Dual-mode interference detection device and optical element detection method

Abstract

The present invention discloses a dual-condition interference detection device and an optical element detection method, which relate to the field of optical interference detection and are used to solve the problem of making the state of the optical element during detection consistent with the state of the optical element during use. The device includes: a detection unit, which includes a workbench, a first standard element, and a second standard element. The workbench positions the element to be measured, so that the first standard element is on the first side of the element to be measured, and the second standard element is on the second side of the element to be measured; an interference device, which is used to emit a light beam and obtain a reference wave and a reflected wave from the light beam transmission component to obtain a surface shape detection result of the measured surface of the element to be measured; a light beam transmission component, which is used to transmit the light beam, make the light beam incident on the first standard element or the second standard element, and make the reference wave and the reflected wave from the first standard element or the second standard element transmit to the interference device. The present invention can make the state of the optical element during the detection of the optical element consistent with the state of the optical element during use, and reduce the measurement error.

Description

Technical Field

[0001] The present invention relates to the field of optical interference detection, and particularly to a dual-condition interference detection device and an optical element detection method. Background Art

[0002] Optical interference measurement methods have been widely used in the high-precision surface shape detection of optical elements due to their advantages of high precision and non-contact non-damage. Interference measurement is usually a relative measurement method, and its principle is to obtain the surface shape error information of an optical element by analyzing the interference fringes generated by a reference wavefront and a measured wavefront. With the increasing measurement accuracy in fields such as aerospace, astronomy, and high-power lasers, higher requirements are also put forward for optical detection instruments. Summary of the Invention

[0003] The object of the present invention is to provide a dual-condition interference detection device and an optical element detection method, which can make the state of the optical element during detection consistent with its state during use, reduce measurement errors, and facilitate the detection of both sides of the optical element.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] A dual-condition detection device, comprising:

[0006] A detection unit, including a workbench, a first standard element, and a second standard element. The workbench is used to position the element to be measured. The first standard element and the second standard element are respectively arranged on both sides of the workbench, so that the first standard element is on the first side of the element to be measured, and the second standard element is on the second side of the element to be measured. The first standard element is used to reflect at least part of the incident beam to form a first reference wave, and at least part of the beam passes through the first standard element. If the measured surface of the element to be measured is on the first side of the element to be measured, the beam passing through the first standard element is incident on the measured surface and is reflected by the measured surface to form a first reflected wave. The second standard element is used to reflect at least part of the incident beam to form a second reference wave, and at least part of the beam passes through the second standard element. If the measured surface of the element to be measured is on the second side of the element to be measured, the beam passing through the second standard element is incident on the measured surface and is reflected by the measured surface to form a second reflected wave;

[0007] An interference device, used to emit a beam and obtain the first reference wave and the first reflected wave or the second reference wave and the second reflected wave from the beam transmission component to obtain the surface shape detection result of the measured surface of the element to be measured;

[0008] The beam transmission component is disposed on the light output side of the interference device for transmitting the beam, causing the beam to be incident on the first standard element or the second standard element, and causing the first reference wave and the first reflected wave from the first standard element to be transmitted to the interference device, or causing the second reference wave and the second reflected wave from the second standard element to be transmitted to the interference device.

[0009] In some embodiments, the first standard element, the workbench, and the second standard element are sequentially arranged in the vertical direction, or the first standard element, the workbench, and the second standard element are sequentially arranged in the horizontal direction.

[0010] In some embodiments, the beam transmission component includes:

[0011] A beam expanding unit for expanding the aperture of the beam from the interference device after passing through the beam expanding unit, and causing the beam with an increased aperture to be incident on the first standard element or the second standard element;

[0012] The beam expanding unit includes:

[0013] A beam expanding element for diverging the beam after passing through the beam expanding element;

[0014] At least one deflecting element for causing the beam from the beam expanding element to be incident on the collimating element after passing through the at least one deflecting element in sequence;

[0015] The collimating element for collimating the beam incident on the collimating element.

[0016] In some embodiments, the beam transmission component is configured to cause the beam to be incident on the first standard element when the beam travels along a first path, and cause the beam to be incident on the second standard element when the beam travels along a second path;

[0017] The beam transmission component includes:

[0018] A first deflecting element disposed at the intersection of the first path and the second path and movable into and out of the intersection of the first path and the second path. When the first deflecting element is moved out, the beam travels along the first path / the second path and is incident on the first standard element / the second standard element. When the first deflecting element is moved in, the beam is deflected by the first deflecting element and travels along the second path / the first path and is incident on the second standard element / the first standard element.

[0019] In some embodiments, the beam transmission component further includes:

[0020] The first beam expander unit is disposed on the first path and on one side of the detection unit, and is configured to increase the aperture of the light beam transmitted along the first path after passing through the first beam expander unit, so that the light beam with the increased aperture is incident on the first standard element;

[0021] The second beam expander unit is disposed on the second path and on the other side of the detection unit, and is configured to increase the aperture of the light beam transmitted along the second path after passing through the second beam expander unit, so that the light beam with the increased aperture is incident on the second standard element.

[0022] In some embodiments, the light beam transmission assembly further includes:

[0023] The third beam expander unit is disposed on the light output side of the interference device, and is configured to increase the aperture of the light beam from the interference device after passing through the third beam expander unit;

[0024] The first folding element is disposed on the light output side of the third beam expander unit. When the first folding element moves out of the intersection of the first path and the second path, the light beam from the third beam expander unit is transmitted along the first path / the second path and is incident on the first standard element / the second standard element. When the first folding element moves into the intersection of the first path and the second path, the light beam from the third beam expander unit is folded by the first folding element and is transmitted along the second path / the first path and is incident on the second standard element / the first standard element.

[0025] In some embodiments, when the first folding element moves out of the intersection of the first path and the second path, the first reference wave from the first standard element and the first reflected wave from the element under test are respectively transmitted reversely along the first path to the interference device, or the second reference wave from the second standard element and the second reflected wave from the element under test are respectively transmitted reversely along the second path to the interference device;

[0026] When the first folding element moves into the intersection of the first path and the second path, the second reference wave from the second standard element and the second reflected wave from the element under test are respectively transmitted reversely along the second path to the first folding element, or the first reference wave from the first standard element and the first reflected wave from the element under test are respectively transmitted reversely along the first path to the interference device, and are further folded by the first folding element and transmitted to the interference device.

[0027] In some embodiments, it further includes a first housing for positioning the first standard element. The interference device is connected to the first housing and is further configured to send a signal to the first housing to control the first housing to move the first standard element, so as to change the optical path difference between the first reference wave and the first reflected wave to achieve phase shift.

