Measuring head angle adjusting device

Abstract

The invention belongs to the technical field of optical detection, and particularly discloses a measuring head angle adjusting device which comprises a base, a stand column, a swing part and a measuring head connecting body, a Z-axis mounting seat is mounted on the stand column, a vertically-arranged arc-shaped swing plate is connected to the Z-axis mounting seat, and the swing part can swing along the arc surface of the arc-shaped swing plate; arc-shaped swing grooves are formed in the two sides of the swing part in the direction perpendicular to the arc-shaped swing plate, swing rollers are connected to the two sides of the measuring head connecting body, and the swing rollers on the two sides of the measuring head connecting body are located in the arc-shaped swing grooves in the two sides of the swing part respectively and can swing along the arc-shaped swing grooves; the Z-axis mounting seat is connected with an A-axis rotation driving piece for driving the swinging piece to swing along the arc surface of the arc-shaped swinging plate; and a B-axis rotation driving piece for driving the measuring head connecting body to swing along the arc-shaped swing groove is connected to the swing piece. According to the invention, the focus position and the measuring position of the measuring head are not changed, so that the situation that other shafts are adjusted while the angle is adjusted is avoided.

Description

Technical Field

[0001] The invention relates to the technical field of optical detection, and in particular to a probe angle adjustment device. Background Art

[0002] In the field of optical testing, white light interferometer is a common testing device used to evaluate surface roughness. Affected by the numerical aperture of the interference lens, the detection range of the white light interferometer is very small. Generally, the detection range of a 10x interference lens is only 1 to 2 mm. 2 The field of view of the optical probe can only work within a certain angle in the normal direction of the sample surface, which brings great inconvenience to the surface inspection of spherical, aspherical and free-form surfaces.

[0003] For samples with curved surfaces, the current measurement method is to adjust the sample's posture to align it with the probe's axis. Due to the variety of sample surface shapes, adjusting the posture of one axis often causes the probe's focal position and measurement position to change, resulting in the need to adjust the angle while adjusting other axes. In addition, the depth of field of the interference lens is very small, making it very difficult to adjust the interference fringes to the optimal state.

[0004] In response to the above problems, the Chinese patent document with the announcement number CN107687826A discloses "a method and device for automatically positioning a workpiece to be measured by a white light interferometer". It mainly uses computer software to assist in positioning. However, in actual applications, when determining the coordinate system of the sample, it is still necessary to manually measure 1 to 2 positions to match the three-dimensional model of the sample. This method can only achieve subsequent software-guided alignment and other operations after aligning the three-dimensional model coordinates of the sample with the device coordinates. For batch measurement, the above operations still need to be repeated. In addition, the working depth of field of the interference objective is very small, especially the high-magnification interference objective, such as only 0.56 microns at 100 times, which requires a very high positioning accuracy of the axis system and is difficult to achieve.

[0005] In addition, a solution is proposed in the article "White light interferometric stitching measurement device and method for surface profile of tiny optical parts" disclosed in the Chinese patent document with announcement number CN113340232A. This method also adjusts the posture of the sample to align the axis of the probe. The stacking height of the entire adjustment table is very high, and the size limit of the sample is also relatively large.

[0006] Therefore, the existing white light interferometry alignment adjustment schemes and batch measurement methods have the problems of high axis accuracy requirements, large sample size restrictions, and difficult manual alignment. Summary of the invention

[0007] The present invention provides a probe angle adjustment device, the purpose of which is to keep the focal position and the measuring position of the probe unchanged, so as to avoid the situation where the angle is adjusted while other axes are adjusted.

[0008] The present invention is implemented by the following technical scheme: a probe angle adjustment device, comprising a measuring frame, the measuring frame comprising a base and a column, the column being vertically connected to the base, and further comprising a swinging member and a probe connector for mounting the probe, the column being mounted with a Z-axis mounting seat, the Z-axis mounting seat being connected with a vertically arranged arc-shaped swinging plate, the swinging member being able to swing along the arc surface of the arc-shaped swinging plate;

[0009] Arc-shaped swing grooves are provided on both sides of the swing member in a direction perpendicular to the arc-shaped swing plate, swing rollers are connected to both sides of the probe connector, and the swing rollers on both sides of the probe connector are respectively located in the arc-shaped swing grooves on both sides of the swing member and can swing along the arc-shaped swing grooves;

[0010] The Z-axis mounting seat is connected to an A-axis rotating driving member for driving the swinging member to swing along the arc surface of the arc-shaped swinging plate; the swinging member is connected to a B-axis rotating driving member for driving the probe connector to swing along the arc-shaped swinging groove.

