A method and device for calculating remapping parameters based on a calibration plate

Abstract

The application discloses a kind of based on the calculation method and device of remapping parameter of calibration board, the method comprises: obtaining the calibration board image of calibration board under set condition in the preset scanning mode acquisition, wherein the set condition is that calibration board is placed in motion platform, calibration board center is aligned with the rotation center of motion platform;Image coordinates of all mark patterns on calibration board are extracted according to the calibration board image using image processing technology, wherein the image coordinates of all mark patterns include the image coordinates of data mark and registration mark;Calibration board coordinates of all data marks are calculated according to the coordinates of registration mark in calibration board, and data fitting is carried out based on the image coordinates and calibration board coordinates of all mark patterns, to determine remapping parameter.The application solves the problem of low accuracy in determining remapping parameter in the prior art.

Description

TECHNICAL FIELD

[0001] The present application relates to the chip manufacturing technical field, particularly relates to a kind of computing method and device of remapping parameter based on calibration board. BACKGROUND

[0002] In some chip product image acquisition needs to be completed by the combination of helical scanning and concentric circle scanning.However the image collected by the two scanning modes is all polar coordinate system data, for the convenience of user browsing, it needs to be converted to Cartesian coordinate system, and the image and coordinate conversion process between different coordinate systems is called remapping.

[0003] At present, most calibration methods rely on manual operation, which not only consumes time, but also is easily affected by human operation errors, resulting in low accuracy. SUMMARY

[0004] Therefore, the present application aims to provide a kind of computing method and device of remapping parameter based on calibration board, to solve the problem of low accuracy in the prior art when remapping parameter is calculated.

[0005] The embodiment of the present application is implemented as follows:

[0006] A kind of computing method of remapping parameter based on calibration board, the calibration board is wafer divided into multiple regions, each region is composed of respective die with mark pattern, the mark pattern includes data mark and registration mark, and the method comprises:

[0007] obtain the calibration board image of calibration board collected in preset scanning mode under set condition, wherein the set condition is that calibration board is placed on motion platform, and the center of calibration board is aligned with the rotation center of motion platform;

[0008] extract the image coordinates of all mark patterns on calibration board according to the calibration board image using image processing technology, wherein the image coordinates of all mark patterns include the image coordinates of data mark and registration mark;

[0009] calculate the calibration board coordinates of all data marks according to the coordinates of registration mark in calibration board, and determine remapping parameter based on the data fitting of the image coordinates and calibration board coordinates of all mark patterns.

[0010] Further, the above computing method of remapping parameter based on calibration board, wherein the step of extracting the image coordinates of all mark patterns on calibration board according to the calibration board image using image processing technology comprises:

[0011] The calibration board image is thresholded based on pixel grayscale values ​​to extract the pattern region, and the black square region that makes up each mark is obtained by filtering based on information such as area and shape.

[0012] Two adjacent black square regions are treated as a pair. The outline of each black square region is extracted. The Euclidean distance is calculated to obtain the pair of points with the closest outline. The midpoint of the pair is used as the candidate coordinate.

[0013] The image coordinates of the corresponding marker pattern are obtained by using a saddle point localization algorithm to improve the sub-pixel accuracy of the candidate coordinates.

[0014] Furthermore, in the above method for calculating remapping parameters based on the calibration board, the step of calculating the calibration board coordinates of all data markers according to the coordinates of the registration markers on the calibration board includes:

[0015] The calibration board image is thresholded based on pixel grayscale values ​​to extract the pattern region, and black and white circular regions are obtained by filtering based on information such as area and shape.

[0016] The registration mark type is determined based on the number and location distribution of the circular regions, and the X-axis and Y-axis positions and directions of the calibration plate are determined based on the registration mark type.

[0017] Convert the image coordinates of all data markers to motion platform coordinates, establish a coordinate system based on the X and Y axes, and calculate the coordinates of each data marker in this coordinate system, i.e., the calibration plate coordinates.