[0028] Or / and, it further includes a second housing for positioning the second standard element. The interference device is connected to the second housing and is further configured to send a signal to the second housing to control the second housing to move the second standard element, so as to change the optical path difference between the second reference wave and the second reflected wave to achieve phase shift.

[0029] An optical element detection method using the dual-mode interference detection device according to any one of the above. The method includes:

[0030] If the measured surface of the element to be measured is on the first side / second side of the element to be measured during use, position the element to be measured on the workbench so that the measured surface of the element to be measured is on the first side / second side of the element to be measured.

[0031] Enable the beam transmission assembly to incident the beam emitted by the interference device on the first standard element / second standard element. The interference device acquires the first reference wave and the first reflected wave / second reference wave and the second reflected wave to obtain the surface shape detection result of the measured surface of the element to be measured.

[0032] In some embodiments, the first standard element and the second standard element are respectively arranged on the lower side and the upper side of the workbench, and the first surface and the second surface of the element to be measured are both measured surfaces.

[0033] Positioning the element to be measured on the workbench includes:

[0034] If the first surface of the element to be measured is on the lower side / upper side and the second surface is on the upper side / lower side during use, position the element to be measured on the workbench so that the first surface of the element to be measured is on the lower side / upper side and the second surface is on the upper side / lower side.

[0035] Enabling the beam transmission assembly to incident the beam emitted by the interference device on the first standard element / second standard element, and the interference device acquires the first reference wave and the first reflected wave / second reference wave and the second reflected wave to obtain the surface shape detection result of the measured surface of the element to be measured includes:

[0036] Enable the beam transmission assembly to incident the beam emitted by the interference device on the first standard element, and the interference device acquires the first reference wave and the first reflected wave to obtain the surface shape detection result of the first surface of the element to be measured.

[0037] Cause the beam transmission component to make the beam emitted from the interference device incident on the second standard element, and the interference device acquires a second reference wave and a second reflected wave to obtain the surface shape detection result of the second surface of the element under test.

[0038] As can be seen from the above technical solution, a dual-condition interference detection device provided by the present invention includes: a detection unit, including a workbench, a first standard element, and a second standard element. The workbench is used to position the element under test. The first standard element and the second standard element are respectively arranged on both sides of the workbench, so that the first standard element is on the first side of the element under test, and the second standard element is on the second side of the element under test. The first standard element is used to make at least part of the beam incident on the first standard element be reflected to form a first reference wave, and at least part of the beam passes through the first standard element. If the surface under test of the element under test is on the first side of the element under test, the beam passing through the first standard element is incident on the surface under test and is reflected by the surface under test to form a first reflected wave. The second standard element is used to make at least part of the beam incident on the second standard element be reflected to form a second reference wave, and at least part of the beam passes through the second standard element. If the surface under test of the element under test is on the second side of the element under test, the beam passing through the second standard element is incident on the surface under test and is reflected by the surface under test to form a second reflected wave; an interference device, which is used to emit a beam and acquire the first reference wave and the first reflected wave or the second reference wave and the second reflected wave from the beam transmission component to obtain the surface shape detection result of the surface under test of the element under test; a beam transmission component, which is arranged on the light-emitting side of the interference device and is used to transmit the beam, make the beam incident on the first standard element or the second standard element, and make the first reference wave and the first reflected wave from the first standard element be transmitted to the interference device, or make the second reference wave and the second reflected wave from the second standard element be transmitted to the interference device.

[0039] The beneficial effect of the present invention is that if the surface under test of the element under test is on the first side / second side of the element under test during use, the element under test can be positioned on the workbench so that its surface under test is on the first side / second side of the element under test, and the first standard element / second standard element is used to detect its surface under test. Then, the state of the element under test during detection is the same as the state of the element under test during use. Therefore, the dual-condition interference detection device of the present invention can make the state of the optical element during detection the same as the state of the optical element during use, and can reduce the measurement error.

[0040] An optical element detection method provided by the present invention can make the state of the optical element during detection the same as the state of the optical element during use, and can reduce the measurement error. Description of the Drawings

[0041] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can be obtained based on these drawings.

[0042] Figure 1 Schematic diagram of a dual-condition interference detection device provided by the first embodiment of the present invention;

[0043] Figure 2 For Figure 1 Schematic diagram of the dual-condition interference detection device shown in the first working condition;

[0044] Figure 3 For Figure 1 Schematic diagram of the dual-condition interference detection device shown in the second working condition;

[0045] Figure 4 Schematic diagram of a dual-condition interference detection device provided by the second embodiment of the present invention;

[0046] Figure 5 Schematic diagram of a dual-condition interference detection device provided by the third embodiment of the present invention;

[0047] Figure 6 Schematic diagram of a dual-condition interference detection device provided by the fourth embodiment of the present invention.

[0048] The reference numerals in the accompanying drawings of the specification include:

[0049] 1 - Interference device, 2 - First folding element, 3 - First beam expander, 4 - Third folding element, 5 - Second folding element, 6 - First collimating element, 7 - First beam expanding unit, 8 - First housing, 9 - First standard element, 10 - First interface, 11 - First wire, 12 - Focal plane transfer system, 13 - Fourth folding element, 14 - Second beam expander, 15 - Fifth folding element, 16 - Sixth folding element, 17 - Second collimating element, 18 - Second beam expanding unit, 19 - Second housing, 20 - Second standard element, 21 - Second interface, 22 - Second wire, 23 - Element under test, 24 - Workbench, 25 - Detection unit, 26 - Third beam expanding unit, 27 - Seventh folding element, 28 - Eighth folding element, 29 - Ninth folding element, 31 - Third beam expander, 32 - Tenth folding element, 33 - Third collimating element, 35 - Fourth beam expander, 36 - Eleventh folding element, 37 - Fourth collimating element. Detailed implementation manners

[0050] To enable those skilled in the art to better understand the technical solutions in the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0051] This embodiment provides a dual-mode interference detection device, including:

[0052] A detection unit, including a workbench, a first standard element, and a second standard element. The workbench is used to position the element to be measured. The first standard element and the second standard element are respectively arranged on both sides of the workbench, such that the first standard element is on the first side of the element to be measured, and the second standard element is on the second side of the element to be measured. The first standard element is used to cause at least part of the light beam incident on the first standard element to be reflected to form a first reference wave, and at least part of the light beam to pass through the first standard element. If the measured surface of the element to be measured is on the first side of the element to be measured, the light beam passing through the first standard element is incident on the measured surface and is reflected by the measured surface to form a first reflected wave. The second standard element is used to cause at least part of the light beam incident on the second standard element to be reflected to form a second reference wave, and at least part of the light beam to pass through the second standard element. If the measured surface of the element to be measured is on the second side of the element to be measured, the light beam passing through the second standard element is incident on the measured surface and is reflected by the measured surface to form a second reflected wave;

[0053] An interference device, used to emit a light beam and obtain the first reference wave and the first reflected wave or the second reference wave and the second reflected wave from the light beam transmission component to obtain the surface shape detection result of the measured surface of the element to be measured;

[0054] The light beam transmission component is arranged on the light-emitting side of the interference device and is used to transmit the light beam, cause the light beam to be incident on the first standard element or the second standard element, and cause the first reference wave and the first reflected wave from the first standard element to be transmitted to the interference device, or cause the second reference wave and the second reflected wave from the second standard element to be transmitted to the interference device.