[0011] In the present scheme, the swinging member swings along the arc surface of the arc-shaped swinging plate, and since the probe connector swings along the arc-shaped swinging groove on the swinging member through the swing rollers on both sides, the probe connector has a rotation state of left-right swinging and front-back swinging, and the probe connector will always rotate around the intersection of the two rotation axes of left-right swinging and front-back swinging when swinging back and forth. In this way, the probe focal position and the measuring position on the probe connector will not change, thereby avoiding the situation of adjusting the angle while adjusting other axes.

[0012] Further, the A-axis rotation driving member includes an A-axis motor, an A-axis lead screw and an A-axis slider, the A-axis motor is mounted on the Z-axis mounting seat, the output end of the A-axis motor is coaxially connected to the A-axis lead screw, the A-axis slider is threadedly connected to the A-axis lead screw, and the A-axis slider is horizontally slidably matched with the Z-axis mounting seat;

[0013] One end of the A-axis sliding block is connected to an A-axis driving rod, and one end of the swinging member is provided with a vertically arranged waist-shaped hole, and the A-axis driving rod is inserted into the waist-shaped hole.

[0014] Furthermore, the B-axis rotation drive component includes a B-axis drive plate and a B-axis lifting unit, and the two ends of the B-axis drive plate are respectively hinged to the probe connector and the B-axis lifting unit, and the B-axis lifting unit is used to drive the B-axis drive plate to drive the probe connector to swing along the arc-shaped swing groove.

[0015] Furthermore, the B-axis lifting unit includes a B-axis motor, a B-axis screw and a B-axis slider. The B-axis motor is installed on the swinging member, one end of the B-axis screw is connected to the B-axis motor, the B-axis slider is threadedly connected to the B-axis screw, and the B-axis slider is vertically slidably matched with the swinging member, and one end of the B-axis drive plate is hinged to the B-axis slider.

[0016] Furthermore, a Z-axis slider is vertically slidably fitted on the Z-axis mounting seat, and a Z-axis driving moving member for driving the Z-axis slider to slide along the Z-axis is provided on the Z-axis mounting seat; the arc-shaped swing plate and the A-axis rotation driving member are both mounted on the Z-axis slider.

[0017] Furthermore, the Z-axis slider is detachably connected to an A-axis connecting plate, and the arc-shaped swing plate and the A-axis rotation driving member are both mounted on the A-axis connecting plate.

[0018] Furthermore, a roller is connected to the side of the swinging member facing the arc swinging plate, an arc guide rail is provided on the arc swinging plate, the cross-section of the arc guide rail is V-shaped, a V-shaped groove matching the arc guide rail is provided on the roller, and the roller is in arc sliding cooperation with the arc guide rail.

[0019] Further, the arc-shaped swing plate is a semicircular ring structure, and the arc guide rail comprises a first arc guide rail and a second arc guide rail, and the first arc guide rail and the second arc guide rail are respectively located on the outer side and the inner side of the arc-shaped swing plate;

[0020] The rollers on the swinging member include a first roller and a second roller, the first roller is in arc-shaped sliding cooperation with the first circular arc guide rail, and the second roller is in arc-shaped sliding cooperation with the second circular arc guide rail;

[0021] There are two first rollers and one second roller, and an isosceles triangle structure is formed between the two first rollers and the one second roller.

[0022] Furthermore, the arc-shaped swing grooves on both sides of the swing member include a first arc-shaped swing groove and a second arc-shaped swing groove, and the first arc-shaped swing groove is located above the second arc-shaped swing groove; the swing rollers on both sides of the probe connector include a first swing roller and a second swing roller, and the first swing roller and the second swing roller are respectively located in the first arc-shaped swing groove and the second arc-shaped swing groove.

[0023] Furthermore, two first swing rollers are provided, and one second swing roller is provided, and an isosceles triangle structure is formed between the two first swing rollers and the one second swing roller.

