Rotating mirror assembly

Abstract

The invention discloses a rotating mirror assembly, which is used for a laser scanning system and comprises a rotating shaft; the rotating mirror body sleeves the rotating shaft and can rotate around the rotating shaft, the rotating mirror body comprises a plurality of reflecting pieces used for receiving incident light and reflecting the incident light to the light receiving surface, the reflecting pieces are distributed in the first direction, and the included angles between the reflecting pieces and the first direction are different, so that the incident light is reflected to the light receiving surface after the incident light enters the reflecting pieces; and the light is reflected to the light receiving surface to form a plurality of rows of scanning tracks distributed along the beam splitting direction, wherein the first direction is parallel to the rotating shaft. According to the rotating mirror assembly, line-by-line scanning can be carried out without an additional galvanometer or a space division multiplexing optical path.

Description

Technical Field

[0001] The invention relates to the technical field of laser scanning, and in particular to a rotating mirror assembly. Background Art

[0002] Laser scanning technology is an indispensable technology in laser processing systems and scanning imaging systems. It uses periodically rotating mirrors to reflect laser beams to achieve laser scanning. In the industrial field, laser scanning technology is used for laser cutting, engraving, punching, printing and other processing of parts, serving the ship, aerospace, weapons and equipment, instrument manufacturing and other industries. In the imaging field, laser scanning technology is used in fluorescence scanning microscopy systems. Through pulsed laser spatial scanning to stimulate the fluorescence of the target spatial point within the imaging field of view, it serves the imaging research of biological samples, such as the brain neural activity and blood circulation activity of living animals.

[0003] Traditional laser scanning systems mostly use scanning galvanometers, but the speed of the reciprocating scanning galvanometer is limited, making it difficult to achieve ultra-high-speed scanning. In addition, when the galvanometer turns back, there is a dead time when the scanning imaging data cannot be collected due to the large change in the galvanometer speed. However, the multi-faceted rotating mirror does not have the problem of turning back and forth. The multi-faceted rotating mirror that rotates in one direction can achieve ultra-high-speed, high-precision, and high-repeatability scanning, and can achieve continuous unidirectional periodic scanning, which has great application potential in laser scanning systems.

[0004] In particular, for the multi-faceted rotating mirror, it can be divided into prism-shaped multi-faceted rotating mirrors, cone-shaped multi-faceted rotating mirrors, single-faceted mirrors, etc. However, these multi-faceted rotating mirrors have a common feature, that is, for incident light of a given angle, the scanning area after reflection by the multi-faceted rotating mirror is fixed. Therefore, the multi-faceted rotating mirror usually needs to be combined with a space-division multiplexing optical path or a galvanometer to have the function of line scanning. In other words, the multi-faceted rotating mirror itself does not have the function of dividing the scanning beam into lines. Summary of the invention

[0005] In order to solve the above technical problems, the embodiment of the present invention discloses a rotating mirror assembly for a laser scanning system, comprising:

[0006] Axis of rotation;

[0007] The rotating mirror body is sleeved on the rotating axis and can rotate around the rotating axis, including:

[0008] A plurality of reflectors are used to receive incident light and reflect it to a light receiving surface. The plurality of reflectors are distributed along a first direction and have different angles with the first direction, so that after the incident light is incident on the reflectors, it is reflected to the light receiving surface and simultaneously forms a plurality of scanning tracks distributed along a beam splitting direction, wherein the first direction is parallel to the rotation axis.

[0009] By adopting the above technical solution, the function of line scanning can be realized without the need for additional galvanometers or space-division multiplexing optical paths.

[0010] According to another specific embodiment of the present invention, the reflector comprises a plurality of reflective surfaces, which are connected end to end along the circumference of the rotating mirror body, and the reflective surfaces are used to receive incident light and reflect it to the light receiving surface.

[0011] According to another specific embodiment of the present invention, the incident direction of the incident light is parallel to the first direction or perpendicular to the first direction.

[0012] According to another specific embodiment of the present invention, a plurality of the reflective elements are continuously distributed along the first direction.

[0013] According to another specific embodiment of the present invention, the angles between the plurality of reflective elements and the first direction gradually decrease along the first direction.

