Coating device and coating method thereof

Abstract

The present invention discloses a coating device and a coating method thereof. The coating device includes: a circulating track, multiple coating platforms, multiple coating components, multiple drying components, a loading component and a unloading component. The coating platform is used to place a substrate, the coating component includes a bracket and a coating head, the coating head is used to coat the substrate, the drying component is used to dry the coating liquid, and the loading component and the unloading component are used for loading and unloading. Among them, the circulating track includes multiple forward tracks and at least one return track, and the first end and the second end of the forward track are respectively connected to the return track to form a closed loop for the circulating track. The coating device of the present application coats and dries multiple substrates at the same time, and does not need to transport the coated substrates. It not only shortens the production cycle of solar cells, but also can dry the liquid film on the substrate in time, thereby improving the quality and yield of solar cells.

Description

Technical Field

[0001] The present invention relates to the technical field of coating equipment, and in particular to a coating equipment and a coating method thereof. Background Art

[0002] With the rapid development of solar cells, solar cells have been widely used in power generation, transportation, communication, agriculture and other fields, so the demand for solar cells has also grown rapidly.

[0003] In the prior art, the coating equipment and the vacuum drying equipment are separate, that is, the coating liquid is first coated on the substrate by the coating equipment, and then the coated substrate is transported to the vacuum drying equipment by the transfer device. In the process of transferring the coated substrate to the vacuum drying equipment, not only is it easy to damage the coating liquid film, resulting in uneven distribution of the coating liquid on the substrate, but even thinner substrates may be damaged, resulting in a decrease in the quality and yield of solar cells, and the transfer process takes time, which prolongs the production cycle of solar cells, thereby reducing the production efficiency of solar cells and failing to meet the high-throughput preparation requirements of solar cells. If the production capacity of solar cells is to be increased, the number of coating equipment and vacuum drying equipment needs to be increased, which leads to an increase in the cost and occupied space of the coating equipment and vacuum drying equipment, thereby also leading to an increase in the cost of solar cells. At the same time, it is also necessary to add a transfer device, which further increases the equipment cost and occupied space, thereby increasing the production cost of solar cells.

[0004] Therefore, how to improve the quality and production efficiency of solar cells is a difficult problem that needs to be solved urgently. Summary of the invention

[0005] The object of the present invention is to provide a coating device and a coating method thereof, wherein a plurality of coating components can coat a plurality of substrates at the same time, and a plurality of drying components can dry a plurality of substrates at the same time, and the coated substrates do not need to be transported, which not only shortens the production cycle of solar cells and improves the production capacity of solar cells, but also ensures that the coating liquid on the substrate is evenly distributed and can dry the liquid film on the substrate in time, thereby improving the quality and yield of solar cells, and reducing the number of coating devices, reducing the cost and occupied space of the coating devices, thereby reducing the production cost of solar cells, and also does not need to add additional transport devices, reducing equipment costs and occupied space, thereby further reducing the production cost of solar cells.

[0006] The purpose of the present invention is achieved by the following technical solutions:

[0007] A coating device, comprising:

[0008] Loop track;

[0009] A plurality of coating platforms, each of which is used to place a substrate, and each of which is arranged on the circulating track;

[0010] A plurality of coating components, wherein the coating components include a bracket and a coating head disposed on the bracket, the coating head is disposed above the circulating track, the coating platform drives the substrate to move relative to the coating head along a coating direction, and the coating head is used to coat the substrate;

[0011] A plurality of drying components, wherein the drying components are used to dry the coating liquid coated on the substrate by the coating head;

[0012] A loading assembly and a unloading assembly, wherein the loading assembly is used to transfer the substrate to be coated onto the coating platform, and the unloading assembly is used to transfer the coated substrate from the coating platform;

[0013] Wherein, the circulating track includes multiple forward tracks and at least one return track, the forward track has a first end and a second end opposite to each other, the first end and the second end of the forward track are respectively connected to the return track so that the circulating track forms a closed loop, the coating platform can move from the first end of the forward track to the second end of the forward track through the forward track, and the coating platform can move from the second end of the forward track to the first end of the forward track through the return track.

[0014] Preferably, a return track is arranged between adjacent forward tracks; or a return track is arranged between every two forward tracks.

[0015] Preferably, each of the forward tracks is provided with at least one coating component and at least one drying component;

[0016] When a plurality of drying components are arranged corresponding to one forward track, the plurality of drying components are arranged in series and / or in parallel.

