An efficient coating machine with double-sided synchronous film formation designed based on magnetic field distribution

Abstract

The present invention relates to the technical field of vacuum coating, and specifically relates to an efficient coating machine for double-sided synchronous film formation designed based on magnetic field distribution, which solves the problem that in the existing technology, the Mask used for OLED production is usually coated by evaporation, and two coating operations need to be performed on both sides of the Mask. After single coating, it is necessary to stand still and cool for several hours to prevent the deformation of the mesh, which prolongs the coating time and affects the coating efficiency. The coating machine includes a vacuum coating mechanism, a material installation mechanism, and an aluminum target installation mechanism. A two-way adjustment mechanism is installed at the bottom of the vacuum coating mechanism, a material installation mechanism is installed at the front end of the vacuum coating mechanism, an aluminum target installation mechanism is installed at the rear end of the vacuum coating mechanism, and a first magnetic plate mechanism is installed on both sides of the vacuum coating mechanism. By controlling the movement of alumina through a controllable magnetic field, the present invention can perform coating operations on both sides of the Mask synchronously, effectively improving the coating efficiency and reducing the waste of coating materials.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and specifically to an efficient coating machine for double-sided synchronous film formation designed based on magnetic field distribution. Background Technique

[0002] With the rapid development of social economy, OLED technology has become more and more popular. Due to its characteristics such as thinness, fast response, transparent display, large viewing angle, low power consumption, wide color gamut value, and flexibility and foldability, OLED is widely used in multiple fields, including smart phones, TVs, VR / AR, and wearable devices. OLED technology mainly involves organic semiconductor materials and electroluminescence technology; the traditional LCD technology has been difficult to meet the market demand. Therefore, OLED technology has emerged and gradually become the representative of the new generation of display technology. The continuous maturity of OLED technology and the reduction of costs will promote its application and development in more fields.

[0003] Currently, the Mask used for OLED production is usually coated by evaporation. It is necessary to perform two coating operations on both sides of the Mask. After a single coating, it is necessary to stand still and cool for several hours to prevent the mesh from deforming, which prolongs the coating time and affects the coating efficiency. Therefore, it does not meet the existing requirements. For this reason, we propose an efficient coating machine for double-sided synchronous film formation designed based on magnetic field distribution. Summary of the Invention

[0004] The purpose of the present invention is to provide an efficient coating machine for double-sided synchronous film formation designed based on magnetic field distribution, so as to solve the problem mentioned in the above background technique that currently, the Mask used for OLED production is usually coated by evaporation, and it is necessary to perform two coating operations on both sides of the Mask. After a single coating, it is necessary to stand still and cool for several hours to prevent the mesh from deforming, which prolongs the coating time and affects the coating efficiency.

[0005] To achieve the above purpose, the present invention provides the following technical solutions:

[0006] An efficient coating machine for double-sided synchronous film formation designed based on magnetic field distribution includes a vacuum coating mechanism, a material installation mechanism, and an aluminum target installation mechanism. A two-way adjustment mechanism is installed at the bottom end of the vacuum coating mechanism. A material installation mechanism is installed at the front end of the vacuum coating mechanism. An aluminum target installation mechanism is installed at the rear end of the vacuum coating mechanism. First magnetic plate mechanisms are installed on both sides of the vacuum coating mechanism. A plurality of second magnetic plate mechanisms are installed on the lower end surface of the vacuum coating mechanism. The two-way adjustment mechanism includes a support base, and four support legs are fixedly installed in the middle of the upper end surface of the support base;

[0007] The vacuum coating mechanism includes a coating box, and four end corners of the coating box are fixedly connected to four support legs. A plurality of linearly arranged ionization sputtering units are installed on the upper end surface of the coating box. The ionization sputtering unit includes a power connection mounting box, an insulating support plate is installed on the lower end surface of the power connection mounting box, a plurality of insulating sleeves are installed between the power connection mounting box and the insulating support plate, a support spring is arranged inside the insulating sleeve, an insulating seat is installed at the bottom end of the support spring, and an ionization power connection head is installed on the lower end surface of the insulating seat;

[0008] The material mounting mechanism includes a first sealing plate, the first sealing plate is detachably connected to the front end of the coating box, a first guiding support seat is fixedly installed at the bottom end of the first sealing plate, a material mounting frame is fixedly installed on the rear end surface of the first sealing plate, a glass substrate Mask is arranged inside the material mounting frame, and guide groove plates are slidably connected to both sides of the material mounting frame, and a plurality of guide wheels are rotatably connected to the inside of each guide groove plate.

