An atomizing gas pressure control device

Abstract

The application relates to the technical field of ion source atomization gas pressure control, in particular to an atomization gas pressure control device, which comprises an electric pressure regulating valve, the back surface of the electric pressure regulating valve is fixedly connected with a single-chip microcomputer controller, both sides of the top of the electric pressure regulating valve are provided with mounting mechanisms, and a groove body is arranged in the middle of the top of the electric pressure regulating valve. The filtering mechanism can realize impurity filtering and automatic cleaning, guarantees atomization gas quality and equipment operation efficiency, the mounting mechanism simplifies the component disassembly and assembly process, improves maintenance convenience, and the two work together to provide a comprehensive and reliable solution for the ion source equipment. Precise pressure regulation, efficient filtering and cleaning, and convenient installation and maintenance make the device have important value in actual application, can be widely applied to the related fields, promote the development and application of ion source equipment technology, reduce equipment failure and maintenance cost, and improve production efficiency and quality.

Description

Technical Field

[0001] This application relates to the field of ion source atomizing gas pressure control technology, and in particular to an atomizing gas pressure control device. Background Technology

[0002] Ion source nebulizer gas pressure control refers to the precise adjustment of the gas pressure used to nebulize the sample in an ion source system. The ion source is a key component of instruments such as mass spectrometry, and its function is to convert the sample into gaseous ions. The nebulizer gas plays a crucial role in this process. By controlling the nebulizer gas pressure, the nebulization effect of the sample can be adjusted. For example, in an electrospray ionization source, the liquid sample is ejected from the nozzle, and the nebulizer gas flows around the nozzle. A suitable nebulizer gas pressure can make the sample form uniformly sized tiny droplets. These droplets are easier to ionize. If the pressure is not appropriate, droplets that are too large or too small will affect the ionization efficiency, and thus affect the accuracy and sensitivity of the detection.

[0003] Currently, the working principle of pressure regulating valves is well-suited to the requirements of nebulized gas pressure control. Pressure regulating valves can adjust the flow rate and pressure of gas according to a set pressure value. Their internal structure typically includes a valve, valve seat, valve core, and regulating device. When adjusting the nebulized gas pressure, the valve opening is changed by rotating the valve knob or receiving an external control signal. To increase pressure, the valve opening is decreased, increasing the resistance of the gas in the pipeline, thereby increasing the pressure. Conversely, to decrease pressure, the valve opening is increased, allowing the gas to pass through more smoothly, and the pressure decreases accordingly. This adjustment method can precisely control the pressure of the nebulized gas, ensuring that it enters the ion source at a suitable pressure to meet the requirements of sample nebulization and guaranteeing the efficiency and stability of the ionization process. Currently, most nebulized gas pressure control methods employ pressure regulating valves in conjunction with pressure sensors for flexible pressure control.

[0004] Currently available pressure regulating valves have certain defects during application. With the increase of usage time, the atomized gas may contain impurities, oil stains or other particulate matter. These substances will accumulate inside the pressure regulating valve, especially in critical parts such as the valve core and valve seat. For example, when the atomized gas is obtained from ordinary gas cylinders or gas generators, the gas may carry a small amount of rust particles or peeling material from the inner wall of the pipe. These impurities accumulate inside the pressure regulating valve, which will affect the normal opening and closing of the valve, resulting in inaccurate pressure regulation. If the valve core is stuck by impurities, it may not be able to completely close or open the valve, causing fluctuations in the atomized gas pressure or failure to reach the set value.

[0005] A pressure regulating valve disclosed in Chinese Patent No. CN216692333U cleverly utilizes a filter screen to effectively filter solid particles in water, thereby achieving a significant effect in cleaning impurities from the water source. Furthermore, the filtration function is further enhanced by the addition of an activated carbon filter plate, which not only filters various impurities in the water but also adsorbs odors, which undoubtedly greatly improves the practicality of the device and makes it perform well in water treatment.

