Integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator

Abstract

The application relates to the field of vibration isolators, and relates to an integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator, wherein a first end of a buckling beam is connected to the side of a bearing platform, a second end of the buckling beam is connected to a base; three or more buckling beams are connected to the side of the bearing platform; a first end of a linear spring is connected to the bottom surface of the bearing platform, a second end of the linear spring is connected to the base; three or more linear springs are connected to the bottom surface of the bearing platform; after a device is placed on the bearing platform, the axial force of the buckling beam and the position of the linear spring are adjusted according to the load applied to the bearing platform by the device placed on the bearing surface of the bearing platform. The application solves the technical problems that the existing quasi-zero stiffness vibration isolator is concentrated in the single-degree-of-freedom translational direction, can only realize vibration isolation of a specific load mass, and the hinged structure introduces friction and gaps.

Description

Technical Field

[0001] This application relates to the field of vibration isolator technology, and more specifically, to an integrated, high-order stable, three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator. Background Technology

[0002] In various precision manufacturing fields, such as semiconductor manufacturing and lithography machines, multi-degree-of-freedom vibration isolators are required for high-precision processing. In aerospace equipment and remote sensing satellites, multi-degree-of-freedom vibration isolators are also needed to isolate disturbances from multiple directions in order to prevent vibrations from some vibration sources on the satellite from being transmitted to sensitive electronic devices and thus affecting the actual working state of the satellite.

[0003] However, current research on quasi-zero stiffness vibration isolators largely focuses on single-degree-of-freedom systems in the translational direction. Furthermore, most existing structures involve hinged joints, which introduce friction and gaps, hindering the isolation of low-frequency vibrations. Additionally, most nonlinear vibration isolators based on quasi-zero stiffness theory can only achieve vibration reduction for specific load masses, failing to provide isolation for varying load masses. Summary of the Invention

[0004] This application provides an integrated, high-order stable, three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator. The integrated, gapless frictionless structure achieves vibration isolation in three degrees of freedom according to different load masses.

[0005] According to one aspect of the embodiments of this application, an integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator is provided, characterized in that it comprises:

[0006] Base;

[0007] The load-bearing platform includes a load-bearing surface, a bottom surface, and sides;

[0008] A buckling beam includes a first end and a second end, the first end of the buckling beam being connected to the side of the bearing platform, and the second end of the buckling beam being connected to the base; three or more of the buckling beams are connected to the side of the bearing platform.

[0009] A linear spring includes a first end and a second end, wherein the first end of the linear spring is connected to the bottom surface of the support platform, and the second end of the linear spring is connected to the base; three or more of the linear springs are connected to the bottom surface of the support platform.

[0010] The axial force of the buckling beam and the position of the linear spring are adjusted according to the load applied to the bearing platform by the device placed on the bearing surface of the bearing platform.

[0011] Based on the above embodiments, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0012] A pressure regulating mechanism, disposed on the base, includes:

[0013] A preload bolt is threadedly connected to the adjusting threaded hole, which is located on the base. The stud end of the preload bolt is connected to the second end of the buckling beam.

[0014] Based on the above embodiments, the pressure regulating mechanism further includes:

[0015] A force sensor is mounted on the end face of the stud end of the preload bolt;

[0016] A beam-to-cylinder adapter is used to connect the force sensor to the buckling beam.

[0017] Based on the above embodiments, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0018] A height adjustment mechanism, mounted on the base, is used to change the height of the second end of the linear spring.

[0019] Based on the above embodiments, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0020] A spring position adjustment unit is used to adjust the position of each of the linear springs.

[0021] Based on the above embodiments, the bearing platform is a hexahedron with right angles at all vertices, and the bearing surface and bottom surface of the bearing platform are both squares with equal side lengths;

[0022] Two buckling beams are connected to each side of the bearing platform.

[0023] Based on the above embodiments, each side of the bearing platform is provided with two vertical grooves that penetrate its bearing surface and bottom surface, and the two grooves on each side of the bearing platform are mirror-symmetrical with respect to the vertical center line of that side.

[0024] The second end of each of the buckling beams is connected to the bottom of one of the grooves.

[0025] Based on the above embodiments, the base includes four columns, which are respectively disposed on the four sides of the load plane;

[0026] The second end of the buckling beam is connected to the column in the corresponding direction.

[0027] Based on the above embodiment, a linear spring is set at the center of the bearing platform, and four linear springs are arranged symmetrically with the center of the bearing platform as the center.

