Calibration device and calibration method of high-voltage particle counter

Abstract

The invention provides a calibration device and a calibration method of a high-pressure particle counter, the calibration device of the high-pressure particle counter is built, a granularity standard substance in the calibration device is atomized by a high-pressure aerosol generator to generate corresponding aerosol particles, and the aerosol particles sequentially pass through a dryer and a differential electric classifier to reach an aerosol mixing box; the pressure in the aerosol mixing box is controlled through the pressure controller, so that the pressure meets the requirements of the high-pressure particle counter, the high-pressure aerosol is subjected to low-pressure treatment through the high-pressure diffuser so as to meet the working requirements of a standard particle counter, and corresponding parameters of the high-pressure particle counter are obtained through experimental data calculation. And comparing the particle counter with a standard particle counter to obtain a calibration result. Synchronous measurement of the high-pressure particle counter and the standard particle counter can be achieved, the pressure measurement requirements of different instruments are met, meanwhile, the concentration stability of an aerosol sample is ensured, and therefore accurate calibration of the high-pressure particle counter is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of aerosol particle measurement, and in particular to a calibration device and a calibration method for a high-pressure particle counter. Background Art

[0002] Compressed air, as a power source and medium carrier, is widely used in various industries such as petroleum, chemical industry, metallurgy, electricity, machinery, light industry, textile, automobile manufacturing, electronics, food, medicine, biochemistry, national defense, scientific research, etc. The cleanliness level of compressed air is an important guarantee for the safe use of equipment and the quality of production products. At present, the International Organization for Standardization (ISO) has issued 9 national standards for compressed gas quality (ISO8573-1~ISO8573-9), covering compressed air pollutants and cleanliness levels. The national standard GB / T 13277.1-2008 "Compressed Air Part 1: Pollutant Purification Level" introduces that the main pollutants in compressed air are solid particles, moisture and oil. These three pollutants are the main parameter indicators for measuring the cleanliness level of compressed air.

[0003] As the main pollutant, particles play an important role in the evaluation of compressed air quality. ISO8573-4 "Compressed Air - Determination of Solid Particles" introduces that weight analysis, microscopy, laser particle counter and scanning electron microscope (SEM) can be used to test the method of particle pollution in compressed air. However, weight analysis, microscopy and scanning electron microscope methods all require the use of filter membranes to collect the total number of particles per unit volume in advance, and then weigh or count them under a microscope in the laboratory, which is time-consuming and labor-intensive, not easy to operate, and has too much interference from human factors, and cannot reflect the distribution of particle size and concentration changes in time. Therefore, high-pressure particle counters have appeared on the market to realize online real-time detection of particles in compressed air. In order to ensure the accuracy and reliability of the measurement results of high-pressure particle counters, it is particularly important to calibrate them regularly.

[0004] At present, my country has issued "GB / T 6167-2007 Performance Test Method for Dust Particle Counter" and "JJF1190-2008 Calibration Specification for Dust Particle Counter", which introduces the calibration scheme of particle counter, which is to atomize monodisperse polystyrene latex standard particles to produce monodisperse aerosol particles, and realize the value traceability of standard particle count and particle counter under test through flow adjustment and matching. The existing calibration method is only applicable to traditional dust particle counter, which mainly supplies clean air to the measured particle counter through a mixing box at positive pressure, but its pressure is generally about tens of kilopascals, and the pressure source of compressed gas is It is generally (0-1.0)MPa, and its particle size measurement range is between 0.3μm-10.0μm. The lower limit of the working pressure of high-pressure particle counters on the market is 0.3MPa. The internal working principle of the high-pressure particle counter is to directly or through a high-pressure diffuser to transfer the test gas into the particle counter measurement chamber for particle analysis and measurement. The existing particle counter measurement method cannot meet the calibration requirements of the high-pressure particle counter. In particular, in the particle calibration of the high-pressure particle counting instrument, how to generate a high-pressure and monodisperse aerosol with stable particle concentration becomes a difficulty in the calibration process. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a calibration device and a calibration method for a high-voltage particle counter, so as to achieve efficient calibration of the high-voltage particle counter.