[0014] According to another specific embodiment of the present invention, the incident direction of the incident light is perpendicular to the first direction, and the angles of the plurality of reflectors gradually decrease and then increase along the first direction.

[0015] According to another specific embodiment of the present invention, the rotating mirror body is symmetrically distributed along a first plane, the first plane is perpendicular to the rotation axis; and / or the center of the incident light is located in the middle area of ​​the rotating mirror body along the first direction.

[0016] According to another specific embodiment of the present invention, it also includes a cylindrical lens, through which the light source is converged on the focal plane to form the incident light; and / or the maximum distance between the reflector and the focal plane along the second direction is -10 to 10 mm, and the second direction is perpendicular to the first direction.

[0017] According to another specific embodiment of the present invention, the reflective surface is provided with a reflective layer, the reflectivity of the reflective layer is greater than or equal to 95%; and / or the thickness of the reflective layer is 10-2000 nm.

[0018] According to another specific embodiment of the present invention, it also includes:

[0019] A fixed bottom plate, fixedly sleeved on the rotating shaft, wherein the rotating mirror body and the fixed bottom plate are fixedly fitted along the first direction;

[0020] A transmission member, wherein the rotating shaft has a first end and a second end that are oppositely arranged along the first direction, and the second end is connected to the transmission member, and the transmission member is used to drive the rotating shaft to rotate, so that the rotating shaft drives the rotating mirror body to rotate through the fixed bottom plate;

[0021] A fixed frame connected to the first end and fixedly connected to the transmission member;

[0022] A motor connected to the transmission member and used to control the speed and direction of rotation of the rotating shaft;

[0023] The heat dissipation component is used to dissipate heat for the transmission member and the motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A three-dimensional schematic diagram showing a rotating mirror assembly according to an embodiment of the present invention Figure 1 ;

[0025] Figure 2 A three-dimensional schematic diagram showing a rotating mirror body, a cylindrical lens and a light receiving surface according to an embodiment of the present invention;

[0026] Figure 3 A three-dimensional schematic diagram showing a rotating mirror assembly according to an embodiment of the present invention Figure 2 .

[0027] 001. Incident laser, 01. Incident light, 02. Reflected light, 03. Cylindrical lens, 04. Light receiving surface, 1. Rotation axis, 2. Rotating mirror body, 21. Reflector, e. Top, f. Bottom, 211. Reflection surface, 3. Fixed bottom plate, 4. Transmission part, 5. Fixed frame, 6. Motor, 7. Heat dissipation component

[0028] x. First direction, y. Second direction, z. Third direction, r. Rotation direction, a. Beam splitting direction, b. Scanning direction DETAILED DESCRIPTION

[0029] The following specific embodiments illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this implementation. On the contrary, the purpose of introducing the invention in conjunction with the implementation is to cover other options or modifications that may extend based on the claims of the present invention. In order to provide a deep understanding of the present invention, the following description will include many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0030] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0031] The terms “first”, “second”, etc. are only used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0032] In the description of this embodiment, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this embodiment can be understood according to specific circumstances.

[0033] To make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0034] In the embodiments of the present invention, a “reflective surface” refers to a surface that can reflect light.

[0035] In the embodiments of the present invention, the “incident angle” refers to the angle between the incident light and the normal line of the reflecting surface.

[0036] In the embodiment of the present invention, the "light receiving surface" refers to a surface for receiving reflected light from the rotating mirror body, and using the received reflected light to realize functions such as scanning detection, scanning excitation fluorescence, and scanning cutting.

[0037] A suitable optical system can be arranged between the rotating mirror body and the "light receiving surface" as required, including lenses, reflectors, filters, dichroic mirrors and other optical elements to achieve specific functions.

[0038] The present invention is applied to scanning detection, for example, when quality inspection is performed on electronic components or mechanical parts, the "light receiving surface" is the surface to be inspected of the target inspection part.

[0039] The present invention is applied to scanning fluorescence imaging, for example, when the excitation light is scanned point by point to excite the fluorescence of a biological sample or a chemical sample, the "light receiving surface" is the focal plane of the optical system arranged between the rotating mirror body and the "light receiving surface", and is also the excited surface of the sample.

