Double-working-condition interference detection device and optical element detection method

Abstract

The invention discloses a double-working-condition interference detection device and an optical element detection method, relates to the field of optical interference detection, and is used for solving the problem that the state of an optical element during detection is consistent with the state of the optical element during use. The device comprises a detection unit which comprises a workbench, a first standard element and a second standard element, the workbench positions a detected element, the first standard element is located on the first side of the detected element, and the second standard element is located on the second side of the detected element; the interference device is used for emitting the light beam and obtaining the reference wave and the reflected wave from the light beam transmission assembly so as to obtain a surface shape detection result of the detected surface of the detected element; and the light beam transmission assembly is used for transmitting the light beam, enabling the light beam to enter the first standard element or the second standard element, and enabling the reference wave and the reflected wave from the first standard element or the second standard element to be transmitted to the interference device. According to the invention, the state of the optical element during optical element detection is consistent with the state of the optical element during use, and the measurement error is reduced.

Description

Technical Field

[0001] The present invention relates to the field of optical interference detection, and in particular to a dual-working-state interference detection device and an optical element detection method. Background Art

[0002] Optical interferometry has been widely used in high-precision surface shape detection of optical components due to its advantages of high precision and non-contact and non-destructiveness. Interferometry is usually a relative measurement method. Its principle is to obtain surface shape error information of optical components by analyzing the interference fringes generated by the reference wavefront and the measured wavefront. With the increasing measurement accuracy in aerospace, astronomy, high-power laser and other fields, higher requirements are also placed on optical detection instruments. Summary of the invention

[0003] The purpose of the present invention is to provide a dual-mode interference detection device and an optical element detection method, which can make the state of the optical element when detecting the optical element consistent with the state of the optical element when using the optical element, reduce measurement errors, and conveniently realize the detection of both sides of the optical element.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] A dual-operating-condition detection device, comprising:

[0006] A detection unit, comprising a workbench, a first standard element and a second standard element, wherein the workbench is used to position the measured element, and the first standard element and the second standard element are respectively arranged on both sides of the workbench, so that the first standard element is located at the first side of the measured element, and the second standard element is located at the second side of the measured element, and the first standard element is used to make a light beam incident on the first standard element at least partially reflected to form a first reference wave, and at least partially pass through the first standard element, if the measured surface of the measured element is located at the first side of the measured element, the light beam passing through the first standard element is incident on the measured surface, reflected by the measured surface to form a first reflected wave, and the second standard element is used to make a light beam incident on the second standard element at least partially reflected to form a second reference wave, and at least partially pass through the second standard element, if the measured surface of the measured element is located at the second side of the measured element, the light beam passing through the second standard element is incident on the measured surface, reflected by the measured surface to form a second reflected wave;

[0007] An interference device, used for emitting a light beam, and obtaining the first reference wave and the first reflected wave or the second reference wave and the second reflected wave from the light beam transmission component, so as to obtain a surface shape detection result of the measured surface of the measured element;

[0008] The light beam transmission component is arranged on the light output side of the interference device, and is used to transmit the light beam so that the light beam is incident on the first standard element or the second standard element, and the first reference wave and the first reflected wave from the first standard element are transmitted to the interference device, or the second reference wave and the second reflected wave from the second standard element are transmitted to the interference device.

[0009] In some embodiments, the first standard element, the workbench, and the second standard element are arranged in sequence along a vertical direction, or the first standard element, the workbench, and the second standard element are arranged in sequence along a horizontal direction.

[0010] In some embodiments, the beam delivery assembly includes:

[0011] a beam expansion unit, used to increase the aperture of the light beam from the interference device after passing through the beam expansion unit, so that the light beam with increased aperture is incident on the first standard element or the second standard element;

[0012] The beam expansion unit comprises:

[0013] A beam expander element, used to make the light beam diverge after passing through the beam expander element;

[0014] At least one folding element, used to make the light beam from the beam expanding element pass through the at least one folding element in sequence and then be incident on the collimating element;

[0015] The collimating element is used to collimate the light beam incident to the collimating element.

[0016] In some embodiments, the light beam transmission component is used to make the light beam incident on the first standard element when transmitting along the first path, and make the light beam incident on the second standard element when transmitting along the second path;

[0017] The beam transmission assembly comprises:

[0018] The first folding element is arranged at the intersection of the first path and the second path, and can be moved in and out of the intersection of the first path and the second path. When the first folding element moves out, the light beam is transmitted along the first path / the second path and is incident on the first standard element / the second standard element. When the first folding element moves in, the light beam is folded by the first folding element and is transmitted along the second path / the first path and is incident on the second standard element / the first standard element.

[0019] In some embodiments, the beam delivery assembly further comprises:

[0020] A first beam expansion unit is provided on the first path and at one side of the detection unit, and is used to increase the aperture of the light beam transmitted along the first path after passing through the first beam expansion unit, so that the light beam with increased aperture is incident on the first standard element;

[0021] The second beam expansion unit is arranged on the second path and at the other side of the detection unit, and is used to increase the aperture of the light beam transmitted along the second path after passing through the second beam expansion unit, so that the light beam with increased aperture is incident on the second standard element.

[0022] In some embodiments, the beam delivery assembly further comprises:

[0023] A third beam expansion unit is arranged at the light exiting side of the interference device, and is used to increase the aperture of the light beam from the interference device after passing through the third beam expansion unit;

[0024] The first folding element is arranged on the light-emitting side of the third beam expansion unit. When the first folding element moves out of the intersection of the first path and the second path, the light beam from the third beam expansion unit is transmitted along the first path / the second path and is incident on the first standard element / the second standard element. When the first folding element moves into the intersection of the first path and the second path, the light beam from the third beam expansion unit is folded by the first folding element, and is transmitted along the second path / the first path and is incident on the second standard element / the first standard element.

[0025] In some embodiments, when the first folding element moves out of the intersection of the first path and the second path, the first reference wave from the first standard element and the first reflected wave from the measured element are respectively transmitted in reverse direction along the first path to the interference device, or the second reference wave from the second standard element and the second reflected wave from the measured element are respectively transmitted in reverse direction along the second path to the interference device;

[0026] When the first folding element moves into the intersection of the first path and the second path, the second reference wave from the second standard element and the second reflected wave from the measured element are respectively transmitted in reverse along the second path to the first folding element, or the first reference wave from the first standard element and the first reflected wave from the measured element are respectively transmitted in reverse along the first path to the interference device, and are further folded by the first folding element and transmitted to the interference device.

