Constant-air-gap zero-power unbalance-load-resistant dual-active hybrid magnetic suspension system and control method

Abstract

The invention discloses a constant-air-gap zero-power unbalance-load-resistant dual-active hybrid magnetic levitation system and a control method, and relates to the technical field of magnetic levitation, the constant-air-gap zero-power unbalance-load-resistant dual-active hybrid magnetic levitation system comprises a variable-bias hybrid magnetic levitation unit, the variable-bias hybrid magnetic levitation unit comprises a worm and gear reduction gearbox, and one end of the worm and gear reduction gearbox is connected with a servo motor; two F-shaped iron cores are arranged on one side of the servo motor, an opening is formed in the connecting position of the two F-shaped iron cores, a disc-shaped radial magnetized permanent magnet is arranged in the opening, and a first electromagnetic coil and a second electromagnetic coil which are used for active control are arranged below the disc-shaped radial magnetized permanent magnet and the F-shaped iron cores. According to the constant-air-gap zero-power unbalance-load-resistant dual-active hybrid magnetic suspension system and the control method, the rotating angle of the permanent magnet and the current of the electromagnetic coil are actively and cooperatively adjusted according to the state of the system to change the effective magnetic flux at the working air gap, so that the magnetic force is adjusted to maintain stable suspension; coordinated optimization of constant air gap and low power consumption characteristics of the hybrid suspension system is realized.

Description

Technical Field

[0001] The invention relates to the technical field of magnetic suspension, and in particular to a constant air gap zero power anti-bias load dual active hybrid magnetic suspension system and a control method. Background Art

[0002] Dust-free handling systems are crucial to the manufacture of integrated circuits, especially high-end wafer manufacturing, and affect the utilization rate and yield of production lines. The development and research of higher-level cleanliness transfer equipment is of great significance to improving my country's semiconductor manufacturing capabilities.

[0003] Since magnetic levitation technology has the characteristics of non-contact, noise-free and high control precision, many magnetic levitation systems have emerged, such as electromagnetic levitation systems, magnetic levitation transmission systems, magnetic levitation bearings, precision magnetic levitation work platforms, magnetic levitation motion platforms, etc. The common disadvantages of electromagnetic levitation systems include excessively large coils, high power consumption, large temperature rise, and electromagnetic radiation.

[0004] In recent years, with the emergence of the second-generation rare earth permanent magnet material NdFeB and the promotion and application of sintering technology, the maximum magnetic energy product of permanent magnets has been continuously improved due to the characteristics of permanent magnetic suspension such as large magnetic force per unit volume, no heat generation, and compact structure. Permanent magnetic suspension technology and hybrid suspension technology have made great progress. However, it is difficult to balance zero-power suspension and suspension air gap stability in traditional electromagnetic permanent magnet hybrid magnetic suspension systems. Therefore, it is necessary to design a constant air gap zero-power anti-eccentric load dual-active hybrid magnetic suspension system to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to provide a constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system and control method, so as to solve the problems of non-constant and easy tilting of zero power air gap existing in the previous electromagnetic permanent magnet hybrid magnetic suspension system. The effective magnetic flux at the working air gap can be changed by actively adjusting the rotation angle of the permanent magnet and controlling the current of the coil, so as to adjust the magnetic force to maintain stable suspension; only by actively adjusting the rotation angle of the permanent magnet, the first electromagnetic coil and the second electromagnetic coil do not apply current, change the effective magnetic flux at the working air gap, adjust the magnetic force to make the suspended object maintain stable suspension under the condition of constant air gap, and realize the stability and zero power characteristics of the hybrid magnetic suspension system through dual active control.

