Efficient coating machine capable of synchronously forming films on two sides based on magnetic field distribution design

Abstract

The invention relates to the technical field of vacuum coating, in particular to an efficient coating machine capable of synchronously forming films on two sides based on magnetic field distribution design, and solves the problems that the two sides of a Mask for OLED (Organic Light Emitting Diode) production are required to be subjected to coating operation twice due to the fact that the conventional Mask is generally coated by adopting an evaporation manner, and standing and cooling are required for several hours in order to prevent mesh deformation after single coating, so that the working efficiency is high. The device comprises a vacuum coating mechanism, a material mounting mechanism and an aluminum target mounting mechanism, a two-way adjusting mechanism is mounted at the bottom end of the vacuum coating mechanism, the material mounting mechanism is mounted at the front end of the vacuum coating mechanism, and the aluminum target mounting mechanism is mounted at the rear end of the vacuum coating mechanism. And first magnetic plate mechanisms are mounted on the two sides of the vacuum coating mechanism. Movement control is performed on aluminum oxide through the controllable magnetic field, film coating operation can be synchronously performed on the two faces of Mask, the film coating efficiency is effectively improved, and waste of film coating materials is reduced.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to a high-efficiency coating machine for double-sided synchronous film formation based on a magnetic field distribution design. Background Art

[0002] With the rapid development of social economy, OLED technology is becoming more and more popular. OLED is widely used in many fields, including smart phones, TVs, VR / AR, and wearable devices, due to its characteristics of light weight, fast response, transparent display, large viewing angle, low power consumption, wide color gamut, and flexible foldability. OLED technology mainly involves organic semiconductor materials and electroluminescent technology. Traditional LCD technology has been difficult to meet market demand, so OLED technology came into being and gradually became the representative of the new generation of display technology. The continuous maturity of OLED technology and the reduction of costs will promote its application and development in more fields.

[0003] The existing masks used in OLED production are usually coated by evaporation, which requires two coating operations on both sides of the mask. After a single coating, the mesh needs to be left to cool for several hours to prevent deformation, which prolongs the coating time and affects the coating efficiency. Therefore, it does not meet the existing needs. In this regard, we propose an efficient double-sided synchronous film coating machine designed based on magnetic field distribution. Summary of the invention

[0004] The purpose of the present invention is to provide a high-efficiency double-sided synchronous film-forming coating machine designed based on magnetic field distribution, so as to solve the problem mentioned in the above background technology that the existing masks used for OLED production are usually coated by evaporation, and two coating operations are required for both sides of the mask. After a single coating, in order to prevent the mesh from deforming, it needs to be left to cool for several hours, which prolongs the coating time and affects the coating efficiency.

[0005] To achieve the above object, the present invention provides the following technical solutions: A high-efficiency coating machine for double-sided synchronous film formation based on magnetic field distribution design, comprising a vacuum coating mechanism, a material installation mechanism and an aluminum target installation mechanism, wherein a bidirectional adjustment mechanism is installed at the bottom end of the vacuum coating mechanism, a material installation mechanism is installed at the front end of the vacuum coating mechanism, an aluminum target installation mechanism is installed at the rear end of the vacuum coating mechanism, first magnetic plate mechanisms are installed on both sides of the vacuum coating mechanism, a plurality of second magnetic plate mechanisms are installed on the lower end surface of the vacuum coating mechanism, and the bidirectional adjustment mechanism comprises a supporting base, and four supporting legs are fixedly installed on the middle part of the upper end surface of the supporting base; The vacuum coating mechanism comprises a coating box, the four end corners of the coating box are fixedly connected to four supporting legs, a plurality of linearly arranged ionization sputtering units are installed on the upper end surface of the coating box, the ionization sputtering units comprise a power connection installation box, an insulating support plate is installed on the lower end surface of the power connection installation box, a plurality of insulating sleeves are installed between the power connection installation box and the insulating support plate, a supporting spring is provided on the inner side of the insulating sleeve, an insulating seat is installed on the bottom end of the supporting spring, and an ionization connection head is installed on the lower end surface of the insulating seat; The material installation mechanism includes a first sealing plate, which is detachably connected to the front end of the coating box, a first guide support seat is fixedly installed on the bottom end of the first sealing plate, a material installation frame is fixedly installed on the rear end face of the first sealing plate, a glass-based Mask is provided on the inner side of the material installation frame, and guide groove plates are slidably connected to the two side edges of the material installation frame, and a plurality of guide wheels are rotatably connected to the inner side of each guide groove plate.