[0006] However, in practical applications, the above-mentioned device has also revealed some problems that cannot be ignored. The device uses an additional filter screen for filtration and protection, which can effectively filter out impurities. However, as the filtration process continues, the filtered impurities will gradually adhere to the outer surface of the filter screen. As the usage time goes by, the filter screen will inevitably be gradually blocked by these impurities. The direct consequence is that the air flow rate inside the pipe gradually decreases, thereby affecting the operating efficiency of the entire system. In order to maintain the normal operation of the device, it is obviously necessary to frequently disassemble and clean the filter screen, which undoubtedly makes the overall use process more cumbersome and inconvenient.

[0007] Furthermore, the device requires the flange to be disassembled before the filter can be installed or removed. This design is cumbersome in practical applications, increasing the complexity and difficulty of operation. This problem is particularly pronounced when the device is used in ion source equipment. On the one hand, the filter is prone to clogging, requiring frequent disassembly and maintenance to ensure normal operation. On the other hand, the cumbersome disassembly process means that each maintenance requires significant time and effort, causing considerable inconvenience to operators. In conclusion, the device has certain shortcomings in its overall use, thus necessitating urgent design improvements to better meet the needs of practical applications and enhance the equipment's operating efficiency and ease of use. Summary of the Invention

[0008] In order to improve the ease of maintenance and anti-clogging capability of existing atomizing gas pressure control devices, this application provides an atomizing gas pressure control device.

[0009] This application provides an atomizing gas pressure control device, which adopts the following technical solution: it includes an electric pressure regulating valve, a single-chip microcomputer controller is fixedly connected to the back of the electric pressure regulating valve, mounting mechanisms are provided on both sides of the top of the electric pressure regulating valve, a groove is opened in the middle of the top of the electric pressure regulating valve, a pressure sensor is inserted into the groove, the pressure sensor is installed inside the groove through the mounting mechanism, and a filter mechanism is installed at both ends of the electric pressure regulating valve through the mounting mechanism.

[0010] The installation mechanism includes an installation groove, an elastic component, a linkage component, and a transmission component. The installation groove is located on both sides of the top of the electric pressure regulating valve. The elastic component is fixedly installed at both ends inside the installation groove. The transmission component is fixedly installed inside the elastic component. The linkage component is movably installed on both sides of the top of the electric pressure regulating valve. The linkage component and the filter mechanism are engaged. The linkage component and the transmission component are connected by transmission.

[0011] Optionally, the elastic component includes a mounting housing, which is fixedly installed on both sides of the mounting groove. A torsion spring is fixedly installed inside the mounting housing, and a circular plate is fixedly installed at the inner end of the torsion spring. The inner side of the circular plate is fixedly connected to both sides of the transmission component.

[0012] Optionally, a support rod is fixedly installed on the outer side of the circular plate, the outer end of the support rod is rotatably connected to the inner side of the mounting housing, and the support rod is located inside the torsion spring.

[0013] Optionally, the linkage component includes a slide groove, which is opened at the top four corners of the electric pressure regulating valve. A slider is slidably connected to the inside of the slide groove, and a limit frame is fixedly connected to the top of the slider.

[0014] Optionally, the linkage component further includes a card plate, which is fixedly connected to both ends of the front and back of the pressure sensor. A card slot is provided at the lower end of the card plate. A card block is fixedly connected to the side of the limiting frame near the pressure sensor. The end of the card block is inserted into the card slot. The side of the card block is L-shaped.

[0015] Optionally, the transmission assembly includes a fixed block, a limiting groove, and a gear. The gear is fixedly connected to the inner side of the circular plate. The fixed block is fixedly installed on the outer middle of the limiting frame. A rack is fixedly connected to the bottom of the fixed block. The rack and the gear are meshed together. A limiting block is fixedly connected to the inner side of the rack. The limiting groove is opened at the upper ends of both sides of the filter mechanism. The end of the limiting block is inserted into the inside of the limiting groove.

[0016] Optionally, the upper two sides of the electric pressure regulating valve are fixedly equipped with a cover shell, which covers the outside of the mounting mechanism.

[0017] Optionally, the filtration mechanism includes a square groove, which is formed on both sides of the top of the electric pressure regulating valve. The bottom of the square groove extends to both ends of the electric pressure regulating valve. A base plate is inserted inside the square groove. A filter screen plate is fixedly connected to the lower end of the base plate. A sealing cover is fixedly installed on the top of the base plate. A limiting groove is formed on the outside of the sealing cover. A cleaning component is movably installed on the outside of the filter screen plate.

