Solar cell material transfer system and coating equipment

Abstract

The invention discloses a solar cell material transfer system and coating equipment, the solar cell material transfer system comprises a first sheet storage assembly, a first sheet taking assembly, a second sheet storage assembly, a second sheet taking assembly and a transition sheet storage assembly, the transition sheet storage assembly is arranged between the first sheet storage assembly and the second sheet storage assembly, the first sheet taking assembly is used for transferring multiple sheets of materials from the first sheet storage assembly to the transition sheet storage assembly for multiple times, the second sheet taking assembly is used for transferring multiple sheets of materials from the transition sheet storage assembly to the second sheet storage assembly for multiple times, and the transition sheet storage assembly comprises multiple containing grooves and a driving mechanism. The coating equipment comprises the solar cell material transfer system. According to the invention, the silicon wafer can be quickly transferred, the production efficiency is improved, the gap of the transition wafer storage assembly can be adjusted, and the thermal stress of the material can be conveniently eliminated.

Description

Technical Field

[0001] The present invention relates to the technical field of solar cell production, and in particular to a solar cell material transfer system and coating equipment. Background Art

[0002] In the production process of solar cells, efficient and stable material transfer is one of the key links to ensure production efficiency and product quality. In traditional solar cell production lines, after the silicon wafers are cleaned, dried, cooled and other processes, they need to be transferred from the flower basket to the quartz boat, which carries the silicon wafers for surface deposition, boron diffusion and other processes. The traditional flower basket transfer system will carry all the silicon wafers that need to be processed to the production line at one time, and the wafer picking mechanism will transfer the silicon wafers to the quartz boat, and finally the quartz boat will take the silicon wafers to the subsequent station for processing. However, since the quartz boat transfers the silicon wafers to the subsequent station in many steps and takes a long time, in the process of transferring the silicon wafers for processing, the transfer mechanism and the production line in the flower basket transfer system need to wait for a long time before they can restart the turnover, which not only causes a waste of production capacity, but also prolongs the production cycle, thereby affecting the overall production line capacity and efficiency. On the other hand, with the development of technology, the thickness of silicon wafers is designed to be smaller and smaller, and the sensitivity of silicon wafers to temperature is getting higher and higher. After the thinner silicon wafers have undergone processes such as cleaning and drying, certain thermal stress remains on the surface, which is prone to warping and other risks in subsequent diffusion, coating and other processes. The storage slots of existing flower baskets and quartz boats are densely arranged with small spacing, and the spacing cannot be changed, which is not conducive to eliminating thermal stress of silicon wafers after drying, and will have a certain impact on product quality. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a solar cell material transfer system and coating equipment, which can realize the rapid transfer of silicon wafers and improve production efficiency.

[0004] In order to solve the above technical problems, on the one hand, the present invention provides a solar cell material transfer system for transferring materials, including a first wafer storage component and a first wafer picking component located at a wafer picking station and a second wafer storage component and a second wafer picking component located at a wafer insertion station.

[0005] It also includes a transition sheet storage assembly, which is arranged between the first sheet storage assembly and the second sheet storage assembly, the first sheet taking assembly is used to transfer multiple sheets of material from the first sheet storage assembly to the transition sheet storage assembly multiple times, and the second sheet taking assembly is used to transfer multiple sheets of material from the transition sheet storage assembly to the second sheet storage assembly multiple times.

[0006] The transition sheet storage assembly includes a plurality of receiving slots and a driving mechanism that is transmission-connected to the receiving slots. A single sheet of material can be placed in the storage gap of a single receiving slot. The driving mechanism is used to drive the receiving slot to change the width of the storage gap.

[0007] After the first sheet taking component transfers multiple sheets of material to the transition sheet storage component each time, the second sheet taking component takes out multiple sheets of material from the transition sheet storage component; after several times of taking sheets, the second sheet taking component can take out all the materials in the transition sheet storage component.

[0008] As an improvement of the above-mentioned scheme, the transition storage sheet assembly is provided with a plurality of groups of accommodating units, each group of accommodating units includes at least a first isolation sheet and a second isolation sheet, the width of the storage gap between the first isolation sheet and the second isolation sheet is a first spacing, the driving mechanism includes a driving member, the first isolation sheet and the second isolation sheet are both connected to the driving member, and the driving member can respectively drive the first isolation sheet and the second isolation sheet to move different distances to change the first spacing.

[0009] As an improvement of the above-mentioned solution, each group of the accommodating units also includes a third isolation sheet, the width of the material storage gap between the second isolation sheet and the third isolation sheet is the second spacing, the third isolation sheet is connected to the driving plate, and the driving mechanism can respectively drive the first isolation sheet, the second isolation sheet and the third isolation sheet to move different distances, so that the first spacing and the second spacing change at the same time.

[0010] As an improvement of the above-mentioned scheme, the driving mechanism also includes a driving plate, and the movable end of the driving member is connected to the driving plate. At least a first connecting hole, a second connecting hole and a third connecting hole are provided on the driving plate. The fastener can pass through the first connecting hole, the second connecting hole and the third connecting hole and be respectively connected to the first isolation plate, the second isolation plate and the third isolation plate. The driving member can drive the first isolation plate, the second isolation plate and the third isolation plate to move respectively through the driving plate.

[0011] As an improvement of the above-mentioned scheme, the first connecting hole, the second connecting hole and the third connecting hole all include a first limiting portion, a transition portion and a second limiting portion distributed in sequence along the moving direction of the isolation plate, the first limiting portion, the transition portion and the second limiting portion are connected to each other, the fastener can slide between the first limiting portion, the transition portion and the second limiting portion, the length of the transition portion of the first connecting hole is smaller than the length of the transition portion of the second connecting hole, and the length of the transition portion of the second connecting hole is smaller than the length of the transition portion of the third connecting hole.

