An external high-speed and high-precision force control mechanism

Abstract

The present invention relates to the technical field of semiconductor packaging equipment, and relates to an external high-speed and high-precision force control mechanism, which comprises: a fixed seat, a power assembly, a pressure assembly and a flexible hinge assembly; the power assembly comprises a ball guide assembly and a large voice coil motor, the ball guide assembly is arranged on the fixed seat, a Z-direction mover plate is slidably arranged on the ball guide assembly, a stator fixing plate of the large voice coil motor is connected to the upper end of the fixed seat, and a mover fixing plate of the large voice coil motor is fixedly arranged on the Z-direction mover plate; the pressure assembly comprises a small voice coil motor and a lower pressure plate, the upper end of the small voice coil motor is arranged at the upper right end of the Z-direction mover plate, and the lower pressure plate is arranged at the lower end of the small voice coil motor; the flexible hinge assembly comprises a leaf spring connecting seat and a leaf spring fixing seat, the right end of the leaf spring connecting seat is connected to the lower middle part of the small voice coil motor, the leaf spring fixing seat is fixed on the Z-direction mover plate, and a leaf spring pressure block, an upper leaf spring and a lower leaf spring are fixed to the upper end of the leaf spring connecting seat and the upper end of the leaf spring fixing seat by fastening screws.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor packaging equipment, and in particular to an external high-speed and high-precision force control mechanism. Background Art

[0002] The development of semiconductor equipment shows that the market scale continues to expand. Especially in recent years, with the rapid development of terminal applications such as smartphones, consumer electronics, and data centers, as well as the strong demand driven by the booming field of artificial intelligence computing, the semiconductor equipment industry has entered an overall upward cycle. However, as demand increases, the speed and accuracy requirements of equipment are also gradually increasing, and the cost control of chips is also getting higher and higher. Higher speed (UPH) can increase the output of equipment, and higher accuracy can increase the pass rate of chips. These two requirements are the core factors in reducing chip costs.

[0003] Traditional packaging equipment generally has one or two bonding heads, which has caused a bottleneck in improving the UPH of the equipment. In order to improve the UPH, we can only develop in the direction of more bonding heads. The force control mechanism is the key mechanism for chip bonding in the packaging equipment. The accuracy of the force control mechanism determines the success of chip bonding. Since bonding force needs to be applied during bonding, the bond head needs to have a force control function. In order to improve the UPH of the equipment, the weight of the bond head must also be strictly controlled. Lighter mass can provide faster speed. In the existing technology, one bond head is generally equipped with a force control mechanism, which will increase the weight of the bond head. Even if there are multiple bond heads, the speed will not be fast. In order to achieve faster speed, the bond head needs to be reduced in weight.

[0004] There are also external force control mechanisms for one-to-many bond heads in the existing technology, but the pressure control guide of this mechanism uses a ball guide, a cross roller guide or a linear bushing structure. Although the high UPH requirement can be achieved, as long as it is a mechanical guide, there will be friction, and the change of friction is random and cannot be completely eliminated or compensated. However, if there are higher precision and stability requirements, the current mechanism cannot meet them well. Summary of the invention

[0005] In order to solve the problems of the prior art, the present invention provides an external high-speed and high-precision force control mechanism.

[0006] The object of the present invention can be achieved through the following technical solutions: An external high-speed and high-precision force control mechanism comprises: a fixed seat, a power component, a pressure component and a flexible hinge component;

[0007] The power assembly includes a ball guide assembly and a large voice coil motor, the ball guide assembly is arranged on a fixed seat, a Z-direction mover plate is slidably arranged on the ball guide assembly, the stator fixing plate of the large voice coil motor is connected to the upper end of the fixed seat, and the mover fixing plate of the large voice coil motor is fixedly arranged on the Z-direction mover plate;

[0008] The pressure assembly includes a small voice coil motor and a lower pressure plate, wherein the upper end of the small voice coil motor is arranged at the upper right end of the Z-direction mover plate, and the lower pressure plate is arranged at the lower end of the small voice coil motor;

[0009] The flexible hinge assembly includes a leaf spring connecting seat and a leaf spring fixing seat, the right end of the leaf spring connecting seat is connected to the lower middle part of the small voice coil motor, the leaf spring fixing seat is fixed to the Z-axis mover plate, the upper end of the leaf spring connecting seat and the upper end of the leaf spring fixing seat are fixed downward with a leaf spring pressure block and an upper leaf spring in sequence by fastening screws, and the lower end of the leaf spring connecting seat and the lower end of the leaf spring fixing seat are fixed upward with another group of leaf spring pressure blocks and lower leaf springs in sequence by fastening screws.

