Efficient cleaning device for special-shaped substrate

Abstract

The invention discloses an efficient cleaning device and method for special-shaped substrates, and aims to solve the problems that in the prior art, cleaning of the special-shaped substrates is low in efficiency, poor in effect, safe in cleaning and the like, four layers of cleaning baskets are arranged, the number of the special-shaped substrates capable of being cleaned is increased as much as possible, and the cleaning baskets are detachable up and down; a sliding rail is arranged on the inner wall of the cleaning basket, a movable fixing buckle is arranged on the side face of the cleaning basket, and the special-shaped substrate can be selectively fixed through the cleaning basket sliding rail and a three-point fixing method; three groups of spray heads capable of moving at multiple angles are arranged, and a rotatable cleaning basket is combined, so that the trace of water stains on the surface is prevented while the special-shaped substrate is efficiently cleaned in all directions; modules such as multi-angle spraying, substrate soaking, solution heating, ultrasonic cleaning, angle-adjustable spraying and cleaning basket rotating are integrated, the integration level is high, parts and assembly steps are reduced, and the occupied area is small; and the cleaning tank can be independently and automatically cleaned, so that the cleaning quality and efficiency are ensured.

Description

Technical Field

[0001] The invention relates to the field of semiconductor manufacturing and electronic component processing, and in particular to a high-efficiency cleaning device for special-shaped substrates. Background Art

[0002] With the development of science and technology, special-shaped substrates are increasingly used in the fields of semiconductor and electronic component manufacturing. Special-shaped substrates are often easily attached with various foreign objects such as dust, particles, grease, etc. during the processing process. If the surface of the substrate is not thoroughly cleaned, it will affect the quality and yield of the product.

[0003] However, most existing cleaning devices and methods are designed for standard-shaped substrates. For cleaning the surface and edges of complex-shaped substrates, there are usually problems such as cumbersome cleaning steps, difficult operation, and inability to perform batch cleaning. This results in high workload and low cleaning efficiency, and water stains are easily left on the surface after cleaning, which indirectly leads to a decrease in the quality of subsequent products and reduced production efficiency. In response to the above problems, a solution is proposed below. Summary of the invention

[0004] The object of the present invention is to provide an efficient cleaning device for special-shaped substrates, which has the advantages of being able to clean various foreign matters attached to the surface and edge of the special-shaped substrates in batches, efficiently and comprehensively.

[0005] The above technical objectives of the present invention are achieved through the following technical solutions: An efficient cleaning device for special-shaped substrates, comprising: A housing, wherein a chamber is provided in the housing, wherein the chamber is used to install components used for cleaning, and a transparent cover is provided on the top of the housing, wherein the transparent cover is used to observe the situation in the chamber; A cleaning basket, wherein the cleaning basket has four layers, the four layers of the cleaning basket are detachably connected, the cleaning basket is used to hold the special-shaped substrate to be cleaned, and the cleaning basket is provided with a fixing mechanism, and the fixing mechanism is used to fix the special-shaped substrate; A cleaning tank, wherein three supporting columns are fixedly arranged at the bottom of the cleaning tank, the lower ends of the supporting columns are fixedly connected to the shell, a drain port is arranged at the bottom of the cleaning tank, the drain port is connected to a drain pipe, the cleaning flower basket is placed in the cleaning tank, a rotating mechanism is arranged at the center of the bottom of the cleaning tank, the rotating mechanism is connected to the cleaning flower basket, so as to drive the cleaning flower basket to rotate in the cleaning tank; The cleaning function system includes an ultrasonic device, a heating device and a spray device, which cooperate with the cleaning tank to clean the special-shaped substrate to ensure the stability of the cleaning result; The intelligent control system includes a control panel, a controller and a sensor. The intelligent control system exchanges data and performs remote control with the cleaning function system to realize automated operation and ensure the stability of the cleaning result.

[0006] Preferably, the four layers of cleaning flower baskets are all circular, and the bottom of each layer of the cleaning flower basket is a platform for placing special-shaped substrates. The platform is hollowed out in a grid shape, and the upper end surface of the platform is provided with omnidirectional slide rails. There are cylindrical water leakage ports at the intersections of the slide rails. The fixing mechanism includes a plurality of movable fixing buckles, one end of the fixing buckle is located in the slide rail and is slidably connected to the slide rail, and a plurality of the fixing buckles are used to lock the special-shaped substrates.

