Electrostatically actuated microelectromechanical device and its actuation method

Abstract

The present invention provides an electrostatically actuated microelectromechanical device and a driving method thereof. The device includes at least one electrostatically actuated microelectromechanical component, which includes a rotating bracket and at least one one-dimensional direction driving unit. The first one-dimensional direction driving unit includes a first electrode and a second electrode disposed in the first direction of the rotating bracket. The electrostatically actuated microelectromechanical device is further provided with a controller. The controller outputs a digital signal to a digital-to-analog converter, and the digital-to-analog converter outputs an analog signal to the first electrode and the second electrode through a multiplexer switch. The multiplexer switch includes a first selection switch. The first selection switch is a single-pole double-throw switch. The stationary contact of the first selection switch receives the analog signal output by the digital-to-analog converter, and the movable contact of the first selection switch can selectively output the analog signal to the first electrode or the second electrode. The present invention also provides a driving method for the above driving device. The electrostatically actuated microelectromechanical device of the present invention has a compact structure and low production cost.

Description

Technical Field

[0001] The present invention relates to the technical field of optical communication devices, and specifically, to an electrostatically actuated microelectromechanical device and a driving method for such a device. Background Art

[0002] Electrostatically actuated microelectromechanical systems (MEMS) are widely used in optical devices. The microelectromechanical device can rotate about its own axis to change the tilt angle of the reflection plane, thereby changing the exit angle of the reflected light beam and realizing functions such as optical path switching.

[0003] See Figure 1 , a conventional microelectromechanical device has a rotating bracket. The rotating bracket includes a rectangular outer bracket 11 and a circular inner bracket 12. The inner bracket 12 is rotatably supported on the outer bracket 11. A first strut 21 and a second strut 22 are provided on the outer bracket 11. The first strut 21 and the second strut 22 are arranged at both ends of the outer bracket 11 along a first direction. A first electrode 31 is provided on the first strut 21, and a second electrode 32 is provided on the second strut 22. A third strut 23 and a fourth strut 24 are provided on the inner bracket 12. The third strut 23 and the fourth strut 24 are arranged at both ends of the inner bracket 12 along a second direction. Among them, the first direction and the second direction are perpendicular to each other, and a third electrode 33 is provided on the third strut 23, and a fourth electrode 34 is provided on the fourth strut 24. Common electrodes are plate electrodes or comb electrodes. Also, a mirror is provided on the inner bracket 12, and the rotation of the mirror is driven by driving the rotation of the outer bracket 11 or the inner bracket 12. A ground electrode 35 is provided at the center position of the inner bracket 12.

[0004] See Figure 2, in one-dimensional direction, assume that there are two parallel first substrate 41 and second substrate 42. The second substrate 42 is a fixed substrate and cannot rotate, while the first substrate 41 is a substrate that can rotate clockwise or counterclockwise around the fulcrum 43. A fifth electrode 51 and a sixth electrode 52 are arranged on the surface of the first substrate 41 facing the second substrate 42, and a seventh electrode 53 and an eighth electrode 54 are arranged on the surface of the second substrate 42 facing the first substrate 41. The fifth electrode 51 and the seventh electrode 53 form a pair of electrode pairs, and the sixth electrode 52 and the eighth electrode 54 form another pair of electrode pairs. When the voltage between the electrode pairs changes, the first substrate 41 will rotate around the fulcrum 43. For example, when there is a pressure difference between the fifth electrode 51 and the seventh electrode 53, under the action of electrostatic force, such as when the electrostatic adsorption effect occurs, the first substrate 41 will rotate counterclockwise; when there is a pressure difference between the sixth electrode 52 and the eighth electrode 54, under the action of electrostatic force, the first substrate 41 will rotate clockwise. Therefore, by applying voltages to different electrodes, the first substrate 41 can be rotated clockwise or counterclockwise along the one-dimensional direction.

[0005] Figure 2 The fifth electrode 51 and the sixth electrode 52 in Figure 1 correspond to the first electrode 31 and the second electrode 32 in Figure 2 The seventh electrode 53 and the eighth electrode 54 in Figure 1 correspond to the ground electrode 35 in

[0006] , that is, both the seventh electrode 53 and the eighth electrode 54 are ground electrodes. In this way, by applying different voltages to the first electrode 31 and the second electrode 32, the inclination angle of the outer bracket 11 in the first direction can be changed. Since the inner bracket 12 can rotate with the outer bracket 11, actually, the inclination angle of the mirror in the first direction is changed. Similarly, by applying different voltages to the third electrode 33 and the fourth electrode 34, the inclination angle of the inner bracket 12 in the second direction can be changed. Therefore, by applying different voltages to the first electrode 31, the second electrode 32, the third electrode 33, and the fourth electrode 34, the mirror can be tilted at any angle in the two-dimensional direction.

