Dehumidification device and wet processing equipment

Abstract

The invention discloses a dehumidification device and wet processing equipment, and belongs to the technical field of liquid crystal panel manufacturing, the dehumidification device comprises a box body, an air pressure assembly and a dehumidification structure, and a containing cavity is formed in the box body; the air pressure assembly is used for blowing air to the to-be-dried articles in the containing cavity so that the air pressure in the containing cavity can be larger than the external air pressure; the dehumidification structure is arranged at the top of the box body and comprises a shell, an exhaust channel is defined by the shell, an air inlet of the exhaust channel is communicated with the containing cavity, an exhaust port of the exhaust channel is communicated with the outside, and a filter screen is arranged on an exhaust path of the exhaust channel. The wet treatment equipment comprises a bearing assembly and the dehumidification device, and the bearing assembly is arranged in the box body and used for bearing the to-be-dried articles. Gas in the accommodating cavity flows out of the exhaust channel of the shell under the action of pressure difference, so that the problem of water vapor condensation in the box body is solved; and due to the arrangement of the filter screen, external dust can be prevented from entering the accommodating cavity, so that a dust-free environment is kept in the box body.

Description

Technical Field

[0001] The present invention relates to the technical field of liquid crystal panel manufacturing, and in particular to a dehumidification device and wet processing equipment. Background Art

[0002] In the LCD / semiconductor display industry, a large number of processes use wet processing methods, such as using pure water to clean products and using acidic / alkaline / organic solutions to process products.

[0003] Existing wet processing equipment uses a sealed chamber. During the wet processing, a large amount of mist will be generated and float inside the chamber. During the product production process, the mist in the chamber may re-adhere to the surface of the product that has been dried, causing defects. More seriously, when the humidity inside the chamber reaches a certain level, it will condense into droplets on the top / side wall of the chamber, and then drip onto the surface of the product, causing more serious product quality problems. Summary of the invention

[0004] The object of the present invention is to provide a dehumidification device and a wet processing equipment to solve the technical problem in the prior art that water vapor inside a cavity is too much and easily condensed in a wet process.

[0005] As conceived above, the technical solution adopted by the present invention is:

[0006] A dehumidification device, comprising:

[0007] A box body, wherein a receiving cavity is formed inside the box body;

[0008] An air pressure component, used for blowing air toward the objects to be dried in the accommodating chamber so that the air pressure in the accommodating chamber is greater than the external air pressure;

[0009] A dehumidification structure is arranged on the top of the box body, and the dehumidification structure includes an outer shell, which surrounds an exhaust channel. The air inlet of the exhaust channel is connected to the accommodating cavity, the exhaust port of the exhaust channel is connected to the outside, and a filter is arranged on the exhaust path of the exhaust channel.

[0010] Preferably, the filter is arranged at the exhaust port and connected to the outer shell.

[0011] Preferably, the exhaust port is arranged on a side of the shell.

[0012] Preferably, two exhaust ports are provided and are distributed on opposite sides of the shell.

[0013] Preferably, the dehumidification structure further comprises an exhaust cover plate, and the exhaust cover plate is slidably connected to the shell to open or close the exhaust port.

[0014] Preferably, the dehumidification structure further comprises a driving mechanism, wherein the driving mechanism is disposed on the outer shell and connected to the exhaust cover plate, and the driving mechanism is used for driving the exhaust cover plate to move in a straight line.

[0015] Preferably, the driving mechanism includes a rotating shaft and a gear, the rotating shaft is rotatably connected to the outer shell, the gear is arranged on the rotating shaft, the exhaust cover plate is provided with an engaging structure that can engage with the gear, and the rotating shaft can rotate around its own axis to drive the exhaust cover plate to move.

[0016] Preferably, a detection component is further included, wherein the detection component is used to detect the humidity value in the accommodating cavity, and the driving mechanism drives the exhaust cover plate to adjust the flow area of ​​the exhaust port according to the humidity value.