[0006] To achieve the above-mentioned objectives, the present invention provides a constant air gap zero-power anti-bias load dual-active hybrid magnetic levitation system, including a variable bias hybrid magnetic levitation unit, the variable bias hybrid magnetic levitation unit including a worm gear reducer, one end of the worm gear reducer is connected to a servo motor, two F-type iron cores are arranged on one side of the servo motor, an opening is arranged at the junction of the two F-type iron cores, a disc-shaped radially magnetized permanent magnet is arranged in the opening, two first electromagnetic coils and a second electromagnetic coil for active control are arranged below the disc-shaped radially magnetized permanent magnet and the F-type iron core, and after the power supply is connected, the polarity of the first electromagnetic coil and the second electromagnetic coil are opposite.

[0007] Preferably, the worm gear reducer is fixedly connected to the top end of the base plate through a connecting block, and the lower end of the base plate is connected to the bottom plate;

[0008] The worm gear reducer is provided with a turbine and a worm, one end of the worm is sleeved with an adjustment collar 1, a ceramic deep groove ball bearing 1 and an adjustment collar 2, and the other end of the worm is connected to the servo motor and sleeved with a miniature bearing and an adjustment collar 3;

[0009] A bearing end cover is fixedly arranged at the rear end of the worm gear reduction box.

[0010] Preferably, the turbine sleeve is arranged on the reduction gearbox shaft, one end of the reduction gearbox shaft is provided with the bearing end cover, and the other end of the reduction gearbox shaft is connected to the reduction gearbox; two adjustment ring sleeves four and two ceramic deep groove ball bearings two are provided on both sides of the turbine, and the two ceramic deep groove ball bearings two and the two adjustment ring sleeves four are all sleeved on the reduction gearbox shaft.

[0011] Preferably, one end of the servo motor is fixed to the worm gear reducer via a motor seat, and the other end of the servo motor is provided with an encoder.

[0012] Preferably, a 1 mm air gap is provided between the disc-shaped radially magnetized permanent magnet and the F-type iron core.

[0013] Preferably, a suspension is provided below the first electromagnetic coil and the second electromagnetic coil, the suspension is provided on a linear rail assembly, a differential head assembly is provided on one side of the linear rail assembly, and a laser displacement sensor is provided on the other side of the linear rail assembly.

[0014] Preferably, the linear rail assembly includes a linear rail fixedly connected to the base plate, a linear rail slider is slidably connected to the linear rail, and a guide rail angle piece is fixedly connected to the linear rail slider.

[0015] Preferably, the micrometer head assembly includes a micrometer head mounting frame fixedly arranged on the substrate, and the micrometer head is arranged on the micrometer head mounting frame.

[0016] The control method of the constant air gap zero power anti-bias load dual active hybrid magnetic suspension system comprises:

[0017] When the constant air gap zero power anti-bias load dual active hybrid magnetic suspension system is in a load change, the effective magnetic flux at the working air gap is changed by actively adjusting the current in the first electromagnetic coil and the second electromagnetic coil and the rotation angle of the disc-shaped radial magnetization permanent magnet, thereby adjusting the magnetic force to maintain the stable suspension of the suspended object;

[0018] When the constant air gap zero-power anti-eccentric load dual-active hybrid magnetic levitation system is in a stable suspension state, by actively adjusting the rotation angle of the disc-shaped radially magnetized permanent magnet, no current is applied to the first electromagnetic coil and the second electromagnetic coil, the effective magnetic flux at the working air gap is changed, and then the magnetic force is adjusted to maintain stable suspension of the suspended object under constant air gap conditions.

[0019] Preferably, when the disc-shaped radially magnetized permanent magnet rotates a certain angle, the arc angle of the arc-shaped opening of the F-type iron core on one side facing the N pole of the disc-shaped radially magnetized permanent magnet decreases, and the arc angle facing the S pole increases;

[0020] The arc angle of the arc opening of the F-type iron core on the other side facing the S pole of the disc-shaped radially magnetized permanent magnet decreases, and the arc angle facing the N pole increases. At this time, part of the main magnetic flux returns directly from the N pole of the disc-shaped radially magnetized permanent magnet to the S pole, and the remaining main magnetic flux starts from the N pole of the disc-shaped radially magnetized permanent magnet, passes through the F-type iron core on one side, the suspension, and the F-type iron core on the other side in sequence, and finally returns to the S pole of the disc-shaped radially magnetized permanent magnet.