[0009] Preferably, the bidirectional adjustment mechanism further includes two guiding sliding plates fixedly connected to the upper end surface of the support base. A driving motor is fixedly installed at one end of one of the guiding sliding plates, and the output end of the driving motor is connected to a driving screw through a coupling.

[0010] Preferably, the vacuum coating mechanism further includes exhaust pipes fixedly connected to both sides of the coating box. An installation stirring corner plate is installed at one end of one of the exhaust pipes, a control panel is fixedly installed on the upper end surface of the installation stirring corner plate, an argon gas delivery pipe is installed inside the front end of the installation stirring corner plate, an oxygen delivery pipe is installed inside the rear end of the installation stirring corner plate, a pressure display meter is installed on one side of the other exhaust pipe, and a refrigeration delivery pipe and a water cooling output pipe are installed on the other side of the exhaust pipe.

[0011] Preferably, the aluminum target mounting mechanism includes a second sealing plate, the second sealing plate is detachably connected to the rear end of the coating box, a second guiding support seat is fixedly installed at the bottom end of the second sealing plate, an insulating mounting plate is installed at the upper end of the front end surface of the second sealing plate, two connecting blocks are installed between the insulating mounting plate and the second sealing plate, and a plurality of aluminum target blocks are connected by threads inside the insulating mounting plate.

[0012] Preferably, both the first magnetic plate mechanism and the second magnetic plate mechanism include a first covering plate, a second covering plate is fixedly installed on one side of the first covering plate, a plurality of power connection strips are installed on one side of the second covering plate, a plurality of electromagnets are arranged at the ends of the power connection strips, sealing strips are arranged on the sides of the first covering plate and the second covering plate, and a second pressing frame and a first pressing frame are installed on both sides of the sealing strip respectively.

[0013] Preferably, both ends of the first guiding and supporting seat and the second guiding and supporting seat are inserted into the inner sides of the two guiding slide plates and are slidably connected to the guiding slide plates. External threads with opposite helix directions are provided at both ends of the driving screw rod. Both ends of the driving screw rod are threadedly connected to the first guiding and supporting seat and the second guiding and supporting seat. The first guiding and supporting seat and the second guiding and supporting seat slide in opposite or the same directions along the axis of the driving screw rod. The second sealing plate is fixedly connected to the rear end of the insulating mounting plate through two connecting blocks. A plurality of aluminum target blocks are arranged in an array on the inner side of the insulating mounting plate, and the plurality of aluminum target blocks are coaxial with the ionization electrical connection head.

[0014] Preferably, the coating box is fixedly connected to the two guiding channel plates. The material mounting frame is inserted into the inner sides of the two guiding channel plates. Both side edges of the material mounting frame are slidably connected to the guiding channel plates through a plurality of guide wheels. The material mounting frame is snap-fitted and installed with the side edge of the glass substrate Mask. A plurality of hollow holes are provided on the surface of the glass substrate Mask.

[0015] Preferably, a vacuum coating chamber is formed among the coating box, the first sealing plate and the second sealing plate. The argon gas delivery pipe, the oxygen delivery pipe, the pressure display meter, the refrigeration delivery pipe, the water-cooling output pipe and the two air extraction pipes all penetrate through the coating box and are inserted into the inner side of the vacuum coating chamber. Solenoid valves are fixedly provided inside the argon gas delivery pipe, the oxygen delivery pipe, the refrigeration delivery pipe, the water-cooling output pipe and the two air extraction pipes.

[0016] Preferably, the upper end of the coating box is fixedly connected to a plurality of electrical connection mounting boxes. A plurality of insulating sleeves are linearly arranged between the electrical connection mounting boxes and the insulating support plate. The insulating sleeves are connected to the insulating seat through support springs. The upper end of the ionization electrical connection head is threadedly connected to the insulating seat. The bottom end of the ionization electrical connection head penetrates through the insulating support plate and is in close contact with the upper end surface of the aluminum target block.