[0006] In a first aspect, the present invention provides a calibration device for a high-pressure particle counter, comprising a mass flow meter, a high-pressure aerosol generator, a dryer, a differential electric classifier and an aerosol mixing box connected in sequence, wherein the input end of the mass flow meter is connected to clean compressed air;

[0007] The input end of the aerosol mixing box is also connected to a pressure controller, and the input end of the pressure controller is connected to clean compressed air. The aerosol mixing box is provided with two branch outlets, one of which is connected to a standard particle counter through a high-pressure diffuser, and the other is connected to a calibrated high-pressure particle counter.

[0008] Furthermore, the calibration device also includes a compressed air supply device for obtaining clean compressed air, and the compressed air supply device includes an air compressor, a cold dryer, a high-efficiency filter and a solenoid valve connected in sequence. The input end of the pressure controller and the input end of the mass flow meter are respectively connected to the solenoid valve of the compressed air supply device to obtain clean compressed air.

[0009] Furthermore, an aerosol static neutralizer is provided between the dryer and the differential electric classifier.

[0010] Furthermore, the aerosol mixing box includes a stainless steel cylindrical cavity, a sampling inlet, a pressure regulating inlet and a sampling outlet. The front end of the cylindrical cavity is provided with a first conical space and a second conical space. The two conical spaces are connected to form an hourglass-shaped cavity. The sampling inlet has a conical head. The sampling inlet and the pressure regulating inlet are respectively inserted into the first conical space, and the sampling inlet and the pressure regulating inlet are vertically arranged. The conical head is located between the first conical space and the second conical space. The aerosol mixing box is connected to the differential electric classifier through the sampling inlet, and is connected to the voltage controller through the pressure regulating inlet.

[0011] Furthermore, the pressure in the aerosol mixing box is controlled within the range of 0 to 1.0 MPa.

[0012] Furthermore, the inlet flow rate of the high-pressure aerosol generator is 0 to 4 L / min.

[0013] Furthermore, the dryer uses a heating tube with a length of 60 cm and an inner diameter of 8 mm, and dehumidifies the aerosol particles output by the high-pressure aerosol generator by heating the tube.

[0014] Furthermore, the two branch outlets of the aerosol mixing box are overlapped by a flow splitter, and the flow splitter is made of 316 stainless steel. The flow splitter includes a 3 / 8-inch straight pipe inlet and at least two 1 / 4-inch outlet branches. The straight pipe inlet is connected to the aerosol mixing box, one of the outlet branches is connected to the calibrated high-pressure particle counter, and the second outlet branch is connected to the high-pressure diffuser, which is then connected to the standard particle counter.

[0015] In a second aspect, the present invention provides a method for calibrating a high-pressure particle counter, the calibration method comprising the following steps:

[0016] (1) adding pure water and a particle size standard substance into a high-pressure aerosol generator, and turning on a mass flow meter, a high-pressure aerosol generator, a dryer, a differential electric classifier, an aerosol mixing box, a pressure controller, a calibrated high-pressure particle counter, a high-pressure diffuser, and a standard particle counter; the average particle size of the particle size standard substance is consistent with the particle size measurement lower limit of the calibrated high-pressure particle counter;

[0017] (2) Regulate the pressure and flow rate of the clean compressed air source, and adjust the flow rate and pressure of the high-pressure aerosol generator. Use the pressure controller to control the pressure in the aerosol mixing box within the working pressure range of the calibrated high-pressure particle counter, and control the particle number concentration in the aerosol mixing box within the range of (3000-10000) particles / L;

[0018] (3) After the aerosol concentration stabilizes, record the average values ​​of the standard particle counter and the calibrated high-pressure particle counter within 1 minute, which are recorded as C Si and C Ti Repeat the above measurement for a total of 5 times, then swap the position of the calibrated high-pressure particle counter with the standard particle counter connected to the high-pressure diffuser, repeat the above measurement 5 times, and calculate the average value of the 10 measurement results of the two counters, which are recorded as and The efficiency η of the calibrated high-voltage particle counter at this particle size is calculated according to the following formula C ;