[0010] A further improvement is that the large voice coil motor stator of the large voice coil motor is arranged on the stator fixing plate, and the large voice coil motor mover of the large voice coil motor is arranged on the mover fixing plate; the small voice coil motor mover of the small voice coil motor is arranged at the upper right end of the Z-direction mover plate, and the small voice coil motor stator of the small voice coil motor is arranged at the upper right end of the leaf spring connecting seat; the stator fixing plate is also connected with a fixing part reinforcement rib, and the fixing part reinforcement rib is connected to the fixing seat.

[0011] A further improvement is that the large voice coil motor is provided with a monitoring mechanism 1, and the monitoring mechanism 1 includes a large Z reading head bracket, a large Z reading head, a large Z grating scale bracket and a large Z grating scale, the large Z reading head bracket is arranged on the stator fixing plate, the large Z reading head is arranged on the large Z reading head bracket, the large Z grating scale bracket is arranged on the Z-axis mover plate, and the large Z grating scale is arranged on the large Z grating scale bracket; the small voice coil motor is provided with a monitoring mechanism 2, and the monitoring mechanism 2 includes a small Z grating scale bracket, a small Z grating scale, a small Z reading head bracket and a small Z reading head, the small Z grating scale bracket is arranged on the leaf spring connecting seat, the small Z grating scale is arranged on the small Z grating scale bracket, the small Z reading head bracket is arranged on the leaf spring fixing seat, and the small Z reading head is arranged on the small Z reading head bracket.

[0012] As a further improvement, a spring support seat is further provided on the lower end surface of the fixing seat, a balance spring is provided between the mover fixing plate and the spring support seat, and a buffer block is provided on the fixing seat.

[0013] A further improvement is that the ball guide rail assembly includes ball guide rail one and ball guide rail two, the Z-axis mover plate is arranged on the sliders of ball guide rail one and ball guide rail two, the Z-axis mover plate cooperates with the large voice coil motor and the mover fixing plate to form a Z-axis operation module; a guide rail pre-tightening plate is provided on the side of the Z-axis mover plate, and a top screw facing ball guide rail two is provided on the guide rail pre-tightening plate.

[0014] As a further improvement, a safety sensor is provided on the fixing seat, and a light shielding sheet is installed on the Z-direction mover plate. Before starting operation, the safety sensor is in a state of being triggered by the light shielding sheet.

[0015] A further improvement is that a heat dissipation component is provided on the Z-direction mover plate, and the heat dissipation component includes a fan bracket, a fan mounting seat and a fan, the fan bracket is arranged on the Z-direction mover plate, the fan mounting seat is arranged on the fan bracket, the fan is arranged on the fan mounting seat, and the fan is arranged directly opposite the small voice coil motor.

[0016] A further improvement is that a limit bracket is provided at the lower end of the leaf spring fixing seat, a spring upper pull rod is provided at the lower end of the lower pressure plate, a spring lower pull rod is provided at the upper end of the limit bracket, a pre-tensioning spring is provided inside the lower pressure plate, and the pre-tensioning spring is respectively hung on the spring upper pull rod and the spring lower pull rod, a limit column located on the inner side of the pre-tensioning spring is provided on the lower pressure plate, a ball head top screw is provided at the upper end of the limit bracket, the upper end of the ball head top screw is arranged to support the limit column, and a locking top screw for fixing the ball head top screw is provided on the right side of the limit bracket.

[0017] As a further improvement, the leaf spring connecting seat and the leaf spring fixing seat are limited by concave and convex openings.