[0006] However, for the existing electrostatically driven microelectromechanical devices, corresponding driving circuits are respectively arranged for the four electrodes. For example, the invention patent application with the publication number CN108710203A discloses an electrostatically driven MEMS device. Since there are many driving circuits arranged in the existing MEMS devices, the overall structure of the microelectromechanical device is complicated. On the one hand, the production cost of the microelectromechanical device is increased. On the other hand, since different driving circuits may not be able to work synchronously. For example, when voltages are output to two electrodes in the same dimension simultaneously, the inclination angle of the mirror does not meet the expected requirements. Or when the voltages are applied to different electrodes in two dimensions at different times, the inclination angle of the mirror also does not meet the expected requirements. Summary of the Invention

[0007] The first object of the present invention is to provide an electrostatically actuated microelectromechanical device with a simple structure and low production cost.

[0008] The second object of the present invention is to provide a driving method for an electrostatically actuated microelectromechanical device with low driving cost.

[0009] To achieve the above first object, the electrostatically actuated microelectromechanical device provided by the present invention includes at least one electrostatically actuated microelectromechanical component. The electrostatically actuated microelectromechanical component includes a rotating bracket and at least one one-dimensional direction driving unit. The first one-dimensional direction driving unit includes a first electrode and a second electrode disposed in the first direction of the rotating bracket. The first electrode and the second electrode are used to control the rotating bracket to rotate in opposite directions in the first direction. The electrostatically actuated microelectromechanical device is further provided with a controller. The controller outputs a digital signal to a digital-to-analog converter. The digital-to-analog converter outputs an analog signal to the first electrode and the second electrode through a multiplexer switch. The multiplexer switch includes a first selection switch. The first selection switch is a single-pole double-throw switch. The stationary contact of the first selection switch receives the analog signal output by the digital-to-analog converter. The movable contact of the first selection switch can selectively output the analog signal to the first electrode or the second electrode.

[0010] As can be seen from the above solution, the electrostatically actuated microelectromechanical device only sets one controller. The controller outputs a signal to at least one selection switch of the multiplexer switch. One selection switch can select one of the two electrodes in the same one-dimensional direction, thereby changing the voltage applied to one of the two electrodes in the same one-dimensional direction, and can avoid the situation of erroneously applying voltages to the two electrodes in the same one-dimensional direction at the same time. On the one hand, due to the small number of driving circuits, the production cost of the microelectromechanical device is reduced. On the other hand, it can also avoid the problem that the tilt angle of the rotating bracket is inaccurate due to erroneously applying voltages to the electrodes.

[0011] A preferred solution is that the electrostatically actuated microelectromechanical component includes a second one-dimensional direction driving unit. The second one-dimensional direction driving unit includes a third electrode and a fourth electrode disposed in the second direction of the rotating bracket. The third electrode and the fourth electrode are used to control the rotating bracket to rotate in opposite directions in the second direction. The multiplexer switch includes a second selection switch. The second selection switch is a single-pole double-throw switch. The stationary contact of the second selection switch receives the analog signal output by the digital-to-analog converter. The movable contact of the second selection switch can selectively output the analog signal to the third electrode or the fourth electrode.

[0012] It can be seen that the two one-dimensional direction driving units share the signal output by one controller, making the structure of the driving circuit simpler and reducing the production cost of the microelectromechanical device.

[0013] In a preferred solution, an operational amplifier group is provided between the multi-way switch and the first electrode, the second electrode, the third electrode, and the fourth electrode. The analog signal output by the multi-way switch is amplified by the operational amplifier group and then output to the first electrode, the second electrode, the third electrode, and the fourth electrode.

[0014] It can be seen that after the signal output by the controller is amplified by the operational amplifier group, the voltage output to each electrode can be increased, so that the voltage received by each electrode is greater, the rotation angle of the rotating bracket is greater, and the requirements in more usage scenarios can be met.

[0015] A further solution is that the number of one-dimensional direction driving units provided in an electrostatically driven microelectromechanical device is more than two, and the number of selector switches provided in the multi-way switch is equal to the number of one-dimensional direction driving units.

[0016] A further solution is that the multi-way switch receives the signal output by the controller to change the connection state of the movable contact of the first selector switch and / or the movable contact of the second selector switch.

[0017] It can be seen that the controller can not only output the electrical signals that need to be loaded onto each electrode to each selector switch, but also output control signals to each selector switch to change the connection state of each selector switch, so that fewer devices need to be provided in the microelectromechanical device, reducing the production cost of the microelectromechanical device.

[0018] A further solution is that a first support rod and a second support rod are respectively provided on the rotating bracket along a first direction, and the first electrode and the second electrode are respectively located on the first support rod and the second support rod; a third support rod and a fourth support rod are respectively provided on the rotating bracket along a second direction, and the third electrode and the fourth electrode are respectively located on the third support rod and the fourth support rod; the first direction is perpendicular to the second direction.

[0019] It can be seen that a plurality of support rods are respectively provided in two mutually perpendicular directions, and corresponding electrodes are respectively provided on each support rod. By applying voltages to different electrodes, the rotating bracket can be driven to rotate in a two-dimensional direction, realizing the requirement of reflecting incident optical signals at different angles.

[0020] A further solution is that a grounding electrode is provided at the central position of the rotating bracket.