[0019]

[0020] Where:

[0021] η C The particle counting efficiency of the calibrated high-pressure particle counter measuring the particle size D of the aerosol sample;

[0022] η S The particle counting efficiency of the standard particle counter for measuring the aerosol sample with a particle size of D;

[0023] (4) Select another particle size standard material, whose average particle size should be between 1.5 and 2.0 times the lower limit of the particle size of the high-pressure particle counter being calibrated, and repeat the methods in steps (1) to (3) to calculate the particle counting efficiency of the high-pressure particle counter being calibrated at this particle size;

[0024] (5) Calculate the particle counting repeatability δ of the calibrated high-pressure particle counter under two particle size standard substances according to the following formula: C ;

[0025]

[0026] Where:

[0027] δ C The measurement repeatability of the calibrated high-voltage particle counter;

[0028] n is the number of measurements.

[0029] The advantages of the present invention are as follows: by building a set of high-pressure particle counter calibration device, an aerosol sample with a peak particle size in the range of less than 2 μm and a number concentration of not less than (3000-10000) particles / L can be generated by the device, the concentration stability of the aerosol sample is better than 2% / 20min, and the output pressure is not less than 0.3MPa, which can meet the calibration of high-pressure particle counters with a flow pressure range of (0.1-1.0)MPa and a flow range of (0.1-5.0)L / min, and by simultaneously conducting experiments and comparisons with a standard counter, efficient calibration of the high-pressure particle counter is achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The present invention will be further described below in conjunction with embodiments with reference to the accompanying drawings.

[0031] Figure 1 The present invention is a schematic structural diagram of a calibration device for a high-voltage particle counter.

[0032] Figure 2 The present invention is a flowchart of a method for calibrating a high-voltage particle counter.

[0033] Figure 3 It is a schematic structural diagram of the compressed air supply device of the present invention.

[0034] Figure 4 It is a schematic diagram of the internal structure of the aerosol mixing box of the present invention.

[0035] Description of Figure Numbers:

[0036] 1. Mass flow meter, 2. High-pressure aerosol generator, 3. Dryer, 4. Differential electric classifier, 5. Aerosol mixing box, 51. Stainless steel cylindrical cavity, 52. Sampling inlet, 53. Pressure regulating inlet, 54. Sampling outlet, 511. First conical space, 512. Second conical space, 6. Pressure controller, 7. High-pressure diffuser, 8. Compressed air supply device, 81. Air compressor, 82. Cold dryer, 83. High-efficiency filter, 84. Solenoid valve, 9. Aerosol electrostatic neutralizer, 10. Flow diverter, A. Standard particle counter, B. Calibrated high-pressure particle counter. DETAILED DESCRIPTION

[0037] The embodiments of the present application provide a calibration device and a calibration method for a high-voltage particle counter, so as to solve the problem that the existing calibration device cannot calibrate the high-voltage particle counter. The device of the present invention can achieve the calibration requirements of high voltage and high stability, and the adopted calibration method can achieve efficient calibration of the high-voltage particle counter.

[0038] The technical solution in the embodiment of the present application has the following general idea: by designing a set of calibration devices for high-pressure particle counter calibration, the device mainly consists of clean compressed air, high-pressure aerosol generator, dryer, aerosol mixing box, aerosol electrostatic neutralizer, differential electric classifier, high-pressure diffuser, etc. The output pressure of the device is adjusted by the pressure controller to be not less than 0.3MPa, and a stable, high-pressure monodisperse aerosol sample with a peak particle size in the range of <2μm and a number concentration of not less than (3000-10000) / L is generated, and the concentration stability of the aerosol sample is better than 2% / 20min. The device meets the calibration of high-pressure particle counters with a flow pressure range of (0.1-1.0)MPa and a flow range of (0.1-5.0)L / min. During the calibration process, the high-pressure particle counter and the standard particle counter are repeatedly measured by switching the aerosol sampling outlet, and then the corresponding calculations of each group of data are compared to obtain the calibration results.