[0021] Therefore, the present invention adopts the above-mentioned constant air gap zero-power anti-bias load dual-active hybrid magnetic suspension system and control method, which has the following beneficial effects:

[0022] (1) This application document divides the suspension state of the system into a stable suspension state and a load-changing suspension state according to the different suspension states of the controlled system; in the stable suspension state, the current of the electromagnetic coil of the system is close to zero, so the power consumption of the system is close to zero; in the load-changing suspension state, the system drives the disc-shaped radial magnetized permanent magnet to rotate and actively adjusts the current of the electromagnetic coil through the motor, thereby changing the magnetic flux passing through the suspension to control the size of the suspension force, and realizes the coordinated optimization of the stability and low power consumption characteristics of the hybrid suspension system through dual active control.

[0023] (2) The structure of this application document is simple, and the introduction of disk-shaped radial magnetized permanent magnets makes the structure of the hybrid magnetic levitation system more compact, which is conducive to the use of instruments with limited physical space, and realizes a low-power, long-term stable magnetic levitation system. Compared with the traditional electromagnetic levitation system with overly large coils, high power consumption, large temperature rise, and electromagnetic radiation, and the traditional electromagnetic permanent magnet hybrid levitation system with unstable air gap and easy tilt, the control coil and permanent magnet dual active control structure introduced in this application document makes the magnetic levitation system more stable and efficient.

[0024] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 The structure of the constant air gap zero power anti-bias load dual active hybrid magnetic suspension system and control method of the present invention is schematically shown. Figure 1 ;

[0026] Figure 2 The structure of the constant air gap zero power anti-bias load dual active hybrid magnetic suspension system and control method of the present invention is schematically shown. Figure 2 ;

[0027] Figure 3 It is a partial exploded view of the worm gear reducer of the constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system and control method of the present invention;

[0028] Figure 4 It is a control block diagram of the constant air gap zero power anti-bias load dual active hybrid magnetic suspension system and control method of the present invention;

[0029] Figure 5 A graph showing the relationship between the suspension force and the air gap at different currents of the constant air gap zero-power anti-biased load dual-active hybrid magnetic suspension system and control method of the present invention;

[0030] Figure 6 A diagram showing the relationship between the suspension force and the air gap when there is no magnetic source for the constant air gap zero-power anti-bias load dual-active hybrid magnetic suspension system and control method of the present invention;

[0031] Figure 7 A diagram showing the relationship between the permanent magnet angle and the torque of the constant air gap zero-power anti-eccentric load dual-active hybrid magnetic suspension system and control method of the present invention;

[0032] Figure 8 A diagram showing the relationship between the suspension force and the rotation angle of the permanent magnet of the constant air gap zero power anti-bias load dual active hybrid magnetic suspension system and control method of the present invention;

[0033] Fig. 9 A graph showing the relationship between the suspension force and the rotation angle of the permanent magnet at different currents of the constant air gap zero-power anti-bias load dual active hybrid magnetic suspension system and control method of the present invention;

[0034] Figure markings: 1. encoder; 2. servo motor; 3. motor seat; 4. miniature bearing; 5. worm gear reducer; 6. worm; 7. turbine; 8. reducer shaft; 9. bearing end cover; 10. F-type core; 11. disc-shaped radially magnetized permanent magnet; 12. first electromagnetic coil; 13. second electromagnetic coil; 14. suspended object; 15. differential head; 16. differential head mounting bracket; 17. substrate; 18. connecting block; 19. bottom plate; 20. laser displacement sensor; 21. guide rail angle piece; 22. linear rail; 23. linear rail slider; 24. adjusting collar one; 25. ceramic deep groove ball bearing one; 26. adjusting collar two; 27. adjusting collar three; 28. adjusting collar four; 29. ​​ceramic deep groove ball bearing two. DETAILED DESCRIPTION

[0035] The technical solution of the present invention is further described below through the accompanying drawings and embodiments.