[0012] As an improvement of the above solution, the difference between the length of the transition portion of the second connecting hole and the length of the transition portion of the first connecting hole is equal to the difference between the length of the transition portion of the third connecting hole and the length of the transition portion of the second connecting hole.

[0013] As an improvement of the above scheme, the first film picking assembly includes a first robotic arm and a first film picking mechanism, the first film picking mechanism is connected to one end of the first robotic arm, a plurality of first film picking positions are provided in the first film picking mechanism, and the first film picking mechanism can accommodate a sheet of material.

[0014] As an improvement of the above scheme, the second film picking assembly includes a second robotic arm and a second film picking mechanism, the second film picking mechanism is connected to one end of the second robotic arm, a plurality of second film picking positions are provided in the second film picking mechanism, and the second film picking mechanism can accommodate b pieces of material.

[0015] As an improvement of the above solution, the transition sheet storage assembly can accommodate c sheets of material.

[0016] When the number of remaining holding slots in the transitional sheet storage assembly is greater than or equal to a sheets, the first sheet taking assembly takes sheets from the first sheet storage assembly; when the number of materials contained in the transitional sheet storage assembly is greater than or equal to b sheets, the second sheet taking assembly takes sheets from the transitional sheet storage assembly.

[0017] As an improvement of the above scheme, 2b≤a.

[0018] As an improvement of the above solution, 2a≤c or 2b≤c.

[0019] As an improvement of the above solution, n*b≤c≤m*a, wherein n and m are positive integers greater than 1.

[0020] As an improvement of the above scheme, a+(ab)≤c, where 2a>b.

[0021] On the other hand, the present invention further provides a coating device, comprising the solar cell material transfer system as described above.

[0022] The implementation of the present invention has the following beneficial effects:

[0023] The solar cell material transfer system of the present invention is provided with a first wafer storage component, a first wafer picking component, a transition wafer storage component, a second wafer storage component and a second wafer picking component. During operation, after the first wafer picking component transfers multiple wafers of material to the transition wafer storage component each time, the second wafer picking component takes out multiple wafers of material from the transition wafer storage component. In this way, the silicon wafer material can be transferred from the first wafer storage component to the transition wafer storage component in multiple times, and the silicon wafer material transferred from the transition wafer storage component to the second wafer storage component can be subjected to subsequent processes in sequence in multiple times. Therefore, the first wafer picking component and the second wafer picking component can be continuously transferred and circulated, and the transfer efficiency of the silicon wafers is relatively high, thereby improving the production efficiency. Moreover, the capacity and volume of the first wafer storage component and the second wafer storage component can be reduced, thereby improving the turnover efficiency of the silicon wafers while saving the occupied space and improving the overall stability and safety. In addition, after the first sheet picking assembly transfers multiple sheets of material to the transition sheet storage assembly, the material can dissipate heat in the transition sheet storage assembly for a period of time, and the driving mechanism of the transition sheet storage assembly can drive the receiving slot to change the material storage gap, which is conducive to heat dissipation and eliminates thermal stress hazards, thereby ensuring product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of the solar cell material transfer system of the present invention;

[0025] Figure 2 It is a structural schematic diagram of the transitional sheet storage assembly of the present invention;

[0026] Figure 3 It is a schematic cross-sectional structure diagram of the first connecting hole of the transition sheet storage assembly of the present invention;

[0027] Figure 4 It is a schematic cross-sectional structure diagram of the second connecting hole of the transition sheet storage assembly of the present invention;

[0028] Figure 5 It is a schematic cross-sectional structure diagram of the third connecting hole of the transition sheet storage assembly of the present invention;

[0029] Figure 6 It is a structural schematic diagram of the driving plate of the present invention;

[0030] Figure 7 It is a partial structural schematic diagram of the transition storage component of the present invention. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings. It is hereby stated that the directional terms such as up, down, left, right, front, back, inside, outside, etc. that appear or will appear in the text of the present invention are only based on the accompanying drawings of the present invention, and are not specific limitations of the present invention.

[0032] See also Figure 1 and Figure 2 The embodiment of the present invention discloses a solar cell material transfer system for transferring materials, including a first wafer storage component 1 and a first wafer pickup component 2 located at a wafer pickup station, and a second wafer storage component 3 and a second wafer pickup component 4 located at a wafer insertion station. After the materials have been cleaned, dried, and other processes, they are placed in the first wafer storage component 1, and the first wafer pickup component 2 takes the materials out of the first wafer storage component 1. Before the materials enter the coating equipment (such as LPCVD), they need to be placed on the second wafer storage component 3, and the second wafer pickup component 4 places the materials on the second wafer storage component 3.

[0033] In order to ensure that the first wafer storage component 1 is turned over in time, the solar cell material transfer system further includes a transition wafer storage component 5, which is arranged between the first wafer storage component 1 and the second wafer storage component 3. The first wafer taking component 2 is used to transfer multiple materials from the first wafer storage component 1 to the transition wafer storage component 5 for multiple times, and the second wafer taking component 4 is used to transfer multiple materials from the transition wafer storage component 5 to the second wafer storage component 3 for multiple times. The first wafer taking component 2 can transfer multiple materials each time, the transition wafer storage component 5 can store multiple materials, and the second wafer taking component 4 can transfer multiple materials each time.