[0018] Optionally, the cleaning assembly includes a rotating shaft rotatably connected to the middle of the filter screen plate. A fan wheel is fixedly installed on the outer surface of the outer end of the rotating shaft. Brush plates are fixedly connected at equal intervals on the outer surface of the rotating shaft near the filter screen plate. The inner side of the brush plates is in close contact with the filter screen plate.

[0019] Optionally, a receiving frame is fixedly installed at the bottom of the filter screen, and a mounting flange is fixedly connected to the outer end of the electric pressure regulating valve. Countersunk mounting holes are provided at equal intervals on the outer side of the mounting flange.

[0020] In summary, this application includes the following beneficial technical effects:

[0021] This device, by incorporating a filtration mechanism, allows connection to the ion source gas delivery pipeline via mounting flanges and other components during use. A pressure sensor detects the gas pressure and transmits the data to the ion source equipment via a microcontroller, facilitating control of the atomized gas pressure. The atomized gas circulates after being filtered by the filter screen at the bottom of the substrate. This circulation drives the impeller, which in turn rotates the shaft and brush plate. The brush plate automatically cleans itself by adhering to the filter screen, causing impurities to fall into the receiving frame, preventing filter clogging, reducing the frequency of disassembly and cleaning, improving ease of use, and ensuring stable operation of the ion source equipment and the purity of the atomized gas.

[0022] The installation mechanism facilitates equipment maintenance and repair. When disassembling the pressure sensor, the limit bracket is adjusted outward, the slider is squeezed to make the rack drive the gear to rotate, the torsion spring is tightened, and the locking block is disengaged from the slot for removal. During installation, after inserting the pressure sensor, the limit bracket is released, the torsion spring is reset, and the locking block is engaged with the slot for limitation. Similarly, when disassembling and assembling the filter screen, adjusting the limit bracket can cause the fixing block to drive the limit block to separate or engage with the limit slot, which is convenient for cleaning and installation. The support rod supports the torsion spring and the circular plate, improving installation stability and making the entire disassembly and assembly process simple and efficient, ensuring reliable operation of the equipment.

[0023] The device boasts significant overall design advantages. Its filtration mechanism achieves impurity filtration and automatic cleaning, ensuring the quality of atomized gas and the efficiency of equipment operation. The installation mechanism simplifies the component disassembly and assembly process, improving maintenance convenience. Together, these two aspects provide a comprehensive and reliable solution for ion source equipment. Precise pressure control, efficient filtration and cleaning, and convenient installation and maintenance make it of great value in practical applications. It is expected to be widely used in related fields, promoting the development and application of ion source equipment technology, reducing equipment failures and maintenance costs, and improving production efficiency and quality. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure in an embodiment of this application;

[0025] Figure 2 This is a schematic diagram of the rear view structure in an embodiment of this application;

[0026] Figure 3 This is a top view of the structure in an embodiment of this application;

[0027] Figure 4 This is a schematic diagram of the pressure sensor in a disassembled state in an embodiment of this application;

[0028] Figure 5 This is a schematic diagram of the filter mechanism in its split state in an embodiment of this application;

[0029] Figure 6 This is a schematic diagram of the filtering mechanism structure in an embodiment of this application;

[0030] Figure 7 This is a top view of the installation mechanism in an embodiment of this application;

[0031] Figure 8 This is a bottom view of the installation mechanism in an embodiment of this application.

[0032] Reference numerals: 1. Electric pressure regulating valve; 2. Microcontroller controller; 3. Filtration mechanism; 31. Square channel; 32. Base plate; 33. Filter screen; 34. Sealing cover; 35. Cleaning assembly; 351. Rotating shaft; 352. Impeller; 353. Brush plate; 354. Receiving frame; 4. Tank body; 5. Pressure sensor; 6. Mounting mechanism; 61. Mounting groove; 62. Elastic component; 621. Mounting housing; 622. Torsion spring; 623. Circular plate; 624. Support rod; 63. Linkage assembly; 631. Slide groove; 632. Slider; 633. Limiting frame; 634. Clamping plate; 635. Clamping groove; 636. Clamping block; 64. Transmission assembly; 641. Fixing block; 642. Limiting groove; 643. Gear; 644. Rack; 645. Limiting block; 7. Covering shell; 8. Mounting flange; 9. Countersunk mounting hole. Detailed Implementation

[0033] The following is in conjunction with the appendix Figure 1-8 This application will be described in further detail.