[0040] The present invention is applied to scanning cutting. For example, when a laser is used to cut a plastic plate according to a scanning path, the "light receiving surface" is the plane where the cut plastic plate is located.

[0041] like Figure 1-Figure 3 As shown, the embodiment of the present invention discloses a rotating mirror assembly for a laser scanning system, comprising a rotating shaft 1 and a rotating mirror body 2, wherein the rotating mirror body 2 is sleeved on the rotating shaft 1 and can rotate around the rotating shaft 1. Specifically, the rotating mirror body 2 rotates in a circle around the rotating shaft 1.

[0042] The rotating mirror body 2 includes a plurality of reflective members 21, and the reflective members 21 are used to receive the incident light 01 and reflect it to the light receiving surface 04. The plurality of reflective members 21 are arranged along a first direction (eg Figure 1 The x direction shown in the figure) is distributed, and the angle between the first direction and the first direction (for example, Figure 2 The angle β shown in FIG. 1 is different, so that after the incident light 01 is incident on the reflector 21, it is reflected to the light receiving surface 04 and forms a beam splitting direction (for example Figure 2 Multiple scanning tracks are distributed in a direction (as shown in FIG. 1 ), wherein the first direction is parallel to the rotation axis 1 .

[0043] Specifically, the rotating mirror body 2 includes a plurality of reflective members 21 distributed along a first direction, and the plurality of included angles β are different, which means that the plurality of reflective members 21 distributed along the first direction have different inclination angles relative to the rotating shaft 1, so that the incident light 01 incident on the plurality of reflective members 21 along the same direction has different incident angles, and then after the incident light 01 is incident on the reflective members 21, a plurality of reflected light beams 02 with different reflection angles are formed, so that the plurality of reflected light beams are received by the light receiving surface 04 and simultaneously form a plurality of scanning tracks distributed along the beam splitting direction. In this embodiment, the number of reflected light beams 02 with different reflection angles is determined by the number of reflective members 21, that is, the number of scanning tracks distributed along the beam splitting direction formed by the light receiving surface 04 is determined by the number of reflective members 21.

[0044] By adopting the above technical solution, a beam of incident light 01 can be incident on multiple reflective elements 21 at different incident angles at the same time, so that the rotating mirror body 2 reflects the incident light 01 into multiple beams of reflected light 02 with different reflection angles, which are received by the light receiving surface 04 and form multiple rows of scanning trajectories without cross-interference. As a result, the rotating mirror assembly itself has the function of light beam separation, and the function of line scanning can be achieved without relying on additional galvanometers or space-division multiplexing optical paths.

[0045] In some other possible embodiments provided by the present invention, combined with Figure 2 As shown, the reflector 21 includes a plurality of reflective surfaces 211, and the plurality of reflective surfaces 211 are connected end to end along the circumference of the rotating mirror body 2. In other words, one reflector 21 is composed of a plurality of reflective surfaces 211 connected end to end along the circumference of the rotating mirror body 2. In addition, the angle between the reflector 21 and the first direction is, for example, Figure 2The angle β shown in . Specifically, the reflector 21 has a top end e and a bottom end f relative to the first direction, and the angle β is the angle between the direction from the top end e to the bottom end f and the first direction. It can also be understood as the angle between the incident light 01 and each of the incident reflecting surfaces 211 when the incident direction of the incident light 01 is parallel to the first direction. The reflecting surfaces 211 are distributed along the circumferential direction. As the rotating mirror body 2 rotates, the multiple reflecting surfaces 211 on the circumferential reflector 21 will rotate to the incident position in sequence, so that the incident light 01 can hit the reflecting surface 211 and then be reflected by the reflecting surface 211. At this time, the incident light 01 and the reflecting surface 211 are at an angle β. Among them, the reflection surface 211 is used to receive the incident light 01 and reflect it to the light receiving surface 04. When the rotating mirror body 2 rotates along the rotation axis 1, the normal of the same reflection surface 211 will also deflect along the rotation direction with the rotation, while the incident direction of the incident light 01 is fixed, and then the incident angle changes with the rotation. Since the reflection angle and the incident angle are equal in size, the corresponding reflection angle also changes with the rotation, so that a plurality of reflected lights 02 with different reflection angles continuously distributed along the rotation direction can be formed during the rotation process and reflected to the light receiving surface 04, thereby realizing the scanning direction (for example Figure 2 b direction) in successive rows.

