A detection device and detection method for precision instrument measurement, control and maintenance

Abstract

The present invention relates to the field of precision instrument detection technology, and specifically discloses a detection device for precision instrument measurement, control and maintenance and a detection method thereof, comprising a support base, a support top frame and a protective cover, and also comprising a detection environment analysis module and a detection accuracy analysis module. By evenly distributing a number of electromagnetic shock absorbers and air springs between the support base and the support top frame, high-frequency vibrations and low-frequency vibrations are effectively suppressed respectively, which can cover a wide range of vibration frequencies, effectively deal with vibration interference of different frequencies, and can also buffer and disperse the vibration energy of precision instruments during the detection process to a certain extent, thereby effectively improving the detection accuracy of precision instruments. By working in conjunction with the detection environment analysis module and the detection accuracy analysis module, accuracy anomalies can be discovered in a timely manner and it can be determined whether calibration or maintenance is required, thereby ensuring the accuracy, reliability and stability of precision instruments during the detection process.

Description

Technical Field

[0001] The present invention relates to the technical field of precision instrument detection, and in particular to a detection device and a detection method for precision instrument measurement, control and maintenance. Background Art

[0002] Precision instruments are widely used in modern science and industry, and their measurement accuracy plays a crucial role in numerous critical processes and scientific research. Whether in semiconductor manufacturing, aerospace engineering, or high-precision metrology laboratories, precision instruments must maintain a high degree of accuracy and reliability. However, precision instruments face numerous challenges during measurement, control, maintenance, and testing. They have stringent requirements for the testing environment, where even minor vibrations, temperature and humidity fluctuations, and external interference can severely impact measurement accuracy. Traditional testing methods often struggle to comprehensively and accurately assess and control these influencing factors, leading to biased and uncertain test results and failing to meet the increasingly demanding performance requirements of precision instruments.

[0003] Some detection devices currently on the market mostly use a single type of shock-absorbing element for shock absorption, which cannot effectively deal with vibration interference in a wide frequency range, causing precision instruments to be easily affected by vibration during testing and produce measurement errors. In terms of instrument positioning and fixing methods, common fixture fixation may cause mechanical damage to precision instruments, especially for instruments with high surface precision or fragile structures, affecting their integrity and measurement accuracy. Moreover, the weight loading process mostly relies on manual operation, which is not only inefficient but also prone to errors due to human factors, such as hand shaking or inaccurate placement. In addition, the temperature and humidity control of the testing environment lacks precision and intelligence, and cannot be dynamically adjusted according to the characteristics of the instrument and actual testing needs, thereby increasing the negative impact of environmental factors on detection accuracy. At the same time, existing detection devices lack a complete detection system, making it difficult to conduct a comprehensive and in-depth analysis and evaluation of the testing environment and instrument accuracy. Potential problems cannot be discovered in a timely manner and effective solutions cannot be provided, which limits the effective measurement, control and maintenance of precision instruments.

[0004] To this end, we proposed a detection device for precision instrument measurement, control and maintenance. Summary of the Invention

[0005] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a detection device and a detection method for precision instrument measurement, control and maintenance, in order to solve the technical defects mentioned above.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: A detection device for precision instrument measurement, control and maintenance, comprising a support base, a support top frame and a protective cover, wherein a support top frame is provided above the support base, and a protective cover is fixedly provided on the top of the support top frame, a rubber connecting pad is fixedly provided on the top of the support base, and a plurality of electromagnetic shock absorbers and air springs are fixedly provided on the top of the rubber connecting pad;

[0007] Several electromagnetic shock absorbers and air springs are evenly distributed on the top of the rubber connection pad, and the tops of the several electromagnetic shock absorbers and air springs are fixedly connected to the bottom of the support frame. A vacuum adsorption disk is fixedly set in the middle of the top of the support frame, and a movable closing plate is also slidably set on the front of the protective cover;

[0008] Weight placement racks are also fixedly provided on both sides of the top of the supporting top frame, an electric slide 1 is fixedly provided on the top of the inside of the protective cover, and a movable frame is slidably provided at the bottom of the electric slide 1, an electric slide 2 is fixedly provided at the bottom of the movable frame, and micro electric cylinders are slidably provided on both sides of the bottom of the electric slide 2, and electric clamps are fixedly provided at the bottom ends of the driving ends of the two micro electric cylinders;

[0009] It also includes a detection environment analysis module and a detection accuracy analysis module;

[0010] A detection environment analysis module is used to process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage to obtain a vibration stability state index of the detection device corresponding to the detection environment, and analyze the stability state of the detection device corresponding to the detection environment based on the vibration stability state index;

[0011] The detection accuracy analysis module is used to analyze the accuracy detection of the precision instrument corresponding to each detection stage and obtain the detection accuracy status of the precision instrument corresponding to each detection stage.

