Particle control system and method in APCVD deposition process

Abstract

The invention discloses an APCVD deposition process particulate matter control system, and belongs to the technical field of atmospheric pressure chemical deposition, the APCVD deposition process particulate matter control system comprises a regulation and control jet head, a plurality of rotating shafts are mounted in the regulation and control jet head through bearings, and one end of each rotating shaft extends to the outer side of the regulation and control jet head; a transmission gear is fixedly connected to the end, located on the outer side of the regulation and control jet head, of each rotating shaft, an air guide plate is fixedly connected to the middle section of a shaft body of each rotating shaft, a first motor is fixedly installed at the top of the regulation and control jet head, and a driving gear is fixedly connected to the tail end of an output shaft of the first motor; and the outer sides of the driving gear and the transmission gear are jointly in engaged transmission connection with a transmission rack. The air deflector can be cleaned, and meanwhile, a transmission chain used for adjusting the air deflector can be automatically lubricated.

Description

Technical Field

[0001] The present invention relates to the technical field of atmospheric pressure chemical deposition, and more specifically, to a particle control system and method for an APCVD deposition process. Background Art

[0002] APCVD, or atmospheric pressure chemical vapor deposition, refers to a chemical vapor deposition method performed under atmospheric pressure. This is the method originally used for chemical vapor deposition.

[0003] After searching, the invention patent with publication number CN113862646A discloses an APCVD deposition process particle control system and a control method thereof, including a reaction tube, a first gas tank, a second gas tank and a third gas tank. The slider slides and provides swinging power for the adjusting blades, so that the passing airflow constantly changes the passing path, thereby achieving the purpose of uniform dispersion of the airflow. Therefore, the process product particles generated after the airflow reacts with the reactants can be evenly dispersed. When the adjusting component is in use, the flowing airflow can drive the fan to rotate, and the swinging power can be provided for the adjusting blades without external power drive, thereby saving energy consumption. The adjusting blades can rotate a certain angle through the second rotating shaft. Therefore, a certain size of gap can be formed between adjacent adjusting blades. By adjusting the size of the gap, the passing reaction gas flow rate can be controlled, so that it is suitable for APCVD systems with different reaction gas flow rates.

[0004] However, in the prior art, the flow rate of the reactive gas can be controlled by adjusting the gap of the blades, so that it is suitable for APCVD systems with different reactive gas flows. However, materials are easily accumulated on the blades, which not only easily hinders the flow of gas, but also causes waste of materials. In addition, the transmission gears and transmission chains used to drive the blades to rotate may become stuck due to long-term use or dust accumulation, thereby affecting the normal regulation of the flow rate. Therefore, improvements are needed. Summary of the invention

[0005] In view of the problems existing in the prior art, the purpose of the present invention is to provide a particle control system for the APCVD deposition process, which can periodically clean the air guide plate and lubricate the transmission chain and transmission gears.

[0006] To solve the above problems, the present invention adopts the following technical solutions:

[0007] A particle control system for an APCVD deposition process comprises a regulating nozzle, wherein a plurality of rotating shafts are installed inside the regulating nozzle through bearings, and one end of the rotating shaft extends to the outside of the regulating nozzle, and each end of the rotating shaft located outside the regulating nozzle is fixedly connected to a transmission gear, and a wind guide plate is fixedly connected to the middle section of the shaft body of the rotating shaft, and a motor 1 is fixedly installed on the top of the regulating nozzle, and a driving gear is fixedly connected to the end of the output shaft of the motor 1, and a transmission rack is meshed and connected to the outer sides of the driving gear and the transmission gear, and a cleaning component is arranged on the inner side of the regulating nozzle and in front of the wind guide plate, and a hollow shell is fixedly connected to the outer side of the regulating nozzle and on the side of the transmission chain, and an oiling mechanism is arranged on the upper inner side of the hollow shell, and an automatic lubrication mechanism is arranged on the lower inner side of the hollow shell.

[0008] As a preferred solution of the present invention, a refueling nozzle is fixedly connected to the top of the hollow shell, a plug is threadedly mounted on the inner side of the upper opening of the refueling nozzle, and a swivel is fixedly connected to the upper end of the plug.

[0009] As a preferred solution of the present invention, a magnetic block is clamped at the bottom of the hollow shell, a waste oil box is fixedly connected to the side of the magnetic block and located below the transmission chain, and the waste oil box is in contact with the hollow shell.