[0017] Preferably, the circulating track also includes a tray, which is arranged on a side of the circulating track facing the coating head, and the drying component includes a cavity and a vacuum pump connected to the cavity through a pipeline, and the cavity is arranged above the tray, and the cavity has an opening on a side facing the tray, and the side of the cavity where the opening is arranged can be pressed onto the pallet to form a closed space, so that the coating platform and the substrate are located in the closed space.

[0018] Preferably, the tray has a flat plate portion and an edge portion, wherein the edge portion is disposed on both sides of the flat plate portion and protrudes from the flat plate portion.

[0019] Preferably, the circulating track is composed of a plurality of magnetic levitation stators, a plurality of magnetic levitation movers are arranged on the circulating track, the coating platform is arranged on the magnetic levitation movers, the magnetic levitation stators are used to drive the magnetic levitation movers to perform one or more of translation, lifting, rotation or pitch and yaw, and the magnetic levitation movers can drive the coating platform to circulate on the circulating track.

[0020] Preferably, the coating assembly further comprises a measuring module, which is used to measure the surface height of the substrate to be coated on the coating platform, and the magnetic levitation stator can drive the magnetic levitation mover to perform lifting and / or pitching according to the measurement data of the measuring module.

[0021] Preferably, when the coating head is coating the substrate on the current coating platform, the substrate on the current coating platform is arranged close to the substrate to be coated on the adjacent coating platform.

[0022] Preferably, the loading assembly comprises a first support seat, a first manipulator, a first pick-and-place portion and a first image acquisition device, one end of the first manipulator is arranged on the first support seat, the other end of the first manipulator is provided with the first pick-and-place portion and the first image acquisition device, and the first manipulator is used to drive the first pick-and-place portion and the first image acquisition device to move;

[0023] The blanking assembly includes a second support seat, a second manipulator, a second pick-and-place portion, and a second image acquisition device. One end of the second manipulator is arranged on the second support seat, and the other end of the second manipulator is provided with the second pick-and-place portion and the second image acquisition device. The second manipulator is used to drive the second pick-and-place portion and the second image acquisition device to move.

[0024] A coating method, using any one of the coating devices described above, the coating method comprising:

[0025] The loading assembly transfers the substrate to be coated to the coating platform;

[0026] The substrate to be coated moves with the coating platform to below the coating head, and the coating head coats the substrate to be coated;

[0027] The drying component dries the coated substrate;

[0028] The unloading component transfers the dried substrate from the coating platform;

[0029] The coating platform moves from the second end of the forward track to the first end of the forward track through the return track.

[0030] Compared with the prior art, the beneficial effects of the present invention include at least:

[0031] The coating device and coating method of the present invention integrate multiple coating components and multiple drying components into the same device, so that the multiple coating components can coat multiple substrates at the same time, and the multiple drying components can dry multiple substrates at the same time, and there is no need to transport the coated substrates. This not only shortens the production cycle of solar cells, but also greatly improves the production efficiency of solar cells, improves the production capacity of solar cells, and meets the high-throughput preparation requirements of solar cells, but also avoids the shaking of the coating liquid on the substrate during transportation, ensures that the coating liquid on the substrate is evenly distributed, and can timely dry the liquid film on the substrate, thereby improving the quality and yield of the solar cell, and reduces the number of coating devices, reduces the cost and occupied space of the coating devices, thereby reducing the production cost of the solar cell, and does not need to add an additional transport device, reducing the equipment cost and occupied space, thereby further reducing the production cost of the solar cell. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the three-dimensional structure from one viewing angle of a coating device according to an embodiment of the present invention.

[0033] Figure 2 It is a schematic diagram of the three-dimensional structure of a coating device according to an embodiment of the present invention from another perspective.

[0034] Figure 3 It is a schematic diagram of an exploded view of a coating device according to an embodiment of the present invention.

[0035] Figure 4 It is a schematic diagram of the planar structure of a coating device according to an embodiment of the present invention.

[0036] Figure 5 It is a schematic diagram of the three-dimensional structure from one viewing angle of another coating device according to an embodiment of the present invention.

[0037] Figure 6 Detailed description of the invention The invention relates to a coating method according to an embodiment of the invention.

[0038] In the figure: 100, coating equipment; 1, circulation track; 11, forward track; 111, first end; 112, second end; 12, return track; 13, tray; 131, flat plate; 132, edge; 14, magnetic levitation stator; 15, magnetic levitation mover; 16, base; 2, coating platform; 3, coating component; 31, bracket; 311, beam; 312, first column; 313, second column; 32, coating head; 33, measuring module; 4, drying component; 41, cavity; 42, pipeline; 43, first drying component; 44, second drying component; 5, loading component; 51, first support seat; 52, first manipulator; 53, first pick-up and place part; 54, first image acquisition device; 6, unloading component; 61, second support seat; 62, second manipulator; 63, second pick-up and place part; 64, second image acquisition device; 200, substrate. DETAILED DESCRIPTION

[0039] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.