[0017] Preferably, the second pressing frame is fixedly connected to the first covering plate. The first pressing frame is fixedly connected to the second covering plate. The coating box and a plurality of ionization sputtering units are all fixedly connected through the first pressing frame. The sealing strip is arranged between the first covering plate, the second covering plate and the coating box. The end of the electrical connection strip penetrates through the second covering plate and is electrically connected to a plurality of electromagnets. A plurality of electromagnets are arranged in an array between the first covering plate and the second covering plate.

[0018] Compared with the prior art, the beneficial effects of the present invention are:

[0019] 1. In the present invention, a driving motor drives a material mounting mechanism and an aluminum target mounting mechanism to move towards each other through a driving screw. The guiding groove plate can roll-guide the material mounting frame through a plurality of guide wheels, thereby maintaining the stability of the material mounting frame in the glass-based Mask vacuum coating chamber. The ionization electrical connector can automatically and closely contact the coating of the aluminum target block under the elastic support of the support spring. A plurality of aluminum target blocks arranged in an array can be ionized under the action of the ionization electrical connector to form aluminum ions. When the aluminum ions are separated from the aluminum target block, they have kinetic energy and move inside the vacuum coating chamber. Then, the aluminum ions can react with oxygen to produce aluminum oxide, and the aluminum oxide can be evenly coated on the upper surface of the glass-based Mask under the influence of gravity;

[0020] 2. In the present invention, the aluminum oxide can leak downward through the hollow holes, and under the dual action of the first magnetic plate mechanism and the second magnetic plate mechanism, it can drive the aluminum oxide to be evenly coated on the lower surface of the glass-based Mask, thereby realizing the double-sided coating operation of the glass-based Mask. When the aluminum oxide moves from the hollow holes to above the glass-based Mask under the action of the magnetic field, it can be separated from the magnetic field and then fall again under the influence of gravity. Then, the aluminum oxide can be repeatedly pushed up and fall, which is convenient for fully coating the aluminum oxide on the outer surface of the glass-based Mask and improving the coating effect. Reverse the driving screw, and both ends of the coating box can be separated from the first sealing plate and the second sealing plate at the same time, which is convenient for replacing the glass-based Mask and the aluminum target block. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic structural diagram of the whole of the present invention;

[0022] Figure 2 is a top view of the whole of the present invention;

[0023] Figure 3 is a rear view of the whole of the present invention;

[0024] Figure 4 is a schematic partial sectional structural diagram of the whole of the present invention;

[0025] Figure 5 is a schematic sectional structural diagram of the vacuum coating mechanism of the present invention;

[0026] Figure 6 is a schematic structural diagram of the aluminum target mounting mechanism of the present invention;

[0027] Figure 7 For the present invention Figure 5 is an enlarged schematic structural diagram of area A therein;

[0028] Figure 8 is a schematic structural diagram of the replacement of the glass-based Mask of the present invention;

[0029] Figure 9 Schematic cross-sectional structure diagram of the material installation mechanism of the present invention;

[0030] Figure 10 Schematic structure diagram of the magnetic plate mechanism of the present invention;

[0031] Figure 11 Schematic cross-sectional structure diagram of the electromagnet of the present invention.

[0032] In the figure: 1. Two-way adjustment mechanism; 101. Support base; 102. Guide slide; 103. Driving motor; 104. Support leg; 105. Driving screw; 2. Vacuum coating mechanism; 201. Coating box; 202. Installation stirring angle plate; 203. Argon gas delivery pipe; 204. Control panel; 205. Exhaust pipe; 206. Oxygen delivery pipe; 207. Ion sputtering unit; 208. Pressure display meter; 209. Refrigeration delivery pipe; 210. Water-cooled output pipe; 211. Power connection installation box; 212. Insulating sleeve; 213. Support spring; 214. Insulating seat; 215. Ion power connection head; 216. Insulating support plate; 3. Material installation mechanism; 301. First sealing plate; 302. First guiding support seat; 303. Guide groove plate; 304. Guide wheel; 305. Material installation frame; 306. Glass substrate Mask; 4. Aluminum target installation mechanism; 401. Second sealing plate; 402. Second guiding support seat; 403. Insulating installation plate; 404. Aluminum target block; 405. Connecting block; 5. First magnetic plate mechanism; 501. First cladding plate; 502. First pressing frame; 503. Power connection strip; 504. Second pressing frame; 505. Sealing strip; 506. Electromagnet; 507. Second cladding plate; 6. Second magnetic plate mechanism. Specific embodiments

[0033] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0034] The driving motor 103 (model GV50-3.7KW-60-S) mentioned in the present invention can be obtained by purchasing from the market or customizing privately.

