Collision avoidance device, assembly method of collision avoidance device and optical inspection equipment

Abstract

This application relates to the field of optical inspection technology, specifically to an anti-collision device, an assembly method for the anti-collision device, and an optical inspection equipment. The anti-collision device includes a fixed component, a movable component, and a triggering component. The fixed component is mounted on the inspection head, and the movable component is used to connect with the objective lens. The movable component is reciprocally connected to the fixed component via a guide rail in a first direction. The triggering component includes a first conductive component, a second conductive component, and a control module. One of the first and second conductive components is located on the fixed component, and the other is located on the movable component. The first and second conductive components can be electrically connected during the movement of the movable component toward the fixed component. This allows the control module to be triggered when the first and second conductive components are electrically connected. The control module controls the inspection head to stop moving, or controls the inspection head to move in the opposite direction to move the objective lens away from the product being tested, thereby reducing the probability of objective lens damage.

Description

Technical Field

[0001] This application relates to the field of optical inspection technology, specifically to an anti-collision device, an assembly method for the anti-collision device, and an optical inspection equipment. Background Technology

[0002] Optical inspection equipment, such as confocal microscopes and white light interferometers, typically includes a base, a motion platform, and a detection head. Both the motion platform and the detection head are mounted on the base. The product under test is placed on the motion platform and can move horizontally with the motion platform. The detection head includes an objective lens and is equipped with a drive mechanism to adjust the position of the detection head. The drive mechanism can drive the detection head to move back and forth in the vertical direction to move closer to or further away from the product under test, meeting different inspection needs.

[0003] However, since the shape, size, or material of the tested products are different, the size of the objective lens of different models is also different. When the objective lens is adjusted in the vertical direction with the test head, the tested product is prone to hitting the objective lens, which can cause damage to the objective lens. Summary of the Invention

[0004] This application provides an anti-collision device, an assembly method for the anti-collision device, and an optical testing device to solve the technical problem that the product under test is prone to hitting the objective lens and causing damage to the objective lens when adjusting the objective lens position.

[0005] According to a first aspect, one embodiment provides a collision avoidance device, comprising:

[0006] A fastener, installed and fixed on the detection head of the optical inspection equipment;

[0007] A movable component is used to connect with the objective lens. The movable component is connected to the fixed component. The movable component reciprocates relative to the fixed component in a first direction via a guide rail. The first direction is the movement direction of the detection head.

[0008] The triggering component includes a first conductive element, a second conductive element, and a control module. At least one of the first conductive element and the second conductive element is electrically connected to the control module. The control module is used to control the detection head to reciprocate in the first direction. One of the first conductive element and the second conductive element is located on the fixed element, and the other is located on the moving element. The first conductive element and the second conductive element are electrically connected during the movement of the moving element toward the fixed element.

[0009] In one optional embodiment, the guide rail includes a first rail, a second rail, and a rolling element that is rolled between the first rail and the second rail. The first rail is connected to the fixed element, and the second rail is connected to the moving element. The first rail and the second rail are spaced apart in a second direction, which is perpendicular to the first direction.

[0010] A clamping structure is connected to the fixing member or the moving member. The clamping structure is located on the side of one of the first track and the second track facing away from the other, and the clamping structure abuts against the first track or the second track in the second direction.

[0011] In one alternative embodiment, the clamping structure includes a set screw that extends in the second direction;

[0012] The fixing member has a fixing connection portion connected to the set screw, and in the second direction, the fixing connection portion is located on the side of the first track opposite to the second track; or, the moving member has a moving connection portion connected to the set screw, and the moving connection portion is located on the side of the second track opposite to the first track.

[0013] In one alternative embodiment, the anti-collision device includes a compression member;

[0014] The extruder has a mating surface that fits with the first track, and the extruder is located between the tightening structure and the first track in the second direction; or, the extruder has a mating surface that fits with the second track, and the extruder is located between the tightening structure and the second track in the second direction.

[0015] In one alternative embodiment, at least one of the fixing member and the moving member is detachably connected to the guide rail in a third direction, the third direction being perpendicular to the first direction and the second direction;

[0016] The fixing member and / or the moving member that are detachably connected to the guide rail have a mounting surface that fits against the guide rail, and the mounting surface is perpendicular to the third direction.

[0017] In one alternative embodiment, the anti-collision device includes a pull rod assembly, the pull rod assembly including an elastic element connected between the fixed element and the movable element, the elastic element being capable of applying an elastic force to the movable element away from the tested product in the first direction.

[0018] In one alternative embodiment, the elastic member has a first connecting end connected to the fixing member and a second connecting end connected to the moving member; the position of the first connecting end on the fixing member is adjustable, and / or the position of the second connecting end on the moving member is adjustable.

[0019] According to a second aspect, a method for assembling an anti-collision device as described in the above embodiments includes:

[0020] The guide rail is connected between the fixed component and the moving component;

[0021] The movable part is reciprocally connected to the fixed part in the first direction by mounting screws.

[0022] In one optional embodiment, the guide rail includes a first track, a rolling element, and a second track arranged sequentially in a second direction. The first track is connected to the fixing element by a first connecting screw, and the second track is connected to the moving element by a second connecting screw. Both the first and second connecting screws extend upward in a third direction, and the third direction, the second direction, and the first direction are mutually perpendicular. A clamping structure is connected to the fixing element or the moving element, and the clamping structure abuts against the first track or the second track in the second direction.