[0021] To achieve the above second object, the driving method of the electrostatically actuated MEMS device provided by the present invention is applied to the above-mentioned electrostatically actuated MEMS device. The method includes: the controller outputs control signals to the first selection switch and the second selection switch, so that the movable contact of the first selection switch selects the first electrode or the second electrode; the controller outputs a digital signal to the digital-to-analog converter, and the digital-to-analog converter converts the digital signal into an analog signal and then outputs it to the first selection switch and the second selection switch, and the first selection switch outputs the analog signal to the first electrode or the second electrode to change the tilt angle of the rotating bracket.

[0022] As can be seen from the above solution, the present invention only outputs signals from one controller to multiple selection switches, thereby applying voltages to multiple electrodes to change the tilt angle of the rotating bracket. Since the number of controllers used is very small and the driving circuit structure is simple, the production cost of the MEMS device can be reduced. In addition, since the two electrodes in the same one-dimensional direction output signals through the same controller switch, it is possible to avoid the situation where signals are applied to the two electrodes in the same one-dimensional direction simultaneously.

[0023] A preferred solution is that the controller obtains the target tilt angle that the rotating bracket needs to rotate, calculates the tilt angle of the rotating bracket in the first direction according to the target tilt angle, and calculates the target voltage value to be applied to the first electrode or the second electrode; the controller outputs the corresponding voltage to the digital-to-analog converter according to the target voltage value to be applied to each electrode.

[0024] Thus, when controlling the rotation of the rotating bracket, the respective tilt directions in each dimension are obtained according to the angle that the mirror needs to tilt, and then the voltages corresponding to each electrode are calculated. The controller applies the corresponding voltages to each electrode, so as to ensure that the rotating bracket can accurately rotate to the corresponding position.

[0025] A further solution is that the number of electrostatically actuated MEMS devices is two or more, and each electrostatically actuated MEMS device is provided with multiple electrodes; the number of selection switches provided by the multi-channel switch is equal to the number of one-dimensional direction driving units, and each selection switch outputs signals to two electrodes arranged in the same one-dimensional direction of the same electrostatically actuated MEMS device; the controller outputs control signals to each selection switch respectively to independently control the tilt angles of each electrostatically actuated MEMS device.

[0026] Thus, one controller can output signals to multiple electrodes of multiple electrostatically actuated MEMS devices, thereby realizing the function of one controller controlling the mirror angle adjustment of multiple electrostatically actuated MEMS devices. Brief Description of the Drawings

[0027] Figure 1 is a structural diagram of an existing electrostatically actuated MEMS device.

[0028] Figure 2 It is a schematic diagram of the working principle of an electrostatically actuated MEMS device in one-dimensional direction.

[0029] Figure 3 It is a structural block diagram of the first embodiment of the electrostatically actuated MEMS device of the present invention.

[0030] Figure 4 It is a schematic diagram of the structures of the digital-to-analog converter and the multiplexer of the first embodiment of the electrostatically actuated MEMS device of the present invention.

[0031] Figure 5 It is a structural block diagram of the second embodiment of the electrostatically actuated MEMS device of the present invention.

[0032] Figure 6 It is a schematic diagram of the structures of the digital-to-analog converter and the multiplexer of the second embodiment of the electrostatically actuated MEMS device of the present invention.

[0033] Figure 7 It is a structural block diagram of the third embodiment of the electrostatically actuated MEMS device of the present invention.

[0034] Figure 8 It is a structural block diagram of the fourth embodiment of the electrostatically actuated MEMS device of the present invention.

[0035] Figure 9 It is a structural block diagram of the fifth embodiment of the electrostatically actuated MEMS device of the present invention.

[0036] Figure 10 It is a structural block diagram of the sixth embodiment of the electrostatically actuated MEMS device of the present invention.

[0037] The present invention will be further described below in conjunction with the accompanying drawings and embodiments. Detailed implementation manners

[0038] The electrostatically actuated MEMS device of the present invention is applied in various optical devices. For example, it can be applied to various different optical devices such as an optical path selector or an optical circulator. The control method of the electrostatically actuated MEMS device of the present invention applies voltages to two electrodes in the same one-dimensional direction of an electrostatically actuated MEMS device in a time-division driving manner, which reduces the production cost of the MEMS device on the one hand and improves the accuracy of controlling the tilting angle of the mirror on the other hand.

[0039] First embodiment:

[0040] The electrostatically actuated MEMS device of this embodiment is provided with a microelectromechanical device, and this microelectromechanical device has a rotating bracket. Preferably, the rotating bracket has an inner bracket and an outer bracket, and the inner bracket is rotatably supported on the outer bracket, and a mirror is provided on the inner bracket. In addition, two support rods are provided on the outer bracket, namely a first support rod and a second support rod. The first support rod and the second support rod are arranged at both ends of the outer bracket along a first direction. A first electrode is provided on the first support rod, and a second electrode is provided on the second support rod. Two support rods are provided on the inner bracket, namely a third support rod and a fourth support rod. The third support rod and the fourth support rod are arranged at both ends of the inner bracket along a second direction. Among them, the first direction and the second direction are perpendicular to each other, and a third electrode is provided on the third support rod, and a fourth electrode is provided on the fourth support rod. Therefore, the first electrode and the second electrode are arranged along the first direction, and the third electrode and the fourth electrode are arranged along the second direction. Since a mirror is provided on the inner bracket, this embodiment can drive the mirror to rotate by driving at least one of the outer bracket and the inner bracket to rotate. In addition, a ground electrode is formed in the middle of the inner bracket.