[0039] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0040] Embodiment 1

[0041] This embodiment provides a calibration device for a high-voltage particle counter, such as Figure 1 As shown, it includes a mass flow meter 1, a high-pressure aerosol generator 2, a dryer 3, a differential electric classifier 4 and an aerosol mixing box 5 which are connected in sequence, and the input end of the mass flow meter 1 is connected to clean compressed air;

[0042] The input end of the aerosol mixing box 5 is also connected to a pressure controller 6, and the input end of the pressure controller 6 is connected to clean compressed air. The aerosol mixing box 5 is provided with two branch outlets, one is connected to the standard particle counter A through the high-pressure diffuser 7, and the other is connected to the calibrated high-pressure particle counter B.

[0043] Preferably, the calibration device further comprises a compressed air supply device 8 for obtaining clean compressed air, such as Figure 3 As shown, the compressed air supply device 8 includes an air compressor 81, a cold dryer 82, a high-efficiency filter 83 and a solenoid valve 84 connected in sequence, and the input end of the pressure controller 6 and the input end of the mass flow meter 1 are respectively connected to the solenoid valve 84 of the compressed air supply device 8 to obtain clean compressed air.

[0044] The moisture and particles in the clean compressed air are removed by the cold dryer and the high-efficiency filter to become clean compressed gas, and the on-off of the gas path is controlled by the solenoid valve.

[0045] Preferably, an aerosol electrostatic neutralizer 9 is further provided between the dryer 3 and the differential electric classifier 4 .

[0046] Better, such as Figure 4 As shown, the aerosol mixing box 5 includes a 316 stainless steel cylindrical cavity 51, a sampling inlet 52, a pressure regulating inlet 53 and a sampling outlet 54. The front end of the cylindrical cavity 51 is provided with a first conical space 511 and a second conical space 512. The two conical spaces are connected to form an hourglass-shaped cavity. The sampling inlet 52 has a conical head 521. The sampling inlet 52 and the pressure regulating inlet 53 are respectively inserted into the first conical space 511, and the sampling inlet 52 and the pressure regulating inlet 53 are vertically arranged. The conical head portion 521 is between the first conical space 511 and the second conical space 512. The aerosol mixing box 5 is connected to the differential electric classifier 4 through the sampling inlet 52, and is connected to the voltage controller 6 through the pressure regulating inlet 42. The hourglass-shaped cavity forms a jet nozzle. The single-piece dispersed aerosol enters the cavity from the horizontal direction, and the gas pressure controller enters the gas from the longitudinal direction. The flow of the gas pressure controller does not interfere with the flow of the mixer and diluter. At the same time, the interfaces of the aerosol mixing box are sealed, and the glossiness grade of its internal wall is greater than or equal to the HL level.

[0047] Preferably, the pressure in the aerosol mixing box is controlled within the range of (0-1.0) MPa, and can be specifically set to 0.3 MPa.

[0048] Preferably, the inlet flow rate of the high-pressure aerosol generator is 0-4 L / min, and the specific actual value setting can be satisfied by the calibration of two particle counters, and is generally set to 2-3 L / min. The input pressure of the high-pressure aerosol generator can be set to 0.8 MPa.

[0049] Preferably, the dryer 3 uses a heating tube with a length of 60 cm and an inner diameter of 8 mm, and dehumidifies the aerosol particles output by the high-pressure aerosol generator by heating the heating tube. It uses automatic temperature control to adjust the heating temperature value, and the temperature is usually set to 80°C.

[0050] Preferably, the two branch outlets of the aerosol mixing box are overlapped by a flow splitter 10, the flow splitter is made of 316 stainless steel, and the flow splitter includes a 3 / 8-inch straight pipe inlet and at least two 1 / 4-inch outlet branches, the straight pipe inlet is connected to the aerosol mixing box, one of the outlet branches is connected to the calibrated high-pressure particle counter B, the second outlet branch is connected to the high-pressure diffuser 7, and then connected to the standard particle counter A by the high-pressure diffuser 7, the high-pressure diffuser is provided with an exhaust port for emptying, and a filter is also provided on the exhaust port. The flow splitter can realize smooth flow distribution of the fluid and meet the gas flow of more than 10L / min.