[0007] Preferably, three triangular support columns are provided at the bottom of each cleaning flower basket, and a triangular slot is provided on the cleaning flower basket. The cleaning flower basket located at the upper layer is connected to the cleaning flower basket located at the lower layer through the triangular support columns and the triangular slot.

[0008] Preferably, the rotating mechanism includes a servo motor and a support table, the servo motor is fixed at the lower end of the cleaning tank, the support table is located on the inner side of the cleaning tank, the output shaft of the servo motor passes through the lower end surface of the cleaning tank and is fixedly connected to the support table, the servo motor is used to drive the support table to rotate, and a triangular slot is also provided on the support table, and the cleaning flower basket is connected to the support table through a triangular support column.

[0009] Preferably, the ultrasonic device comprises a transducer and an ultrasonic generator, the ultrasonic generator is connected to the transducer, the transducer is arranged at the bottom of the cleaning tank, and the ultrasonic wave removes tiny particles on the surface of the irregular substrate through vibration.

[0010] Preferably, the heating device comprises three heating blocks, which are all installed on the outer side of the cleaning tank. The heating blocks are used to heat the cleaning liquid in the cleaning tank to improve the activity of the cleaning liquid and the cleaning efficiency.

[0011] Preferably, the spray device includes three groups of spray heads, which respectively spray chemical cleaning liquid 1, chemical cleaning liquid 2 and pure water. The spray heads are multi-angle spray heads, which have multiple moving angles in the horizontal and vertical directions to ensure that the chemical cleaning liquid and pure water can evenly and fully clean the surface and edges of the special-shaped substrate.

[0012] Preferably, each group of the spray heads includes twelve spray heads, and the twelve spray heads are arranged in four layers and three columns, and each layer of the spray heads corresponds to a layer of cleaning flower baskets. The three groups of spray heads are respectively a first spray head, a second spray head and a third spray head. One end of the first spray head is connected to a first liquid storage tank, one side of the first liquid storage tank is connected to a first liquid inlet pipe, and a first water pump is provided on the first liquid inlet pipe. One side of the second spray head is connected to a second liquid storage tank, one side of the second liquid storage tank is connected to a second liquid inlet pipe, and a second water pump is provided on the second liquid inlet pipe. One side of the third spray head is connected to a third liquid inlet pipe, and a third water pump is provided on the third liquid inlet pipe.

[0013] A method for using an efficient cleaning device for special-shaped substrates comprises the following steps: S1: Fix the special-shaped substrate and place it on the cleaning basket. Move the three fixing buckles on the slide rails to confirm that the special-shaped substrate cannot move horizontally and then lock the fixing buckles. Use the three-point fixing method to fix substrates of different shapes. Assemble the cleaning basket according to the number of special-shaped substrates to be cleaned, put the cleaning basket into the cleaning tank, and cover it with a transparent cover. S2: Set cleaning parameters. According to the material and quantity of the special-shaped substrate and the number of layers of the cleaning basket assembly, after clarifying the cleaning requirements, set the cleaning parameters in the control panel, including the types of chemical cleaning liquid 1 and chemical cleaning liquid 2, the angle of the spray head and its transformation, the rotation speed, the flow rate and time of the chemical cleaning liquid spray, the immersion time, the heating temperature, the ultrasonic frequency and time, etc.; At this point, the loading preparation work is completed; S3: Start cleaning. After the cleaning device is started, the spray device and the rotating device are started at the same time. First, the third water pump transports pure water from the factory end to the third spray head. The third spray head sprays pure water on the center and edge of the flower basket according to the preset angle change trajectory and spray flow parameters. At the same time, the rotating mechanism rotates at a preset speed to ensure that the surface and edge of the special-shaped substrate on the flower basket can be evenly sprayed with pure water. This step is used to remove dust and large and small particles on the surface of the special-shaped substrate; S4: After rinsing once, the third spray head stops spraying; then the first water pump draws the chemical cleaning liquid 1 from the factory service end to the first liquid storage tank and transports it to the first spray head. The first spray head sprays the chemical cleaning liquid 1 according to the preset parameters and changes the angle at the same time to ensure that the center and edge of the flower basket are evenly contacted with the chemical cleaning liquid 1; after the preset time, the drain port is closed, the cleaning flower basket stops rotating, and the chemical cleaning liquid 1 continues to flow until the preset liquid level; then the ultrasonic device and the heating device are turned on, and the transducer generates high-frequency vibration of ultrasonic waves, so that the oil stains on the surface of the special-shaped substrate are emulsified, peeled off and then removed under the action of the chemical cleaning liquid 1, and the heating block heats the chemical cleaning liquid to a preset temperature to accelerate the cleaning process; after the preset time, the ultrasonic device and the heating device stop running, and the chemical cleaning liquid 1 is discharged; S5: To further remove impurities on the special-shaped substrate, the second water pump draws the second chemical cleaning liquid from the factory end to the second liquid storage tank and transports it to the second spray head. The second spray head also sprays the second chemical cleaning liquid on the cleaning basket according to the preset parameters. The special-shaped substrate is immersed in the second chemical cleaning liquid for cleaning. The ultrasonic device and the heating device are also turned on and the cleaning process is completed according to the preset parameters. Finally, the spray device is started, and the third spray head sprays pure water evenly on the surface of the special-shaped substrate to remove the residual cleaning liquid. After the spraying is completed, the rotating device is started to remove the residual pure water on the special-shaped substrate and the cleaning basket. After the rotation is completed, the heating block heats the cleaning tank to dry all the special-shaped substrates. S6: After the cleaning is completed, when the cleaning reaches the preset effect, the intelligent control system automatically stops cleaning; at this time, the cleaned special-shaped substrate is taken out for subsequent processing; the intelligent control system automatically controls the entire cleaning process, including the rotation of the cleaning basket, the start and stop of the spray device, the complex change of the spray head movement angle, the precise control of the supply flow and supply time of the cleaning liquid, the control of the heating temperature, etc., to ensure the stability of the cleaning effect and the cleaning results, and realize the automatic and efficient cleaning of the special-shaped substrate; at the same time, the data of the cleaning process can be selectively recorded and a report can be generated. S7: After cleaning multiple batches of special-shaped substrates, the cleaning device can turn on the self-cleaning mode. By selecting a suitable chemical cleaning liquid, turning on three groups of spray heads at the same time and increasing the spray pressure, the cleaning tank and cleaning basket can be strongly self-cleaned.