[0017] Preferably, a mounting opening communicating with the accommodating cavity is provided on the top of the box body, and the outer shell protrudes from the top of the box body and is buckled over the mounting opening.

[0018] A wet processing device comprises a supporting component and the dehumidification device as described above, wherein the supporting component is arranged in the box body and is used for supporting objects to be dried.

[0019] Beneficial effects of the present invention:

[0020] The dehumidification device proposed in the present invention is used for dehumidifying articles to be dried. A containing chamber is formed inside a box body, and the articles to be dried are placed in the containing chamber. Dry gas is blown to the articles to be dried in the containing chamber by an air pressure component. The dry gas takes away moisture on the surface of the articles to be dried during the flow process, so that the articles to be dried are dried. The air pressure component blows air into the containing chamber, which makes the air pressure in the containing chamber greater than the external air pressure. As the air pressure component blows air into the containing chamber, the gas in the containing chamber flows out from the exhaust channel of the outer shell under the action of the pressure difference. The water vapor carried in the gas flows to the outside with the gas and will not condense on the top of the box body, thereby improving the problem of water vapor condensation inside the box body, and no condensed water droplets will fall on the articles to be dried. The setting of the filter can prevent external dust from entering the containing chamber, so that the inside of the box body maintains a dust-free environment and avoids pollution to the articles to be dried. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic structural diagram of a dehumidification device provided by an embodiment of the present invention;

[0022] Figure 2 is a top view of a dehumidification device provided by an embodiment of the present invention;

[0023] Figure 3 yes Figure 2 AA section view;

[0024] Figure 4 yes Figure 3 A magnified view of point B;

[0025] Figure 5 is a structural schematic diagram of a dehumidification structure provided by an embodiment of the present invention;

[0026] Figure 6 yes Figure 5 Enlarged view of point C;

[0027] Figure 7 is a schematic structural diagram of a driving mechanism provided by an embodiment of the present invention;

[0028] Figure 8 It is a partial structural schematic diagram of the dehumidification structure provided in an embodiment of the present invention.

[0029] In the figure:

[0030] 10. Box body; 11. Accommodating cavity; 12. Installation opening;

[0031] 20. Air pressure components;

[0032] 30. Dehumidification structure; 31. Shell; 311. Exhaust channel; 312. Exhaust port; 32. Filter; 33. Exhaust cover; 331. Engagement hole; 34. Driving mechanism; 341. Rotating shaft; 342. Gear; 343. Mounting seat; 35. Slide rail; 36. Handle;

[0033] 100. Support component. DETAILED DESCRIPTION

[0034] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0035] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0037] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0038] See also Figures 1 to 8 This embodiment provides a dehumidification device, which can be used in wet processes in the display field, and can also be used in other process flows that require dehumidification. The dehumidification device includes a housing 10, an air pressure component 20, and a dehumidification structure 30. The interior of the housing 10 forms a receiving chamber 11; the air pressure component 20 is used to blow air to the items to be dried in the receiving chamber 11 so that the air pressure in the receiving chamber 11 is greater than the air pressure outside; the dehumidification structure 30 is arranged on the top of the housing 10, and the dehumidification structure 30 includes an outer shell 31, and the outer shell 31 encloses an exhaust channel 311, the air inlet of the exhaust channel 311 is connected to the receiving chamber 11, the exhaust port 312 of the exhaust channel 311 is connected to the outside, and a filter 32 is arranged on the exhaust path of the exhaust channel 311.