[0055] The interference device emits a light beam, and the light beam transmission component is used to transmit the light beam.

[0056] When the beam transmission component makes the light beam incident on the first standard element, at least part of the light beam is reflected to form a first reference wave, and at least part of the light beam passes through the first standard element and further enters the element under test. If the surface under test of the element under test is on the first side of the element under test, the light beam passing through the first standard element is incident on the surface under test and is reflected by the surface under test to form a first reflected wave; and the beam transmission component transmits the first reference wave from the first standard element to the interference device and transmits the first reflected wave from the element under test to the interference device. The interference device can obtain the interference result of the first reference wave and the first reflected wave, and obtain the surface shape detection result of the surface under test of the element under test according to the interference result of the first reference wave and the first reflected wave.

[0057] When the beam transmission component makes the light beam incident on the second standard element, at least part of the light beam is reflected to form a second reference wave, and at least part of the light beam passes through the second standard element and further enters the element under test. If the surface under test of the element under test is on the second side of the element under test, the light beam passing through the second standard element is incident on the surface under test and is reflected by the surface under test to form a second reflected wave; and the beam transmission component transmits the second reference wave from the second standard element to the interference device and transmits the second reflected wave from the element under test to the interference device. The interference device can obtain the interference result of the second reference wave and the second reflected wave, and obtain the surface shape detection result of the surface under test of the element under test according to the interference result of the second reference wave and the second reflected wave.

[0058] If the surface under test of the element under test is on the first side / second side of the element under test during use, the element under test can be positioned on the workbench so that its surface under test is on the first side / second side of the element under test, and the surface under test is detected by using the first standard element / second standard element. Then, the state of the element under test during detection is the same as the state of the element under test during use. Therefore, the dual-condition interference detection device of this embodiment can make the state of the optical element during detection the same as the state of the optical element during use, and can reduce the measurement error.

[0059] In some embodiments, the first standard element, the workbench, and the second standard element are arranged in sequence along the horizontal direction. The first side of the element under test is the left side / right side of the element under test along the horizontal direction, and the second side of the element under test is the right side / left side of the element under test along the horizontal direction. When the element under test is positioned on the workbench, it is placed vertically, and its optical axis is horizontal. The dual-condition interference detection device of this embodiment can be applied to optical elements that are placed vertically during use, and can conveniently detect the surface shapes of both sides of such optical elements. In some embodiments, the first standard element, the workbench, and the second standard element are arranged in sequence along the vertical direction. The first side of the element under test is the lower side / upper side of the element under test along the vertical direction, and the second side of the element under test is the upper side / lower side of the element under test along the vertical direction. When the element under test is positioned on the workbench, its optical axis is vertical. The dual-condition interference detection device of this embodiment can be applied to optical elements that are placed horizontally during use, and can detect the surface shapes of such optical elements. If the surface to be tested of the optical element faces upward during use, then when detecting, the optical element is positioned on the workbench with its surface to be tested facing upward. If the surface to be tested of the optical element faces downward during use, then when detecting, the optical element is positioned on the workbench with its surface to be tested facing downward. If both the first surface and the second surface of the optical element need to be detected, the first surface is the surface on its first side, and the second surface is the surface on its second side. When the optical element is used, its first surface faces upward and its second surface faces downward, then when detecting, the optical element is positioned on the workbench with its first surface facing upward and its second surface facing downward. The gravitational force on the optical element will cause deformation of its surface shape. If the gravitational force situation during detection is inconsistent with that during use, it will lead to a difference between the surface shape during use and the detected surface shape of the optical element. Using this dual-condition interference detection device can make the placement state of the optical element during detection consistent with its placement state during use, and make the gravitational force situation of the optical element during detection consistent with its gravitational force situation during use, which can reduce measurement errors and improve detection efficiency. Especially for large-aperture optical elements, their surface shapes are greatly affected by gravity, and it is necessary to ensure the consistency between the use state and the detection state to ensure detection accuracy.

[0060] In some embodiments, the workbench can adjust the position and / or attitude of the element under test to meet the requirements for adjusting the position of the element under test during detection. The workbench can be internally provided with an adjustment mechanism, which can drive the element under test to move in six dimensions, and can drive the element under test to move along the x-axis, y-axis, and z-axis respectively and rotate around the x-axis, y-axis, and z-axis respectively. Among them, the z-axis is established in the direction of the optical axis of the element under test, and the xoy plane is established in the plane perpendicular to the optical axis of the element under test. The workbench can move horizontally, tilt, or move vertically to achieve high-precision calibration of the relative positions of the standard element and the element under test under dual conditions.

[0061] In some embodiments, the dual-mode interference detection device may further include a first frame for positioning a first standard element, and the first frame is disposed on one side of the workbench. In some embodiments, the first frame can adjust the position and / or attitude of the first standard element to meet the adjustment requirements of the first standard element during detection. The first frame may be internally provided with an adjustment mechanism that can drive the first standard element to move in six dimensions, that is, to drive the first standard element to move along the x-axis, y-axis, and z-axis respectively and to rotate around the x-axis, y-axis, and z-axis respectively. Wherein, the z-axis is established along the optical axis direction of the first standard element, and the xoy plane is established on the plane perpendicular to the optical axis of the first standard element.

[0062] In some embodiments, the dual-mode interference detection device may further include a second frame for positioning a second standard element, and the second frame is disposed on one side of the workbench. In some embodiments, the second frame can adjust the position and / or attitude of the second standard element. The second frame may be internally provided with an adjustment mechanism to meet the adjustment requirements of the second standard element during detection. The second standard element can be driven to move in six dimensions, that is, to drive the second standard element to move along the x-axis, y-axis, and z-axis respectively and to rotate around the x-axis, y-axis, and z-axis respectively. Wherein, the z-axis is established along the optical axis direction of the second standard element, and the xoy plane is established on the plane perpendicular to the optical axis of the second standard element.