[0006] Preferably, the bidirectional adjustment mechanism also includes two guide slides fixedly connected to the upper end surface of the support base, wherein a transmission motor is fixedly mounted on one end of one of the guide slides, and an output end of the transmission motor is connected to a transmission screw via a coupling.

[0007] Preferably, the vacuum coating mechanism also includes an exhaust pipe fixedly connected to both sides of the coating box, one end of one of the exhaust pipes is installed with an angle-stirring plate, the upper end surface of the angle-stirring plate is fixedly installed with a control panel, an argon gas delivery pipe is installed on the inner side of the front end of the angle-stirring plate, an oxygen delivery pipe is installed on the inner side of the rear end of the angle-stirring plate, a pressure display gauge is installed on one side of the other exhaust pipe, and a freezing delivery pipe and a water-cooling output pipe are installed on the other side of the exhaust pipe.

[0008] Preferably, the aluminum target mounting mechanism includes a second sealing plate, which is detachably connected to the rear end of the coating box, a second guide support seat is fixedly installed on the bottom end of the second sealing plate, an insulating mounting plate is installed on the upper end of the front end surface of the second sealing plate, two connecting blocks are installed between the insulating mounting plate and the second sealing plate, and a plurality of aluminum target blocks are connected to the inner side of the insulating mounting plate through threads.

[0009] Preferably, the first magnetic plate mechanism and the second magnetic plate mechanism both include a first covering plate, a second covering plate is fixedly mounted on one side of the first covering plate, a plurality of power connection bars are mounted on one side of the second covering plate, a plurality of electromagnets are disposed at the ends of the power connection bars, sealing strips are disposed on the sides of the first covering plate and the second covering plate, and a second clamping frame and a first clamping frame are respectively mounted on both sides of the sealing strips.

[0010] Preferably, both ends of the first guide support seat and the second guide support seat are inserted into the inner sides of the two guide slides and are slidably connected with the guide slides, both ends of the transmission screw are provided with external threads with opposite rotation directions, and both ends of the transmission screw are threadedly connected to the first guide support seat and the second guide support seat, and the first guide support seat and the second guide support seat slide in opposite directions along the axis of the transmission screw, and the second sealing plate is fixedly connected to the rear end of the insulating mounting plate through two connecting blocks, and the plurality of aluminum target blocks are arranged in an array on the inner side of the insulating mounting plate, and the plurality of aluminum target blocks are coaxial with the ionization contact head.

[0011] Preferably, the coating box is fixedly connected to two guide groove plates, the material installation frame is inserted into the inner sides of the two guide groove plates, the two side edges of the material installation frame are slidingly connected to the guide groove plates through a plurality of guide wheels, the material installation frame is clamped and installed with the side edges of the glass-based Mask, and the surface of the glass-based Mask is provided with a plurality of hollow holes.

[0012] Preferably, a vacuum coating chamber is formed between the coating box, the first sealing plate and the second sealing plate, and the argon gas delivery pipe, oxygen delivery pipe, pressure display gauge, refrigeration delivery pipe, water-cooling output pipe and two exhaust pipes all pass through the coating box and are plugged into the inner side of the vacuum coating chamber, and solenoid valves are fixedly provided on the inner sides of the argon gas delivery pipe, oxygen delivery pipe, refrigeration delivery pipe, water-cooling output pipe and two exhaust pipes.

[0013] Preferably, the upper end of the coating box is fixedly connected to a plurality of power connection mounting boxes, a plurality of the insulating sleeves are linearly arranged between the power connection mounting boxes and the insulating support plate, the insulating sleeves are connected to the insulating seat via a supporting spring, the upper end of the ionization connection head is threadedly connected to the insulating seat, and the bottom end of the ionization connection head passes through the insulating support plate and is in close contact with the upper end surface of the aluminum target block.