[0027] In some embodiments, the device further comprises a first frame, wherein the first frame is used to position the first standard element, the interference device is connected to the first frame, and the interference device is further used to send a signal to the first frame to control the first frame to move the first standard element, so that the optical path difference between the first reference wave and the first reflected wave changes to achieve phase shift;

[0028] Or / and, it also includes a second frame, the second frame is used to position the second standard element, the interference device is connected to the second frame, and the interference device is also used to send a signal to the second frame to control the second frame to move the second standard element, so that the optical path difference between the second reference wave and the second reflected wave changes to achieve phase shift.

[0029] An optical component detection method, using any of the above dual-mode interference detection devices, the method comprising:

[0030] If the measured surface of the measured component is located at the first side / second side of the measured component during use, the measured component is positioned on the workbench so that the measured surface of the measured component is located at the first side / second side of the measured component;

[0031] The light beam transmission component makes the light beam emitted by the interference device incident on the first standard element / the second standard element, and the interference device obtains the first reference wave and the first reflected wave / the second reference wave and the second reflected wave to obtain the surface shape detection result of the measured surface of the measured element.

[0032] In some embodiments, the first standard element and the second standard element are respectively arranged on the lower side and the upper side of the workbench, and the first surface and the second surface of the measured element are both measured surfaces;

[0033] Positioning the measured component on the workbench comprises:

[0034] If the first surface of the component under test is at the lower side / upper side and the second surface is at the upper side / lower side during use, the component under test is positioned on the workbench so that the first surface of the component under test is at the lower side / upper side and the second surface is at the upper side / lower side;

[0035] The light beam transmission component is used to make the light beam emitted by the interference device incident on the first standard element / the second standard element, and the interference device obtains the first reference wave and the first reflected wave / the second reference wave and the second reflected wave to obtain the surface shape detection result of the measured surface of the measured element, which includes:

[0036] The light beam transmission component is used to make the light beam emitted by the interference device incident on the first standard element, and the interference device obtains a first reference wave and a first reflected wave to obtain a surface shape detection result of the first surface of the measured element;

[0037] The light beam transmission component is used to make the light beam emitted by the interference device incident on the second standard element, and the interference device obtains a second reference wave and a second reflected wave to obtain a surface shape detection result of the second surface of the measured element.

[0038] It can be seen from the above technical scheme that a dual-mode interference detection device provided by the present invention includes: a detection unit, including a workbench, a first standard element and a second standard element, the workbench is used to position the measured element, the first standard element and the second standard element are respectively arranged on both sides of the workbench, so that the first standard element is on the first side of the measured element, and the second standard element is on the second side of the measured element, the first standard element is used to make the light beam incident on the first standard element at least partially reflected to form a first reference wave, and at least partially pass through the first standard element, if the measured surface of the measured element is on the first side of the measured element, the light beam passing through the first standard element is incident on the measured surface, reflected by the measured surface to form a first reflected wave, and the second standard element is used to make the light beam incident on the second standard element at least partially reflected to form a first reference wave. The first standard element is partially reflected to form a second reference wave, and at least partially passes through the second standard element. If the measured surface of the measured element is on the second side of the measured element, the light beam passing through the second standard element is incident on the measured surface, reflected by the measured surface to form a second reflected wave; an interference device is used to emit a light beam and obtain the first reference wave and the first reflected wave or the second reference wave and the second reflected wave from the light beam transmission component to obtain a surface shape detection result of the measured surface of the measured element; the light beam transmission component is arranged on the light output side of the interference device, and is used to transmit the light beam, so that the light beam is incident on the first standard element or the second standard element, and the first reference wave and the first reflected wave from the first standard element are transmitted to the interference device, or the second reference wave and the second reflected wave from the second standard element are transmitted to the interference device.

[0039] The beneficial effect of the present invention is that if the measured surface of the measured element is on the first side / second side of the measured element when it is in use, the measured surface of the measured element can be positioned on the workbench so that it is on the first side / second side of the measured element, and the measured surface is detected using the first standard element / second standard element, so that the state of the measured element when the measured element is detected is consistent with the state of the measured element when it is in use. Therefore, the dual-mode interference detection device of the present invention can make the state of the optical element when detecting the optical element consistent with the state of the optical element when it is in use, and can reduce measurement errors.

[0040] The optical element detection method provided by the present invention can make the state of the optical element during detection consistent with the state of the optical element during use, thereby reducing measurement errors. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0042] Figure 1 A schematic diagram of a dual-working-state interference detection device provided in a first embodiment of the present invention;

[0043] Figure 2 for Figure 1 The schematic diagram of the dual-working condition interference detection device shown is in working condition one;

[0044] Figure 3 for Figure 1 The schematic diagram of the dual-working condition interference detection device shown is in working condition 2;

[0045] Figure 4 A schematic diagram of a dual-working-state interference detection device provided in accordance with a second embodiment of the present invention;

[0046] Figure 5 A schematic diagram of a dual-working-state interference detection device provided in a third embodiment of the present invention;

[0047] Figure 6 A schematic diagram of a dual-mode interference detection device provided in accordance with a fourth embodiment of the present invention.

[0048] The reference numerals in the drawings of the specification include:

[0049] 1-interference device, 2-first folding element, 3-first beam expander, 4-third folding element, 5-second folding element, 6-first collimator, 7-first beam expander, 8-first frame, 9-first standard element, 10-first interface, 11-first wire, 12-focal plane transfer system, 13-fourth folding element, 14-second beam expander, 15-fifth folding element, 16-sixth folding element, 17-second collimator, 18-second beam expander Unit, 19-second frame, 20-second standard element, 21-second interface, 22-second wire, 23-measured element, 24-workbench, 25-detection unit, 26-third beam expansion unit, 27-seventh folding element, 28-eighth folding element, 29-ninth folding element, 31-third beam expansion element, 32-tenth folding element, 33-third collimation element, 35-fourth beam expansion element, 36-eleventh folding element, 37-fourth collimation element. DETAILED DESCRIPTION

[0050] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0051] This embodiment provides a dual-operating-state interference detection device, comprising:

[0052] A detection unit, comprising a workbench, a first standard element and a second standard element, wherein the workbench is used to position the measured element, and the first standard element and the second standard element are respectively arranged on both sides of the workbench, so that the first standard element is located at the first side of the measured element, and the second standard element is located at the second side of the measured element, and the first standard element is used to make a light beam incident on the first standard element at least partially reflected to form a first reference wave, and at least partially pass through the first standard element, if the measured surface of the measured element is located at the first side of the measured element, the light beam passing through the first standard element is incident on the measured surface, reflected by the measured surface to form a first reflected wave, and the second standard element is used to make a light beam incident on the second standard element at least partially reflected to form a second reference wave, and at least partially pass through the second standard element, if the measured surface of the measured element is located at the second side of the measured element, the light beam passing through the second standard element is incident on the measured surface, reflected by the measured surface to form a second reflected wave;

[0053] An interference device, used for emitting a light beam, and obtaining the first reference wave and the first reflected wave or the second reference wave and the second reflected wave from the light beam transmission component, so as to obtain a surface shape detection result of the measured surface of the measured element;

[0054] The light beam transmission component is arranged on the light output side of the interference device, and is used to transmit the light beam so that the light beam is incident on the first standard element or the second standard element, and the first reference wave and the first reflected wave from the first standard element are transmitted to the interference device, or the second reference wave and the second reflected wave from the second standard element are transmitted to the interference device.