[0023] Connecting the guide rail between the fixed member and the movable member includes:

[0024] The first track is connected to the fixing member by the first connecting screw, and the second track is connected to the moving member by the second connecting screw, keeping the first connecting screw and the second connecting screw in a connected but not locked state;

[0025] A clamping structure is connected to the moving part or the fixing part, so that the clamping structure clamps against the first track or the second track in the second direction;

[0026] Tighten the first connecting screw and the second connecting screw.

[0027] According to a third aspect, one embodiment provides an optical inspection device, including a base, an inspection head, a drive mechanism, and an anti-collision device as described in any one of the above. The inspection head is mounted on the base via the drive mechanism, and the drive mechanism is capable of driving the inspection head to reciprocate relative to the base in a first direction. The anti-collision device is mounted on the inspection head, and the drive mechanism is electrically connected to the control module.

[0028] According to the above embodiments of the anti-collision device, the assembly method of the anti-collision device, and the optical inspection equipment, the anti-collision device includes a fixed component, a movable component, and a triggering component. The fixed component is used to install and fix it on the inspection head of the optical inspection equipment. The movable component is used to connect with the objective lens. The movable component is reciprocally connected to the fixed component via a guide rail in a first direction, which is the direction of movement of the inspection head. The triggering component includes a first conductive component, a second conductive component, and a control module. One of the first conductive component and the second conductive component is located on the fixed component, and the other is located on the movable component. The first conductive component and the second conductive component are electrically connected during the movement of the movable component toward the fixed component. At least one of the first conductive component and the second conductive component is electrically connected to the control module, and the control module is used to control the reciprocating movement of the inspection head in the first direction. In this way, the fixed component, the movable component, and the triggering component in the anti-collision device can provide a hardware platform that can trigger the control module when the first conductive component and the second conductive component are electrically connected. The control module controls the inspection head to stop moving, or controls the inspection head to move in the opposite direction to move the objective lens away from the product being tested, thereby reducing the probability of damage to the objective lens. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the structure of an optical inspection device according to one embodiment;

[0030] Figure 2 This is a schematic diagram illustrating the specific location of an anti-collision device in an optical detection device according to one embodiment.

[0031] Figure 3 This is a simplified structural schematic diagram of an anti-collision device according to one embodiment;

[0032] Figure 4 This is a schematic diagram of a structure in which a fixed member and a movable member are connected by a tie rod assembly in one embodiment.

[0033] In the diagram: 1. Base; 11. Motion platform; 2. Detection head; 3. Anti-collision device; 4. Fixing component; 41. Fixed connection part; 42. Fixed main body part; 5. Moving component; 51. Moving connection part; 52. Moving main body part; 53. Connecting component; 531. Second elongated hole; 54. Through hole; 55. Third elongated hole; 6. Guide rail; 61. First track; 62. Second track; 7. Trigger assembly; 71. First conductive component; 711. Connecting block; 712. First elongated hole; 713. Conductive contact; 72. Second conductive component; 8. Pull rod assembly; 81. Elastic component; 811. First connecting end; 812. Second connecting end; 82. First fixing block; 83. Second fixing block; 9. Tightening structure. Detailed Implementation

[0034] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0035] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments, and the operational steps involved in each embodiment can also be rearranged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for clearly describing a particular embodiment and do not imply that they represent the necessary components and / or order.

[0036] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0037] This application discloses an anti-collision device 3, which is applied in optical inspection equipment, such as a confocal microscope or a white light interferometer, and can reduce the probability of the objective lens being damaged during the objective lens height adjustment process.

[0038] Please refer to the anti-collision device 3 in this application embodiment. Figures 2 to 4 It includes a fixing member 4, a moving member 5, and a triggering component 7. The fixing member 4 is used to install and fix on the detection head 2 of the optical detection equipment and can move back and forth in the vertical direction with the detection head 2. The moving member 5 is used to connect with the objective lens (not shown in the figure). The moving member 5 is connected to the fixing member 4 through the mounting screw and the elongated hole through which the mounting screw passes. The moving member 5 can move back and forth relative to the fixing member 4 in a first direction through the guide rail 6. The first direction is the direction in which the detection head 2 moves, that is, the vertical direction.

[0039] In some embodiments, the objective lens can be connected to the lower side of the moving part 5, and the objective lens can move back and forth in the vertical direction with the moving part 5. During the process of the objective lens being moved downward by the detection head 2, the objective lens will first contact the product under test on the motion platform 11. In other embodiments, the objective lens can also be connected to a higher position of the moving part 5, so that during the process of the objective lens being moved downward by the detection head 2, the moving part 5 will first contact the product under test on the motion platform 11 or directly contact the motion platform 11.

[0040] In the anti-collision device 3 of this application embodiment, the triggering component 7 includes a first conductive element 71, a second conductive element 72, and a control module (not shown in the figure). One of the first conductive element 71 and the second conductive element 72 is located on the fixed member 4, and the other is located on the moving member 5. The first conductive element 71 and the second conductive element 72 can be electrically connected during the movement of the moving member 5 toward the fixed member 4. At least one of the first conductive element 71 and the second conductive element 72 is electrically connected to the control module. The control module is used to control the detection head 2 to reciprocate in a first direction.

