens array, the workpiece is first offset n times in the Y direction driven by the ultra-precision machine tool to realize the processing of a single-row microlens unit. After completing the processing of the single-row microlens unit, it is moved in the X direction until the processing process of the single-row microlens unit is repeated n times, and a microlens array that meets the design requirements is obtained.

9. The micron-level lens array processing method based on a micro-molding tool according to claim 8, characterized in that: In S3, the first microlens unit to be processed is located at the lower left corner of the workpiece, and the edge coordinate P0 (X0, Y0, Z0) of the first microlens unit to be processed is the lowermost end of the first microlens unit to be processed.

10. The micron-level lens array processing method based on a micro-molding tool according to claim 9, characterized in that: In S4, the processing sequence of the arc tool on the microlens array on the workpiece surface is as follows: the arc tool takes P0 (X0, Y0, Z0) as the starting point, and sequentially cuts the microlens units in the first column from bottom to top, then the arc tool retracts along the Z axis, and moves from top to bottom to the bottom of the first column of microlens units, then the arc tool feeds along the X axis until it reaches the bottom of the second column of microlens units, and sequentially cuts the microlens units in the second column from bottom to top, and repeats this process until the nth column of microlens units is cut, and finally a microlens array is obtained.

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