[0034] After the first sheet taking component 2 transfers multiple sheets of material to the transitional sheet storage component 5 each time, the second sheet taking component 4 takes out multiple sheets of material from the transitional sheet storage component 5, wherein there is a difference in the number of sheets taken out by the first sheet taking component 2 and the second sheet taking component 4, specifically, the number of sheets taken out by the first sheet taking component 2 is greater than the number of sheets taken out by the second sheet taking component 4, so that part of the material can be stored in the transitional sheet storage component 5 for a certain period of time, thereby eliminating the thermal stress generated by the material in the previous process. After taking sheets several times, the second sheet taking component 4 can take out all the materials in the transitional sheet storage component 5 to complete all the sheet taking work.

[0035] In addition, the material can obtain a better heat dissipation effect in the transition storage component 5 to improve the efficiency of eliminating thermal stress. The transition storage component 5 includes a plurality of receiving slots 51 and a driving mechanism 52 that is transmission-connected to the receiving slots 51. A single piece of material can be placed in the storage gap of a single receiving slot 51. The driving mechanism 52 is used to drive the receiving slot 51 to change the width of the storage gap. During the storage of materials, the driving mechanism 52 can drive the receiving slot 51 to change the width of its storage gap, thereby changing the distance between adjacent materials, thereby facilitating the heat dissipation of the material and eliminating thermal stress.

[0036] The beneficial effects of the embodiments of the present invention are as follows:

[0037] The solar cell material transfer system of the embodiment of the present invention is provided with a first wafer storage component 1, a first wafer picking component 2, a transition wafer storage component 5, a second wafer storage component 3 and a second wafer picking component 4. During operation, after the first wafer picking component 2 transfers multiple wafers of material to the transition wafer storage component 5 each time, the second wafer picking component 4 takes out multiple wafers of material from the transition wafer storage component 5. In this way, the silicon wafer material can be transferred from the first wafer storage component 1 to the transition wafer storage component 5 in multiple times, and the silicon wafer material transferred from the transition wafer storage component 5 to the second wafer storage component 3 can be subjected to subsequent processes in sequence in multiple times. Therefore, the first wafer picking component 2 and the second wafer picking component 4 can be continuously transferred and circulated, and the transfer efficiency of the silicon wafers is high, thereby improving the production efficiency. Moreover, the capacity and volume of the first wafer storage component 1 and the second wafer storage component 3 can be reduced, thereby improving the turnover efficiency of the silicon wafers, saving the occupied space, and improving the overall stability and safety. In addition, after the first sheet picking component 2 transfers multiple sheets of material to the transition sheet storage component 5, the material can dissipate heat in the transition sheet storage component 5 for a period of time, and the driving mechanism 52 of the transition sheet storage component 5 can drive the receiving groove 51 to change the material storage gap, which is conducive to heat dissipation and eliminates the hidden danger of thermal stress, thereby ensuring the quality of the product.

[0038] See also Figure 2The receiving groove 51 is surrounded by adjacent isolation sheets 511 , and the material is placed between adjacent isolation sheets 511 . The width of the material storage gap of the receiving groove 51 adjusted by the driving mechanism 52 is actually the spacing between adjacent isolation sheets 511 . The driving mechanism 52 includes a driving member 521 and a driving plate 522, wherein the movable end of the driving member 521 is connected to the driving plate 522, and the driving plate 522 is connected to the isolation plate 511, wherein the isolation plate 511 is movably connected to the driving plate 522, and the isolation plate 511 has a certain movable space on the driving plate 522, and the isolation plate 511 can produce a certain moving distance relative to the driving plate 522, and the driving member 521 can drive the isolation plate 511 to move different distances through the driving plate 522, that is, the moving distances of adjacent isolation plates 511 on the driving plate 522 are not equal, and after the isolation plates 511 move, the spacing between the isolation plates 511 changes, and at the same time, since the movable distances of adjacent isolation plates 511 on the driving plate 522 are different, by controlling the moving distance between each isolation plate 511, the spacings of all adjacent isolation plates 511 can be equalized after the isolation plates 511 move. Therefore, the driving member 521 can drive the isolation plates 511 to change the spacing, and can ensure that the spacings of all the isolation plates 511 after the change are equal.

[0039] In a specific implementation, it is assumed that the accommodating groove 51 includes a plurality of A plates and B plates spaced apart to form a structure of A1-B1-A2-B2... Before changing the spacing, the spacing of AB is equal to the spacing of BA, both of which are W. When the spacing is changed, the driving member 521 drives the driving plate 522 to move, and the driving plate 522 can push the A plate and the B plate to move. However, since there is a certain activity space between the A plate and the B plate on the driving plate 522, the activity space can offset a part of the pushing distance of the driving plate 522. Therefore, the moving distances of A1, B1, A2, B2... are different. By reasonably controlling the activity space of each A plate and B plate, for example, A1 moves a distance of L, B1 moves a distance of L+a, A2 moves a distance of L+2a, and B2 moves a distance of L+3a. After the spacing is changed, the distance of A1-B1 changes from W to W+a, and the distance of B1-A2 is also W+a, and the distance of A2-B2 is also W+a. In this way, the distances of A1-B1 and B1-A2 can be changed at the same time, and at the same time, the distance of A1-B1 is equal to the distance of B1-A2.

[0040] See also Figure 3 and Figure 7The transition storage assembly 5 is provided with a plurality of groups of accommodating units 53, and a plurality of accommodating grooves 51 form the accommodating units 53. The structure and moving action of each group of accommodating units 53 are the same. The isolation sheets 511 at the same sequence in each adjacent group of accommodating units 53 can be connected to each other through a connecting plate 513 to achieve a transmission effect, thereby ensuring that a single driving member 521 can simultaneously drive the isolation sheets 511 at the same sequence in each group of accommodating units 53, ensuring that the spacing of the isolation sheets 511 in all the accommodating units 53 can be adjusted, and the spacing between all adjacent isolation sheets 511 is equal.