[0034] This application discloses an atomizing gas pressure control device. For example... Figure 1-8 As shown, it includes an electric pressure regulating valve 1, a single-chip microcomputer controller 2 fixedly connected to the back of the electric pressure regulating valve 1, mounting mechanisms 6 on both sides of the top of the electric pressure regulating valve 1, a groove 4 opened in the middle of the top of the electric pressure regulating valve 1, a pressure sensor 5 inserted in the groove 4, the pressure sensor 5 is installed inside the groove 4 through the mounting mechanism 6, and a filter mechanism 3 is installed at both ends of the electric pressure regulating valve 1 through the mounting mechanism 6.

[0035] The mounting mechanism 6 includes a mounting groove 61, an elastic component 62, a linkage component 63, and a transmission component 64. The mounting groove 61 is located on both sides of the top of the electric pressure regulating valve 1. The elastic component 62 is fixedly installed at both ends within the mounting groove 61. The transmission component 64 is fixedly installed inside the elastic component 62. The linkage component 63 is movably installed on both sides of the top of the electric pressure regulating valve 1. The linkage component 63 is snapped into the filter mechanism 3, and the linkage component 63 is connected to the transmission component 64. The electric pressure regulating valve 1 is connected to the microcontroller 2, enabling precise pressure regulation and control, and facilitating data processing and operation. The mounting mechanism 6 serves multiple purposes; the mounting groove 61 provides a secure mounting for each component. The installation space includes elastic components 62 at both ends within the mounting slot 61, providing elastic buffering and reset functions. The transmission component 64 works in conjunction with the elastic component 62 to achieve power transmission and drive the movement of related components. The linkage component 63 is movably mounted on both sides of the top and engages with the filter mechanism 3, as well as being connected to the transmission component 64. This makes the installation and disassembly of the filter mechanism 3 more convenient, facilitating maintenance, replacement, or cleaning of the filter mechanism 3. At the same time, this structural design also helps to improve the overall assembly efficiency and flexibility of the device. In actual use, components can be quickly installed and adjusted as needed, ensuring the stable operation of the device and the accuracy and reliability of atomized gas pressure control.

[0036] Please refer to Figures 1-5 and Figures 7-8The elastic component 62 includes a mounting housing 621, which is fixedly installed on both sides within the mounting groove 61. Torsion springs 622 are fixedly installed inside each mounting housing 621. Circular plates 623 are fixedly installed at the inner ends of the torsion springs 622. The inner sides of the circular plates 623 are fixedly connected to both sides of the transmission component 64. Support rods 624 are fixedly installed on the outer sides of the circular plates 623. The outer ends of the support rods 624 are rotatably connected to the inner side of the mounting housing 621. The support rods 624 are located inside the torsion springs 622. The mounting housing 621 provides a stable mounting position for the torsion springs 622 and the circular plates 623, ensuring their fixation within the device. The torsion springs 622 can store and release elastic potential energy. When the device performs relevant operations, the torsion springs 622 can provide a certain restoring force or driving force through elastic deformation. The circular plates 623 are connected to the transmission component 64. The support rod 624 is located inside the torsion spring 622 and is connected to the inner side of the circular plate 623 and the mounting housing 621. On the one hand, it supports and stabilizes the circular plate 623, ensuring its stability during rotation and preventing it from wobbling or shifting. This ensures that the force of the torsion spring 622 can be accurately and effectively transmitted to the transmission assembly 64. On the other hand, the rotatable connection between the support rod 624 and the inner side of the mounting housing 621 allows the support rod 624 to rotate flexibly with the circular plate 623 during the operation of the torsion spring 622, reducing frictional resistance, improving the working efficiency and service life of the entire elastic assembly 62, and thus ensuring the stability and reliability of the entire device when it involves elastic recovery and power transmission operations.