[0010] The control cabinet is the control cabinet that is located at the control cabinet, and the control cabinet is the control cabinet. The control cabinet is the control cabinet of the control cabinet. The control cabinet is the control cabinet of the control cabinet.

[0011] As a preferred solution of the present invention, the oil adding mechanism includes an oil separator plate fixedly connected to the inner upper part of the hollow shell, a countersunk hole is penetrated inside the oil separator plate, a sliding column is penetrated on the inner side of the countersunk hole and is slidably connected, one end of the sliding column is fixedly connected to a limiting block, a float is fixedly connected to the bottom of the sliding column, a retaining ring is fixedly connected to the middle section of the column body of the sliding column, and the diameter of the retaining ring is larger than the diameter of the countersunk hole, the retaining ring is in contact with the oil separator plate, and a guide pin is fixedly connected to the bottom of the oil separator plate, and the guide pin penetrates the retaining ring and is slidably connected to the retaining ring.

[0012] As a preferred solution of the present invention, the automatic lubrication mechanism includes a hollow vertical plate fixedly connected to the inner bottom of the hollow shell, a hollow block is fixedly connected to the right side of the hollow vertical plate, a slider is slidably connected to the inside of the hollow block, an oil sealing nozzle and a sliding pin are fixedly connected to the end of the slider away from the hollow vertical plate, the oil sealing nozzle and the sliding pin are both slidably connected to the hollow shell, the sliding pin is in contact with the transmission chain, and a protrusion is fixedly connected to the surface of the transmission chain.

[0013] As a preferred solution of the present invention, a spring is arranged inside the hollow block, one end of the spring is fixedly connected to the slider, and the other end of the spring is fixedly connected to the inner surface of the hollow block.

[0014] As a preferred solution of the present invention, a guide block is fixedly connected to the side of the sliding block, and the guide block is slidably connected to the hollow block.

[0015] As a preferred solution of the present invention, an oil outlet hole is opened inside the hollow shell, and the position of the oil outlet hole corresponds to the oil sealing nozzle.

[0016] A method for using a particle control system in an APCVD deposition process comprises the following steps:

[0017] Step 1: The APCVD system will grow the predetermined thin film product according to the set time. The gas enters the regulating nozzle through the gas pipe. At this time, the motor is started to drive the driving gear to rotate, and the driving gear drives the transmission chain to rotate, and the transmission chain drives each transmission gear to rotate at the same time, so that the air guide plate coaxial with the transmission gear rotates a certain angle, so that a certain size of gap is formed between adjacent air guide plates, and the gas can flow into the subsequent reaction tube through the gap. In this way, the size of the gap formed between the air guide plates is adjusted according to the required reaction rate of the reactants. The larger the gap, the greater the amount of gas passing through, and vice versa, the smaller the amount of gas passing through;

[0018] Step 2: During the transmission of the transmission chain, the protrusion on the transmission chain will contact and squeeze the sliding pin, causing the sliding pin to slide into the hollow shell, and then the sliding pin drives the slider to slide into the hollow block and compress the spring;

[0019] Step 3: As the slider slides, the oil sealing nozzle on the slider separates the oil outlet hole, so that the lubricating oil stored in the hollow shell can flow out smoothly through the oil outlet hole, thereby lubricating the transmission chain and transmission gear, avoiding the transmission chain from jamming after long-term use;

[0020] Step 4: When the level of the lubricating oil in the lower part of the hollow shell drops, the position of the float ball drops immediately, and then the retaining ring on the float ball exposes the countersunk hole, so that the prepared lubricating oil in the upper part of the hollow shell will automatically fall down, and the lubricating oil below can be supplemented, thereby reducing the period of oiling by the staff;

[0021] Step 5: When the air guide plate needs to be cleaned, it is only necessary to drive the threaded shaft to rotate through motor 2, and the moving block moves back and forth in the axial direction of the threaded shaft. The moving block will drive the slide bar to move during the movement, and the slide bar will drive the slide rod to move, thereby driving the cleaning sleeve at the end of the slide rod to slide on the outside of the air guide plate and clean it. In this way, on the one hand, it is not easy for materials to accumulate on the air guide plate and affect the flow direction of the materials. On the other hand, it can reduce the waste of materials without affecting the rotation adjustment of the air guide plate.