[0041] See also Figure 3 In one embodiment, in order to achieve spacing adjustment, each group of accommodating units 53 includes at least a first isolation sheet 531 and a second isolation sheet 532, the width of the material storage gap between the first isolation sheet 531 and the second isolation sheet 532 is a first spacing 534, and the first isolation sheet 531 and the second isolation sheet 532 are both connected to the driving mechanism 52, and the driving mechanism 52 can respectively drive the first isolation sheet 531 and the second isolation sheet 532 to move different distances so that the first spacing 534 changes. In order to enable the first isolation piece 531 and the second isolation piece 532 to move different distances, at least a first connecting hole 5221 and a second connecting hole 5222 are provided on the driving plate 522, and a fastener 523 can pass through the first connecting hole 5221 and the second connecting hole 5222 and be connected to the first isolation piece 531 and the second isolation piece 532 respectively, wherein the fastener 523 can be a screw, a bolt, a locking rod or other components, and the number of the fasteners 523 corresponds to the number of fixed positions of the isolation piece 511, wherein one end of the two fasteners 523 passes through the first connecting hole 5221 and the second connecting hole 5222 respectively, and is connected to the first isolation piece 511 and the second isolation piece 532 respectively. Then, the fastener 523 fixes the first isolation sheet 531 and the second isolation sheet 532, but is not fixed to the first connecting hole 5221 and the second connecting hole 5222, so that the first connecting hole 5221 and the second connecting hole 5222 are movably connected with the first isolation sheet 531 and the second isolation sheet 532 respectively, so that the first isolation sheet 531 and the second isolation sheet 532 can obtain space to move in the first connecting hole 5221 and the second connecting hole 5222 respectively by utilizing the fastener 523, and by setting the first connecting hole 5221 and the second connecting hole 5222 to different sizes, the first isolation sheet 531 and the second isolation sheet 532 can be moved to different distances.

[0042] In one embodiment, in addition to the first isolation sheet 531 and the second isolation sheet 532, each group of the accommodating units 53 also includes a third isolation sheet 533, the first isolation sheet 531, the second isolation sheet 532 and the third isolation sheet 533 are arranged in sequence, the width of the storage gap between the second isolation sheet 532 and the third isolation sheet 533 is a second spacing 535, the third isolation sheet 533 is connected to the driving mechanism 52, and the driving mechanism 52 can respectively drive the first isolation sheet 531, the second isolation sheet 532 and the third isolation sheet 533 to move different distances, and reasonably set The moving distances of the first isolation sheet 531, the second isolation sheet 532 and the third isolation sheet 533 can cause the first spacing 534 and the second spacing 535 to change simultaneously. In one embodiment, the first spacing 534 and the second spacing 535 can be changed simultaneously and made equal to the second spacing 535. In other embodiments, according to actual needs, different moving distances can be set to cause the first spacing 534 and the second spacing 535 to change simultaneously and make them unequal.

[0043] See also Figure 3-Figure 5, wherein the driving plate 522 is provided with at least a first connecting hole 5221, a second connecting hole 5222 and a third connecting hole 5223, and the fastener 523 can pass through the first connecting hole 5221, the second connecting hole 5222 and the third connecting hole 5223 to be connected to the first isolation sheet 531, the second isolation sheet 532 and the third isolation sheet 533 respectively, and the number of the fasteners 523 corresponds to the number of fixed positions of the isolation sheet 511, wherein one end of the three fasteners 523 passes through the first connecting hole 5221, the second connecting hole 5222 and the third connecting hole 5223 respectively, and is connected to the first isolation sheet 531, the second isolation sheet 532 and the third isolation sheet 533 respectively, and the fastener 523 fixes the first isolation sheet 531, the second isolation sheet 532 and the third isolation sheet 533 without being connected to the fastener 523. The first connecting hole 5221, the second connecting hole 5222 and the third connecting hole 5223 are fixed, so that the first isolation plate 531, the second isolation plate 532 and the third isolation plate 533 are respectively connected with the first connecting hole 5221, the second connecting hole 5222 and the third connecting hole 5223, and the first isolation plate 531, the second isolation plate 532 and the third isolation plate 533 can move in the first connecting hole 5221, the second connecting hole 5222 and the third connecting hole 5223 respectively. By setting the first connecting hole 5221, the second connecting hole 5222 and the third connecting hole 5223 to different sizes, the driving member 521 can drive the first isolation plate 531, the second isolation plate 532 and the third isolation plate 533 to move different distances through the driving plate 522.

[0044] Specifically, when the first isolation sheet 531, the second isolation sheet 532 and the third isolation sheet 533 move, the fastener 523 can slide in the first connecting hole 5221, the second connecting hole 5222 and the third connecting hole 5223 respectively along the moving direction of the isolation sheet 511, wherein the sliding distance of the fastener 523 in the first connecting hole 5221 is smaller than the sliding distance of the fastener 523 in the second connecting hole 5222, and the sliding distance of the fastener 523 in the second connecting hole 5222 is smaller than the sliding distance of the fastener 523 in the third connecting hole 5223. Specifically, the sliding distance of the fastener 523 in the first connecting hole 5221 can be set to L, and the sliding distance of the fastener 523 in the second connecting hole 5222 is L+a, and the sliding distance of the fastener 523 in the third connecting hole 5223 is L+2a, so that the first spacing 534 and the second spacing 535 are both increased by a, and the increase is equal, so that the spacing can be adjusted and the spacing between all adjacent isolation plates 511 can be ensured to be equal.