[0035] Please refer to Figures 1 to 5, an embodiment provided by the present invention: a high-efficiency coating machine for double-sided synchronous film formation designed based on magnetic field distribution, including a vacuum coating mechanism 2, a material mounting mechanism 3, and an aluminum target mounting mechanism 4. A two-way adjustment mechanism 1 is installed at the bottom of the vacuum coating mechanism 2. The two-way adjustment mechanism 1 includes a support base 101. Four support legs 104 are fixedly installed in the middle of the upper end surface of the support base 101. Two guide slides 102 are fixedly installed on the upper end surface of the support base 101. A drive motor 103 is fixedly installed at one end of one of the guide slides 102. The output end of the drive motor 103 is connected to a drive screw 105 through a coupling. When the drive screw 105 rotates, it can drive the material mounting mechanism 3 and the aluminum target mounting mechanism 4 to move in opposite or the same direction.

[0036] Please refer to Figures 1 to 8 , the vacuum coating mechanism 2 includes a coating box 201. The four corners of the coating box 201 are fixedly connected to the four support legs 104. Two exhaust pipes 205 are fixedly installed on both sides of the coating box 201. An installation stirring angle plate 202 is installed at one end of one of the exhaust pipes 205. A control panel 204 is fixedly installed on the upper end surface of the installation stirring angle plate 202. An argon gas delivery pipe 203 is installed inside the front end of the installation stirring angle plate 202. An oxygen delivery pipe 206 is installed inside the rear end of the installation stirring angle plate 202. A pressure display meter 208 is installed on one side of the other exhaust pipe 205. A refrigeration delivery pipe 209 and a water-cooling output pipe 210 are installed on the other side of the exhaust pipe 205. The air in the vacuum coating chamber is extracted through the exhaust pipe 205 to form a vacuum state and the pressure is displayed through the pressure display meter 208;

[0037] A plurality of linearly arranged ionization sputtering units 207 are installed on the upper end surface of the coating box 201. The ionization sputtering unit 207 includes a power connection installation box 211. The upper end of the coating box 201 is fixedly connected to a plurality of power connection installation boxes 211. An insulating support plate 216 is installed on the lower end surface of the power connection installation box 211. A plurality of insulating sleeves 212 are installed between the power connection installation box 211 and the insulating support plate 216. The plurality of insulating sleeves 212 are linearly arranged between the power connection installation box 211 and the insulating support plate 216. A support spring 213 is provided inside the insulating sleeve 212. An insulating seat 214 is installed at the bottom end of the support spring 213. The insulating sleeve 212 is connected to the insulating seat 214 through the support spring 213. An ionization power connection head 215 is installed on the lower end surface of the insulating seat 214. The upper end of the ionization power connection head 215 is threadedly connected to the insulating seat 214. The bottom end of the ionization power connection head 215 penetrates through the insulating support plate 216 and is in close contact with the upper end surface of the aluminum target block 404. The ionization power connection head 215 can automatically be in close contact with the coating of the aluminum target block 404 under the elastic support of the support spring 213 to maintain stable power connection.

[0038] Please refer to Figures 5 to 9, a material mounting mechanism 3 is installed at the front end of the vacuum coating mechanism 2. The material mounting mechanism 3 includes a first sealing plate 301, which is detachably connected to the front end of the coating chamber 201. A first guiding and supporting seat 302 is fixedly installed at the bottom end of the first sealing plate 301. A material mounting frame 305 is fixedly installed on the rear end face of the first sealing plate 301. A glass substrate Mask 306 is arranged inside the material mounting frame 305. The material mounting frame 305 is snap-connected to the side edges of the glass substrate Mask 306. A plurality of hollow holes are arranged on the surface of the glass substrate Mask 306. Guide groove plates 303 are slidably connected to both side edges of the material mounting frame 305. The coating chamber 201 is fixedly connected to the two guide groove plates 303. A plurality of guide wheels 304 are rotatably connected to the inside of each guide groove plate 303. The material mounting frame 305 is inserted into the inside of the two guide groove plates 303. Both side edges of the material mounting frame 305 are slidably connected to the guide groove plates 303 through a plurality of guide wheels 304. The guide groove plates 303 can perform rolling guidance on the material mounting frame 305 through a plurality of guide wheels 304, so as to keep the material mounting frame 305 driving the glass substrate Mask 306 stable in the vacuum coating chamber.