[0063] In some embodiments, the beam transmission assembly includes: a beam expander unit for increasing the aperture of the beam from the interference device after passing through the beam expander unit, and making the beam with the increased aperture incident on the first standard element or the second standard element. The beam completes the beam expansion from a small aperture to a large aperture via the beam expander unit. In practical applications, the beam expander unit can be set according to the aperture of the element to be measured to meet the detection requirements of the element to be measured. This dual-mode interference detection device can be applied to elements to be measured with a large aperture. In this embodiment, the structure of the beam expander unit is not limited as long as it can expand the beam of the interference device and make the beam incident on the element to be measured meet the detection requirements. In this embodiment, the beam expansion ratio of the beam expander unit is not limited, and in practical applications, it can be set according to the beam aperture of the interference device and the detection requirements of the element to be measured.

[0064] In some embodiments, the beam expander unit may include: a beam expander element for diverging the light beam after passing through the beam expander element and further incident on a collimating element; and a collimating element for collimating the light beam incident on the collimating element. In some embodiments, the beam expansion ratio of the beam expander unit can reach 3x to 15x, and the focal ratio of the beam expander element is between -12 and -4 or between 4 and 12. Preferably, the beam expansion ratio of the beam expander unit is 3x or 6x, and the focal ratio of the beam expander element is between -4 and -8. In some embodiments, the beam expander element may be a lens with a focal power, and the beam expander element may be referred to as a beam expander lens. The collimating element may be a lens with a focal power, and the collimating element may be referred to as a collimating lens.

[0065] In some embodiments, the beam expander unit may include: a beam expander element for diverging the light beam after passing through the beam expander element; at least one deflecting element for making the light beam from the beam expander element pass through the at least one deflecting element in sequence and then incident on the collimating element; and the collimating element for collimating the light beam incident on the collimating element. The deflecting element is used to deflect the light beam. The arrangement of the deflecting element in the beam expander unit can make the exit direction of the output light of the beam expander unit different from the incident direction of the incident light of the beam expander unit, which is convenient for the optical path layout. In this embodiment, the number of deflecting elements included in the beam expander unit is not limited and can be set according to the optical path layout requirements in actual applications. Exemplarily, the exit direction of the output light of the beam expander unit may be deflected by 90° relative to the incident direction of the incident light of the beam expander unit. In some embodiments, the deflecting element is used to reflect the light beam incident on the deflecting element to achieve the deflection of the light beam. The deflecting element may be a plane mirror.

[0066] In some embodiments, the light beam transmission assembly may include: a focal plane transmission system for transmitting the light beam and not introducing additional focal power to the light beam. Using the focal plane transmission system can reduce the wavefront error introduced to the light beam during the light beam transmission process, so that the interference focal plane of the same interference device is within the adjustment range of the interference device under different working conditions, ensuring the correctness and accuracy of the detection results of medium and high frequencies.

[0067] In some embodiments, the beam transmission assembly is configured to direct the beam to the first standard element when the beam travels along the first path, and to direct the beam to the second standard element when the beam travels along the second path. The beam transmission assembly includes: a first deflecting element disposed at the intersection of the first path and the second path and movable into and out of the intersection of the first path and the second path. When the first deflecting element is moved out of the intersection, the beam travels along the first path / the second path and is incident on the first standard element / the second standard element. When the first deflecting element is moved into the intersection, the beam is deflected by the first deflecting element and travels along the second path / the first path and is incident on the second standard element / the first standard element. In this embodiment, the beam transmission assembly can switch the beam to be incident on the first standard element or the second standard element. By moving the first deflecting element into or out of the intersection of the first path and the second path, the beam transmission assembly can switch the beam to travel along the first path or the second path, so as to switch the dual-mode interference detection device between mode one and mode two.

[0068] In some embodiments, when the first deflecting element is moved out of the intersection of the first path and the second path, the first reference wave from the first standard element and the first reflected wave from the measured element respectively travel reversely along the first path to the interference device, or the second reference wave from the second standard element and the second reflected wave from the measured element respectively travel reversely along the second path to the interference device. When the first deflecting element is moved into the intersection of the first path and the second path, the second reference wave from the second standard element and the second reflected wave from the measured element respectively travel reversely along the second path to the first deflecting element, or the first reference wave from the first standard element and the first reflected wave from the measured element respectively travel reversely along the first path to the interference device and are further deflected by the first deflecting element and then transmitted to the interference device. In the dual-mode interference detection device of this embodiment, the reference wave generated by the first standard element, the reference wave generated by the second standard element, and the reflected wave generated by the measured element respectively travel reversely along the original path to the interference device, which helps to make the detection device structure compact and reduce the volume.

[0069] In some embodiments, the beam transmission assembly further includes:

[0070] a first beam expanding unit disposed on the first path and on the side of the detection unit, configured to increase the aperture of the beam traveling along the first path after passing through the first beam expanding unit, and to direct the beam with the increased aperture to the first standard element;

[0071] A second beam expander unit is disposed on the second path and on the other side of the detection unit, and is configured to increase the aperture of the light beam transmitted along the second path after passing through the second beam expander unit, so that the light beam with the increased aperture is incident on the second standard element.

[0072] Exemplarily, reference can be made to Figure 1 , Figure 2 and Figure 3 , Figure 1 FIG. 11 is a schematic diagram of a dual-mode interference detection device provided in the first embodiment. Figure 2 For Figure 1 FIG. 12 is a schematic diagram of the dual-mode interference detection device in working condition 1. Figure 3 For Figure 1 FIG. 13 is a schematic diagram of the dual-mode interference detection device in working condition 2. As shown in the figure, the dual-mode interference detection device includes a first frame 8, a workbench 24, and a second frame 19 that are sequentially arranged from bottom to top. The first frame 8 is used to position the first standard element 9, the second frame 19 is used to position the second standard element 20, and the workbench 24 positions the element under test 23.

[0073] The first folding element 2 is disposed on the light output side of the interference device 1. A first beam expander unit 7 is arranged along the first path, and the first path can be regarded as the first detection optical path, corresponding to working condition 1. The first beam expander unit 7 includes a first beam expander element 3, a second folding element 5, a third folding element 4, and a first collimating element 6.

[0074] A focal plane transfer system 12, a fourth folding element 13, and a second beam expander unit 18 are arranged along the second path, and a second detection optical path is formed along the second path, corresponding to working condition 2. The second beam expander unit 18 includes a second beam expander element 14, a fifth folding element 15, a sixth folding element 16, and a second collimating element 17.

