Two-degree-of-freedom micro-motion platform

Abstract

The two-degree-of-freedom micro-motion platform comprises a base, a carrying platform, a driving mechanism and a transmission mechanism, the transmission mechanism comprises a plane flexible transmission assembly, first flexible transmission parts are arranged on the two sides, in the X-axis direction, of the plane flexible transmission assembly, and second flexible transmission parts are arranged on the two sides, in the Y-axis direction, of the plane flexible transmission assembly; the first flexible transmission part and the second flexible transmission part are both connected between the plane flexible transmission assembly and the base. The two-degree-of-freedom micro-motion platform is simple and compact in structure, when the object carrying platform moves in the working direction, the overall bearing capacity is high, the two-degree-of-freedom micro-motion platform can adapt to a heavy-load complex motion scene, when the object carrying platform moves in the non-working direction, the first flexible transmission part and the second flexible transmission part have torsional rigidity, and therefore the two-degree-of-freedom micro-motion platform is suitable for large-load complex motion scenes. Displacement of the loading platform in the non-working direction can be effectively restrained, parasitic motion is not prone to being generated, the torsion resistance is high, the loading platform can adapt to multi-degree-of-freedom complex motion scenes, stability is good, and adaptability is high.

Description

Technical Field

[0001] The invention relates to the technical field of micro-positioning systems, and in particular to a two-degree-of-freedom micro-motion platform. Background Art

[0002] Existing ultra-precision micro-motion platforms often have insufficient rigidity in the non-working direction and cannot meet the requirements of high rigidity in the non-working direction and low rigidity in the working direction. When the platform is subjected to external forces or disturbances in the non-working direction, the structure will undergo unexpected deformation or displacement, thereby reducing the accuracy and stability of the platform. In addition, there is often a coupling effect in the movement of the X-axis and Y-axis, making it difficult to achieve complete independent decoupling of the two directions. This coupling relationship causes movement in one direction to have an unnecessary impact on the other direction, thereby affecting the accuracy of the overall system and the stability of motion control.

[0003] A Chinese patent document with publication number CN114253004A discloses a linearized micro-translational positive stress electromagnetic micro-motion platform. This technical solution uses a guide rail slider as a transmission device. Although it can reduce coupling and suppress parasitic displacement caused by the driver, and has high rigidity in the non-working direction, it also introduces friction and has slightly lower repeatability accuracy. In particular, after working for a long time, friction may cause wear, resulting in a decrease in positioning accuracy.

[0004] A Chinese patent document with publication number CN114253004A discloses a two-degree-of-freedom decoupled large-stroke flexible structure micro-motion platform. This technical solution uses piezoelectric ceramics as the driving unit and manufactures an amplification mechanism based on the lever principle, but it uses a planar elastic mechanism for transmission. The planar elastic mechanism has certain limitations in terms of torsional performance. When it is necessary to withstand a large external torque or perform complex multi-dimensional movements, a single planar elastic mechanism may not be able to provide sufficient rigidity and stability. In particular, when dealing with lateral loads or torsional forces, the planar elastic mechanism is prone to deformation or even failure, resulting in parasitic motion. Summary of the invention

[0005] In order to solve the problems existing in the prior art during use, the present invention provides a two-degree-of-freedom micro-motion platform with a simple and compact structure, high load-bearing capacity, strong torsion resistance, good stability, and the ability to adapt to complex motion scenes with multiple degrees of freedom.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0007] A two-degree-of-freedom micro-motion platform comprises a base, a loading platform, a driving mechanism and a transmission mechanism, wherein the transmission mechanism comprises a planar compliant transmission component, wherein the planar compliant transmission component is provided with a first flexible transmission member on both sides along the X-axis direction, and the planar compliant transmission component is provided with a second flexible transmission member on both sides along the Y-axis direction, and the two ends of the planar compliant transmission component along the Z-axis direction are respectively connected to the driving mechanism and the loading platform, the first flexible transmission member and the second flexible transmission member are arranged along the Z-axis direction, and the first flexible transmission member and the second flexible transmission member are both connected between the planar compliant transmission component and the base.