[0014] The beneficial effects of the present invention are: 1. Batch cleaning of special-shaped substrates: By setting multiple freely movable fixing buckles on the cleaning basket, the special-shaped substrates are fixed using the three-point fixing method. Combined with the four-layer cleaning basket and the fully automatic cleaning process, batch cleaning of special-shaped substrates is achieved, which significantly improves the cleaning efficiency.

[0015] 2. Improve cleaning quality: Through the multi-angle spray head, rotatable cleaning basket and intelligent control system to control the spray flow of chemical cleaning liquid, comprehensive and efficient cleaning of the surface and edge of special-shaped substrates can be achieved, while significantly improving the stability of cleaning results.

[0016] 3. Cleaning automation: The entire cleaning process is precisely automated through the intelligent control system, including the rotation of the cleaning basket, the start and stop of the spray device, the complex change of the spray head movement angle, the precise control of the supply flow and supply time of the cleaning liquid, the control of the heating temperature, etc., to achieve automated cleaning.

[0017] 4. Strong adaptability: The present invention is applicable to various shapes of special-shaped substrates and has wide applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of an embodiment; Figure 2 is a cross-sectional view of an embodiment; Figure 3 is a cross-sectional view of the embodiment in a top-down direction; Figure 4 The embodiment is a schematic structural diagram for illustrating the cleaning of a flower basket.

[0019] 1. Shell; 11. Transparent cover; 12. Drain pipe; 2. Cleaning flower basket; 21. Platform; 22. Slide rail; 23. Triangular support column; 24. Fixing buckle; 25. Railing; 3. Cleaning trough; 31. Support column; 32. Support table; 33. Servo motor; 4. Ultrasonic device; 41. Transducer; 42. Ultrasonic generator; 5. Heating device; 51. Heating block; 6. Spraying device; 61. First spray head; 62. Second spray head; 63. Third spray head; 64. First liquid storage tank; 641. First liquid inlet pipe; 642. First water pump; 65. Second liquid storage tank; 651. Second liquid inlet pipe; 652. Second water pump; 66. Third water pump; 67. Third liquid inlet pipe; 7. Intelligent control system; 71. Control panel; 72. Controller; 73. Sensor. DETAILED DESCRIPTION

[0020] The following is only a preferred embodiment of the present invention, and the protection scope is not limited to this embodiment. All technical solutions under the concept of the present invention should belong to the protection scope of the present invention. The same parts are represented by the same figure marks. It should be noted that the words "front", "rear", "left", "right", "up" and "down" used in the following description refer to the directions in the drawings, and the words "bottom" and "top", "inside" and "outside" refer to the directions toward or away from the geometric center of a specific component, respectively.