[0045] The first connection hole 5221, the second connection hole 5222 and the third connection hole 5223 all include a first limiting portion 5224, a transition portion 5225 and a second limiting portion 5226 that are sequentially distributed along the moving direction of the isolation sheet 511. The first limiting portion 5224, the transition portion 5225 and the second limiting portion 5226 are interconnected, and the fastener 523 can slide in the first limiting portion 5224, the transition portion 5225 and the second limiting portion 5226. In the embodiment of the present invention, the first limiting portion 5224 and the second limiting portion 5226 The cross-section is semicircular, and the transition portion 5225 is a point type or a straight line type connected between the first limiting portion 5224 and the second limiting portion 5226. When the transition portion 5225 is a point type, that is, when the length of the transition portion 5225 is 0, the first limiting portion 5224, the transition portion 5225 and the second limiting portion 5226 form a circular hole shape, and when the transition portion 5225 is a straight line type, that is, when the length of the transition portion 5225 is greater than 0, the first limiting portion 5224, the transition portion 5225 and the second limiting portion 5226 form a waisted hole shape.

[0046] In the embodiment of the present invention, by setting different lengths of the transition portion 5225, that is, setting the length of the transition portion 5225 of the first connecting hole 5221 to be smaller than the length of the transition portion 5225 of the second connecting hole 5222, setting the length of the transition portion 5225 of the second connecting hole 5222 to be smaller than the length of the transition portion 5225 of the third connecting hole 5223, and making the difference between the length of the transition portion 5225 of the second connecting hole 5222 and the length of the transition portion 5225 of the first connecting hole 5221 equal to the difference between the length of the transition portion 5225 of the third connecting hole 5223 and the length of the transition portion 5225 of the second connecting hole 5222, it is possible to achieve different distances for different isolation plates 511 to move.

[0047] Specifically, see Figure 3-Figure 6In one embodiment, the length of the transition portion 5225 of the first connecting hole 5221 is 0, which is a round hole. The first isolation piece 531 is movably connected to the first connecting hole 5221 through the fastener 523. Since the length of the transition portion 5225 of the first connecting hole 5221 is 0, the first isolation piece 531 has no moving space in the driving plate 522 (considering that the actual round hole may leave some matching gaps, the first isolation piece 531 may actually have a certain moving distance, which is equal to the matching gap). Therefore, when the driving plate 522 moves a distance of L+2a, the first isolation sheet 531 will directly follow the movement, and the distance it moves is equal to the moving distance of the driving plate 522, which is L+2a; and the length of the transition portion 5225 of the second connecting hole 5222 is a, which is a waisted hole, and the second isolation sheet 532 is movably connected to the second connecting hole 5222 through the fastener 523. 5 is a, and the moving space of the second isolation piece 532 in the driving plate 522 is a. Therefore, when the driving plate 522 moves a distance of L+2a, the second isolation piece 532 will first move a distance from one end of the second connecting hole 5222 to the other end, and then follow the movement of the driving plate 522. Therefore, the moving distance of the second isolation piece 532 is equal to L+2a-a=L+a; the length of the transition portion 5225 of the third connecting hole 5223 is set to 2a, which is a waisted hole, and the third isolation piece 533 passes through The fastener 523 forms a movable connection with the third connecting hole 5223. Since the length of the transition portion 5225 of the third connecting hole 5223 is 2a, the moving space of the third isolation plate 533 in the driving plate 522 is 2a. Therefore, when the driving plate 522 moves a distance of L+2a, the third isolation plate 533 will first move a distance of 2a from one end of the third connecting hole 5223 to the other end, and then follow the driving plate 522 to move, so the moving distance of the third isolation plate 533 is equal to L+2a-2a=L. At this point, the difference a between the length of the transition portion 5225 of the second connecting hole 5222 and the length of the transition portion 5225 of the first connecting hole 5221 is equal to the difference a between the length of the transition portion 5225 of the third connecting hole 5223 and the length of the transition portion 5225 of the second connecting hole 5222, the first isolation plate 531 moves a distance L+2a, the second isolation plate 532 moves a distance L+a, and the third isolation plate 533 moves a distance L, thereby increasing the first spacing 534 by a and the second spacing 535 by a, thereby achieving both changing the spacing and ensuring the consistency of the spacing.

[0048] See also Figure 6In other embodiments, the accommodating unit 53 may further include a fourth isolation plate 511, a fifth isolation plate 511... A fourth connecting hole, a fifth connecting hole are provided in the driving plate 522... The moving distance between the multiple isolation plates 511 and the connecting holes and the setting length of the transition portion 5225 are the same as the principles of the above embodiments and will not be repeated here.

[0049] See also Figure 7 In an embodiment of the present invention, the accommodating groove 51 also includes a connecting block 512 and a connecting plate 513. The connecting block 512 is fixedly connected to the isolation sheet 511. The connecting plate 513 is connected between adjacent connecting blocks 512. The connecting block 512 is used to connect the isolation sheets 511 at the same sequence of adjacent accommodating units 53. For example, the first isolation sheets 531 of all accommodating units 53 are connected in series by the connecting block 512, and the second isolation sheets 532 of all accommodating units 53 are connected in series by the connecting block 512... wherein the driving mechanism 52 also includes a guide rod 524, and the guide rod 524 passes through the connecting block 512 to limit the moving direction of the isolation sheet 511. The isolation sheets 511 at the same sequence of different accommodating units 53 are connected by the same guide rod 524. With the serial action of the connecting block 512, the isolation sheets 511 at the same sequence of all accommodating units 53 can be moved simultaneously and move the same distance.