[0039] Please refer to Figures 5 to 8 , an aluminum target mounting mechanism 4 is installed at the rear end of the vacuum coating mechanism 2. The aluminum target mounting mechanism 4 includes a second sealing plate 401, which is detachably connected to the rear end of the coating chamber 201. A second guiding and supporting seat 402 is fixedly installed at the bottom end of the second sealing plate 401. Both ends of the first guiding and supporting seat 302 and the second guiding and supporting seat 402 are inserted into the inside of the two guiding slide plates 102 and are slidably connected to the guiding slide plates 102. External threads with opposite helix directions are provided at both ends of the transmission screw rod 105. Both ends of the transmission screw rod 105 are threadedly connected to the first guiding and supporting seat 302 and the second guiding and supporting seat 402. The first guiding and supporting seat 302 and the second guiding and supporting seat 402 slide in opposite or same directions along the axis of the transmission screw rod 105. When both ends of the coating chamber 201 can be separated from the first sealing plate 301 and the second sealing plate 401 simultaneously, it is convenient to replace the glass substrate Mask 306 and the aluminum target block 404;

[0040] An insulating mounting plate 403 is installed at the upper end of the front end face of the second sealing plate 401. Two connecting blocks 405 are installed between the insulating mounting plate 403 and the second sealing plate 401. A plurality of aluminum target blocks 404 are threadedly connected to the inside of the insulating mounting plate 403. The rear ends of the second sealing plate 401 and the insulating mounting plate 403 are fixedly connected through two connecting blocks 405. A plurality of aluminum target blocks 404 are arranged in an array inside the insulating mounting plate 403. The plurality of aluminum target blocks 404 are coaxial with the ionization electrical connection head 215. The plurality of aluminum target blocks 404 can be ionized under the action of the ionization electrical connection head 215 to form aluminum ions.

[0041] Please refer to Figure 1 and Figure 3 A vacuum coating chamber is formed between the coating chamber 201, the first sealing plate 301 and the second sealing plate 401. The argon gas delivery pipe 203, the oxygen delivery pipe 206, the pressure display meter 208, the freezing delivery pipe 209, the water-cooled output pipe 210 and the two exhaust pipes 205 all penetrate through the coating chamber 201 and are inserted into the inner side of the vacuum coating chamber. Solenoid valves are fixedly arranged on the inner sides of the argon gas delivery pipe 203, the oxygen delivery pipe 206, the freezing delivery pipe 209, the water-cooled output pipe 210 and the two exhaust pipes 205. The argon gas and oxygen can be injected into the vacuum coating chamber successively through the argon gas delivery pipe 203 and the oxygen delivery pipe 206.

[0042] Please refer to Figure 5 、 Figure 10 and Figure 11 On both sides of the vacuum coating mechanism 2, first magnetic plate mechanisms 5 are installed. On the lower end face of the vacuum coating mechanism 2, a plurality of second magnetic plate mechanisms 6 are installed. Both the first magnetic plate mechanism 5 and the second magnetic plate mechanism 6 include a first cladding plate 501. On one side of the first cladding plate 501, a second cladding plate 507 is fixedly installed. A sealing strip 505 is provided on the side edges of the first cladding plate 501 and the second cladding plate 507. The sealing strip 505 is arranged between the first cladding plate 501 and the second cladding plate 507 and the coating chamber 201. On both sides of the sealing strip 505, a second pressing frame 504 and a first pressing frame 502 are respectively installed. The second pressing frame 504 is fixedly connected to the first cladding plate 501, and the first pressing frame 502 is fixedly connected to the second cladding plate 507. The sealing strip 505 can be pressed through the first pressing frame 502 and the second pressing frame 504, so as to maintain the sealing stability when the first magnetic plate mechanism 5 and the second magnetic plate mechanism 6 are installed with the coating chamber 201 through the sealing strip 505;