[0008] As a further improvement of the above technical solution:

[0009] The planar flexible transmission component includes a central rigid block, and the two opposite sides of the central rigid block along the X-axis direction are each provided with a first decoupling transmission member, and the two opposite sides along the Y-axis direction are each provided with a second decoupling transmission member, the first flexible transmission member is connected between the first decoupling transmission member and the base, the second flexible transmission member is connected between the second decoupling transmission member and the base, and the two ends of the central rigid block along the Z-axis direction are respectively connected to the driving mechanism and the loading platform.

[0010] The first decoupling transmission member includes a first rigid beam and a pair of first flexible sheets arranged at intervals, one end of the first flexible sheet is connected to the side of the central rigid block along the X-axis direction, and the other end is connected to the first rigid beam, one end of the first flexible transmission member is connected to the base, and the other end is connected to the first rigid beam;

[0011] The second decoupling transmission member includes a second rigid beam and a pair of second flexible sheets arranged at intervals, one end of the second flexible sheet is connected to the side of the central rigid block along the Y-axis direction, and the other end is connected to the second rigid beam, one end of the second flexible transmission member is connected to the base, and the other end is connected to the second rigid beam.

[0012] The first flexible transmission member is threadedly connected to the first rigid beam and the base, the second flexible transmission member is threadedly connected to the second rigid beam and the base, the first flexible transmission member is provided with a first fine-tuning hole for fine-tuning along the Y-axis direction, and the second flexible transmission member is provided with a second fine-tuning hole for fine-tuning along the X-axis direction.

[0013] The first flexible sheet, the second flexible sheet, the first flexible transmission member and the second flexible transmission member are all in the shape of a straight circle, a universal shape or a straight beam.

[0014] A sensor mounting plate is provided between the loading platform and the transmission mechanism, the sensor mounting plate is connected to the base, a through hole is provided in the middle of the sensor mounting plate, the central rigid block is connected to the loading platform through the through hole, and a sensor component for obtaining displacement information of the loading platform is provided on the sensor mounting plate.

[0015] The sensor assembly includes a plurality of sensors, the sensor mounting plate is provided with a plurality of sensor mounting grooves on the inner periphery of the through hole, and the sensors are arranged in the sensor mounting grooves;

[0016] A cavity space is formed between the first decoupling transmission member and the central rigid block, and between the second decoupling transmission member and the central rigid block. The sensor mounting groove is accommodated in the cavity space and is arranged one-to-one with the cavity space. The sensor assembly obtains the displacement information of the loading platform by measuring the outer peripheral surface of the central rigid block.

[0017] The driving mechanism includes a mover, a coil, a first stator yoke arranged along the X-axis direction, and a second stator yoke arranged along the Y-axis direction. The mover is placed in the middle of the gaps between the first stator yoke and the second stator yoke. Coils are wound on both sides of the first stator yoke and the second stator yoke respectively. The mover is connected to a planar compliant transmission component.

[0018] The driving mechanism also includes multiple permanent magnets and iron core connectors. Permanent magnets are provided at both ends of the first stator yoke and the second stator yoke. There is a gap between the mover and the permanent magnet. The iron core connector is used to connect two adjacent permanent magnets to combine multiple permanent magnets.