[0050] See also Figure 1 , exemplarily, the first film taking component 2 includes a first mechanical arm 21 and a first film taking mechanism 22, the first film taking mechanism 22 is connected to one end of the first mechanical arm 21, the first mechanical arm 21 is used to move the first film taking mechanism 22 to a preset position, the first film taking mechanism 22 clamps or absorbs the material, the first film taking mechanism 22 is provided with a plurality of first film taking positions (not shown in the drawings), and the first film taking mechanism 22 can accommodate a piece of material. In the embodiment of the present invention, a single first film taking position can accommodate a single piece of material. The second film taking component 4 includes a second mechanical arm 41 and a second film taking mechanism 42, the second film taking mechanism 42 is connected to one end of the second mechanical arm 41, the second mechanical arm 41 is used to move the second film taking mechanism 42 to a preset position, the second film taking mechanism 42 clamps or absorbs the material, the second film taking mechanism 42 is provided with a plurality of second film taking positions (not shown in the drawings), and the second film taking mechanism 42 can accommodate b pieces of material.

[0051] The transitional sheet storage component 5 can accommodate c sheets of material, and a single receiving slot 51 can accommodate a single sheet of material. When the number of remaining receiving slots 51 in the transitional sheet storage component 5 is greater than or equal to a sheets, the first sheet taking component 2 takes sheets from the first sheet storage component 1 to ensure that the first sheet taking component 2 can be turned over in time, and the materials in the first sheet storage component 1 are emptied as soon as possible so that the first sheet storage component 1 can also be turned over as soon as possible. When the number of materials contained in the transitional sheet storage component 5 is greater than or equal to b sheets, the second sheet taking component 4 takes sheets from the transitional sheet storage component 5 to leave space for the transitional sheet storage component 5 to accommodate subsequent materials. Considering that the material needs to dissipate heat in the transitional storage component 5 for a period of time, the second sheet-taking component 4 cannot take out all the materials in the transitional storage component 5 at one time. Therefore, in one operation, the number a of sheets taken by the first sheet-taking component 2 and put into the transitional storage component 5 at one time needs to be greater than the number b of sheets taken out by the second sheet-taking component 4 at one time. In this way, after one operation, ab sheets of material will remain in the transitional storage component 5, and these materials will dissipate heat in the transitional storage component 5 to eliminate thermal stress. After multiple operations, the accumulated remaining material n(ab) in the transitional storage component 5 is just enough for the second sheet-taking component 4 to take out one or more sheets. Finally, the second sheet-taking component 4 takes out all the materials in the transitional storage component 5 by taking out one or more sheets, thus completing a cycle.

[0052] When using the traditional transfer system to transfer materials from the flower basket to the quartz boat, the transfer system needs to transfer all the materials in the flower basket to the quartz boat. Due to the large amount of materials, the transfer system needs to run slowly, and needs to wait for the processing of a batch of materials on the quartz boat to be completed and the furnace tube to be emptied before the transfer can be carried out. During this period, the transfer system and the flower basket system need to wait for 18s-38s to turn around, which not only causes a waste of production capacity, but also prolongs the production cycle. After using the solution of the present invention, by setting the transitional film storage component 5, the first film taking component 2 and the second film taking component 4 can work simultaneously on both sides of the transitional film storage component 5, and the physical storage space that needs to wait is provided, thereby greatly reducing the turnover time of the first film taking component 2. Now the first film taking component 2 can be turned around once within 5s-15s, improving the overall turnover efficiency and production efficiency.

[0053] In addition, the method of transferring silicon wafers at one time requires the basket transfer system and the quartz boat to have a large storage space, which not only increases the volume of the basket transfer system and the quartz boat, but also weakens the overall stability and safety, and increases the risk of silicon wafers being damaged in the container. By using the transitional wafer storage component 5 and the first wafer removal component 2 that speeds up the turnover, the amount of materials carried at a single time can be appropriately reduced, while improving efficiency, ensuring that the volume of the first wafer storage component 1, the transitional wafer storage component 5 and the second wafer storage component 3 is not too large, which can save space and ensure system stability and safety.

[0054] In the first embodiment, if the silicon wafer material retains a relatively high temperature after the previous process, it takes a long time to dissipate heat to completely eliminate thermal stress. Under this consideration, 2b≤a can be set. In this embodiment, the amount of material placed in the transitional storage component 5 by the first wafer taking component 2 at one time is not less than twice the amount of wafers taken from the transitional storage component 5 by the second wafer taking component 4 at one time, which means that the second wafer taking component 4 needs to take more than two wafers to take out all the materials placed in the transitional storage component 5 by the first wafer taking component 2 at one time. By setting it in this way, the material placed in the transitional storage component 5 by the first wafer taking component 2 can wait for a slightly longer period of time before being taken out by the second wafer taking component 4, which helps the material to dissipate the residual heat to eliminate thermal stress. At the same time, in order to improve the efficiency of the first wafer taking turnover, after the second wafer taking component 4 takes the wafer, the first wafer taking component 2 immediately puts the wafers to the transitional storage component 5 to replenish them, so that the amount of material contained in the transitional storage component 5 needs to be close to 2a, so that the first wafer taking component 2 can immediately put the wafers for the second time after the second wafer taking component 4 takes the wafers.