[0024] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0025] In the present invention, the probe is installed on the probe connecting part, and the probe connecting part is installed on the swinging part. The arc-shaped swinging plate and the arc-shaped swinging grooves on the swinging part are respectively arranged in mutually perpendicular directions, so that when the swinging part slides along the arc surface of the arc-shaped swinging plate, it can drive the probe to swing left and right, and the probe connecting part can drive the probe to swing back and forth in the arc-shaped swinging groove of the swinging part. In this way, the angle of the probe can be adjusted. At the same time, the focus and measuring point of the probe are designed at the intersection of two rotation axes. In this way, when the angle of the probe changes, the focus of the probe will always rotate around the intersection of the two rotation axes, and the focus position and the measuring position will not change, thereby avoiding the situation of adjusting other axes while adjusting the angle. The present invention has lower requirements on the accuracy of the axis system, smaller restrictions on the sample size, and simpler manual alignment.

[0026] In addition, in the present invention, a Z-axis slider is vertically slidably cooperated on the Z-axis mounting seat, and an arc-shaped swing plate is installed on the Z-axis slider, so that the Z-axis driving moving part can drive the entire swing part and the probe connecting body on the swing part to move in the Z-axis direction, thereby facilitating the adjustment of the position of the probe in the Z-axis direction. The structure of the arc-shaped swing plate and the arc-shaped swing groove that drive the probe to swing left and right and front and back in the present invention are integrated with the Z-axis slider and stacked horizontally, so that the height space occupied by the entire structure is small. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The drawings described herein are used to provide a further understanding of the embodiments of the present invention, constitute a part of this application, and do not constitute a limitation of the embodiments of the present invention. In the drawings:

[0028] Figure 1 A three-dimensional diagram of an embodiment of a probe angle adjustment device of the present invention;

[0029] Figure 2 It is a front view of an embodiment of a probe angle adjustment device of the present invention;

[0030] Figure 3 A side view of an embodiment of a probe angle adjustment device of the present invention;

[0031] Figure 4 A three-dimensional diagram of a Z-axis mounting seat, a Z-axis slider, an A-axis connecting plate, an arc-shaped swing plate and an A-axis rotating driving member in an embodiment of a probe angle adjustment device of the present invention;

[0032] Figure 5 A three-dimensional diagram of a swinging member, a probe connector and a probe in an embodiment of a probe angle adjustment device of the present invention;

[0033] Figure 6 for Figure 2Sectional view at CC;

[0034] Figure 7 A three-dimensional diagram of a swinging member and a probe connector from another perspective in an embodiment of a probe angle adjustment device of the present invention;

[0035] Figure 8 A top view of a sample placed on an XY moving platform in an embodiment of a probe angle adjustment device of the present invention;

[0036] Fig. 9 This is a flow chart of Example 2 of a probe angle adjustment device of the present invention.

[0037] Marks and corresponding parts names in the attached drawings:

[0038] Base 1, column 101;

[0039] XY moving platform 2, Y axis driving motor 201, X axis driving motor 202;

[0040] Sample 3, probe connector 4, connecting block 401, probe 402;

[0041] B-axis rotation driving member 5, B-axis motor 501, B-axis lead screw 502, B-axis slider 503, B-axis slider guide rod 504;

[0042] Z-axis driving moving part 6, Z-axis motor 601, Z-axis lead screw 602;

[0043] A-axis rotation drive member 7, A-axis motor 701, A-axis lead screw 702, A-axis slider 703, A-axis drive rod 704, linear guide rail 705, motor bracket 706;

[0044] Vibration isolation table 8, Z-axis mounting seat 9, mounting seat guide rod 901, Z-axis slider 902;

[0045] A-axis connecting plate 10, arc-shaped swing plate 11, first arc guide rail 12, second arc guide rail 121;

[0046] Swinging member 13, vertical plate 131, side plate 132, waist-shaped hole 133;

[0047] A first roller 14 and a second roller 15;

[0048] A first arc-shaped swing groove 16 and a first swing roller 161;

[0049] A second arc-shaped swing groove 17 and a second swing roller 171;

[0050] Top plate 18 , bottom plate 19 , B-axis drive plate 20 , and right-angle positioning tooling 21 . DETAILED DESCRIPTION

[0051] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments and drawings. The exemplary embodiments of the present invention and their description are only used to explain the present invention and are not intended to limit the present invention.