[0018] Furthermore, in the above method for calculating remapping parameters based on the calibration board, when the preset scanning mode is spiral scanning, the function for converting the image coordinates of all data markers into motion platform coordinates is defined as:

[0019] ;

[0020] in, and Marking The image's X and Y coordinates, and These are the X and Y coordinates in the image stitching coordinate system, respectively. and These are the image width and height, respectively. Number the images. and These are the helix coefficients, This is the initial angle for the spiral scan. and These are the camera's X-axis and scanning direction resolutions, respectively. The length of the spiral arc. and the motion platform polar coordinates of the markers the motion platform X and Y coordinates of the markers the motion platform X and Y coordinates of the markers

[0021] Further, the above method for calculating the remapping parameters based on the calibration board, wherein when the preset scanning mode is the concentric circle scanning, the function of converting the image coordinates of all the data markers into the motion platform coordinates is defined as:

[0022]

[0023] wherein, the image X and Y coordinates of the markers the image X and Y coordinates of the markers the X and Y coordinates in the image stitching coordinate system the image width and height the image number the initial angle of the concentric circle scanning the X axis of the camera and the scanning direction resolution the radius of the circle the motion platform polar coordinates of the markers the motion platform X and Y coordinates of the markers the X and Y coordinates of the circle center

[0024] Further, the above method for calculating the remapping parameters based on the calibration board, wherein when the preset scanning mode is the spiral scanning, the step of determining the remapping parameters based on the data fitting of the image coordinates and the calibration board coordinates of all the marker patterns comprises:

[0025] the function of converting the calibration board coordinates into the image coordinates is defined as:

[0026]

[0027] wherein, the image X and Y coordinates of the markers the image X and Y coordinates of the markers the X and Y coordinates in the image stitching coordinate system the image width and height​​​​​​​​​​​​ is the image number, and are the helix coefficients, is the helix scan initial angle, and are the camera X-axis and scan direction resolution, and are the marker motion platform polar coordinates, and are the marker motion platform X and Y coordinates, and are the marker image X and Y coordinates, is the affine transformation function, 、 and are the affine transformation coefficients, is the helix arc length calculation function, is the polar coordinate conversion function, is the modulo function;

[0028] The remapping parameter fitting numerical solution definition is:

[0029] .

[0030] Further, the above-mentioned method for calculating the remapping parameters based on the calibration plate, wherein when the preset scanning mode is concentric circle scanning, the step of determining the remapping parameters based on the data fitting of the image coordinates and the calibration plate coordinates of all the marker patterns comprises:

[0031] The calibration plate coordinate conversion to image coordinate function definition:

[0032]

[0033] wherein, and are the image X and Y coordinates of the marker , respectively, and are the X and Y coordinates under the image stitching coordinate system, and are the image width and height, is the image number, is the circle scan initial angle, and are the camera X-axis and scan direction resolution, is the circle radius, and are the marker motion platform polar coordinates, and are the marked motion platform X and Y coordinates, respectively, and are the circle center X and Y coordinates, respectively, and are the marked image X and Y coordinates, respectively, is an affine transformation function, , and are affine transformation coefficients, is a polar coordinate conversion function, is a remainder function;

[0034] Remapping parameter fitting numerical solution definition:

[0035] .

[0036] Another object of the present application is to provide a device for calculating remapping parameters based on a calibration board, the calibration board being a wafer divided into multiple regions, each region being composed of a respective die with a marked pattern, the marked pattern including data marks and registration marks, the device comprising:

[0037] an acquisition module configured to acquire calibration board images of the calibration board under a preset scanning mode and under a set condition, wherein the set condition is that the calibration board is placed on a motion platform and the center of the calibration board is aligned with the rotation center of the motion platform;

[0038] a processing module configured to extract image coordinates of all marked patterns on the calibration board from the calibration board images by using image processing technology, wherein the image coordinates of all marked patterns include image coordinates of the data marks and the registration marks;

[0039] a calculation module configured to calculate calibration board coordinates of all data marks according to coordinates of the registration marks in the calibration board, and to determine the remapping parameters based on data fitting of the image coordinates and the calibration board coordinates of all marked patterns.

[0040] Another object of the present application is to provide a readable storage medium having a computer program stored thereon, the program being executed by a processor to implement the steps of the above method.

[0041] Another object of the present application is to provide an electronic device comprising a memory, a processor, and a computer program stored on the memory and running on the processor, the processor implementing the steps of the above method when executing the program.