[0012] Furthermore, a temperature and humidity regulator is fixedly installed on the back of the protective cover, and both output ends of the temperature and humidity regulator extend to the inside of the protective cover. An operation panel is also fixedly installed on the top of the protective cover, and the inside of the operation panel is electrically connected to the precision instrument to be measured through a wire.

[0013] Furthermore, support feet are slidingly provided around the bottom of the support base, and adjustment bolts are rotatably provided around the top of the support base. The bottom ends of the four adjustment bolts are respectively connected to the internal threads of the four support feet, and a level sensor is provided inside the support base.

[0014] Furthermore, the method of processing and analyzing the vibration parameters of the detection device at each sampling time point in each detection stage is as follows:

[0015] The vibration frequency and amplitude of the detection device at each sampling time point in each detection stage are monitored and collected in real time by a vibration sensor, and the vibration frequency and amplitude of the detection device at each sampling time point in each detection stage are obtained, which are respectively recorded as ZP i and ZF i, where i = 1, 2, ..., n, i is an integer, i represents the number of each sampling time point, and n represents the total number of sampling time points;

[0016] According to the formula Calculate the vibration intensity index ZQ of the detection device corresponding to each detection stage;

[0017] According to the specific characteristics and usage scenarios of the precision instrument to be tested, the reference vibration intensity index of the testing device corresponding to each testing stage is manually set and recorded as ZQC;

[0018] According to the formula Calculate the vibration stability index ZW of the detection device corresponding to the detection environment, where It is expressed as the average value of the vibration amplitude of the detection device corresponding to each detection stage.

[0019] Furthermore, when the vibration stability index ZW of the detection device corresponding to the detection environment is greater than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; when the vibration stability index ZW of the detection device corresponding to the detection environment is less than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument.

[0020] Furthermore, the accuracy detection and analysis of the precision instrument corresponding to each detection stage is as follows:

[0021] Number the weights of each mass, denoted as Mj, where j = 1, 2, ..., m, where j represents the number of the weights of each mass, and m represents the total number of weights of each mass. Place the weights of each mass on the precision instrument in sequence, and obtain the measurement reading of the precision instrument after each weight placement, denoted as Rj;

[0022] Fit a straight line y=ax+b by the least squares method, where x is the weight and y is the measured reading. According to the formula The linearity index XL of the precision instrument corresponding to each detection stage is calculated, ΔL is expressed as the linearity deviation value of the precision instrument corresponding to each detection stage, and ΔLmax is expressed as the deviation value calculated under the condition of the maximum allowable linearity deviation.

[0023] Furthermore, the weights of each mass are repeatedly placed on the precision instrument for p times, p ≥ 3, and the measurement reading of the precision instrument corresponding to each weight placement is obtained, which is recorded as Rjk, k = 1, 2, ..., p. According to the formula Calculate the repeatability index CR, σ of the precision instrument corresponding to each detection stage Rj It is expressed as the standard deviation of the readings measured by the precision instrument each time the weight is placed. It is expressed as the average value of the measurement readings of the precision instrument after each weight is placed.

[0024] Furthermore, by obtaining the corresponding measurement readings of the weights of each mass on the precision instrument, the difference between the measurement readings and the mass of the weights of each mass is calculated, and the absolute value is taken as the accuracy deviation of the precision instrument corresponding to each detection stage. The accuracy deviations corresponding to the weights of each mass are then summed and divided by the number of weights of each mass tested to obtain the accuracy index of the precision instrument corresponding to each detection stage, which is recorded as ZA;

[0025] According to the formula The detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is calculated, w1, w2 and w3 respectively represent the weight coefficients determined according to the importance of the influence of various indicators on the detection accuracy of the precision instrument, and w1+w2+w3=1.

[0026] Furthermore, the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is compared and analyzed with the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument. If the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is good. Otherwise, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or maintained.

[0027] Furthermore, a detection method for a detection device for precision instrument measurement, control and maintenance includes the following steps:

[0028] Step 1: First, an effective horizontal adjustment system is formed by the support feet that are slidably arranged around the bottom of the support frame and the adjustment bolts that are rotated around the top. By rotating the adjustment bolts, which are connected to the internal threads of the support feet, the extension or retraction length of the support feet is controlled to keep the detection device in a horizontal position;

[0029] Step 2: Process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage through the detection environment analysis module built into the detection device, and obtain the vibration stability index of the detection device corresponding to the detection environment through comprehensive calculation and analysis of the vibration intensity index and vibration amplitude of the detection device corresponding to each detection stage. If the vibration stability index ZW of the detection device corresponding to the detection environment is greater than 1, it indicates that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; if the vibration stability index ZW of the detection device corresponding to the detection environment is less than 1, it indicates that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument;