[0014] Preferably, the second clamping frame is fixedly connected to the first clamping plate, the first clamping frame is fixedly connected to the second clamping plate, the coating box and multiple ionization sputtering units are fixedly connected through the first clamping frame, the sealing strip is arranged between the first and second clamping plates and the coating box, the end of the power strip passes through the second clamping plate and is electrically connected to multiple electromagnets, and the multiple electromagnets are arranged in an array between the first and second clamping plates.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention drives the material installation mechanism and the aluminum target installation mechanism to move toward each other through the transmission screw by the transmission motor. The guide slot plate can roll and guide the material installation frame through multiple guide wheels, thereby maintaining the stability of the material installation frame driving the glass-based mask in the vacuum coating chamber. The ionization contact head can automatically and tightly contact the coating of the aluminum target block under the elastic support of the support spring. The multiple aluminum target blocks arranged in an array can be ionized and form aluminum ions under the action of the ionization contact head. The aluminum ions have kinetic energy when separated from the aluminum target blocks and move inside the vacuum coating chamber, so that the aluminum ions can react with oxygen and produce aluminum oxide. The aluminum oxide can be evenly coated on the upper surface of the glass-based mask under the influence of gravity; 2. The present invention can leak aluminum oxide through the hollow holes, and under the dual effects of the first magnetic plate mechanism and the second magnetic plate mechanism, can drive the aluminum oxide to be uniformly coated on the lower surface of the glass-based mask, thereby realizing the double-sided coating operation of the glass-based mask. When the aluminum oxide moves from the hollow holes to the top of the glass-based mask under the action of the magnetic field, it can be separated from the magnetic field and fall again under the influence of gravity, thereby repeatedly lifting and falling the aluminum oxide, so as to fully coat the aluminum oxide on the outer surface of the glass-based mask and improve the coating effect. The transmission screw is reversed, so that the two ends of the coating box can be separated from the first sealing plate and the second sealing plate at the same time, thereby facilitating the replacement of the glass-based mask and the aluminum target block. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 A top view of the present invention as a whole; Figure 3 A rear side view of the present invention as a whole; Figure 4 It is a schematic diagram of a partial cross-sectional structure of the present invention as a whole; Figure 5 It is a schematic cross-sectional structure diagram of the vacuum coating mechanism of the present invention; Figure 6 It is a structural schematic diagram of the aluminum target installation mechanism of the present invention; Figure 7 For the present invention Figure 5 Schematic diagram of the enlarged structure of the A area in the middle; Figure 8 This is a schematic diagram of the replacement structure of the glass-based Mask of the present invention; Fig. 9 It is a schematic cross-sectional structure diagram of the material installation mechanism of the present invention; Fig.10 It is a structural schematic diagram of the magnetic plate mechanism of the present invention; Fig.11It is a schematic diagram of the cross-sectional structure of the electromagnet of the present invention.

[0017] In the figure: 1. Bidirectional adjustment mechanism; 101. Support base; 102. Guide slide; 103. Transmission motor; 104. Support leg; 105. Transmission screw; 2. Vacuum coating mechanism; 201. Coating box; 202. Install the angle plate; 203. Argon gas delivery pipe; 204. Control panel; 205. Exhaust pipe; 206. Oxygen delivery pipe; 207. Ionization sputtering unit; 208. Pressure display gauge; 209. Refrigeration delivery pipe; 210. Water cooling output pipe; 211. Power connection installation box; 212. Insulation sleeve; 213. Support spring; 214. Insulation seat; 215. Ionization connection head; 216. Insulation Support plate; 3. Material installation mechanism; 301. First sealing plate; 302. First guide support seat; 303. Guide groove plate; 304. Guide wheel; 305. Material installation frame; 306. Glass-based Mask; 4. Aluminum target installation mechanism; 401. Second sealing plate; 402. Second guide support seat; 403. Insulating installation plate; 404. Aluminum target block; 405. Connecting block; 5. First magnetic plate mechanism; 501. First covering plate; 502. First clamping frame; 503. Power connection strip; 504. Second clamping frame; 505. Sealing strip; 506. Electromagnet; 507. Second covering plate; 6. Second magnetic plate mechanism. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0019] The transmission motor 103 (model GV50-3.7KW-60-S) mentioned in the present invention can be purchased from the market or obtained through private customization.