[0039] The dehumidifier is used to dehumidify the items to be dried. A receiving chamber 11 is formed inside the box 10. The items to be dried are placed in the receiving chamber 11. Dry gas is blown to the items to be dried in the receiving chamber 11 through the air pressure component 20. The dry gas takes away the moisture on the surface of the items to be dried during the flow process, so that the items to be dried are dried. The air pressure component 20 blows air into the receiving chamber 11, which makes the air pressure in the receiving chamber 11 greater than the external air pressure. As the air pressure component 20 blows air into the receiving chamber 11, under the action of the pressure difference, the gas in the receiving chamber 11 flows out from the exhaust channel 311 of the shell 31, and the water vapor carried in the gas flows to the outside with the gas, and will not condense on the top of the box 10, thereby improving the problem of water vapor condensation inside the box 10, and no condensed water droplets will fall on the items to be dried. The setting of the filter 32 can prevent external dust from entering the receiving chamber 11, so that the inside of the box 10 maintains a dust-free environment and avoids pollution to the items to be dried.

[0040] The shape of the box 10 can be set according to actual needs, such as a cylinder, a cuboid, etc. In this embodiment, the box 10 is in a cuboid shape, and the accommodating cavity 11 formed therein is a cuboid cavity, which is convenient for processing and production, and for the articles to be dried to enter and exit the accommodating cavity 11.

[0041] Exemplarily, a material inlet and outlet are provided on one side of the box body 10 so that the objects to be dried can enter and exit the accommodating chamber 11. A material inlet and outlet door is provided at the material inlet and outlet, that is, when the material inlet and outlet door is opened, the objects to be dried enter the accommodating chamber 11 or are transported out of the accommodating chamber 11. Exemplarily, a material inlet and an outlet are provided on opposite sides of the box body 10, respectively, so that the objects to be dried can enter and exit the accommodating chamber 11. A material inlet door is provided at the material inlet, and a material outlet door is provided at the material outlet, that is, when the material inlet door is opened, the objects to be dried enter the accommodating chamber 11, and when the material outlet door is opened, the objects to be dried are transported out of the accommodating chamber 11.

[0042] The air pressure component 20 can adopt an existing jet component, for example, the air pressure component 20 includes a fan, a pipeline and a dryer, the fan is connected to the accommodating chamber 11 through the pipeline, the fan is used to blow gas into the accommodating chamber 11, the dryer is arranged on the pipeline to dry the gas blown by the fan, so as to provide dry gas into the accommodating chamber 11, and part of the pipeline can be arranged in the accommodating chamber 11 to guide the gas to the location of the object to be dried. Optionally, a heating module is arranged on the pipeline to heat the gas to a set temperature to improve the drying efficiency.

[0043] The item to be dried may be a display panel or other items that need to be dried. Exemplarily, the item to be dried is a display panel, which can be transported to the accommodating chamber 11 through the feed port by the existing conveying assembly, the feed door and the discharge door are both in a closed state, the air pressure assembly 20 is turned on, and dry gas is blown to the display panel in the accommodating chamber 11 through the air pressure assembly 20. Optionally, air outlets are provided above and below the display panel so that the dry gas is blown to the upper and lower surfaces of the display panel to improve the drying efficiency. The gas takes away the moisture on the surface of the display panel during the flow, so that the display panel is dried. The air pressure component 20 blowing air into the accommodating chamber 11 will make the air pressure in the accommodating chamber 11 greater than the external air pressure. As the air pressure component 20 blows air into the accommodating chamber 11, under the action of the pressure difference, the gas in the accommodating chamber 11 flows out from the exhaust channel 311 of the outer shell 31, and the water vapor carried in the gas flows to the outside with the gas and will not condense on the top of the box body 10, thereby improving the water vapor condensation problem inside the box body 10, and no condensed water droplets will fall on the display panel.

[0044] In this embodiment, the dehumidification structure 30 is disposed on the top of the box body 10, specifically, the top of the box body 10 is provided with a mounting port 12 connected to the accommodating chamber 11, and the housing 31 protrudes from the top of the box body 10 and is buckled on the mounting port 12. The housing 31 protrudes from the top of the box body 10, which is conducive to the outflow of gas. Among them, the mounting port 12 opened on the top of the box body 10 serves as the air inlet of the exhaust channel 311.