[0030] Step 3: After determining that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, the precision instrument is placed into the protective cover by sliding the movable closing plate upwards, and the bottom of the precision instrument is adsorbed and positioned using the vacuum adsorption plate on the top of the support frame. The movable closing plate is then reset, and the environmental parameters of the precision instrument during the test are intelligently controlled by the temperature and humidity regulator to ensure that the precision instrument is in a reasonable detection environment state inside the protective cover;

[0031] Step 4: By setting up weight placement racks on both sides of the top of the support frame, a special placement position is provided for the weights. When performing precision detection operations on precision instruments, combined with the structural design of the electric slide 1, electric slide 2 and electric grippers, the electric grippers at the bottom of the two micro-electric cylinder drive ends can realize automatic grasping and releasing of the weights;

[0032] Step 5. Utilize the accuracy detection analysis of the precision instrument corresponding to each detection stage, by placing weights of various masses on the precision instrument in turn, obtaining the measurement reading of the precision instrument after each weight is placed, and repeatedly placing weights of various masses on the precision instrument, obtaining the measurement reading of the precision instrument after each weight is placed, and obtain the detection accuracy coefficient of the precision instrument corresponding to each detection stage after comprehensive calculation and analysis. Compare and analyze the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage with the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument. If the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is good. Otherwise, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or repaired.

[0033] The beneficial effects achieved by the present invention using the above structure are as follows:

[0034] 1. When conducting measurement, control, maintenance and inspection of mechanical precision instruments, the precision instrument is placed inside the protective cover by sliding the movable closing plate upwards, and the bottom of the precision instrument is adsorbed and positioned using the vacuum adsorption plate on the top of the support frame to ensure the stability of the precision instrument during the inspection process. In addition, a number of electromagnetic shock absorbers and air springs evenly distributed between the support base and the support top frame can effectively suppress high-frequency vibrations and low-frequency vibrations respectively, covering a wide range of vibration frequencies, effectively responding to vibration interference of different frequencies, and also buffering and dispersing the vibration energy of the precision instrument during the inspection process to a certain extent, thereby effectively improving the inspection accuracy of the precision instrument.

[0035] 2. By setting up weight placement racks on both sides of the top of the support frame, a special placement position is provided for the weights. When performing operations such as precision testing of precision instruments, combined with the structural design of electric slide 1, electric slide 2 and electric clamps, the electric clamps at the bottom of the two micro-electric cylinder drive ends can realize automatic grasping and release of the weights. During the testing process, this function can accurately load the weights onto the precision instrument according to the preset program or the instructions of the tester, avoiding the errors that may be caused by manual placement of weights.

[0036] 3. An effective horizontal adjustment system is formed by the support feet that slide around the bottom of the support frame and the adjustment bolts that rotate around the top. By rotating the adjusting bolts, the extension or retraction length of the support feet can be accurately controlled due to their internal threaded connection with the support feet. This design allows the device to be easily adjusted to a horizontal state when placed on uneven ground. When subjected to external vibration or interference, the stable support structure can reduce the shaking of the device and provide a relatively stable detection environment for precision instruments. This is of great significance for preventing precision instruments from being damaged or causing measurement errors due to shaking. In particular, when used in conjunction with shock-absorbing components such as electromagnetic shock absorbers and air springs in the device, the shock-absorbing effect can be better exerted, further improving the stability and reliability of precision instrument detection.

[0037] 4. In the present invention, the detection environment analysis module and the detection accuracy analysis module work together. The detection environment analysis module uses a vibration sensor to monitor and collect the vibration frequency and amplitude at the sampling time points of each detection stage, and calculates the vibration intensity index and the stable state index through the formula, so as to accurately judge the vibration stability of the detection environment, and can effectively distinguish whether the impact of vibration on the detection accuracy of precision instruments is within an acceptable range, provide a scientific basis for whether to change the detection environment, and ensure the suitability of the detection environment; the detection accuracy analysis module uses weights of different masses and multiple placement operations to calculate the linearity index, repeatability index and accuracy index respectively, and comprehensively obtain the detection accuracy coefficient, which can be compared with the threshold to accurately evaluate the accuracy status of the precision instrument in each detection stage, so as to timely discover accuracy anomalies and determine whether calibration or maintenance is needed, ensuring the accuracy, reliability and stability of the precision instrument during the detection process, and overall improving the comprehensiveness, accuracy and effectiveness of the detection device for precision instrument measurement, control, maintenance and detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0039] Figure 1 This is a schematic diagram of the structure of a detection device for measuring, controlling and maintaining a precision instrument according to an embodiment of the present invention;

[0040] Figure 2 A schematic diagram of the supporting chassis, protective cover and movable closing plate structure according to an embodiment of the present invention;

[0041] Figure 3 A schematic diagram of the internal structure of the protective cover according to an embodiment of the present invention;

[0042] Figure 4 A schematic diagram of a support foot and an adjusting bolt structure according to an embodiment of the present invention;

[0043] Figure 5 This is a principle block diagram of the detection environment analysis module and the detection accuracy analysis module according to an embodiment of the present invention.