[0042] The present application obtains the calibration plate image of the calibration plate collected in a preset scanning mode under a set condition, wherein the set condition is that the calibration plate is placed on a motion platform, and the center of the calibration plate is aligned with the rotation center of the motion platform; image coordinates of all mark patterns on the calibration plate are extracted from the calibration plate image by using image processing technology, wherein the image coordinates of all mark patterns include image coordinates of data marks and registration marks; calibration plate coordinates of all data marks are calculated according to the coordinates of the registration marks in the calibration plate; data fitting is performed based on the image coordinates and the calibration plate coordinates of all mark patterns to determine remapping parameters; the remapping parameters are calculated through the steps of scanning the calibration plate, image processing and data fitting, without manual intervention, reducing errors caused by manual intervention, and high-precision image and coordinate remapping can be realized. The problem of low accuracy in calculating remapping parameters in the prior art is solved. BRIEF DESCRIPTION OF DRAWINGS

[0043] Figure 1 Flow chart of the calculation method of the remapping parameters based on the calibration plate in the first embodiment of the present application;

[0044] Figure 2 Schematic diagram of a regular grain pattern in the calculation method of the remapping parameters based on the calibration plate in an embodiment of the present application;

[0045] Figure 3 Schematic diagram of a special A type grain pattern in the calculation method of the remapping parameters based on the calibration plate in an embodiment of the present application;

[0046] Figure 4 Schematic diagram of a special A1 type grain pattern in the calculation method of the remapping parameters based on the calibration plate in an embodiment of the present application;

[0047] Figure 5 Schematic diagram of a special A2 type grain pattern in the calculation method of the remapping parameters based on the calibration plate in an embodiment of the present application;

[0048] Figure 6 Schematic diagram of a special B type grain pattern in the calculation method of the remapping parameters based on the calibration plate in an embodiment of the present application;

[0049] Figure 7 Schematic diagram of a special B1 type grain pattern in the calculation method of the remapping parameters based on the calibration plate in an embodiment of the present application;

[0050] Figure 8 Schematic diagram of a special B2 type grain pattern in the calculation method of the remapping parameters based on the calibration plate in an embodiment of the present application;

[0051] Figure 9A schematic diagram of a special C-type of grain pattern in the method for calculating remapping parameters based on a calibration board in an embodiment of the present application;

[0052] Figure 10 A schematic diagram of A, B, C-type of registration marks in the method for calculating remapping parameters based on a calibration board in an embodiment of the present application;

[0053] Figure 11 A schematic diagram of A1, A2, A3, A4-type of registration marks in the method for calculating remapping parameters based on a calibration board in an embodiment of the present application;

[0054] Figure 12 A schematic diagram of the determination of calibration board coordinates of data marks in the method for calculating remapping parameters based on a calibration board in an embodiment of the present application;

[0055] Figure 13 A structure block diagram of the device for calculating remapping parameters based on a calibration board in the third embodiment of the present application.

[0056] The following detailed description will further describe the present application in conjunction with the above-mentioned figures. DETAILED DESCRIPTION

[0057] In order to facilitate the understanding of the present application, the following will make a more comprehensive description of the present application with reference to the relevant drawings. The drawings show several embodiments of the present application. However, the present application can be realized in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0058] It should be noted that when an element is referred to as being "fixedly attached" to another element, it can be directly on the other element or there can be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements can be present. As used herein the terms "vertical", "horizontal", "left", "right", and the like are merely for purposes of illustration.

[0059] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0060] First Embodiment

[0061] Please refer to Figure 1, as shown in the first embodiment of the present application, the method comprises steps S10-S12.

[0062] In step S10, an image of the calibration plate under a set condition is acquired, which is collected in a preset scanning mode, wherein the set condition is that the calibration plate is placed on a motion platform, and the center of the calibration plate is aligned with the rotation center of the motion platform.

[0063] The calibration plate is a wafer divided into multiple regions, each region is composed of a respective die with a mark pattern, and the mark pattern includes data marks and registration marks. There are eight types of die patterns, specifically, as shown in Figures 2 to 9 , which are: conventional, special A type, special A1 type, special A2 type, special B type, special B1 type, special B2 type and special C type. The above die patterns can be decomposed into smaller unit mark patterns. The mark patterns can be divided into two categories according to the purpose, which are data marks and registration marks, and the registration marks include three types of A, B and C. Specifically, as shown in Figure 10 .

[0064] Further, the preset scanning mode is a spiral or concentric circle scanning mode, and the calibration plate is placed on the Stage (motion platform) to ensure that the center of the wafer is aligned with the rotation center of the Stage as much as possible.