[0052] Example 1

[0053] like Figure 1 , Figure 2 and Figure 3 As shown, this embodiment provides a probe angle adjustment device, including a measuring frame, the measuring frame includes a base 1 and a column 101, the column 101 is vertically connected to the base 1, in this embodiment, the column 101 is located on the rear side of the base 1 and is welded or fixed to the base 1 by bolts, and in this embodiment, a vibration isolation table 8 is also provided under the base 1, and the vibration isolation table 8 is an air-floating vibration isolation table.

[0054] A probe angle adjustment device in this embodiment also includes a swinging member 13 and a probe connector 4 for mounting a probe 402. The probe 402 may be a white light interferometer optical probe, a confocal probe, a laser probe, etc. In this embodiment, an optical probe of a white light interferometer is used as an example for description.

[0055] In this embodiment, a Z-axis mounting seat 9 is installed on the column 101, and the Z-axis mounting seat 9 is fixed to the front end of the column 101 by bolts or welding. A vertically arranged arc-shaped swing plate 11 is connected to the Z-axis mounting seat 9, and the swing member 13 can swing along the arc surface of the arc-shaped swing plate 11.

[0056] Arc-shaped swing grooves are provided on both sides of the swing member 13 in a direction perpendicular to the arc-shaped swing plate 11, and swing rollers are connected to both sides of the probe connector 4. The swing rollers on both sides of the probe connector 4 are respectively located in the arc-shaped swing grooves on both sides of the swing member 13 and can swing along the arc-shaped swing grooves.

[0057] The Z-axis mounting seat 9 is connected to an A-axis rotation driving member 7 for driving the swing member 13 to swing along the arc surface of the arc swing plate 11; the swing member 13 is connected to a B-axis rotation driving member 5 for driving the probe connector 4 to swing along the arc swing groove.

[0058] like Figure 1 As shown, in this embodiment, the direction in which the swinging member 13 swings along the arc-shaped swinging plate 11 is the A-axis rotation direction, and the direction in which the probe connector 4 swings along the arc-shaped swinging groove on the swinging member 13 is the B-axis rotation direction; in this embodiment, an XY movable platform 2 is also installed on the base 1, and the XY movable platform 2 can move in the X-axis direction and the Y-axis direction, so that the sample 3 can be driven to move and adjust on the X-axis and the Y-axis.

[0059] In this embodiment, an XY-axis driving motor 201 for driving the XY mobile platform 2 to move along the X-axis direction and a YY-axis driving motor 201 for driving the XY mobile platform 2 to move along the Y-axis direction are installed on the base 1. The manner and structure in which the XY mobile platform 2 moves along the Y-axis and the X-axis can adopt the working platform structure and control principle in a CNC machine tool. The structure and working principle of the XY mobile platform 2 are prior art and will not be described in detail herein.

[0060] Combination Figure 4 As shown, in this embodiment, the Z-axis mounting seat 9 is vertically slidably cooperated with a Z-axis slider 902, and the Z-axis mounting seat 9 is provided with a Z-axis driving movable member 6 for driving the Z-axis slider 902 to slide along the Z-axis. Specifically: in this embodiment, the Z-axis driving movable member 6 includes a Z-axis motor 601 and a Z-axis lead screw 602, and the Z-axis motor 601 is installed on the top of the Z-axis mounting seat 9, and the output end of the Z-axis motor 601 is coaxially connected to the Z-axis lead screw 602 through a coupling, and the Z-axis slider 902 is threadedly connected to the Z-axis lead screw 602.

[0061] In this embodiment, mounting seat guide rods 901 are provided on both sides of the Z-axis screw 602, and the two ends of the mounting seat guide rods 901 are fixedly connected to the top and bottom of the Z-axis mounting seat 9 respectively, and the Z-axis slider 902 is axially slidably matched with the two mounting seat guide rods 901. The mounting seat guide rods 901 limit the Z-axis slider 902 to prevent the Z-axis slider 902 from rotating, so that the Z-axis slider 902 can slide up and down on the Z-axis during the rotation of the Z-axis screw 602, thereby driving the entire structure for adjusting the angle of the probe 402 to move up and down to adapt to samples 3 of different thicknesses.

