Inspection device and method of electro-optical sensor

Abstract

The invention discloses an inspection device and method for an electro-optical sensor. In order to solve the problem of low data processing perfectness and accuracy in the prior art, the device comprises an electrode unit, the electrode unit specifically comprises an upper electrode plate and a lower electrode plate which are oppositely arranged in parallel, each of the upper electrode plate and the lower electrode plate comprises a circular area, and the diameter of each circular area is larger than or equal to two times of the distance between the upper electrode plate and the lower electrode plate; the distance between the upper electrode plate and the lower electrode plate is less than or equal to five times; the voltage adjusting unit is used for applying direct current or alternating current to the upper electrode plate, and an electric field is formed between the upper electrode plate and the lower electrode plate. The carrying unit places the electro-optical sensor to be detected in an electric field formed by the upper electrode plate and the lower electrode plate; and the output detection unit receives an electric field value detected by the electro-optical sensor to be detected. AC or DC uniform electric fields are provided according to different requirements, and an inspection environment is provided for the electro-optical sensor.

Description

Technical Field

[0001] The present invention relates to the technical field of electric field measurement, and in particular to a testing device and method for an electro-optical sensor. Background Art

[0002] Electric field measurement is crucial in power systems. In recent years, with the rapid development of materials and optical technology, optical electric field sensors have received widespread attention as a new measurement method. In particular, electro-optical sensors based on the Pockels effect have been widely used in electric field measurements due to their linear sensing characteristics, high precision, and high sensitivity. However, before formal use, these sensors need to undergo rigorous testing to ensure their accuracy and reliability. At present, a major challenge faced in the inspection process is the non-standard inspection environment, which may lead to uneven electric field distribution, thereby affecting the measurement results of the sensor and causing false inspections. Therefore, how to ensure that the electric field measured by the electro-optical sensor during the inspection process is accurate and standard has become a problem that needs to be solved urgently. This involves many aspects such as the standardization of the inspection environment, the precision of the measurement technology, and the optimization of the data processing method.

[0003] For example, a "TEM chamber field uniformity automatic calibration device and calibration method" disclosed in Chinese patent documents, with the announcement number CN113138359A, includes a sensor array composed of crystal detector field strength sensors as the signal acquisition part, and sequentially obtains field strength values ​​through a low-disturbance electric field probe array, and converts through 4-way, 9-way, and 24-way electro-optical converters respectively, and then outputs an electrical signal data array from an optical fiber, and then uses computer data analysis software to statistically analyze the field strength distribution, evaluate whether the electromagnetic field generated in the transverse electromagnetic wave chamber is uniform, and evaluate the TEM chamber performance based on the field uniformity results. Although the TEM chamber field uniformity calibration device can be automatically calibrated, it still has problems such as limited accuracy, environmental sensitivity, high complexity, and high maintenance cost. Summary of the invention

[0004] The present invention mainly solves the problem of low data processing accuracy caused by non-standard detection environment and imprecise technology of existing electro-optical sensor technology; provides an electro-optical sensor inspection device and method, which is used to compare the electric field value output by the electro-optical sensor with the electric field standard value through a display terminal to solve the problem of inaccurate data when the electro-optical sensor performs actual electric field measurement, and improve the accuracy of the electro-optical sensor in subsequent on-site measurements.

[0005] The above technical problems of the present invention are mainly solved by the following technical solutions: The inspection device of the present invention includes: an electrode unit, including an upper electrode plate and a lower electrode plate arranged in parallel facing each other, and the upper electrode plate and the lower electrode plate are both provided with a circular area; a voltage regulating unit, used to apply direct current or alternating current to the upper electrode plate and form an electric field between the upper electrode plate and the lower electrode plate; a carrying unit, used to place the electro-optical sensor to be detected in the electric field formed by the upper electrode plate and the lower electrode plate.

[0006] By setting the upper electrode plate and the lower electrode plate in parallel, and the specific proportional relationship between the diameter of the circular area and the distance between the electrode plates, a stable and standardized electric field environment can be formed, reducing the problem of uneven electric field distribution and improving the accuracy of inspection. The voltage regulating unit can accurately control the voltage of the upper electrode plate to form a stable DC or AC electric field to meet the inspection requirements of different types of electro-optical sensors. The design of the mounting unit enables the electro-optical sensor to be tested to be conveniently and accurately placed in the standard electric field, reducing operational errors. The output inspection unit can quickly receive and process the electric field values ​​detected by the electro-optical sensor to achieve efficient and accurate electric field measurement. The device is suitable for electro-optical sensors of various sizes and types, and has strong versatility and flexibility.

[0007] Preferably, the diameter of the circular area is greater than or equal to twice the distance between the upper electrode plate and the lower electrode plate, and the diameter of the circular area is less than or equal to five times the distance between the upper electrode plate and the lower electrode plate.