[0036] Unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0037] Example

[0038] See also Figure 1-9 The present invention provides a constant air gap zero power anti-bias load dual active hybrid magnetic suspension system, including a variable bias hybrid magnetic suspension unit, the variable bias hybrid magnetic suspension unit includes a worm gear reducer 5, one end of the worm gear reducer 5 is connected to a servo motor 2, one side of the servo motor 2 is provided with two F-type iron cores 10, the connection between the two F-type iron cores 10 is provided with an opening, a disc-shaped radial magnetized permanent magnet 11 is provided in the opening, and a 1mm air gap is provided between the disc-shaped radial magnetized permanent magnet 11 and the F-type iron core 10. The permanent magnet material of the disc-shaped radial magnetized permanent magnet 11 is neodymium iron boron NdFeB52 material.

[0039] Two first electromagnetic coils 12 and second electromagnetic coils 13 for active control are arranged below the disc-shaped radially magnetized permanent magnet 11 and the F-type iron core 10. The first electromagnetic coil 12 and the second electromagnetic coil 13 are both controlled by the F-type iron core 10. After connecting to the power supply, the first electromagnetic coil 12 and the second electromagnetic coil 13 have opposite polarities.

[0040] The worm gear reducer 5 is fixedly connected to the top of the base plate 17 through the connecting block 18, and the lower end of the base plate 17 is connected to the bottom plate 19. The worm gear reducer 5 is provided with a turbine 7 and a worm 6. One end of the worm 6 is sleeved with an adjustment collar 1 24, a ceramic deep groove ball bearing 1 25 and an adjustment collar 2 26. The other end of the worm 6 is connected to the servo motor 2 and sleeved with a miniature bearing 4 and an adjustment collar 3 27. The rear end of the worm gear reducer 5 is fixedly provided with a bearing end cover 9.

[0041] One end of the servo motor 2 is fixed to the worm gear reducer 5 through the motor base 3 , and the other end of the servo motor 2 is provided with an encoder 1 .

[0042] The turbine 7 is sleeved on the reduction box shaft 8, one end of the reduction box shaft 8 is provided with a bearing end cover 9, and the other end of the reduction box shaft 8 is connected to the bottom plate 19. Two adjustment ring sleeves 28 and two ceramic deep groove ball bearings 29 are provided on both sides of the turbine 7, and the two ceramic deep groove ball bearings 29 and the two adjustment ring sleeves 28 are sleeved on the reduction box shaft 8.

[0043] A suspended object 14 is disposed below the first electromagnetic coil 12 and the second electromagnetic coil 13 . The suspended object 14 is disposed on the linear rail assembly. A differential head assembly is disposed on one side of the linear rail assembly, and a laser displacement sensor 20 is disposed on the other side of the linear rail assembly.

[0044] The linear rail assembly includes a linear rail 22 fixedly connected to the base plate 17 , a linear rail slider 23 is slidably connected to the linear rail 22 , and a guide rail angle piece 21 is fixedly connected to the linear rail slider 23 .

[0045] The differential head 15 assembly includes a differential head mounting frame 16 fixedly mounted on a substrate 17 , and the differential head 15 is mounted on the differential head mounting frame 16 .

[0046] The constant air gap zero-power anti-eccentric load dual-active hybrid magnetic suspension system uses the principle of magnetic flux path control to control the suspension force. In the state of suspension when the load changes, the effective magnetic flux at the working air gap can be changed by cooperatively adjusting the rotation angle of the disk-shaped radial magnetized permanent magnet 11 and the current of the electromagnetic coil, thereby adjusting the magnetic force to maintain stable suspension; in the stable suspension state, only by actively adjusting the rotation angle of the disk-shaped radial magnetized permanent magnet 11, the control coil does not apply current, the effective magnetic flux at the working air gap is changed, and the magnetic force is adjusted to maintain stable suspension of the suspended object 14 under constant air gap conditions. The suspension air gap is monitored by a laser displacement sensor 20 to achieve constant air gap zero-power anti-eccentric load multi-point support suspension.