[0065] In step S11, image coordinates of all mark patterns on the calibration plate are extracted from the image of the calibration plate by using image processing technology, wherein the image coordinates of all mark patterns include image coordinates of data marks and registration marks.

[0066] Specifically, the image coordinates of all mark patterns on the calibration plate are extracted by using image processing technology, the coordinate points are two adjacent positions of black squares, and the data marks and registration marks are divided according to the pattern difference. In specific implementation, the pattern area is extracted by thresholding the image based on the pixel gray value, and the black square area constituting each mark is obtained by filtering according to the area, shape and other information. Two black square areas adjacent in position are taken as a pair, the contour of each black square area is extracted respectively, the pair of points with the closest distance between the two contours is obtained by calculating the Euclidean distance, and the midpoint of the pair of points is taken as the candidate coordinate. The candidate coordinate is improved to the final image coordinate of the mark pattern by using the saddle point positioning algorithm in sub-pixel accuracy.

[0067] In step S12, the coordinates of all data marks on the calibration plate are calculated according to the coordinates of the registration marks in the calibration plate, and the data fitting is performed based on the image coordinates and the calibration plate coordinates of all mark patterns to determine the remapping parameters.

[0068] Specifically, as shown in the following table, the A type registration mark in the image is subdivided into four categories according to the position distribution of black squares and white circles. Specifically, as shown inFigure 11 as shown.

[0069] Wherein, A1 and A2 type are located in the wafer X axis, A3 and A4 type are located in the wafer Y axis;

[0070] (2) Convert the image coordinates of A1 and A2 type registration marks into Stage coordinates, and determine the wafer X axis position and direction;

[0071] (3) Convert the image coordinates of A3 and A4 type registration marks into Stage coordinates, and determine the wafer Y axis position and direction;

[0072] (4) Convert the image coordinates of all data marks into Stage coordinates;

[0073] (5) Specifically, as shown in Figure 12 , wherein the circular shaded part is the registration mark, the XY axis of the calibration plate is determined according to the motion platform coordinates of the registration mark, the coordinate system is established according to the X axis and the Y axis, and the coordinates of each mark in the coordinate system, i.e. the calibration plate coordinates, are calculated;

[0074] (6) Since the calibration plate coordinates of B type and C type registration marks are known, the calibration plate coordinates of the surrounding data marks can be calculated according to these marks until all marks are covered;

[0075] (7) Comprehensive comparison of (5) (6) results, improve the accuracy of data mark calibration plate coordinate extraction.

[0076] Spiral scanning image coordinate conversion into Stage coordinate function Definition:

[0077]

[0078] Wherein, and are the image X and Y coordinates of the mark , respectively, and are the X and Y coordinates in the image stitching coordinate system, respectively, and are the image width and height, respectively, is the image number, and are the spiral coefficients, respectively, is the initial angle of spiral scanning, and are the camera X axis and scanning direction resolution, respectively, is the spiral arc length, and are the Stage polar coordinates of the mark , respectively, and image X and Y coordinates of the marker Stage X and Y coordinates of the marker, screw arc length calculation function:

[0079]

[0080] Concentric circle scanning image coordinate to Stage coordinate function Definition:

[0081]

[0082] where, image X and Y coordinates of the marker image X and Y coordinates of the marker image X and Y coordinates of the marker image X and Y coordinates of the marker image X and Y coordinates of the marker image X and Y coordinates of the marker image X and Y coordinates of the marker image number concentric circle scanning initial angle camera X axis and scanning direction resolution camera X axis and scanning direction resolution circle radius Stage polar coordinates of the marker Stage polar coordinates of the marker Stage X and Y coordinates of the marker Stage X and Y coordinates of the marker circle center X and Y coordinates circle center X and Y coordinates

[0083] Finally, data fitting is performed based on the image coordinates and calibration board coordinates of all markers to determine the remapping parameters.