[0055] The interference device emits a light beam, and the light beam transmission component is used to transmit the light beam.

[0056] The light beam transmission component causes the light beam to be incident on the first standard element, at least partially reflected to form a first reference wave, and at least partially transmitted through the first standard element and further incident on the measured element. If the measured surface of the measured element is on the first side of the measured element, the light beam that passes through the first standard element is incident on the measured surface, reflected by the measured surface to form a first reflected wave; and the light beam transmission component transmits the first reference wave from the first standard element to the interference device, and transmits the first reflected wave from the measured element to the interference device. The interference device can obtain the interference result of the first reference wave and the first reflected wave, so as to obtain the surface shape detection result of the measured surface of the measured element according to the interference result of the first reference wave and the first reflected wave.

[0057] The light beam transmission component causes the light beam to be incident on the second standard element, at least partially reflected to form a second reference wave, and at least partially transmitted through the second standard element and further incident on the measured element. If the measured surface of the measured element is on the second side of the measured element, the light beam transmitted through the second standard element is incident on the measured surface, reflected by the measured surface to form a second reflected wave; and the light beam transmission component transmits the second reference wave from the second standard element to the interference device, and transmits the second reflected wave from the measured element to the interference device. The interference device can obtain the interference result of the second reference wave and the second reflected wave, so as to obtain the surface shape detection result of the measured surface of the measured element according to the interference result of the second reference wave and the second reflected wave.

[0058] If the measured surface of the measured element is on the first side / second side of the measured element when it is in use, the measured surface of the measured element can be positioned on the workbench so that it is on the first side / second side of the measured element, and the measured surface can be detected using the first standard element / second standard element, so that the state of the measured element when detecting the measured element is consistent with the state of the measured element when it is in use. Therefore, the dual-mode interference detection device of this embodiment can make the state of the optical element when detecting the optical element consistent with the state of the optical element when it is in use, and can reduce measurement errors.

[0059] In some embodiments, the first standard element, the workbench, and the second standard element are sequentially arranged in the horizontal direction, the first side of the measured element is the left side / right side of the measured element in the horizontal direction, and the second side of the measured element is the right side / left side of the measured element in the horizontal direction. When the measured element is positioned on the workbench, it is placed vertically, and its optical axis is horizontal. The dual-condition interference detection device of this embodiment can be applied to optical elements that are placed vertically when in use. When detecting the surface shape of such optical elements, both sides of the optical element can be conveniently detected. In some embodiments, the first standard element, the workbench, and the second standard element are sequentially arranged in the vertical direction, the first side of the measured element is the lower side / upper side of the measured element in the vertical direction, and the second side of the measured element is the upper side / lower side of the measured element in the vertical direction. When the measured element is positioned on the workbench, its optical axis is vertical. The dual-condition interference detection device of this embodiment can be applied to optical elements that are placed flat when in use, and the surface shape of such optical elements can be detected. If the measured surface of the optical element faces upward during use, the optical element is positioned on the workbench so that the measured surface faces upward during detection. If the measured surface of the optical element faces downward during use, the optical element is positioned on the workbench so that the measured surface faces downward during detection. If both the first surface and the second surface of the optical element need to be detected, the first surface is the surface on its first side, and the second surface is the surface on its second side, and the first surface of the optical element faces upward and the second surface faces downward during use, the optical element is positioned on the workbench so that the first surface of the optical element faces upward and the second surface faces downward during detection. The surface shape of the optical element will be deformed by gravity. If the gravity conditions during detection are inconsistent with the gravity conditions during use, the surface shape of the optical element during use and the detection surface shape will be different. The use of this dual-condition interference detection device can make the placement state of the optical element during detection consistent with the placement state of the optical element during use, and make the gravity conditions of the optical element during detection consistent with the gravity conditions of the optical element during use, which can reduce measurement errors and improve detection efficiency. Especially for large-aperture optical components, their surface shape is greatly affected by gravity, and it is necessary to ensure the consistency between the use state and the detection state to ensure the detection accuracy.

[0060] In some embodiments, the workbench can adjust the position and / or posture of the measured element to meet the demand for position adjustment of the measured element during detection. The workbench can have a built-in adjustment mechanism, which can drive the measured element to move in six dimensions, and can drive the measured element to move along the x-axis, y-axis, and z-axis respectively, and rotate around the x-axis, y-axis, and z-axis respectively. The z-axis is established in the direction of the optical axis of the measured element, and the xoy plane is established in the plane perpendicular to the optical axis of the measured element. The worktable can move horizontally, tilt, or move vertically to achieve high-precision calibration of the relative position of the standard element and the measured element under dual working conditions.

[0061] In some embodiments, the dual-mode interference detection device may also include a first frame, the first frame is used to position the first standard element, and the first frame is arranged on one side of the workbench. In some embodiments, the first frame can adjust the position and / or posture of the first standard element to meet the demand for adjustment of the first standard element during detection. The first frame may have a built-in adjustment mechanism, which can drive the first standard element to move in six dimensions, and can drive the first standard element to move along the x-axis, y-axis, and z-axis respectively, and rotate around the x-axis, y-axis, and z-axis respectively. The z-axis is established in the direction of the optical axis of the first standard element, and the xoy plane is established in a plane perpendicular to the optical axis of the first standard element.

[0062] In some embodiments, the dual-mode interference detection device may also include a second frame, which is used to position the second standard element, and the second frame is arranged on one side of the workbench. In some embodiments, the second frame can adjust the position and / or posture of the second standard element. The second frame may have a built-in adjustment mechanism to meet the demand for adjustment of the second standard element during detection. The second standard element can be driven to move in six dimensions, and the second standard element can be driven to move along the x-axis, y-axis, and z-axis respectively and rotate around the x-axis, y-axis, and z-axis respectively. The z-axis is established in the direction of the optical axis of the second standard element, and the xoy plane is established in a plane perpendicular to the optical axis of the second standard element.