[0018] Compared with the prior art, the external high-speed and high-precision force control mechanism of the present invention has the following beneficial effects:

[0019] The force control mechanism adopts an external installation method, which can separate the force control mechanism and the bond head, reduce the weight of the bond head, and help improve the operating speed of the bond head. In addition, the use of an external force control mechanism can be used for one-to-multiple bond heads without being affected by the number of bond heads, which helps to improve the UPH of the equipment and reduce the cost of the equipment. The pressure guidance of the force control mechanism is mainly achieved by a flexible hinge, which can achieve complete zero friction, and uses two sets of voice coil motors, one large and one small, to achieve rapid displacement and pressure control respectively. It has a fast response speed and high pressure control accuracy, which can meet the needs of high speed and high precision. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is the overall appearance diagram of the present invention;

[0021] Figure 2 It is a left side view of the present invention;

[0022] Figure 3 It is a right side view of the present invention;

[0023] Figure 4 This is a structural diagram of the flexible hinge in the present invention;

[0024] Figure 5 It is a partial view of the present invention;

[0025] Figure 6 The schematic diagram of pressure calibration of the present invention;

[0026] Figure 7 Schematic diagram of specific application of the present invention;

[0027] In the figure, 1-fixed seat; 2-large voice coil motor; 201-large voice coil motor stator; 202-large voice coil motor mover; 3-fixed part reinforcement rib; 4-statator fixing plate; 5-lower pressure plate; 6-limit bracket; 7-motor fixing plate; 8-balance spring; 9-spring support seat; 10-safety sensor; 11-light shield; 12-guide rail preload plate; 13-buffer block; 14-Z-direction mover plate; 15-ball guide rail 1; 16-ball guide rail 2; 17-large Z reading head bracket; 18-large Z grating ruler; 19-large Z grating ruler bracket; 20-large Z reading head; 21-small voice coil motor; 2101-small voice coil motor mover; 2102-small voice coil motor stator; 22- small Z grating ruler bracket; 23- small Z grating ruler; 24- small Z reading head; 25- small Z reading head bracket; 26- fan; 27- fan mounting seat; 28- fan bracket; 29- leaf spring connecting seat; 30- leaf spring fixing seat; 31- upper leaf spring; 32- lower leaf spring; 33- leaf spring pressure block; 34- preload spring; 35- spring upper pull rod; 36- spring lower pull rod; 37- locking top screw; 38- ball head top screw; 39- limit column; 40- bonding head; 4001- bonding head 1; 4002- bonding head 2; 4003- bonding head 3; 4004- bonding head 4; 4005- bonding head 5; 4006- bonding head 6; 41- pressure sensor. DETAILED DESCRIPTION

[0028] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] Below is a combination of the embodiments and the attached Figure 1 ~Attached Figure 7 , the technical solution of the present invention is further elaborated.

[0031] Embodiment 1: An external high-speed and high-precision force control mechanism, comprising: a fixed seat 1, a power assembly, a pressure assembly and a flexible hinge assembly; the power assembly comprises a ball guide assembly and a large voice coil motor 2, the ball guide assembly is arranged on the fixed seat 1, a Z-direction mover plate 14 is slidably arranged on the ball guide assembly, the stator fixing plate 4 of the large voice coil motor 2 is connected to the upper end of the fixed seat 1, and the mover fixing plate 7 of the large voice coil motor 2 is fixedly arranged on the Z-direction mover plate 14; the pressure assembly comprises a small voice coil motor 21 and a lower pressure plate 5, the upper end of the small voice coil motor 21 is arranged at the upper right end of the Z-direction mover plate 14, The lower pressure plate 5 is arranged at the lower end of the small voice coil motor 21, that is, fixed to the lower end of the right end of the leaf spring connecting seat 29; the flexible hinge assembly includes a leaf spring connecting seat 29 and a leaf spring fixing seat 30, the right end of the leaf spring connecting seat 29 is connected to the lower middle part of the small voice coil motor 21, the leaf spring fixing seat 30 is fixed on the Z-axis mover plate 14, the upper end of the leaf spring connecting seat 29 and the upper end of the leaf spring fixing seat 30 are fixed downward with a leaf spring pressure block 33 and an upper leaf spring 31 in sequence by fastening screws, and the lower end of the leaf spring connecting seat 29 and the lower end of the leaf spring fixing seat 30 are fixed upward with another group of leaf spring pressure blocks 33 and lower leaf springs 32 in sequence by fastening screws.