[0051] The working principle of the high-pressure particle counter calibration device of the present invention is as follows: filtered clean compressed air is injected into an aerosol generator, the monodisperse polystyrene particle size standard material in the device is atomized and dried by a dryer to generate aerosol particles, and then the aerosol sample containing particles passes through an aerosol electrostatic neutralizer to generate stable, monodisperse submicron aerosol particles, and then passes through a differential electric classifier to classify the aerosol particles based on the electric migration classification rate, flows through an aerosol mixing box to mix the aerosol and achieve uniform dispersion, and then the clean compressed air is injected into the aerosol mixing box through a pressure controller, and at the same time The fluid pressure is monitored in real time by the pressure controller and adjusted according to the set parameters, so as to control the fluid pressure in the aerosol mixing box within the pressure range of the calibrated high-pressure particle counter. The high-pressure fluid in the branch connected to the standard particle counter is diffused into a low-pressure fluid through the high-pressure diffuser to meet the working requirements of the standard particle counter. Multiple groups of experimental data are obtained by repeating the experiment several times and exchanging the sampling ports and repeating the experiment several times. Finally, the data of the calibrated high-pressure particle counter is calculated and directly compared with the data of the standard dust particle counter to obtain the calibration result of the high-pressure particle counter.

[0052] Embodiment 2

[0053] In this embodiment, a calibration method for a high-pressure particle counter is provided, and the calibration method comprises the following steps:

[0054] (1) Add pure water and a particle size standard substance into a high-pressure aerosol generator, and turn on a mass flow meter, a high-pressure aerosol generator, a dryer, an aerosol electrostatic neutralizer, a differential electric classifier, an aerosol mixing box, a pressure controller, a calibrated high-pressure particle counter, a high-pressure diffuser, and a standard particle counter; the average particle size of the particle size standard substance is consistent with the lower limit of the particle size measurement of the calibrated high-pressure particle counter (for example, a 0.3 μm particle size standard substance (GBW (E) 120063) is selected, with an average particle size value of 280 nm and an uncertainty of 8 nm); the counting mode of the standard dust particle counter is set to the cumulative counting mode; the specific calibrated high-pressure particle counter and the standard particle counter can be selected from different devices according to actual needs, for example, the Kanomax dust particle counter 3889 can be used as the standard particle counter, and the high-pressure particle counter model HPGP-101-CPDS-E of the American PMS company can be used as the calibrated high-pressure particle counter.

[0055] (2) Regulate the pressure and flow rate of the clean compressed air source, and adjust the flow rate and pressure of the high-pressure aerosol generator. Use the pressure controller to control the pressure in the aerosol mixing box within the working pressure range of the calibrated high-pressure particle counter, and control the particle number concentration in the aerosol mixing box within the range of (3000-10000) particles / L;

[0056] (3) After the aerosol concentration stabilizes, record the average values ​​of the standard particle counter and the calibrated high-pressure particle counter within 1 minute, which are recorded as C Si and C Ti Repeat the above measurement for a total of 5 times, then swap the position of the calibrated high-pressure particle counter with the standard particle counter connected to the high-pressure diffuser, repeat the above measurement 5 times, and calculate the average value of the 10 measurement results of the two counters, which are recorded as and The efficiency η of the calibrated high-voltage particle counter at this particle size is calculated according to the following formula C ;

[0057]

[0058] Where:

[0059] η C The particle counting efficiency of the calibrated high-pressure particle counter measuring the particle size D of the aerosol sample;

[0060] η S is the particle counting efficiency of the aerosol sample with a particle size of D measured by the standard particle counter; (where η S It is a known value in the traceability process and is given directly by the certificate)

[0061] (4) Select another particle size standard material, whose average particle size should be between 1.5 and 2.0 times the lower limit of the particle size of the high-pressure particle counter being calibrated (generally a 0.5 μm particle size standard material (GBW12031, average particle size value is 487.2 nm, uncertainty is 4.1 nm)), repeat the method in steps (1) to (3), and calculate the particle counting efficiency of the high-pressure particle counter being calibrated at this particle size;

[0062] (5) Calculate the particle counting repeatability δ of the calibrated high-voltage particle counter under two particle standard substances according to the following formula: C ;

[0063]

[0064] Where:

[0065] δ C The measurement repeatability of the calibrated high-voltage particle counter;

[0066] n is the number of measurements, n=10.