[0041] It can be understood that this embodiment provides two one-dimensional direction driving units. The first one-dimensional direction driving unit includes the above-mentioned first electrode and second electrode, and the second one-dimensional direction driving unit includes the above-mentioned third electrode and fourth electrode. Among them, the first electrode and the second electrode are used to control the rotating bracket to rotate in opposite directions along the first direction. For example, the first electrode controls the rotating bracket to rotate clockwise in the X direction, while the second electrode controls the rotating bracket to rotate counterclockwise in the X direction. The third electrode and the fourth electrode are used to control the rotating bracket to rotate in opposite directions along the second direction. Since the rotating bracket will not rotate in opposite directions along the same one-dimensional direction at the same time, that is, it will not be necessary to rotate clockwise and counterclockwise in the X direction at the same time. The present invention uses this principle to apply voltages to two electrodes in the same one-dimensional direction in a time-division multiplexing manner, thereby reducing the number of driving circuits.

[0042] In addition, the ground electrode and the electrodes to which voltages are applied (the first electrode, the second electrode, the third electrode, and the fourth electrode) can be interchanged, as long as the settings between the electrodes satisfy the electrical design principles. For example, it is necessary to avoid short circuits or the voltage difference between the plates being always zero.

[0043] See Figure 3 This embodiment also has a controller 110. The controller 110 can be a single-chip microcomputer. The controller 110 outputs a digital signal to the digital-to-analog converter 120, and this digital signal is used to represent the voltage value that needs to be loaded on each electrode. After the digital-to-analog converter 120 converts the digital signal into an analog signal, it outputs it to the multiplexer 130. See Figure 4, the multi-way switch 130 is provided with a plurality of selection switches, for example, including a first selection switch 131 and a second selection switch 132. Both the first selection switch 131 and the second selection switch 132 are single-pole double-throw switching switches. Each selection switch has a stationary contact and a movable contact. Among them, the stationary contact of the first selection switch 131 receives the analog signal output by the digital-to-analog converter 120, and the movable contact can be selectively connected to the first electrode or the second electrode. Figure 4 In Figure 4 , X+ represents the first electrode in the X direction, and X- represents the second electrode in the X direction. Therefore, X+ and X- represent the first electrode and the second electrode respectively. Similarly, the stationary contact of the second selection switch 132 receives the analog signal output by the digital-to-analog converter 120, and the movable contact can be selectively connected to the third electrode or the fourth electrode. Figure 4 In Figure 4 , Y+ represents the first electrode in the Y direction, and Y- represents the second electrode in the Y direction. Therefore, Y+ and Y- represent the third electrode and the fourth electrode respectively.

[0044] The multi-way switch 130 outputs signals to the four electrodes of the electrostatically actuated microelectromechanical device 150. Since the first selection switch 131 and the second selection switch 132 of the multi-way switch 130 receive analog signals, the signals output by the multi-way switch 130 to the four electrodes of the electrostatically actuated microelectromechanical device 150 are analog signals. The four electrodes being loaded with analog signals is equivalent to being loaded with a specific voltage, thereby changing the tilt angle of the inner bracket or the outer bracket, and further driving the mirror to rotate, thus changing the tilt angle of the mirror.

[0045] In addition, the controller 110 also outputs a control signal to the multi-way switch 130 to change the connection state of the movable contacts of the first selection switch 131 and the second selection switch 132. As Figure 4 shown in Figure 4 , the movable contact of the first selection switch 131 is connected to the first electrode X+. When the first selection switch 131 receives an instruction to switch the connection state, the movable contact can be connected to the second electrode X-. At this time, the analog signal output by the digital-to-analog converter 120 can be loaded onto the second electrode X-, and no voltage is applied to the first electrode X+. Similarly, Figure 4 shown in Figure 4 , the movable contact of the second selection switch 132 is connected to the third electrode Y+. When the second selection switch 132 receives an instruction to switch the connection state, the movable contact can be connected to the fourth electrode Y-. At this time, the analog signal output by the digital-to-analog converter 120 can be loaded onto the fourth electrode Y-, and no voltage is applied to the third electrode Y+. Therefore, the first selection switch 131 only applies voltage to one of the two electrodes in the same dimension direction, and does not apply voltage to the two electrodes in the same dimension direction simultaneously.