[0040] The words expressing positions and directions described in the present invention are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of the present invention.

[0041] refer to Figures 1 to 5 The present invention provides a coating device 100, comprising: a circulating track 1, a plurality of coating platforms 2, a plurality of coating components 3, a plurality of drying components 4, a loading component 5 and a unloading component 6. The coating platform 2 can circulate on the circulating track 1, the coating head 32 of the coating component 3 can be arranged above the circulating track 1, the drying component 4 can be arranged between the coating component 3 and the unloading component 6, and the loading component 5 and the unloading component 6 can be arranged near the two ends of the circulating track 1 respectively.

[0042] Specifically, refer to Figure 1 , Figure 2 , Figure 5, the coating platform 2 is used to place the substrate, the coating platform 2 can be set on the circulating track 1, the coating platform 2 can circulate on the circulating track 1, and the coating platform 2 can drive the substrate 200 to move together. Each coating platform 2 can place one or more substrates. In the present embodiment, each coating platform 2 places one substrate. Each coating platform 2 can be operated independently, that is, multiple coating platforms 2 will not interfere with each other. The substrate 200 can be a crystalline silicon substrate 200, a glass substrate 200, etc. For example, when the substrate 200 adopts a crystalline silicon substrate 200, a crystalline silicon solar cell is formed by coating a perovskite solution on the crystalline silicon substrate 200.

[0043] The loading component 5 is used to transfer the substrate 200 to be coated to the coating platform 2, the coating component 3 is used to apply the coating liquid to the substrate 200, the drying component 4 can be arranged after the coating component 3, the drying component 4 is used to dry the coating liquid applied on the substrate 200 by the coating head 32 so that the coating liquid forms a dry film, and the unloading component 6 is used to transfer the coated substrate 200 from the coating platform 2.

[0044] The coating assembly 3 may include a bracket 31 and a coating head 32 disposed on the bracket 31. The coating head 32 may be disposed above the circulating track 1. The coating platform 2 may drive the substrate 200 to move relative to the coating head 32 along the coating direction. The coating head 32 is used to coat the substrate 200, that is, the coating head 32 coats the coating liquid on the substrate 200 and forms a liquid film. In this embodiment, the bracket 31 of the coating assembly 3 is, for example, a gantry bracket 31. In the coating direction, the position of the bracket 31 is preferably fixed, that is, the coating platform 2 drives the substrate to move from below the coating head 32, and the coating head 32 coats the substrate.

[0045] refer to Figure 1 , Figure 5The loading assembly 5 may include a first support seat 51, a first manipulator 52, a first pick-and-place portion 53 and a first image acquisition device 54. One end of the first manipulator 52 may be arranged on the first support seat 51, and the other end of the first manipulator 52 may be provided with the first pick-and-place portion 53 and the first image acquisition device 54. The first manipulator 52 is used to drive the first pick-and-place portion 53 and the first image acquisition device 54 to move. The first image acquisition device 54 is used to obtain the position of the substrate 200 to be grasped. The first pick-and-place portion 53 is used to pick and place the substrate 200. The first pick-and-place portion 53 preferably adopts a non-contact suction cup to avoid the substrate 200 from being contaminated and damaged during the process of picking and placing. The first image acquisition device 54 can obtain the accurate position of the substrate 200, so that the first manipulator 52 can more accurately control the first pick-and-place portion 53 to obtain the substrate 200, prevent the substrate 200 from being crushed, and can also more accurately place the substrate 200 on the coating platform 2 according to the position of the substrate 200 when it is obtained. The first image acquisition device 54 can also obtain image information of the coating platform 2 so as to place the substrate 200 on the coating platform 2 more accurately.

[0046] refer to Figure 1 , Figure 5 The unloading assembly 6 may include a second support seat 61, a second manipulator 62, a second pick-and-place portion 63 and a second image acquisition device 64. One end of the second manipulator 62 may be disposed on the second support seat 61, and the other end of the second manipulator 62 may be provided with the second pick-and-place portion 63 and the second image acquisition device 64. The second manipulator 62 is used to drive the second pick-and-place portion 63 and the second image acquisition device 64 to move. The second image acquisition device 64 is used to obtain the position of the substrate 200 to be dried on the coating platform 2. The second pick-and-place portion 63 is used to pick up and place the substrate 200. The second pick-and-place portion 63 preferably adopts a non-contact suction cup to avoid the substrate 200 from being contaminated and damaged during the pick-and-place process. The second image acquisition device 64 can obtain the accurate position of the substrate 200, so that the second manipulator 62 can more accurately control the second pick-and-place portion 63 to obtain the substrate 200, thereby preventing the substrate 200 from being crushed.