[0008] The voltage regulating unit includes a voltage regulator. When AC power needs to be applied to the upper electrode plate, the voltage regulator is connected to the upper electrode plate. When DC power needs to be applied to the upper electrode plate, the voltage regulating unit also includes a silicon stack rod. The voltage regulator is connected to the silicon stack rod, and the silicon stack rod is connected to the upper electrode plate. DC power is applied to the upper electrode plate through the silicon stack rod. The introduction of the voltage regulator enables the device to output AC voltages of different target voltage levels, thereby simulating the electric field environment under different voltage level conditions and meeting the use requirements of electro-optical sensors in a wider range of scenarios. By manually adjusting the knob of the voltage regulator, inspectors can quickly and conveniently change the electric field environment according to actual needs to achieve the target inspection electric field environment, which significantly enhances the adaptability and practicality of the device.

[0009] Furthermore, in order to provide two electric field environments, namely, AC electric field and DC electric field, so as to facilitate the inspection of the detection results of the electro-optical sensor in the two electric field environments, when it is necessary to apply AC power to the upper electrode plate (that is, the inspection environment needs to be set to an AC electric field environment), the output end of the voltage regulator is directly connected to the upper electrode plate; when it is necessary to apply DC power to the upper electrode plate (that is, the inspection environment needs to be set to a DC electric field environment), the voltage regulating unit also includes a silicon stack rod, and the output end of the voltage regulator is connected to the input end of the silicon stack rod, and the output end of the silicon stack rod is connected to the upper electrode plate, and DC power is applied to the upper electrode plate through the silicon stack rod, thereby realizing the conversion of the inspection environment from an AC electric field environment to a DC electric field environment.

[0010] Preferably, the silicon stack rod is a cylindrical structure, which is a semiconductor discrete device, and its interior is a silicon stack composed of multiple high-voltage rectifier diodes connected in series, which is encapsulated by insulating material. Metal embedded parts are provided at the two ends of the cylinder for input and output conduction of the silicon stack, which can convert the AC voltage in the circuit into DC voltage. At the same time, it has the characteristics of high reverse voltage resistance, good impact resistance and high reliability. The silicon stack rod used in the present invention is a silicon stack rod commonly used in this field.

[0011] As a semiconductor discrete device, the silicon stack rod has a silicon stack composed of multiple high-voltage rectifier diodes connected in series, which can effectively convert the AC voltage in the circuit into a DC voltage. This function enables the inspection device to easily switch the electric field environment from an AC electric field environment to a DC electric field environment, thereby meeting the inspection needs of electro-optical sensors in different electric field environments. Due to its special structure and material selection, the silicon stack rod has the characteristics of high reverse voltage resistance and good impact resistance. This means that in a DC electric field environment, the silicon stack rod can withstand higher voltages and impacts, ensuring the stability and reliability of the electric field environment, and further guaranteeing the accuracy of the inspection results.

[0012] Furthermore, the upper electrode plate and the lower electrode plate of the present invention are metal electrode plates conventionally used in the art. Furthermore, the material used is pure copper material, because pure copper electrodes have high strength, good toughness, and are easy to be made into thin sheets and complex structures. The surface of the electrode plate processed from pure copper is smooth and the electric field generated is more uniform.

[0013] In the present invention, when the voltage regulating unit applies a certain voltage to the upper electrode plate, the upper electrode plate will be uniformly charged. In order to fix the position of the upper electrode plate and ensure that the current on the upper electrode plate does not leak to the ceiling, the electrode unit also includes an insulating suspension device, and the upper electrode plate is suspended from the ceiling through the insulating suspension device. The present invention suspends the upper electrode plate through the insulating suspension device, ensuring that the position is stable and the current does not leak to the ceiling, thereby improving the accuracy and safety of electric field measurement.

[0014] Furthermore, the insulating suspension device is composed of at least one insulator string, and the upper electrode plate is suspended on the ceiling by the insulator string. The upper end of each insulator string is fixed to the ceiling, and the lower end is fixed to the upper electrode plate to support the upper electrode plate. At the same time, the entire insulator string is vertically arranged to ensure that the upper electrode plate fixed at the lower end is parallel to the horizontal plane. In order to ensure that the insulator string has good tensile strength and electrical performance, the insulator string used in the present invention uses a high-strength and light-weight composite insulator string conventionally used in the field. The insulator string ensures that the upper electrode plate is stably suspended and insulated from the ceiling. The composite insulator string is selected, which has high strength and light weight, and improves the safety and reliability of electric field measurement.