[0063] In some embodiments, the beam transmission component includes: a beam expansion unit, which is used to increase the diameter of the light beam from the interference device after passing through the beam expansion unit, so that the light beam with the increased diameter is incident on the first standard element or the second standard element. The light beam is expanded from a small diameter to a large diameter through the beam expansion unit. In practical applications, the beam expansion unit can be set according to the diameter of the measured element to meet the detection requirements of the measured element. This dual-mode interference detection device can be applied to large-diameter measured elements. In this embodiment, the structure of the beam expansion unit is not limited, as long as the beam expansion of the interference device can be achieved and the beam incident on the measured element meets the detection requirements. In this embodiment, the beam expansion ratio of the beam expansion unit is not limited. In practical applications, it can be set according to the beam diameter of the interference device and the detection requirements of the measured element.

[0064] In some embodiments, the beam expansion unit may include: a beam expansion element, which is used to make the light beam diverge after passing through the beam expansion element and further incident on the collimating element; a collimating element, which is used to collimate the light beam incident on the collimating element. In some embodiments, the beam expansion ratio of the beam expansion unit can reach 3x~15x, and the focal ratio of the beam expansion element is between -12~-4 or between 4~12. Preferably, the beam expansion ratio of the beam expansion unit is 3x or 6x, and the focal ratio of the beam expansion element is between -4~-8. In some embodiments, the beam expansion element can adopt a lens with optical focal length, and the beam expansion element can be called a beam expander. The collimating element can adopt a lens with optical focal length, and the collimating element can be called a collimating lens.

[0065] In some embodiments, the beam expansion unit may include: a beam expansion element, which is used to make the light beam diverge after passing through the beam expansion element; at least one deflection element, which is used to make the light beam from the beam expansion element pass through the at least one deflection element in sequence and then be incident on a collimating element; and the collimating element is used to collimate the light beam incident on the collimating element. The deflection element is used to deflect the light beam. The beam expansion unit is provided with a deflection element so that the exit direction of the exit light of the beam expansion unit is different from the incident direction of the incident light of the beam expansion unit, which is convenient for light path arrangement. In this embodiment, the number of deflection elements included in the beam expansion unit is not limited, and can be set according to the requirements of light path arrangement in practical applications. For example, the exit direction of the exit light of the beam expansion unit can be deflected by 90° relative to the incident direction of the incident light of the beam expansion unit. In some embodiments, the deflection element is used to reflect the light beam incident on the deflection element to achieve deflection of the light beam. The deflection element can be a plane mirror.

[0066] In some embodiments, the beam transmission assembly may include: a focal plane transmission system for transmitting the beam without introducing additional optical focal length to the beam. The use of the focal plane transmission system can reduce the wavefront error introduced into the beam during the beam transmission process, so that the interference focal plane of the same interference device under different working conditions is within the adjustment range of the interference device, thereby ensuring the correctness and accuracy of the detection results of medium and high frequencies.

[0067] In some embodiments, the light beam transmission component is used to make the light beam incident on the first standard element when it is transmitted along the first path, and the light beam incident on the second standard element when it is transmitted along the second path; the light beam transmission component includes: a first folding element, which is arranged at the intersection of the first path and the second path, and can be moved in and out of the intersection of the first path and the second path, when the first folding element is moved out, the light beam is transmitted along the first path / the second path and incident on the first standard element / the second standard element, when the first folding element is moved in, the light beam is folded by the first folding element, and is transmitted along the second path / the first path and incident on the second standard element / the first standard element. In this embodiment, the light beam transmission component can switch the light beam to be incident on the first standard element or the second standard element, and by moving the first folding element in or out of the intersection of the first path and the second path, the light beam transmission component switches the light beam to be transmitted along the first path or along the second path, and the dual-condition interference detection device switches between working condition one and working condition two.

[0068] In some embodiments, when the first folding element moves out of the intersection of the first path and the second path, the first reference wave from the first standard element and the first reflected wave from the measured element are respectively transmitted in reverse along the first path to the interference device, or the second reference wave from the second standard element and the second reflected wave from the measured element are respectively transmitted in reverse along the second path to the interference device; when the first folding element moves into the intersection of the first path and the second path, the second reference wave from the second standard element and the second reflected wave from the measured element are respectively transmitted in reverse along the second path to the first folding element, or the first reference wave from the first standard element and the first reflected wave from the measured element are respectively transmitted in reverse along the first path to the interference device, and are further folded by the first folding element and transmitted to the interference device. In the dual-mode interference detection device of this embodiment, the reference wave generated by the first standard element, the reference wave generated by the second standard element, and the reflected wave generated by the measured element are respectively transmitted in reverse along the original path to the interference device, which helps to make the detection device compact and reduce the volume.

[0069] In some embodiments, the beam delivery assembly further comprises:

[0070] A first beam expansion unit is provided on the first path and at one side of the detection unit, and is used to increase the aperture of the light beam transmitted along the first path after passing through the first beam expansion unit, so that the light beam with increased aperture is incident on the first standard element;

[0071] The second beam expansion unit is arranged on the second path and at the other side of the detection unit, and is used to increase the aperture of the light beam transmitted along the second path after passing through the second beam expansion unit, so that the light beam with increased aperture is incident on the second standard element.

[0072] For example, reference may be made to Figure 1 , Figure 2 and Figure 3 , Figure 1 A schematic diagram of a dual-mode interference detection device provided in the first embodiment, Figure 2 for Figure 1 The schematic diagram of the dual-working condition interference detection device in working condition 1 is shown in FIG. Figure 3 for Figure 1 The schematic diagram of the dual-working-condition interference detection device shown is in working condition 2. As shown in the figure, the dual-working-condition interference detection device includes a first frame 8, a workbench 24 and a second frame 19 arranged in sequence from bottom to top, the first frame 8 is used to position the first standard element 9, the second frame 19 is used to position the second standard element 20, and the workbench 24 positions the measured element 23.

[0073] The first deflection element 2 is arranged at the light-emitting side of the interference device 1. A first beam expansion unit 7 is arranged along the first path, which can be regarded as the first detection light path, corresponding to working condition 1. The first beam expansion unit 7 includes a first beam expansion element 3, a second deflection element 5, a third deflection element 4 and a first collimation element 6.

[0074] A focus plane transfer system 12, a fourth deflection element 13 and a second beam expansion unit 18 are arranged along the second path, forming a second detection optical path along the second path, corresponding to working condition 2. The second beam expansion unit 18 includes a second beam expansion element 14, a fifth deflection element 15, a sixth deflection element 16 and a second collimation element 17.