[0046] In addition, each reflector 21 includes a rotating mirror assembly with multiple reflective surfaces 211, which can be further used in conjunction with a galvanometer. For example, in this embodiment, the rotating mirror assembly includes m reflectors 21, which receive incident light 01 and reflect it to the light receiving surface 04, while forming m lines of scanning tracks distributed along the beam splitting direction. With the arrangement that each reflector 21 includes n reflective surfaces 211 and a galvanometer, the galvanometer can deflect the reflected light 02 reflected by the reflective surface 211, thereby forming n lines of scanning tracks distributed along the beam splitting direction. Therefore, the rotating mirror assembly used in conjunction with the galvanometer can form a total of m×n lines of scanning tracks along the beam splitting direction. In other words, a new scanning system can be built in conjunction with other optical components to achieve a larger scanning area.

[0047] Preferably, the incident direction of the incident light 01 is parallel to the first direction, or the incident direction of the incident light 01 is perpendicular to the first direction. In other words, the incident light 01 is incident toward the rotating mirror body 2 along the first direction, or is incident toward the rotating mirror body 2 along a direction perpendicular to the rotation axis 1, so that each reflector 21 can be illuminated by the incident light 01.

[0048] In some other possible embodiments provided by the present invention, multiple reflectors 21 are continuously distributed along the first direction. That is to say, multiple reflectors 21 are connected end to end along the first direction, and there is no gap between two adjacent reflectors 21, thereby avoiding that the reflected light 02 formed after being incident on the reflector 21 is blocked by the gap between the multiple reflectors 21, thereby reducing the loss of light beam energy during the reflection process, making the distribution of the reflected light 02 on the light receiving surface 04 more uniform, and the scanning effect is better. Among them, multiple reflectors 21 can be formed into a rotating mirror body 2 through an integrated molding process, and can also be spliced ​​along the first direction. It should be noted that the present invention does not impose specific restrictions on the height of the reflector 21 along the first direction and the width of the projection along the first direction. The technicians can make adjustments according to actual needs, as long as at least 2 reflectors 21 can be illuminated by the incident light 01.

[0049] Furthermore, the multiple angles β gradually decrease along the first direction, combined with Figure 1 and Figure 2 As shown, the rotating mirror body 2 protrudes outward in an arch shape, which is conducive to the incident light 01 being smoothly reflected by each layer of reflective elements 21. Specifically, when the incident light 01 is parallel to the first direction, the multiple angles β gradually decrease along the first direction, so that the incident angles of the incident light 01 incident on the multiple reflective elements 21 gradually increase along the first direction; when the incident light 01 is perpendicular to the first direction, the multiple angles β gradually decrease along the first direction, so that the incident angles of the incident light 01 incident on the multiple reflective elements 21 gradually decrease along the first direction. In addition, the angle difference between the multiple angles β is less than 90°, and preferably, the angle difference between the multiple angles β does not exceed 70°, which is conducive to forming a suitable line spacing, facilitating subsequent processing, and also avoiding the angle difference being too large, resulting in a large difference in the size of the reflected light 02 reflected by the multiple reflective elements 21.

[0050] Preferably, if Figure 3 As shown, the incident direction of the incident light 01 is perpendicular to the first direction, and the multiple angles β gradually decrease and then gradually increase along the first direction, so that the incident angles of the incident light 01 incident on the multiple reflectors 21 gradually decrease and then gradually increase along the first direction, and the rotating mirror body 2 protrudes outward as a whole. Therefore, while ensuring that the incident light 01 is smoothly reflected by each layer of reflectors 21, the number of rows of scanning tracks formed on the light receiving surface is increased, which is conducive to scanning a larger area, thereby reducing the total number of times required to scan the same area, thereby improving the overall scanning efficiency.