[0020] See also Figures 1 to 5 An embodiment of the present invention is as follows: a high-efficiency coating machine for double-sided synchronous film formation based on magnetic field distribution design, comprising a vacuum coating mechanism 2, a material installation mechanism 3 and an aluminum target installation mechanism 4, a bidirectional adjustment mechanism 1 is installed at the bottom end of the vacuum coating mechanism 2, the bidirectional adjustment mechanism 1 comprises a support base 101, four support legs 104 are fixedly installed in the middle of the upper end surface of the support base 101, two guide slides 102 are fixedly installed on the upper end surface of the support base 101, one end of one of the guide slides 102 is fixedly installed with a transmission motor 103, the output end of the transmission motor 103 is connected with a transmission screw 105 through a coupling, and when the transmission screw 105 is rotated, it can drive the material installation mechanism 3 and the aluminum target installation mechanism 4 to move in opposite directions or in opposite directions.

[0021] See also Figures 1 to 8The vacuum coating mechanism 2 includes a coating box 201, and the four end corners of the coating box 201 are fixedly connected to the four supporting legs 104. The coating box 201 is fixedly installed with exhaust pipes 205 on both sides, one end of one of the exhaust pipes 205 is installed with an angle stirring plate 202, and the upper end surface of the angle stirring plate 202 is fixedly installed with a control panel 204. The inner side of the front end of the angle stirring plate 202 is installed with an argon gas delivery pipe 203, and the inner side of the rear end of the angle stirring plate 202 is installed with an oxygen delivery pipe 206. A pressure display gauge 208 is installed on one side of another exhaust pipe 205, and a freezing delivery pipe 209 and a water-cooled output pipe 210 are installed on the other side of the exhaust pipe 205. The vacuum coating chamber is air-extracted through the exhaust pipe 205 to form a vacuum state, and the pressure is displayed through the pressure display gauge 208. The upper end surface of the coating box 201 is equipped with a plurality of linearly arranged ionization sputtering units 207, and the ionization sputtering units 207 include a power connection installation box 211. The upper end of the coating box 201 is fixedly connected to the plurality of power connection installation boxes 211, and the lower end surface of the power connection installation box 211 is equipped with an insulating support plate 216. A plurality of insulating sleeves 212 are installed between the power connection installation box 211 and the insulating support plate 216. The plurality of insulating sleeves 212 are linearly arranged between the power connection installation box 211 and the insulating support plate 216, and a support spring 213 is provided on the inner side of the insulating sleeve 212. An insulating seat 214 is installed at the bottom end of the support spring 213, and the insulating sleeve 212 is connected to the insulating seat 214 through the support spring 213. An ionization contact head 215 is installed on the lower end surface of the insulating seat 214. The upper end of the ionization contact head 215 is connected to the insulating seat 214 through a thread. The bottom end of the ionization contact head 215 passes through the insulating support plate 216 and is in contact with the upper end surface of the aluminum target block 404. Under the elastic support of the support spring 213, the ionization contact head 215 can automatically and tightly contact the coating of the aluminum target block 404 to maintain the stability of the power connection.

[0022] See also Figures 5 to 9The front end of the vacuum coating mechanism 2 is equipped with a material installation mechanism 3, and the material installation mechanism 3 includes a first sealing plate 301, and the first sealing plate 301 is detachably connected to the front end of the coating box 201. The bottom end of the first sealing plate 301 is fixedly installed with a first guide support seat 302, and the rear end surface of the first sealing plate 301 is fixedly installed with a material installation frame 305. A glass base Mask 306 is provided on the inner side of the material installation frame 305. The material installation frame 305 is installed by clamping with the side of the glass base Mask 306. The surface of the glass base Mask 306 is provided with a plurality of hollow holes. 05 are slidably connected to the two side edges with guide groove plates 303, the coating box 201 is fixedly connected to the two guide groove plates 303, the inner side of each guide groove plate 303 is rotatably connected to a plurality of guide wheels 304, the material installation frame 305 is plugged into the inner side of the two guide groove plates 303, the two side edges of the material installation frame 305 are slidably connected to the guide groove plates 303 through a plurality of guide wheels 304, the guide groove plates 303 can roll and guide the material installation frame 305 through a plurality of guide wheels 304, thereby maintaining the stability of the material installation frame 305 driving the glass-based Mask 306 in the vacuum coating chamber.