[0032] like Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the large voice coil motor mover 202 is installed on the mover fixing plate 7. The large voice coil motor 2 provides a power source for operation in the Z direction to drive the Z-direction mover plate 14, the small voice coil motor 21 and the lower pressure plate 5 to move in the Z direction in the ball guide assembly to achieve position control; the small voice coil motor 21 realizes pressure control; the lower pressure plate 5 is the pressure output execution end of the force control mechanism, and can apply the output force of the force control mechanism to the force-bearing end. When the force control mechanism is actually working, the bonding head 40 absorbs the chip, rotates rapidly or moves linearly to the bottom of the lower pressure plate 5, and the force control mechanism moves downward to apply force to the bonding head 40 through the lower pressure plate 5 to package the chip; the upper leaf spring 31 and the lower leaf spring 32 can limit the freedom of the flexible hinge in the X and Y directions, but there is no limit on the freedom in the Z direction, so the flexible hinge can have a small range of displacement in the Z direction. The elastic deformation of the upper leaf spring 31 and the lower leaf spring 32 is used for guidance, so there is no friction factor. Different from the conventional guide mechanism (roller guide, linear guide) which relies on the friction guidance of the ball / ball, the influence of friction is reduced, and the force control accuracy can be better improved. The upper leaf spring 31 and the lower leaf spring 32 are fixed by the leaf spring pressure block 33 instead of directly fixed with a fastening screw, which can increase the contact area of ​​the locking force, thereby improving the stability of the leaf spring when fixed, thereby increasing the life of the flexible hinge.

[0033] The present invention adopts two sets of driving mechanisms, namely, a large voice coil motor 2 and a small voice coil motor 21. The large voice coil motor 2 provides operating power, and the small voice coil motor 21 provides force control pressure. They perform their respective functions and can work in parallel, making the mechanism run faster and more sensitive to adjustment, thus avoiding the problems of serial control, slow time and low efficiency of force-position conversion by a set of driving mechanisms. The force control mechanism adopts the design of a small voice coil motor 21, which provides output force in two directions, upward or downward, according to the direction of the input current. The upward force can be used to balance the gravity of the mechanism, and can reduce the impact on the lower pressure plate and other machines connected below. The requirements of mechanical structure strength and accuracy are met, while reducing the error caused by gravity; the downward force of the voice coil motor can be used to control the contact force between the actuator and the processed parts or the product to be tested. By accurately controlling the current, the size of the downward force can be adjusted in real time to ensure the stability and accuracy of the contact force; at the same time, the electrical signal can be quickly converted, the adjustment response speed is faster, and variable force control can be achieved during operation; the guiding function is achieved through the elastic deformation of the leaf spring, which is frictionless, simple in structure, and high in control accuracy; compared with conventional guiding mechanisms, the flexible hinge does not require maintenance, lubrication, and has high state stability.

[0034] This force control mechanism can realize a pair of multiple bonding heads without being limited by the number of bonding heads. The bonding head simplifies its own force control mechanism, is lighter in weight, and runs faster, which can better improve the UPH capacity of the entire equipment.

[0035] As a further preferred embodiment, the large voice coil motor stator 201 of the large voice coil motor 2 is arranged on the stator fixing plate 4, and the large voice coil motor mover 202 of the large voice coil motor 2 is arranged on the mover fixing plate 7; the small voice coil motor mover 2101 of the small voice coil motor 21 is arranged at the upper right end of the Z-direction mover plate 14, and the small voice coil motor stator 2102 of the small voice coil motor 21 is arranged at the upper right end of the leaf spring connecting seat 29, and the lower pressure plate 5 is fixed to the lower end of the right end portion of the leaf spring connecting seat 29; the stator fixing plate 4 is also connected to a fixing part reinforcement rib 3, and the fixing part reinforcement rib 3 is connected to the fixing seat 1.