[0084] In summary, the method for calculating the remapping parameters based on the calibration plate in the above embodiments of the present application, by acquiring the calibration plate image of the calibration plate collected in a preset scanning mode under a set condition, wherein the set condition is that the calibration plate is placed on a motion platform, and the center of the calibration plate is aligned with the rotation center of the motion platform; using image processing technology to extract the image coordinates of all the marker patterns on the calibration plate according to the calibration plate image, wherein the image coordinates of all the marker patterns include the image coordinates of the data markers and the registration markers; calculating the calibration plate coordinates of all the data markers according to the coordinates of the registration markers in the calibration plate, and performing data fitting based on the image coordinates and the calibration plate coordinates of all the marker patterns to determine the remapping parameters, the remapping parameters are calculated through the steps of scanning the calibration plate, image processing, data fitting and the like, without manual intervention, reducing the errors caused by manual intervention, and high-precision image and coordinate remapping can be realized. The problem of low accuracy in calculating the remapping parameters in the prior art is solved.

[0085] Second embodiment

[0086] The present embodiment also proposes a method for calculating the remapping parameters based on the calibration plate, which is different from the method for calculating the remapping parameters based on the calibration plate in the first embodiment in that:

[0087] When the preset scanning mode is spiral scanning, the calibration plate coordinates are converted into image coordinate functions Definition:

[0088]

[0089] Wherein, and are the image X and Y coordinates of the marker , respectively, and are the X and Y coordinates in the image stitching coordinate system, respectively, and are the image width and height, respectively, is the image number, and are the spiral coefficients, respectively, is the initial angle of spiral scanning, and are the camera X axis and scanning direction resolution, respectively, and are the Stage polar coordinates of the marker, respectively, and are the Stage X and Y coordinates of the marker, respectively, and are the image X and Y coordinates of the marker, respectively, is an affine transformation function, , and is an affine transformation coefficient, is a spiral arc length calculation function, is a polar coordinate conversion function, is a remainder function.

[0090] The remapping parameter fitting numerical solution definition is:

[0091]

[0092] When the preset scanning mode is concentric circle scanning, the calibration plate coordinate conversion is an image coordinate function definition:

[0093]

[0094] wherein, and are the image X and Y coordinates of the mark , respectively, and are the X and Y coordinates in the image stitching coordinate system, respectively, and are the image width and height, respectively, is the image number, is the initial angle of circle scanning, and are the camera X axis and scanning direction resolution, respectively, is the circle radius, and are the Stage polar coordinates of the mark, respectively, and are the Stage X and Y coordinates of the mark, respectively, and are the circle center X and Y coordinates, respectively, and are the image X and Y coordinates of the mark, respectively, is an affine transformation function, , and are affine transformation coefficients, is a polar coordinate conversion function, is a remainder function.

[0095] The remapping parameter fitting numerical solution definition is:

[0096]

[0097] In summary, the method for calculating the remapping parameters based on the calibration plate in the above embodiments of the present application, by acquiring the calibration plate image of the calibration plate collected in a preset scanning manner under a set condition, wherein the set condition is that the calibration plate is placed on a motion platform, and the center of the calibration plate is aligned with the rotation center of the motion platform; using image processing technology to extract the image coordinates of all the mark patterns on the calibration plate according to the calibration plate image, wherein the image coordinates of all the mark patterns include the image coordinates of the data marks and the registration marks; calculating the calibration plate coordinates of all the data marks according to the coordinates of the registration marks in the calibration plate, and performing data fitting based on the image coordinates and the calibration plate coordinates of all the mark patterns to determine the remapping parameters. Through the steps of scanning the calibration plate, image processing, data fitting, etc., the remapping parameters are calculated without manual intervention, the error caused by manual intervention is reduced, and high-precision image and coordinate remapping can be realized. The problem of low accuracy in calculating the remapping parameters in the prior art is solved.

[0098] Third embodiment

[0099] Please refer to Figure 13 , which is a device for calculating the remapping parameters based on the calibration plate according to the fourth embodiment of the present application. The calibration plate is a wafer divided into multiple regions, each region being composed of respective die with mark patterns, and the mark patterns include data marks and registration marks. The device comprises:

[0100] The acquisition module 100 is configured to acquire the calibration plate image of the calibration plate collected in a preset scanning manner under a set condition, wherein the set condition is that the calibration plate is placed on a motion platform, and the center of the calibration plate is aligned with the rotation center of the motion platform.

[0101] The processing module 200 is configured to extract the image coordinates of all the mark patterns on the calibration plate according to the calibration plate image using image processing technology, wherein the image coordinates of all the mark patterns include the image coordinates of the data marks and the registration marks.