[0043] On one side of the second cladding plate 507, a plurality of power connection strips 503 are installed. At the end of the power connection strip 503, a plurality of electromagnets 506 are provided. The coating chamber 201 and the plurality of ionization sputtering units 207 are both fixedly connected through the first pressing frame 502. The end of the power connection strip 503 penetrates through the second cladding plate 507 and is electrically connected to the plurality of electromagnets 506. The plurality of electromagnets 506 are arranged in an array between the first cladding plate 501 and the second cladding plate 507. The plurality of electromagnets 506 are powered on through the power connection strip 503 and the current magnitude is controlled. Thus, the alumina can be pushed when it is below the glass substrate Mask 306 through the plurality of electromagnets 506.

[0044] In summary, the glass-based Mask306 that requires double-layer coating is snap-fitted and installed inside the material installation frame 305. The power is turned on. A plurality of aluminum target blocks 404 are arranged in an array inside the insulating mounting plate 403 and are threadedly connected to the insulating mounting plate 403. The drive motor 103 is started, so that the drive motor 103 drives the material installation mechanism 3 and the aluminum target installation mechanism 4 to move towards each other under the support of the support base 101 through the drive screw 105. Furthermore, when the first sealing plate 301 and the second sealing plate 401 are fitted and installed with the coating chamber 201, a vacuum coating chamber can be formed;

[0045] The guide groove plate 303 can roll-guide the material installation frame 305 through a plurality of guide wheels 304, thereby maintaining the stability of the material installation frame 305 driving the glass-based Mask306 inside the vacuum coating chamber. When the second sealing plate 401 drives a plurality of aluminum target blocks 404 to be inserted into the coating chamber 201 through the insulating mounting plate 403, the ionization electrical connection head 215 can automatically and closely contact the coating of the aluminum target block 404 under the elastic support of the support spring 213;

[0046] The external air pump extracts air from the vacuum coating chamber through the air extraction pipe 205 to form a vacuum state, cools the vacuum coating chamber through the water-cooling output pipe 210, and condenses the water vapor inside the vacuum coating chamber into frost through the refrigeration delivery pipe 209. Argon is input into the vacuum coating chamber through the argon delivery pipe 203 and then oxygen is injected through the oxygen delivery pipe 206. At the same time, the ionization electrical connection head 215 and the electrical connection bar 503 are energized, so that a plurality of aluminum target blocks 404 arranged in an array can be ionized under the action of the ionization electrical connection head 215 to form aluminum ions;

[0047] When the aluminum ions are separated from the aluminum target block 404, they have kinetic energy and move inside the vacuum coating chamber. Therefore, the aluminum ions can react with oxygen to produce aluminum oxide. The aluminum oxide is affected by gravity and can be evenly coated on the upper surface of the glass-based Mask306. A plurality of hollow holes are provided on the surface of the glass-based Mask306, so that the aluminum oxide can leak through the hollow holes. At this time, magnetic fields are generated by two symmetrically installed first magnetic plate mechanisms 5 and can laterally push the aluminum oxide located below the glass-based Mask306, and a uniform magnetic field can be generated at the bottom of the coating chamber 201 by a plurality of second magnetic plate mechanisms 6 arranged linearly and can push up the aluminum oxide located below the glass-based Mask306. Furthermore, under the dual action of the first magnetic plate mechanism 5 and the second magnetic plate mechanism 6, the aluminum oxide can be driven to be evenly coated on the lower surface of the glass-based Mask306, and thus the double-sided coating operation of the glass-based Mask306 can be realized;

[0048] When alumina moves from the hollow holes to above the glass substrate Mask306 under the action of a magnetic field, it can be separated from the magnetic field and fall again under the influence of gravity. Thus, the alumina can be repeatedly lifted and dropped, which is convenient for fully coating the alumina on the outer surface of the glass substrate Mask306, improving the coating effect. Multiple second magnetic plate mechanisms 6 generate a uniform planar magnetic field, and two first magnetic plate mechanisms 5 generate a time-varying magnetic field. Then, under the combined action of the first magnetic plate mechanism 5 and the second magnetic plate mechanism 6, the moving direction of the alumina below the glass substrate Mask306 is controlled. The drive screw 105 is reversed. Then, the first guiding and supporting seat 302 drives the first sealing plate 301 and the second guiding and supporting seat 402 drives the second sealing plate 401 to move in opposite directions. Thus, both ends of the coating box 201 can be separated from the first sealing plate 301 and the second sealing plate 401 at the same time, which is convenient for replacing the glass substrate Mask306 and the aluminum target block 404.