[0036] like Figure 1 and Figure 3 As shown, the large voice coil motor mover 202 is installed on the mover fixing plate 7. The large voice coil motor 2 provides a power source for operation in the Z direction, which can ensure the high-speed operation of the force control mechanism. The small voice coil motor 21 serves as the output force mechanism of the force control mechanism. A certain amount of heat will be generated when powered on. The small voice coil motor mover 2101 and the small voice coil motor stator 2102 are installed upside down, and the heat source is placed away from the pressure output execution end. This can effectively reduce the temperature change of the lower pressure plate 5, thereby reducing the thermal deformation of the lower pressure plate 5. Insulating materials such as ceramics and asbestos can also be added between the upper and lower ends of the small voice coil motor 21 and the connected components to reduce thermal deformation. The rigidity and stability of the stator fixing plate 4 are increased by the fixing reinforcement ribs 3.

[0037] As a further preferred embodiment, the large voice coil motor 2 is provided with a monitoring mechanism 1, and the monitoring mechanism 1 includes a large Z reading head bracket 17, a large Z reading head 20, a large Z grating scale bracket 19 and a large Z grating scale 18. The large Z reading head bracket 17 is arranged on the stator fixing plate 4, the large Z reading head 20 is arranged on the large Z reading head bracket 17, the large Z grating scale bracket 19 is arranged on the Z-direction mover plate 14, and the large Z grating scale 18 is arranged on the large Z grating scale bracket The small voice coil motor 21 is provided with a monitoring mechanism 2, and the monitoring mechanism 2 includes a small Z grating scale bracket 22, a small Z grating scale 23, a small Z reading head bracket 25 and a small Z reading head 24. The small Z grating scale bracket 22 is arranged on a leaf spring connecting seat 29, the small Z grating scale 23 is arranged on the small Z grating scale bracket 22, the small Z reading head bracket 25 is arranged on a leaf spring fixing seat 30, and the small Z reading head 24 is arranged on the small Z reading head bracket 25.

[0038] like Figure 3 As shown, the large Z reading head 20 does not move with the up and down movement of the force control mechanism, and the large Z grating ruler 18 and the large Z grating ruler bracket 19 move with the up and down movement of the force control mechanism. Through the relative movement of the large Z grating ruler 18 and the large Z reading head 20, the running distance of the force control mechanism can be accurately fed back;

[0039] When the lower pressing plate 5 at the lower end of the small voice coil motor 21 contacts a hard object and cannot move downward, it will push the lower pressing plate 5 upward in the reverse direction. At this time, the small Z reading head 24 will have a signal change. From the large Z reading head 20, the signal changes until the small Z reading head 24 changes. This distance represents the detection value of the force control mechanism. The design of the small Z grating scale 23 and the small Z reading head 24 can not only be used as a detection function, but also can be used as an alarm device when the Z-direction height is abnormal during monitoring bonding, such as when the chips are stacked, or there are foreign objects above and below the chips, and the bonding head 40 is stuck. After the first detection is completed, the force control mechanism will move in the Z direction according to the detection value. When the chips are stacked, or there are foreign objects above and below the chips, and the bonding head 40 is stuck, the large voice coil motor 2 will still run the displacement of the detection value, but because the height of the object contacted by the lower pressing plate 5 has changed, the feedback signal of the small Z reading head 24 will also deviate from the normal feedback signal, so different alarm outputs can be given. According to the actual situation, the feedback signal value of the small Z reading head 24 will be set to a certain range to determine whether it is a real abnormal situation.

[0040] As a further preferred embodiment, a spring support seat 9 is further provided on the lower end surface of the fixing seat 1 , a balance spring 8 is provided between the mover fixing plate 7 and the spring support seat 9 , and a buffer block 13 is provided on the fixing seat 1 .

[0041] like Figure 1 As shown, the balance spring 8 is used to balance the Z-direction moving mass of the force control mechanism. When the large voice coil motor 2 is not powered, the Z-direction moving part of the force control mechanism can be pushed to a high position to avoid collision between the force control mechanism and other mechanisms, thereby ensuring safety. The lower pressure plate 5 serves as the pressure output execution end of the force control mechanism, and can apply the output force of the force control mechanism to the force-bearing end. The buffer block 13 acts as a buffer when the balance spring 8 pushes the mechanism upward, so as to avoid collision between the large voice coil motor stator 201 and the large voice coil motor mover 202, thereby causing damage to the large voice coil motor 2.