[0019] A drive mechanism mounting groove is provided in the base, the drive mechanism is embedded in the drive mechanism mounting groove, a base mounting plate is provided on the top of the drive mechanism mounting groove, and one end of the first flexible transmission member and the second flexible transmission member are connected to the base mounting plate through a transmission connecting member.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The two-degree-of-freedom micro-motion platform of the present invention, on the basis of decoupling the working direction of the planar flexible transmission component, adds a first flexible transmission member and a second flexible transmission member arranged along the Z-axis direction to form a three-dimensional flexible transmission structure, which has a simple and compact structure, is frictionless and has higher precision than the technical solution of using a guide rail slider transmission; when the loading platform moves along the working direction, one of the first flexible transmission member and the second flexible transmission member always does not change, and the other flexible transmission member produces a deformation coordinated with the moving direction of the loading platform to assist the planar flexible transmission component in bearing pressure, while not affecting the transmission of the planar flexible transmission component to the driving mechanism, the deformation pressure of the planar flexible transmission component is reduced, the overall bearing capacity is improved, and it can adapt to complex motion scenes with large loads; when the loading platform moves along the non-working direction, since the first flexible transmission member and the second flexible transmission member are arranged along the Z-axis direction, they have torsional rigidity and are difficult to twist, and can effectively suppress the displacement of the loading platform in the non-working direction, are not prone to parasitic motion, have strong torsional resistance, can adapt to complex motion scenes with multiple degrees of freedom, have good stability, and strong adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the exploded structure of the two-degree-of-freedom micro-motion platform of the present invention.

[0023] Figure 2 It is a structural schematic diagram of a planar compliant transmission component in a two-degree-of-freedom micro-motion platform of the present invention.

[0024] Figure 3 It is a structural schematic diagram of the transmission mechanism in the two-degree-of-freedom micro-motion platform of the present invention.

[0025] Figure 4 It is a schematic structural diagram of the transmission mechanism in the two-degree-of-freedom micro-motion platform of the present invention when a force is applied in the X-axis direction.

[0026] Figure 5 It is a schematic structural diagram of the transmission mechanism in the two-degree-of-freedom micro-motion platform of the present invention when a force is applied in the Y-axis direction.

[0027] Figure 6 It is a structural schematic diagram of the driving mechanism in the two-degree-of-freedom micro-motion platform of the present invention.

[0028] Figure 7 It is a structural schematic diagram of a sensor mounting plate and a sensor assembly in a two-degree-of-freedom micro-motion platform of the present invention.

[0029] Legend: 1. Base; 11. Drive mechanism mounting groove; 12. Base mounting plate; 2. Loading platform; 3. Drive mechanism; 31. Mover; 32. Coil; 33. First stator yoke; 34. Second stator yoke; 35. Permanent magnet; 36. Core connector; 4. Transmission mechanism; 41. Planar compliant transmission assembly; 411. Central rigid block; 4111. Groove; 412. First decoupling transmission member; 4121. First rigid beam; 4122. First flexible sheet; 413. Second decoupling transmission member; 4131. Second rigid beam; 4132. Second flexible sheet; 414. Cavity space; 42. First flexible transmission member; 421. First fine-tuning hole; 43. Second flexible transmission member; 431. Second fine-tuning hole; 44. Transmission connector; 5. Sensor assembly; 51. Sensor; 6. Sensor mounting plate; 61. Through hole; 62. Sensor mounting groove. DETAILED DESCRIPTION

[0030] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0033] In the present invention, unless otherwise clearly specified and limited, the terms "assemble", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] like Figures 1 to 7As shown, the two-degree-of-freedom micro-motion platform of this embodiment includes a base 1, a loading platform 2, a driving mechanism 3 and a transmission mechanism 4, the transmission mechanism 4 includes a planar flexible transmission component 41, the planar flexible transmission component 41 is provided with a first flexible transmission member 42 on both sides along the X-axis direction, the planar flexible transmission component 41 is provided with a second flexible transmission member 43 on both sides along the Y-axis direction, the two ends of the planar flexible transmission component 41 along the Z-axis direction are respectively connected to the driving mechanism 3 and the loading platform 2, the first flexible transmission member 42 and the second flexible transmission member 43 are arranged along the Z-axis direction, and the first flexible transmission member 42 and the second flexible transmission member 43 are both connected between the planar flexible transmission component 41 and the base 1.