[0015] In the present invention, the upper electrode plate and the lower electrode plate arranged in parallel to each other form a plate-plate electrode structure (to avoid the risk of leakage, the lower electrode plate is not in direct contact with the ground, but is connected to the ground through a connecting wire). The plate-plate electrode structure can ensure that the electric field generated within the range of the two electrode plates is a uniform electric field, providing a reliable electric field environment for inspection. The plate-plate electrode structure creates a uniform electric field to ensure the accuracy of the inspection. At the same time, the lower electrode plate is indirectly connected to the ground to avoid the risk of leakage and provide a safe inspection environment.

[0016] Further preferably, the upper electrode plate and the lower electrode plate have the same shape and size, because the field strength generated by the parallel electrode plates of equal shape and size is basically vertically downward in space, while the field strength direction of the electrode plates of unequal shape and size will converge to the edge of the electrode plate with a smaller area, thereby causing the direction of the field strength to tilt, aggravating the edge effect and affecting the detection effect; at the same time, when the high voltage end is applied to the electrode, the electric field strength will increase at the edge position of the parallel upper electrode plate and the lower electrode plate. In order to reduce the influence of the edge effect, the edge portions of the upper electrode plate and the lower electrode plate in the present invention are both set to arc shape. The electrode plates of equal shape and size generate a uniform electric field, and the edge is designed to be arc-shaped to reduce the edge effect, improve the detection accuracy, and ensure the stability and reliability of the electric field environment.

[0017] Furthermore, in order to generate a uniform electric field environment for inspection, the size of the upper electrode plate and the lower electrode plate should be large enough compared to the distance between the two electrode plates, so the upper electrode plate and the lower electrode plate should both include a circular area, and the diameter of the circular area is greater than or equal to twice the distance between the upper electrode plate and the lower electrode plate. In theory, the larger the circular area, the more uniform the electric field formed, but if it is too large, there may be economic and space problems in practice. Therefore, the diameter of the circular area should be less than or equal to five times the distance between the upper electrode plate and the lower electrode plate (for example, when the electrode plate is a circular electrode plate, the diameter of the circular electrode plate should be greater than or equal to twice the distance between the upper electrode plate and the lower electrode plate, and the diameter of the circular electrode plate should be less than or equal to five times the distance between the upper electrode plate and the lower electrode plate; when the electrode plate is a rectangular electrode plate, the length and width of the rectangular electrode plate should be greater than or equal to twice the distance between the upper electrode plate and the lower electrode plate, and the length and width of the rectangular electrode plate should be less than or equal to five times the distance between the upper electrode plate and the lower electrode plate).

[0018] Furthermore, the mounting unit includes a support frame, and the electro-optical sensor to be detected is arranged at the exact center of the electric field formed by the circular area of ​​the upper electrode plate and the lower electrode plate through the support frame.

[0019] Furthermore, the support frame includes a first support rod, a second support rod and a support base, the second support rod is connected to the support base, wherein the first support rod is parallel to the ground, and the second support rod is perpendicular to the ground, the electro-optical sensor to be detected is connected to one end of the first support rod, and is arranged at the exact center of the electric field formed by the circular area of ​​the upper electrode plate and the lower electrode plate (ensuring that the electro-optical sensor to be detected is at the exact center of the formed electric field, so that the range where the electro-optical sensor is located is a uniform electric field), the other end of the first support rod extends to the area outside the upper electrode plate and the lower electrode plate, and is connected to the second support rod; the first support rod, the second support rod and the support base are all made of materials with high insulation properties to reduce the influence of the support frame on the inspection results.

[0020] In the present invention, the output inspection unit includes a terminal display, and the electro-optical sensor to be inspected is connected to the terminal display via a wire.

[0021] Furthermore, when the wire is directly exposed to the electric field, it will affect the electric field. In order to further avoid this influence, the first support rod and the second support rod are hollow structures, and wires are arranged inside to eliminate the influence of the wire being directly exposed to the electric field. The probe of the electro-optical sensor is connected to one end of the wire, and the other end of the wire is connected to the terminal display to transmit the signal captured by the probe of the electro-optical sensor to the terminal display.

[0022] In the present invention, the electric field value signal detected by the electro-optical sensor is transmitted to the terminal display through a wire, and the corresponding electric field value is displayed on the terminal display. The inspector can determine whether the electric field value detected by the electro-optical sensor is accurate by checking the electric field value displayed on the terminal display and comparing it with the electric field standard value.

[0023] A second aspect of the present invention provides a method for testing an electro-optical sensor using the above-mentioned testing device, the method comprising the following steps: S1. Simulating the electric field value of the electrode unit when different voltages are applied by simulation software as the standard value of the electric field; S2. Connect the voltage regulating unit to the power supply, turn on the power supply, apply voltage to the upper electrode plate through the voltage regulating unit, form an electric field between the upper electrode plate and the lower electrode plate, place the electro-optical sensor to be detected in the electric field formed by the upper electrode plate and the lower electrode plate, the electro-optical sensor detects the corresponding electric field value, and transmits it to the output inspection unit, compares the electric field value received by the output inspection unit with the standard value of the electric field under this voltage, and verifies whether the electric field value detected by the electro-optical sensor is accurate.