[0042] As a further preferred embodiment, the ball guide rail assembly includes ball guide rail 1 15 and ball guide rail 2 16, the Z-axis mover plate 14 is arranged on the sliders of ball guide rail 1 15 and ball guide rail 2 16, and the Z-axis mover plate 14 cooperates with the large voice coil motor 2 and the mover fixing plate 7 to constitute a Z-axis operation module; a guide rail pre-tightening plate 12 is provided on the side of the Z-axis mover plate 14, and a top screw facing the ball guide rail 2 16 is provided on the guide rail pre-tightening plate 12.

[0043] like Figure 2 As shown, the ball guide rail 1 15 and the ball guide rail 2 16 are measured by a micrometer to ensure the running parallelism of the two guide rails; the ball guide rail 2 16 is pre-tightened by a top screw to improve the rigidity of the guide rail installation, thereby improving the stability of the entire mechanism.

[0044] As a further preferred embodiment, a safety sensor 10 is provided on the fixing seat 1 , and a light shielding sheet 11 is installed on the Z-direction mover plate 14 . Before starting operation, the safety sensor 10 is in a state of being triggered by the light shielding sheet 11 .

[0045] like Figure 2 As shown in the figure, since the main function of the force control mechanism is to provide pressure, the pressed mechanism must be moved to the specified position before the force control mechanism can move downward, otherwise there will be a risk of collision. Therefore, to ensure the safety of the mechanism, before starting to operate, the pressed mechanism needs to be moved to the specified position so that the safety sensor 10 is in a state of being triggered by the light shielding sheet 11. The setting of the safety sensor 10 and the light shielding sheet 11 plays such a protective role.

[0046] As a further preferred embodiment, a heat dissipation assembly is provided on the Z-direction mover plate 14, and the heat dissipation assembly includes a fan bracket 28, a fan mounting seat 27 and a fan 26. The fan bracket 28 is arranged on the Z-direction mover plate 14, the fan mounting seat 27 is arranged on the fan bracket 28, the fan 26 is arranged on the fan mounting seat 27, and the fan 26 is arranged directly opposite the small voice coil motor 21.

[0047] like Figure 3 As shown, the small voice coil motor generates heat when working. The thermal deformation caused by the heat will affect the pressure control accuracy. Therefore, the fan 26 in the heat dissipation module is aimed at the small voice coil motor to blow air, accelerate the air flow around the heat source to dissipate the heat, reduce the thermal deformation of the force control mechanism, and improve the pressure control accuracy.

[0048] As a further preferred embodiment, a limit bracket 6 is provided at the lower end of the leaf spring fixing seat 30, a spring upper pull rod 35 is provided at the lower end of the lower pressure plate 5, a spring lower pull rod 36 is provided at the upper end of the limit bracket 6, a preload spring 34 is provided inside the lower pressure plate 5, and the preload spring 34 is respectively hung on the spring upper pull rod 35 and the spring lower pull rod 36, a limit column 39 located on the inner side of the preload spring 34 is provided on the lower pressure plate 5, a ball head top screw 38 is provided at the upper end of the limit bracket 6, and the upper end of the ball head top screw 38 is arranged to support the limit column 39, and a locking top screw 37 for fixing the ball head top screw 38 is provided on the right side of the limit bracket 6.

[0049] like Figure 5As shown, the setting of the limit bracket 6 can be used to determine the height position of the lower pressure plate 5 and ensure that the flexible hinge is in a balanced state when not working, thereby reducing the stress and deformation inside the flexible hinge; the preload spring 34 can provide an initial preload for the force control mechanism; the height of the lower pressure plate 5 can be adjusted by adjusting the ball head top screw 38 up and down, so that the leaf spring is in a horizontal state without stress when not working, which can effectively ensure the elastic life of the leaf spring; after the height adjustment of the ball head top screw 38 is completed, the locking top screw 37 is used to lock it on the side to ensure that the state of the ball head top screw 38 does not change.