[0022] Compared with the prior art, the advantages of the present invention are:

[0023] (1) In the present invention, a cleaning assembly is provided on the inner side of the regulating nozzle and in front of the air guide plate. The cleaning sleeve in the cleaning assembly is provided on the outer side of the air guide plate and can be driven to move laterally by a motor and a threaded shaft. In this way, the air guide plate can be cleaned periodically. On the one hand, it is not easy for materials to accumulate on the air guide plate and affect the flow direction of the materials. On the other hand, it can reduce the waste of materials without affecting the rotation adjustment of the air guide plate.

[0024] (2) In the present invention, a lubrication mechanism is provided on the outer side of the transmission chain. During the transmission of the transmission chain, the protrusion on the transmission chain contacts and squeezes the sliding pin, causing the sliding pin to slide into the hollow shell, thereby exposing the oil outlet hole of the oil sealing nozzle on the same slider as the sliding pin. In this way, the lubricating oil stored in the hollow shell can flow out smoothly through the oil outlet hole, thereby lubricating the transmission chain and the transmission gear, thereby avoiding the transmission chain from getting stuck after long-term use. In addition, by providing an oil adding mechanism on the lubricating mechanism, the lubricating oil can be automatically added after the lubricating oil is consumed. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 For the present invention Figure 1 Schematic diagram of the internal structure;

[0027] Figure 3 For the present invention Figure 2 A schematic diagram of the cleaning component structure;

[0028] Figure 4 For the present invention Figure 1 Schematic diagram of the internal structure of the hollow shell;

[0029] Figure 5 For the present invention Figure 4 A magnified image of point A;

[0030] Figure 6 For the present invention Figure 4 The enlarged view of point B;

[0031] Figure 7 For the present invention Figure 4 Schematic diagram of the sliding column structure;

[0032] Figure 8 For the present invention Figure 6 Schematic diagram of the waste oil box structure;

[0033] Fig. 9 For the present invention Figure 2 Schematic diagram of the wind deflector structure.

[0034] Description of the numbers in the figure:

[0035] 1. Adjustable jet head; 2. Rotating shaft; 3. Transmission gear; 4. Air guide plate; 5. Transmission chain; 51. Bump; 6. Motor 1; 7. Driving gear; 8. Cleaning assembly; 9. Hollow shell; 10. Oiling nozzle; 11. Plug; 12. Swivel; 13. Oiling mechanism; 14. Automatic lubrication mechanism; 15. Magnetic block; 16. Waste oil box; 81. Slide bar; 82. Cleaning sleeve; 83. Slide bar; 84. Limiting ball; 85. Moving block; 86 , motor 2; 87, threaded shaft; 88, connecting frame; 89, guide seat; 810, guide rod; 131, oil separator; 1311, countersunk hole; 132, sliding column; 133, limit block; 134, floating ball; 135, retaining ring; 136, guide pin; 141, hollow vertical plate; 142, hollow block; 143, sliding block; 144, oil sealing nozzle; 145, sliding pin; 146, spring; 147, guide block; 148, oil outlet hole. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "top / bottom" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0038] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "mounted / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] Example:

[0040] See also Figure 1 , Figure 2 , Figure 4 , Fig. 9 A particle control system for an APCVD deposition process comprises a regulating nozzle 1, wherein a plurality of rotating shafts 2 are installed inside the regulating nozzle 1 through bearings, and one end of the rotating shaft 2 extends to the outside of the regulating nozzle 1, and each end of the rotating shaft 2 located outside the regulating nozzle 1 is fixedly connected to a transmission gear 3, and a wind guide plate 4 is fixedly connected to the middle section of the shaft body of the rotating shaft 2, and a motor 6 is fixedly installed on the top of the regulating nozzle 1, and a driving gear 7 is fixedly connected to the end of the output shaft of the motor 6, and a transmission rack 5 is meshed and connected with the outer side of the driving gear 7 and the transmission gear 3, and a hollow shell 9 is fixedly connected to the outside of the regulating nozzle 1 and located on the side of the transmission chain 5.

[0041] In this embodiment, the motor 1 6 drives the driving gear 7 to rotate, and the driving gear 7 thereby drives the transmission chain 5 to rotate, and the transmission chain 5 simultaneously drives the transmission gear 3 to rotate, thereby causing the air guide plate 4 coaxial with the transmission gear 3 to rotate.