[0047] Among them, the circulation track 1 may include multiple forward tracks 11 and at least one return track 12, the forward track 11 may have a first end 111 and a second end 112 relative to each other, the loading component 5 and the unloading component 6 may be respectively arranged near the first end 111 and the second end 112 of the forward track 11, the coating component 3 and the drying component 4 may be arranged between the first end 111 and the second end 112 of the forward track 11, and the coating component 3 is preferably arranged near the first end 111 of the forward track 11, the drying component 4 may be arranged between the coating component 3 and the unloading component 6, that is, the drying component 4 may be arranged behind the coating component 3, when the coating head 32 completes coating the substrate 200, the coating platform 2 moves the coated substrate 200 to the position of the drying component 4, and the drying component 4 dries the substrate 200 so that the liquid film on the substrate 200 dries to form a dry film.

[0048] refer to Figure 1 , Figure 5 The bracket 31 may include a crossbeam 311 and a first column 312 and a second column 313 respectively arranged at both ends of the crossbeam 311. The extension direction of the crossbeam 311 is perpendicular or approximately perpendicular to the extension direction of the forward track 11. The crossbeam 311 can be arranged above the forward track 11. The coating head 32 can be arranged on the crossbeam 311. The first column 312 and the second column 313 are respectively arranged on both sides of the forward track 11. The first column 312 and the second column 313 have a supporting effect on the crossbeam 311.

[0049] The first end 111 and the second end 112 of the forward track 11 can be connected to the return track 12 respectively, so that the circulation track 1 forms a closed loop, that is, the forward track 11 and the return track 12 form a closed loop. The coating platform 2 can move from the first end 111 of the forward track 11 to the second end 112 of the forward track 11 through the forward track 11. During the movement, the coating platform 2 can pass through the loading component 5, the coating component 3, the drying component 4 and the unloading component 6 in sequence. The coating platform 2 can move from the second end 112 of the forward track 11 to the first end 111 of the forward track 11 through the return track 12. After the unloading component 6 transfers the dried substrate 200 from the coating platform 2, the coating platform 2 returns to the position of the loading component 5 through the return track 12.

[0050] When the coating head 32 is coating the substrate 200 located on the coating platform 2, the substrate 200 being coated on the coating platform 2 and the substrate 200 to be coated on the adjacent coating platform 2 can be placed close to each other, that is, there is no gap or almost no gap between the adjacent substrates 200. During operation, the loading component 5, the drying component 4 and the unloading component 6 preferably operate synchronously with the coating head 32. Specifically, the loading component 5 transfers the substrate 200 to be coated onto the coating platform 2, and the coating platform 2 moves the substrate 200 to the coating platform 2, that is, under the coating head 32. While the coating head 32 is coating the substrate 200, the loading component 5 continues to transfer the substrate 200 to be coated to the next coating platform 2, and the coating platform 2 drives the substrate 200 to move and approach the previous coating platform 2, so that the substrate 200 to be coated The coating head 32 is arranged close to the substrate 200 being coated, so that continuous coating can be achieved, which is equivalent to splicing adjacent substrates 200 together to form a continuous whole. Compared with discontinuous coating, during discontinuous coating, adjacent substrates 200 are arranged at intervals, and there is a pause between the coating head 32 coating different substrates 200. When the coating head 32 starts coating and ends coating, it is easy to cause incomplete coating or even missing coating of the front and rear ends of the substrate 200 in the coating direction. Continuous coating can avoid the problem of incomplete coating and missing coating of the substrate 200. While the coating head 32 is coating the substrate 200, the drying component 4 can dry the previously coated substrate 200. When the coating of the substrate 200 is completed, the coated substrate 200 can be moved to the drying component 4 for drying. The unloading assembly 6 transfers the dried substrate 200 from the coating platform, and the coating platform 2 of the transferred substrate 200 moves from the second end 112 of the forward guide rail to the first end 111 of the forward guide rail through the return rail to continue to participate in the circulation operation. The coating head 32 can continuously coat the substrate, which not only shortens the production cycle of the solar cell and improves the production efficiency, but also makes each substrate coated more evenly, thereby improving the quality of the solar cell.