[0044] In the figure, 1. Support base; 2. Rubber connecting pad; 3. Electromagnetic shock absorber; 4. Air spring; 5. Support top frame; 6. Protective cover; 7. Movable closing plate; 8. Vacuum adsorption plate; 9. Weight placement rack; 10. Electric slide 1; 11. Movable frame; 12. Electric slide 2; 13. Micro electric cylinder; 14. Electric gripper; 15. Temperature and humidity regulator; 16. Operation panel; 17. Support foot; 18. Adjustment bolt. DETAILED DESCRIPTION

[0045] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0046] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0047] Example 1:

[0048] See also Figures 1 to 4 As shown, a detection device for measuring and controlling maintenance of precision instruments includes a supporting base frame 1, a supporting top frame 5 and a protective cover 6. The supporting top frame 5 is arranged above the supporting base frame 1, and the top of the supporting top frame 5 is also fixedly provided with a protective cover 6. The top of the supporting base frame 1 is fixedly provided with a rubber connecting pad 2, and the top of the rubber connecting pad 2 is fixedly provided with a plurality of electromagnetic shock absorbers 3 and air springs 4. The rubber connecting pad 2 arranged on the top of the supporting base frame 1 also plays an auxiliary shock-absorbing role. The rubber material itself has good elasticity and damping properties, which can further disperse and absorb vibration energy. When the vibration is transmitted from the supporting base frame 1, the rubber connecting pad 2 can consume part of the energy in the initial stage of vibration transmission, thereby reducing the burden on the subsequent electromagnetic shock absorber 3 and the air spring 4, and also enhancing the stability of the entire shock absorption system.

[0049] Several electromagnetic shock absorbers 3 and air springs 4 are evenly distributed on the top of the rubber connection pad 2, and the tops of several electromagnetic shock absorbers 3 and air springs 4 are fixedly connected to the bottom of the support frame 5. A vacuum adsorption disk 8 is fixedly provided in the middle of the top of the support frame 5. The vacuum adsorption disk 8 in the middle of the top of the support frame 5 is used to adsorb the bottom of the precision instrument. During the measurement, control, maintenance and inspection of mechanical precision instruments, this adsorption method can provide stable positioning for the instrument. Compared with the traditional fixture fixing method, the vacuum adsorption disk 8 will not cause mechanical extrusion and damage to the instrument, especially for some precision instruments with high surface accuracy requirements or relatively fragile structures, it can better ensure their integrity. At the same time, the vacuum adsorption force can be evenly distributed on the bottom of the instrument, ensuring that the instrument will not be displaced due to slight external force interference during the inspection process, thereby improving the accuracy and reliability of the inspection.

[0050] The front of the protective cover 6 is also slidably provided with a movable closing plate 7. The protective cover 6 fixed on the top of the supporting top frame 5 can provide a relatively closed detection environment for the precision instrument. During the detection process, the protective cover 6 can prevent external dust, debris and other pollutants from entering, thereby avoiding damage to the precision instrument. For example, in a dusty industrial environment or outdoor detection scene, the protective cover 6 can effectively isolate dust and prevent it from entering the instrument and affecting the accuracy and normal operation of the instrument. The movable closing plate 7 slidingly arranged on the front of the protective cover 6 facilitates the placement and removal of the precision instrument while ensuring the protective performance. When the instrument needs to be placed in the protective cover 6, the movable closing plate 7 can be slid upwards. The operation is simple and quick. This design can meet the protection requirements without causing inconvenience to the detection work due to the existence of the protective structure.

[0051] It should be noted that when conducting measurement, control, maintenance and inspection of mechanical precision instruments, the movable closing plate 7 is slid upward to place the precision instrument inside the protective cover 6, and the vacuum adsorption disk 8 on the top of the support frame 5 is used to adsorb and position the bottom of the precision instrument to ensure the stability of the precision instrument during the inspection process. In addition, a number of electromagnetic shock absorbers 3 and air springs 4 are evenly distributed between the support base 1 and the support top frame 5 to effectively suppress high-frequency vibrations and low-frequency vibrations respectively, which can cover a wider vibration frequency range, effectively deal with vibration interference of different frequencies, and can also buffer and disperse the vibration energy of the precision instrument during the inspection process to a certain extent, thereby effectively improving the inspection accuracy of the precision instrument.