[0067] The setting requirements for each instrument and equipment in the calibration device are as follows:

[0068] The gas pressure control range of the pressure controller is 0-1MPa, and the control accuracy is ±0.50%FS. Generally, the gas pressure controller is set to 0.3MPa;

[0069] The high-pressure aerosol generator can have a maximum back pressure of 1MPa and a maximum flow rate of 250l / h. For 0.5μm PSL standard particles, the maximum atomized particle concentration is 5×105 particles / cm3. In actual use, the atomized particle concentration is mainly determined by the original standard particle liquid concentration, gas pressure and gas flow rate. The atomized concentration is generally controlled to be (3000-10000) particles / L during use.

[0070] Aerosol electrostatic neutralizer, which uses soft X-rays inside, has a flow range of 0-5L / min, and has bipolar charge neutralization capability, ensuring the balanced charge distribution of aerosol particles, preventing particles from agglomerating with each other, and can effectively ensure the stability and uniformity of aerosol particle concentration;

[0071] The differential electric classifier can ensure the dispersion of the measured particles by screening monodisperse particles with a particle size range of 10nm to 1μm. The differential electric classifier model 3938L52 of TSI Company of the United States can be used.

[0072] The mass flow meter is under a pressure of 3MPa, with a maximum flow rate of 10L / min and a flow control accuracy of ±1.50%FS. Due to the fluctuation of the compressed gas source, a mass flow meter is used to control the intake flow value and pressure of the atomization device to ensure the flow stability. The fluctuation of the stable flow rate is less than 0.5%, thereby ensuring that the stability after atomization is controlled within 2%.

[0073] A high-pressure particle counter calibration device and calibration method of the present invention can meet the calibration of high-pressure particle counters with a flow pressure range of (0.1-1.0) MPa and a flow range of (0.1-5.0) L / min, improve the stability of aerosol concentration, and improve the reliability of the calibration results of the high-pressure particle counter. After repeated measurements by the above calibration method, two sets of calibration data are obtained, one set of particles selects the lower limit of the particle diameter that can be measured by the instrument, and the other set selects a particle diameter arbitrarily within the normal working range of the instrument to calculate the efficiency and repeatability under normal working conditions. The calibration results are obtained by calculation, and the calibrated high-pressure particle counter can correct its subsequent measurement data through the calibration results to improve the measurement accuracy of the instrument.

[0074] Although the specific implementation modes of the present invention are described above, those skilled in the art should understand that the specific implementation modes described are only illustrative and are not intended to limit the scope of the present invention. Equivalent modifications and changes made by those skilled in the art in accordance with the spirit of the present invention should be included in the scope of protection of the claims of the present invention.

Claims

1. A calibration device for a high-voltage particle counter, characterized in that: It comprises a mass flow meter, a high-pressure aerosol generator, a dryer, a differential electric classifier and an aerosol mixing box which are connected in sequence, wherein the input end of the mass flow meter is connected to clean compressed air; The input end of the aerosol mixing box is also connected to a pressure controller, and the input end of the pressure controller is connected to clean compressed air. The aerosol mixing box is provided with two branch outlets, one of which is connected to a standard particle counter through a high-pressure diffuser, and the other is connected to a calibrated high-pressure particle counter.

2. A calibration device for a high-voltage particle counter as claimed in claim 1, characterized in that: The calibration device also includes a compressed air supply device for obtaining clean compressed air, and the compressed air supply device includes an air compressor, a cold dryer, a high-efficiency filter and a solenoid valve connected in sequence. The input end of the pressure controller and the input end of the mass flow meter are respectively connected to the solenoid valve of the compressed air supply device to obtain clean compressed air.