[0024] Furthermore, when it is necessary to form an AC electric field test environment, the output end of the voltage regulator is directly connected to the upper electrode plate, the power supply is turned on, the knob of the voltage regulator is adjusted, and AC power is applied to the upper electrode plate, so that an AC electric field is formed between the upper electrode plate and the lower electrode plate; when it is necessary to form a DC electric field test environment, the output end of the voltage regulator is connected to the input end of the silicon stack rod, the output end of the silicon stack rod is connected to the upper electrode plate, the power supply is turned on, the knob of the voltage regulator is adjusted, and DC power is applied to the upper electrode plate, so that a DC electric field is formed between the upper electrode plate and the lower electrode plate.

[0025] The present invention is based on the inspection method of the standard field method, and proposes a Pockels electro-optical sensor inspection method and device based on a large space uniform mixed electric field, which can realize the inspection of the target electro-optical sensor, and transmit the electric field data detected by the electro-optical sensor to the terminal display. The inspector can check the electric field value in the terminal display and compare it with the electric field standard value under the corresponding voltage level to determine whether the electric field value measured by the target electro-optical sensor is accurate. The device and method of the present invention can realize the measurement of two types of electric fields, AC electric field and DC electric field, and can improve the accuracy and comprehensiveness of the electro-optical sensor in the mixed electric field environment. At the same time, multiple measures are further adopted to reduce the edge effect in the electric field space, improve the uniformity of the electric field in the electric field space, and thus improve the detection accuracy of the electro-optical sensor.

[0026] Beneficial effects: 1. An inspection device for an electro-optical sensor of the present invention realizes a uniform electric field, reduces edge effects, and improves detection accuracy and electric field environment stability through the design of uniform-shaped electrode plates and arc-shaped edges; 2. An inspection method for an electro-optical sensor of the present invention can quickly compare the measured electric field value with the standard electric field value to ensure the detection accuracy of the electro-optical sensor, is applicable to AC and DC electric field environments, and effectively improves the comprehensiveness and accuracy of detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of an inspection device of Example 1 of an inspection device and method for an electro-optical sensor of the present invention.

[0028] Figure 2 It is a schematic diagram of the inspection device of Example 2 of an inspection device and method for an electro-optical sensor of the present invention.

[0029] In the figure, 1, voltage regulator; 2, silicon stack rod; 3, upper electrode plate; 4, lower electrode plate; 5, insulating suspension device; 6, support frame; 7, terminal display; 6-1, first support rod; 6-2, second support rod; 6-3, support base. DETAILED DESCRIPTION

[0030] The technical solution of the present invention is further specifically described below through embodiments and in conjunction with the accompanying drawings.

[0031] Embodiment 1: The present embodiment provides an electro-optic sensor inspection device and method, such as Figure 1 As shown, it includes a voltage regulating unit, an electrode unit, a carrying unit and an output inspection unit; the electrode unit includes an upper electrode plate 3 and a lower electrode plate 4 which are arranged in parallel opposite to each other (both are circular pure copper electrode plates, and the edge portions of the upper electrode plate 3 and the lower electrode plate 4 are arranged in an arc shape, the upper electrode plate 3 and the lower electrode plate 4 are the same size, and the diameters of the upper electrode plate 3 and the lower electrode plate 4 are both equal to twice the distance between the upper electrode plate 3 and the lower electrode plate 4); the voltage regulating unit includes a voltage regulator 1, and the input end of the voltage regulator 1 is connected to the power supply; the output end of the voltage regulator 1 is directly connected to the upper electrode plate 3.

[0032] Since the upper electrode plate 3 and the lower electrode plate 4 are circular pure copper electrode plates of the same size and arranged in parallel, and their diameter is equal to twice the spacing between the electrode plates, this design can ensure that a uniform electric field environment is formed between the upper electrode plate and the lower electrode plate. The uniform electric field environment is crucial to improving the inspection accuracy of the electro-optical sensor. The edge portions of the upper electrode plate 3 and the lower electrode plate 4 are both arranged in an arc shape, and this design can effectively reduce the edge effect existing in the electric field space. The edge effect can cause the direction of the electric field intensity to tilt, affect the uniformity of the electric field, and then affect the accuracy of the inspection. Through the arc edge design, the electric field intensity can be more evenly distributed in space.