[0050] As a further preferred embodiment, the leaf spring connecting seat 29 and the leaf spring fixing seat 30 are limited by concave and convex openings. Figure 4 As shown, the protrusion of the leaf spring fixing seat 30 is matched and arranged in the groove of the leaf spring connecting seat 29 to avoid abnormalities during assembly or debugging, which may cause excessive shape deformation of the leaf spring and cause damage.

[0051] like Figure 1 to Figure 7 As shown, the pressure correction method and principle of the force control mechanism:

[0052] A bonding head 40 is placed under the lower pressing plate 5 , and a pressure sensor 41 is disposed below the bonding head.

[0053] S1: Initial positioning and height detection: The force control mechanism moves downward, and the lower pressing plate 5 pushes the bonding head 40 to move downward. After the bonding head 40 contacts the pressure sensor 41 (the pressure sensor 41 is fixedly installed and will not change in height displacement), the large voice coil motor 2 continues to drive the mechanism downward;

[0054] S2: Recording the height detection value: Since the pressure sensor 41 does not move, the lower pressure plate 5 will be pushed upward in the opposite direction, and the signal of the small Z reading head 24 changes. The system records the running displacement of the large voice coil motor 2 at this time as the height detection value;

[0055] S3: Preparation for pressure correction: According to the recorded detection height value, adjust the position of the force control mechanism to ensure that the bonding head 40 can accurately press on the pressure sensor 41;

[0056] S4: Real-time pressure feedback and adjustment: The lower pressure plate 5 continues to press the bonding head 40 to press it on the pressure sensor 41. The pressure sensor 41 feeds back the pressure value in real time. The small voice coil motor 21 adjusts the output force by adjusting different current values ​​according to the pressure value fed back by the pressure sensor 41 to achieve the required precise pressure value; (the output pressure of the force control mechanism is mainly composed of the output force of the small voice coil motor 21, the gravity of the mechanism, the elastic force of the flexible hinge and the preload spring 34, and the friction force of the mechanism. Among them, the output force of the voice coil motor 21 and the gravity of the mechanism are a constant force, and the given parameters will not change. The elastic force of the flexible hinge and the preload spring 34 is affected by the displacement change, and the influence is controlled by controlling thermal deformation. The design adopts a flexible leaf spring design with zero friction, so the overall force control accuracy can be effectively improved).

[0057] S5: Completion of pressure correction: When the pressure value fed back by the pressure sensor 41 reaches the set value, the small voice coil motor 21 maintains the current value, stabilizes the pressure, and completes the pressure correction process.

[0058] The preferred specific embodiments of the present invention are described in detail above. It should be understood that a person skilled in the art can make many modifications and changes based on the concept of the present invention without creative work. Therefore, any technical solution that can be obtained by a person skilled in the art through logical analysis, reasoning or limited experiments based on the concept of the present invention on the basis of the prior art should be within the scope of protection determined by the claims.

Claims

1. An external high-speed and high-precision force control mechanism, characterized in that: include: A fixing seat, a power assembly, a pressure assembly and a flexible hinge assembly; The power assembly includes a ball guide assembly and a large voice coil motor, the ball guide assembly is arranged on a fixed seat, a Z-direction mover plate is slidably arranged on the ball guide assembly, the stator fixing plate of the large voice coil motor is connected to the upper end of the fixed seat, and the mover fixing plate of the large voice coil motor is fixedly arranged on the Z-direction mover plate; The pressure assembly includes a small voice coil motor and a lower pressure plate, wherein the upper end of the small voice coil motor is arranged at the upper right end of the Z-direction mover plate, and the lower pressure plate is arranged at the lower end of the small voice coil motor; The flexible hinge assembly includes a leaf spring connecting seat and a leaf spring fixing seat, the right end of the leaf spring connecting seat is connected to the lower middle part of the small voice coil motor, the leaf spring fixing seat is fixed to the Z-direction mover plate, the upper end of the leaf spring connecting seat and the upper end of the leaf spring fixing seat are sequentially fixed downward with a leaf spring pressure block and an upper leaf spring by fastening screws, and the lower end of the leaf spring connecting seat and the lower end of the leaf spring fixing seat are sequentially fixed upward with another group of leaf spring pressure blocks and lower leaf springs by fastening screws; The large voice coil motor stator of the large voice coil motor is arranged on the stator fixing plate, and the large voice coil motor mover of the large voice coil motor is arranged on the mover fixing plate; the small voice coil motor mover of the small voice coil motor is arranged at the upper right end of the Z-direction mover plate, and the small voice coil motor stator of the small voice coil motor is arranged at the upper right end of the leaf spring connecting seat; the stator fixing plate is also connected with a fixing part reinforcement rib, and the fixing part reinforcement rib is connected to the fixing seat.