3. A calibration device for a high-voltage particle counter as claimed in claim 1, characterized in that: An aerosol static neutralizer is also provided between the dryer and the differential electric classifier.

4. A calibration device for a high-voltage particle counter as claimed in claim 1, characterized in that: The aerosol mixing box includes a stainless steel cylindrical cavity, a sampling inlet, a pressure regulating inlet and a sampling outlet. The front end of the cylindrical cavity is provided with a first conical space and a second conical space. The two conical spaces are connected to form an hourglass-shaped cavity. The sampling inlet has a conical head. The sampling inlet and the pressure regulating inlet are respectively inserted into the first conical space, and the sampling inlet and the pressure regulating inlet are vertically arranged. The conical head is located between the first conical space and the second conical space. The aerosol mixing box is connected to the differential electric classifier through the sampling inlet, and is connected to the voltage controller through the pressure regulating inlet.

5. A calibration device for a high-voltage particle counter as claimed in claim 1, characterized in that: The pressure in the aerosol mixing box is controlled within the range of 0 to 1.0 MPa.

6. A calibration device for a high-voltage particle counter as claimed in claim 1, characterized in that: The inlet flow rate of the high-pressure aerosol generator is 0-4 L / min.

7. A calibration device for a high-voltage particle counter as claimed in claim 1, characterized in that: The dryer uses a heating tube with a length of 60 cm and an inner diameter of 8 mm.

8. A calibration device for a high-voltage particle counter as claimed in claim 1, characterized in that: The two branch outlets of the aerosol mixing box are overlapped by a flow splitter, and the flow splitter is made of 316 stainless steel. The flow splitter includes a 3 / 8-inch straight pipe inlet and at least 2 1 / 4-inch outlet branches. The straight pipe inlet is connected to the aerosol mixing box, one of the outlet branches is connected to the calibrated high-pressure particle counter, and the second outlet branch is connected to the high-pressure diffuser, which is then connected to the standard particle counter.

9. The calibration method of the high-voltage particle counter calibration device according to any one of claims 1 to 8, characterized in that: The calibration method comprises the following steps: (1) adding pure water and a particle size standard substance into a high-pressure aerosol generator, and turning on a mass flow meter, a high-pressure aerosol generator, a dryer, a differential electric classifier, an aerosol mixing box, a pressure controller, a calibrated high-pressure particle counter, a high-pressure diffuser, and a standard particle counter; the average particle size of the particle size standard substance is consistent with the particle size measurement lower limit of the calibrated high-pressure particle counter; (2) Regulate the pressure and flow rate of the clean compressed air source, and adjust the flow rate and pressure of the high-pressure aerosol generator. Use the pressure controller to control the pressure in the aerosol mixing box within the working pressure range of the calibrated high-pressure particle counter, and control the particle number concentration in the aerosol mixing box within the range of (3000-10000) particles / L; (3) After the aerosol concentration stabilizes, record the average values ​​of the standard particle counter and the calibrated high-pressure particle counter within 1 minute, which are recorded as C Si and C Ti Repeat the above measurement for a total of 5 times, then swap the position of the calibrated high-pressure particle counter with the standard particle counter connected to the high-pressure diffuser, repeat the above measurement 5 times, and calculate the average value of the 10 measurement results of the two counters, which are recorded as and The efficiency η of the calibrated high-voltage particle counter at this particle size is calculated according to the following formula C ; Where: η C The particle counting efficiency of the calibrated high-pressure particle counter measuring the particle size D of the aerosol sample; η S The particle counting efficiency of the standard particle counter for measuring the aerosol sample with a particle size of D; (4) Select another particle size standard material, whose average particle size should be between 1.5 and 2.0 times the lower limit of the particle size of the high-pressure particle counter being calibrated, repeat the above steps, and calculate the particle counting efficiency of the high-pressure particle counter being calibrated at this particle size; (5) Calculate the particle counting repeatability δ of the calibrated high-pressure particle counter under two particle size standard substances according to the following formula: C ; Where: δ C The measurement repeatability of the calibrated high-voltage particle counter; n is the number of measurements.

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