[0052] Furthermore, weight placement racks 9 are fixedly provided on both sides of the top of the supporting top frame 5, an electric slide 10 is fixedly provided on the top of the inside of the protective cover 6, and a movable frame 11 is slidably provided at the bottom of the electric slide 10, an electric slide 2 12 is fixedly provided at the bottom of the movable frame 11, and micro electric cylinders 13 are slidably provided on both sides of the bottom of the electric slide 2 12, and electric clamps 14 are fixedly provided at the bottom ends of the driving ends of the two micro electric cylinders 13;

[0053] It should be noted that by arranging weight placement racks 9 on both sides of the top of the support frame 5, a special placement position is provided for the weights. When performing operations such as precision testing of precision instruments such as electronic balances, combined with the structural design of electric slide 10, electric slide 2 12 and electric clamp 14, the electric clamp 14 at the bottom of the driving end of two micro-electric cylinders 13 can realize automatic grasping and release of the weights. During the testing process, this function can accurately load the weights onto the precision instrument according to the preset program or the instructions of the tester, avoiding the errors that may be caused by manual placement of weights. For example, manual placement of weights may affect the test results due to hand shaking or inaccurate placement, while the electric clamp 14 can operate in a stable and precise manner to ensure that the position and force of each weight loading are consistent, thereby improving the accuracy and repeatability of the test. This automated operation method can also reduce the workload of manual operation, especially in complex test processes that require a large amount of weight loading and unloading, which can significantly improve the detection efficiency and the detection accuracy of precision instruments.

[0054] Furthermore, a temperature and humidity regulator 15 is fixedly provided on the back of the protective cover 6, and both output ends of the temperature and humidity regulator 15 extend to the interior of the protective cover 6. An operation panel 16 is also fixedly provided on the top of the protective cover 6, and the interior of the operation panel 16 is electrically connected to the precision instrument to be measured through a wire; the environmental parameters of the precision instrument during the test are intelligently regulated by the temperature and humidity regulator 15 to ensure that the precision instrument is in a reasonable detection environment state inside the protective cover 6, thereby reducing the influence of environmental parameters on the detection accuracy of the precision instrument.

[0055] Furthermore, support legs 17 are slidably provided around the bottom of the support base 1, and adjusting bolts 18 are rotatably provided around the top of the support base 1. The bottom ends of the four adjusting bolts 18 are respectively connected to the internal threads of the four support legs 17, and a level sensor is provided inside the support base 1.

[0056] It should be noted that an effective leveling system is formed by the support legs 17 slidingly arranged around the bottom of the support base 1 and the adjusting bolts 18 rotatably arranged around the top. By rotating the adjusting bolts 18, since they are connected to the internal threads of the support legs 17, the extension or retraction length of the support legs 17 can be precisely controlled. This design allows the device to be easily adjusted to a horizontal state when placed on an uneven ground. When subjected to external vibration or interference, the stable support structure can reduce the shaking of the device and provide a relatively stable detection environment for precision instruments. This is of great significance for preventing precision instruments from being damaged or causing measurement errors due to shaking. In particular, when used in conjunction with shock-absorbing components such as the electromagnetic shock absorber 3 and the air spring 4 in the device, the shock-absorbing effect can be better exerted, further improving the stability and reliability of precision instrument detection. For example, in actual use environments such as laboratories or industrial sites, it is often difficult to ensure that the ground is absolutely flat. Through this fine leveling adjustment, the precision instrument is ensured to be in a horizontal position during the detection process. For mechanical precision instruments that require high-precision horizontal placement, such as high-precision electronic balances, this is an important factor in ensuring their measurement accuracy.

[0057] Example 2:

[0058] See also Figure 5 As shown, specifically, this embodiment also proposes a detection system for publicly explaining the internal settings of the detection device in Example 1, including a detection environment analysis module and a detection accuracy analysis module;

[0059] A detection environment analysis module is used to process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage to obtain a vibration stability state index of the detection device corresponding to the detection environment, and analyze the stability state of the detection device corresponding to the detection environment based on the vibration stability state index;

[0060] The vibration frequency and amplitude of the detection device at each sampling time point in each detection stage are monitored and collected in real time by a vibration sensor, and the vibration frequency and amplitude of the detection device at each sampling time point in each detection stage are obtained, which are respectively recorded as ZP i and ZF i, where i = 1, 2, ..., n, i is an integer, i represents the number of each sampling time point, and n represents the total number of sampling time points;

[0061] According to the formula Calculate the vibration intensity index ZQ of the detection device corresponding to each detection stage;

[0062] According to the specific characteristics and usage scenarios of the precision instrument to be tested, the reference vibration intensity index of the testing device corresponding to each testing stage is manually set and recorded as ZQC;

[0063] According to the formula Calculate the vibration stability index ZW of the detection device corresponding to the detection environment, where It is expressed as the average value of the vibration amplitude of the detection device corresponding to each detection stage;

[0064] When the vibration stability index ZW of the detection device corresponding to the detection environment is greater than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; when the vibration stability index ZW of the detection device corresponding to the detection environment is less than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument.