[0041] In some embodiments, the first conductive element 71 can be mounted and fixed on the fixed element 4, and the second conductive element 72 can be mounted and fixed on the movable element 5, or the first conductive element 71 can be mounted and fixed on the movable element 5, and the second conductive element 72 can be mounted and fixed on the fixed element 4. When neither the movable element 5 nor the objective lens is in contact with the motion platform 11, the movable element 5 can be located at the lower end or lower side of the fixed element 4 under its own weight and the weight of the objective lens.

[0042] In some embodiments, please refer to Figure 3 One of the first conductive element 71 and the second conductive element 72 may include a conductive plate, and the other may include a conductive contact 713. For example, the first conductive element 71, which is fixed to the fixing member 4, may include a conductive contact 713, and the second conductive element 72 may include a conductive plate located below the conductive contact 713. Alternatively, the conductive contact 713 may be disposed below the conductive plate. Two conductive contacts 713 may be provided. When both conductive contacts 713 are conductively connected to the conductive plate, the two conductive contacts 713 are short-circuited.

[0043] As the moving part 5 and the objective lens move downwards with the detection head 2, when the objective lens or the moving part 5 contacts the product under test or the motion platform 11, the moving part 5 and the second conductive part 72 will move upwards relative to the fixed part 4 as the detection head 2 moves downwards, until the first conductive part 71 and the second conductive part 72 make conductive contact. Since at least one of the first conductive part 71 and the second conductive part 72 is electrically connected to the control module, and the control module is used to control the reciprocating movement of the detection head 2 in the first direction, the control module will be triggered after the first conductive part 71 and the second conductive part 72 make conductive contact. This will cause the control module to stop the movement of the detection head 2 in the first direction, or to control the detection head 2 to move upwards away from the motion platform 11. In this way, the objective lens can be moved upwards when it is about to touch the product under test or when it has just touched the product under test, thereby reducing the probability of damage to the objective lens.

[0044] To avoid the two conductive contacts 713 in the first conductive element 71 failing to short-circuit due to installation errors, in some embodiments, the two conductive contacts 713 in the first conductive element 71 can be set as elastic contacts. The conductive contacts 713 are mounted on the fixing member 4 in a reciprocating direction via the elastic member 81, so that both conductive contacts 713 can make conductive contact with the conductive plate of the second conductive element 72.

[0045] In the embodiments of the anti-collision device 3 of this application, in the initial state where neither the moving member 5 nor the objective lens is in contact with the motion platform 11 or the product under test, the distance between the first conductive member 71 and the second conductive member 72 is less than the movable distance of the moving member 5 relative to the fixed member 4 in the first direction. To further reduce the probability of damage to the objective lens, in the initial state, the distance between the first conductive member 71 and the second conductive member 72 is set as small as possible, so that if either the moving member 5 or the objective lens comes into contact with the motion platform 11 or the product under test, the first conductive member 71 and the second conductive member 72 will be electrically connected, thereby improving the sensitivity of the anti-collision device 3.

[0046] To facilitate assembly and minimize the initial distance between the first conductive component 71 and the second conductive component 72, please refer to [reference needed]. Figure 3The first conductive element 71 includes a connecting block 711, which is connected between the fixing member 4 and the conductive contact 713. One of the connecting block 711 and the fixing member 4 has a first elongated hole 712 extending in a first direction. The connecting block 711 is detachably connected to the fixing member 4 by a connecting bolt. For example, the first elongated hole 712 can be provided on the connecting block 711, and the fixing member 4 can have a screw hole. The connecting bolt passes through the first elongated hole 712 and locks with the fixing member 4 to achieve a fixed connection between the first conductive element 71 and the fixing member 4. Alternatively, the first elongated hole 712 can be provided on the fixing member 4, and a threaded hole can be provided on the connecting block 711. The connecting bolt passes through the first elongated hole 712 and locks with the connecting block 711 to achieve a fixed connection between the first conductive element 71 and the fixing member 4. The distance between the first conductive element 71 and the second conductive element 72 in the initial state can be changed by adjusting the specific position of the connecting bolt in the first elongated hole 712, minimizing the distance between the first conductive element 71 and the second conductive element 72.

[0047] Of course, in other embodiments, the initial distance between the first conductive element 71 and the second conductive element 72 can also be set to other larger distances, as long as the objective lens is not damaged when the first conductive element 71 and the second conductive element 72 make conductive contact. Alternatively, in other embodiments, the mounting position of the first conductive element 71 on the fixing member 4 can be set to be fixed, and the distance between the first conductive element 71 and the second conductive element 72 in the initial state cannot be adjusted.

[0048] In some embodiments, to avoid damage to the objective lens immediately upon contact with the product under test due to the significant gravity of the objective lens and the moving part 5, please refer to... Figure 4 The anti-collision device 3 includes a pull rod assembly 8, which includes an elastic element 81. The elastic element 81 is connected between the fixed element 4 and the moving element 5. The elastic element 81 can apply an elastic force to the moving element 5 to move the moving element 5 away from the product under test in the first direction, thereby reducing the pressure acting on the objective lens when the objective lens just comes into contact with the product under test, thereby reducing the probability of objective lens damage.