[0051] More preferably, the rotating mirror body 2 is symmetrically distributed along the first plane, and the first plane is perpendicular to the rotation axis 1. As a result, the stability and reliability of the rotating mirror assembly during use are greatly improved. Since the rotating mirror body 2 is symmetrical about the first plane, it helps to reduce the influence of its vibration during rotation, thereby reducing the jitter and deviation of the rotating mirror assembly and improving the accuracy of scanning. It also makes the reflection path of the incident light 01 consistent on both sides of the rotating mirror body 2 along the first direction, which helps to maintain the uniformity and consistency of the multi-line scanning trajectory formed on the light receiving surface 04, thereby ensuring the accuracy and repeatability of the scanning result, and simplifying the manufacturing process of the rotating mirror assembly.

[0052] In this embodiment, the incident light 01 is located in the middle area of ​​the rotating mirror body 2 along the first direction, that is, when the incident light 01 is perpendicular to the first direction, the center of the incident light 01 is located in the first plane, and then incident toward the rotating mirror body 2. As a result, the incident light 01 is evenly distributed on the rotating mirror body 2. And the center of the incident light 01 is located in the first plane, and the light beam can maintain its original symmetry during reflection, thereby reducing aberrations and improving imaging quality.

[0053] In some other possible embodiments provided by the present invention, the rotating mirror assembly further includes a cylindrical lens 03, and the light source is converged on the focal plane by the cylindrical lens 03 to form an incident light 01, which is then incident on the reflector 21. In other words, the light emitted by the light source is converged on the focal plane by the cylindrical lens 03 to form the incident light 01, which is then incident on the reflector 21. Specifically, in combination with Figure 2 As shown, the light emitted by the light source (for example, incident laser 001) passes through the cylindrical lens 03 in the second direction (for example Figure 2 and Figure 3 The original spot size is maintained in the y direction shown in FIG. 1 , the second direction is perpendicular to the first direction, and the original spot size is maintained in the third direction (eg, Figure 2 The incident light 01 is converged in the z direction as shown, that is, it is converged into a line on the focal plane of the cylindrical lens 03 to form an incident light 01 that is incident toward the rotating mirror body 2.

[0054] The inventors have also considered the distance between the reflector 21 and the focal plane of the cylindrical lens 03 to avoid divergence of the incident light 02 incident on the reflector 21. Therefore, when the incident direction of the incident light 01 is perpendicular to the first direction, the maximum distance between the reflector 21 and the focal plane along the second direction is controlled to be -10 to 10 mm. Specifically, for example, the rotating mirror body 2 includes 6 reflectors 21, and the maximum distance between each reflector and the focal plane along the second direction is -10 to 10 mm. In addition, when the incident direction of the incident light 01 is parallel to the first direction, the maximum distance between the focal plane and the reflector 21 along the first direction (for example Figure 2The distance d) shown is -10 to 10 mm. Thus, the divergence of the incident light 02 incident on the multiple reflectors 21 is improved. Furthermore, by using a cylindrical lens 03 with a longer focal length, the focal length of the cylindrical lens 03 can be 100 to 1000 mm, which further improves the divergence of the incident light 02 and ensures the imaging effect of the scan.

[0055] In some other possible embodiments provided by the present invention, the reflective surface 211 is provided with a reflective layer, and the reflectivity of the reflective layer is greater than or equal to 95%. As a result, the loss of the incident light 02 is reduced and the efficiency of reflection is improved. Specifically, the reflective layer includes an optical reflective coating or an optical reflective film, and the reflective layer can be made of a metal material or a non-metallic material. The reflective layer can be provided on the reflective surface 211 by electron beam deposition, magnetron sputtering, laser spraying, electroplating or magnetic film, and is used to reflect light of any wavelength in the wavelength range of 100nm to 2000nm. Preferably, the thickness of the reflective layer is 10 to 2000nm.