[0065] The detection accuracy analysis module is used to analyze the accuracy of the precision instrument corresponding to each detection stage and obtain the detection accuracy status of the precision instrument corresponding to each detection stage;

[0066] Number the weights of each mass, denoted as Mj, where j = 1, 2, ..., m, where j represents the number of the weights of each mass, and m represents the total number of weights of each mass. Place the weights of each mass on the precision instrument in sequence, and obtain the measurement reading of the precision instrument after each weight placement, denoted as Rj;

[0067] Fit a straight line y=ax+b by the least squares method, where x is the weight and y is the measured reading. According to the formula Calculate the linearity index XL of the precision instrument corresponding to each detection stage, ΔL represents the linearity deviation value of the precision instrument corresponding to each detection stage, and ΔLmax represents the deviation value calculated under the condition of the maximum allowable linearity deviation;

[0068] Repeat placing weights of various masses on the precision instrument for p times, p ≥ 3, and obtain the measurement reading of the precision instrument after each weight placement, recorded as Rjk, k = 1, 2, ..., p, according to the formula Calculate the repeatability index CR, σ of the precision instrument corresponding to each detection stage Rj It is expressed as the standard deviation of the readings measured by the precision instrument each time the weight is placed. It is expressed as the average value of the readings measured by the precision instrument after each weight is placed;

[0069] By obtaining the corresponding measurement readings of weights of various masses on the precision instrument, the difference between the measurement readings and the mass of each mass weight is calculated, and the absolute value is taken as the accuracy deviation of the precision instrument corresponding to each detection stage. Then, the accuracy deviation corresponding to each mass weight is summed and divided by the number of weights of each mass tested to obtain the accuracy index of the precision instrument corresponding to each detection stage, which is recorded as ZA;

[0070] According to the formula Calculate the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage, w1, w2 and w3 represent the weight coefficients determined according to the importance of each indicator on the detection accuracy of the precision instrument, and w1+w2+w3=1;

[0071] The detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is compared and analyzed with the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument. If the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is good. Otherwise, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or repaired.

[0072] In a specific embodiment, the present invention cooperates with the detection environment analysis module and the detection accuracy analysis module. The detection environment analysis module monitors and collects the vibration frequency and amplitude at the sampling time points of each detection stage with the help of a vibration sensor, and calculates the vibration intensity index and the stability state index through the formula, so as to accurately judge the vibration stability of the detection environment, and can effectively distinguish whether the impact of vibration on the detection accuracy of precision instruments is within an acceptable range, provide a scientific basis for whether to change the detection environment, and ensure the suitability of the detection environment; the detection accuracy analysis module uses different mass weights and multiple placement operations to calculate the linearity index, repeatability index and accuracy index respectively, and comprehensively obtains the detection accuracy coefficient, which can be compared with the threshold to accurately evaluate the accuracy status of the precision instrument in each detection stage, so as to timely detect accuracy anomalies and determine whether calibration or maintenance is needed, thereby ensuring the accuracy, reliability and stability of the precision instrument during the detection process, and overall improving the comprehensiveness, accuracy and effectiveness of the detection device for precision instrument measurement, control, maintenance and detection.

[0073] Example 3:

[0074] Specifically, this embodiment also discloses a detection method for a detection device for precision instrument measurement, control and maintenance, comprising the following steps:

[0075] Step 1: First, an effective horizontal adjustment system is formed by the support legs 17 that are slidably arranged around the bottom of the support frame 1 and the adjustment bolts 18 that are rotatably arranged around the top. By rotating the adjustment bolts 18, which are threadedly connected to the inner threads of the support legs 17, the extension or retraction length of the support legs 17 is controlled to keep the detection device in a horizontal position.

[0076] Step 2: Process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage through the detection environment analysis module built into the detection device, and obtain the vibration stability index of the detection device corresponding to the detection environment through comprehensive calculation and analysis of the vibration intensity index and vibration amplitude of the detection device corresponding to each detection stage. If the vibration stability index ZW of the detection device corresponding to the detection environment is greater than 1, it indicates that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; if the vibration stability index ZW of the detection device corresponding to the detection environment is less than 1, it indicates that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument;

[0077] Step 3: After determining that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, the precision instrument is placed into the interior of the protective cover 6 by sliding the movable closing plate 7 upwards, and the bottom of the precision instrument is adsorbed and positioned using the vacuum adsorption disk 8 on the top of the supporting top frame 5. The movable closing plate 7 is then reset, and the environmental parameters of the precision instrument during the test are intelligently regulated by the temperature and humidity regulator 15, so that the precision instrument is in a reasonable detection environment state inside the protective cover 6;