[0049] In some embodiments, please continue to refer to Figure 4 The elastic element 81 can be a spring, with one end connected to the fixed element 4 and the other end connected to the movable element 5. The pull rod assembly 8 can also include a first fixed block 82 connected to the fixed element 4 and a second fixed block 83 connected to the movable element 5. The elastic element 81 has a first connecting end 811 connected to the first fixed block 82 and a second connecting end 812 connected to the second fixed block 83. The elastic extension and contraction direction of the elastic element 81 can be tilted relative to the first direction to facilitate the installation of the pull rod assembly 8.

[0050] In some embodiments, in order to minimize the pressure exerted on the objective lens when it first contacts the product under test and to ensure adjustable pressure, the position of the first connecting end 811 of the elastic element 81 on the fixed element 4 is adjustable. Alternatively, the position of the second connecting end 812 of the elastic element 81 on the moving element 5 can also be adjusted. This increases the elastic force acting on the moving element 5 by increasing the elastic stretching length of the elastic element 81, thereby reducing the pressure exerted on the objective lens when it first contacts the product under test.

[0051] In some embodiments, please refer to Figure 4 The movable component 5 is provided with a connector 53, which has a second elongated hole 531. The second fixing block 83 can be a connecting bolt passing through the second elongated hole 531. The second fixing block 83 is fixedly connected to the connector 53. The specific position of the second connecting end 812 on the movable component 5 can be adjusted by changing the specific position of the second fixing block 83 in the second elongated hole 531. Alternatively, in other embodiments, the connector 53 with the second elongated hole 531 can be provided on the fixing component 4. The first fixing block 82 can be a connecting bolt passing through the second elongated hole 531. The specific position of the first connecting end 811 on the fixing component 4 can be changed by changing the specific position of the first fixing block 82 in the second elongated hole 531.

[0052] Of course, in embodiments where the entire weight of the objective lens and the moving part 5 pressing on the objective lens will not cause damage to the objective lens, in order to simplify the structure of the anti-collision device 3, the tie rod assembly 8 may not be provided in the anti-collision device 3.

[0053] In an embodiment of the anti-collision device 3 of this application, the movable member 5 is connected to the fixed member 4 through a mounting screw and an elongated hole through which the mounting screw passes. For ease of explanation, the elongated hole is a third elongated hole 55. The third elongated hole 55 is provided on the movable member 5 or the fixed member 4. The third elongated hole 55 extends in a first direction, and the extension direction of the mounting screw is perpendicular to the first direction. In an embodiment where the third elongated hole 55 is provided on the movable member 5, the mounting screw passes through the third elongated hole 55 and locks itself with the fixed member 4. During the reciprocating movement of the movable member 5 relative to the fixed member 4 in the first direction, the mounting screw can move along the third elongated hole 55. The travel distance of the movable member 5 reciprocating in the first direction relative to the fixed member 4 can be changed by changing the size of the third elongated hole 55 in the first direction.

[0054] To improve the guiding performance of the moving part 5 reciprocating relative to the fixed part 4 in the first direction, a guide rail 6 is provided between the moving part 5 and the fixed part 4, extending in the first direction. In some embodiments, to reduce the displacement of the moving part 5 in the plane perpendicular to the first direction and improve the accuracy and sensitivity of the anti-collision device 3, the guide rail 6 is provided as a cross ball bearing guide rail with high machining accuracy. The guide rail 6 includes a first track 61, a second track 62, and a rolling element (not shown in the figure) rolling between the first track 61 and the second track 62. The first track 61 is connected to the fixed part 4, and the second track 62 is connected to the moving part 5. The first track 61 and the second track 62 are arranged at intervals in a second direction, which is perpendicular to the first direction.

[0055] In order to reduce the displacement of the moving part 5 in the second direction, a clamping structure 9 is also provided in the anti-collision device 3. The clamping structure 9 clamps the guide rail 6 in the second direction. The arrangement direction of the clamping structure 9 and the guide rail 6 is perpendicular to the arrangement direction or connection direction of the guide rail 6, the fixing part 4, and the moving part 5. This helps to reduce the gap between the first track 61 and the second track 62 in the second direction and ensures that the moving part 5 only moves back and forth relative to the fixing part 4 in the vertical direction.

[0056] Please refer to Figure 3 The clamping structure 9 is disposed on the side of the first track 61 opposite to the second track 62 in the second direction, or it can also be disposed on the side of the second track 62 opposite to the first track 61. The clamping structure 9 is connected to the fixing member 4, or it can also be disposed to the moving member 5. The clamping structure 9 can abut against the first track 61 or the second track 62 in the second direction to minimize the gap between the first track 61 and the second track 62 and improve the guiding accuracy of the guide rail 6 in the first direction.

[0057] In some embodiments, since the first track 61 is connected to the fixing member 4 and the second track 62 is connected to the moving member 5, the fixing member 4 may have a fixed connecting portion 41 located on the first track 61 and facing away from the second track 62 in the second direction, and the moving member 5 may have a movable connecting portion 51 located on the second track 62 and facing away from the first track 61. The clamping structure 9 may be connected to the movable connecting portion 51 to clamp against the second track 62 on one side in the second direction, or it may also be connected to the fixed connecting portion 41 to clamp against the first track 61 on the other side in the second direction. This can reduce the gap between the first track 61 and the second track 62, thereby improving the guiding accuracy of the guide rail 6 and improving the anti-collision accuracy and sensitivity of the anti-collision device 3.