[0023] See also Figures 5 to 8 , an aluminum target mounting mechanism 4 is installed at the rear end of the vacuum coating mechanism 2, and the aluminum target mounting mechanism 4 includes a second sealing plate 401, and the second sealing plate 401 is detachably connected to the rear end of the coating box 201, and a second guide support seat 402 is fixedly installed at the bottom end of the second sealing plate 401, and both ends of the first guide support seat 302 and the second guide support seat 402 are plugged into the inner sides of the two guide slides 102 and are slidably connected to the guide slides 102, and both ends of the transmission screw 105 are provided with external threads with opposite rotation directions, and both ends of the transmission screw 105 are connected to the first guide support seat 302 and the second guide support seat 402 by threads, and the first guide support seat 302 and the second guide support seat 402 slide in opposite directions along the axis of the transmission screw 105, and the two ends of the coating box 201 can be separated from the first sealing plate 301 and the second sealing plate 401 at the same time, so as to facilitate the replacement of the glass-based Mask 306 and the aluminum target block 404; An insulating mounting plate 403 is installed at the upper end of the front end face of the second sealing plate 401, and two connecting blocks 405 are installed between the insulating mounting plate 403 and the second sealing plate 401. A plurality of aluminum target blocks 404 are connected to the inner side of the insulating mounting plate 403 through threads, and the second sealing plate 401 and the rear end of the insulating mounting plate 403 are fixedly connected by two connecting blocks 405. The plurality of aluminum target blocks 404 are arranged in an array on the inner side of the insulating mounting plate 403, and the plurality of aluminum target blocks 404 are coaxial with the ionization connector 215. The plurality of aluminum target blocks 404 can be ionized and form aluminum ions under the action of the ionization connector 215.

[0024] See also Figure 1 and Figure 3 A vacuum coating chamber is formed between the coating box 201, the first sealing plate 301 and the second sealing plate 401. The argon gas delivery pipe 203, the oxygen delivery pipe 206, the pressure display gauge 208, the freezing delivery pipe 209, the water-cooled output pipe 210 and the two exhaust pipes 205 all pass through the coating box 201 and are plugged into the inner side of the vacuum coating chamber. Solenoid valves are fixedly provided on the inner sides of the argon gas delivery pipe 203, the oxygen delivery pipe 206, the freezing delivery pipe 209, the water-cooled output pipe 210 and the two exhaust pipes 205. Argon and oxygen can be injected into the vacuum coating chamber in sequence through the argon gas delivery pipe 203 and the oxygen delivery pipe 206.

[0025] See also Figure 5 , Fig.10 and Fig.11 The first magnetic plate mechanism 5 is installed on both sides of the vacuum coating mechanism 2, and a plurality of second magnetic plate mechanisms 6 are installed on the lower end surface of the vacuum coating mechanism 2. The first magnetic plate mechanism 5 and the second magnetic plate mechanism 6 both include a first covering plate 501, and a second covering plate 507 is fixedly installed on one side of the first covering plate 501. The sides of the first covering plate 501 and the second covering plate 507 are provided with sealing strips 505. The sealing strips 505 are arranged between the first covering plate 501 and the second covering plate 507 and the coating box 201. A second clamping frame 504 and a first clamping frame 502 are respectively installed on both sides of the sealing strip 505, the second clamping frame 504 is fixedly connected to the first cladding plate 501, and the first clamping frame 502 is fixedly connected to the second cladding plate 507, the sealing strip 505 can be clamped by the first clamping frame 502 and the second clamping frame 504, and then the sealing strip 505 is used to maintain the sealing stability of the first magnetic plate mechanism 5 and the second magnetic plate mechanism 6 when installed with the coating box 201; A plurality of power connection bars 503 are installed on one side of the second cladding plate 507, and a plurality of electromagnets 506 are provided at the end of the power connection bars 503. The coating box 201 and the plurality of ionization sputtering units 207 are fixedly connected via the first clamping frame 502. The end of the power connection bar 503 passes through the second cladding plate 507 and is electrically connected to the plurality of electromagnets 506. The plurality of electromagnets 506 are arranged in an array between the first cladding plate 501 and the second cladding plate 507. The power connection bars 503 are used to connect the plurality of electromagnets 506 and control the current, so that the plurality of electromagnets 506 can push the aluminum oxide when it is under the glass-based Mask 306.