[0078] Step 4: By arranging weight placement racks 9 on both sides of the top of the support frame 5, a special placement position is provided for the weights. When performing precision detection operations on precision instruments, combined with the structural design of the electric slide 10, the electric slide 2 12 and the electric clamp 14, the electric clamp 14 at the bottom end of the two micro-electric cylinders 13 is used to automatically grasp and release the weights;

[0079] Step 5. Utilize the accuracy detection analysis of the precision instrument corresponding to each detection stage, by placing weights of various masses on the precision instrument in turn, obtaining the measurement reading of the precision instrument after each weight is placed, and repeatedly placing weights of various masses on the precision instrument, obtaining the measurement reading of the precision instrument after each weight is placed, and obtain the detection accuracy coefficient of the precision instrument corresponding to each detection stage after comprehensive calculation and analysis. Compare and analyze the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage with the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument. If the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is good. Otherwise, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or repaired.

[0080] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0081] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0082] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, from all points of view, the embodiments should be regarded as illustrative and non-restrictive. The scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes that fall within the meaning and range of equivalents of the claims are included in the present invention. Any reference signs in the claims should not be construed as limiting the claim to which they relate.

[0083] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A detection device for precision instrument measurement, control and maintenance, characterized in that: The invention comprises a supporting base frame (1), a supporting top frame (5) and a protective cover (6); a supporting top frame (5) is arranged above the supporting base frame (1), and a protective cover (6) is fixedly arranged on the top of the supporting top frame (5); a rubber connecting pad (2) is fixedly arranged on the top of the supporting base frame (1), and a plurality of electromagnetic shock absorbers (3) and air springs (4) are fixedly arranged on the top of the rubber connecting pad (2); A plurality of electromagnetic shock absorbers (3) and air springs (4) are evenly distributed on the top of the rubber connection pad (2), and the tops of the plurality of electromagnetic shock absorbers (3) and air springs (4) are fixedly connected to the bottom of the support top frame (5), a vacuum adsorption disk (8) is fixedly provided in the middle of the top of the support top frame (5), and a movable closing plate (7) is also slidably provided on the front of the protective cover (6); The two sides of the top of the supporting top frame (5) are also fixedly provided with weight placement racks (9), the top of the inside of the protective cover (6) is fixedly provided with an electric slide (10), and the bottom of the electric slide (10) is slidably provided with a movable frame (11), the bottom of the movable frame (11) is fixedly provided with an electric slide (12), and both sides of the bottom of the electric slide (12) are slidably provided with micro-electric cylinders (13), and the bottom ends of the driving ends of the two micro-electric cylinders (13) are fixedly provided with electric clamps (14); It also includes a detection environment analysis module and a detection accuracy analysis module; A detection environment analysis module is used to process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage to obtain a vibration stability state index of the detection device corresponding to the detection environment, and analyze the stability state of the detection device corresponding to the detection environment based on the vibration stability state index; The detection accuracy analysis module is used to analyze the accuracy detection of the precision instrument corresponding to each detection stage and obtain the detection accuracy status of the precision instrument corresponding to each detection stage.

2. A detection device for measuring, controlling and maintaining a precision instrument according to claim 1, characterized in that: A temperature and humidity regulator (15) is fixedly provided on the back of the protective cover (6), and both output ends of the temperature and humidity regulator (15) extend into the interior of the protective cover (6). An operation panel (16) is fixedly provided on the top of the protective cover (6), and the interior of the operation panel (16) is electrically connected to a precision instrument to be measured via a wire.

3. A detection device for measuring, controlling and maintaining a precision instrument according to claim 2, characterized in that: Support legs (17) are slidably provided around the bottom of the support base (1), and adjusting bolts (18) are rotatably provided around the top of the support base (1), the bottom ends of the four adjusting bolts (18) are respectively connected to the internal threads of the four support legs (17), and a level sensor is provided inside the support base (1).

4. A detection device for measuring, controlling and maintaining a precision instrument according to claim 3, characterized in that: The method for processing and analyzing the vibration parameters of the detection device at each sampling time point in each detection stage is as follows: The vibration frequency and amplitude of the detection device at each sampling time point in each detection stage are monitored and collected in real time by a vibration sensor, and the vibration frequency and amplitude of the detection device at each sampling time point in each detection stage are obtained, which are respectively recorded as ZPi and ZFi, where i = 1, 2, ..., n, i is an integer, i represents the number of each sampling time point, and n represents the total number of sampling time points; According to the formula Calculate the vibration intensity index ZQ of the detection device corresponding to each detection stage; According to the specific characteristics and usage scenarios of the precision instrument to be tested, the reference vibration intensity index of the testing device corresponding to each testing stage is manually set and recorded as ZQC; According to the formula Calculate the vibration stability index ZW of the detection device corresponding to the detection environment, where It is expressed as the average value of the vibration amplitude of the detection device corresponding to each detection stage.