[0058] In some embodiments, the clamping structure 9 may include a pin connected to the fixed connection portion 41 or the movable connection portion 51. The pin may extend in a second direction, or the extension direction of the pin may have an angle of less than 90° with the second direction. The pin may be clamped against the corresponding first track 61 or second track 62 in the second direction by external force.

[0059] In some embodiments, to improve the reliability of the clamping structure 9 and ensure that the clamping force between the clamping structure 9 and the guide rail 6 is adjustable, the gap between the first rail 61 and the second rail 62 is further reduced. The clamping structure 9 includes a set screw that extends in a second direction and is threadedly connected to the fixing member 4 or the moving member 5. The clamping force of the set screw on the second rail 62 can be increased as much as possible by tightening the set screw.

[0060] In some embodiments, please refer to Figure 3 The movable component 5 can be arranged with the fixed component 4 in a third direction, with the first direction, second direction, and third direction being perpendicular to each other. The objective lens is clamped and fixed in the middle position of the movable component 5 in the second direction. Two guide rails 6 are provided, arranged on both sides of the objective lens in the second direction to improve the guiding accuracy of the movable component 5 moving relative to the fixed component 4 in the first direction. Of the two guide rails 6, the one closer to the objective lens in the second direction is the first rail 61, and the one farther away from the objective lens is the second rail 62. Each guide rail 6 is provided with a movable connecting part 51 and a fixed connecting part 41, so that the fixed component 4, the movable component 5, and the two guide rails 6 form a symmetrical structure. The two movable connecting parts 51 are arranged at both ends of the movable component 5 in the second direction and are integrally formed. The two fixed connecting parts 41 are located between the two guide rails 6 in the second direction and are integrally formed.

[0061] The clamping structure 9 can be connected only on the movable connecting part 51 corresponding to one of the guide rails 6. When the clamping structure 9 clamps onto the second track 62 of one of the guide rails 6, the movable part 5 can move relative to the fixed part 4 and the guide rail 6 toward the side where the clamping structure 9 is located in the second direction during the clamping process. This can reduce the gap between the second track 62 of the other guide rail 6 and its corresponding movable connecting part 51. The second track 62 of the other guide rail 6 can move toward the first track 61 under the pressing action of its corresponding movable connecting part 51, thereby reducing the gap between the first track 61 and the second track 62 in the other guide rail 6. Thus, the gap between the first track 61 and the second track 62 in the two guide rails 6 arranged in the second direction is reduced only under the clamping action of the clamping structure 9 on one side, thereby improving the guiding accuracy of the movable part 5 moving relative to the fixed part 4.

[0062] In other embodiments, the clamping structure 9 can be connected only to the fixed connection part 41 corresponding to one of the guide rails 6. In this way, when the clamping structure 9 clamps the first track 61 in one of the guide rails 6, the moving member 5 can move relative to the fixed member 4 in the clamping direction, thereby reducing the distance between the second track 62 in the other guide rail 6 and its corresponding moving connection part 51. Under the squeezing action of the moving connection part 51, the gap between the second track 62 and the first track 61 in the other guide rail 6 can be reduced. In this way, the gap between the first track 61 and the second track 62 in the two guide rails 6 arranged in the second direction can be reduced only under the clamping action of the clamping structure 9 on one side, thereby improving the guiding accuracy of the moving member 5 relative to the fixed member 4.

[0063] In some embodiments, multiple clamping structures 9 may be connected to both the fixed connection portion 41 and the movable connection portion 51, and the multiple clamping structures 9 may be arranged at intervals in the first direction to ensure that the gap between the first track 61 and the second track 62 is evenly arranged in the first direction.

[0064] In some embodiments where one or more clamping structures 9 acting on the same guide rail 6 are provided in the first direction, the anti-collision structure further includes an extrusion member (not shown in the figure), which has a contact surface that fits against the first rail 61 and is perpendicular to the second direction. The extrusion member can be provided between the clamping structure 9 and the first rail 61 in the second direction. The clamping force acting on the first rail 61 can be dispersed by the extrusion member in the first direction so that the gap between the first rail 61 and the second rail 62 is evenly distributed in the first direction.

[0065] Of course, the extruder can also be set between the clamping structure 9 and the second track 62. The extruder has a mating surface that fits with the second track 62. This mating surface is perpendicular to the second direction. The clamping force acting on the second track 62 can be dispersed in the first direction by the extruder, so that the gap between the first track 61 and the second track 62 is evenly arranged in the first direction.

[0066] Both the first track 61 and the second track 62 have an outer surface perpendicular to the second direction. The extruder can fit against the outer surface. The extruder is a pad with high hardness to ensure that the extruder can evenly distribute and transmit the extrusion force to the first track 61 or the second track 62.

[0067] Of course, in a structure where the clamping structure 9 is arranged more densely in the first direction, the setting of the extrusion component can be eliminated.