[0051] In the present application, by integrating multiple coating components 3 and multiple drying components 4 into the same device, multiple coating components 3 can coat multiple substrates 200 at the same time, and multiple drying components 4 can dry multiple substrates 200 at the same time, and there is no need to transport the coated substrates 200. This not only shortens the production cycle of solar cells, but also greatly improves the production efficiency of solar cells, improves the production capacity of solar cells, and meets the high-throughput preparation requirements of solar cells. It also avoids the shaking of the coating liquid on the substrate 200 during transportation, ensures that the coating liquid on the substrate 200 is evenly distributed, and can dry the liquid film on the substrate 200 in time, thereby improving the quality and yield of solar cells, and reducing the number of coating devices 100, reducing the cost and occupied space of the coating devices 100, thereby reducing the production cost of solar cells, and at the same time, there is no need to add additional transportation devices, reducing equipment costs and occupied space, thereby further reducing the production cost of solar cells.

[0052] In a specific embodiment, reference Figure 1 , Figure 5 , multiple forward tracks 11 can share one return track 12, for example, two, three, four, etc. forward tracks 11 can share one return track 12, so that the number of return tracks 12 can be reduced, the overall volume of the circulation track 1 can be reduced, and thus the overall volume of the coating equipment 100 can be reduced, which can reduce the cost and occupied space of the coating equipment 100.

[0053] As a preferred method, refer to Figure 1 , Figure 2 , Figure 4 , Figure 5 , a return track 12 can be set between adjacent forward tracks 11, for example, when the number of the forward tracks 11 is three, the number of the return tracks 12 can be two. More preferably, a return track 12 is set between every two forward tracks 11, for example, when the number of the forward tracks 11 is four, a first return track 12 can be set between the first forward track 11 and the second forward track 11, and a second return track 12 can be set between the third forward track 11 and the fourth forward track 11. In this way, on the one hand, the number of return tracks 12 can be further reduced, the overall volume of the circulation track 1 can be reduced, and thus the overall volume of the coating equipment 100 can be reduced, and the cost and occupied space of the coating equipment 100 can be reduced. On the other hand, it is also convenient to control the coating platform 2 to avoid confusion in the movement of the coating platform 2.

[0054] In some embodiments, the number of the forward tracks 11 and the number of the return tracks 12 may also be the same, that is, one return track 12 is provided corresponding to one forward track 11 .

[0055] At least one coating component 3 and at least one drying component 4 may be correspondingly arranged on each forward track 11. For example, one coating component 3 and one drying component 4 may be correspondingly arranged on each forward track 11, and multiple coating components 3 and multiple drying components 4 may be correspondingly arranged on each forward track 11. When the coating speed of the coating head 32 is greater than the drying speed of the drying component 4, the number of coating components 3 may be greater than the number of drying components 4, and when the coating speed of the coating head 32 is less than the drying speed of the drying component 4, the number of coating components 3 may be less than the number of drying components 4. The number of coating components 3 and the number of drying components 4 may be set according to the coating speed of the coating head 32 and the drying speed of the drying component 4 to improve the efficiency of the coating device 100. In this embodiment, one coating component 3 and two drying components 4 may be correspondingly arranged on each forward track 11, and the two drying components 4 may include a first drying component 43 and a second drying component 44.

[0056] refer to Figure 5 , when a plurality of drying components 4 are arranged corresponding to one forward track 11, the plurality of drying components 4 can be arranged in series, that is, the plurality of drying components 4 can be arranged in a line along the extension direction of the forward track 11. As an example, the number of drying components 4 is two, the first drying component 43 is arranged close to the coating component 3, and the second drying component 44 is arranged close to the unloading component 6. The same substrate 200 can be dried twice, and the two drying components 4 can dry the same substrate 200 in turn, that is, the same substrate 200 is dried by the first drying component 43 and the second drying component 44 respectively. The same substrate 200 can also be dried by only one of the first drying component 43 and the second drying component 44. In this embodiment, the same substrate 200 can also be dried by only one of the first drying component 43 and the second drying component 44. If the current substrate 200 enters the second drying component 44 first, and the next substrate 200 enters the first drying component 43, after drying, the substrate 200 moves directly to the unloading component 6 with the coating platform 2, and the unloading component 6 transfers the dried substrate 200 from the coating platform 2.