[0055] In the second embodiment, 2a≤c or 2b≤c is set. When 2a≤c, that is, the capacity of the transitional sheet storage component 5 is not less than the total number of sheets taken by the first sheet taking component 2 twice, after the first sheet taking component 2 is loaded with materials for two times, the second sheet taking component 4 takes sheets again, and there are more materials remaining in the transitional sheet storage component 5. It takes more time to take all of them out, which can obtain more time for heat dissipation and better eliminate thermal stress. However, at the same time, if the capacity of the transitional sheet storage component 5 is set too much, the second sheet taking component 4 needs to take out the remaining materials in the transitional sheet storage component 5 in multiple times, which will reduce the turnover times of the first sheet taking component 2 to a certain extent, thereby reducing the turnover efficiency. In consideration of the need to improve the turnover efficiency of the first sheet picking component 2, 2b≤c can be set, that is, the capacity of the transition sheet storage component 5 is not less than the total number of sheets taken twice by the second sheet picking component 4. Since a>b, the transition sheet storage component 5 can be set with a smaller capacity as a whole, and it can be ensured that in the final stage of the cycle, the second sheet picking component 4 needs to take at least 2 sheets to take out all the materials in the transition sheet storage component 5.

[0056] In the third embodiment, n*b≤c≤m*a is set, where n and m are positive integers greater than 1. n and m may be equal or unequal. In this embodiment, the transitional sheet storage component 5 can accommodate the material stored m-1 times by the first sheet taking component 2. The first sheet taking component 2 can first put the material into the transitional sheet storage component 5 m-1 times, and then let the second sheet taking component 4 take the material out of the transitional sheet storage component 5. In this way, the material has a longer time to dissipate heat in the transitional sheet storage component 5, and in the final stage of the cycle, the second sheet taking component 4 needs at least n times to take out all the remaining materials in the transitional sheet storage component 5. However, in actual use, if the material does not require too long a cooling time in the transitional sheet storage component 5, and the turnover efficiency of the first sheet taking component 2 and the second sheet taking component 4 needs to be improved, under this consideration, 2b≤c≤2a can be set, so that the capacity of the transitional sheet storage component 5 is sufficient to accommodate the amount of material taken by the first sheet taking component 2 at one time, and then the second sheet taking component 4 immediately takes the material in the transitional sheet storage component 5, and ab sheets remain in the transitional sheet storage component 5. After several turnovers, k (ab) sheets of material remain in the transitional sheet storage component 5. In this way, the second sheet taking component 4 can take out the remaining k (ab) sheets of material through 2-3 times of taking in the final stage of the cycle, thereby shortening the time that the material stays in the transitional sheet storage component 5 and improving the turnover efficiency of the first sheet taking component 2 and the second sheet taking component 4.

[0057] In the fourth embodiment, if the thermal stress of the material has been completely eliminated in the previous process, and the volume of the first sheet taking component 2 and the transitional sheet storage component 5 is mainly considered when taking the sheet, then a+(ab)≤c can be set, where 2a>b. Within this range, the number of the accommodating slots 51 of the transitional sheet storage component 5 only needs to meet the following requirements: after the second sheet taking component 4 takes away a part of the material that the first sheet taking component 2 puts into the transitional sheet storage component 5 for the first time (at this time, ab sheets are left in the transitional sheet storage component 5), the first sheet taking component 2 can take another material and put it into the transitional sheet storage component 5 (i.e., a sheet is added after ab sheets are left). In this way, the capacity of the transitional sheet storage component 5 is set as small as possible, which can meet the needs of continuous turnover of the first sheet taking component 2.

[0058] Among them, in a preferred embodiment, a+bd≤c is set, where d is the common divisor between the number of sheets a taken by the first sheet-taking component 2 and the number of sheets b taken by the second sheet-taking component 4. By constraining the number of the containing slots 51 in the transitional sheet storage component 5 to this range, the minimum value a+bd of the number of the containing slots 51 in the transitional sheet storage component 5 can be obtained, which can not only minimize the volume of the transitional sheet storage component 5, but also meet the requirements of the continuous turnover of the first sheet-taking component 2. Assuming that the number of sheets taken by the first sheet-taking component 2 is a=80, and the number of sheets taken by the second sheet-taking component 4 is b=60, and the common divisor of the two is d=20, then the minimum value a+bd of the number of the containing slots 51 in the transitional sheet storage component 5 is 120. In this way, for the first time, the first sheet-taking component 2 puts in 80 sheets of material, the second sheet-taking component 4 takes out 60 sheets of material, and 20 sheets of material remain in the transitional sheet storage component 5. For the second time, the first sheet taking component 2 puts in 80 sheets of material, the second sheet taking component 4 takes out 60 sheets of material, and 40 sheets of material remain in the transitional sheet storage component 5. For the third time, the first sheet taking component 2 puts in 80 sheets of material, the second sheet taking component 4 takes out 60 sheets of material, and 60 sheets of material remain in the transitional sheet storage component 5. It can be noted that in the third time, the 80 sheets of material put in by the first sheet taking component 2 plus the 40 sheets of material remaining before are exactly equal to the capacity of the transitional sheet storage component 5, which is 120 sheets, and the 60 sheets of material remaining in the third time can be taken out in the fourth time to complete a cycle. In this process, the first sheet taking component 2 and the second sheet taking component 4 can be circulated all the time, and the capacity of the transitional sheet storage component 5 can just meet the number of remaining materials at the maximum during the cycle.