[0035] In the two-degree-of-freedom micro-motion platform of this embodiment, when working, the detection instrument is installed on the loading platform 2. When the driving mechanism 3 drives the loading platform 2 to move along the X-axis direction through the plane flexible transmission component 41, the plane flexible transmission component 41 decouples the working direction (X-axis and Y-axis directions), and the two groups of first flexible transmission members 42 on both sides of the plane flexible transmission component 41 along the X-axis direction are elastically bent and deformed (such as Figure 4 As shown in the figure, the planar flexible transmission component 41, the first flexible transmission member 42 and the second flexible transmission member 43 jointly constrain the movement trajectory of the loading platform 2 along the X-axis direction to prevent the loading platform 2 from deflecting to both sides of the X-axis direction; when the driving mechanism 3 drives the loading platform 2 to move along the Y-axis direction through the planar flexible transmission component 41, the planar flexible transmission component 41 decouples the working direction, and the two groups of second flexible transmission members 43 on both sides of the planar flexible transmission component 41 along the Y-axis direction undergo elastic bending deformation (as shown in the figure). Figure 5 As shown in the figure), the planar flexible transmission component 41, the first flexible transmission member 42 and the second flexible transmission member 43 jointly constrain the movement trajectory of the loading platform 2 along the Y-axis direction, avoiding the loading platform 2 from deflecting to both sides of the Y-axis direction, thereby realizing the transmission of the loading platform 2. After the elastic deformation is completed, the loading platform 2 will return to the preset position from the deformed position.

[0036] The two-degree-of-freedom micro-motion platform of this embodiment, on the basis of decoupling the working direction of the planar flexible transmission component 41, is additionally provided with a first flexible transmission member 42 and a second flexible transmission member 43 arranged along the Z-axis direction, so as to form a three-dimensional flexible transmission structure with a simple and compact structure, and having no friction and higher precision than the technical solution using the guide rail and slider transmission. When the loading platform 2 moves along the working direction, one of the first flexible transmission member 42 and the second flexible transmission member 43 always remains unchanged, and the other flexible transmission member produces a deformation coordinated with the moving direction of the loading platform 2 to assist the planar flexible transmission. The dynamic component 41 is subjected to pressure, and the deformation pressure of the planar flexible transmission component 41 is reduced without affecting the transmission of the drive mechanism 3 by the planar flexible transmission component 41, thereby improving the overall load-bearing capacity and being able to adapt to complex motion scenes with large loads. When the loading platform 2 moves along the non-working direction, since the first flexible transmission component 42 and the second flexible transmission component 43 are arranged along the Z-axis direction, they have torsional rigidity and are difficult to twist. This can effectively suppress the displacement of the loading platform 2 in the non-working direction, is not easy to produce parasitic motion, has strong torsional resistance, can adapt to complex motion scenes with multiple degrees of freedom, and has good stability and strong adaptability.

[0037] Furthermore, in this embodiment, the planar compliant transmission assembly 41 includes a central rigid block 411, and the two opposite sides of the central rigid block 411 along the X-axis direction are provided with a first decoupling transmission member 412, and the two opposite sides along the Y-axis direction are provided with a second decoupling transmission member 413, the first flexible transmission member 42 is connected between the first decoupling transmission member 412 and the base 1, and the second flexible transmission member 43 is connected between the second decoupling transmission member 413 and the base 1, and the two ends of the central rigid block 411 along the Z-axis direction are respectively connected to the driving mechanism 3 and the loading platform 2. When the driving mechanism 3 drives the central rigid block 411 to move along the X-axis direction (such as Figure 4 As shown in FIG. 1 , the second decoupling transmission member 413 is deformed, while the first decoupling transmission member 412 is not changed, and the driving force of the driving mechanism 3 is converted into the elastic force of the second decoupling transmission member 413, thereby realizing the decoupling of the working direction movement. When the driving mechanism 3 drives the central rigid block 411 to move along the Y-axis direction, the same is true and will not be described in detail.