[0062] The arc swing plate 11 and the A-axis rotation drive member 7 are both mounted on the Z-axis slider 902, so that the probe 402 and the probe connector 4 can be driven to move and adjust on the Z-axis. In this embodiment, the probe 402 can be adjusted in the Z-axis, A-axis and B-axis directions, and the sample 3 placed on the XY mobile platform 2 can be adjusted in the X-axis and Y-axis directions.

[0063] Combination Figure 4 As shown, the Z-axis slider 902 is detachably connected to the A-axis connecting plate 10, and in this embodiment, the A-axis connecting plate 10 is detachably connected to the Z-axis slider 902 by bolts. The arc swing plate 11 and the A-axis rotation drive member 7 are both mounted on the A-axis connecting plate 10, so that it is convenient to install and disassemble the entire adjustment mechanism for adjusting the angle of the probe 402, thereby facilitating replacement or maintenance.

[0064] In this embodiment, the A-axis rotation driving component 7 includes an A-axis motor 701, an A-axis screw 702 and an A-axis slider 703. The A-axis motor 701 is installed on the A-axis connecting plate 10 on the Z-axis mounting seat 9. The output end of the A-axis motor 701 is coaxially connected to the A-axis screw 702 through a coupling. The A-axis slider 703 is threadedly connected to the A-axis screw 702, and the A-axis slider 703 is horizontally slidably matched with the Z-axis mounting seat 9. In this embodiment, a linear guide rail 705 is installed at the front end of the A-axis connecting plate 10 and above the arc-shaped swinging plate 11 along the X-axis direction, and the A-axis slider 703 is slidably matched with the linear guide rail 705.

[0065] An A-axis driving rod 704 is vertically connected to one end of the A-axis slider 703. In this embodiment, the A-axis driving rod 704 is threadedly connected or welded to the front end of the A-axis slider 703. Figure 5 and Figure 6 As shown, a vertical waist-shaped hole 133 is opened at one end of the swinging member 13 , and the A-axis driving rod 704 is inserted into the waist-shaped hole 133 and can move along the length direction of the waist-shaped hole 133 .

[0066] Combination Figure 1 , Figure 2 and Figure 4 As shown, an arc guide rail is provided on the arc swing plate 11, the cross section of the arc guide rail is V-shaped, and a V-shaped groove matching the arc guide rail is provided on the roller, and the roller and the arc guide rail are in arc sliding cooperation.

[0067] In this embodiment, the arc swing plate 11 is a semicircular ring structure, so that the arc swing plate 11 has two arc surfaces, an inner side and an outer side, and the arc guide rail includes a first arc guide rail 12 and a second arc guide rail 121, which are respectively located on the outer side and the inner side of the arc swing plate 11.

[0068] Combination Figure 5 As shown, the rollers on the swing member 13 include a first roller 14 and a second roller 15, the first roller 14 is in arc-shaped sliding cooperation with the first circular arc guide rail 12, and the second roller 15 is in arc-shaped sliding cooperation with the second circular arc guide rail 121;

[0069] There are two first rollers 14 and one second roller 15 , and an isosceles triangle structure is formed between the two first rollers 14 and the one second roller 15 .

[0070] like Figure 5As shown, a roller is connected to the side of the swing member 13 facing the arc-shaped swing plate 11. In this embodiment, the swing member 13 includes a vertical plate 131 and two side plates 132. The vertical plate 131 is located between the two side plates 132 and the two sides of the vertical plate 131 are respectively connected to the two side plates 132. The probe connector 4 is located between the two side plates 132. Arc-shaped swing grooves are provided on the two side plates 132, and waist-shaped holes 133 are provided on the vertical plate 131.

[0071] The arc-shaped swing grooves on both sides of the swing member 13 include a first arc-shaped swing groove 16 and a second arc-shaped swing groove 17, and the first arc-shaped swing groove 16 is located above the second arc-shaped swing groove 17; the swing rollers on both sides of the probe connector 4 include a first swing roller 161 and a second swing roller 171, and the first swing roller 161 and the second swing roller 171 are respectively located in the first arc-shaped swing groove 16 and the second arc-shaped swing groove 17.

[0072] In this embodiment, two first swing rollers 161 are provided, and one second swing roller 171 is provided, and an isosceles triangle structure is formed between the two first swing rollers 161 and the one second swing roller 171 .