5. A detection device for measuring, controlling and maintaining a precision instrument according to claim 4, characterized in that: When the vibration stability index ZW of the detection device corresponding to the detection environment is greater than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; when the vibration stability index ZW of the detection device corresponding to the detection environment is less than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument.

6. A detection device for measuring, controlling and maintaining a precision instrument according to claim 5, characterized in that: The method of accuracy detection and analysis of precision instruments corresponding to each detection stage is as follows: Number the weights of each mass, denoted as Mj, where j = 1, 2, ..., m, where j represents the number of the weights of each mass, and m represents the total number of weights of each mass. Place the weights of each mass on the precision instrument in sequence, and obtain the measurement reading of the precision instrument after each weight placement, denoted as Rj; Fit a straight line y=ax+b by the least squares method, where x is the weight and y is the measured reading. According to the formula The linearity index XL of the precision instrument corresponding to each detection stage is calculated, ΔL is expressed as the linearity deviation value of the precision instrument corresponding to each detection stage, and ΔLmax is expressed as the deviation value calculated under the condition of the maximum allowable linearity deviation.

7. A detection device for measuring, controlling and maintaining a precision instrument according to claim 6, characterized in that: Repeat placing weights of various masses on the precision instrument for p times, p ≥ 3, and obtain the measurement reading of the precision instrument after each weight placement, recorded as Rjk, k = 1, 2, ..., p, according to the formula Calculate the repeatability index CR, σ of the precision instrument corresponding to each detection stage Rj It is expressed as the standard deviation of the readings measured by the precision instrument each time the weight is placed. It is expressed as the average value of the measurement readings of the precision instrument after each weight is placed.

8. The detection device for measuring, controlling and maintaining a precision instrument according to claim 7, characterized in that: By obtaining the corresponding measurement readings of weights of various masses on the precision instrument, the difference between the measurement readings and the mass of each mass weight is calculated, and the absolute value is taken as the accuracy deviation of the precision instrument corresponding to each detection stage. Then, the accuracy deviation corresponding to each mass weight is summed and divided by the number of weights of each mass tested to obtain the accuracy index of the precision instrument corresponding to each detection stage, which is recorded as ZA; According to the formula The detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is calculated, w1, w2 and w3 respectively represent the weight coefficients determined according to the importance of the influence of various indicators on the detection accuracy of the precision instrument, and w1+w2+w3=1.

9. The detection device for measuring, controlling and maintaining a precision instrument according to claim 8, characterized in that: The detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is compared and analyzed with the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument. If the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is good. Otherwise, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or repaired.

10. A detection method based on the detection device for precision instrument measurement, control and maintenance according to claim 9, characterized in that: The following steps are involved: Step 1: First, an effective horizontal adjustment system is formed by sliding support legs (17) arranged around the bottom of the support base (1) and rotating adjustment bolts (18) arranged around the top. By rotating the adjustment bolts (18), the extension or retraction length of the support legs (17) is controlled due to the internal thread connection between the adjustment bolts (18) and the support legs (17), so that the detection device is placed in a horizontal state; Step 2: Process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage through the detection environment analysis module built into the detection device, and obtain the vibration stability index of the detection device corresponding to the detection environment through comprehensive calculation and analysis of the vibration intensity index and vibration amplitude of the detection device corresponding to each detection stage. If the vibration stability index ZW of the detection device corresponding to the detection environment is greater than 1, it indicates that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; if the vibration stability index ZW of the detection device corresponding to the detection environment is less than 1, it indicates that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument; Step 3: After determining that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, the precision instrument is placed inside the protective cover (6) by sliding the movable closing plate (7) upwards, and the bottom of the precision instrument is adsorbed and positioned using the vacuum adsorption plate (8) on the top of the supporting top frame (5), and then the movable closing plate (7) is reset. The environmental parameters of the precision instrument during the test are intelligently regulated by the temperature and humidity regulator (15), so that the precision instrument is in a reasonable detection environment state inside the protective cover (6); Step 4: By arranging weight placement racks (9) on both sides of the top of the supporting top frame (5), a special placement position is provided for the weights. When performing precision detection operations on precision instruments, the electric slide 1 (10), the electric slide 2 (12) and the electric clamp (14) are combined with the structural design, and the electric clamp (14) at the bottom end of the driving end of the two micro electric cylinders (13) can realize automatic grasping and releasing of the weights; Step 5. Utilize the accuracy detection analysis of the precision instrument corresponding to each detection stage, by placing weights of various masses on the precision instrument in turn, obtaining the measurement reading of the precision instrument after each weight is placed, and repeatedly placing weights of various masses on the precision instrument, obtaining the measurement reading of the precision instrument after each weight is placed, and obtain the detection accuracy coefficient of the precision instrument corresponding to each detection stage after comprehensive calculation and analysis. Compare and analyze the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage with the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument. If the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is good. Otherwise, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or repaired.

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