[0046] In the initial state, the digital-to-analog converter 120 does not apply voltage to each electrode. At this time, the rotating bracket is in the initial state and the mirror does not tilt. When the mirror needs to tilt, the controller needs to obtain the target tilt angle that the rotating bracket needs to rotate, calculate the tilt angles of the rotating bracket in the first direction and the second direction according to the target tilt angle, then calculate the target voltage value applied to the first electrode or the second electrode, and also calculate the target voltage value applied to the third electrode or the fourth electrode. On the one hand, it is necessary to determine whether to apply voltage to the first electrode or the second electrode, switch the connection state of the first selection switch, and it is necessary to determine whether to apply voltage to the third electrode or the fourth electrode, switch the connection state of the second selection switch; on the other hand, it is also necessary to determine the target voltage value applied to each electrode and output the corresponding digital signal according to this target voltage value.

[0047] The controller 110 can output a control signal to the multiplexer switch 130 to change the connection states of the first selection switch 131 and the second selection switch 132, and output a digital signal to the digital-to-analog converter 120, so that the digital-to-analog converter 120 outputs the corresponding analog signal to the first selection switch 131 and the second selection switch 132, thereby realizing the function of applying the target voltage value to a specific electrode.

[0048] It can be seen that the signals received by the four electrodes of the electrostatically actuated microelectromechanical device 150 all come from the same controller 110. The microelectromechanical device only needs to set one controller 110, one digital-to-analog converter 120 and one multiplexer switch 130 to realize the control of the four electrodes. Therefore, the drive circuit structure of the microelectromechanical device is simple and the number of components used is small. On the one hand, it can reduce the volume of the microelectromechanical device and lower the production cost of the microelectromechanical device; on the other hand, by setting the first selection switch 131 and the second selection switch 132, the two electrodes in the same one-dimensional direction will not receive voltage signals at the same time, avoiding the problem of inaccurate rotation angle of the rotating bracket. Further, by the controller 110 synchronously applying control signals to the first selection switch 131 and the second selection switch 132, the first selection switch 131 and the second selection switch 132 can be made to perform switching operations synchronously, avoiding the problem of inaccurate tilt angle of the rotating bracket in the two-dimensional direction caused by the asynchronous switching operations of the first selection switch 131 and the second selection switch 132.

[0049] It should be noted that two one-dimensional direction driving units are provided on the microelectromechanical device of the first embodiment, which respectively drive two electrodes on the X-axis and two electrodes on the Y-axis. In actual application, the microelectromechanical device can be provided with only one one-dimensional direction driving unit, or more than three one-dimensional direction driving units. In addition, the number of selection switches provided by the multi-way switch is equal to the number of one-dimensional direction driving units of the microelectromechanical device, and each selection switch is used to selectively connect to two electrodes corresponding to one of the one-dimensional direction driving units.

[0050] Second Embodiment:

[0051] Refer to Figure 5 , the microelectromechanical device of this embodiment has an electrostatically actuated microelectromechanical device 250, and also has a controller 210, a digital-to-analog converter 220, a multi-way switch 230, and an operational amplifier group 240. Among them, the controller 210 can be a single-chip microcomputer. The controller 210 outputs a digital signal to the digital-to-analog converter 220, and this digital signal is used to represent the voltage value that needs to be loaded on each electrode. After converting the digital signal into an analog signal, the digital-to-analog converter 220 outputs it to the multi-way switch 230. Refer to Figure 6 , a plurality of selection switches are provided in the multi-way switch 230, for example, including a first selection switch 231 and a second selection switch 232. Each selection switch has a stationary contact and a movable contact. Among them, the stationary contact of the first selection switch 231 receives the analog signal output by the digital-to-analog converter 220, and the movable contact can be selectively connected to the first electrode or the second electrode. The stationary contact of the second selection switch 232 receives the analog signal output by the digital-to-analog converter 220, and the movable contact can be selectively connected to the third electrode or the fourth electrode.

[0052] The electrostatically actuated microelectromechanical device 250 has a rotating bracket. The rotating bracket is respectively provided with a first strut and a second strut along the first direction, and the first electrode and the second electrode are respectively located on the first strut and the second strut; the rotating bracket is respectively provided with a third strut and a fourth strut along the second direction, and the third electrode and the fourth electrode are respectively located on the third strut and the fourth strut, and the first direction is perpendicular to the second direction. In addition, a mirror is provided on the rotating bracket, and a ground electrode is provided at the central position of the rotating bracket. The specific structure of the electrostatically actuated microelectromechanical device 250 is the same as that of the electrostatically actuated microelectromechanical device in the first embodiment, and will not be elaborated here.

[0053] Compared with the first embodiment, in this embodiment, an operational amplifier group 240 is provided at the output end of the multi-way switch 230. A plurality of operational amplifiers are provided in the operational amplifier group 240. Each operational amplifier is used to amplify the analog signal output by a selection switch and output the amplified analog signal to the four electrodes of the electrostatically actuated microelectromechanical device 250. In this way, the voltage values applied to each electrode will be amplified, so that the tilt angle of the rotating bracket in the first direction or the second direction is larger, meeting the usage requirements in different scenarios. Further, the amplification factor of each operational amplifier in the operational amplifier group 240 is adjustable. For example, the controller 210 outputs a control signal to each operational amplifier to change the amplification factor of each operational amplifier. In this way, the voltage range applied to each electrode is larger, and the tilt angle of the rotating bracket is larger.