[0033] The voltage regulating unit includes a voltage regulator 1, the input end of the voltage regulator 1 is connected to the power supply, and the output end is directly connected to the upper electrode plate 3. This design allows the device to easily adjust the voltage on the upper electrode plate 3, thereby forming an electric field environment of different intensities. This flexibility allows the device to adapt to the inspection needs of electro-optical sensors of different types and requirements. Using pure copper electrode plates as the upper electrode plate 3 and the lower electrode plate 4 can ensure the conductivity and stability of the electrode plates. The pure copper electrode plates have good electrical conductivity and thermal conductivity, which can ensure the stability and reliability of the electric field environment. The structural design of the entire device is concise and easy to operate. The inspector can change the intensity of the electric field environment by simply adjusting the knob of the voltage regulator 1, thereby realizing the inspection of the electro-optical sensor.

[0034] When the electro-optical sensor inspection device of this embodiment is set up as described, the linkage effect of the device is mainly reflected in the following aspects: Once the power supply is started, the voltage regulator 1 will respond quickly and adjust the output voltage according to the set value. Since the upper electrode plate 3 and the lower electrode plate 4 are parallel and equal-sized circular pure copper electrode plates, and their diameters are equal to twice the distance between them, this design ensures the uniformity of the electric field distribution. When the voltage regulator 1 applies voltage to the upper electrode plate 3, a uniform electric field will quickly form between the lower electrode plate 4 and the upper electrode plate 3. Since the edge portions of the upper electrode plate 3 and the lower electrode plate 4 are both designed to be arc-shaped, this helps to reduce the concentration of the electric field at the edge, the so-called "edge effect". Under the design of the arc-shaped edge, the electric field distribution is more uniform, reducing the electric field inhomogeneity caused by the edge effect, and further improving the accuracy of the inspection.

[0035] When the electro-optical sensor is placed in the electric field formed by the electrode unit, it can detect the electric field value in real time and pass the data to the output inspection unit. The output inspection unit compares these data with the preset electric field standard value and gives the inspection result. This linkage effect of real-time detection and feedback ensures the accuracy and timeliness of the inspection process. By adjusting the knob of the voltage regulator 1, the inspector can adjust the electric field strength as needed. This flexible voltage adjustment capability enables the device to adapt to the inspection needs of electro-optical sensors of different types and requirements, and improves the versatility and practicality of the device. The use of pure copper electrode plates ensures the conductivity and stability of the electrode unit. At the same time, the various parts of the device work together to form a stable and reliable system. This stability and reliability are important guarantees to ensure the smooth progress of the inspection process and the accuracy and reliability of the inspection results.

[0036] The electrode unit also includes an insulating suspension device 5 consisting of four composite insulator strings. The upper end of each composite insulator string is fixed to the laboratory ceiling, and the lower end is fixed to the upper electrode plate 3 to support the upper electrode plate. At the same time, the entire insulator string is vertically arranged to ensure that the upper electrode plate 3 fixed at the lower end is parallel to the horizontal plane, so that the upper electrode plate 3 is suspended on the laboratory ceiling, and the lower electrode plate 4 arranged opposite and parallel to the upper electrode plate 3 is connected to the ground through a connecting wire (the lower electrode plate 4 is not in direct contact with the ground).

[0037] The upper electrode plate 3 is suspended from the laboratory ceiling by an insulating suspension device 5, and is isolated from the lower electrode plate 4 connected to the ground by a wiring, effectively avoiding the potential safety hazards caused by direct contact between the high-voltage electric field and the ground, and significantly improving the safety of the experimental process. The insulating suspension device 5 is composed of a composite insulator string, which has excellent electrical properties and mechanical strength, and can ensure that the upper electrode plate 3 is stably suspended on the ceiling under the action of the electric field without shaking or deformation, thereby ensuring the stability and uniformity of the electric field.

[0038] Suspending the upper electrode plate 3 from the ceiling makes the experimental operation space more open, which is convenient for the inspectors to install, debug and replace the electro-optical sensor, and improves the convenience and efficiency of the experimental operation. The upper electrode plate 3 is isolated from the ground by the insulating suspension device 5, which reduces the influence of environmental factors such as ground vibration and temperature change on the stability of the electric field, and improves the accuracy and reliability of the test results. The use of the insulating suspension device 5 avoids the wear and corrosion that may be caused by the direct contact between the upper electrode plate 3 and the ground, thereby extending the service life of the equipment and reducing maintenance costs.

[0039] When the electrode unit is configured with an insulating suspension device 5 consisting of four composite insulator strings, the linkage effect of the device is mainly reflected in the following aspects: the insulating suspension device 5 ensures that the upper electrode plate 3 is stably suspended on the laboratory ceiling, forming a stable parallel electrode structure with the lower electrode plate 4. This stable electrode structure helps to form a uniform and stable electric field environment between the two, providing reliable test conditions for the inspection of the electro-optical sensor. Since the electric field between the upper electrode plate 3 and the lower electrode plate 4 is uniform and stable, the detection results of the electro-optical sensor therein will be more accurate. At the same time, due to the stable suspension of the upper electrode plate 3, the electric field fluctuations caused by vibration or other environmental factors are reduced, further improving the accuracy of the inspection.