[0028] Based on the above embodiments, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator is characterized by further comprising:

[0029] The adjustment unit, after the equipment is placed on the bearing platform, is used to adjust the height of the second end of the linear spring, the position of the second end of the buckling beam, and the position between the linear springs.

[0030] Compared to existing technologies, in this embodiment, the first end of the buckling beam is connected to the side of the bearing platform, and the second end of the buckling beam is connected to the base; three or more buckling beams are connected to the side of the bearing platform; the first end of the linear spring is connected to the bottom surface of the bearing platform, and the second end of the linear spring is connected to the base; three or more linear springs are connected to the bottom surface of the bearing platform; after the device is placed on the bearing platform, the axial force of the buckling beam and the position of the linear spring are adjusted according to the load applied to the bearing platform by the device placed on the bearing surface of the bearing platform. In summary, the vibration isolator provided in this application does not contain any hinge structure between the buckling beam, the linear spring and the base and the bearing platform. By adjusting the position of the linear spring and the height of its second end, and the position of the second end of the buckling beam, the mass of the load is adapted and vibration isolation is provided in the vertical direction and the rotational direction around the horizontal axis is provided. This solves the technical problem that existing quasi-zero stiffness vibration isolators focus on single-degree-of-freedom systems in the translational direction, which can only achieve vibration isolation for specific load masses, and the hinged structure introduces friction and gaps, which is not conducive to the isolation of low-frequency vibrations.

[0031] The negative stiffness structure of the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator provided in this application is based on a buckling beam, exhibiting quasi-zero stiffness characteristics in three degrees of freedom: translational degree of freedom along the vertical Z-axis, and torsional degrees of freedom about the two horizontal axes. Specifically,

[0032] Firstly, regarding the translational degree of freedom, according to the buckling beam theory, when the axial pressure on a slender buckling beam with fixed ends exceeds its first-order buckling critical pressure, the midpoint will exhibit negative stiffness characteristics in the transverse direction. Based on this characteristic, an elastic structure with transverse translational negative stiffness characteristics is proposed.

[0033] The invention concept for a structure with negative stiffness in the torsional direction is as follows: the beam ends on both sides of the load-bearing platform are fixed. When the load-bearing platform rotates about a certain horizontal axis, the buckling beam parallel to the axis of rotation exhibits a superposition of lateral stiffness and torsional stiffness. When the axial pressure within the buckling beam is large enough, causing the negative stiffness of the lateral displacement to be greater than the positive stiffness of the torsional displacement, the load-bearing platform exhibits negative stiffness when rotating about the horizontal axis.

[0034] Combining the negative stiffness principle of the two approaches mentioned above, and arranging multiple linear springs to match the negative stiffness of the beam with the linear positive stiffness in the vertical translational and horizontal torsional directions, an integrated three-degree-of-freedom quasi-zero stiffness system is proposed. Attached Figure Description

[0035] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0036] Figure 1 This is a structural schematic diagram of an integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to an embodiment of this application;

[0037] Figure 2 This is a schematic diagram of the structure between the buckling beam and the base in the integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to an embodiment of this application;

[0038] Figure 3 This is a schematic diagram of the linear spring and the base of the integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to an embodiment of this application. Detailed Implementation

[0039] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0040] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0041] Before providing a detailed description and explanation of the embodiments of this application, some terms, nouns, and technical contents involved in the embodiments of this application will be explained.

[0042] Example 1

[0043] Reference Figure 1 The integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator provided in this embodiment includes:

[0044] Base 100;

[0045] The support platform 1 includes an upward support surface, a downward bottom surface, and vertical sides;

[0046] A buckling beam 2 includes a first end and a second end. The first end of the buckling beam 2 is connected to the side of the bearing platform 1, and the second end of the buckling beam 2 is connected to the base 100. Eight buckling beams 2 are connected to the side of the bearing platform 1.

[0047] A linear spring 4 includes a first end and a second end. The first end of the linear spring 4 is connected to the bottom surface of the support platform 1, and the second end of the linear spring 4 is connected to the base 100. Five linear springs 4 are connected to the bottom surface of the support platform 1.

[0048] The axial force of the buckling beam 2 and the position of the linear spring 4 are adjusted according to the load applied to the bearing platform 1 by the device placed on the bearing surface of the bearing platform 1.

[0049] In this embodiment, eight buckling beams 2 are provided. In other embodiments, fewer buckling beams 2 may be provided, such as three, or more, such as nine. At least three buckling beams 2 can ensure that forces in different directions are applied to the bearing platform 1 within the plane on which the bearing platform 1 is located, and can ensure the stability of the bearing platform 1.