[0038] Furthermore, if Figures 3 to 5As shown, in this embodiment, the first decoupling transmission member 412 includes a first rigid beam 4121 and a pair of first flexible sheets 4122 arranged at intervals, one end of the first flexible sheet 4122 is connected to the side of the central rigid block 411 along the X-axis direction, and the other end is connected to the first rigid beam 4121, one end of the first flexible transmission member 42 is connected to the base 1, and the other end is connected to the first rigid beam 4121; the second decoupling transmission member 413 includes a second rigid beam 4131 and a pair of second flexible sheets 4132 arranged at intervals, one end of the second flexible sheet 4132 is connected to the side of the central rigid block 411 along the Y-axis direction, and the other end is connected to the second rigid beam 4131, one end of the second flexible transmission member 43 is connected to the base 1, and the other end is connected to the second rigid beam 4131. The first rigid beam 4121 and the second rigid beam 4131 have a large thickness, are not easily deformed, have strong bending stiffness, and can effectively resist the overturning moment caused by the eccentric mass in the non-working direction. The first rigid beam 4121 and the second rigid beam 4131 as well as the first flexible transmission member 42 and the second flexible transmission member 43 all have high shear stiffness and can effectively resist the bending moment of the system around the non-working direction. Figure 4 As shown in the figure, since the central rigid block 411, the first rigid beam 4121 and the second rigid beam 4131 have strong axial rigidity, and the second flexible transmission member 43 has strong shear rigidity, none of them change during the movement, and the two groups of second flexible sheets 4132 are deformed, and part of the driving force of the driving mechanism 3 is converted into the elastic force of the second decoupling transmission member 413, thereby realizing the decoupling of the working direction movement, and part of it is transmitted to the first flexible transmission member 42 to bend and deform, and assist in bearing pressure. The same is true when the driving mechanism 3 drives the central rigid block 411 to move along the Y-axis direction, and no further details are given. In this embodiment, under the action of the driving force, the first flexible sheet 4122, the second flexible sheet 4132, the first flexible transmission member 42 and the second flexible transmission member 43 are all cantilever beam structures, and the bending stiffness of the flexible sheet and the flexible transmission member differs by three orders of magnitude from the shear stiffness, axial stiffness, torsional stiffness of the flexible sheet and the flexible transmission member and the stiffness of the rigid beam.

[0039] Further, in the present embodiment, the first flexible transmission member 42 is threadedly connected to the first rigid beam 4121 and the base 1, and the second flexible transmission member 43 is threadedly connected to the second rigid beam 4131 and the base 1 (specifically, the first flexible transmission member 42 is threadedly connected to the transmission connection member 44 provided on the base 1), and the first flexible transmission member 42 is provided with a first fine-tuning hole 421 that can be fine-tuned along the Y-axis direction, and the second flexible transmission member 43 is provided with a second fine-tuning hole 431 that can be fine-tuned along the X-axis direction. The first rigid beam 4121 and the transmission connection member 44 are provided with threaded holes corresponding to the first fine-tuning holes 421, and the second rigid beam 4131 and the transmission connection member 44 are provided with threaded holes corresponding to the second fine-tuning holes 431. By adjusting the positions of the first fine-tuning holes 421 and the second fine-tuning holes 431, the first flexible transmission member 42 and the second flexible transmission member 43 can be calibrated with higher precision.

[0040] Furthermore, in this embodiment, the first flexible sheet 4122, the second flexible sheet 4132, the first flexible transmission member 42, and the second flexible transmission member 43 are all straight beam-shaped. The first flexible sheet 4122, the second flexible sheet 4132, the first flexible transmission member 42, and the second flexible transmission member 43 are all straight beam-shaped flexible springs, which have a simple and reliable structure. Of course, in other embodiments, they can also be straight circular or universal flexible springs, or flexible hinges.