[0068] The displacement of the moving part 5 relative to the fixed part 4 in the second direction can be reduced by the above-mentioned clamping structure 9 alone. In some embodiments, in order to further improve the guiding accuracy of the moving part 5 relative to the fixed part 4 in the first direction, thereby improving the anti-collision accuracy and sensitivity of the anti-collision device 3, in some embodiments, at least one of the fixed part 4 and the moving part 5 is detachably connected to the guide rail 6 in the third direction. This can further reduce the assembly gap of the moving part 5, the guide rail 6 and the fixed part 4 in the third direction while ensuring that the first track 61 and the second track 62 in the guide rail 6 have a small gap in the second direction.

[0069] In some embodiments, please refer to Figure 3 The fixing member 4 has a fixing body part 42 connected to the fixing connection part 41. The fixing body part 42 and the guide rail 6 are arranged in the third direction. The fixing body part 42 has a first mounting surface that fits against the first track 61 in the guide rail 6. The first mounting surface is perpendicular to the third direction. The fixing body part 42 is detachably connected to the first track 61 by a first connecting screw. After the first connecting screw passes through the through hole on the fixing body part 42 and is locked with the first track 61, the first mounting surface fits against the first track 61. This helps to reduce the gap between the fixing member 4 and the guide rail 6 in the third direction.

[0070] Correspondingly, the movable component 5 can also be provided with a movable main body 52 connected to the movable connecting part 51. The movable main body 52 and the guide rail 6 are arranged in the third direction. The movable main body 52 has a second mounting surface that fits against the second track 62 in the guide rail 6. The second mounting surface is perpendicular to the third direction. The movable main body 52 is detachably connected to the second track 62 by a second connecting screw. After the second connecting screw passes through the through hole 54 on the movable main body 52 and is locked with the second track 62, the second mounting surface fits against the second track 62. This helps to reduce the gap between the movable component 5 and the guide rail 6 in the third direction.

[0071] Specifically, during the assembly of the anti-collision device 3, while ensuring the connection of the moving part 5, the fixed part 4, and the guide rail 6, the first and second connecting screws can be loosened first to ensure that the fixed part 4, the moving part 5, and the guide rail 6 do not separate. This allows the tightening structure 9 to press against one of the guide rails 6 in the second direction, reducing the gap between the first track 61 and the second track 62 of the two guide rails 6. After the tightening structure 9 presses against the guide rail 6, the first and second connecting screws are tightened to further reduce the gap between the moving part 5, the guide rail 6, and the fixed part 4 in the third direction. This ensures the high-precision assembly of the anti-collision device 3 and helps to ensure the guiding movement accuracy of the moving part 5 relative to the fixed part 4 in the first direction, thereby improving the anti-collision accuracy and sensitivity of the anti-collision device 3.

[0072] This application embodiment also provides an assembly method for the anti-collision device 3 in the above embodiments, the assembly method including at least the following steps:

[0073] Connect the guide rail 6 between the fixed part 4 and the movable part 5;

[0074] The movable part 5 is reciprocally connected to the fixed part 4 in the first direction by mounting screws.

[0075] In some embodiments, to improve the guiding accuracy of the moving part 5 and the fixed part 4, the guide rail 6 is provided as a crossed ball bearing guide rail. The guide rail 6 includes a first track 61, a rolling element, and a second track 62 arranged sequentially in a second direction. The first track 61 can be connected to the fixed part 4 via a first connecting screw, and the second track 62 in the guide rail 6 can be connected to the moving part 5 via a second connecting screw. Both the first and second connecting screws extend upwards in a third direction, thus connecting the guide rail 6 between the fixed part 4 and the moving part 5 in a third-direction upward direction. In other embodiments, the first track 61 and the second track 62 can also be connected to the corresponding fixed part 4 and moving part 5 by snap-fit ​​or interference fit.

[0076] In some embodiments, the movable member 5 or the fixed member 4 has a third elongated hole 55, which extends in a first direction. The mounting screw extends in a third direction, and the screw portion passes through the third elongated hole 55 and locks into the movable member 5 or the fixed member 4. In this way, during the reciprocating movement of the movable member 5 relative to the fixed member 4 in the first direction, the mounting screw can move within the third elongated hole 55. The wall of the third elongated hole 55 abuts against the mounting screw in the first direction, thereby limiting the travel of the movable member 5 relative to the fixed member 4 in the first direction. This achieves the connection between the movable member 5 and the fixed member 4 and enables the movable member 5 to reciprocate and guide the movement of the fixed member 4 in the first direction.

[0077] In some embodiments where a clamping structure 9 is connected to the fixing member 4 or the moving member 5 of the above-mentioned anti-collision device 3, and the clamping structure 9 abuts against the first rail 61 or the second rail 62 in the second direction, the step of connecting the guide rail 6 between the fixing member 4 and the moving member 5 in the assembly method of the anti-collision device 3 includes:

[0078] The first track 61 is connected to the fixing member 4 by the first connecting screw, and the second track 62 is connected to the moving member 5 by the second connecting screw, while keeping the first connecting screw and the second connecting screw in a connected but not locked state;

[0079] Connect the clamping structure 9 to the moving part 5 or the fixed part 4, so that the clamping structure 9 is clamped to the first track 61 or the second track 62 in the second direction.

[0080] Tighten the first connecting screw and the second connecting screw.