[0045] In some embodiments, the housing 31 is detachably connected to the housing 10 for easy installation, removal and replacement. Specifically, it can be a sliding connection, a snap connection, a magnetic connection or a screw connection. In some embodiments, the housing 31 is welded to the housing 10 for a stable connection and easy transportation.

[0046] The shape of the housing 31 can be set according to actual needs, such as a cylinder, a cuboid, etc. In this embodiment, the housing 31 is in the shape of a cuboid, and a cuboid cavity is formed inside the housing as the exhaust channel 311 .

[0047] The filter 32 can be arranged at the air inlet of the exhaust channel 311, or at the exhaust port 312 of the exhaust channel 311, or at any position between the air inlet and the exhaust port 312, and can play a filtering role as long as it is located on the exhaust path. Since the filter 32 is arranged to prevent external dust from entering the accommodating chamber 11, the filter 32 is arranged at the exhaust port 312 to prevent dust from entering the exhaust channel 311, thereby achieving a better dust isolation effect. In this embodiment, the filter 32 is arranged at the exhaust port 312 and is connected to the housing 31.

[0048] One or more filter screens 32 may be provided. When multiple filter screens 32 are provided, one filter screen 32 is provided at the exhaust port 312 , and the remaining filter screens 32 may be provided in the exhaust passage 311 .

[0049] The filter screen 32 is detachably connected to the housing 31 for easy installation, removal and replacement. Specifically, it can be a sliding connection, a snap connection, a magnetic connection or a screw connection. Exemplarily, the filter screen 32 is screwed to the housing 31.

[0050] The shape of the exhaust port 312 can be set according to actual needs, such as circular, elliptical or rectangular. In this embodiment, the exhaust port 312 is rectangular, and the corresponding filter screen 32 is rectangular.

[0051] Since the housing 31 is buckled and covered at the mounting opening 12 at the top of the box body 10, the exhaust port 312 can be arranged at the top and / or the side of the housing 31. In this embodiment, the exhaust port 312 is arranged at the side of the housing 31, making full use of the circumferential space of the housing 31, ensuring that the exhaust port 312 has a large flow area, and avoiding the exhaust gas from affecting other devices.

[0052] When the exhaust port 312 is disposed on the side of the housing 31, the exhaust port 312 may be disposed on one side, two sides, three sides, or four sides of the housing 31. In the present embodiment, two exhaust ports 312 are disposed and distributed on opposite sides of the housing 31. On the one hand, the exhaust ports 312 disposed opposite to each other play a convection role, reduce the gas outflow resistance, and improve the gas outflow efficiency; on the other hand, there is no need to dispose too many exhaust ports 312, and the structural strength of the housing 31 is taken into account while ensuring the flow area, thereby ensuring a sufficient service life.

[0053] In different usage scenarios, the humidity in the accommodating chamber 11 is different, so the required flow area of ​​the exhaust port 312 is also different. In this embodiment, the flow area of ​​the exhaust port 312 is adjustable. Exemplarily, the dehumidification structure 30 also includes an exhaust cover plate 33, and the exhaust cover plate 33 is slidably connected to the housing 31 to open or close the exhaust port 312. By sliding the exhaust cover plate 33, the flow area of ​​the exhaust port 312 can be adjusted.

[0054] Optionally, a slide rail 35 is provided on the outer shell 31, and the exhaust cover 33 is slidably connected to the slide rail 35. A slide groove may be provided on the slide rail 35, and the edge of the exhaust cover 33 is inserted into the slide groove and slidably connected to the slide groove. Alternatively, a slider may be provided on the exhaust cover 33, and the slider is slidably connected to the slide rail 35.

[0055] In this embodiment, two slide rails 35 are provided corresponding to each exhaust port 312, and the two slide rails 35 are distributed on the upper and lower sides of the exhaust port 312, and the upper and lower sides of the exhaust cover plate 33 are slidably connected to the slide rails 35. The slide rails 35 and the housing 31 may be detachably connected to facilitate installation, removal and replacement, such as a snap connection or a screw connection. Alternatively, the slide rails 35 and the housing 31 may be welded.