[0026] In summary, the glass-based Mask 306 that needs to be double-layer coated is clamped and installed on the inner side of the material installation frame 305, the power is turned on, and multiple aluminum target blocks 404 are arranged in an array on the inner side of the insulating mounting plate 403 and connected to the insulating mounting plate 403 through threads, and the transmission motor 103 is started, so that the transmission motor 103 drives the material installation mechanism 3 and the aluminum target installation mechanism 4 to move toward each other through the transmission screw 105 under the support of the support base 101, and then the first sealing plate 301 and the second sealing plate 401 can form a vacuum coating chamber when they are fitted and installed with the coating box 201; The guide groove plate 303 can guide the material installation frame 305 in a rolling manner through a plurality of guide wheels 304, thereby maintaining the stability of the material installation frame 305 driving the glass-based Mask 306 in the vacuum coating chamber. When the second sealing plate 401 drives a plurality of aluminum target blocks 404 to be plugged into the inner side of the coating box 201 through the insulating mounting plate 403, the ionization contact head 215 can automatically and closely contact the coating of the aluminum target block 404 under the elastic support of the support spring 213; The external air pump extracts air from the vacuum coating chamber through the exhaust pipe 205 to form a vacuum state, cools the vacuum coating chamber through the water cooling output pipe 210, and condenses the water vapor inside the vacuum coating chamber into frost through the freezing delivery pipe 209, inputs argon into the vacuum coating chamber through the argon delivery pipe 203, and then injects oxygen through the oxygen delivery pipe 206, and at the same time, the ionization connection head 215 and the power bar 503 are energized, so that the multiple aluminum target blocks 404 arranged in an array can be ionized and form aluminum ions under the action of the ionization connection head 215; When aluminum ions are separated from the aluminum target block 404, they have kinetic energy and move inside the vacuum coating chamber, so that the aluminum ions can react with oxygen and produce aluminum oxide. Aluminum oxide can be uniformly coated on the upper surface of the glass-based Mask 306 under the influence of gravity. A plurality of hollow holes are provided on the surface of the glass-based Mask 306, so that the aluminum oxide can be leaked downward through the hollow holes. At this time, a magnetic field is generated by two symmetrically installed first magnetic plate mechanisms 5 and the aluminum oxide under the glass-based Mask 306 can be pushed laterally. A plurality of linearly arranged second magnetic plate mechanisms 6 can generate a uniform magnetic field at the bottom of the coating box 201 and the aluminum oxide under the glass-based Mask 306 can be pushed up. Under the dual action of the first magnetic plate mechanism 5 and the second magnetic plate mechanism 6, the aluminum oxide can be driven to be uniformly coated on the lower surface of the glass-based Mask 306, thereby realizing the double-sided coating operation of the glass-based Mask 306. When the aluminum oxide moves from the hollow hole to the top of the glass-based Mask 306 under the action of the magnetic field, it can be separated from the magnetic field and fall again under the influence of gravity, so that the aluminum oxide can be repeatedly lifted up and dropped, so that the aluminum oxide can be fully coated on the outer surface of the glass-based Mask 306, thereby improving the coating effect. The multiple second magnetic plate mechanisms 6 generate a uniform planar magnetic field, and the two first magnetic plate mechanisms 5 generate a time-varying magnetic field, so that the moving direction of the aluminum oxide under the glass-based Mask 306 is controlled by the joint action of the first magnetic plate mechanism 5 and the second magnetic plate mechanism 6, and the transmission screw 105 is reversed, so that the first guide support seat 302 drives the first sealing plate 301 and the second guide support seat 402 drives the second sealing plate 401 to move in opposite directions, so that the two ends of the coating box 201 can be separated from the first sealing plate 301 and the second sealing plate 401 at the same time, so that the glass-based Mask 306 and the aluminum target block 404 can be replaced.