[0073] Combination Figure 6 and Figure 7 As shown, the B-axis rotation drive member 5 includes a B-axis drive plate 20 and a B-axis lifting unit. The two ends of the B-axis drive plate 20 are respectively hinged to the probe connector 4 and the B-axis lifting unit; the B-axis lifting unit is used to drive the B-axis drive plate 20 to drive the probe connector 4 to swing along the arc-shaped swing groove.

[0074] In this embodiment, the B-axis lifting unit includes a B-axis motor 501, a B-axis lead screw 502 and a B-axis slider 503. The B-axis motor 501 is installed on the swing member 13. In this embodiment, the top plate 18 and the bottom plate 19 are respectively connected to the upper and lower parts of the two side plates 132. The top plate 18 and the bottom plate 19 are both welded or screwed to the two side plates 132. The B-axis motor 501 is located on the top plate 18, one end of the B-axis lead screw 502 is connected to the B-axis motor 501, and the other end of the B-axis lead screw 502 is rotatably matched with the bottom plate 19. The B-axis slider 503 is threadedly connected to the B-axis lead screw 502, and the B-axis slider 503 is connected to the swing member 13. 3 vertical sliding cooperation, in this embodiment, B-axis slider guide rods 504 are respectively provided on both sides of the B-axis slider 503, and the two ends of the B-axis slider guide rods 504 are respectively fixedly connected to the top plate 18 and the bottom plate 19, and the B-axis slider guide rods 504 all pass through the B-axis slider 503, and the B-axis slider 503 moves vertically along the B-axis slider guide rods 504. One end of the B-axis driving plate 20 is hinged to the B-axis slider 503. Specifically: in this embodiment, a connecting block 401 is fixedly connected to the side of the probe connector 4 facing the B-axis driving plate 20, and the two ends of the B-axis driving plate 20 are respectively hinged to the connecting block 401 and the B-axis slider 503 through a rotating shaft.

[0075] The specific implementation process is as follows:

[0076] like Figure 8 As shown, the aforementioned XY moving platform 2 is an integral XY translation platform. To facilitate multiple measurements, a circular or rectangular sample 3 is placed on the XY moving platform 2 and can be positioned using a right-angled positioning fixture.

[0077] The three V-groove rollers mentioned above cooperate with the first arc guide rail 12 and the second arc guide rail 121 to provide arc guidance. Since the A-axis driving rod 704 on the A-axis slider 703 is placed in the waist-shaped hole 133 of the swinging member 13, when the A-axis motor 701 drives the A-axis screw 702 to rotate and drives the A-axis slider 703 to move left and right along the linear guide rail 705, the A-axis driving rod 704 will drive the entire swinging member 13 to rotate and swing left and right along the arc guide rail on the arc swinging plate 11, thereby driving the probe connector 4 and the probe 402 installed on the swinging member 13 to swing left and right along the A-axis.

[0078] When the B-axis motor 501 is started, the B-axis slider 503 is driven to move up and down along the B-axis lead screw 502 , thereby driving the B-axis driving plate 20 to drive the probe connector 4 to swing back and forth along the B-axis.

[0079] In the present invention, the intersection of the rotation axes of the A-axis and the B-axis must coincide with the focus of the sample 3 of the white light interferometer. The higher the degree of coincidence, the more accurate the mechanism adjustment.

[0080] Example 2

[0081] Combination Fig. 9 As shown, the difference between this embodiment and embodiment 1 is that this embodiment provides an application method of a probe angle adjustment device. In this embodiment, a probe angle adjustment device in embodiment 1 can be combined with computer software to assist in adjusting stripes, including the following steps and measurement method (taking batch measurement of circular lenses as an example):

[0082] a. Turn on the equipment, return to zero, open the measurement software, and warm up the machine for 15 to 20 minutes.

[0083] b. Place the lens on the XY mobile platform, make the outer circle of the lens close to the right-angle positioning fixture, and use other fixtures to fix the lens. The software will use the intersection of the mobile platform surface and the right-angle edge of the right-angle fixture as the origin;

[0084] c. Set the probe safety height.

[0085] d. Enter the XY coordinates of the measuring point in the software (for safety reasons, the Z axis must be moved to a safe height first), click Move to, and the software will move the entered coordinate position to the bottom of the interference objective lens. You can also move it manually to the measurement position.