[0042] For details, please refer to Figure 4 , Figure 6 , Figure 8The top of the hollow shell 9 is fixedly connected with a refueling nozzle 10, and a plug 11 is threadedly installed on the inner side of the upper opening of the refueling nozzle 10, and a swivel 12 is fixedly connected to the upper end of the plug 11. The setting of the refueling nozzle 10 facilitates the addition of lubricating oil into the hollow shell 9. The bottom of the hollow shell 9 is clamped with a magnetic block 15, and a waste oil box 16 is fixedly connected to the side of the magnetic block 15 and located below the transmission chain 5, and the waste oil box 16 is in contact with the hollow shell 9.

[0043] In this embodiment, the waste oil box 16 is provided to collect the used lubricating oil.

[0044] For details, please refer to Figure 1 , Figure 2 , Figure 3 A cleaning assembly 8 is provided on the inner side of the regulating nozzle head 1 and in front of the air guide plate 4. The cleaning assembly 8 includes a slide bar 81 slidably connected to the inner side of the regulating nozzle head 1. A slide bar 83 is slidably connected to the interior of the slide bar 81. One end of the slide bar 83 is fixedly connected to a limiting ball 84. The other end of the slide bar 83 is fixedly connected to a cleaning sleeve 82. The cleaning sleeve 82 is slidably sleeved on the outer side of the air guide plate 4. A moving block 85 is fixedly connected to the upper part of the side of the slide bar 81 away from the air guide plate 4. An electric Machine 2 86, the end of the output shaft of the motor 2 86 is fixedly connected with a threaded shaft 87, and the other end of the threaded shaft 87 is installed on the inner wall of the regulating nozzle 1 through a bearing, the threaded shaft 87 penetrates the moving block 85 and is connected to the moving block 85 through a thread, the lower part of the sliding bar 81 away from the side of the air guide plate 4 is fixedly connected with a connecting frame 88, the end of the connecting frame 88 is fixedly connected with a guide seat 89, the inner lower part of the regulating nozzle 1 is fixedly connected with a guide rod 810, the guide rod 810 penetrates the guide seat 89 and is slidably connected to the guide seat 89.

[0045] In this embodiment, the threaded shaft 87 is driven to rotate by the motor 2 86, and the moving block 85 moves back and forth in the axial direction of the threaded shaft 87. During the movement, the moving block 85 drives the slide bar 81 to move, and the slide bar 81 drives the slide rod 83 to move, thereby driving the cleaning sleeve 82 at the end of the slide rod 83 to slide on the outside of the air guide plate 4 and clean it. In this way, on the one hand, it is not easy for materials to accumulate on the air guide plate 4 and affect the flow direction of the materials. On the other hand, it can reduce the waste of materials without affecting the rotation adjustment of the air guide plate 4.

[0046] For details, please refer to Figure 5 , Figure 7An oil adding mechanism 13 is provided at the inner upper part of the hollow shell 9, and the oil adding mechanism 13 includes an oil separator 131 fixedly connected to the inner upper part of the hollow shell 9, a countersunk hole 1311 is penetrated inside the oil separator 131, and a sliding column 132 is slidably connected to the inner side of the countersunk hole 1311, one end of the sliding column 132 is fixedly connected to a limiting block 133, and a floating ball 134 is fixedly connected to the bottom of the sliding column 132, and a retaining ring 135 is fixedly connected to the middle section of the column of the sliding column 132, and the diameter of the retaining ring 135 is larger than the diameter of the countersunk hole 1311, and the retaining ring 135 contacts the oil separator 131, and a guide pin 136 is fixedly connected to the bottom of the oil separator 131, and the guide pin 136 penetrates the retaining ring 135 and is slidably connected to the retaining ring 135.

[0047] In this embodiment, when the liquid level of the lubricating oil in the lower inner part of the hollow shell 9 drops, the position of the float 134 drops immediately, and then the retaining ring 135 on the float 134 exposes the countersunk hole 1311, so that the prepared lubricating oil in the upper inner part of the hollow shell 9 will automatically fall down, and the lubricating oil below can be supplemented, thereby reducing the oil adding cycle of the staff.