[0021] An efficient cleaning device for special-shaped substrates, comprising: The shell 1 has a chamber inside, and the chamber is used to install components used for cleaning. The top of the shell 1 is provided with a transparent cover 11, and the transparent cover 11 is used to observe the situation in the chamber. The transparent cover 11 is hinged to the shell 1, and components can be taken in and put out of the chamber after opening the transparent cover 11.

[0022] The cleaning flower basket 2 is divided into four layers in total, which can be assembled and disassembled, and is used to place the special-shaped substrates to be cleaned. The cleaning flower basket 2 is divided into four layers, and each layer of the cleaning flower basket 2 is circular, and is designed with a platform 21 for placing the special-shaped substrates. The platform 21 is grid-shaped and hollowed out, and a slide rail 22 for the fixed buckle 24 to move is dug out in the hollow inner wall, and there is a cylindrical leak at the intersection of the slide rails 22. The cleaning flower basket 2 can be disassembled up and down, which is convenient for increasing or decreasing the number of flower basket layers according to the number of special-shaped substrates to be cleaned. There are three evenly distributed and parallel triangular support columns 3123 at the bottom of each layer of the cleaning flower basket 2, and a triangular card slot is provided on the cleaning flower basket 2. The upper cleaning flower basket 2 and the lower cleaning flower basket 2 are fixed by plugging the triangular support columns 3123 and the triangular card slot.

[0023] The present application designs a fixing mechanism that can flexibly adapt to various special-shaped substrates to ensure that the substrates will not move or turn over during the cleaning process. The fixing mechanism includes a plurality of movable fixing buckles 24, which can move within the slide rail 22. The structure in which the fixing buckle 24 is connected to the slide rail 22 is wide at the top and narrow at the bottom. After moving to a fixed position, the fixing buckle 24 can be locked by pressing down lightly. A circle of upright rails 25 surrounds the side of the cleaning flower basket 2. When not in use, the fixing buckle 24 is placed on the slide rail 22 on the side wall of the rail 25. When needed, the fixing buckle 24 is moved to the slide rail 22 of the platform 21. After the special-shaped substrate is placed flat on the flower basket, the three fixing buckles 24 are moved on the slide rail 22 and locked, and the stable clamping of substrates of different shapes can be achieved through the three-point fixing method.

[0024] The cleaning tank 3 has three cylindrical support columns 31 evenly distributed on the outside of the bottom, fixing the cleaning tank 3 inside the housing 1. A rotating mechanism is provided at the center of the bottom of the cleaning tank 3, and the rotating mechanism includes a servo motor 33 and a support table 32. The support table 32 is provided with evenly distributed triangular slots on the periphery, which can be connected to the bottom of the cleaning flower basket 2 through the triangular support columns 3123 to ensure that the cleaning flower basket 2 is stable and does not shake during rotation. The servo motor 33 is fixed to the lower end of the cleaning tank 3, and the output shaft of the servo motor 33 passes through the lower end surface of the cleaning tank 3 and is fixedly connected to the support table 32. The servo motor 33 is used to drive the support table 32 to rotate, thereby realizing the rotation of the cleaning flower basket 2 in the cleaning tank 3.

[0025] The cleaning function system includes an ultrasonic device 4, a heating device 5, and a spray device 6, which cooperate with the cleaning tank 3 to clean the special-shaped substrate to be cleaned, thereby ensuring the stability of the cleaning result.

[0026] The ultrasonic device 4 includes a transducer 41 and an ultrasonic generator 42. The ultrasonic generator 42 is connected to the transducer 41, and the transducer 41 is arranged at the bottom of the cleaning tank 3. Through the vibration of ultrasonic waves, the microparticles on the surface of the irregular substrate are removed while enhancing the cleaning effect of the chemical cleaning liquid.

[0027] The heating device 5 includes three heating blocks 51 , all of which are installed on the outer side of the cleaning tank 3 and are used to heat the chemical cleaning liquid in the cleaning tank 3 to improve the activity of the cleaning liquid and the cleaning efficiency.

[0028] The spray device 6 is divided into three groups, each group has twelve spray heads, which are evenly distributed on the inner wall of the cleaning tank 3 through a four-layer and three-row arrangement. Each layer of spray heads corresponds to a layer of cleaning flower basket 2. Combined with the rotating mechanism, the cleaning liquid can be evenly sprayed on each layer of the special-shaped substrate.