2. The external high-speed and high-precision force control mechanism according to claim 1, characterized in that: The large voice coil motor is provided with a monitoring mechanism 1, which includes a large Z reading head bracket, a large Z reading head, a large Z grating scale bracket and a large Z grating scale. The large Z reading head bracket is arranged on the stator fixing plate, the large Z reading head is arranged on the large Z reading head bracket, the large Z grating scale bracket is arranged on the Z-axis mover plate, and the large Z grating scale is arranged on the large Z grating scale bracket; the small voice coil motor is provided with a monitoring mechanism 2, which includes a small Z grating scale bracket, a small Z grating scale, a small Z reading head bracket and a small Z reading head. The small Z grating scale bracket is arranged on the leaf spring connecting seat, the small Z grating scale is arranged on the small Z grating scale bracket, the small Z reading head bracket is arranged on the leaf spring fixing seat, and the small Z reading head is arranged on the small Z reading head bracket.

3. The external high-speed and high-precision force control mechanism according to claim 1, characterized in that: A spring support seat is also provided on the lower end surface of the fixing seat, a balance spring is provided between the mover fixing plate and the spring support seat, and a buffer block is provided on the fixing seat.

4. The external high-speed and high-precision force control mechanism according to claim 1, characterized in that: The ball guide rail assembly includes ball guide rail one and ball guide rail two, the Z-direction mover plate is arranged on the sliders of ball guide rail one and ball guide rail two, and the Z-direction mover plate cooperates with the large voice coil motor and the mover fixing plate to form a Z-direction operation module; a guide rail pre-tightening plate is provided on the side of the Z-direction mover plate, and a top screw facing the ball guide rail two is provided on the guide rail pre-tightening plate.

5. The external high-speed and high-precision force control mechanism according to claim 1, characterized in that: A safety sensor is arranged on the fixing seat, and a light shielding sheet is installed on the Z-direction mover plate. Before starting the operation, the safety sensor is in a state of being triggered by the light shielding sheet.

6. The external high-speed and high-precision force control mechanism according to claim 1, characterized in that: A heat dissipation component is provided on the Z-direction mover plate, and the heat dissipation component includes a fan bracket, a fan mounting seat and a fan. The fan bracket is arranged on the Z-direction mover plate, the fan mounting seat is arranged on the fan bracket, the fan is arranged on the fan mounting seat, and the fan is arranged directly opposite the small voice coil motor.

7. The external high-speed and high-precision force control mechanism according to claim 1, characterized in that: A limit bracket is provided at the lower end of the leaf spring fixing seat, a spring upper pull rod is provided at the lower end of the lower pressure plate, a spring lower pull rod is provided at the upper end of the limit bracket, a pre-tensioning spring is provided inside the lower pressure plate, and the pre-tensioning spring is respectively hung on the spring upper pull rod and the spring lower pull rod, a limit column located on the inner side of the pre-tensioning spring is provided on the lower pressure plate, a ball head top screw is provided at the upper end of the limit bracket, and the upper end of the ball head top screw is arranged to support the limit column, and a locking top screw for fixing the ball head top screw is provided on the right side of the limit bracket.

8. The external high-speed and high-precision force control mechanism according to claim 1, characterized in that: The leaf spring connecting seat and the leaf spring fixing seat are limited by the concave and convex openings.

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