[0050] In this embodiment, five linear springs 4 are provided. In other embodiments, fewer linear springs 4 may be provided, such as three, or more linear springs 4 may be provided, such as six. At least three linear springs 4 can ensure that the supporting platform 1 can rotate at any angle relative to the horizontal plane and remain stable.

[0051] In this embodiment, the positive stiffness generated by the linear spring 4 and the negative stiffness generated by the buckling deformation of the buckling beam 2 during operation are provided by the parallel connection of the mechanisms (the linear spring 4 and the buckling beam 2) that provide positive and negative stiffness. The positive stiffness mechanism mainly provides static support force, and the negative stiffness mechanism is used to counteract the stiffness of the positive stiffness mechanism, so that the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator exhibits quasi-zero stiffness characteristics near the steady-state operating point. Therefore, it has low-frequency resonance performance and large static load-bearing capacity.

[0052] First, in the operation of the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator provided in this embodiment, the buckling beam 2 is fixedly connected to the base 100 and the bearing platform 1, without any hinges; the linear spring 4 is also fixedly connected to the base 100 and the bearing platform 1, without any hinges. Therefore, there is no friction or gap between the buckling beam 2 and the base 100 and the bearing platform 1, and there is no friction or gap between the linear spring 4 and the base 100 and the bearing platform 1, which is beneficial for isolating low-frequency vibrations.

[0053] The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator provided in this embodiment can ensure the horizontal working state of the buckling beam 2 and its stability by changing the position of the linear spring 4 in the vertical direction according to the weight of the equipment. By adjusting the position of the second end of the buckling beam 2, its negative stiffness can be changed, thereby ensuring that the vertical direction exhibits quasi-zero stiffness characteristics near the steady-state working point.

[0054] The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator provided in this embodiment changes the torsional stiffness of the linear springs 4 supporting the bearing platform 1 by adjusting the distance between the positions of the multiple linear springs 4 and the center of gravity of the bearing platform 1 (torsion refers to rotation about an axis in any direction within the plane of the bearing platform 1): the closer the linear spring 4 is to the center of the bearing platform 1, the smaller the torsional stiffness supporting the bearing platform 1; the farther the linear spring 4 is from the center of the bearing platform 1, the greater the torsional stiffness supporting the bearing platform 1. The positive torsional stiffness provided by the linear springs 4 to the bearing platform 1 matches the negative torsional stiffness generated by the buckling beam on the bearing platform 1, ensuring that the torsional direction exhibits quasi-zero stiffness characteristics near the steady-state operating point.

[0055] Before operation, the equipment to be isolated is placed on the supporting platform 1. Depending on the weight of the equipment, the linear spring 4 will experience varying degrees of compression. The height of the second end of the linear spring 4 is adjusted according to its compression to ensure that the buckling beam 2 remains horizontal under different load conditions.

[0056] Then, by adjusting the position of the second end of the buckling beam 2, the pressure on the buckling beam 2 is adjusted so that the negative stiffness in the vertical direction generated by the buckling beam 2 matches the positive stiffness in the vertical direction of the linear spring 4.

[0057] Finally, the position of the linear spring 4 is adjusted to adjust the distance between it and the center of gravity of the bearing platform 1, so that the positive torsional stiffness provided by the linear spring 4 to the bearing platform 1 matches the negative torsional stiffness generated by the buckling beam on the bearing platform 1.

[0058] This embodiment, by jointly adjusting the axial force of the buckling beam 2 and the distance between the linear spring 4, can accommodate different processing and material errors, ensuring that the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator can achieve quasi-zero stiffness in three directions.

[0059] This embodiment provides a specific implementation method for adjusting the position of the second end of the buckling beam 2, as described below. Figure 2 In this specific embodiment, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0060] A pressure regulating mechanism, disposed on the base 100, includes:

[0061] The preload bolt 10 is threadedly connected to the adjusting threaded hole, which is located on the base 100. The stud end of the preload bolt 10 is connected to the second end of the buckling beam 2.

[0062] By rotating the nut end of the preload bolt 10, its position on the base 100 is changed, thereby changing the position of the second end of the buckling beam 2 and thus changing the stiffness of the buckling beam 2.

[0063] In this embodiment, the stud end of the preload bolt 10 is first connected to the force sensor 11 and the beam adapter cylinder 12. The end face of the beam adapter cylinder 12 can be provided with a threaded hole and is fixed to the second end of the buckling beam 2 by threads. The preload bolt 10 can be tightened along the central axis of the threaded hole and the preload force is transmitted to the buckling beam 2 through the force sensor 11, thereby applying pressure to the buckling beam 2 to bring it into a buckling state.