[0075] For reference Figure 2 As shown, when the dual-mode interference detection device is in the first working condition, the first folding element 2 moves out of the optical path, and the light beam emitted by the interference device 1 is incident on the first beam expansion unit 7, and enters the detection unit 25 after passing through the first beam expansion unit 7. When the light beam is incident on the first beam expansion unit 7, it is incident on the first beam expansion element 3, and then passes through the second folding element 5, the third folding element 4, and the first collimating element 6 in sequence before entering the detection unit 25.

[0076] The light beam is incident on the first standard element 9 of the detection unit 25, and the light beam is at least partially reflected by the first standard element 9 to form a first reference wave, and the first reference wave returns to the interference device 1 through the first beam expansion unit 7. And the light beam at least partially passes through the first standard element 9 and further enters the measured element 23. If the lower side of the measured element 23 is a measured surface, the light beam passing through the first standard element 9 is incident on the measured surface, and is reflected by the measured surface to form a first reflected wave, and the first reflected wave passes through the first standard element 9 and returns to the interference device 1 through the first beam expansion unit 7. According to the interference result of the first reference wave and the first reflected wave, the surface shape detection result of the measured surface of the measured element 23 can be obtained.

[0077] For reference Figure 3 As shown, when the dual-mode interference detection device is in the second working condition, the first folding element 2 moves into the optical path, and the light beam emitted by the interference device 1 is incident on the first folding element 2, and then passes through the focal plane transfer system 12 and the fourth folding element 13 in sequence after being folded, and then is incident on the second beam expansion unit 18 after being folded by the fourth folding element 13, and then enters the detection unit 25 after passing through the second beam expansion unit 18. The light beam is incident on the second beam expansion element 14 of the second beam expansion unit 18, and then passes through the fifth folding element 15, the sixth folding element 16, and the second collimating element 17 in sequence before entering the detection unit 25.

[0078] The light beam is incident on the second standard element 20 of the detection unit 25, and the light beam is at least partially reflected at the second standard element 20 to form a second reference wave, which passes through the second beam expansion unit 18, the fourth folding element 13, the focal plane transfer system 12, and the first folding element 2 in sequence and returns to the interference device 1. And the light beam is at least partially transmitted through the second standard element 20 and further incident on the measured element 23. If the upper side of the measured element 23 is the measured surface, the light beam passing through the second standard element 20 is incident on its measured surface, is reflected to form a second reflected wave, and the second reflected wave passes through the second standard element 20, passes through the second beam expansion unit 18, the fourth folding element 13, the focal plane transfer system 12, and the first folding element 2 in sequence and returns to the interference device 1. According to the interference result of the second reference wave and the second reflected wave, the surface shape detection result of the measured surface of the measured element 23 can be obtained.

[0079] The second detection optical path adopts the method of first bending the light beam, then passing through the focal plane transmission system, and then expanding the beam. In practical applications, since the two working conditions should have the same detection accuracy, but working condition 2 needs to pass through more optical elements, the optical elements on the second detection optical path should have higher manufacturing accuracy to achieve the same detection accuracy as working condition 1.

[0080] The first deflecting element 2 can be moved into and out of the optical path by rotating the first deflecting element 2 . Figures 1 to 3The dual-mode interference detection device shown is illustrated by taking a vertical detection device as an example, wherein the first frame 8, the workbench 24 and the second frame 19 are arranged vertically in sequence from bottom to top, the first beam expansion unit 7 is arranged below the detection unit 25, and the second beam expansion unit 18 is arranged above the detection unit 25. The first folding element 2 can be arranged at 45° to the horizontal direction when moved in, and the first folding element 2 can be rotated counterclockwise to be arranged at 45° to the horizontal direction. The fourth folding element 13 can be arranged at 45° to the horizontal direction. The first collimating element 6 is fitted with the first frame 8, and the second collimating element 17 is fitted with the second frame 19, which helps to make the overall structure of the dual-mode interference detection device compact and stable.

[0081] For example, reference may be made to Figure 4 , Figure 4 A schematic diagram of a dual-mode interference detection device provided for the second embodiment. As shown in the figure, the dual-mode interference detection device includes a first frame 8, a workbench 24 and a second frame 19 arranged in sequence from bottom to top, the first frame 8 is used to position the first standard element 9, the second frame 19 is used to position the second standard element 20, and the workbench 24 positions the measured element 23. The first folding element 2 is arranged on the light-emitting side of the interference device 1. A focal plane transfer system 12, a fourth folding element 13 and a first beam expansion unit 7 are arranged along the first path, and a first detection light path is formed along the first path. The first beam expansion unit 7 includes a first beam expansion element 3, a second folding element 5, a third folding element 4 and a first collimating element 6. A second beam expansion unit 18 is arranged along the second path, and the second path can be considered as a second detection light path. The second beam expansion unit 18 includes a second beam expansion element 14, a fifth folding element 15, a sixth folding element 16 and a second collimating element 17.

[0082] When the dual-mode interference detection device is in the first working condition, the first folding element 2 moves into the optical path, and the light beam emitted by the interference device 1 is incident on the first folding element 2, and then passes through the focal plane transfer system 12 and the fourth folding element 13 in sequence after being folded, and then is incident on the first beam expansion unit 7 after being folded by the fourth folding element 13, and then enters the detection unit 25 after passing through the first beam expansion unit 7. When the light beam is incident on the first beam expansion unit 7, it is incident on the first beam expansion element 3, and then passes through the second folding element 5, the third folding element 4, and the first collimating element 6 in sequence before entering the detection unit 25.

[0083] When the dual-mode interference detection device is in the second working condition, the first folding element 2 moves out of the optical path, and the light beam emitted by the interference device 1 is incident on the second beam expansion unit 18, and then enters the detection unit 25 after passing through the second beam expansion unit 18. The light beam is incident on the second beam expansion element 14 of the second beam expansion unit 18, and then passes through the fifth folding element 15, the sixth folding element 16, and the second collimating element 17 in sequence before entering the detection unit 25.

[0084] The first detection optical path adopts the method of first folding the light beam, then passing through the focal plane transmission system, and then expanding the beam. In practical applications, since the two working conditions should have the same detection accuracy, but working condition one needs to pass through more optical elements, the optical elements on the first detection optical path should have higher manufacturing accuracy to achieve the same detection accuracy as working condition two.