[0075] Reference can be made to Figure 2 FIG. 14 shows that when the dual-mode interference detection device is in working condition 1, the first folding element 2 is moved out of the optical path, and the light beam emitted by the interference device 1 is incident on the first beam expander unit 7 and enters the detection unit 25 after passing through the first beam expander unit 7. When the light beam is incident on the first beam expander unit 7, it is incident on the first beam expander element 3, and then passes through the second folding element 5, the third folding element 4, and the first collimating element 6 in sequence and then enters the detection unit 25.

[0076] The light beam is incident on the first standard element 9 of the detection unit 25. At least part of the light beam is reflected by the first standard element 9 to form a first reference wave, and the first reference wave returns to the interference device 1 after passing through the first beam expander unit 7. And at least part of the light beam passes through the first standard element 9 and further enters the element under test 23. If the lower side of the element under test 23 is the surface to be measured, the light beam passing through the first standard element 9 is incident on the surface to be measured, reflected by the surface to be measured to form a first reflected wave, and the first reflected wave passes through the first standard element 9, passes through the first beam expander unit 7 and returns to the interference device 1. According to the interference result of the first reference wave and the first reflected wave, the surface shape detection result of the surface to be measured of the element under test 23 can be obtained.

[0077] For reference Figure 3 As shown, when the dual-mode interference detection device is in mode two, the first folding element 2 is moved into the optical path. The light beam emitted by the interference device 1 is incident on the first folding element 2, is folded and then passes through the focal plane transfer system 12 and the fourth folding element 13 in sequence, and is folded by the fourth folding element 13 and then enters the second beam expander unit 18, and enters the detection unit 25 after passing through the second beam expander unit 18. The light beam is incident on the second beam expander element 14 of the second beam expander unit 18, and then enters the detection unit 25 after passing through the fifth folding element 15, the sixth folding element 16, and the second collimating element 17 in sequence.

[0078] The light beam is incident on the second standard element 20 of the detection unit 25. At least part of the light beam is reflected by the second standard element 20 to form a second reference wave, and the second reference wave returns to the interference device 1 after passing through the second beam expander unit 18, the fourth folding element 13, the focal plane transfer system 12, and the first folding element 2 in sequence. And at least part of the light beam passes through the second standard element 20 and further enters the element under test 23. If the upper side of the element under test 23 is the surface to be measured, the light beam passing through the second standard element 20 is incident on its surface to be measured, is reflected to form a second reflected wave, and the second reflected wave passes through the second standard element 20, passes through the second beam expander unit 18, the fourth folding element 13, the focal plane transfer system 12, and the first folding element 2 in sequence and returns to the interference device 1. According to the interference result of the second reference wave and the second reflected wave, the surface shape detection result of the surface to be measured of the element under test 23 can be obtained.

[0079] The second detection optical path adopts the method of folding the light beam first, then passing through the focal plane transfer system, and then expanding the beam. In practical applications, since the two modes should have the same detection accuracy, but mode two requires passing through more optical elements, the optical elements on the second detection optical path should have higher manufacturing accuracy to achieve the same detection accuracy as mode one.

[0080] The first folding element 2 can be rotated to move the first folding element 2 into and out of the optical path. Figures 1 to 3The double-mode interference detection device shown is illustrated by taking the vertical detection device as an example. Among them, the first frame 8, the workbench 24, and the second frame 19 are arranged vertically in sequence from bottom to top. The first beam expander unit 7 is arranged below the detection unit 25, and the second beam expander unit 18 is arranged above the detection unit 25. When the first folding element 2 is moved in, it can be set at 45° to the horizontal direction, and the first folding element 2 can be rotated counterclockwise to set it at 45° to the horizontal direction. The fourth folding element 13 can be set at 45° to the horizontal direction. The first collimating element 6 is attached to the first frame 8, and the second collimating element 17 is attached to the second frame 19, which helps to make the overall structure of the double-mode interference detection device compact and stable.

[0081] Exemplarily, reference can be made to Figure 4 , Figure 4 FIG. is a schematic diagram of a double-mode interference detection device provided for the second embodiment. As shown in the figure, the double-mode interference detection device includes a first frame 8, a workbench 24, and a second frame 19 arranged in sequence from bottom to top. The first frame 8 is used to position the first standard element 9, the second frame 19 is used to position the second standard element 20, and the workbench 24 positions the element under test 23. The first folding element 2 is arranged on the light-emitting side of the interference device 1. Along the first path, there are a focal plane transfer system 12, a fourth folding element 13, and a first beam expander unit 7, and a first detection optical path is formed along the first path. The first beam expander unit 7 includes a first beam expander element 3, a second folding element 5, a third folding element 4, and a first collimating element 6. Along the second path, there is a second beam expander unit 18, and the second path can be regarded as a second detection optical path. The second beam expander unit 18 includes a second beam expander element 14, a fifth folding element 15, a sixth folding element 16, and a second collimating element 17.

[0082] When the double-mode interference detection device is in working condition 1, the first folding element 2 is moved into the optical path. The light beam emitted by the interference device 1 is incident on the first folding element 2, and after being folded, it passes through the focal plane transfer system 12 and the fourth folding element 13 in sequence, and after being folded by the fourth folding element 13, it is incident on the first beam expander unit 7, and enters the detection unit 25 after passing through the first beam expander unit 7. When the light beam is incident on the first beam expander unit 7, it is incident on the first beam expander element 3, and then passes through the second folding element 5, the third folding element 4, and the first collimating element 6 in sequence and then enters the detection unit 25.

[0083] When the double-mode interference detection device is in working condition 2, the first folding element 2 is moved out of the optical path. The light beam emitted by the interference device 1 is incident on the second beam expander unit 18, and enters the detection unit 25 after passing through the second beam expander unit 18. The light beam is incident on the second beam expander element 14 of the second beam expander unit 18, and then passes through the fifth folding element 15, the sixth folding element 16, and the second collimating element 17 in sequence and then enters the detection unit 25.

[0084] The first detection optical path adopts a method of first deflecting the light beam, then transmitting it through the focal plane transmission system, and then expanding the beam. In practical applications, since the two working conditions should have the same detection accuracy, but working condition one requires passing through more optical elements, the optical elements on the first detection optical path should have higher manufacturing accuracy to achieve the same detection accuracy as working condition two.