[0048] For details, please refer to Figure 5 An automatic lubrication mechanism 14 is provided at the lower inner part of the hollow shell 9, and the automatic lubrication mechanism 14 includes a hollow vertical plate 141 fixedly connected to the inner bottom of the hollow shell 9, a hollow block 142 is fixedly connected to the right side of the hollow vertical plate 141, a slider 143 is slidably connected inside the hollow block 142, and an oil sealing nozzle 144 and a sliding pin 145 are fixedly connected to one end of the slider 143 away from the hollow vertical plate 141, the oil sealing nozzle 144 and the sliding pin 145 are both slidably connected to the hollow shell 9, the sliding pin 145 is in contact with the transmission chain 5, and a protrusion 51 is fixedly connected to the surface of the transmission chain 5, and an oil outlet hole 148 is opened inside the hollow shell 9, and the position of the oil outlet hole 148 corresponds to the oil sealing nozzle 144.

[0049] In this embodiment, during the transmission of the transmission chain 5, the protrusion 51 on the transmission chain 5 will contact and squeeze the sliding pin 145, so that the sliding pin 145 slides into the hollow shell 9, and then the sliding pin 145 drives the slider 143 to slide into the hollow block 142 and compress the spring 146. While the slider 143 slides, the oil sealing nozzle 144 on the slider 143 separates the oil outlet hole 148, so that the lubricating oil stored in the hollow shell 9 can flow out smoothly through the oil outlet hole 148, thereby lubricating the transmission chain 5 and the transmission gear 3, thereby avoiding the transmission chain from getting stuck after long-term use.

[0050] For details, please refer to Figure 5A spring 146 is provided on the inner side of the hollow block 142 , one end of the spring 146 is fixedly connected to the slider 143 , and the other end of the spring 146 is fixedly connected to the inner surface of the hollow block 142 .

[0051] In this embodiment, the spring 146 is provided to apply elastic force to the slider 143 .

[0052] For details, please refer to Figure 5 The side of the slider 143 is fixedly connected with a guide block 147 , and the guide block 147 is slidably connected to the hollow block 142 .

[0053] In this embodiment, the guide block 147 is provided to guide the sliding of the slider 143 inside the hollow block 142 .

[0054] Working principle: Step 1: The APCVD system will grow a predetermined thin film product according to the set time. The gas enters the regulating nozzle 1 through the gas pipe. At this time, the motor 6 is started to drive the driving gear 7 to rotate, and the driving gear 7 drives the transmission chain 5 to rotate, and the transmission chain 5 drives each transmission gear 3 to rotate at the same time, so that the air guide plate 4 coaxial with the transmission gear 3 rotates a certain angle accordingly, so that a certain size of gap is formed between adjacent air guide plates 4, and the gas can flow into the subsequent reaction tube through the gap. In this way, the size of the gap formed between the 4 air guide plates is adjusted according to the required reaction rate of the reactants. The larger the gap, the greater the amount of gas passing through, and vice versa, the smaller the amount of gas passing through;

[0055] Step 2: During the transmission of the transmission chain 5, the protrusion 51 on the transmission chain 5 contacts and squeezes the sliding pin 145, so that the sliding pin 145 slides into the hollow shell 9, and then the sliding pin 145 drives the slider 143 to slide into the hollow block 142 and compresses the spring 146;

[0056] Step 3: When the slider 143 slides, the oil sealing nozzle 144 on the slider 143 separates the oil outlet hole 148, so that the lubricating oil stored in the hollow shell 9 can smoothly flow out through the oil outlet hole 148, thereby lubricating the transmission chain 5 and the transmission gear 3, thereby preventing the transmission chain 5 from getting stuck after long-term use;

[0057] Step 4: When the level of the lubricating oil in the lower part of the inner side of the hollow shell 9 drops, the position of the float 134 drops immediately, and then the retaining ring 135 on the float 134 exposes the countersunk hole 1311, so that the prepared lubricating oil in the upper part of the hollow shell 9 will automatically fall down, and the lubricating oil below can be supplemented, thereby reducing the period of oiling by the staff;

[0058] Step 5: When the air guide plate 4 needs to be cleaned, the threaded shaft 87 is driven to rotate by the motor 2 86, and the moving block 85 moves back and forth in the axial direction of the threaded shaft 87. The moving block 85 will drive the slide bar 81 to move during the movement, and the slide bar 81 will drive the slide bar 83 to move, thereby driving the cleaning sleeve 82 at the end of the slide bar 83 to slide on the outside of the air guide plate 4 and clean it. In this way, on the one hand, it is not easy for materials to accumulate on the air guide plate 4 and affect the flow direction of the materials. On the other hand, it can reduce the waste of materials without affecting the rotation adjustment of the air guide plate 4.