[0057] refer to Figure 1 , Figure 2 , Figure 4When a plurality of drying components 4 are arranged corresponding to one forward track 11, the plurality of drying components 4 can also be arranged in parallel, that is, the plurality of drying components 4 can be arranged in a line along the extension direction perpendicular to the forward track 11. As an example, the number of drying components 4 is two, and the first drying component 43 and the second drying component 44 are arranged in a line along the extension direction perpendicular to the forward track 11. When the first drying component 43 is in an idle state, the substrate 200 can be moved to the first drying component 43 with the coating platform 2. When the first drying component 43 is in an operating state, the substrate 200 can be moved to the second drying component 44 with the coating platform 2. The substrate 200 can alternately enter or leave the first drying component 43 and the second drying component 44. The first drying component 43 and the second drying component 44 will not interfere with each other, that is, the first drying component 43 will not hinder the substrate 200 from entering or leaving the second drying group, and the second drying component 44 will not hinder the substrate 200 from entering or leaving the first drying group. This can reduce or avoid the waiting time of the substrate 200, which can not only improve the efficiency of the drying component 4, thereby improving the overall efficiency of the coating equipment 100, and improving the production capacity of solar cells to meet the high-throughput preparation requirements of solar cells, but also ensure that the substrate 200 is dried in time to prevent oxidation or flow on the surface of the liquid film, which may cause uneven distribution of the coating liquid on the substrate 200, thereby improving the quality and yield of the solar cell.

[0058] When the number of drying components 4 corresponding to one forward track 11 exceeds two, the plurality of drying components 4 may also be arranged in a combination of series arrangement and parallel arrangement.

[0059] In a specific embodiment, reference Figure 3 The circulating track 1 may be composed of a plurality of magnetic suspension stators 14, a plurality of magnetic suspension movers 15 may be arranged on the circulating track 1, the coating platform 2 may be arranged on the magnetic suspension mover 15, the magnetic suspension stator 14 may provide driving force for the magnetic suspension mover 15, the magnetic suspension stator 14 is used to drive the magnetic suspension mover 15 to perform one or more of translation, lifting, rotation or pitching and yaw, and the magnetic suspension mover 15 can drive the coating platform 2 to circulate on the circulating track 1. In this embodiment, both the forward track 11 and the return track 12 may include a plurality of magnetic suspension stators 14 to ensure that the magnetic suspension mover 15 can move in a preset direction.

[0060] The magnetic levitation stator 14 and the magnetic levitation mover 15 interact with each other through electromagnetic force. In the absence of physical contact between the magnetic levitation stator 14 and the magnetic levitation mover 15, the magnetic levitation mover 15 is suspended and driven, so that the magnetic levitation stator 14 drives the magnetic levitation mover 15 to perform one or more of translation, lifting, rotation or pitch yaw. The magnetic levitation stator 14 can generate an alternating electromagnetic field, which can not only suspend the magnetic levitation mover 15 and reduce friction, but also push, accelerate, brake, stabilize and guide the magnetic levitation mover 15 to run in a preset direction. The electromagnetic interaction between the magnetic levitation stator 14 and the magnetic levitation mover 15 makes the magnetic levitation technology have the advantages of high efficiency, stability and low noise.

[0061] As a preferred method, refer to Figure 3 , the circulating track 1 may also include a tray 13, the tray 13 may be arranged on the side of the circulating track 1 facing the coating head 32, the drying assembly 4 may include a cavity 41 and a vacuum pump connected to the cavity 41 through a pipe 42, the cavity 41 may be arranged above the tray 13, the side of the cavity 41 facing the tray 13 may have an opening, and the side of the cavity 41 with the opening can be pressed on the tray 13 and form a closed space, so that the coating platform 2 and the substrate 200 are located in the closed space, and the vacuum pump can evacuate the closed space through the pipe 42 to form a vacuum state in the closed space, so that the coating liquid drying speed can be accelerated and the coating liquid drying quality can be improved, thereby accelerating the production efficiency of solar cells and improving the quality of solar cells. In this embodiment, the tray 13 can be arranged above the magnetic suspension stator 14, the magnetic suspension mover 15 can be arranged above the tray 13, and the magnetic suspension stator 14 can drive the magnetic suspension mover 15 to move on the tray 13. When the solution falls onto the circulating track 1, the tray 13 can catch the solution to prevent the solution from falling onto the magnetic suspension stator 14, thereby ensuring the stable performance of the magnetic suspension stator 14. The surface of the tray 13 is relatively flat and regular, which is also convenient for cleaning the solution. When the cavity 41 descends, the cavity 41 can be directly pressed down onto the tray 13 to form a closed space. Since the surface of the tray 13 is relatively flat and regular, the closed space has good sealing performance, which is conducive to vacuum pumping, which can not only speed up the drying speed, but also improve the drying effect.

[0062] The tray 13 may be split or integral. In the present embodiment, the tray 13 is preferably integral. The tray 13 may have a flat plate portion 131 and an edge portion 132, and the edge portion 132 may be disposed on both sides of the flat plate portion 131 and protrude from the flat plate portion 131. The magnetic levitation mover 15 may be disposed on the flat plate portion 131, and the cavity 41 may be directly pressed down onto the flat plate portion 131 of the tray 13 to form a closed space. The edge portion 132 may prevent the magnetic levitation mover 15 from falling off the tray 13, thereby ensuring the stability of the operation of the magnetic levitation mover 15.