[0085] Figure 4 The double-working-condition interference detection device shown is illustrated by taking the vertical detection device as an example. Among them, the first frame 8, the workbench 24, and the second frame 19 are sequentially arranged vertically from bottom to top. The first beam expansion unit 7 is arranged below the detection unit 25, and the second beam expansion unit 18 is arranged above the detection unit 25. The first deflecting element 2 can be rotated to move the first deflecting element 2 in and out, and the first deflecting element 2 can be rotated clockwise to move it into the optical path. When the first deflecting element 2 is moved in, it can be arranged at an angle of 45° with the horizontal direction. The fourth deflecting element 13 can adopt a plane mirror.

[0086] In some embodiments, the light beam transmission assembly further includes: a third beam expansion unit, arranged on the light output side of the interference device, for increasing the aperture of the light beam from the interference device after passing through the third beam expansion unit; the first deflecting element is arranged on the light output side of the third beam expansion unit. When the first deflecting element moves out of the intersection of the first path and the second path, the light beam from the third beam expansion unit is transmitted along the first path / the second path and incident on the first standard element / the second standard element. When the first deflecting element moves into the intersection of the first path and the second path, the light beam from the third beam expansion unit is deflected by the first deflecting element and transmitted along the second path / the first path and incident on the second standard element / the first standard element.

[0087] Exemplarily, reference can be made to Figure 5 , Figure 5 which is a schematic diagram of a double-working-condition interference detection device provided for the third embodiment. As shown in the figure, the double-working-condition interference detection device includes a first frame 8, a workbench 24, and a second frame 19 arranged in sequence from bottom to top. The first frame 8 positions the first standard element 9, the second frame 19 positions the second standard element 20, and the workbench 24 positions the element under test 23.

[0088] The third beam expander unit 26 is disposed on the light-emitting side of the interference device 1, and the first folding element 2 is disposed on the light-emitting side of the third beam expander unit 26. The light beam emitted from the interference device 1 is incident on the third beam expander unit 26 and, after passing through the third beam expander unit 26, is incident on the first folding element 2. When the light beam is incident on the third beam expander unit 26, it passes through the first beam expander element 3, the second folding element 5, the third folding element 4, and the first collimating element 6 in sequence and then exits. A seventh folding element 27, a focal plane transfer system 12, an eighth folding element 28, and a ninth folding element 29 are disposed along the second path, and a second detection optical path is formed along the second path.

[0089] When the dual-mode interference detection device is in the first mode, the first folding element 2 is moved out, and the light beam emitted from the third beam expander unit 26 enters the detection unit 25. When the dual-mode interference detection device is in the second mode, the first folding element 2 is moved in, and the light beam emitted from the third beam expander unit 26 is incident on the first folding element 2. After being folded, it passes through the seventh folding element 27, the focal plane transfer system 12, the eighth folding element 28, and the ninth folding element 29 in sequence and then enters the detection unit 25. In this embodiment, the method of first expanding the beam and then folding it, and then passing through the focal plane transfer system is adopted.

[0090] Figure 5 The illustrated dual-mode interference detection device is described by taking a vertical detection device as an example. Among them, the first frame 8, the workbench 24, and the second frame 19 are sequentially arranged vertically from bottom to top. The third beam expander unit 26 is disposed below the detection unit 25. When the first folding element 2 is moved into the optical path, it is located between the third beam expander unit 26 and the detection unit 25. The first folding element 2 can be moved in and out by rotating the first folding element 2, and the first folding element 2 can be moved into the optical path by rotating it clockwise.

[0091] Exemplarily, reference can be made to Figure 6 , Figure 6Schematic diagram of a dual-mode interference detection device provided for the fourth embodiment. As shown in the figure, the dual-mode interference detection device includes a first frame 8, a workbench 24, and a second frame 19 arranged in sequence from bottom to top. The first frame 8 positions the first standard element 9, the second frame 19 positions the second standard element 20, and the workbench 24 positions the element under test 23. A first folding element 2 is arranged on the light-emitting side of the interference device 1. A first beam expanding unit 7 is arranged along a first path, and the first path can be regarded as the first detection optical path. The first beam expanding unit 7 includes a third beam expanding element 31, a tenth folding element 32, and a third collimating element 33. A focal plane transfer system 12, a fourth folding element 13, and a second beam expanding unit 18 are arranged along a second path, and a second detection optical path is formed along the second path. The second beam expanding unit 18 includes a fourth beam expanding element 35, an eleventh folding element 36, and a fourth collimating element 37. Compared with the dual-mode interference detection device of the first embodiment, different structures are adopted for the first beam expanding unit 7 and the second beam expanding unit 18 in this embodiment.

[0092] In some embodiments, the interference device 1 is connected to the first frame 8, and the interference device 1 is further configured to send a signal to the first frame 8 to control the first frame 8 to move the first standard element 9, so as to change the optical path difference between the first reference wave and the first reflected wave to achieve phase shift for interference detection, adopting the PZT phase shift method. The first frame 8 may be provided with a first interface 10, a first wire 11 is connected to the first interface 10, and the first wire 11 is connected to the interference device 1. In some embodiments, the interference device 1 is connected to the second frame 19, and the interference device 1 is further configured to send a signal to the second frame 19 to control the second frame 19 to move the second standard element 20, so as to change the optical path difference between the second reference wave and the second reflected wave to achieve phase shift for interference detection, adopting the PZT phase shift method. The second frame 19 may be provided with a second interface 21, a second wire 22 is connected to the second interface 21, and the second wire 22 is connected to the interference device 1. Reference can be made to Figures 1 to 6 As shown, the first frame 8 is provided with a first interface 10, a first wire 11 is connected to the first interface 10, and the first wire 11 is connected to the interference device 1. The second frame 19 is provided with a second interface 21, a second wire 22 is connected to the second interface 21, and the second wire 22 is connected to the interference device 1.

[0093] In some embodiments, the interference device 1 may adopt a wavelength-tuning interference device or a cavity-length-tuning interference device to change the optical path difference between the first reference wave and the first reflected wave and the optical path difference between the second reference wave and the second reflected wave through the interference device 1. Adopting the wavelength or cavity-length tuning phase shift method.

[0094] In this embodiment, the structure of the interference device 1 is not limited. The interference device 1 can adopt but is not limited to a small-aperture interferometer. Exemplarily, the small-aperture interferometer is an interferometer with an aperture of 25 to 150 mm, preferably 100 mm. Any one of the first folding element 2 to the eleventh folding element 36 can adopt a plane mirror.

[0095] The element under test 23 can be a flat element under test mirror, a spherical element under test mirror, an aspherical element under test mirror, or a free-form surface element under test mirror. Correspondingly, the first standard element 9 can be a flat standard mirror, a spherical standard mirror, an aspherical standard mirror, or a free-form surface standard mirror, and the second standard element 20 can be a flat standard mirror, a spherical standard mirror, an aspherical standard mirror, or a free-form surface standard mirror.