[0037] Please refer to Figures 1-5The linkage component 63 includes a slide groove 631, which is located at the top four corners of the electric pressure regulating valve 1. A slider 632 is slidably connected to the inner side of the slide groove 631. A limit frame 633 is fixedly connected to the top of the slider 632. The linkage component 63 also includes a locking plate 634, which is fixedly connected to both ends of the front and back of the pressure sensor 5. A slot 635 is provided at the lower end of the locking plate 634. A locking block 636 is fixedly connected to the side of the limit frame 633 near the pressure sensor 5. The end of the locking block 636 is inserted into the slot 635. The side of the locking block 636 is L-shaped. The location of the slide groove 631 and the sliding connection with the slider 632 provide a stable moving track and direction for the limit frame 633, enabling the limit frame 633 to accurately move. The adjustment and fixed connection between slider 632 and limit frame 633 ensure the consistency of their movement. The fixed connection between plate 634 and pressure sensor 5 and the setting of slot 635, together with the insertion of L-shaped block 636 on limit frame 633, form a reliable connection structure that can effectively fix pressure sensor 5 and prevent it from shifting or loosening during operation, ensuring the accuracy and stability of pressure detection. When it is necessary to disassemble or assemble pressure sensor 5, the sliding of slider 632 in slide groove 631 drives limit frame 633 to move, making the separation or engagement of block 636 and slot 635 simple and quick. This improves the maintenance efficiency and operability of the device and reduces maintenance costs and time. Overall, this design improves the performance and reliability of the atomizing gas pressure control device.

[0038] Please refer to Figures 7-8The transmission assembly 64 includes a fixed block 641, a limiting groove 642, and a gear 643. The gear 643 is fixedly connected to the inner side of the circular plate 623. The fixed block 641 is fixedly installed on the outer middle of the limiting frame 633. A rack 644 is fixedly connected to the bottom of the fixed block 641, and the rack 644 and the gear 643 mesh with each other. A limiting block 645 is fixedly connected to the inner side of the rack 644. The limiting groove 642 is opened on both upper ends of the filter mechanism 3. The end of the limiting block 645 is inserted into the inside of the limiting groove 642. A cover shell 7 is fixedly installed on both sides of the upper end of the electric pressure regulating valve 1. The cover shell 7 covers the outer side of the mounting mechanism 6. The gear 643 is fixedly connected to the inner side of the circular plate 623, which can transmit the rotational movement of the circular plate 623. The fixed block 641 is fixed to the outer middle of the limiting frame 633, and the rack 644 at its bottom meshes with the gear 643, so that when the limiting frame... When 633 moves, it can drive the gear 643 to rotate through the rack 644, realizing the transmission and conversion of motion. The limiting block 645 on the inner side of the rack 644 cooperates with the limiting groove 642 on both sides of the upper end of the filter mechanism 3. When the limiting block 645 is inserted into the limiting groove 642, it can accurately limit and fix the position of the filter mechanism 3, ensuring the stability of the filter mechanism 3 during operation. The outer shell 7 on both sides of the upper end of the electric pressure regulating valve 1 covers the outer side of the mounting mechanism 6, which plays a role in protecting the internal transmission components 64 and other structures, preventing external factors from interfering with and damaging them. At the same time, it makes the overall structure of the device more compact and regular, which is conducive to the overall operation and maintenance of the device, improving the reliability and service life of the device. Moreover, this design enables convenient and accurate operation when installing and disassembling the filter mechanism 3 through the synergistic effect of the transmission components 64 and other components.