[0102] The calculation module 300 is configured to calculate the calibration plate coordinates of all the data marks according to the coordinates of the registration marks in the calibration plate, and perform data fitting based on the image coordinates and the calibration plate coordinates of all the mark patterns to determine the remapping parameters.

[0103] Further, the device for calculating the remapping parameters based on the calibration plate, wherein the step of extracting the image coordinates of all the mark patterns on the calibration plate according to the calibration plate image using image processing technology comprises:

[0104] The calibration plate image is thresholded to extract the pattern region based on the pixel gray value, and the black square region constituting each mark is obtained by filtering according to the area, shape, etc.

[0105] Two black square regions adjacent to each other are taken as a pair, the contour of each black square region is extracted, a pair of points with the shortest distance between the two contours is obtained by calculating the Euclidean distance, and a midpoint of the pair of points is taken as a candidate coordinate;

[0106] The candidate coordinate is refined to sub-pixel accuracy by using a saddle point positioning algorithm to obtain an image coordinate of the corresponding marker pattern.

[0107] Further, the above-mentioned calibration plate-based remapping parameter calculation device, wherein the step of calculating the calibration plate coordinates of all data markers according to the coordinates of the registration markers in the calibration plate comprises:

[0108] The calibration plate image is thresholded based on pixel gray value to extract the pattern region, and the black and white circular regions are obtained by filtering according to area, shape and other information;

[0109] The registration marker type is determined according to the number and position distribution of the circular regions, and the X-axis and Y-axis positions and directions corresponding to the calibration plate are determined according to the registration marker type;

[0110] The image coordinates of all data markers are converted into motion platform coordinates, a coordinate system is established according to the X-axis and Y-axis, and the coordinates of each data marker in the coordinate system, i.e. the calibration plate coordinates, are calculated.

[0111] Further, the above-mentioned calibration plate-based remapping parameter calculation device, wherein when the preset scanning mode is spiral scanning, the function of converting the image coordinates of all data markers into motion platform coordinates is defined as:

[0112] ;

[0113] wherein, and are the image X and Y coordinates of the marker , respectively, and are the X and Y coordinates in the image stitching coordinate system, respectively, and are the image width and height, respectively, is the image number, and are the spiral coefficients, respectively, is the initial angle of spiral scanning, and are the camera X-axis and scanning direction resolution, respectively, is the spiral arc length, and are the motion platform polar coordinates of the marker , respectively, and are the motion platform polar coordinates of the marker The motion platform's X and Y coordinates.

[0114] Furthermore, in the aforementioned calculation device for remapping parameters based on the calibration board, when the preset scanning mode is concentric circle scanning, the function for converting the image coordinates of all data markers into motion platform coordinates is defined as:

[0115]

[0116] in, and Marking The image's X and Y coordinates, and These are the X and Y coordinates in the image stitching coordinate system, respectively. and These are the image width and height, respectively. Number the images. The initial angle for the concentric circle scan. and These are the camera's X-axis and scanning direction resolutions, respectively. Let the radius be the circle. and These are the polar coordinates of the marked motion platform. and These are the X and Y coordinates of the marked motion platform. and These are the X and Y coordinates of the circle's center, respectively.

[0117] Furthermore, in the aforementioned calculation device for remapping parameters based on the calibration plate, when the preset scanning mode is spiral scanning, the step of determining the remapping parameters by data fitting based on the image coordinates and calibration plate coordinates of all marked patterns includes:

[0118] Calibration plate coordinates to image coordinates function definition:

[0119]

[0120] in, and Marking The image's X and Y coordinates, and These are the X and Y coordinates in the image stitching coordinate system, respectively. and These are the image width and height, respectively. Number the images. and These are the helix coefficients, This is the initial angle for the spiral scan. and are the camera X axis and scan direction resolution, respectively, and are the motion platform polar coordinates of the marker, and are the motion platform X and Y coordinates of the marker, and are the image X and Y coordinates of the marker, is the affine transformation function, , and are the affine transformation coefficients, is the spiral arc length calculation function, is the polar coordinate conversion function, is the modulo function;

[0121] The remapping parameter fitting numerical solution definition is:

[0122] .