[0096] The above Figures 1 to 6 The double-mode interference detection device shown above is described by taking the vertical detection device as an example. It should be noted that Figures 1 to 6 The optical path structure adopted by the double-mode interference detection device shown can also be applied to form a horizontal detection device, in which the element under test is placed vertically on the workbench for detection.

[0097] The double-mode interference detection device of this embodiment can achieve double-mode detection. Only by switching the optical path can the detection mode be switched, greatly reducing the manufacturing cost and improving the detection efficiency.

[0098] This embodiment also provides an optical element detection method, which applies the double-mode interference detection device described in any one of the above embodiments, and includes the following steps:

[0099] S101: If the surface under test of the element under test 23 is on the first side / second side of the element under test 23 during use, position the element under test 23 on the workbench 24 so that the surface under test of the element under test 23 is on the first side / second side of the element under test 23.

[0100] If the surface under test of the element under test 23 is on the first side of the element under test 23 during use, position the element under test 23 on the workbench 24 so that the surface under test of the element under test 23 is on the first side of the element under test 23. If the surface under test of the element under test 23 is on the second side of the element under test 23 during use, position the element under test 23 on the workbench 24 so that the surface under test of the element under test 23 is on the second side of the element under test 23.

[0101] If the element under test 23 is placed vertically during use, its optical axis is horizontal, the first side is the left / right side of the element under test 23, and the second side is the right / left side of the element under test 23. In the double-mode interference detection device used, the first standard element 9, the workbench 24, and the second standard element 20 can be arranged in sequence along the horizontal direction.

[0102] When the component under test 23 is placed horizontally during use, its optical axis is vertical, the first side is the lower / upper side of the component under test 23, and the second side is the upper / lower side of the component under test 23. In the present dual-mode interference detection device used, the first standard component 9, the workbench 24, and the second standard component 20 can be arranged in sequence along the vertical direction.

[0103] S102: Cause the beam transmission assembly to make the beam emitted from the interference device 1 incident on the first standard component 9 / second standard component 20, and the interference device 1 acquires the first reference wave and the first reflected wave / second reference wave and the second reflected wave to obtain the surface shape detection result of the surface under test of the component under test 23.

[0104] If the surface under test of the component under test 23 is on the first side of the component under test 23, the beam transmission assembly makes the beam emitted from the interference device 1 incident on the first standard component 9, and causes the interference device 1 to acquire the returned first reference wave and the first reflected wave. If the surface under test of the component under test 23 is on the second side of the component under test 23, the beam transmission assembly makes the beam emitted from the interference device 1 incident on the second standard component 20, and causes the interference device 1 to acquire the returned second reference wave and the second reflected wave.

[0105] The optical element detection method of the present embodiment applies a dual-mode interference detection device, which can make the state of the component under test during detection the same as the state during use of the component under test, and can reduce the measurement error.

[0106] In some embodiments, the first standard component 9 and the second standard component 20 are respectively arranged on the lower side and the upper side of the workbench 24, and both the first surface and the second surface of the component under test 23 are surfaces under test. Then, positioning the component under test 23 on the workbench 24 includes: if the first surface of the component under test 23 is on the lower / upper side and the second surface is on the upper / lower side during use, then position the component under test 23 on the workbench 24 so that the first surface of the component under test 23 is on the lower / upper side and the second surface is on the upper / lower side.

[0107] Correspondingly, causing the beam transmission assembly to make the beam emitted from the interference device 1 incident on the first standard component 9 / second standard component 20, and the interference device 1 acquires the first reference wave and the first reflected wave / second reference wave and the second reflected wave to obtain the surface shape detection result of the surface under test of the component under test 23 includes the following steps:

[0108] S1021: Cause the beam transmission assembly to make the beam emitted from the interference device 1 incident on the first standard component 9, and the interference device 1 acquires the first reference wave and the first reflected wave to obtain the surface shape detection result of the first surface of the component under test 23;

[0109] S1022: Cause the beam transmission component to make the beam emitted from the interference device 1 incident on the second standard element 20, and the interference device 1 acquires a second reference wave and a second reflected wave to obtain the surface shape detection result of the second surface of the element under test 23.

[0110] It should be noted that in this embodiment, the sequence of performing step S1021 and step S1022 is not limited. It can be that step S1021 is performed first and then step S1022, or step S1022 can be performed first and then step S1021.

[0111] Exemplarily corresponding to Figure 1 、 Figure 4 、 Figure 5 and Figure 6 shown in the double-condition interference detection device, after placing the first standard element 9 and the second standard element 20 in the first frame 8 and the second frame 19 respectively, and placing the element under test 23 on the workbench 24, make the first folding element 2 in a state of being out of the optical path. The interference device 1 emits a beam, and the beam is made incident on the first standard element 9 through the beam transmission component, and the interference device 1 is controlled to obtain the interference result of the first reference wave and the first reflected wave. Then, move the first folding element 2 into the optical path, the interference device 1 emits a beam, and the beam is made incident on the second standard element 20 through the beam transmission component, and the interference device 1 is controlled to obtain the interference result of the second reference wave and the second reflected wave.

[0112] In some embodiments, before the interference device 1 obtains the interference result of the first reference wave and the first reflected wave, it may include: adjusting the position and / or attitude of the element under test 23 through the workbench 24, or / and adjusting the position and / or attitude of the first standard element 9 through the first frame 8, so that the optical axis of the element under test 23 is aligned with the optical axis of the first standard element 9.

[0113] In some embodiments, before the interference device 1 obtains the interference result of the second reference wave and the second reflected wave, it may include: adjusting the position and / or attitude of the element under test 23 through the workbench 24, or / and adjusting the position and / or attitude of the second standard element 20 through the second frame 19, so that the optical axis of the element under test 23 is aligned with the optical axis of the second standard element 20.

[0114] The above has introduced in detail the dual-mode interference detection device and the optical element detection method provided by the present invention. Specific examples are used in this article to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and modifications can still be made to the present invention, and these improvements and modifications also fall within the protection scope of the present invention.