[0085] Figure 4 The dual-mode interference detection device shown is illustrated by taking a vertical detection device as an example, wherein the first frame 8, the workbench 24 and the second frame 19 are arranged vertically in sequence from bottom to top, the first beam expansion unit 7 is arranged below the detection unit 25, and the second beam expansion unit 18 is arranged above the detection unit 25. The first folding element 2 can be moved in and out by rotating the first folding element 2, and the first folding element 2 can be rotated clockwise to move it into the optical path. When the first folding element 2 is moved in, it can be set at 45° to the horizontal direction. The fourth folding element 13 can be a plane mirror.

[0086] In some embodiments, the light beam transmission component also includes: a third beam expansion unit, which is arranged on the light output side of the interference device, and is used to increase the aperture of the light beam from the interference device after passing through the third beam expansion unit; the first folding element is arranged on the light output side of the third beam expansion unit, and when the first folding element moves out of the intersection of the first path and the second path, the light beam from the third beam expansion unit is transmitted along the first path / the second path and is incident on the first standard element / the second standard element, and when the first folding element moves into the intersection of the first path and the second path, the light beam from the third beam expansion unit is folded by the first folding element, and is transmitted along the second path / the first path and is incident on the second standard element / the first standard element.

[0087] For example, reference may be made to Figure 5 , Figure 5 A schematic diagram of a dual-working-condition interference detection device provided for the third embodiment. As shown in the figure, the dual-working-condition interference detection device includes a first frame 8, a workbench 24, and a second frame 19 arranged in sequence from bottom to top, the first frame 8 positions the first standard element 9, the second frame 19 positions the second standard element 20, and the workbench 24 positions the measured element 23.

[0088] The third beam expansion unit 26 is arranged on the light exiting side of the interference device 1, and the first folding element 2 is arranged on the light exiting side of the third beam expansion unit 26. The light beam emitted by the interference device 1 is incident on the third beam expansion unit 26, and then is incident on the first folding element 2 after passing through the third beam expansion unit 26. When the light beam is incident on the third beam expansion unit 26, it passes through the first beam expansion element 3, the second folding element 5, the third folding element 4 and the first collimating element 6 in sequence before being emitted. The seventh folding element 27, the focal plane transfer system 12, the eighth folding element 28 and the ninth folding element 29 are arranged along the second path, and a second detection optical path is formed along the second path.

[0089] When the dual-mode interference detection device is in working condition 1, the first folding element 2 moves out, and the light beam emitted by the third beam expansion unit 26 enters the detection unit 25. When the dual-mode interference detection device is in working condition 2, the first folding element 2 moves in, and the light beam emitted by the third beam expansion unit 26 enters the first folding element 2, and after being folded, it passes through the seventh folding element 27, the focal plane transfer system 12, the eighth folding element 28, and the ninth folding element 29 in sequence before entering the detection unit 25. In this embodiment, the method of expanding the beam first, folding it, and then passing through the focal plane transfer system is adopted.

[0090] Figure 5 The dual-mode interference detection device shown is described by taking a vertical detection device as an example, wherein the first frame 8, the workbench 24 and the second frame 19 are arranged vertically in sequence from bottom to top, the third beam expansion unit 26 is arranged below the detection unit 25, and the first folding element 2 is between the third beam expansion unit 26 and the detection unit 25 when it is moved into the optical path. The first folding element 2 can be moved in and out by rotating it, and the first folding element 2 can be rotated clockwise to move it into the optical path.

[0091] For example, reference may be made to Figure 6 , Figure 6A schematic diagram of a dual-mode interference detection device provided for the fourth embodiment. As shown in the figure, the dual-mode interference detection device includes a first frame 8, a workbench 24 and a second frame 19 arranged in sequence from bottom to top, the first frame 8 positions the first standard element 9, the second frame 19 positions the second standard element 20, and the workbench 24 positions the measured element 23. The first folding element 2 is arranged on the light-emitting side of the interference device 1. A first beam expansion unit 7 is arranged along the first path, and the first path can be considered as the first detection light path. The first beam expansion unit 7 includes a third beam expansion element 31, a tenth folding element 32 and a third collimating element 33. A focal plane transfer system 12, a fourth folding element 13 and a second beam expansion unit 18 are arranged along the second path, and a second detection light path is formed along the second path. The second beam expansion unit 18 includes a fourth beam expansion element 35, an eleventh folding element 36 and a fourth collimating element 37. Compared with the dual-mode interference detection device of the first embodiment, the first beam expansion unit 7 and the second beam expansion unit 18 in this embodiment adopt different structures.

[0092] In some embodiments, the interference device 1 is connected to the first frame 8, and the interference device 1 is also used to send a signal to the first frame 8 to control the first frame 8 to move the first standard element 9, so that the optical path difference between the first reference wave and the first reflected wave changes to achieve phase shift, so as to perform interference detection, and a PZT phase shift method is adopted. The first frame 8 may be provided with a first interface 10, and a first wire 11 is connected to the first interface 10, and the first wire 11 is connected to the interference device 1. In some embodiments, the interference device 1 is connected to the second frame 19, and the interference device 1 is also used to send a signal to the second frame 19 to control the second frame 19 to move the second standard element 20, so that the optical path difference between the second reference wave and the second reflected wave changes to achieve phase shift, so as to perform interference detection, and a PZT phase shift method is adopted. The second frame 19 may be provided with a second interface 21, and a second wire 22 is connected to the second interface 21, and the second wire 22 is connected to the interference device 1. For reference Figures 1 to 6 As shown, the first frame 8 is provided with a first interface 10, and the first wire 11 is connected to the first interface 10, and the first wire 11 is connected to the interference device 1. The second frame 19 is provided with a second interface 21, and the second wire 22 is connected to the second interface 21, and the second wire 22 is connected to the interference device 1.

[0093] In some embodiments, the interference device 1 may be a wavelength tuning interference device or a cavity length tuning interference device, and the optical path difference between the first reference wave and the first reflected wave and the optical path difference between the second reference wave and the second reflected wave may be changed by the interference device 1. A wavelength or cavity length tuning phase shift method may be used.

[0094] In this embodiment, the structure of the interference device 1 is not limited, and the interference device 1 can use but is not limited to a small-aperture interferometer. Exemplarily, the small-aperture interferometer is a 25-150 mm aperture interferometer, preferably a 100 mm aperture. Any of the first deflection element 2 to the eleventh deflection element 36 can use a plane mirror.

[0095] The measured element 23 can be a plane measured mirror, a spherical measured mirror, an aspherical measured mirror or a free-form measured mirror. Correspondingly, the first standard element 9 can be a plane standard mirror, a spherical standard mirror, an aspherical standard mirror or a free-form standard mirror, and the second standard element 20 can be a plane standard mirror, a spherical standard mirror, an aspherical standard mirror or a free-form standard mirror.