[0029] The three groups of spray heads are used to spray chemical cleaning liquid 1, chemical cleaning liquid 2 and pure water respectively. Each spray head has multiple movable angles, and the movable angles in the horizontal and vertical directions are 15°, 30°, 45° and 60°. By adjusting the angle of the spray head, the special-shaped substrate on the entire plane of the cleaning basket 2 can be fully cleaned.

[0030] The three groups of spray heads are respectively a first spray head 61, a second spray head 62 and a third spray head 63. Each group of spray heads is sleeved to a corresponding connecting pipe. One end of the first spray head 61 is connected to a first liquid storage tank 64, one side of the first liquid storage tank 64 is connected to a first liquid inlet pipe 641, and a first water pump 642 is provided on the first liquid inlet pipe 641. One side of the second spray head 62 is connected to a second liquid storage tank 65, one side of the second liquid storage tank 65 is connected to a second liquid inlet pipe 651, and a second water pump 652 is provided on the second liquid inlet pipe 651. One side of the third spray head 63 is connected to a third liquid inlet pipe 67, and a third water pump 66 is provided on the third liquid inlet pipe 67. The first liquid storage tank 64 and the second liquid storage tank 65 are used to store chemical cleaning liquid 1 and chemical cleaning liquid 2, respectively.

[0031] Intelligent control system 7: The system can automatically adjust the cleaning process and realize automated operation according to preset cleaning parameters, such as cleaning time, spray head angle, chemical cleaning liquid flow, ultrasonic frequency and time, soaking time, heating temperature, etc.

[0032] The intelligent control system 7 includes a control panel 71, a controller 72, a sensor 73 and other parts. The control panel 71 is arranged on the front side of the cleaning device and is mainly used to set parameters such as the spray head angle, the flow supply of the cleaning chemical cleaning liquid, the heating temperature, and the cleaning time. For special-shaped substrates with the same cleaning requirements, the relevant cleaning parameters can be stored to improve the cleaning efficiency.

[0033] The controller 72 is located on the right rear side of the housing in front of the cleaning device. Its main function is to adjust the cleaning function system state based on preset cleaning parameters, and drive the spray device 6, ultrasonic device 4, heating device 5 and rotating mechanism to perform all-round cleaning on the special-shaped substrate to be cleaned.

[0034] The sensor 73 is mainly installed above the three groups of cleaning heads in the cleaning tank 3, and is used to monitor various parameters in the cleaning process in real time, such as spray time, spray head angle, chemical cleaning liquid flow, ultrasonic frequency and time, chemical cleaning liquid immersion level, immersion time, heating temperature, etc.

[0035] At the same time, the intelligent control system 7 can also record the data of the cleaning process and generate a report, which can be used for subsequent analysis and optimization of cleaning process parameters. Through data exchange and remote control between the intelligent control system 7 and the cleaning function system, automated operation is achieved and the stability of the cleaning results is guaranteed.

[0036] Working principle: The working method of the high-efficiency cleaning device for special-shaped substrates comprises the following steps: S1: Fixing the special-shaped substrate: Place the special-shaped substrate on the cleaning basket 2, move the positions of the three fixing buckles 24 on the slide rail 22, confirm that the special-shaped substrate cannot move in the horizontal direction, and then lock the fixing buckles 24, that is, use the three-point fixing method to fix substrates of different shapes, such as irregular polygons, arcs, ellipses, etc. Assemble the cleaning basket 2 according to the number of special-shaped substrates to be cleaned, put the cleaning basket 2 into the cleaning tank 3, and cover the transparent cover 11.

[0037] S2: Setting cleaning parameters: After clarifying the cleaning requirements according to the material and quantity of the special-shaped substrate and the number of layers of the cleaning basket 2, set the cleaning parameters in the control panel 71, including the types of chemical cleaning liquid 1 and chemical cleaning liquid 2, the angle of the spray head and its transformation, the rotation speed, the flow rate and time of the chemical cleaning liquid spraying, the immersion time, the heating temperature, the ultrasonic frequency and time, etc. At this point, the loading preparation work is completed.

[0038] S3: Start cleaning: After starting the cleaning device, the spray device 6 and the rotating device are started at the same time. First, the third water pump 66 transports pure water from the factory end to the third spray head 63. The third spray head 63 sprays pure water on the center and edge of the flower basket according to the preset angle change trajectory and spray flow parameters. At the same time, the rotating mechanism rotates at a preset speed, generally 500-1000rpm / min, to ensure that the surface and edge of the special-shaped substrate on the flower basket can be evenly sprayed with pure water. This step first removes dust and large and small particles on the surface of the special-shaped substrate.