[0039] Please refer to Figures 5-6The filter mechanism 3 includes a square groove 31, which is formed on both sides of the top of the electric pressure regulating valve 1. The bottom of the square groove 31 extends to both ends of the electric pressure regulating valve 1. A base plate 32 is inserted inside the square groove 31. A filter screen plate 33 is fixedly connected to the lower end of the base plate 32. A sealing cover 34 is fixedly installed on the top of the base plate 32. A limiting groove 642 is formed on the outside of the sealing cover 34. A cleaning assembly 35 is movably installed on the outside of the filter screen plate 33. The cleaning assembly 35 includes a rotating shaft 351, which is rotatably connected to the middle of the filter screen plate 33. A fan wheel 352 is fixedly installed on the outer surface of the outer end of the rotating shaft 351. Brush plates 353 are fixedly connected at equal intervals on the outer surface of the rotating shaft 351 near the filter screen plate 33. The inner side of the brush plates 353 is in close contact with the filter screen plate 33. A receiving frame 354 is fixedly installed at the bottom of the filter screen plate 33. A mounting flange 8 is fixedly connected to the outer end of the electric pressure regulating valve 1. Countersunk mounting holes 9 are formed at equal intervals on the outer side of the mounting flange 8. The design of the square groove 31 provides space for the insertion of the substrate 32. The filter screen 33 at the lower end of the substrate 32 can filter the gas. The sealing cover 34 at the top of the substrate 32 cooperates with the square groove 31 to ensure the sealing of the structure. The limiting groove 642 cooperates with the transmission component 64 to fix and position the filter mechanism 3. The rotating shaft 351 in the cleaning component 35 is rotatably connected to the middle of the filter screen 33. The impeller 352 at the outer end can use the gas flow to drive the rotating shaft 351 to rotate, so that the brush plate 353 can automatically clean the filter screen 33, avoid the accumulation of impurities and blockage of the filter screen 33, improve the filtration efficiency and service life. The receiving frame 354 is used to collect the cleaned impurities for convenient subsequent processing. The mounting flange 8 and countersunk mounting hole 9 at the outer end of the electric pressure regulating valve 1 facilitate connection with other equipment, so that the entire filter mechanism 3 can be stably integrated into the system to realize effective filtration of atomized gas and pressure control related operations, ensuring the normal operation of the device and the gas treatment effect.

[0040] The implementation principle of the atomizing gas pressure control device in this application embodiment is as follows: In the design of this device, by setting a filter mechanism 3, during use, the pressure regulating valve can be stably connected to the ion source gas delivery pipeline through the clever cooperation of the mounting flange 8, the countersunk mounting hole 9, and the bolts, ensuring a tight connection between the device and the pipeline and the stability of gas transmission. At this time, the pressure sensor 5 plays a key role. It detects the gas pressure in the pipeline in real time and transmits this data accurately to the ion source equipment through the single-chip microcomputer controller 2. When it is necessary to control the atomizing gas pressure, the operator only needs to conveniently operate the single-chip microcomputer controller 2 to achieve precise control of the electronic pressure regulating valve, thereby accurately regulating the atomizing gas pressure in the pipeline of the ion source equipment, providing an efficient and convenient way to regulate the atomizing gas pressure.

[0041] During gas transmission, when the atomized gas passes through the filter plate 33 at the bottom of the substrate 32, the filter plate 33 filters it, intercepting impurities and allowing the pure atomized gas to flow smoothly and circulate inside the pipe. However, over time, the impurities filtered out by the filter plate 33 will adhere to its surface. The innovation of this device lies in the fact that the atomized gas generates power as it flows through the pipe, driving the impeller 352 to rotate. The impeller 352 drives the rotating shaft 351 to rotate as well, causing the brush plate 353 connected to the rotating shaft 351 to rotate around the shaft 351. Because... The brush plate 353 is tightly attached to the outer surface of the filter screen plate 33, so the brush plate 353 can continuously brush and clean the filter screen plate 33 during rotation. The impurities brushed off will naturally fall into the receiving frame 354 at the bottom. This automatic cleaning design mechanism can effectively prevent the filter screen from clogging due to the accumulation of impurities during use, greatly reduce the frequency of filter screen disassembly and cleaning, significantly improve the convenience of using the device, and provide a strong guarantee for the stable operation and efficient work of the ion source equipment.