[0040] The insulating suspension device 5 allows the upper electrode plate 3 to be suspended from the ceiling, providing a larger space for experimental operations. Inspectors can more conveniently install, debug and replace electro-optical sensors, improving the convenience and efficiency of experimental operations. The use of the insulating suspension device 5 avoids direct contact between the upper electrode plate 3 and the ground or other equipment, reducing the safety risks caused by accidental touch. At the same time, the lower electrode plate 4 is connected to the ground by connecting wires, which further enhances the safety performance. The insulating suspension device 5 uses a composite insulator string as a supporting material, which has high strength and stability. This design can reduce the deformation or damage of the upper electrode plate 3 due to long-term stress, thereby extending the service life of the equipment.

[0041] The carrying unit includes a support frame 6, which includes a first support rod 6-1, a second support rod 6-2 and a support base 6-3, wherein the second support rod 6-2 is connected to the support base 6-3, the first support rod 6-1 is parallel to the ground, the second support rod 6-2 is perpendicular to the ground, and the first support rod 6-1 is connected to the second support rod 6-2; the first support rod 6-1, the second support rod 6-2 and the support base 6-3 are all made of materials with high insulation properties (quartz glass), and the first support rod 6-1 and the second support rod 6-2 are hollow structures; the output inspection unit includes a terminal display 7.

[0042] Materials with high insulation performance (such as quartz glass) are selected to make various components of the support frame 6, including the first support rod 6-1, the second support rod 6-2 and the support base 6-3, which greatly reduces the interference of the electric field on the support frame 6, and also reduces the potential impact of the support frame 6 on the electric field, thereby ensuring the purity of the electric field environment and the safety of the inspection process. The first support rod 6-1 and the second support rod 6-2 adopt a hollow structure, which not only maintains sufficient strength and stability, but also significantly reduces the weight of the support frame 6, making the entire device lighter and easier to install, move and maintain.

[0043] Due to the design of the support frame 6, especially the design that the first support rod 6-1 is parallel to the ground, the space under the inspection device can be fully utilized. This design not only increases the sense of space in the experimental area, but also facilitates the arrangement or operation of other equipment. The output inspection unit includes a terminal display 7, which allows the inspector to intuitively observe the electric field data detected by the electro-optical sensor and compare it with the electric field standard value. At the same time, due to the design of the support frame 6, the inspector can more conveniently approach and operate the electro-optical sensor or the terminal display 7, which improves the convenience of experimental operation. The structural design of the entire mounting unit is reasonable and stable, and can withstand certain external pressure and impact. This design ensures the stability and reliability of the inspection device during long-term use, and reduces the risk of experimental interruption or data error due to equipment failure.

[0044] When the device adopts such a mounting unit setting, the linkage effect of each structure in the device is mainly reflected in the following aspects: Since the first support rod 6-1, the second support rod 6-2 and the support base 6-3 are all made of materials with high insulation performance (quartz glass), these structures can effectively isolate and prevent the electric field from interfering with themselves, and also avoid their adverse effects on the electric field environment, thereby ensuring the stability and purity of the electric field environment. The second support rod 6-2 is vertically connected to the support base 6-3, providing a stable foundation for the entire support frame 6. At the same time, the connection between the first support rod 6-1 and the second support rod 6-2, and the hollow structure design between them, not only ensure the stability of the structure, but also reduce the overall weight, making the support frame 6 both stable and light.

[0045] The design of the first support rod 6-1 being parallel to the ground provides a stable platform for the electro-optical sensor. The electro-optical sensor can be stably placed on the first support rod 6-1 for precise inspection operations. The terminal display 7 in the output inspection unit can receive and display the electric field data detected by the electro-optical sensor in real time. This enables the inspector to intuitively observe the changes in the electric field and compare it with the preset electric field standard value to judge the performance of the electro-optical sensor.

[0046] The various structures in the entire device work together to ensure the accuracy and reliability of the electro-optical sensor inspection. The voltage regulation unit provides a stable voltage to the upper electrode plate 3 through the voltage regulator 1 to form a uniform electric field environment; the electrode unit forms an electric field through the upper electrode plate 3 and the lower electrode plate 4 to provide the electro-optical sensor for inspection; the mounting unit provides a stable mounting platform for the electro-optical sensor through the support frame 6; the output inspection unit displays the electric field data through the terminal display 7 for the inspector to analyze and judge. The coordinated work between these structures enables the entire device to efficiently and accurately complete the inspection task of the electro-optical sensor.