[0049] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present invention, the present invention can be implemented in other specific forms. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claimed rights.

Claims

1. An efficient coating machine for double-sided synchronous film formation designed based on magnetic field distribution, comprising a vacuum coating mechanism (2), a material installation mechanism (3) and an aluminum target installation mechanism (4), characterized in that: A two-way adjustment mechanism (1) is installed at the bottom end of the vacuum coating mechanism (2). A material installation mechanism (3) is installed at the front end of the vacuum coating mechanism (2). An aluminum target installation mechanism (4) is installed at the rear end of the vacuum coating mechanism (2). First magnetic plate mechanisms (5) are installed on both sides of the vacuum coating mechanism (2). A plurality of second magnetic plate mechanisms (6) are installed on the lower end surface of the vacuum coating mechanism (2). The two-way adjustment mechanism (1) includes a support base (101). Four support legs (104) are fixedly installed in the middle of the upper end surface of the support base (101). The vacuum coating mechanism (2) includes a coating box (201). The four end corners of the coating box (201) are fixedly connected to the four support legs (104). A plurality of linearly arranged ionization sputtering units (207) are installed on the upper end surface of the coating box (201). The ionization sputtering unit (207) includes a power connection installation box (211). An insulating support plate (216) is installed on the lower end surface of the power connection installation box (211). A plurality of insulating sleeves (212) are installed between the power connection installation box (211) and the insulating support plate (216). A support spring (213) is arranged inside the insulating sleeve (212). The bottom end of the support spring (213) is installed with an insulating seat (214). An ionization power connection head (215) is installed on the lower end surface of the insulating seat (214). The material installation mechanism (3) includes a first sealing plate (301). The first sealing plate (301) is detachably connected to the front end of the coating box (201). A first guiding support seat (302) is fixedly installed at the bottom end of the first sealing plate (301). A material installation frame (305) is fixedly installed on the rear end surface of the first sealing plate (301). A glass substrate Mask (306) is arranged inside the material installation frame (305). Guide groove plates (303) are slidably connected to both sides of the material installation frame (305). A plurality of guide wheels (304) are rotatably connected to the inside of each guide groove plate (303). A plurality of hollow holes are arranged on the surface of the glass substrate Mask (306).

2. The high-efficiency coating machine for double-sided synchronous film formation designed based on magnetic field distribution according to claim 1, wherein: The two-way adjustment mechanism (1) further includes two guiding sliding plates (102) fixedly connected to the upper end surface of the support base (101). A transmission motor (103) is fixedly installed at one end of one of the guiding sliding plates (102). The output end of the transmission motor (103) is connected with a transmission screw rod (105) through a coupling.

3. The high-efficiency coating machine for double-sided synchronous film formation designed based on magnetic field distribution according to claim 2, characterized in that: The vacuum coating mechanism (2) further includes air extraction pipes (205) fixedly connected to both sides of the coating chamber (201). One end of one of the air extraction pipes (205) is provided with a mounting stirrup plate (202). A control panel (204) is fixedly mounted on the upper end surface of the mounting stirrup plate (202). An argon delivery pipe (203) is installed inside the front end of the mounting stirrup plate (202), and an oxygen delivery pipe (206) is installed inside the rear end of the mounting stirrup plate (202). A pressure display meter (208) is installed on one side of the other air extraction pipe (205), and a refrigeration delivery pipe (209) and a water-cooling output pipe (210) are installed on the other side of the air extraction pipe (205).

4. The high-efficiency coating machine for double-sided synchronous film formation designed based on magnetic field distribution according to claim 3, characterized in that: The aluminum target mounting mechanism (4) includes a second sealing plate (401) detachably connected to the rear end of the coating chamber (201). A second guiding and supporting seat (402) is fixedly mounted at the bottom end of the second sealing plate (401). An insulating mounting plate (403) is installed at the upper end of the front end surface of the second sealing plate (401). Two connecting blocks (405) are installed between the insulating mounting plate (403) and the second sealing plate (401). A plurality of aluminum target blocks (404) are connected to the inside of the insulating mounting plate (403) by threads.