[0063] refer to Figure 3 A base 16 may be provided below the circulating track 1 . The base 16 may be in the shape of a flat plate as a whole. The base 16 may be provided on a side of the circulating track 1 facing away from the coating head 32 . The base 16 may be used to support the magnetic levitation stator 14 . The magnetic levitation stator 14 may be installed on the base 16 .

[0064] As a preferred method, refer to Figure 1 , Figure 5 The coating assembly 3 may also include a measuring module 33, which is used to measure the surface height of the substrate 200 to be coated on the coating platform 2. The magnetic suspension stator 14 can drive the magnetic suspension mover 15 to lift and / or pitch according to the measurement data of the measuring module 33. The magnetic suspension mover 15 can drive the coating platform 2 to lift and / or pitch synchronously, so that the coating platform 2 drives the substrate 200 to lift and / or pitch synchronously, so that the distance from the upper surface of the substrate located on different coating platforms 2 to the coating head 32 is equal, which can not only adjust the thickness of the coating liquid coated on the substrate, but also make the coating liquid uniformly coated on the substrate, thereby improving the photoelectric conversion efficiency of the solar cell. The measuring module 33 is, for example, a laser sensor, and three measuring modules 33 can be distributed in a triangle and measure three positions on the surface of the substrate 200 to be coated respectively.

[0065] Reference Figure 6 The present invention also provides a coating method, using any one of the coating devices 100 described above, the coating method comprising: step S10 to step S30.

[0066] Step S10: the loading assembly 5 transfers the substrate 200 to be coated to the coating platform 2 .

[0067] Specifically, when the coating platform 2 moves to the first end 111 of the forward track 11 , the loading assembly 5 transfers the substrate 200 to be coated to the coating platform 2 .

[0068] Step S20 : ​​the substrate 200 to be coated moves with the coating platform 2 to below the coating head 32 , and the coating head 32 coats the substrate 200 to be coated.

[0069] Specifically, the substrate 200 to be coated moves with the coating platform 2. When the coating platform 2 drives the substrate 200 to move below the measuring module 33, the measuring module 33 measures the surface of the substrate 200 to be coated. The magnetic suspension stator 14 can drive the magnetic suspension mover 15 to lift and / or pitch according to the measurement data of the measuring module 33, so that the coating platform 2 drives the substrate 200 to lift and / or pitch synchronously, so that the distance from the upper surface of the substrate located on different coating platforms 2 to the coating head 32 is equal, and the next substrate 200 to be coated moves with the coating platform 2 and is set close to the substrate 200 being coated and has the same moving speed as the substrate 200 being coated. In other words, adjacent substrates 200 are spliced ​​together, and there is no gap between adjacent substrates 200 in the coating direction. The coating die head can continuously coat the substrate 200, that is, there is no pause when the coating die head coats different substrates 200, which not only improves the coating efficiency, but also improves the coating quality.

[0070] Step S30 : the drying component 4 dries the coated substrate 200 .

[0071] Specifically, after the coating of the substrate 200 is completed, the coated substrate 200 moves with the coating platform 2. When the coating platform 2 drives the substrate 200 to move under the drying component 4, the cavity 41 descends and is pressed on the tray 13 to form a closed space. The vacuum pump performs vacuuming to speed up the drying speed of the coating liquid.

[0072] Step S40 : the unloading assembly 6 transfers the dried substrate 200 from the coating platform 2 .

[0073] Specifically, when the substrate 200 is dried, the dried substrate 200 moves with the coating platform 2. When the coating platform 2 drives the substrate 200 to move to the second end 112 of the forward track 11, the unloading assembly 6 transfers the dried substrate 200 from the coating platform 2. As a preferred embodiment, when the substrate 200 is dried, the coating platform 2 can be accelerated to move to the second end 112 of the forward track 11, which can improve the operation efficiency of the equipment.

[0074] Step S50 : the coating platform 2 moves from the second end 112 of the forward track 11 to the first end 111 of the forward track 11 through the return track 12 .

[0075] Specifically, after the unloading component 6 transfers the dried substrate 200 from the coating platform 2, the empty coating platform 2 moves from the second end 112 of the forward track 11 to the first end 111 of the forward track 11 through the return track 12, and the loading component 5 can transfer the substrate 200 to be coated to the coating platform 2, and the coating platform 2 performs a circulation operation.