[0059] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and improved concepts of the present invention within the technical scope disclosed by the present invention, and they should be covered by the protection scope of the present invention.

Claims

1. A particle control system for an APCVD deposition process, comprising a control nozzle (1), characterized in that: A plurality of rotating shafts (2) are installed inside the regulating jet head (1) via bearings, and one end of the rotating shaft (2) extends to the outside of the regulating jet head (1), and one end of each rotating shaft (2) located outside the regulating jet head (1) is fixedly connected to a transmission gear (3), and a middle section of the shaft body of the rotating shaft (2) is fixedly connected to an air guide plate (4), and a motor (6) is fixedly installed on the top of the regulating jet head (1), and a driving gear (7) is fixedly connected to the end of the output shaft of the motor (6), and a transmission rack (5) is meshed and connected to the outside of the driving gear (7) and the transmission gear (3), and a cleaning component (8) is arranged on the inside of the regulating jet head (1) and in front of the air guide plate (4), and a hollow shell (9) is fixedly connected to the outside of the regulating jet head (1) and on the side of the transmission chain (5), and an oiling mechanism (13) is arranged on the upper inner part of the hollow shell (9), and an automatic lubrication mechanism (14) is arranged on the lower inner part of the hollow shell (9).

2. The particle control system for APCVD deposition process according to claim 1, characterized in that: A refueling nozzle (10) is fixedly connected to the top of the hollow shell (9), a plug (11) is threadedly mounted on the inner side of the upper opening of the refueling nozzle (10), and a swivel (12) is fixedly connected to the upper end of the plug (11).

3. The particle control system of the APCVD deposition process according to claim 1, characterized in that: A magnetic block (15) is clamped at the bottom of the hollow shell (9), and a waste oil box (16) is fixedly connected to the side of the magnetic block (15) and located below the transmission chain (5), and the waste oil box (16) is in contact with the hollow shell (9).

4. The particle control system for APCVD deposition process according to claim 1, characterized in that: The cleaning assembly (8) comprises a slide bar (81) slidably connected to the inner side of the regulating nozzle (1); a slide rod (83) is slidably connected to the interior of the slide bar (81); one end of the slide rod (83) is fixedly connected to a limiting ball (84); the other end of the slide rod (83) is fixedly connected to a cleaning sleeve (82); the cleaning sleeve (82) is slidably sleeved on the outer side of the air guide plate (4); a moving block (85) is fixedly connected to the upper part of a side of the slide bar (81) away from the air guide plate (4); a second motor (86) is fixedly mounted on the inner wall of the regulating nozzle (1); an output of the second motor (86) is output. A threaded shaft (87) is fixedly connected to the end of the output shaft, and the other end of the threaded shaft (87) is mounted on the inner wall of the regulating jet head (1) via a bearing, the threaded shaft (87) penetrates the moving block (85) and is connected to the moving block (85) via a thread, a connecting frame (88) is fixedly connected to the lower part of the side of the slide bar (81) away from the air guide plate (4), the end of the connecting frame (88) is fixedly connected to a guide seat (89), and a guide rod (810) is fixedly connected to the lower inner part of the regulating jet head (1), and the guide rod (810) penetrates the guide seat (89) and is slidably connected to the guide seat (89).

5. The particle control system for APCVD deposition process according to claim 1, characterized in that: The oil adding mechanism (13) comprises an oil separator (131) fixedly connected to the upper inner side of the hollow shell (9); a countersunk hole (1311) is provided inside the oil separator (131); a sliding column (132) is slidably connected to the inner side of the countersunk hole (1311); one end of the sliding column (132) is fixedly connected to a limit block (133); a floating ball (134) is fixedly connected to the bottom of the sliding column (132); a retaining ring (135) is fixedly connected to the middle section of the column of the sliding column (132); the diameter of the retaining ring (135) is larger than the diameter of the countersunk hole (1311); the retaining ring (135) is in contact with the oil separator (131); a guide pin (136) is fixedly connected to the bottom of the oil separator (131); the guide pin (136) passes through the retaining ring (135) and is slidably connected to the retaining ring (135).