[0086] e. Input the A-axis and B-axis angles, click Move to, and the software will rotate the probe to the corresponding angle according to the input angle. If you don't know the angle data, you can also manually adjust it to a position roughly perpendicular to the surface of the measurement point. After it is in place, click Record Position, and the software will record the current position for subsequent batch measurements.

[0087] f. Move the Z axis to move the interference objective lens about 2 mm away from the measured surface (applicable to interference objectives within 50 times), set the Z-stop (used for probe collision prevention, after setting, the Z axis cannot move to a height below this position), then manually focus or click auto focus to find the stripes.

[0088] g. Manually adjust the stripes or click Automatically adjust the stripes to move the center of the stripes to the center of the image window.

[0089] h. Set the scanning parameters and click Start Scan. The software will record the coordinates of the current measurement position, the angle of the probe and the Z-stop parameters for subsequent batch measurements.

[0090] i. Complete the measurement of this point.

[0091] j. Measure subsequent measurement points.

[0092] k. Click to add a measurement point and repeat steps b to i.

[0093] l. After the measurement is completed, save the measurement program.

[0094] m. Measure the second sample, place the lens on the XY moving platform, make the outer circle of the lens fit closely against the right-angle positioning fixture, and use other fixtures to fix the lens.

[0095] n. Click to start the measurement program, and the software will automatically start measuring according to the measurement settings recorded last time.

[0096] For safety reasons, the operating software first moves the XY platform, moves the measuring point to the recorded position, and then moves the Z axis to the recorded measuring height. Before the measurement begins, in order to eliminate processing errors, the software will automatically run the autofocus and auto-fringe adjustment programs to ensure the best quality of the interference fringes. After the software completes the measurement of each point, the Z axis will first rise to a safe height, and then move the XY platform to measure the next point, and repeat in sequence until the measurement program is completed.

[0097] It should be noted that the above description of the disclosed embodiments enables professionals and technicians in the field to implement or use the present application. Various modifications to these embodiments will be apparent to professionals and technicians in the field, and the general principles defined herein can be implemented in other embodiments without departing from the scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but should conform to the widest scope consistent with the principles and novel features disclosed herein.

[0098] In the description of the present invention, it should be noted that the terms "first", "second", "third", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0099] In the description of this document, terms such as "up", "down", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "middle", "vertical", "horizontal", "lateral", and "longitudinal" indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only used to illustrate the relative positional relationships between the various components or components, and do not particularly limit the specific installation orientations of the various components or components.

[0100] In the description of this document, some terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to the specific circumstances.

[0101] In the description of this document, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0102] The structures, proportions, sizes, etc. drawn in the drawings in this application are only used to match the contents disclosed in this technical briefing book for technical personnel in this field to understand and read, and are not used to limit the restrictive conditions for the implementation of this application. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in this application without affecting the effects and purposes that can be achieved by this application.

[0103] The terms used in this document are those common terms currently widely used in the art in consideration of the functions of the present disclosure, but these terms may vary according to the intention of a person of ordinary skill in the art, precedents, or new technologies in the art. In addition, specific terms may be selected by the applicant, and in this case, their detailed meanings will be described in the detailed description of the present disclosure. Therefore, the terms used in the document should not be understood as simple names, but rather as an overall description based on the meaning of the terms and the present disclosure.

[0104] Flowcharts or text are used in this document to illustrate the operating steps performed according to the embodiments of the present application. It should be understood that the operating steps in the embodiments of the present application are not necessarily accurately performed in the order of recording. On the contrary, various steps can be processed in reverse order or simultaneously as needed. At the same time, other operations can also be added to these processes, or a certain step or several steps can be removed from these processes.