Claims

1. A dual-mode interference detection device, characterized in that: include: A detection unit, comprising a workbench, a first standard element and a second standard element, wherein the workbench is used to position the measured element, and the first standard element and the second standard element are respectively arranged on both sides of the workbench, so that the first standard element is located at the first side of the measured element, and the second standard element is located at the second side of the measured element, and the first standard element is used to make a light beam incident on the first standard element at least partially reflected to form a first reference wave, and at least partially pass through the first standard element, if the measured surface of the measured element is located at the first side of the measured element, the light beam passing through the first standard element is incident on the measured surface, reflected by the measured surface to form a first reflected wave, and the second standard element is used to make a light beam incident on the second standard element at least partially reflected to form a second reference wave, and at least partially pass through the second standard element, if the measured surface of the measured element is located at the second side of the measured element, the light beam passing through the second standard element is incident on the measured surface, reflected by the measured surface to form a second reflected wave; An interference device, used for emitting a light beam, and obtaining the first reference wave and the first reflected wave or the second reference wave and the second reflected wave from the light beam transmission component, so as to obtain a surface shape detection result of the measured surface of the measured element; The light beam transmission component is arranged at the light output side of the interference device, and is used to transmit the light beam so that the light beam is incident on the first standard element or the second standard element, and transmit the first reference wave and the first reflected wave from the first standard element to the interference device, or transmit the second reference wave and the second reflected wave from the second standard element to the interference device; The light beam transmission component is used to make the light beam incident on the first standard element when it is transmitted along the first path, and the light beam incident on the second standard element when it is transmitted along the second path; the light beam transmission component includes: a first folding element, which is arranged at the intersection of the first path and the second path, and can be moved in and out of the intersection of the first path and the second path, when the first folding element moves out, the light beam is transmitted along the first path / the second path and incident on the first standard element / the second standard element, when the first folding element moves in, the light beam is folded by the first folding element, and is transmitted along the second path / the first path and incident on the second standard element / the first standard element.

2. The dual-mode interference detection device according to claim 1, characterized in that: The first standard element, the workbench and the second standard element are arranged in sequence along a vertical direction, or the first standard element, the workbench and the second standard element are arranged in sequence along a horizontal direction.

3. The dual-mode interference detection device according to claim 1, characterized in that: The beam transmission assembly comprises: a beam expansion unit, used to increase the aperture of the light beam from the interference device after passing through the beam expansion unit, so that the light beam with increased aperture is incident on the first standard element or the second standard element; The beam expansion unit comprises: A beam expander element, used to make the light beam diverge after passing through the beam expander element; At least one folding element, used to make the light beam from the beam expanding element pass through the at least one folding element in sequence and then be incident on the collimating element; The collimating element is used to collimate the light beam incident to the collimating element.

4. The dual-mode interference detection device according to claim 1, characterized in that: The beam transmission assembly further comprises: A first beam expansion unit is provided on the first path and at one side of the detection unit, and is used to increase the aperture of the light beam transmitted along the first path after passing through the first beam expansion unit, so that the light beam with increased aperture is incident on the first standard element; The second beam expansion unit is arranged on the second path and at the other side of the detection unit, and is used to increase the aperture of the light beam transmitted along the second path after passing through the second beam expansion unit, so that the light beam with increased aperture is incident on the second standard element.

5. The dual-mode interference detection device according to claim 1, characterized in that: The beam transmission assembly further comprises: A third beam expansion unit is arranged at the light exiting side of the interference device, and is used to increase the aperture of the light beam from the interference device after passing through the third beam expansion unit; The first folding element is arranged on the light-emitting side of the third beam expansion unit. When the first folding element moves out of the intersection of the first path and the second path, the light beam from the third beam expansion unit is transmitted along the first path / the second path and is incident on the first standard element / the second standard element. When the first folding element moves into the intersection of the first path and the second path, the light beam from the third beam expansion unit is folded by the first folding element, and is transmitted along the second path / the first path and is incident on the second standard element / the first standard element.

6. The dual-mode interference detection device according to claim 1, characterized in that: When the first folding element moves out of the intersection of the first path and the second path, the first reference wave from the first standard element and the first reflected wave from the measured element are respectively transmitted in reverse direction along the first path to the interference device, or the second reference wave from the second standard element and the second reflected wave from the measured element are respectively transmitted in reverse direction along the second path to the interference device; When the first folding element moves into the intersection of the first path and the second path, the second reference wave from the second standard element and the second reflected wave from the measured element are respectively transmitted in reverse along the second path to the first folding element, or the first reference wave from the first standard element and the first reflected wave from the measured element are respectively transmitted in reverse along the first path to the interference device, and are further folded by the first folding element and transmitted to the interference device.

7. The dual-mode interference detection device according to claim 1, characterized in that: The device further comprises a first frame, wherein the first frame is used to position the first standard element, the interference device is connected to the first frame, and the interference device is further used to send a signal to the first frame to control the first frame to move the first standard element, so that the optical path difference between the first reference wave and the first reflected wave changes to achieve phase shift; Or / and, it also includes a second frame, the second frame is used to position the second standard element, the interference device is connected to the second frame, and the interference device is also used to send a signal to the second frame to control the second frame to move the second standard element, so that the optical path difference between the second reference wave and the second reflected wave changes to achieve phase shift.

8. An optical component detection method, using the dual-mode interference detection device according to any one of claims 1 to 7, characterized in that: Methods include: If the measured surface of the measured component is located at the first side / second side of the measured component during use, the measured component is positioned on the workbench so that the measured surface of the measured component is located at the first side / second side of the measured component; The light beam transmission component makes the light beam emitted by the interference device incident on the first standard element / the second standard element, and the interference device obtains the first reference wave and the first reflected wave / the second reference wave and the second reflected wave to obtain the surface shape detection result of the measured surface of the measured element.

9. The optical component detection method according to claim 8, characterized in that: The first standard element and the second standard element are respectively arranged on the lower side and the upper side of the workbench, and the first surface and the second surface of the measured element are both measured surfaces; Positioning the measured component on the workbench comprises: If the first surface of the component under test is at the lower side / upper side and the second surface is at the upper side / lower side during use, the component under test is positioned on the workbench so that the first surface of the component under test is at the lower side / upper side and the second surface is at the upper side / lower side; The light beam transmission component is used to make the light beam emitted by the interference device incident on the first standard element / the second standard element, and the interference device obtains the first reference wave and the first reflected wave / the second reference wave and the second reflected wave to obtain the surface shape detection result of the measured surface of the measured element, which includes: The light beam transmission component is used to make the light beam emitted by the interference device incident on the first standard element, and the interference device obtains a first reference wave and a first reflected wave to obtain a surface shape detection result of the first surface of the measured element; The light beam transmission component is used to make the light beam emitted by the interference device incident on the second standard element, and the interference device obtains a second reference wave and a second reflected wave to obtain a surface shape detection result of the second surface of the measured element.

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