6. The particle control system for APCVD deposition process according to claim 1, characterized in that: The automatic lubrication mechanism (14) comprises a hollow vertical plate (141) fixedly connected to the bottom of the inner side of the hollow shell (9); a hollow block (142) is fixedly connected to the right side of the hollow vertical plate (141); a sliding block (143) is slidably connected to the interior of the hollow block (142); an end of the sliding block (143) away from the hollow vertical plate (141) is fixedly connected to an oil sealing nozzle (144) and a sliding pin (145); the oil sealing nozzle (144) and the sliding pin (145) are both slidably connected to the hollow shell (9); the sliding pin (145) is in contact with a transmission chain (5); and a protrusion (51) is fixedly connected to the surface of the transmission chain (5).

7. The particle control system for APCVD deposition process according to claim 6, characterized in that: A spring (146) is provided on the inner side of the hollow block (142); one end of the spring (146) is fixedly connected to the slider (143); and the other end of the spring (146) is fixedly connected to the inner surface of the hollow block (142).

8. The particle control system for APCVD deposition process according to claim 6, characterized in that: A guide block (147) is fixedly connected to the side of the sliding block (143), and the guide block (147) is slidably connected to the hollow block (142).

9. The particle control system for APCVD deposition process according to claim 6, characterized in that: An oil outlet hole (148) is provided inside the hollow shell (9), and the position of the oil outlet hole (148) corresponds to the oil sealing nozzle (144).

10. The method for using a particle control system for an APCVD deposition process according to any one of claims 1 to 8, characterized in that: The steps include: Step 1: The APCVD system will grow a predetermined thin film product according to the set time. The gas enters the regulating nozzle (1) through the gas pipe. At this time, the motor 1 (6) is started to drive the driving gear (7) to rotate. The driving gear (7) drives the transmission chain (5) to rotate, and the transmission chain (5) drives each transmission gear (3) to rotate at the same time, so that the air guide plate (4) coaxial with the transmission gear (3) rotates a certain angle accordingly, so that a certain size of gap is formed between adjacent air guide plates (4), and the gas can flow into the subsequent reaction tube through the gap. In this way, the size of the gap formed between the air guide plates (4) is adjusted according to the required reaction rate of the reactants. The larger the gap, the greater the amount of gas passing through. Conversely, the smaller the gap, the smaller the amount of gas passing through. Step 2: During the transmission of the transmission chain (5), the protrusion (51) on the transmission chain (5) contacts and squeezes the sliding pin (145), causing the sliding pin (145) to slide into the hollow shell (9), and then the sliding pin (145) drives the slider (143) to slide into the hollow block (142), and compresses the spring (146); Step 3: When the slider (143) slides, the oil sealing nozzle (144) on the slider (143) separates the oil outlet hole (148), so that the lubricating oil stored in the hollow shell (9) can smoothly flow out through the oil outlet hole (148), thereby lubricating the transmission chain (5) and the transmission gear (3), thereby preventing the transmission chain (5) from getting stuck after long-term use; Step 4: When the level of the lubricating oil in the lower inner part of the hollow shell (9) drops, the position of the float (134) drops immediately, and then the retaining ring (135) on the float (134) exposes the countersunk hole (1311), so that the prepared lubricating oil in the upper inner part of the hollow shell (9) will automatically fall down, and the lubricating oil below can be replenished, thereby reducing the period of oil refilling by the staff; Step 5: When the air guide plate (4) needs to be cleaned, the threaded shaft (87) is driven to rotate by the motor 86, and the moving block (85) moves back and forth in the axial direction of the threaded shaft (87). During the movement, the moving block (85) drives the slide bar (81) to move, and the slide bar (81) drives the slide bar (83) to move, thereby driving the cleaning sleeve (82) at the end of the slide bar (83) to slide on the outside of the air guide plate (4) and clean it. In this way, on the one hand, it is not easy for materials to accumulate on the air guide plate (4) and affect the flow direction of the materials. On the other hand, it can reduce the waste of materials and at the same time does not affect the rotation adjustment of the air guide plate (4).

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