[0056] In some other possible embodiments provided by the present invention, continue to refer to Figure 1 and Figure 3 As shown, the rotating mirror assembly also includes a fixed base plate 3, a transmission member 4 and a fixed frame 5. Among them, the fixed base plate 3 is fixedly sleeved on the rotating shaft 1, and the rotating mirror body 2 and the fixed base plate 3 are fixedly fitted along the first direction; specifically, the rotating mirror body 2 can be fixed to the fixed base plate 3 by means of magnetic attraction, pins, etc. The rotating shaft 1 has a first end and a second end that are relatively arranged along the first direction, and the second end is connected to the transmission member 4, and the transmission member 4 is used to drive the rotating shaft 1 to rotate. The fixed frame 5 is connected to the first end and is fixedly connected to the transmission member 4. As a result, the transmission member 4 drives the rotating shaft 1 to rotate, and then drives the fixed base plate 3 to rotate, so that the rotating mirror body 2 rotates. Preferably, the rotating shaft 1 is located on the central axis of the transmission member 4 along the second direction to improve the stability of the rotation.

[0057] Furthermore, the rotating mirror assembly also includes a motor 6 connected to the transmission member 4 for controlling the speed and direction of rotation of the rotating shaft 1 (for example Figure 2 Specifically, the motor 6 is fixed on the fixing frame 5, and the direction of driving the rotating mirror body 2 to rotate can be clockwise or counterclockwise.

[0058] Furthermore, it also includes a heat dissipation component 7 for dissipating heat for the transmission member 4 and the motor 6. Specifically, the heat dissipation component 7 is located on both sides of the motor 6 and the transmission member 4 along the second direction. When the heat dissipation component 7 works based on the water cooling module, the heat dissipation component 7 includes a water cooling fixture, a water pump, a water inlet flow pipe, a water outlet flow pipe and a water cooling liquid. When the heat dissipation component 7 works based on the air cooling module, it specifically includes a heat dissipation fan, a vent and a heat dissipation fan motor. The heat dissipation component 7 can also work based on a semiconductor refrigeration module. In this embodiment, the semiconductor refrigeration module refers to the thermoelectric effect formed between two semiconductor materials with different conductivities. When current is applied through the two semiconductor materials, one semiconductor material absorbs heat and the other releases heat, so that heat is conducted from one side to the other, achieving a cooling or heating effect.

[0059] The following is a further detailed description in conjunction with more specific implementation methods.

[0060] Embodiment 1: A rotating mirror assembly for laser scanning has a structure as follows: Figure 1 shown.

[0061] The motor 6, the transmission part 4 and the heat dissipation component 7 are respectively fixed on the fixing frame 5. The heat dissipation component 7 works based on a water cooling module, which specifically includes a water cooling fixing part, a water pump, a water inlet flow pipe, a water outlet flow pipe and a water cooling liquid.

[0062] The rotating shaft 1 is connected to the central axis of the transmission member 4 , the fixed base plate 3 is fixed to the rotating shaft 1 , and the four reflective members 21 are coaxially sleeved on the rotating shaft 1 and fixed to the fixed base plate 3 with screws.

[0063] The four angles β are 70°, 50°, 30° and 10° respectively along the first direction. After the laser is converged by the cylindrical lens 03 with a focal length of 1000 mm, it is incident on the incident element 21 parallel to the first direction, and is reflected to the light receiving surface 04 while forming a beam splitting direction (for example Figure 2 Therefore, the rotating mirror body 2 can realize the division of one incident light beam into four reflected light beams, and then can perform four-line scanning.

[0064] Embodiment 2: A rotating mirror assembly for laser scanning has a structure as follows: Figure 3 shown.

[0065] The motor 6, the transmission part 4 and the heat dissipation component 7 are respectively fixed on the fixing frame 5. The heat dissipation component 7 works based on a water cooling module, which specifically includes a water cooling fixing part, a water pump, a water inlet flow pipe, a water outlet flow pipe and a water cooling liquid.

[0066] The rotating shaft 1 is connected to the central axis of the transmission member 4 , the fixed base plate 3 is fixed to the rotating shaft 1 , and the six reflective members 21 are coaxially sleeved on the rotating shaft 1 and fixed to the fixed base plate 3 with screws.