[0027] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A high-efficiency double-sided synchronous film-forming coating machine based on magnetic field distribution design, comprising a vacuum coating mechanism (2), a material installation mechanism (3) and an aluminum target installation mechanism (4), characterized in that: The bottom end of the vacuum coating mechanism (2) is installed with a bidirectional adjustment mechanism (1), the front end of the vacuum coating mechanism (2) is installed with a material installation mechanism (3), the rear end of the vacuum coating mechanism (2) is installed with an aluminum target installation mechanism (4), both sides of the vacuum coating mechanism (2) are installed with a first magnetic plate mechanism (5), and the lower end surface of the vacuum coating mechanism (2) is installed with a plurality of second magnetic plate mechanisms (6), and the bidirectional adjustment mechanism (1) comprises a support base (101), the support base ( The vacuum coating mechanism (2) comprises a coating box (201), the four end corners of the coating box (201) are fixedly connected to the four support legs (104), the upper end surface of the coating box (201) is equipped with a plurality of linearly arranged ionization sputtering units (207), the ionization sputtering units (207) include an electrical connection installation box (211), and the lower end surface of the electrical connection installation box (211) is equipped with an insulating support plate (211). 6), a plurality of insulating sleeves (212) are installed between the power connection installation box (211) and the insulating support plate (216), a support spring (213) is provided on the inner side of the insulating sleeve (212), an insulating seat (214) is installed at the bottom end of the support spring (213), and an ionization power connection head (215) is installed on the lower end surface of the insulating seat (214); the material installation mechanism (3) comprises a first sealing plate (301), the first sealing plate (301) and the front end of the coating box (201) are connected to each other. The first sealing plate (301) is detachably connected at both ends, a first guide support seat (302) is fixedly installed at the bottom end of the first sealing plate (301), a material installation frame (305) is fixedly installed on the rear end surface of the first sealing plate (301), a glass-based mask (306) is provided on the inner side of the material installation frame (305), and guide groove plates (303) are slidably connected to the two side edges of the material installation frame (305), and a plurality of guide wheels (304) are rotatably connected to the inner side of each guide groove plate (303).

2. The high-efficiency double-sided synchronous film forming coating machine based on magnetic field distribution design according to claim 1 is characterized in that: The bidirectional adjustment mechanism (1) further comprises two guide slides (102) fixedly connected to the upper end surface of the support base (101), wherein a transmission motor (103) is fixedly mounted on one end of one of the guide slides (102), and an output end of the transmission motor (103) is connected to a transmission screw (105) via a coupling.

3. The high-efficiency double-sided synchronous film forming coating machine based on magnetic field distribution design according to claim 2 is characterized in that: The vacuum coating mechanism (2) also includes an exhaust pipe (205) fixedly connected to both sides of the coating box (201), wherein one end of one of the exhaust pipes (205) is installed with an angle-stirring plate (202), the upper end surface of the angle-stirring plate (202) is fixedly installed with a control panel (204), the inner side of the front end of the angle-stirring plate (202) is installed with an argon gas delivery pipe (203), the inner side of the rear end of the angle-stirring plate (202) is installed with an oxygen delivery pipe (206), one side of the other exhaust pipe (205) is installed with a pressure display gauge (208), and the other side of the exhaust pipe (205) is installed with a freezing delivery pipe (209) and a water-cooling output pipe (210).

4. The high-efficiency double-sided synchronous film forming coating machine based on magnetic field distribution design according to claim 3 is characterized in that: The aluminum target mounting mechanism (4) comprises a second sealing plate (401), the second sealing plate (401) is detachably connected to the rear end of the coating box (201), a second guide support seat (402) is fixedly mounted on the bottom end of the second sealing plate (401), an insulating mounting plate (403) is mounted on the upper end of the front end surface of the second sealing plate (401), two connecting blocks (405) are mounted between the insulating mounting plate (403) and the second sealing plate (401), and a plurality of aluminum target blocks (404) are connected to the inner side of the insulating mounting plate (403) via threads.