[0041] Furthermore, if Figure 7 As shown, in this embodiment, a sensor mounting plate 6 is provided between the loading platform 2 and the transmission mechanism 4, the sensor mounting plate 6 is connected to the base 1 (specifically, the sensor mounting plate 6 is connected to the base mounting plate 12), a through hole 61 is provided in the middle of the sensor mounting plate 6, the central rigid block 411 passes through the through hole 61 and is connected to the loading platform 2, and a sensor assembly 5 for obtaining displacement information of the loading platform 2 is provided on the sensor mounting plate 6. The sensor assembly 5 can monitor the position information of the loading platform 2 relative to the base 1 in real time, and feed back to the servo control unit of the driving mechanism 3 to achieve adjustment from the current position to the target position, and realize closed-loop control; the sensor mounting plate 6 is provided between the loading platform 2 and the transmission mechanism 4, so that the sensor assembly 5 can be closer to the loading platform 2 for displacement monitoring, and the monitoring is more accurate.

[0042] Furthermore, in this embodiment, the sensor assembly 5 includes a plurality of sensors 51, and the sensor mounting plate 6 is provided with a plurality of sensor mounting grooves 62 on the inner periphery of the through hole 61, and the sensors 51 are arranged in the sensor mounting grooves 62; a cavity space 414 is respectively enclosed between the first decoupling transmission member 412 and the central rigid block 411, and between the second decoupling transmission member 413 and the central rigid block 411, and the sensor mounting grooves 62 are accommodated in the cavity space 414 and are arranged one-to-one with the cavity space 414. The sensor assembly 5 obtains the displacement information of the loading platform 2 by measuring the outer peripheral surface of the central rigid block 411. The shape of the sensor mounting plate 6 is complementary to that of the planar compliant transmission component 41, and the sensor mounting grooves 62 are accommodated in the cavity space 414 one by one. Since the cavity space 414 is provided with two in the X-axis direction and the Y-axis direction of the central rigid block 411, the sensor mounting grooves 62 and the sensors 51 arranged in the sensor mounting grooves 62 are also provided with two in the X-axis direction and the Y-axis direction of the central rigid block 411, that is, each of the four outer peripheral surfaces of the central rigid block 411 is provided with a corresponding sensor 51. The sensor 51 does not need to directly measure the displacement of the loading platform 2, but obtains the displacement information of the loading platform 2 by measuring the distance between the four outer peripheral surfaces of the central rigid block 411 and the sensor 51. The measurement process is simple and reliable, and the layout of the sensor 51 is made more compact and reasonable.

[0043] In this embodiment, the sensor 51 and the sensor mounting groove 62 are mounted by threaded connection. Of course, in other embodiments, they may also be mounted by gluing or other methods.

[0044] In this embodiment, the sensor 51 is an inductive sensor. Of course, in other embodiments, the sensor 51 may also be an eddy current micro-displacement sensor, a capacitive micro-displacement sensor, a grating ruler, a photoelectric detector or other micro-displacement position detection sensor.

[0045] Furthermore, if Figure 6As shown, in this embodiment, the driving mechanism 3 includes a mover 31, a coil 32, a first stator yoke 33 arranged along the X-axis direction, and a second stator yoke 34 arranged along the Y-axis direction. The mover 31 is placed in the middle of the gap between the first stator yoke 33 and the second stator yoke 34. The coils 32 are wound on both sides of the first stator yoke 33 and the second stator yoke 34, and the mover 31 is connected to the planar compliant transmission component 41. The first stator yoke 33 and the second stator yoke 34 are arranged crosswise to achieve the actuation of the two degrees of freedom of the mover 31, and the structure is simple and reliable. Preferably, in this embodiment, the driving mechanism 3 is an electromagnetic actuator of a double "U" type separate configuration, and the "U" type coils on both sides of the first stator yoke 33 and the second stator yoke 34 work independently, and there is no direct connection between them, so that each coil has independent control capabilities, thereby improving the flexibility and reliability of the system. Of course, in other embodiments, a double "U" type combined electromagnetic actuator.

[0046] Specifically, a groove 4111 is provided in the central rigid block 411 , the mover 31 is installed at the bottom of the groove 4111 , and the loading platform 2 is installed at the top of the groove.