[0054] Third Embodiment:

[0055] See Figure 7 , the microelectromechanical device of this embodiment has two electrostatically actuated microelectromechanical devices, namely the electrostatically actuated microelectromechanical device 351 and the electrostatically actuated microelectromechanical device 352. Both the electrostatically actuated microelectromechanical device 351 and the electrostatically actuated microelectromechanical device 352 are provided with two one-dimensional direction driving units. In addition, the microelectromechanical device also has a controller 310, a digital-to-analog converter 320, a multi-way switch 330, and operational amplifier groups 341 and 342. Among them, the controller 310 can be a single-chip microcomputer. The controller 310 outputs a digital signal to the digital-to-analog converter 320, and this digital signal is used to represent the voltage value to be applied to each electrode. After converting the digital signal into an analog signal, the digital-to-analog converter 320 outputs it to the multi-way switch 330. Among them, a plurality of selection switches are provided in the multi-way switch 330. For example, it includes a first selection switch, a second selection switch, a third selection switch, and a fourth selection switch. Each selection switch is a single-pole double-throw switch, having a stationary contact and a movable contact. The stationary contact of each selection switch receives the analog signal output by the digital-to-analog converter 320, and the movable contact can be selectively connected to one of the two electrodes in the same one-dimensional direction of an electrostatically actuated microelectromechanical device.

[0056] The electrostatically actuated microelectromechanical device 351 has a rotating bracket. Along the first direction, the rotating bracket is respectively provided with a first rod and a second rod, and a first electrode and a second electrode are respectively located on the first rod and the second rod; along the second direction, the rotating bracket is respectively provided with a third rod and a fourth rod, and a third electrode and a fourth electrode are respectively located on the third rod and the fourth rod, and the first direction is perpendicular to the second direction. In addition, a mirror is provided on the rotating bracket, and a ground electrode is provided at the central position of the rotating bracket. The specific structure of the electrostatically actuated microelectromechanical device 351 is the same as that of the electrostatically actuated microelectromechanical device in the first embodiment, and the structure of the electrostatically actuated microelectromechanical device 352 is the same as that of the electrostatically actuated microelectromechanical device 351, which will not be elaborated here.

[0057] Compared with the second embodiment, in this embodiment, two electrostatically actuated microelectromechanical devices 351, 352 and two operational amplifier groups 341, 342 are provided. Each operational amplifier group outputs an amplified voltage to an electrostatically actuated microelectromechanical device.

[0058] It can be seen that the two electrostatically actuated microelectromechanical devices in this embodiment share a set of drive circuits, that is, they share a controller 310, a digital-to-analog converter 320 and a multiplexer 330, making the structure of the microelectromechanical device more compact, the structure simple, and the production cost lower.

[0059] Fourth Embodiment:

[0060] Refer to Figure 8 , the microelectromechanical device in this embodiment has two electrostatically actuated microelectromechanical devices, namely an electrostatically actuated microelectromechanical device 451 and an electrostatically actuated microelectromechanical device 452, and also has a controller 410, a digital-to-analog converter 420 and a multiplexer 430. Among them, the controller 410 can be a single-chip microcomputer. The controller 410 outputs a digital signal to the digital-to-analog converter 420, and this digital signal is used to represent the voltage value to be loaded on each electrode. After converting the digital signal into an analog signal, the digital-to-analog converter 420 outputs it to the multiplexer 430. Among them, multiple selection switches are provided in the multiplexer 430, for example, including a first selection switch, a second selection switch, a third selection switch and a fourth selection switch. Each selection switch has a stationary contact and a movable contact. The stationary contact of each selection switch receives the analog signal output by the digital-to-analog converter 420, and the movable contact can selectively connect to one of the two electrodes in the same dimension direction of an electrostatically actuated microelectromechanical device.

[0061] Furthermore, the first selection switch, the second selection switch, the third selection switch and the fourth selection switch are all high-voltage analog switches, which can withstand a relatively high voltage. In this way, a relatively high voltage can be output to each electrode, making the rotation angle of the rotating bracket larger.

[0062] The electrostatically actuated microelectromechanical device 451 has a rotating bracket. Along the first direction, the rotating bracket is respectively provided with a first support rod and a second support rod, and the first electrode and the second electrode are respectively located on the first support rod and the second support rod. Along the second direction, the rotating bracket is respectively provided with a third support rod and a fourth support rod, and the third electrode and the fourth electrode are respectively located on the third support rod and the fourth support rod, and the first direction is perpendicular to the second direction. In addition, a mirror is provided on the rotating bracket, and a ground electrode is provided at the central position of the rotating bracket. The specific structure of the electrostatically actuated microelectromechanical device 451 is the same as that of the electrostatically actuated microelectromechanical device in the first embodiment, and the structure of the electrostatically actuated microelectromechanical device 452 is the same as that of the electrostatically actuated microelectromechanical device 451, and will not be described in detail.