[0123] Further, the above-mentioned calculation device of the remapping parameter based on the calibration plate, wherein, when the preset scanning mode is a concentric circle scanning, the step of determining the remapping parameter based on the data fitting of the image coordinates and the calibration plate coordinates of all the marker patterns comprises:

[0124] The calibration plate coordinate conversion to image coordinate function definition:

[0125]

[0126] wherein, and are the image X and Y coordinates of the marker , respectively, and are the X and Y coordinates in the image stitching coordinate system, and are the image width and height, respectively, is the image number, is the initial angle of the circle scanning, and are the camera X axis and scan direction resolution, respectively, is the circle radius, and are the motion platform polar coordinates of the marker, and are the motion platform X and Y coordinates of the marker, and are the circle center X and Y coordinates, and respectively the marked image X and Y coordinates, is an affine transformation function, , and is an affine transformation coefficient, is a polar coordinate conversion function, is a remainder function;

[0127] The remapping parameter fitting numerical solution definition:

[0128] .

[0129] The functions or operation steps realized when the above modules are executed are substantially the same as the above method embodiments, and will not be described herein again.

[0130] Fourth embodiment

[0131] Another aspect of the present application also provides a readable storage medium, which stores a computer program, the program is executed by a processor to realize the steps of the method of any one of the above first embodiment to the second embodiment.

[0132] Fifth embodiment

[0133] Another aspect of the present application also provides an electronic device, which includes a memory, a processor and a computer program stored in the memory and running on the processor, the processor executes the program to realize the steps of the method of any one of the above first embodiment to the second embodiment.

[0134] The technical features of each of the above embodiments can be combined arbitrarily, in order to make the description concise, not all possible combinations of the technical features in the above embodiments are described, however, as long as the combination of these technical features does not exist contradictory, it should be considered as the scope of the present application.

[0135] Those skilled in the art can understand that the logic and / or steps represented in the flowchart or otherwise described herein, for example, can be considered as a list of executable instructions for implementing logical functions, which can be embodied in any computer readable storage medium for use by or in conjunction with an instruction execution system, device or apparatus, such as a computer-based system, a system including a processor or other system that can fetch and execute instructions from an instruction execution system, device or apparatus. For the present specification, "computer readable storage medium" can be any device that can contain, store, communicate, propagate or transport programs for use by or in conjunction with an instruction execution system, device or apparatus, or in conjunction with these instruction execution systems, devices or apparatus.

[0136] More specific examples (a non-exhaustive list) of the computer-readable storage medium include the following: an electrical connection having one or more wires (electrical device), a portable computer diskette (magnetic device), a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or Flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Additionally, the computer-readable storage medium can also be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, for example, via an optical scanner, then compiled, interpreted, or otherwise processed, and stored in a computer memory in a form that is then reproducible in a computer.

[0137] It should be understood that aspects of the application can be implemented in hardware, software, firmware or combinations thereof. In the embodiments described above, various steps or methods can be implemented, for example, by software or firmware stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, and in another embodiment, any of the following techniques, which are well known in the art, can be used to implement the application: a hybrid of the techniques mentioned above; a combination of one or more of the techniques mentioned above; or one or more other techniques suitable for use in the computer hardware devices described above.

[0138] In the description of the specification, the description of the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the application. In the specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in one or more embodiments or examples.

[0139] The above-described embodiments only express several implementation manners of the application, which are described in a more specific and detailed manner, but cannot be understood as a limitation on the patent scope of the application. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the concept of the application, which are all within the protection scope of the application. Therefore, the patent protection scope of the application should be subject to the appended claims.