[0047] The control method of the constant air gap zero power anti-bias load dual active hybrid magnetic suspension system comprises:

[0048] Control method of dual-active hybrid magnetic suspension system: When the constant air gap zero-power anti-bias load dual-active hybrid magnetic suspension system is in a load change, the effective magnetic flux at the working air gap is changed by actively adjusting the current in the first electromagnetic coil 12 and the second electromagnetic coil 13 and the rotation angle of the disc-shaped radial magnetized permanent magnet 11, thereby adjusting the magnetic force to maintain the stable suspension of the suspended object 14;

[0049] Constant air gap zero-power variable magnetic force type magnetic levitation system control method: When the constant air gap zero-power anti-eccentric load dual-active hybrid magnetic levitation system is in a stable suspension state, by actively adjusting the rotation angle of the disc-shaped radially magnetized permanent magnet 11, the first electromagnetic coil 12 and the second electromagnetic coil 13 are not applied with current, the effective magnetic flux at the working air gap is changed, and then the magnetic force is adjusted to maintain stable suspension of the suspended object 14 under constant air gap conditions.

[0050] When the disk-shaped radially magnetized permanent magnet 11 rotates a certain angle, the arc angle of the arc-shaped opening of the F-type iron core 10 on one side facing the N pole of the disk-shaped radially magnetized permanent magnet decreases, and the arc angle facing the S pole increases; the arc angle of the arc-shaped opening of the F-type iron core 10 on the other side facing the S pole of the disk-shaped radially magnetized permanent magnet decreases, and the arc angle facing the N pole increases. At this time, part of the main magnetic flux returns directly from the N pole of the disk-shaped radially magnetized permanent magnet to the S pole, and the remaining main magnetic flux starts from the N pole of the disk-shaped radially magnetized permanent magnet, passes through the F-type iron core 10 on one side, the suspended object 14, and the F-type iron core 10 on the other side in sequence, and finally returns to the S pole of the disk-shaped radially magnetized permanent magnet.

[0051] Under the condition of multi-point supported suspension, only by actively adjusting the rotation angle of the disc-shaped radially magnetized permanent magnet 11, the first electromagnetic coil 12 and the second electromagnetic coil 13 do not apply current to change the suspension air gap and prevent the suspension from tilting. The laser displacement sensor 20 at the bottom can monitor the suspension air gap to achieve constant air gap zero-power anti-eccentric load multi-point supported suspension.

[0052] Therefore, the present invention adopts the above-mentioned constant air gap zero-power anti-bias load dual-active hybrid magnetic suspension system and control method, which has a good control effect on the nonlinear magnetic suspension system. According to the state of the system, the permanent magnet rotation angle and the electromagnetic coil current are actively and coordinated to change the effective magnetic flux at the working air gap, thereby adjusting the magnetic force to maintain stable suspension. Through dual active control, the coordinated optimization of the stability and low power consumption characteristics of the hybrid suspension system is achieved.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solution of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the present invention.

Claims

1. Constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system, characterized by: It includes a variable bias hybrid magnetic levitation unit, which includes a worm gear reducer, one end of the worm gear reducer is connected to a servo motor, one side of the servo motor is provided with two F-type iron cores, an opening is provided at the junction of the two F-type iron cores, a disc-shaped radially magnetized permanent magnet is provided in the opening, and two first electromagnetic coils and second electromagnetic coils for active control are provided below the disc-shaped radially magnetized permanent magnet and the F-type iron core. After the power supply is connected, the polarities of the first electromagnetic coil and the second electromagnetic coil are opposite.