[0047] The method for testing the electro-optical sensor using the above-mentioned testing device comprises the following steps: S1. The electric field values ​​of the electrode unit when different voltages are applied are obtained by simulation using simulation software (comsol) as standard electric field values.

[0048] S2. Fix the electro-optical sensor to be detected to one end of the first support rod 6-1, and the other end of the first support rod 6-1 extends to the area outside the upper electrode plate 3 and the lower electrode plate 4, and is connected to the second support rod 6-2 (make sure that the second support rod 6-2 and the support base 6-3 are both located outside the upper electrode plate 3 and the lower electrode plate 4), adjust the support frame 6, and place the electro-optical sensor to be detected in the exact center of the electrode structure formed by the upper electrode plate 3 and the lower electrode plate 4 (make sure that when an electric field is subsequently formed between the upper electrode plate 3 and the lower electrode plate 4, the electro-optical sensor is located in the exact center of the formed electric field), and wires are arranged inside the first support rod 6-1 and the second support rod 6-2, the probe of the electro-optical sensor is connected to one end of the wire, and the other end of the wire is connected to the terminal display.

[0049] Turn on the power supply, manually adjust the knob of the voltage regulator 1, adjust the voltage, apply AC voltage to the upper electrode plate 3, form an AC electric field between the upper electrode plate 3 and the lower electrode plate 4, and place the electro-optical sensor at the exact center of the AC electric field formed by the upper electrode plate 3 and the lower electrode plate 4. The electro-optical sensor detects the corresponding electric field value, and the wire transmits the electric field value signal captured by the probe of the electro-optical sensor to the terminal display 7. The terminal display 7 receives the electric field value detected by the electro-optical sensor and displays the corresponding electric field value under the AC voltage. The detected electric field value is compared with the standard electric field value under the AC voltage to check whether the electric field value detected by the electro-optical sensor under the AC electric field is accurate.

[0050] The above process can be further described in detail as follows: First, make sure that the power supply is properly connected to the device and that the power supply is off. Then, turn on the power switch to provide power to the entire device. Before starting the inspection, check whether all parts in the device are intact, especially the electrode unit, the carrying unit, and the output inspection unit. Make sure that the electrode plates (upper electrode plate 3 and lower electrode plate 4) are clean, free of dirt, and have a flat surface.

[0051] Manually turn the knob of the voltage regulator 1 to start adjusting the voltage. According to the test requirements, gradually increase or decrease the voltage value until the required AC voltage is reached. After the voltage is adjusted, the upper electrode plate 3 will be applied with an AC voltage. Thus, a stable AC electric field is formed between the upper electrode plate 3 and the lower electrode plate 4.

[0052] Place the electro-optic sensor in the exact center of the AC electric field formed by the upper electrode plate 3 and the lower electrode plate 4. Make sure the probe of the electro-optic sensor is aligned with the center of the electric field to obtain the most accurate electric field value. The electro-optic sensor begins to detect the electric field value, and its probe can capture the change in the electric field strength. The circuit inside the electro-optic sensor converts the detected electric field value signal into transmittable data.

[0053] The electro-optical sensor transmits the captured electric field value signal to the terminal display 7 through the wire. The wire should have good conductivity and anti-interference ability to ensure accurate data transmission. The terminal display 7 receives the electric field value data from the electro-optical sensor. The circuit inside the display decodes and processes the data for display. The terminal display 7 displays the processed electric field value in the form of numbers or graphics. The inspector can intuitively see the corresponding electric field value under the current AC voltage.

[0054] The inspector compares the detected electric field value with the standard value of the electric field under the AC voltage. The standard value can be a known value obtained in advance through experiments or calculations. If the detected electric field value is close to or consistent with the standard value, it means that the electric field value detected by the electro-optical sensor under the AC electric field is accurate. If there is a large difference between the two, it may be necessary to check the performance of the electro-optical sensor or re-inspect it.

[0055] The inspector should record the electric field value, AC voltage value and comparison results of each inspection. These data can be used for subsequent analysis and evaluation. Based on the inspection results, the inspector can summarize the performance of the electro-optical sensor under different AC electric fields. This helps to improve the inspection method or optimize the design of the electro-optical sensor.

[0056] Example 2 like Figure 2 The inspection device and method of the electro-optical sensor shown in the embodiment 1, compared with the inspection device in Example 1, the voltage regulating unit also includes a silicon stack rod 2 (the silicon stack rod 2 is a cylindrical structure, which is a semiconductor discrete device, and its interior is a silicon stack composed of a plurality of high-voltage rectifier diodes connected in series, which is encapsulated by an insulating material, and the two ends of the cylinder are provided with metal embedded parts for input and output conduction of the silicon stack), the output end of the voltage regulator 1 is connected to the input end of the silicon stack rod 2, and the output end of the silicon stack rod 2 is connected to the upper electrode plate 3; The method for inspecting the electro-optical sensor using the inspection device is implemented according to the method described in Example 1, except that, in step S2, the knob of the voltage regulator 1 is manually adjusted to adjust the voltage, and a DC voltage is applied to the upper electrode plate 3 through the silicon stack rod 2 to form a DC electric field between the upper electrode plate 3 and the lower electrode plate 4, and finally the corresponding electric field value under the DC voltage is obtained. The obtained electric field value is compared with the standard value of the electric field under the DC voltage to verify whether the electric field output value detected by the electro-optical sensor under the DC electric field is accurate.