[0064] The force sensor 11 can monitor the pressure value at the second end of the buckling beam 2 during the rotation of the preload bolt 10. Therefore, by monitoring the pressure on the buckling beam 2, it can monitor whether the negative stiffness of the buckling beam 2 matches the positive stiffness of the spring. In other embodiments, the displacement of the second end of the buckling beam 2 is monitored, and the negative stiffness of the buckling beam 2 is monitored by the displacement to determine whether it matches the positive stiffness of the spring.

[0065] This embodiment provides a specific implementation method for adjusting the position of the second end of the linear spring 4, see reference. Figure 1 In this specific embodiment, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0066] A height adjustment mechanism 6 is mounted on the base 100 and is used to change the height of the second end of the linear spring 4.

[0067] The height adjustment structure described in this embodiment includes a scissor mechanism and a mounting platform 5. The lower ends of the two legs of the scissor mechanism are mounted on the base 100, and the upper ends of the two legs are connected to the mounting platform 5. The second end of the linear spring 4 is mounted on the mounting platform 5.

[0068] By changing the distance between the upper (or lower) ends of the two legs, the height of the mounting platform 5 is changed, thereby changing the height of the second end of the linear spring 4.

[0069] This embodiment provides a specific implementation method for adjusting the position between the linear springs 4, see reference. Figure 3 In this specific embodiment, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0070] A spring position adjustment unit, used to adjust the position of each linear spring 4, includes a guide rail 14 located on the mounting platform 5 and a slider 13 sliding within the guide rail 14. The second end of each linear spring 4 is connected to the slider 13. By sliding the slider 13 within the guide rail 14, the position of the linear springs 4 is changed. For a platform with uniform mass distribution and regular shape, for example, in the positive direction, the center of gravity of the supporting platform 1 is its geometric center. The guide rail 14 is set relative to this geometric center. Adjusting the position of the linear springs 4 along the guide rail 14 allows for convenient, accurate, and rapid adjustment of the position of the linear springs 4 relative to the center of gravity of the supporting platform 1.

[0071] In this embodiment, a guide post is provided on the upper surface of the slider 13, and the guide post is inserted into the spring hole at the second end of the linear spring 4 to minimize the bending deformation of the linear spring 4 during the deformation process.

[0072] This embodiment provides a specific implementation of the structure of the support platform 1, referring to... Figure 1 The supporting platform 1 is a hexahedron with right angles at all vertices, and the supporting surface and the bottom surface of the supporting platform 1 are both squares with equal side lengths;

[0073] Two buckling beams 2 are connected to each side of the bearing platform 1.

[0074] In this implementation, the structure of the bearing platform 1 is regular, and the two buckling beams 2 on each side can provide negative stiffness more stably.

[0075] Based on the above embodiments, each side of the bearing platform 1 is provided with two vertical grooves that penetrate its bearing surface and bottom surface, and the two grooves on each side of the bearing platform 1 are mirror-symmetrical with respect to the vertical center line of that side.

[0076] The second end of each of the buckling beams 2 is connected to the bottom of one of the grooves.

[0077] The groove allows for maximizing the load-bearing area of ​​the bearing platform 1 and the maximum possible range of positional variation of the linear spring, while optimizing the effect of the distance between the second ends of the two opposing buckling beams 2 on stiffness.

[0078] Based on the above embodiments, this embodiment provides a specific implementation of the structure of the base 100, referring to... Figure 1 The base 100 includes four columns 8, which are respectively disposed on the four sides of the load plane 1.

[0079] The second end of the buckling beam 2 is connected to the column 8 in the corresponding direction.

[0080] In this embodiment, the lower end of the column 8 is connected to the base plate 9, and the second end of the linear spring 4 is connected to the base plate 9 directly or through the height adjustment mechanism 6.

[0081] In this implementation, reference is made to... Figure 1 The upper end of the column 8 is provided with a step near the outer side and a semi-circular groove near the inner side of the upper end face. The step is provided with a threaded hole coaxial with the semi-circular groove. After the preload bolt 10 is screwed into the threaded hole, the force sensor 11, the beam adapter cylinder 12 and the buckling beam 2 are connected, the cover plate 7 is fixed to the column 8 with screws or bolts, and the second end of the buckling beam 2 is pressed to achieve the working state of the second end of the buckling beam 2 being fixed.