[0039] S4: After rinsing once, the third spray head 63 stops spraying. Then the first water pump 642 draws the chemical cleaning liquid 1 from the factory service end to the first liquid storage tank 64 and transports it to the first spray head 61. The first spray head 61 sprays the chemical cleaning liquid 1 according to the preset parameters and changes the angle to ensure that the center and edge of the flower basket are evenly in contact with the chemical cleaning liquid 1. After the preset time, the drain port is closed, the cleaning flower basket 2 stops rotating, and the chemical cleaning liquid continues to flow in until the preset liquid level. Then the ultrasonic device 4 and the heating device 5 are turned on, and the transducer 41 generates high-frequency vibration of ultrasonic waves, so that the oil stains on the surface of the special-shaped substrate are emulsified, peeled off and then removed under the action of the chemical cleaning liquid 1. The heating block 51 heats the chemical cleaning liquid to a preset temperature to accelerate the cleaning process. After the preset time, the ultrasonic device 4 and the heating device 5 stop running, and the chemical cleaning liquid is discharged.

[0040] S5: To further remove impurities on the special-shaped substrate, the second water pump 652 extracts the chemical cleaning liquid 2 from the factory service end to the second liquid storage tank 65 and transports it to the second spray head 62. The second spray head 62 also sprays the chemical cleaning liquid 2 on the cleaning basket 2 according to the preset parameters. The special-shaped substrate is immersed in the chemical cleaning liquid 2 for cleaning, and the ultrasonic device 4 and the heating device 5 are also turned on and complete the cleaning process according to the preset parameters. Finally, the spray device 6 is started, and the third spray head 63 sprays pure water evenly on the surface of the special-shaped substrate to remove the residual cleaning liquid; after the spraying is completed, the rotating device is started, and the rotation speed is 1500-2500rpm / min to remove the pure water remaining on the special-shaped substrate and the cleaning basket 2. After the rotation is completed, the heating block 51 heats the cleaning tank 3 to dry all the special-shaped substrates.

[0041] S6: Cleaning is completed: When the cleaning reaches the preset effect, the intelligent control system 7 automatically stops cleaning. At this time, the cleaned special-shaped substrate can be taken out for subsequent processing. The intelligent control system 7 automatically controls the entire cleaning process, including the rotation of the cleaning basket 2, the start and stop of the spray device 6, the complex change of the spray head movement angle, the precise control of the supply flow and supply time of the cleaning liquid, the control of the heating temperature, etc., to ensure the cleaning effect and the stability of the cleaning results, and realize the automatic and efficient cleaning of the special-shaped substrate. At the same time, the data of the cleaning process can be selectively recorded and a report can be generated.

[0042] S7: After cleaning multiple batches of special-shaped substrates, the cleaning device can start the self-cleaning mode, by selecting a suitable chemical cleaning liquid, simultaneously starting the first, second and third spray heads 63 and increasing the spray pressure, to perform strong self-cleaning on the cleaning tank 3 and the cleaning basket 2. The object of the present invention is to provide an efficient cleaning device and method for special-shaped substrates, which can achieve comprehensive and efficient cleaning of the surface and edge of the special-shaped substrates, thereby improving the cleaning quality and production efficiency.

[0043] The specific embodiments described above further illustrate the technical problems, technical solutions and beneficial effects solved by the present invention. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An efficient cleaning device for special-shaped substrates, characterized in that: include A shell (1), wherein a chamber is provided in the shell (1), wherein the chamber is used to install components used for cleaning, and a transparent cover plate (11) is provided on the top of the shell (1), wherein the transparent cover plate (11) is used to observe the situation in the chamber; and a drainage pipe (12) is also provided in the shell (1); A cleaning basket (2), the cleaning basket (2) having four layers, the four layers of the cleaning basket (2) being detachably connected, the cleaning basket (2) being used to hold the special-shaped substrate to be cleaned, the cleaning basket (2) being provided with a fixing mechanism, the fixing mechanism being used to fix the special-shaped substrate; A cleaning tank (3), wherein three support columns (31) are fixedly arranged at the bottom of the cleaning tank (3), the lower ends of the support columns (31) are fixedly connected to the housing (1), a drainage port is arranged at the bottom of the cleaning tank (3), the drainage port is connected to a drainage pipe (12), the cleaning flower basket (2) is placed in the cleaning tank (3), a rotating mechanism is arranged at the center of the bottom of the cleaning tank (3), the rotating mechanism is connected to the cleaning flower basket (2), so as to drive the cleaning flower basket (2) to rotate in the cleaning tank (3); The cleaning function system comprises an ultrasonic device (4), a heating device (5) and a spray device (6), which cooperate with the cleaning tank (3) to clean the special-shaped substrate to be cleaned, thereby ensuring the stability of the cleaning result; The intelligent control system (7) comprises a control panel (71), a controller (72) and a sensor (73). The intelligent control system (7) exchanges data with the cleaning function system and performs remote control to achieve automated operation and ensure the stability of cleaning results.