[0063] Compared with the first embodiment, two electrostatically actuated microelectromechanical devices 451 and 452 are provided in this embodiment. Moreover, the two electrostatically actuated microelectromechanical devices 451 and 452 share a set of drive circuits, that is, they share a controller 410, a digital-to-analog converter 420, and a multiplexer 430, making the structure of the microelectromechanical device more compact, the structure simple, and the production cost lower.

[0064] Fifth embodiment:

[0065] See Figure 9 , the microelectromechanical device of this embodiment has more than three electrostatically actuated microelectromechanical devices, namely electrostatically actuated microelectromechanical devices 551, 552... 553, and also has a controller 510, a digital-to-analog converter 520, a multiplexer 530, and multiple operational amplifier groups 541, 542... 543 are also provided. Among them, the controller 510 can be a single-chip microcomputer. The controller 510 outputs a digital signal to the digital-to-analog converter 520, and this digital signal is used to represent the voltage value to be loaded on each electrode. After converting the digital signal into an analog signal, the digital-to-analog converter 520 outputs it to the multiplexer 530. The multiplexer 530 is provided with a plurality of selector switches. Each selector switch has a stationary contact and a movable contact. The stationary contact of each selector switch receives the analog signal output by the digital-to-analog converter 520, and the movable contact can be selectively connected to one of the two electrodes in the same dimension direction of an electrostatically actuated microelectromechanical device.

[0066] The electrostatically actuated microelectromechanical device 551 has a rotating bracket. Along a first direction, the rotating bracket is respectively provided with a first strut and a second strut, and a first electrode and a second electrode are respectively located on the first strut and the second strut. Along a second direction, the rotating bracket is respectively provided with a third strut and a fourth strut, and a third electrode and a fourth electrode are respectively located on the third strut and the fourth strut, and the first direction is perpendicular to the second direction. In addition, a mirror is provided on the rotating bracket, and a ground electrode is provided at the central position of the rotating bracket. The specific structure of the electrostatically actuated microelectromechanical device 551 is the same as that of the electrostatically actuated microelectromechanical device in the first embodiment, and the structures of other electrostatically actuated microelectromechanical devices are the same as that of the electrostatically actuated microelectromechanical device 551, which will not be elaborated here.

[0067] Compared with the second embodiment, this embodiment is provided with a plurality of electrostatically actuated microelectromechanical devices and a plurality of operational amplifier groups, and the electrostatically actuated microelectromechanical devices and the operational amplifier groups are arranged in one-to-one correspondence, and each operational amplifier group outputs an amplified voltage to an electrostatically actuated microelectromechanical device. In addition, the plurality of electrostatically actuated microelectromechanical devices in this embodiment share a set of drive circuits, that is, they share a controller 510, a digital-to-analog converter 520, and a multiplexer 530, making the structure of the microelectromechanical device more compact, the structure simple, and the production cost lower.

[0068] Sixth Embodiment:

[0069] See Figure 10 , the microelectromechanical device in this embodiment has a plurality of electrostatically actuated microelectromechanical devices, namely electrostatically actuated microelectromechanical devices 651, 652... 653, and also has a controller 610, a digital-to-analog converter 620, and a multiplexer 630. Among them, the controller 610 can be a single-chip microcomputer. The controller 410 outputs a digital signal to the digital-to-analog converter 420, and this digital signal is used to represent the voltage value to be loaded on each electrode. After converting the digital signal into an analog signal, the digital-to-analog converter 620 outputs it to the multiplexer 630. The multiplexer 630 is provided with a plurality of selection switches, and each selection switch has a stationary contact and a movable contact. The stationary contact of each selection switch receives the analog signal output by the digital-to-analog converter 620, and the movable contact can be selectively connected to one of the two electrodes in the same dimension direction of an electrostatically actuated microelectromechanical device.

[0070] The electrostatically actuated microelectromechanical device 651 has a rotating bracket. The rotating bracket is respectively provided with a first strut and a second strut along a first direction, and a first electrode and a second electrode are respectively located on the first strut and the second strut. The rotating bracket is respectively provided with a third strut and a fourth strut along a second direction, and a third electrode and a fourth electrode are respectively located on the third strut and the fourth strut, and the first direction is perpendicular to the second direction. In addition, a mirror is provided on the rotating bracket, and a ground electrode is provided at the central position of the rotating bracket. The specific structure of the electrostatically actuated microelectromechanical device 651 is the same as that of the electrostatically actuated microelectromechanical device in the first embodiment, and the structures of other electrostatically actuated microelectromechanical devices are the same as that of the electrostatically actuated microelectromechanical device 651, which will not be elaborated herein.

[0071] Compared with the first embodiment, multiple electrostatically actuated microelectromechanical devices 651, 652... 653 are provided in this embodiment, and a set of driving circuits, that is, a controller 610, a digital-to-analog converter 620, and a multiplexer 630 are shared by the multiple electrostatically actuated microelectromechanical devices 651, 652... 653, making the structure of the microelectromechanical device more compact, the structure simple, and the production cost lower.