5. The high-efficiency double-sided synchronous film forming coating machine based on magnetic field distribution design according to claim 4 is characterized in that: The first magnetic plate mechanism (5) and the second magnetic plate mechanism (6) both comprise a first covering plate (501), a second covering plate (507) being fixedly mounted on one side of the first covering plate (501), a plurality of power connection bars (503) being mounted on one side of the second covering plate (507), a plurality of electromagnets (506) being disposed at the ends of the power connection bars (503), sealing strips (505) being disposed on the sides of the first covering plate (501) and the second covering plate (507), and a second clamping frame (504) and a first clamping frame (502) being mounted on both sides of the sealing strip (505), respectively.

6. The high-efficiency double-sided synchronous film forming coating machine based on magnetic field distribution design according to claim 5, characterized in that: Both ends of the first guide support seat (302) and the second guide support seat (402) are plugged into the inner sides of the two guide slides (102) and are slidably connected to the guide slides (102); both ends of the transmission screw (105) are provided with external threads with opposite rotation directions; both ends of the transmission screw (105) are connected to the first guide support seat (302) and the second guide support seat (402) via threads; the first guide support seat (302) and the second guide support seat (402) slide in opposite or opposite directions along the axis of the transmission screw (105); the rear end of the second sealing plate (401) and the insulating mounting plate (403) are fixedly connected via two connecting blocks (405); a plurality of the aluminum target blocks (404) are arranged in an array on the inner side of the insulating mounting plate (403); and the plurality of the aluminum target blocks (404) are coaxial with the ionization contact head (215).

7. The high-efficiency double-sided synchronous film forming coating machine based on magnetic field distribution design according to claim 6 is characterized in that: The coating box (201) is fixedly connected to the two guide groove plates (303), the material installation frame (305) is plugged into the inner side of the two guide groove plates (303), the two side edges of the material installation frame (305) are slidably connected to the guide groove plates (303) via a plurality of guide wheels (304), the material installation frame (305) is clamped and installed with the side edges of the glass-based mask (306), and the surface of the glass-based mask (306) is provided with a plurality of hollow holes.

8. The high-efficiency double-sided synchronous film forming coating machine based on magnetic field distribution design according to claim 7 is characterized in that: A vacuum coating chamber is formed between the coating box (201), the first sealing plate (301) and the second sealing plate (401); the argon gas delivery pipe (203), the oxygen delivery pipe (206), the pressure display gauge (208), the freezing delivery pipe (209), the water-cooling output pipe (210) and the two exhaust pipes (205) all pass through the coating box (201) and are plugged into the inner side of the vacuum coating chamber; solenoid valves are fixedly provided on the inner sides of the argon gas delivery pipe (203), the oxygen delivery pipe (206), the freezing delivery pipe (209), the water-cooling output pipe (210) and the two exhaust pipes (205).

9. The high-efficiency double-sided synchronous film-forming coating machine based on magnetic field distribution design according to claim 8, characterized in that: The upper end of the coating box (201) is fixedly connected to a plurality of power connection installation boxes (211); the plurality of insulating sleeves (212) are linearly arranged between the power connection installation boxes (211) and the insulating support plate (216); the insulating sleeves (212) are connected to the insulating seat (214) via a supporting spring (213); the upper end of the ionization connection head (215) is connected to the insulating seat (214) via a thread; the bottom end of the ionization connection head (215) passes through the insulating support plate (216) and is in contact with the upper end surface of the aluminum target block (404).

10. The high-efficiency double-sided synchronous film forming coating machine based on magnetic field distribution design according to claim 9, characterized in that: The second clamping frame (504) is fixedly connected to the first cladding plate (501), the first clamping frame (502) is fixedly connected to the second cladding plate (507), the coating box (201) and the plurality of ionization sputtering units (207) are fixedly connected via the first clamping frame (502), the sealing strip (505) is arranged between the first cladding plate (501) and the second cladding plate (507) and the coating box (201), the end of the power strip (503) passes through the second cladding plate (507) and is electrically connected to the plurality of electromagnets (506), and the plurality of electromagnets (506) are arranged in an array between the first cladding plate (501) and the second cladding plate (507).

Images