2. The high-efficiency cleaning device for special-shaped substrates according to claim 1, characterized in that: The four layers of cleaning flower baskets (2) are all circular, and the bottom of each layer of the cleaning flower baskets (2) is a platform (21) for placing a special-shaped substrate, and the platform (21) is hollowed out in a grid shape. The upper end surface of the platform (21) is provided with a full range of slide rails (22), and cylindrical water leakage holes are provided at the intersections of the slide rails (22). The fixing mechanism includes a plurality of movable fixing buckles (24), one end of the fixing buckle (24) is located in the slide rail (22) and is slidably connected to the slide rail (22), and a plurality of the fixing buckles (24) are used to lock the special-shaped substrate.

3. The high-efficiency cleaning device for special-shaped substrates according to claim 1, characterized in that: Each cleaning flower basket (2) is provided with three triangular support columns (31) (23) at the bottom, and a triangular slot is provided on the cleaning flower basket (2), and the cleaning flower basket (2) located at the upper layer is connected to the cleaning flower basket (2) located at the lower layer through the triangular support columns (31) (23) and the triangular slot.

4. The high-efficiency cleaning device for special-shaped substrates according to claim 3, characterized in that: The rotating mechanism comprises a servo motor (33) and a support platform (32); the servo motor (33) is fixed at the lower end of the cleaning tank (3); the support platform (32) is located inside the cleaning tank (3); the output shaft of the servo motor (33) passes through the lower end surface of the cleaning tank (3) and is fixedly connected to the support platform (32); the servo motor (33) is used to drive the support platform (32) to rotate; a triangular slot is also provided on the support platform (32); the cleaning flower basket (2) is connected to the support platform (32) via a triangular support column (31) (23).

5. The high-efficiency cleaning device for special-shaped substrates according to claim 1, characterized in that: The ultrasonic device (4) comprises a transducer (41) and an ultrasonic generator (42), wherein the ultrasonic generator (42) is connected to the transducer (41), and the transducer (41) is arranged at the bottom of the cleaning tank (3). The ultrasonic wave removes tiny particles on the surface of the irregular substrate through vibration.

6. The high-efficiency cleaning device for special-shaped substrates according to claim 5, characterized in that: The heating device (5) comprises three heating blocks (51), and the three heating blocks (51) are all installed on the outer side of the cleaning tank (3). The heating blocks (51) are used to heat the cleaning liquid in the cleaning tank (3) to improve the activity of the cleaning liquid and the cleaning efficiency.

7. The high-efficiency cleaning device for special-shaped substrates according to claim 6, characterized in that: The spray device (6) comprises three groups of spray heads, and the three groups of spray heads spray chemical cleaning liquid 1, chemical cleaning liquid 2 and pure water respectively. The spray heads are multi-angle spray heads, and the spray heads have multiple moving angles in both horizontal and vertical directions to ensure that the chemical cleaning liquid and pure water can evenly and fully clean the surface and edge of the special-shaped substrate.

8. The high-efficiency cleaning device for special-shaped substrates according to claim 7, characterized in that: Each group of the spray heads comprises twelve spray heads, and the twelve spray heads are arranged in four layers and three rows. Each layer of the spray heads corresponds to a layer of cleaning flower baskets (2). The three groups of the spray heads are respectively a first spray head (61), a second spray head (62) and a third spray head (63). One end of the first spray head (61) is connected to a first liquid storage tank (64), one side of the first liquid storage tank (64) is connected to a first liquid inlet pipe (641), and a first water pump (642) is provided on the first liquid inlet pipe (641). One side of the second spray head (62) is connected to a second liquid storage tank (65), one side of the second liquid storage tank (65) is connected to a second liquid inlet pipe (651), and a second water pump (652) is provided on the second liquid inlet pipe (651). One side of the third spray head (63) is connected to a third liquid inlet pipe (67), and a third water pump (66) is provided on the third liquid inlet pipe (67).