[0047] Furthermore, in this embodiment, the driving mechanism 3 further includes a plurality of permanent magnets 35 and an iron core connector 36. The first stator yoke 33 and the second stator yoke 34 are both provided with permanent magnets 35 at both ends. There is a gap between the mover 31 and the permanent magnet 35. The iron core connector 36 is used to connect two adjacent permanent magnets 35 to combine a plurality of permanent magnets 35. The permanent magnet 35 can provide a constant magnetic field, which is superimposed with the magnetic field generated by the coil 32, thereby enhancing the magnetic field strength of the entire system and improving the thrust of the driving mechanism 3. Moreover, the elastic deformation force of the transmission mechanism 4 is greater than the suction force of the permanent magnet 35. The suction force of the permanent magnet 35 can provide additional restraint force for the micro-motion platform, and also ensure that a high stability can be maintained during operation, reducing the influence of external interference.

[0048] Furthermore, if Figure 1 As shown, in this embodiment, a drive mechanism installation groove 11 is provided in the base 1, and the drive mechanism 3 is embedded in the drive mechanism installation groove 11. A base installation plate 12 is provided on the top of the drive mechanism installation groove 11, and one end of the first flexible transmission member 42 and the second flexible transmission member 43 are connected to the base installation plate 12 through a transmission connection member 44. One end of the first flexible transmission member 42 and the second flexible transmission member 43 are connected to the transmission connection member 44, and the other end is connected to the first rigid beam 4121 and the second rigid beam 4131. The transmission connection member 44 is arranged on the base installation plate 12, and the assembly is simple and reliable.

[0049] In this embodiment, all components are made of titanium alloy Ti-6Ai-4V and are processed by wire cutting with slow wire cutting; on the premise of meeting the strength, rigidity, and processing and assembly processability, the above materials include but are not limited to aluminum alloy, stainless steel, titanium alloy, etc., and the processing methods include but are not limited to wire cutting, machining, 3D printing, etc.

[0050] The above is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as above in the preferred embodiment, it is not used to limit the present invention. Any technician familiar with the art can make many possible changes and modifications to the technical solution of the present invention by using the methods and technical contents disclosed above without departing from the spirit and technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention, still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A two-degree-of-freedom micro-motion platform, characterized in that: The invention comprises a base (1), a loading platform (2), a driving mechanism (3) and a transmission mechanism (4), wherein the transmission mechanism (4) comprises a planar flexible transmission component (41), wherein the planar flexible transmission component (41) is provided with a first flexible transmission member (42) on both sides along the X-axis direction, and the planar flexible transmission component (41) is provided with a second flexible transmission member (43) on both sides along the Y-axis direction, and the two ends of the planar flexible transmission component (41) along the Z-axis direction are respectively connected to the driving mechanism (3) and the loading platform (2), wherein the first flexible transmission member (42) and the second flexible transmission member (43) are arranged along the Z-axis direction, and the first flexible transmission member (42) and the second flexible transmission member (43) are both connected between the planar flexible transmission component (41) and the base (1).

2. The two-degree-of-freedom micro-motion platform according to claim 1, characterized in that: The planar flexible transmission component (41) comprises a central rigid block (411), wherein two opposite sides of the central rigid block (411) along the X-axis direction are provided with a first decoupling transmission member (412), and two opposite sides along the Y-axis direction are provided with a second decoupling transmission member (413), wherein the first flexible transmission member (42) is connected between the first decoupling transmission member (412) and the base (1), and the second flexible transmission member (43) is connected between the second decoupling transmission member (413) and the base (1), and the two ends of the central rigid block (411) along the Z-axis direction are respectively connected to the driving mechanism (3) and the loading platform (2).