[0096] above Figures 1 to 6 The dual-mode interference detection device shown is described by taking a vertical detection device as an example. It should be noted that: Figures 1 to 6 The optical path structure used in the dual-mode interference detection device shown can also be applied to form a horizontal detection device, in which the workbench places the component to be tested vertically for detection.

[0097] The dual-condition interference detection device of this embodiment can realize dual-condition detection. The detection condition can be switched only by switching the optical path, which greatly reduces the manufacturing cost and improves the detection efficiency.

[0098] This embodiment further provides an optical element detection method, which uses the dual-mode interference detection device described in any of the above embodiments, and includes the following steps:

[0099] S101 : if the measured surface of the measured component 23 is located at the first side / second side of the measured component 23 during use, the measured component 23 is positioned on the workbench 24 so that the measured surface of the measured component 23 is located at the first side / second side of the measured component 23 .

[0100] If the measured surface of the measured component 23 is located at the first side of the measured component 23 during use, the measured component 23 is positioned on the workbench 24 so that the measured surface of the measured component 23 is located at the first side of the measured component 23. If the measured surface of the measured component 23 is located at the second side of the measured component 23 during use, the measured component 23 is positioned on the workbench 24 so that the measured surface of the measured component 23 is located at the second side of the measured component 23.

[0101] If the measured element 23 is placed vertically during use, its optical axis is horizontal, the first side is the left side / right side of the measured element 23, and the second side is the right side / left side of the measured element 23. In the dual-mode interference detection device used, the first standard element 9, the workbench 24 and the second standard element 20 can be arranged in sequence along the horizontal direction.

[0102] If the measured element 23 is placed horizontally during use, its optical axis is vertical, the first side is the lower side / upper side of the measured element 23, and the second side is the upper side / lower side of the measured element 23. In the present dual-mode interference detection device, the first standard element 9, the workbench 24, and the second standard element 20 may be arranged in sequence along the vertical direction.

[0103] S102: The light beam transmission component makes the light beam emitted by the interference device 1 incident on the first standard element 9 / the second standard element 20, and the interference device 1 obtains the first reference wave and the first reflected wave / the second reference wave and the second reflected wave to obtain the surface shape detection result of the measured surface of the measured element 23.

[0104] If the measured surface of the measured element 23 is on the first side of the measured element 23, the beam transmission component causes the beam emitted by the interference device 1 to be incident on the first standard element 9, and the interference device 1 obtains the returned first reference wave and the first reflected wave. If the measured surface of the measured element 23 is on the second side of the measured element 23, the beam transmission component causes the beam emitted by the interference device 1 to be incident on the second standard element 20, and the interference device 1 obtains the returned second reference wave and the second reflected wave.

[0105] The optical element detection method of this embodiment uses a dual-mode interference detection device, which can make the state of the measured element when detecting the measured element consistent with the state of the measured element when in use, thereby reducing measurement errors.

[0106] In some embodiments, the first standard element 9 and the second standard element 20 are respectively arranged at the lower side and the upper side of the workbench 24, and the first surface and the second surface of the measured element 23 are both measured surfaces. Then, positioning the measured element 23 on the workbench 24 includes: if the first surface of the measured element 23 is at the lower side / upper side and the second surface is at the upper side / lower side during use, positioning the measured element 23 on the workbench 24 so that the first surface of the measured element 23 is at the lower side / upper side and the second surface is at the upper side / lower side.

[0107] Accordingly, the light beam transmission component is used to make the light beam emitted by the interference device 1 incident on the first standard element 9 / the second standard element 20, and the interference device 1 obtains the first reference wave and the first reflected wave / the second reference wave and the second reflected wave to obtain the surface shape detection result of the measured surface of the measured element 23, which includes the following steps:

[0108] S1021: enabling the light beam transmission component to transmit the light beam emitted by the interference device 1 to the first standard element 9, and the interference device 1 to obtain a first reference wave and a first reflected wave to obtain a surface shape detection result of the first surface of the measured element 23;

[0109] S1022: The light beam transmission component is used to make the light beam emitted by the interference device 1 incident on the second standard element 20 , and the interference device 1 obtains a second reference wave and a second reflected wave to obtain a surface shape detection result of the second surface of the measured element 23 .

[0110] It should be noted that the order of performing step S1021 and step S1022 is not limited in this embodiment. Step S1021 may be performed first and then step S1022, or step S1022 may be performed first and then step S1021.

[0111] Corresponding exemplarily to Figure 1 , Figure 4 , Figure 5 and Figure 6 In the dual-mode interference detection device shown, the first standard element 9 and the second standard element 20 are placed in the first frame 8 and the second frame 19 respectively, and after the element to be measured 23 is placed on the workbench 24, the first folding element 2 is moved out of the optical path, the interference device 1 emits a light beam, and the light beam is incident on the first standard element 9 through the light beam transmission component, and the interference device 1 is controlled to obtain the interference result of the first reference wave and the first reflected wave. Then, the first folding element 2 is moved into the optical path, the interference device 1 emits a light beam, and the light beam is incident on the second standard element 20 through the light beam transmission component, and the interference device 1 is controlled to obtain the interference result of the second reference wave and the second reflected wave.

[0112] In some embodiments, before the interference device 1 obtains the interference result between the first reference wave and the first reflected wave, it may include: adjusting the position and / or posture of the measured element 23 through the workbench 24, or / and adjusting the position and / or posture of the first standard element 9 through the first frame 8, so that the optical axis of the measured element 23 is aligned with the optical axis of the first standard element 9.

[0113] In some embodiments, before the interference device 1 obtains the interference result between the second reference wave and the second reflected wave, it may include: adjusting the position and / or posture of the measured element 23 through the workbench 24, or / and adjusting the position and / or posture of the second standard element 20 through the second frame 19, so that the optical axis of the measured element 23 is aligned with the optical axis of the second standard element 20.

[0114] The above is a detailed introduction to the dual-mode interference detection device and optical element detection method provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present invention, the present invention can also be improved and modified in a number of ways, and these improvements and modifications also fall within the scope of protection of the present invention.