[0067] The six angles β are 45°, 30°, 15°, 15°, 30° and 45° respectively along the first direction. After the laser is converged by the cylindrical lens 03 with a focal length of 800 mm, it is incident on the incident element 21 parallel to the first direction, and is reflected to the light receiving surface 04 while forming a beam splitting direction (for example Figure 2 Therefore, the rotating mirror body 2 can realize the division of one incident light beam into six reflected light beams, and then perform six-line scanning.

[0068] In summary, the rotating mirror assembly of the present invention can reflect a beam of incident light into multiple beams of reflected light at different angles, and allow the reflected light at different angles to be scanned in separate lines simultaneously without crosstalk. The function of separate line scanning can be achieved without the need for additional scanning equipment or space-division multiplexing optical paths. This allows for a new combination design of the multi-faceted rotating mirror with other scanning equipment and optical paths. For example, a scanning system can be formed by combining a spatial optical path, a scanning galvanometer, a resonant galvanometer and other optical elements, which can be used to construct a new laser scanning system.

[0069] Although the present invention has been illustrated and described with reference to certain preferred embodiments of the present invention, it should be understood by those skilled in the art that the above is a further detailed description of the present invention in conjunction with specific embodiments, and it cannot be determined that the specific implementation of the present invention is limited to these descriptions. Those skilled in the art may make various changes in form and details, including making several simple deductions or substitutions, without departing from the spirit and scope of the present invention.

Claims

1. A rotating mirror assembly for a laser scanning system, characterized in that: include: Axis of rotation; The rotating mirror body is sleeved on the rotating axis and can rotate around the rotating axis, including: A plurality of reflectors are used to receive incident light and reflect it to a light receiving surface. The plurality of reflectors are distributed along a first direction and have different angles with the first direction, so that after the incident light is incident on the reflectors, it is reflected to the light receiving surface and simultaneously forms a plurality of scanning tracks distributed along a beam splitting direction, wherein the first direction is parallel to the rotation axis.

2. The rotating mirror assembly according to claim 1, characterized in that: The reflective member includes a plurality of reflective surfaces, which are connected end to end along the circumferential direction of the rotating mirror body. The reflective surfaces are used to receive incident light and reflect it to the light receiving surface.

3. The rotating mirror assembly according to claim 1, characterized in that: An incident direction of the incident light is parallel to the first direction or perpendicular to the first direction.

4. The rotating mirror assembly according to claim 1, characterized in that: The plurality of reflective elements are continuously distributed along the first direction.

5. The rotating mirror assembly according to claim 4, characterized in that: The included angles between the plurality of reflective elements and the first direction gradually decrease along the first direction.

6. The rotating mirror assembly according to claim 4, characterized in that: The incident direction of the incident light is perpendicular to the first direction, and the included angles of the plurality of reflectors gradually decrease and then gradually increase along the first direction.

7. The rotating mirror assembly according to claim 6, characterized in that: The rotating mirror body is symmetrically distributed along a first plane, and the first plane is perpendicular to the rotation axis; and / or the center of the incident light is located in a middle area of ​​the rotating mirror body along the first direction.

8. The rotating mirror assembly according to claim 6, characterized in that: It also includes a cylindrical lens, through which the light source is converged on a focal plane to form the incident light; and / or the maximum distance between the reflector and the focal plane along a second direction is -10 to 10 mm, and the second direction is perpendicular to the first direction.

9. The rotating mirror assembly according to claim 2, characterized in that: The reflective surface is provided with a reflective layer, the reflectivity of the reflective layer is greater than or equal to 95%; and / or the thickness of the reflective layer is 10-2000 nm.

10. The rotating mirror assembly according to claim 1, characterized in that: Also includes: A fixed bottom plate is fixedly connected to the rotating shaft, and the rotating mirror body and the fixed bottom plate are fixedly attached along the first direction; A transmission member, wherein the rotating shaft has a first end and a second end that are oppositely arranged along the first direction, and the second end is connected to the transmission member, and the transmission member is used to drive the rotating shaft to rotate, so that the rotating shaft drives the rotating mirror body to rotate through the fixed bottom plate; A fixed frame connected to the first end and fixedly connected to the transmission member; A motor connected to the transmission member and used to control the speed and direction of rotation of the rotating shaft; The heat dissipation component is used to dissipate heat for the transmission member and the motor.

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