[0081] In the embodiment where the fixing member 4 has a fixing connection part 41 and a fixing body part 42, and the moving member 5 has a moving connection part 51 and a moving body part 52, since the fixing connection part 41 and the moving connection part 51 are arranged on both sides of the guide rail 6 in the second direction, and the moving body part 52 and the fixing body part 42 are arranged on both sides of the guide rail 6 in the third direction, in the process of connecting the guide rail 6 with the fixing member 4 and the moving member 5, the first track 61 is connected to the fixing body part 42 by the first connecting screw, and the second track 62 is connected to the moving body part 52 by the second connecting screw, and the first connecting screw and the second connecting screw are kept in a connected but not locked state. In this state, the moving member 5 and the fixing member 4 are not completely fixed relative to each other, and the moving member 5 can move relative to the fixing member 4 in the first direction, the second direction, or the third direction.

[0082] Furthermore, with the first connecting screw and the second connecting screw in a connected but not locked state, a tightening structure 9 is connected to the fixed connection portion 41 of the fixing member 4 or the movable connection portion 51 of the moving member 5. In an embodiment where the tightening structure 9 includes a set screw and extends in the second direction, the set screw is screwed to press against the first track 61 or the second track 62 in the second direction. This reduces the gap between the first track 61 and the second track 62 in the guide rail 6 in the second direction. During the reciprocating movement of the moving member 5 relative to the fixing member 4 in the first direction, the relative movement of the first track 61 and the second track 62 in the second direction is reduced, thereby improving the guiding movement accuracy of the moving member 5 relative to the fixing member 4.

[0083] Of course, in embodiments where the clamping structure 9 includes a pin, when the first connecting screw and the second connecting screw are connected but not locked, the pin is clamped or pushed against the pin in the second direction so that the pin is pressed against the first track 61 or the second track 62 in the second direction.

[0084] After the clamping structure 9 is clamped against the first rail 61 or the second rail 62 in the second direction, the first connecting screw and the second connecting screw are locked, so that the first mounting surface on the fixed body part 42, which is perpendicular to the third direction, is in contact with the first rail 61, and the second mounting surface on the moving body part 52, which is perpendicular to the third direction, is in contact with the second rail 62. This reduces the assembly gap of the moving part 5, the guide rail 6 and the fixed part 4 in the third direction. During the reciprocating movement of the moving part 5 relative to the fixed part 4 in the first direction, the relative movement of the moving part 5 and the fixed part 4 in the third direction is reduced, thereby further improving the guiding movement accuracy of the moving part 5 relative to the fixed part 4.

[0085] In some embodiments, the assembly method of the above-mentioned anti-collision device 3 further includes, before connecting the guide rail 6 between the fixed member 4 and the movable member 5, or after connecting the movable member 5 to the fixed member 4 in a reciprocating manner in a first direction by mounting screws:

[0086] One of the first conductive element 71 and the second conductive element 72 is mounted on the fixed element 4, and the other is mounted on the movable element 5. The control module is mounted on the detection head 2 of the optical detection equipment or on the fixed element 4.

[0087] In one embodiment, the conductive contact 713 in the first conductive element 71 can be mounted on the connecting block 711, and the connecting block 711 can be mounted on the fixing element 4 by connecting bolts. The connecting bolts pass through the first elongated hole 712 on the connecting block 711 and are connected to the fixing element 4 to realize the installation of the entire first conductive element 71 on the fixing element 4.

[0088] The conductive plate in the second conductive element 72 is mounted on the movable element 5, and the second conductive element 72 and the first conductive element 71 are arranged correspondingly in a plane perpendicular to the first direction.

[0089] After the first conductive element 71 is connected to the fixed element 4 and the second conductive element 72 is connected to the movable element 5, the position of the connecting bolt in the first elongated hole 712 is adjusted to ensure that the distance between the first conductive element 71 and the second conductive element 72 is less than the movement stroke of the movable element 5 relative to the fixed element 4 in the first direction.

[0090] In an embodiment where the anti-collision device 3 includes the tie rod assembly 8, after the movable member 5 is reciprocally connected to the fixed member 4 in a first direction by mounting screws, the assembly method of the anti-collision device 3 further includes:

[0091] The elastic element 81 is connected between the fixed element 4 and the movable element 5, and the elastic force applied by the elastic element 81 to the movable element 5 is kept away from the product under test in the first direction.

[0092] Specifically, the first fixing block 82 is fixed on the fixing member 4, the second fixing block 83 is fixed on the moving member 5, the first connecting end 811 of the elastic member 81 is connected to the first fixing block 82, and the second connecting end 812 is connected to the second fixing block 83, thus realizing the installation of the elastic member 81 between the fixing member 4 and the moving member 5.

[0093] In some embodiments where a connector 53 is provided on the movable part 5, during the process of connecting the second fixing block 83 to the movable part 5, the connector 53 is first installed on the movable part 5, and then the connecting bolt is passed through the second elongated hole 531 on the connector 53 to connect the connecting bolt to the connector 53; after the two connecting ends of the elastic member 81 are respectively connected to the corresponding fixing blocks, the position of the connecting bolt in the second elongated hole 531 is changed to ensure that the elastic force applied by the elastic member 81 to the movable part 5 is far away from the product being tested in the first direction, and finally the connecting bolt is locked, thus realizing the installation of the pull rod assembly 8 between the fixing part 4 and the movable part 5.