5. The high-efficiency coating machine for double-sided synchronous film formation designed based on magnetic field distribution according to claim 4, characterized in that: Both the first magnetic plate mechanism (5) and the second magnetic plate mechanism (6) include a first covering plate (501). A second covering plate (507) is fixedly mounted on one side of the first covering plate (501). A plurality of electrical connection strips (503) are installed on one side of the second covering plate (507). A plurality of electromagnets (506) are provided at the ends of the electrical connection strips (503). A sealing strip (505) is provided on the side of the first covering plate (501) and the second covering plate (507). A second pressing frame (504) and a first pressing frame (502) are respectively installed on both sides of the sealing strip (505).

6. The high-efficiency coating machine for double-sided synchronous film formation designed based on magnetic field distribution according to claim 5, characterized in that: Both ends of the first guiding and supporting seat (302) and the second guiding and supporting seat (402) are inserted into the inside of two guiding sliding plates (102) and are slidably connected to the guiding sliding plates (102). The two ends of the transmission screw rod (105) are provided with external threads with opposite helix directions. The two ends of the transmission screw rod (105) are threadedly connected to the first guiding and supporting seat (302) and the second guiding and supporting seat (402). The first guiding and supporting seat (302) and the second guiding and supporting seat (402) slide in opposite or the same directions along the axis of the transmission screw rod (105). The rear ends of the second sealing plate (401) and the insulating mounting plate (403) are fixedly connected by two connecting blocks (405). A plurality of the aluminum target blocks (404) are arranged in an array inside the insulating mounting plate (403), and a plurality of the aluminum target blocks (404) are coaxial with the ionization electrical connection head (215).

7. The high-efficiency coating machine for double-sided synchronous film formation designed based on magnetic field distribution according to claim 6, characterized in that: The coating chamber (201) is fixedly connected to two guide groove plates (303). The material mounting frame (305) is inserted into the inner sides of the two guide groove plates (303). Both side edges of the material mounting frame (305) are slidably connected to the guide groove plates (303) through a plurality of guide wheels (304). The material mounting frame (305) is snap-fitted and installed with the side edge of the glass substrate Mask (306).

8. The high-efficiency coating machine for double-sided synchronous film formation designed based on magnetic field distribution according to claim 7, characterized in that: A vacuum coating chamber is formed among the coating chamber (201), the first sealing plate (301) and the second sealing plate (401). The argon gas delivery pipe (203), the oxygen delivery pipe (206), the pressure display meter (208), the refrigeration delivery pipe (209), the water-cooling output pipe (210) and two air extraction pipes (205) all penetrate through the coating chamber (201) and are inserted into the inner side of the vacuum coating chamber. Solenoid valves are fixedly arranged inside the argon gas delivery pipe (203), the oxygen delivery pipe (206), the refrigeration delivery pipe (209), the water-cooling output pipe (210) and the two air extraction pipes (205).

9. The high-efficiency coating machine for double-sided synchronous film formation designed based on magnetic field distribution according to claim 8, characterized in that: The upper end of the coating chamber (201) is fixedly connected to a plurality of power connection mounting boxes (211). A plurality of insulating sleeves (212) are linearly arranged between the power connection mounting boxes (211) and the insulating support plate (216). The insulating sleeves (212) are connected to the insulating seat (214) through support springs (213). The upper end of the ionization power connection head (215) is threadedly connected to the insulating seat (214). The bottom end of the ionization power connection head (215) penetrates through the insulating support plate (216) and is in close contact with the upper end surface of the aluminum target block (404).

10. The high-efficiency coating machine for double-sided synchronous film formation designed based on magnetic field distribution according to claim 9, wherein: The second pressing frame (504) is fixedly connected to the first covering plate (501). The first pressing frame (502) is fixedly connected to the second covering plate (507). The coating chamber (201) and a plurality of ionization sputtering units (207) are both fixedly connected through the first pressing frame (502). The sealing strip (505) is arranged between the first covering plate (501), the second covering plate (507) and the coating chamber (201). The end of the power connection strip (503) penetrates through the second covering plate (507) and is electrically connected to a plurality of electromagnets (506). A plurality of the electromagnets (506) are arranged in an array between the first covering plate (501) and the second covering plate (507).

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