[0056] In order to facilitate driving the exhaust cover plate 33 to slide, in this embodiment, the dehumidification structure 30 further includes a driving mechanism 34, which is disposed on the housing 31 and connected to the exhaust cover plate 33, and is used to drive the exhaust cover plate 33 to move along a straight line. When the flow area of ​​the exhaust port 312 needs to be adjusted, the exhaust cover plate 33 is driven to slide relative to the housing 31 by the driving mechanism 34.

[0057] The exhaust cover 33 can be pushed and pulled manually or driven to slide electrically, so the driving mechanism 34 can be a handle set on the exhaust cover 33 to facilitate pushing and pulling the exhaust cover 33. The driving mechanism 34 can also be a mechanism that can achieve linear motion, such as a cylinder, a hydraulic cylinder, or a screw nut.

[0058] In this embodiment, the driving mechanism 34 includes a rotating shaft 341 and a gear 342. The rotating shaft 341 is rotatably connected to the housing 31. The gear 342 is disposed on the rotating shaft 341. The exhaust cover plate 33 is provided with a meshing structure capable of meshing with the gear 342. The rotating shaft 341 can rotate around its own axis to drive the exhaust cover plate 33 to move. The gear 342 is driven to rotate by rotating the rotating shaft 341. Since the exhaust cover plate 33 is provided with a meshing structure capable of meshing with the gear 342, the rotation of the gear 342 can drive the exhaust cover plate 33 to move.

[0059] The rotating shaft 341 can be rotated manually or driven by a motor. For example, a grip is provided at one end of the rotating shaft 341 to facilitate manual gripping and rotating the rotating shaft 341. For example, one end of the rotating shaft 341 is connected to the motor shaft of the motor, and the rotating shaft 341 is driven to rotate by the motor. The rotating shaft 341 can be directly connected to the motor shaft or connected to the motor shaft through a transmission mechanism.

[0060] The meshing structure on the exhaust cover plate 33 that can mesh with the gear 342 can be a plurality of meshing holes 331 . The plurality of meshing holes 331 are arranged at intervals along the length direction of the exhaust cover plate 33 , and the teeth of the gear 342 mesh with the meshing holes 331 .

[0061] The driving mechanism 34 further includes a mounting seat 343, the mounting seat 343 is connected to the housing 31, and the rotating shaft 341 is rotatably connected to the mounting seat 343. A bearing may be provided between the rotating shaft 341 and the mounting seat 343. Specifically, two mounting seats 343 are provided, and the mounting seats 343 are fixedly connected to the slide rail 35.

[0062] Corresponding to each exhaust cover plate 33, one set of driving mechanisms 34 may be provided, or two or more sets of driving mechanisms 34 may be provided, which may be provided specifically according to the length of the exhaust cover plate 33, so as to ensure stable movement of the exhaust cover plate 33. The two sets of driving mechanisms 34 may share one motor, and the two rotating shafts 341 are connected by a transmission shaft, and the transmission shaft and the rotating shaft 341 are connected by a bevel gear set.

[0063] The dehumidification structure 30 further includes a handle 36 , which is disposed on the top of the outer shell 31 . The existing lifting device can lift the entire box body 10 with the help of the handle 36 .

[0064] The dehumidification device further includes a detection component, which is used to detect the humidity value in the accommodating chamber 11. The driving mechanism 34 drives the exhaust cover plate 33 to adjust the flow area of ​​the exhaust port 312 according to the humidity value.

[0065] The detection component can be an existing humidity sensor, which is electrically connected to the control component to transmit the detected humidity value to the control component. The control component controls the motor to start or stop to adjust the movement distance of the exhaust cover 33, thereby adjusting the flow area of ​​the exhaust port 312.

[0066] When the humidity value acquired by the humidity sensor is greater than or equal to the first set humidity and the exhaust port 312 has been opened to the maximum opening, the control component sends a first prompt message to indicate that the humidity in the accommodating chamber 11 is too high, so as to facilitate timely cleaning.