[0082] This embodiment provides a specific implementation method for the arrangement of the five linear springs 4, see reference. Figure 3 A linear spring 4 is disposed at the center of the bearing platform 1, and four linear springs 4 are symmetrically arranged around the center of the bearing platform 1. The distance from the four symmetrically arranged linear springs 4 on the periphery to the center is adjusted so that the positive torsional stiffness of the bearing platform 1 matches the negative torsional stiffness of the platform generated by the horizontal buckling beam 2. This positional relationship allows for simple and quick adjustment while ensuring stable support of the bearing platform 1 by the linear springs 4. In a preferred embodiment, the distance between the outer linear springs 4 and the inner linear spring 4 changes simultaneously.

[0083] In one embodiment, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further comprises:

[0084] The adjustment unit, after the equipment is placed on the bearing platform 1, is used to adjust the height of the second end of the linear spring 4, the position of the second end of the buckling beam 2, and the position between the linear springs 4.

[0085] The adjustment unit can monitor the quality of the equipment, the natural frequency of the vibration isolator in the vertical direction and the natural frequency in the torsional direction in real time, and change the height of the second end of the linear spring 4, the position of the second end of the buckling beam 2 and the position between the linear springs 4 according to the monitoring structure.

[0086] The adjustment unit may be a computer device connected to the sensor, which stores the relationship between the mass of the device and the height of the second end of the linear spring 4, as well as the relationship between the natural frequency of the vibration isolator in the vertical direction and the natural frequency in the torsional direction, the position of the second end of the buckling beam 2, and the position of the linear spring 4.

[0087] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0088] In the above embodiments of this application, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0089] In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. The device embodiments described above are merely illustrative; for example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be indirect coupling or communication connection through some interfaces or units, and may be electrical or other forms.

[0090] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0091] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0092] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as a USB flash drive, read-only memory (ROM), random access memory (RAM), portable hard drive, magnetic disk, or optical disk.

[0093] The above description is only a preferred embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. An integrated, high-order stable, three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator, characterized in that: include: Base; The load-bearing platform includes a load-bearing surface, a bottom surface, and sides; A buckling beam includes a first end and a second end, the first end of the buckling beam being connected to the side of the bearing platform, and the second end of the buckling beam being connected to the base; three or more of the buckling beams are connected to the side of the bearing platform. A linear spring includes a first end and a second end, wherein the first end of the linear spring is connected to the bottom surface of the support platform, and the second end of the linear spring is connected to the base; three or more of the linear springs are connected to the bottom surface of the support platform. The axial force of the buckling beam and the position of the linear spring are adjusted according to the load applied to the bearing platform by the device placed on the bearing surface of the bearing platform; The height adjustment mechanism includes a scissor mechanism and a mounting platform. The lower ends of the two legs of the scissor mechanism are mounted on the base, and the upper ends of the two legs are connected to the mounting platform. A spring position adjustment unit includes a guide rail located on a mounting platform and a slider that slides within the guide rail. The second end of the linear spring is connected to the slider. The position of the linear spring is changed by sliding the slider within the guide rail.

2. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 1, characterized in that, Also includes: A pressure regulating mechanism, disposed on the base, includes: A preload bolt is threadedly connected to the adjusting threaded hole, which is located on the base. The stud end of the preload bolt is connected to the second end of the buckling beam.

3. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 2, characterized in that, The pressure regulating mechanism further includes: A force sensor is mounted on the end face of the stud end of the preload bolt; A beam-to-cylinder adapter is used to connect the force sensor to the buckling beam.

4. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 1, characterized in that, The support platform is a hexahedron with right angles at all vertices, and the support surface and the bottom surface of the support platform are both squares with equal side lengths; Two buckling beams are connected to each side of the bearing platform.

5. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 4, characterized in that, Each side of the bearing platform is provided with two vertical grooves that penetrate its bearing surface and bottom surface, and the two grooves on each side of the bearing platform are mirror-symmetrical with respect to the vertical center line of that side. The second end of each of the buckling beams is connected to the bottom of one of the grooves.

6. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 5, characterized in that, The base includes four columns, which are respectively located on the four sides of the load plane; The second end of the buckling beam is connected to the column in the corresponding direction.

7. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 1, characterized in that, A linear spring is placed at the center of the bearing platform, and four linear springs are arranged symmetrically with the center of the bearing platform as the center.

8. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 1, characterized in that, Also includes: The adjustment unit, after the equipment is placed on the bearing platform, is used to adjust the height of the second end of the linear spring, the position of the second end of the buckling beam, and the position between the linear springs.

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