[0076] The coating device 100 of the present invention is not limited to coating the crystalline silicon substrate 200 mentioned in the above embodiment with a perovskite solution to prepare a crystalline silicon perovskite stacked solar cell, but can also be used to coat a conductive glass substrate 200 with a perovskite solution to prepare a solar cell. It can also be applied to any solution coating, such as display screen preparation, semiconductor packaging and other coating processes.

[0077] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, substitute and modify the above embodiments within the scope of the invention without departing from the principles and purpose of the present invention. All such changes should fall within the scope of protection of the claims of the present invention.

Claims

1. A coating device, characterized in that: include: Loop track; A plurality of coating platforms, each of which is used to place a substrate, and each of which is arranged on the circulating track; A plurality of coating components, wherein the coating components include a bracket and a coating head disposed on the bracket, the coating head is disposed above the circulating track, the coating platform drives the substrate to move relative to the coating head along a coating direction, and the coating head is used to coat the substrate; A plurality of drying components, wherein the drying components are used to dry the coating liquid coated on the substrate by the coating head; A loading assembly and a unloading assembly, wherein the loading assembly is used to transfer the substrate to be coated onto the coating platform, and the unloading assembly is used to transfer the coated substrate from the coating platform; Wherein, the circulating track includes multiple forward tracks and at least one return track, the forward track has a first end and a second end opposite to each other, the first end and the second end of the forward track are respectively connected to the return track so that the circulating track forms a closed loop, the coating platform can move from the first end of the forward track to the second end of the forward track through the forward track, and the coating platform can move from the second end of the forward track to the first end of the forward track through the return track.

2. The coating device according to claim 1, characterized in that: A return track is arranged between adjacent forward tracks; or a return track is arranged between every two forward tracks.

3. The coating device according to claim 1, characterized in that: Each of the forward tracks is correspondingly provided with at least one coating component and at least one drying component; When a plurality of drying components are arranged corresponding to one forward track, the plurality of drying components are arranged in series and / or in parallel.

4. The coating device according to claim 1, characterized in that: The circulating track also includes a tray, which is arranged on a side of the circulating track facing the coating head. The drying component includes a cavity and a vacuum pump connected to the cavity through a pipeline. The cavity is arranged above the tray, and the cavity has an opening on a side facing the tray. The side of the cavity where the opening is arranged can be pressed onto the tray to form a closed space, so that the coating platform and the substrate are located in the closed space.

5. The coating device according to claim 4, characterized in that: The tray has a flat plate portion and an edge portion, wherein the edge portions are arranged at both sides of the flat plate portion and protrude from the flat plate portion.

6. The coating device according to claim 1, characterized in that: The circulating track is composed of a plurality of magnetic levitation stators, a plurality of magnetic levitation movers are arranged on the circulating track, the coating platform is arranged on the magnetic levitation movers, the magnetic levitation stators are used to drive the magnetic levitation movers to perform one or more of translation, lifting, rotation or pitch and yaw, and the magnetic levitation movers can drive the coating platform to circulate on the circulating track.

7. The coating device according to claim 6, characterized in that: The coating assembly further comprises a measuring module, which is used to measure the surface height of the substrate to be coated on the coating platform. The magnetic suspension stator can drive the magnetic suspension mover to perform lifting and / or pitching according to the measurement data of the measuring module.

8. The coating device according to claim 1, characterized in that: When the coating head is coating the substrate on the current coating platform, the substrate on the current coating platform is placed against the substrate to be coated on the adjacent coating platform.

9. The coating device according to claim 1, characterized in that: The loading assembly includes a first support seat, a first manipulator, a first pick-and-place portion, and a first image acquisition device, one end of the first manipulator is disposed on the first support seat, the other end of the first manipulator is provided with the first pick-and-place portion and the first image acquisition device, and the first manipulator is used to drive the first pick-and-place portion and the first image acquisition device to move; The blanking assembly includes a second support seat, a second manipulator, a second pick-and-place portion, and a second image acquisition device. One end of the second manipulator is arranged on the second support seat, and the other end of the second manipulator is provided with the second pick-and-place portion and the second image acquisition device. The second manipulator is used to drive the second pick-and-place portion and the second image acquisition device to move.

10. A coating method, characterized in that: Using the coating device according to any one of claims 1 to 9, the coating method comprises: The loading assembly transfers the substrate to be coated to the coating platform; The substrate to be coated moves with the coating platform to below the coating head, and the coating head coats the substrate to be coated; The drying component dries the coated substrate; The unloading component transfers the dried substrate from the coating platform; The coating platform moves from the second end of the forward track to the first end of the forward track through the return track.

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