[0067] Among them, the control component can adopt existing control elements, including but not limited to AMD processors, PLC controllers, ARM processors or single-chip microcomputers, and the supporting components also include a motherboard, memory sticks, storage media and power supply. The power supply is AC power or a lithium battery. When a display screen is provided, a display card is also provided. Other automated controls and electrical devices not mentioned are all knowledge well known to those skilled in the art and will not be elaborated here.

[0068] The dehumidification device also includes a pressure sensor, which is arranged in the accommodating chamber 11 and is used to obtain the gas pressure in the accommodating chamber 11. During the exhaust process, when the gas pressure is greater than or equal to the first set pressure, the control component sends a second prompt message to indicate that the filter 32 is blocked, so as to facilitate timely cleaning.

[0069] An embodiment of the present invention provides a wet processing device, including a supporting assembly 100 and the above-mentioned dehumidification device. The supporting assembly 100 is arranged in a box body 10 and is used to support items to be dried.

[0070] The supporting assembly 100 can adopt an existing bearing platform, and the objects to be dried are placed on the bearing platform. The supporting assembly 100 can adopt an existing roller assembly, and the objects to be dried are placed on the roller, which not only plays a bearing role for the objects to be dried, but also can use the rotation of the roller to drive the objects to be dried to move, so that the objects to be dried can enter and exit the box 10.

[0071] The above embodiments are only to illustrate the basic principles and characteristics of the present invention. The present invention is not limited by the above embodiments. Without departing from the spirit and scope of the present invention, the present invention may be subject to various changes and modifications, which are within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A dehumidification device, characterized in that: include: A box body, wherein a receiving cavity is formed inside the box body; An air pressure component, used for blowing air toward the objects to be dried in the accommodating chamber so that the air pressure in the accommodating chamber is greater than the external air pressure; A dehumidification structure is arranged on the top of the box body, and the dehumidification structure includes an outer shell, which surrounds an exhaust channel. The air inlet of the exhaust channel is connected to the accommodating cavity, the exhaust port of the exhaust channel is connected to the outside, and a filter is arranged on the exhaust path of the exhaust channel.

2. The dehumidification device according to claim 1, characterized in that: The filter is arranged at the exhaust port and connected to the housing.

3. The dehumidification device according to claim 1, characterized in that: The exhaust port is arranged on a side of the housing.

4. The dehumidification device according to claim 3, characterized in that: The exhaust ports are provided with two and are distributed on two opposite sides of the shell.

5. The dehumidification device according to claim 1, characterized in that: The dehumidification structure further comprises an exhaust cover plate, and the exhaust cover plate is slidably connected to the shell to open or close the exhaust port.

6. The dehumidification device according to claim 5, characterized in that: The dehumidification structure further includes a driving mechanism, which is disposed on the housing and connected to the exhaust cover plate, and is used to drive the exhaust cover plate to move in a straight line.

7. The dehumidification device according to claim 6, characterized in that: The driving mechanism includes a rotating shaft and a gear, wherein the rotating shaft is rotatably connected to the housing, the gear is arranged on the rotating shaft, an engaging structure capable of engaging with the gear is arranged on the exhaust cover plate, and the rotating shaft can rotate around its own axis to drive the exhaust cover plate to move.

8. The dehumidification device according to claim 6, characterized in that: It also includes a detection component, which is used to detect the humidity value in the accommodating cavity. The driving mechanism drives the exhaust cover plate to adjust the flow area of ​​the exhaust port according to the humidity value.

9. The dehumidification device according to any one of claims 1 to 8, characterized in that: The top of the box body is provided with an installation opening which is communicated with the accommodating cavity, and the shell protrudes from the top of the box body and is buckled on the installation opening.

10. A wet processing device, characterized in that: It comprises a supporting component and the dehumidification device according to any one of claims 1 to 9, wherein the supporting component is arranged in the box body and is used for supporting items to be dried.

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