9. A method for using a high-efficiency cleaning device for special-shaped substrates according to any one of claims 1 to 8, characterized in that: The following steps are included: S1: Fix the special-shaped substrate and place the special-shaped substrate on the cleaning basket (2). Move the positions of the three fixing buckles (24) on the slide rail (22), confirm that the special-shaped substrate cannot move in the horizontal direction, and then lock the fixing buckles (24). Use the three-point fixing method to fix substrates of different shapes; assemble the cleaning basket (2) according to the number of special-shaped substrates to be cleaned, put the cleaning basket (2) into the cleaning tank (3), and cover the transparent cover (11); S2: Setting cleaning parameters. After clarifying the cleaning requirements according to the material and quantity of the special-shaped substrate and the number of layers of the cleaning basket (2), the cleaning parameters are set in the control panel (71), including the types of chemical cleaning liquid 1 and chemical cleaning liquid 2, the angle of the spray head and its transformation, the rotation speed, the flow rate and time of the chemical cleaning liquid spraying, the immersion time, the heating temperature, the ultrasonic frequency and time, etc.; at this point, the loading preparation work is completed; S3: Start cleaning. After the cleaning device is started, the spray device (6) and the rotating device are started at the same time. First, the third water pump (66) transports pure water from the factory end to the third spray head (63). The third spray head (63) sprays the pure water on the center and edge of the flower basket according to the preset angle change trajectory and spray flow parameters. At the same time, the rotating mechanism rotates at a preset speed to ensure that the surface and edge of the special-shaped substrate on the flower basket can be evenly sprayed with pure water. This step is used to remove dust and large and small particles on the surface of the special-shaped substrate; S4: After rinsing once, the third spray head (63) stops spraying; then the first water pump (642) draws the chemical cleaning liquid 1 from the factory service end to the first liquid storage tank (64) and transports it to the first spray head (61), and the first spray head (61) sprays the chemical cleaning liquid 1 according to the preset parameters and changes the angle to ensure that the center and edge of the flower basket are evenly contacted with the chemical cleaning liquid 1; after the preset time, the drain port is closed, the cleaning flower basket (2) stops rotating, and the chemical cleaning liquid 1 continues to flow until the preset liquid level; then the ultrasonic device (4) and the heating device (5) are turned on, and the transducer (41) generates high-frequency vibration of ultrasonic waves, so that the oil stains on the surface of the special-shaped substrate are emulsified, peeled off and then removed under the action of the chemical cleaning liquid 1, and the heating block (51) heats the chemical cleaning liquid to a preset temperature to accelerate the cleaning process; after the preset time, the ultrasonic device (4) and the heating device (5) stop running, and the chemical cleaning liquid 1 is discharged; S5: To further remove impurities on the irregular substrate, the second water pump (652) draws the second chemical cleaning liquid from the factory service end to the second liquid storage tank (65) and transports it to the second spray head (62). The second spray head (62) also sprays the second chemical cleaning liquid on the cleaning basket (2) according to preset parameters; The shaped substrate is immersed in the second chemical cleaning liquid for cleaning, and the ultrasonic device (4) and the heating device (5) are also turned on according to the predetermined parameters to complete the cleaning process; finally, the spray device (6) is started, and the third spray head (63) sprays pure water evenly on the surface of the shaped substrate to remove residual cleaning liquid; After the spraying is completed, the rotating device is started to remove the pure water remaining on the special-shaped substrates and the cleaning basket (2); after the rotation is completed, the heating block (51) heats the cleaning tank (3) to dry all the special-shaped substrates; S6: After the cleaning is completed, when the cleaning reaches the preset effect, the intelligent control system (7) automatically stops cleaning; at this time, the cleaned special-shaped substrate is taken out for subsequent processing; the intelligent control system (7) automatically controls the entire cleaning process, including the rotation of the cleaning basket (2), the start and stop of the spray device (6), the complex change of the spray head movement angle, the precise control of the supply flow and supply time of the cleaning liquid, the control of the heating temperature, etc., to ensure the cleaning effect and the stability of the cleaning result, and realize the automatic and efficient cleaning of the special-shaped substrate; at the same time, the data of the cleaning process can be selectively recorded and a report can be generated. S7: After cleaning multiple batches of special-shaped substrates, the cleaning device can start the self-cleaning mode, and perform strong self-cleaning on the cleaning tank (3) and the cleaning basket (2) by selecting a suitable chemical cleaning liquid, simultaneously starting three groups of spray heads, and increasing the spray pressure.

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