2. The constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system according to claim 1 is characterized by: The worm gear reduction box is fixedly connected to the top end of the base plate through a connecting block, and the lower end of the base plate is connected to the bottom plate; The worm gear reducer is provided with a turbine and a worm, one end of the worm is sleeved with an adjustment collar 1, a ceramic deep groove ball bearing 1 and an adjustment collar 2, and the other end of the worm is connected to the servo motor and sleeved with a miniature bearing and an adjustment collar 3; A bearing end cover is fixedly arranged at the rear end of the worm gear reduction box.

3. The constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system according to claim 2 is characterized by: The turbine sleeve is arranged on the reduction box shaft, one end of the reduction box shaft is provided with the bearing end cover, and the other end of the reduction box shaft is connected to the reduction box; two adjustment ring sleeves four and two ceramic deep groove ball bearings two are arranged on both sides of the turbine, and the two ceramic deep groove ball bearings two and the two adjustment ring sleeves four are all sleeved on the reduction box shaft.

4. The constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system according to claim 3 is characterized by: One end of the servo motor is fixed to the worm gear reducer through a motor seat, and the other end of the servo motor is provided with an encoder.

5. The constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system according to claim 4 is characterized in that: An air gap of 1 mm is provided between the disk-shaped radially magnetized permanent magnet and the F-type iron core.

6. The constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system according to claim 5 is characterized by: A suspended object is arranged below the first electromagnetic coil and the second electromagnetic coil. The suspended object is arranged on a linear rail assembly. A differential head assembly is arranged on one side of the linear rail assembly, and a laser displacement sensor is arranged on the other side of the linear rail assembly.

7. The constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system according to claim 6, characterized in that: The linear rail assembly comprises a linear rail fixedly connected to the base plate, a linear rail slider is slidably connected to the linear rail, and a guide rail angle piece is fixedly connected to the linear rail slider.

8. The constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system according to claim 7 is characterized by: The micrometer head assembly comprises a micrometer head mounting frame fixedly arranged on the substrate, and the micrometer head is arranged on the micrometer head mounting frame.

9. A control method for a constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system using any one of claims 1 to 8, characterized in that: include: When the constant air gap zero power anti-bias load dual active hybrid magnetic suspension system is in a load change, the effective magnetic flux at the working air gap is changed by actively adjusting the current in the first electromagnetic coil and the second electromagnetic coil and the rotation angle of the disc-shaped radial magnetization permanent magnet, thereby adjusting the magnetic force to maintain the stable suspension of the suspended object; When the constant air gap zero-power anti-eccentric load dual-active hybrid magnetic levitation system is in a stable suspension state, by actively adjusting the rotation angle of the disc-shaped radially magnetized permanent magnet, no current is applied to the first electromagnetic coil and the second electromagnetic coil, the effective magnetic flux at the working air gap is changed, and then the magnetic force is adjusted to maintain stable suspension of the suspended object under constant air gap conditions.

10. The control method of the constant air gap zero power anti-eccentric load dual active hybrid magnetic suspension system according to claim 9, characterized in that: When the disk-shaped radially magnetized permanent magnet rotates by a certain angle, the arc angle of the arc-shaped opening of the F-shaped iron core on one side facing the N pole of the disk-shaped radially magnetized permanent magnet decreases, and the arc angle facing the S pole increases; The arc angle of the arc opening of the F-type iron core on the other side facing the S pole of the disc-shaped radially magnetized permanent magnet decreases, and the arc angle facing the N pole increases. At this time, part of the main magnetic flux returns directly from the N pole of the disc-shaped radially magnetized permanent magnet to the S pole, and the remaining main magnetic flux starts from the N pole of the disc-shaped radially magnetized permanent magnet, passes through the F-type iron core on one side, the suspension, and the F-type iron core on the other side in sequence, and finally returns to the S pole of the disc-shaped radially magnetized permanent magnet.

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