Claims

1. A method for calculating remapping parameters based on a calibration plate, characterized in that, The calibration board is a wafer divided into multiple regions, each region consisting of a respective die with a mark pattern, the mark pattern including data marks and registration marks, and the method comprises: acquiring a calibration board image of the calibration board collected in a preset scanning mode under a set condition, wherein the set condition is that the calibration board is placed on a motion platform, and the center of the calibration board is aligned with the rotation center of the motion platform; extracting image coordinates of all mark patterns on the calibration board according to the calibration board image by using image processing technology, wherein the image coordinates of all mark patterns include image coordinates of data marks and registration marks; calculating calibration board coordinates of all data marks according to the coordinates of the registration marks in the calibration board, and performing data fitting based on the image coordinates and the calibration board coordinates of all mark patterns to determine remapping parameters; when the preset scanning mode is spiral scanning, the step of performing data fitting based on the image coordinates and the calibration board coordinates of all mark patterns to determine remapping parameters comprises: Calibration plate coordinate conversion to image coordinate function Definition: wherein, and are the image X and Y coordinates of the marker respectively, and are the X and Y coordinates in the image stitching coordinate system respectively, and are the image width and height respectively, and are the helix coefficients respectively, is the initial angle of the helix scan, and are the camera X axis and scan direction resolution respectively, and are the motion platform polar coordinates of the marker respectively, and are the motion platform X and Y coordinates of the marker respectively, is the affine transformation function, , and are the affine transformation coefficients respectively, is the helix arc length calculation function, is the polar coordinate conversion function, is the modulo function. Remapping parameter fitting value solving definition: 。 2. The method of claim 1, wherein, the step of extracting image coordinates of all mark patterns on the calibration board according to the calibration board image by using image processing technology comprises: thresholding the calibration board image based on pixel gray value to extract pattern regions, and filtering to obtain black square regions constituting each mark according to area and shape information; taking two adjacent black square regions as a pair, extracting the contour of each black square region respectively, obtaining a pair of points with the closest distance between the two contours by calculating the Euclidean distance, and taking the midpoint of the pair of points as a candidate coordinate; using a saddle point positioning algorithm to improve the candidate coordinate to sub-pixel accuracy to obtain the image coordinates of the corresponding mark pattern.

3. The method of claim 2, wherein, the step of calculating calibration board coordinates of all data marks according to the coordinates of the registration marks in the calibration board comprises: thresholding the calibration board image based on pixel gray value to extract pattern regions, and filtering to obtain black and white circular regions according to area and shape information; determining the type of registration mark according to the number and position distribution of the circular regions, and determining the X-axis and Y-axis positions and directions corresponding to the calibration board according to the type of registration mark; converting the image coordinates of all data marks into motion platform coordinates, establishing a coordinate system according to the X-axis and Y-axis, and calculating the coordinates of each data mark in the coordinate system, i.e. the calibration board coordinates.

4. The method of claim 3, wherein, when the preset scanning mode is spiral scanning, the function for converting the image coordinates of all data marks into motion platform coordinates is defined as: ； where, and are the image X and Y coordinates of the marker respectively, and are the X and Y coordinates in the image stitching coordinate system respectively, and are the image width and height respectively, is the image number, and are the spiral coefficients respectively, is the initial angle of the spiral scan, and are the camera X axis and scan direction resolution respectively, is the spiral arc length, and are the motion platform polar coordinates of the marker respectively, and are the motion platform X and Y coordinates of the marker respectively.

5. The method of claim 4, wherein, when the preset scanning mode is spiral scanning, the function for converting the image coordinates of all data marks into motion platform coordinates is defined as: where, and are the image X and Y coordinates of the marker respectively, and are the X and Y coordinates in the image stitching coordinate system respectively, and are the image width and height respectively, is the image number, is the initial angle of the concentric scan, and are the camera X axis and scan direction resolution respectively, is the circle radius, and are the motion platform polar coordinates of the marker respectively, and are the motion platform X and Y coordinates of the marker respectively, and are the circle center X and Y coordinates respectively.

6. A device for calculating remapping parameters based on a calibration plate, characterized in that, The device is used to implement the calculation method of the remapping parameters based on the calibration board according to any one of claims 1 to 5, the calibration board is a wafer divided into multiple regions, each region consisting of a respective die with a mark pattern, the mark pattern including data marks and registration marks, and the device comprises: an acquisition module configured to acquire a calibration board image of the calibration board collected in a preset scanning mode under a set condition, wherein the set condition is that the calibration board is placed on a motion platform, and the center of the calibration board is aligned with the rotation center of the motion platform; a processing module configured to extract image coordinates of all the mark patterns on the calibration board from the calibration board image using image processing techniques, wherein the image coordinates of all the mark patterns include image coordinates of the data marks and the registration marks; a calculating module configured to calculate calibration board coordinates of all the data marks according to coordinates of the registration marks in the calibration board, perform data fitting based on the image coordinates of all the mark patterns and the calibration board coordinates, and determine the remapping parameters.

7. A readable storage medium, having stored thereon a computer program, characterized in that, The program, when executed by a processor, implements the steps of the method of any one of claims 1 to 5.

8. An electronic device, comprising: A computer program product, comprising a memory, a processor, and a computer program stored in the memory and running on the processor, wherein the processor implements the steps of the method of any one of claims 1 to 5 when executing the program.

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