[0042] When the pressure sensor 5 needs to be disassembled and repaired, this device can be easily disassembled. Specifically, the limit bracket 633 is adjusted to move outward. At this time, the limit bracket 633 will squeeze and push the slider 632 to move outward together. As the slider 632 moves outward, the limit bracket 633 drives the rack 644 at the bottom of the fixed block 641 to move outward as well. The outward movement of the rack 644 will drive the gear 643 to rotate, which will cause the circular plate 623 to tighten the torsion spring 622, so that the torsion spring 622 is in a compressed state. Under this series of chain reactions, as the fixed block 641 moves outward, the locking block 636 on the limit bracket 633 will disengage from the slot 635. When the locking block 636 and the slot 635 are separated, the pressure sensor 5 can be easily removed.

[0043] The installation of pressure sensor 5 is also simple. First, adjust the limit bracket 633 to separate it, and then insert the pressure sensor 5 into the groove 4. To ensure the sealing effect, a sealing gasket can be set on the pressure sensor 5. When the pressure sensor 5 is inserted into the groove 4, the sealing gasket can effectively seal it. At this time, release the limit bracket 633, and the torsion spring 622 will quickly return to its original position, pushing the gear 643 to rotate. The gear 643 drives the rack 644 to drive the fixing block 641 to move toward the limit groove 642, causing the locking block 636 and the locking groove 635 on the limit bracket 633 to engage and limit each other, thereby completing the installation of pressure sensor 5.

[0044] Similarly, during the disassembly and assembly of the filter screen 33 and related components, adjusting the limiting bracket 633 can cause the fixing block 641 to move the limiting block 645 away from the limiting groove 642. After the limiting block 645 and the limiting groove 642 are separated, the sealing plate and its bottom base plate 32 can be smoothly pulled out from the inside of the square groove 31. At this time, the filter screen 33 and the receiving frame 354 can be easily cleaned. If installation is required, simply insert the base plate 32 into the inside of the square groove 31. The torsion spring 622 will reset and drive the gear 643 to drive the rack 644 to push the fixing block 645 away from the limiting groove 642. The fixing block 641 drives the limiting block 645 to insert into the inner side of the limiting groove 642. Through the mutual limiting action of the limiting block 645 and the limiting groove 642, the sealing cover 34 can be snapped on and installed, thereby completing the installation of the filter mechanism 3. During the entire use process, the support rod 624 plays an important supporting role. It can stably support the torsion spring 622 and the circular plate 623, improve the stability of the installation during the overall use of the device, provide a solid foundation for the reliable operation of the device, and greatly facilitate the use and maintenance of the device.

[0045] In summary, this device, through its cleverly designed filtration mechanism 3 and installation mechanism 6, achieves precise control of the ion source atomizing gas pressure and convenient equipment maintenance. The filtration mechanism 3 not only effectively filters impurities in the atomizing gas, ensuring its purity, but also significantly reduces the frequent disassembly and cleaning problems caused by filter clogging through its innovative automatic cleaning design, improving the continuous operating efficiency and ease of use of the equipment. The installation mechanism 6, with its simple yet efficient mechanical structure design, makes the disassembly and maintenance of key components such as the pressure sensor 5 and the filter plate 33 easy and quick, while ensuring installation stability and sealing. This overall design concept fully considers the various needs and potential problems encountered in the practical application of ion source equipment, providing a comprehensive and reliable solution for the stable operation, efficient maintenance, and convenient use of ion source equipment. It has significant practical application value and significance, and is expected to be widely applied and promoted in related fields.