[0094] This application also provides an optical inspection device, which may be a confocal microscope, a white light interferometer, or other devices that use optical principles to inspect the product under test. Please refer to... Figure 1 The optical inspection device includes a base 1, an inspection head 2, a drive mechanism (not shown in the figure), and an anti-collision device 3 as described in some of the above embodiments. The base 1 has a motion platform 11 for placing the product under test. The inspection head 2 is mounted on the base 1 through the drive mechanism. The control module in the anti-collision device 3 is electrically connected to the drive mechanism. The control module can drive the inspection head 2 to move back and forth relative to the base 1 in a first direction, that is, in the up and down direction. When the control module controls the drive mechanism to move the inspection head 2 downward, and the first conductive element 71 and the second conductive element 72 in the anti-collision device 3 are electrically connected, the control module controls the drive mechanism to stop the inspection head 2 from moving downward, or the control module controls the drive mechanism to move the inspection head 2 upward, so as to reduce the probability of the objective lens being damaged by a collision, or even prevent the product under test or the motion platform 11 on the base 1 from touching the objective lens.

[0095] The above examples illustrate the present invention only to aid in understanding it and are not intended to limit the scope of the invention. Those skilled in the art can make various simple deductions, modifications, or substitutions based on the principles of this invention.

Claims

1. A collision avoidance device, characterized in that, include: A fastener, installed and fixed on the detection head of the optical inspection equipment; A movable component is used to connect with the objective lens. The movable component is connected to the fixed component. The movable component reciprocates relative to the fixed component in a first direction via a guide rail. The first direction is the movement direction of the detection head. The triggering component includes a first conductive element, a second conductive element, and a control module. At least one of the first conductive element and the second conductive element is electrically connected to the control module. The control module is used to control the detection head to reciprocate in the first direction. One of the first conductive element and the second conductive element is located on the fixed element, and the other is located on the moving element. The first conductive element and the second conductive element are electrically connected during the movement of the moving element toward the fixed element. The guide rail includes a first rail, a second rail, and a rolling element that is rolled between the first rail and the second rail. The first rail is connected to the fixed element, and the second rail is connected to the moving element. The first rail and the second rail are arranged at intervals in a second direction, which is perpendicular to the first direction. A clamping structure is connected to the fixing member or the moving member. The clamping structure is located on the side of one of the first track and the second track facing away from the other, and the clamping structure abuts against the first track or the second track in the second direction.

2. The anti-collision device as described in claim 1, characterized in that, The clamping structure includes a set screw, which extends in the second direction; The fixing member has a fixing connection portion connected to the set screw, and in the second direction, the fixing connection portion is located on the side of the first track opposite to the second track; or, the moving member has a moving connection portion connected to the set screw, and the moving connection portion is located on the side of the second track opposite to the first track.

3. The anti-collision device as described in claim 1, characterized in that, The anti-collision device includes an extrusion component; The extruder has a mating surface that fits with the first track, and the extruder is located between the tightening structure and the first track in the second direction; or, the extruder has a mating surface that fits with the second track, and the extruder is located between the tightening structure and the second track in the second direction.

4. The anti-collision device as described in claim 1, characterized in that, At least one of the fixing member and the moving member is detachably connected to the guide rail in a third direction, the third direction being perpendicular to the first direction and the second direction; The fixing member and / or the moving member that are detachably connected to the guide rail have a mounting surface that fits against the guide rail, and the mounting surface is perpendicular to the third direction.

5. The anti-collision device as described in any one of claims 1 to 4, characterized in that, The anti-collision device includes a pull rod assembly, which includes an elastic element connected between the fixed element and the movable element. The elastic element is capable of applying an elastic force to the movable element in the first direction away from the product being tested.

6. The anti-collision device as described in claim 5, characterized in that, The elastic member has a first connecting end connected to the fixing member and a second connecting end connected to the moving member; the position of the first connecting end on the fixing member is adjustable, and / or the position of the second connecting end on the moving member is adjustable.

7. A method for assembling the anti-collision device as described in claim 1, characterized in that, include: The guide rail is connected between the fixed component and the moving component; The movable part is reciprocally connected to the fixed part in the first direction by mounting screws; The guide rail includes a first rail, a rolling element, and a second rail arranged sequentially in a second direction. The first rail is connected to the fixing element by a first connecting screw, and the second rail is connected to the moving element by a second connecting screw. Both the first connecting screw and the second connecting screw extend upward in a third direction, and the third direction, the second direction, and the first direction are mutually perpendicular. A clamping structure is connected to the fixing element or the moving element, and the clamping structure abuts against the first rail or the second rail in the second direction. Connecting the guide rail between the fixed member and the movable member includes: The first track is connected to the fixing member by the first connecting screw, and the second track is connected to the moving member by the second connecting screw, keeping the first connecting screw and the second connecting screw in a connected but not locked state; A clamping structure is connected to the moving part or the fixing part, so that the clamping structure clamps against the first track or the second track in the second direction; Tighten the first connecting screw and the second connecting screw.

8. An optical inspection device, characterized in that, The device includes a base, a detection head, a drive mechanism, and an anti-collision device according to any one of claims 1 to 6. The detection head is mounted on the base via the drive mechanism, and the drive mechanism is capable of driving the detection head to reciprocate relative to the base in a first direction. The anti-collision device is mounted on the detection head, and the drive mechanism is electrically connected to the control module.

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