3. The two-degree-of-freedom micro-motion platform according to claim 2, characterized in that: The first decoupling transmission member (412) comprises a first rigid beam (4121) and a pair of first flexible sheets (4122) arranged at intervals, one end of the first flexible sheet (4122) is connected to the side surface of the central rigid block (411) along the X-axis direction, and the other end is connected to the first rigid beam (4121); one end of the first flexible transmission member (42) is connected to the base (1), and the other end is connected to the first rigid beam (4121); The second decoupling transmission member (413) includes a second rigid beam (4131) and a pair of second flexible sheets (4132) arranged at intervals, one end of the second flexible sheet (4132) is connected to the side of the central rigid block (411) along the Y-axis direction, and the other end is connected to the second rigid beam (4131); one end of the second flexible transmission member (43) is connected to the base (1), and the other end is connected to the second rigid beam (4131).

4. The two-degree-of-freedom micro-motion platform according to claim 3, characterized in that: The first flexible transmission member (42) is threadedly connected to the first rigid beam (4121) and the base (1); the second flexible transmission member (43) is threadedly connected to the second rigid beam (4131) and the base (1); the first flexible transmission member (42) is provided with a first fine-tuning hole (421) that can be fine-tuned along the Y-axis direction; the second flexible transmission member (43) is provided with a second fine-tuning hole (431) that can be fine-tuned along the X-axis direction.

5. The two-degree-of-freedom micro-motion platform according to claim 3, characterized in that: The first flexible sheet (4122), the second flexible sheet (4132), the first flexible transmission member (42) and the second flexible transmission member (43) are all in the shape of a straight circle, a universal shape or a straight beam.

6. The two-degree-of-freedom micro-motion platform according to claim 2, characterized in that: A sensor mounting plate (6) is provided between the loading platform (2) and the transmission mechanism (4); the sensor mounting plate (6) is connected to the base (1); a through hole (61) is provided in the middle of the sensor mounting plate (6); the central rigid block (411) passes through the through hole (61) and is connected to the loading platform (2); and a sensor assembly (5) for obtaining displacement information of the loading platform (2) is provided on the sensor mounting plate (6).

7. The two-degree-of-freedom micro-motion platform according to claim 6, characterized in that: The sensor assembly (5) comprises a plurality of sensors (51); the sensor mounting plate (6) is provided with a plurality of sensor mounting grooves (62) on the inner periphery of the through hole (61); and the sensors (51) are arranged in the sensor mounting grooves (62); A cavity space (414) is formed between the first decoupling transmission member (412) and the central rigid block (411), and between the second decoupling transmission member (413) and the central rigid block (411). The sensor mounting groove (62) is accommodated in the cavity space (414) and is arranged in a one-to-one correspondence with the cavity space (414). The sensor assembly (5) obtains displacement information of the loading platform (2) by measuring the outer peripheral surface of the central rigid block (411).

8. The two-degree-of-freedom micro-motion platform according to any one of claims 1 to 7, characterized in that: The driving mechanism (3) comprises a mover (31), a coil (32), a first stator yoke (33) arranged along the X-axis direction, and a second stator yoke (34) arranged along the Y-axis direction; the mover (31) is placed in the middle of the gaps between the first stator yoke (33) and the second stator yoke (34); the coils (32) are respectively wound on both sides of the first stator yoke (33) and the second stator yoke (34); and the mover (31) is connected to a planar compliant transmission component (41).

9. The two-degree-of-freedom micro-motion platform according to claim 8, characterized in that: The driving mechanism (3) further comprises a plurality of permanent magnets (35) and an iron core connector (36); permanent magnets (35) are provided at both ends of the first stator yoke (33) and the second stator yoke (34); a gap exists between the mover (31) and the permanent magnet (35); and the iron core connector (36) is used to connect two adjacent permanent magnets (35) to combine a plurality of permanent magnets (35).

10. The two-degree-of-freedom micro-motion platform according to any one of claims 1 to 7, characterized in that: A drive mechanism mounting groove (11) is provided in the base (1), the drive mechanism (3) is embedded in the drive mechanism mounting groove (11), a base mounting plate (12) is provided on the top of the drive mechanism mounting groove (11), and one end of each of the first flexible transmission member (42) and the second flexible transmission member (43) is connected to the base mounting plate (12) via a transmission connecting member (44).

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