[0057] By using the inspection device and inspection method of the present invention, it is possible to measure two types of electric fields, namely, AC electric field and DC electric field, which can improve the accuracy and comprehensiveness of electro-optical sensors in mixed electric field environments. At the same time, multiple measures can be further adopted to reduce the edge effects in the electric field space and improve the uniformity of the electric field in the electric field space, thereby improving the detection accuracy of the electro-optical sensor.

[0058] It should be understood that the embodiments are only used to illustrate the present invention and are not used to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope limited by the appended claims of the application.

Claims

1. An inspection device for an electro-optical sensor, characterized in that: The testing device comprises: The electrode unit comprises an upper electrode plate (3) and a lower electrode plate (4) which are arranged opposite to each other and in parallel, and the upper electrode plate (3) and the lower electrode plate (4) are both provided with a circular area; A voltage regulating unit applies direct current or alternating current to the upper electrode plate (3) and forms an electric field between the upper electrode plate (3) and the lower electrode plate (4); The mounting unit places the electro-optical sensor to be detected in the electric field formed by the upper electrode plate (3) and the lower electrode plate (4).

2. The electro-optic sensor testing device according to claim 1, characterized in that: The diameter of the circular area is greater than or equal to twice the distance between the upper electrode plate (3) and the lower electrode plate (4), and the diameter of the circular area is less than or equal to five times the distance between the upper electrode plate (3) and the lower electrode plate (4).

3. The electro-optic sensor testing device according to claim 1, characterized in that: The voltage regulating unit comprises a voltage regulator (1), and when alternating current needs to be applied to the upper electrode plate (3), the voltage regulator (1) is connected to the upper electrode plate (3); When direct current needs to be applied to the upper electrode plate (3), the voltage regulating unit further comprises a silicon stack rod (2), the voltage regulator (1) is connected to the silicon stack rod (2), the silicon stack rod (2) is connected to the upper electrode plate (3), and direct current is applied to the upper electrode plate (3) via the silicon stack rod (2).

4. The electro-optic sensor testing device according to claim 3, characterized in that: The silicon stack rod (2) is a cylindrical structure, inside of which is a silicon stack consisting of a plurality of diodes connected in series, which is encapsulated by insulating material, and two ends of the cylinder are provided with metal embedded parts, and the input and output of the silicon stack are conductive.

5. The electro-optical sensor testing device according to claim 1, characterized in that: The electrode unit further comprises an insulating suspension device (5), and the upper electrode plate (3) is suspended on the ceiling via the insulating suspension device (5).

6. The electro-optical sensor testing device according to claim 5, characterized in that: The insulating suspension device (5) is composed of at least one insulator string, and the upper electrode plate (3) is suspended on the ceiling by means of the insulator string.

7. The electro-optical sensor testing device according to claim 1 or 5, characterized in that: The lower electrode plate (4) is connected to the ground via a grounding wire.

8. The electro-optical sensor testing device according to claim 1, characterized in that: The mounting unit comprises a support frame (6), and the electro-optical sensor to be detected is arranged at the exact center of the electric field formed by the circular area of ​​the upper electrode plate (3) and the lower electrode plate (4) through the support frame (6).

9. The electro-optical sensor testing device according to claim 1, characterized in that: The testing device further comprises an output testing unit, which receives the electric field value detected by the electro-optical sensor to be tested; specifically comprises a terminal display (7), and the electro-optical sensor to be tested is connected to the terminal display (7) via a wire.

10. A method for testing an electro-optical sensor, according to the electro-optical sensor testing device according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1. Simulating the electric field value of the electrode unit when different voltages are applied by simulation software as the standard value of the electric field; S2, connecting the voltage regulating unit to a power source, turning on the power source, applying voltage to the upper electrode plate (3) through the voltage regulating unit, forming an electric field between the upper electrode plate (3) and the lower electrode plate (4), placing the electro-optical sensor to be detected in the electric field formed by the upper electrode plate (3) and the lower electrode plate (4), detecting and obtaining a corresponding electric field value through the electro-optical sensor, and transmitting the electric field value to the output inspection unit, comparing the electric field value received by the output inspection unit with the electric field standard value under the voltage, and inspecting whether the electric field value detected by the electro-optical sensor is accurate.

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