Claims

1. A dual-mode interference detection device, characterized in that: include: A detection unit, comprising a workbench, a first standard element and a second standard element, wherein the workbench is used to position the measured element, and the first standard element and the second standard element are respectively arranged on both sides of the workbench, so that the first standard element is located at the first side of the measured element, and the second standard element is located at the second side of the measured element, and the first standard element is used to make a light beam incident on the first standard element at least partially reflected to form a first reference wave, and at least partially pass through the first standard element, if the measured surface of the measured element is located at the first side of the measured element, the light beam passing through the first standard element is incident on the measured surface, reflected by the measured surface to form a first reflected wave, and the second standard element is used to make a light beam incident on the second standard element at least partially reflected to form a second reference wave, and at least partially pass through the second standard element, if the measured surface of the measured element is located at the second side of the measured element, the light beam passing through the second standard element is incident on the measured surface, reflected by the measured surface to form a second reflected wave; An interference device, used for emitting a light beam, and obtaining the first reference wave and the first reflected wave or the second reference wave and the second reflected wave from the light beam transmission component, so as to obtain a surface shape detection result of the measured surface of the measured element; The light beam transmission component is arranged on the light output side of the interference device, and is used to transmit the light beam so that the light beam is incident on the first standard element or the second standard element, and the first reference wave and the first reflected wave from the first standard element are transmitted to the interference device, or the second reference wave and the second reflected wave from the second standard element are transmitted to the interference device.

2. The dual-mode interference detection device according to claim 1, characterized in that: The first standard element, the workbench and the second standard element are arranged in sequence along a vertical direction, or the first standard element, the workbench and the second standard element are arranged in sequence along a horizontal direction.

3. The dual-mode interference detection device according to claim 1, characterized in that: The beam transmission assembly comprises: a beam expansion unit, used to increase the aperture of the light beam from the interference device after passing through the beam expansion unit, so that the light beam with increased aperture is incident on the first standard element or the second standard element; The beam expansion unit comprises: A beam expander element, used to make the light beam diverge after passing through the beam expander element; At least one folding element, used to make the light beam from the beam expanding element pass through the at least one folding element in sequence and then be incident on the collimating element; The collimating element is used to collimate the light beam incident to the collimating element.

4. The dual-mode interference detection device according to claim 1, characterized in that: The light beam transmission component is used to make the light beam incident on the first standard element when it is transmitted along the first path, and make the light beam incident on the second standard element when it is transmitted along the second path; The beam transmission assembly comprises: The first folding element is arranged at the intersection of the first path and the second path, and can be moved in and out of the intersection of the first path and the second path. When the first folding element moves out, the light beam is transmitted along the first path / the second path and is incident on the first standard element / the second standard element. When the first folding element moves in, the light beam is folded by the first folding element and is transmitted along the second path / the first path and is incident on the second standard element / the first standard element.

5. The dual-mode interference detection device according to claim 4, characterized in that: The beam transmission assembly further comprises: A first beam expansion unit is provided on the first path and at one side of the detection unit, and is used to increase the aperture of the light beam transmitted along the first path after passing through the first beam expansion unit, so that the light beam with the increased aperture is incident on the first standard element; The second beam expansion unit is arranged on the second path and at the other side of the detection unit, and is used to increase the aperture of the light beam transmitted along the second path after passing through the second beam expansion unit, so that the light beam with increased aperture is incident on the second standard element.

6. The dual-mode interference detection device according to claim 4, characterized in that: The beam transmission assembly further comprises: A third beam expansion unit is arranged at the light exiting side of the interference device, and is used to increase the aperture of the light beam from the interference device after passing through the third beam expansion unit; The first folding element is arranged on the light-emitting side of the third beam expansion unit. When the first folding element moves out of the intersection of the first path and the second path, the light beam from the third beam expansion unit is transmitted along the first path / the second path and is incident on the first standard element / the second standard element. When the first folding element moves into the intersection of the first path and the second path, the light beam from the third beam expansion unit is folded by the first folding element, and is transmitted along the second path / the first path and is incident on the second standard element / the first standard element.

7. The dual-mode interference detection device according to claim 4, characterized in that: When the first folding element moves out of the intersection of the first path and the second path, the first reference wave from the first standard element and the first reflected wave from the measured element are respectively transmitted in reverse direction along the first path to the interference device, or the second reference wave from the second standard element and the second reflected wave from the measured element are respectively transmitted in reverse direction along the second path to the interference device; When the first folding element moves into the intersection of the first path and the second path, the second reference wave from the second standard element and the second reflected wave from the measured element are respectively transmitted in reverse along the second path to the first folding element, or the first reference wave from the first standard element and the first reflected wave from the measured element are respectively transmitted in reverse along the first path to the interference device, and are further folded by the first folding element and transmitted to the interference device.

8. The dual-mode interference detection device according to claim 1, characterized in that: The device further comprises a first frame, wherein the first frame is used to position the first standard element, the interference device is connected to the first frame, and the interference device is further used to send a signal to the first frame to control the first frame to move the first standard element so that the optical path difference between the first reference wave and the first reflected wave changes to achieve phase shift; Or / and, it also includes a second frame, the second frame is used to position the second standard element, the interference device is connected to the second frame, and the interference device is also used to send a signal to the second frame to control the second frame to move the second standard element, so that the optical path difference between the second reference wave and the second reflected wave changes to achieve phase shift.

9. An optical component detection method, using the dual-mode interference detection device according to any one of claims 1 to 8, characterized in that: Methods include: If the measured surface of the measured component is located at the first side / second side of the measured component during use, the measured component is positioned on the workbench so that the measured surface of the measured component is located at the first side / second side of the measured component; The light beam transmission component makes the light beam emitted by the interference device incident on the first standard element / the second standard element, and the interference device obtains the first reference wave and the first reflected wave / the second reference wave and the second reflected wave to obtain the surface shape detection result of the measured surface of the measured element.

10. The optical component detection method according to claim 9, characterized in that: The first standard element and the second standard element are respectively arranged on the lower side and the upper side of the workbench, and the first surface and the second surface of the measured element are both measured surfaces; Positioning the measured component on the workbench comprises: If the first surface of the component under test is at the lower side / upper side and the second surface is at the upper side / lower side during use, the component under test is positioned on the workbench so that the first surface of the component under test is at the lower side / upper side and the second surface is at the upper side / lower side; The light beam transmission component is used to make the light beam emitted by the interference device incident on the first standard element / the second standard element, and the interference device obtains the first reference wave and the first reflected wave / the second reference wave and the second reflected wave to obtain the surface shape detection result of the measured surface of the measured element, which includes: The light beam transmission component is used to make the light beam emitted by the interference device incident on the first standard element, and the interference device obtains a first reference wave and a first reflected wave to obtain a surface shape detection result of the first surface of the measured element; The light beam transmission component is used to make the light beam emitted by the interference device incident on the second standard element, and the interference device obtains a second reference wave and a second reflected wave to obtain a surface shape detection result of the second surface of the measured element.

Images