[0072] Finally, it should be emphasized that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, various changes and modifications can be made to the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. An electrostatically driven micro-electromechanical device, comprising at least one electrostatically driven micro-electromechanical device, wherein the electrostatically driven micro-electromechanical device comprises a rotating bracket and at least one one-dimensional direction driving unit, wherein the first one-dimensional direction driving unit comprises a first electrode and a second electrode arranged in a first direction of the rotating bracket, and the first electrode and the second electrode are used to control the rotating bracket to rotate in opposite directions in the first direction; Features ； The electrostatically driven micro-electromechanical device is further provided with a controller, the controller outputs a digital signal to a digital-to-analog converter, the digital-to-analog converter outputs an analog signal to the first electrode and the second electrode through a multi-way switch, wherein the multi-way switch includes a first selection switch, the first selection switch is a single-pole double-throw switch, the stationary contact of the first selection switch receives the analog signal output by the digital-to-analog converter, and the movable contact of the first selection switch can selectively output the analog signal to the first electrode or the second electrode; The selection switch selects one of the first electrode and the second electrode located in the first direction and changes the voltage loaded to one of the first electrode and the second electrode. The first selection switch only applies voltage to one of the first electrode and the second electrode in the same dimensional direction.

2. The electrostatically driven micro-electromechanical device according to claim 1, characterized in that: The electrostatically driven micro-electromechanical device comprises a second one-dimensional direction driving unit, the second one-dimensional direction driving unit comprises a third electrode and a fourth electrode arranged in the second direction of the rotating bracket, the third electrode and the fourth electrode are used to control the rotating bracket to rotate in the opposite direction in the second direction; The multi-way switching switch includes a second selection switch, which is a single-pole double-throw switching switch. The stationary contact of the second selection switch receives the analog signal output by the digital-to-analog converter, and the movable contact of the second selection switch can selectively output the analog signal to the third electrode or the fourth electrode.

3. The electrostatically driven micro-electromechanical device according to claim 2, characterized in that: An operational amplifier group is arranged between the multi-way switch and the first electrode, the second electrode, the third electrode and the fourth electrode. The analog signal output by the multi-way switch is amplified by the operational amplifier group and then output to the first electrode, the second electrode, the third electrode and the fourth electrode.

4. The electrostatically driven micro-electromechanical device according to claim 1, characterized in that: The number of the one-dimensional direction driving units provided in one electrostatically driven micro-electromechanical device is more than two, and the number of the selection switches provided in the multi-way switch is equal to the number of the one-dimensional direction driving units.

5. The electrostatically driven micro-electromechanical device according to claim 2 or 3, characterized in that: The multi-way switch receives the signal output by the controller to change the connection state of the movable contact of the first selection switch and / or the movable contact of the second selection switch.

6. The electrostatically driven micro-electromechanical device according to claim 2 or 3, characterized in that: The rotating bracket is provided with a first support rod and a second support rod on both sides along the first direction, respectively, and the first electrode and the second electrode are respectively located on the first support rod and the second support rod; The rotating bracket is provided with a third support rod and a fourth support rod on both sides along the second direction, respectively, and the third electrode and the fourth electrode are respectively located on the third support rod and the fourth support rod; The first direction is perpendicular to the second direction.

7. The electrostatically driven micro-electromechanical device according to any one of claims 1 to 4, characterized in that: A grounding electrode is arranged at the center of the rotating bracket.

8. A driving method for an electrostatically driven micro-electromechanical device, applied to the electrostatically driven micro-electromechanical device according to any one of claims 1 to 3, characterized in that: include: The controller outputs a control signal to the first selection switch so that the movable contact of the first selection switch switches on the first electrode or the second electrode; The controller outputs a digital signal to a digital-to-analog converter, which converts the digital signal into an analog signal and outputs the analog signal to the first selection switch, which outputs the analog signal to the first electrode or the second electrode to change the tilt angle of the rotating bracket.

9. The driving method of the electrostatically driven micro-electromechanical device according to claim 8, characterized in that: The controller acquires a target tilt angle that the rotating bracket needs to rotate, calculates a tilt angle of the rotating bracket in the first direction according to the target tilt angle, and calculates a target voltage value to be applied to the first electrode or the second electrode; The controller outputs a corresponding voltage to the digital-to-analog converter according to a target voltage value to be applied to each electrode.

10. The driving method of the electrostatically driven micro-electromechanical device according to claim 8 or 9, characterized in that: The number of the electrostatically driven micro-electromechanical devices is more than two, and each of the electrostatically driven micro-electromechanical devices is provided with a plurality of electrodes; The number of selection switches provided in the multi-way switch is equal to the number of the one-dimensional direction driving units, and each of the selection switches outputs a signal to two electrodes of the same electrostatically driven micro-electromechanical device arranged in the same one-dimensional direction; The controller outputs control signals to the selection switches respectively to independently control the tilt angle of each electrostatically driven micro-electromechanical device.

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