[0046] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. An atomizing gas pressure control device comprising an electric pressure regulating valve (1), characterized in that: The back of the electric pressure regulating valve (1) is fixedly connected with a single-chip microcomputer controller (2), both sides of the top of the electric pressure regulating valve (1) is provided with a mounting mechanism (6), the top of the electric pressure regulating valve (1) is provided with a groove (4), the pressure sensor (5) is inserted in the groove (4), the pressure sensor (5) is installed in the groove (4) through the mounting mechanism (6), both ends of the electric pressure regulating valve (1) are provided with a filtering mechanism (3) through the mounting mechanism (6); The mounting mechanism (6) comprises a mounting groove (61), an elastic assembly (62), a linkage assembly (63) and a transmission assembly (64), the mounting groove (61) is arranged on both sides of the top of the electric pressure regulating valve (1), the elastic assembly (62) is fixedly installed at both ends in the mounting groove (61), the transmission assembly (64) is fixedly installed on the inner side of the elastic assembly (62), the linkage assembly (63) is movably installed on both sides of the top of the electric pressure regulating valve (1), the linkage assembly (63) and the filtering mechanism (3) are connected, and the linkage assembly (63) and the transmission assembly (64) are in transmission connection; The elastic assembly (62) comprises a mounting shell (621), the mounting shell (621) is fixedly installed on both sides in the mounting groove (61), the torsional spring (622) is fixedly installed in the mounting shell (621), the inner end of the torsional spring (622) is fixedly installed with a circular plate (623), and the inner side of the circular plate (623) is fixedly connected with the transmission assembly (64) on both sides. The outer side of the circular plate (623) is fixedly installed with a supporting rod (624), the outer end of the supporting rod (624) is rotatably connected with the inner side of the mounting shell (621), and the supporting rod (624) is arranged on the inner side of the torsional spring (622); The linkage assembly (63) comprises a sliding groove (631), the sliding groove (631) is arranged at four corners of the top of the electric pressure regulating valve (1), the sliding groove (631) is slidably connected with a sliding block (632), and the top of the sliding block (632) is fixedly connected with a limiting frame (633); The linkage assembly (63) further comprises a clamping plate (634), the clamping plate (634) is fixedly connected with both ends of the front surface and both ends of the back surface of the pressure sensor (5), the lower end of the clamping plate (634) is provided with a clamping groove (635), one side of the limiting frame (633) close to the pressure sensor (5) is fixedly connected with a clamping block (636), the end of the clamping block (636) is inserted into the clamping groove (635), and the side surface of the clamping block (636) is in L-shaped. The transmission assembly (64) includes a fixed block (641), a limiting groove (642) and a gear (643), the gear (643) is fixedly connected to the inner side of the circular plate (623), the fixed block (641) is fixedly installed on the outer middle part of the limiting frame (633), the bottom of the fixed block (641) is fixedly connected with a rack (644), the rack (644) and the gear (643) are engagedly connected, the inner side of the rack (644) is fixedly connected with a limiting block (645), the limiting groove (642) is arranged on the both sides of the upper end of the filtering mechanism (3), and the end of the limiting block (645) is inserted into the inside of the limiting groove (642).

2. An atomizing gas pressure control device according to claim 1, wherein: The upper end of the electric pressure regulating valve (1) is fixedly installed with a cladding shell (7) on both sides, and the cladding shell (7) covers the outer side of the mounting mechanism (6).

3. An atomizing gas pressure control device according to claim 2, wherein: The filtering mechanism (3) includes a square groove (31), the square groove (31) is arranged on both sides of the top of the electric pressure regulating valve (1), the bottom of the square groove (31) extends to both ends of the electric pressure regulating valve (1), the inside of the square groove (31) is inserted with a base plate (32), the lower end of the base plate (32) is fixedly connected with a filter screen plate (33), the top of the base plate (32) is fixedly installed with a sealing cover (34), the limiting groove (642) is arranged on the outer side of the sealing cover (34), and the outer side of the filter screen plate (33) is movably installed with a cleaning assembly (35).

4. An atomizing gas pressure control device according to claim 3, wherein: The cleaning assembly (35) includes a rotating shaft (351), the rotating shaft (351) is rotatably connected to the middle part of the filter screen plate (33), the outer end surface of the rotating shaft (351) is fixedly installed with a wind wheel (352), the outer surface of the rotating shaft (351) close to one end of the filter screen plate (33) is fixedly connected with brush plates (353) at equal intervals, and the inner side of the brush plate (353) is connected with the filter screen plate (33) in a matched mode.

5. An atomizing gas pressure control device according to claim 4, wherein: The bottom of the filter screen plate (33) is fixedly installed with a receiving frame (354), the outer end of the electric pressure regulating valve (1) is fixedly connected with a mounting flange (8), and the mounting flange (8) is fixedly installed with a mounting flange (8), and the mounting flange (8) is fixedly installed with a mounting flange (8).

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