[0105] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A probe angle adjustment device, comprising a measuring frame, the measuring frame comprising a base and a column, the column being vertically connected to the base, characterized in that: It also includes a swinging member and a probe connector for mounting a probe, the column is mounted with a Z-axis mounting seat, the Z-axis mounting seat is connected with a vertically arranged arc-shaped swinging plate, and the swinging member can swing along the arc surface of the arc-shaped swinging plate; Arc-shaped swing grooves are provided on both sides of the swing member in a direction perpendicular to the arc-shaped swing plate, swing rollers are connected to both sides of the probe connector, and the swing rollers on both sides of the probe connector are respectively located in the arc-shaped swing grooves on both sides of the swing member and can swing along the arc-shaped swing grooves; The Z-axis mounting seat is connected to an A-axis rotating driving member for driving the swinging member to swing along the arc surface of the arc-shaped swinging plate; the swinging member is connected to a B-axis rotating driving member for driving the probe connector to swing along the arc-shaped swinging groove.

2. A probe angle adjustment device according to claim 1, characterized in that: The A-axis rotation driving member comprises an A-axis motor, an A-axis lead screw and an A-axis slider, wherein the A-axis motor is mounted on the Z-axis mounting seat, the output end of the A-axis motor is coaxially connected to the A-axis lead screw, the A-axis slider is threadedly connected to the A-axis lead screw, and the A-axis slider is horizontally slidably matched with the Z-axis mounting seat; One end of the A-axis sliding block is connected to an A-axis driving rod, and one end of the swinging member is provided with a vertically arranged waist-shaped hole, and the A-axis driving rod is inserted into the waist-shaped hole.

3. A probe angle adjustment device according to claim 1, characterized in that: The B-axis rotation driving component includes a B-axis driving plate and a B-axis lifting unit. The two ends of the B-axis driving plate are respectively hinged to the probe connecting body and the B-axis lifting unit. The B-axis lifting unit is used to drive the B-axis driving plate to drive the probe connecting body to swing along the arc-shaped swing groove.

4. A probe angle adjustment device according to claim 3, characterized in that: The B-axis lifting unit includes a B-axis motor, a B-axis screw and a B-axis slider. The B-axis motor is installed on the swinging member, one end of the B-axis screw is connected to the B-axis motor, the B-axis slider is threadedly connected to the B-axis screw, and the B-axis slider is vertically slidably matched with the swinging member, and one end of the B-axis drive plate is hinged to the B-axis slider.

5. A probe angle adjustment device according to any one of claims 1 to 4, characterized in that: The Z-axis mounting seat is vertically slidably matched with a Z-axis slider, and the Z-axis mounting seat is provided with a Z-axis driving moving member for driving the Z-axis slider to slide along the Z-axis; the arc-shaped swing plate and the A-axis rotation driving member are both installed on the Z-axis slider.

6. A probe angle adjustment device according to claim 5, characterized in that: The Z-axis sliding block is detachably connected with an A-axis connecting plate, and the arc-shaped swing plate and the A-axis rotating driving member are both mounted on the A-axis connecting plate.

7. A probe angle adjustment device according to any one of claims 1 to 4, characterized in that: A roller is connected to the side of the swinging member facing the arc swinging plate, an arc guide rail is provided on the arc swinging plate, the cross section of the arc guide rail is V-shaped, a V-shaped groove matching the arc guide rail is provided on the roller, and the roller is in arc sliding cooperation with the arc guide rail.

8. A probe angle adjustment device according to claim 7, characterized in that: The arc-shaped swing plate is a semicircular ring structure, and the arc guide rail comprises a first arc guide rail and a second arc guide rail, wherein the first arc guide rail and the second arc guide rail are respectively located on the outer side and the inner side of the arc-shaped swing plate; The rollers on the swinging member include a first roller and a second roller, the first roller is in arc-shaped sliding cooperation with the first circular arc guide rail, and the second roller is in arc-shaped sliding cooperation with the second circular arc guide rail; There are two first rollers and one second roller, and an isosceles triangle structure is formed between the two first rollers and the one second roller.

9. A probe angle adjustment device according to any one of claims 1 to 4, characterized in that: The arc-shaped swing grooves on both sides of the swing member include a first arc-shaped swing groove and a second arc-shaped swing groove, and the first arc-shaped swing groove is located above the second arc-shaped swing groove; the swing rollers on both sides of the probe connector include a first swing roller and a second swing roller, and the first swing roller and the second swing roller are respectively located in the first arc-shaped swing groove and the second arc-shaped swing groove.

10. A probe angle adjustment device according to claim 9, characterized in that: Two first swing rollers are provided, and one second swing roller is provided, and an isosceles triangle structure is formed between the two first swing rollers and the one second swing roller.

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