[0059] The present invention also discloses a coating device (not shown in the drawings), comprising the solar cell material transfer system as described above. In the coating device, the solar cell material transfer system is provided with a first wafer storage component 1, a first wafer picking component 2, a transition wafer storage component 5, a second wafer storage component 3 and a second wafer picking component 4. When in operation, the silicon wafer material can be transferred from the first wafer storage component 1 to the transition wafer storage component 5 in multiple times, and the silicon wafer material transferred from the transition wafer storage component 5 to the second wafer storage component 3 can be sequentially subjected to subsequent processes in multiple times, so the first wafer picking component 2 and the second wafer picking component 4 can be continuously transferred and circulated, the transfer efficiency of the silicon wafer is high, and the production efficiency is improved, and the capacity and volume of the first wafer storage component 1 and the second wafer storage component 3 can be reduced, while improving the turnover efficiency of the silicon wafer, saving the occupied space and improving the overall stability and safety.

[0060] The above are preferred embodiments of the present invention. It should be noted that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A solar cell material transfer system, used for transferring materials, characterized in that: It comprises a first sheet storage component and a first sheet taking component located at a sheet taking station, and a second sheet storage component and a second sheet taking component located at a sheet inserting station; It also includes a transitional sheet storage assembly, which is arranged between the first sheet storage assembly and the second sheet storage assembly, the first sheet taking assembly is used to transfer multiple sheets of material from the first sheet storage assembly to the transitional sheet storage assembly multiple times, and the second sheet taking assembly is used to transfer multiple sheets of material from the transitional sheet storage assembly to the second sheet storage assembly multiple times; The transition sheet storage assembly includes a plurality of receiving slots and a driving mechanism connected to the receiving slots in a transmission manner. A single sheet of material can be placed in a storage gap of a single receiving slot. The driving mechanism is used to drive the receiving slot to change the width of the storage gap. After the first sheet taking component transfers multiple sheets of material to the transition sheet storage component each time, the second sheet taking component takes out multiple sheets of material from the transition sheet storage component; after several times of taking sheets, the second sheet taking component can take out all the materials in the transition sheet storage component.

2. The solar cell material transfer system according to claim 1, characterized in that: The transition storage sheet assembly is provided with a plurality of groups of accommodating units, each group of accommodating units includes at least a first isolation sheet and a second isolation sheet, the width of the storage gap between the first isolation sheet and the second isolation sheet is a first spacing, the driving mechanism includes a driving member, the first isolation sheet and the second isolation sheet are both connected to the driving member, and the driving member can respectively drive the first isolation sheet and the second isolation sheet to move different distances so that the first spacing changes.

3. The solar cell material transfer system according to claim 2, characterized in that: Each group of the accommodating units also includes a third isolation sheet, the width of the material storage gap between the second isolation sheet and the third isolation sheet is a second spacing, the third isolation sheet is connected to the driving plate, and the driving mechanism can respectively drive the first isolation sheet, the second isolation sheet and the third isolation sheet to move different distances, so that the first spacing and the second spacing change at the same time.

4. The solar cell material transfer system according to claim 3, characterized in that: The driving mechanism also includes a driving plate, and the movable end of the driving member is connected to the driving plate. At least a first connecting hole, a second connecting hole and a third connecting hole are provided on the driving plate. The fastener can pass through the first connecting hole, the second connecting hole and the third connecting hole and be respectively connected to the first isolation plate, the second isolation plate and the third isolation plate. The driving member can drive the first isolation plate, the second isolation plate and the third isolation plate to move respectively through the driving plate.

5. The solar cell material transfer system according to claim 4, characterized in that: The first connecting hole, the second connecting hole and the third connecting hole all include a first limiting portion, a transition portion and a second limiting portion which are sequentially distributed along the moving direction of the isolation plate, the first limiting portion, the transition portion and the second limiting portion are interconnected, the fastener can slide between the first limiting portion, the transition portion and the second limiting portion, the length of the transition portion of the first connecting hole is smaller than the length of the transition portion of the second connecting hole, and the length of the transition portion of the second connecting hole is smaller than the length of the transition portion of the third connecting hole.

6. The solar cell material transfer system according to claim 5, characterized in that: The difference between the length of the transition portion of the second connecting hole and the length of the transition portion of the first connecting hole is equal to the difference between the length of the transition portion of the third connecting hole and the length of the transition portion of the second connecting hole.

7. The solar cell material transfer system according to claim 1, characterized in that: The first film picking assembly includes a first mechanical arm and a first film picking mechanism, the first film picking mechanism is connected to one end of the first mechanical arm, a plurality of first film picking positions are arranged in the first film picking mechanism, and the first film picking mechanism can accommodate a piece of material.

8. The solar cell material transfer system according to claim 7, characterized in that: The second film picking assembly includes a second mechanical arm and a second film picking mechanism, the second film picking mechanism is connected to one end of the second mechanical arm, a plurality of second film picking positions are arranged in the second film picking mechanism, and the second film picking mechanism can accommodate b pieces of material.

9. The solar cell material transfer system according to claim 8, characterized in that: The transition sheet storage assembly can accommodate c sheets of material; When the number of remaining holding slots in the transitional sheet storage assembly is greater than or equal to a sheets, the first sheet taking assembly takes sheets from the first sheet storage assembly; when the number of materials contained in the transitional sheet storage assembly is greater than or equal to b sheets, the second sheet taking assembly takes sheets from the transitional sheet storage assembly.

10. The solar cell material transfer system according to claim 8, characterized in that: 2b≤a.

11. The solar cell material transfer system according to claim 9, characterized in that: 2a≤c or 2b≤c.

12. The solar cell material transfer system according to claim 9, characterized in that: n*b≤c≤m*a, where n and m are positive integers greater than 1.

13. The solar cell material transfer system according to claim 9, characterized in that: a+(ab)≤c, where 2a>b.

14. A coating device, characterized in that: It comprises the solar cell material transfer system as described in any one of claims 1-13.

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