Convenient clamping device for numerical control machining of target material

Abstract

The convenient clamping device comprises a chuck, a supporting component, an adapter and a special-shaped chuck, three limiting grooves formed in the radial direction of the chuck are evenly formed in the top end of the chuck, steel soft claws are installed in the limiting grooves in a sliding mode, and the steel soft claws are connected with aluminum soft claws through connecting bolts; the top ends of the aluminum soft claws are provided with top end reference clamping positions, the inner sides of the aluminum soft claws are provided with inner side reference clamping positions, the inner side reference clamping positions are arranged to be of an arc-shaped structure matched with the adapter, and the top end reference clamping positions are arranged to be of an arc-shaped structure matched with the special-shaped chuck.

Description

Technical Field

[0001] The present application relates to the technical field of CNC machining, and more specifically, to a convenient clamping device for CNC machining of target materials. Background Art

[0002] Since the 21st century, high-purity sputtering targets, as the core supporting materials for nano-integrated circuits, have rapidly developed into a highly specialized industry. According to market data, the global sputtering target market size will exceed US$20 billion in 2022. Looking ahead, with the continuous development of new infrastructure and application fields such as the Internet of Things, big data, new display technologies, and solar cells, the terminal application scenarios of sputtering targets will be further expanded, and the global market size is expected to maintain steady growth.

[0003] The shape design and processing technology of sputtering targets need to fully consider the specific needs of their downstream application fields. Its production process involves a variety of fine and complex processes, and the level of these processes directly affects the quality and yield of the targets. In particular, the shape processing of sputtering targets requires extremely high precision. During the processing, scratches, bumps and other defects on the surface of the finished product must be avoided, which puts strict requirements on the appearance quality of the product.

[0004] CNC machining of targets usually includes four main links: shape machining, hole machining, semi-finished product machining and finished product machining. In the most critical finished product machining stage, in order to prevent scratches on the back, back protection measures are currently widely used. However, traditional protection methods require high operating skills, increase operation time, and have the problem of unstable protection, which can easily lead to scratches on the target surface and fluctuations in dimensional accuracy. In addition, during the product model switching process, due to the lack of a unified standard design, the installation, calibration and fine-tuning of tooling of different sizes become extremely complicated.

[0005] In order to solve these technical problems, it is necessary to develop an efficient clamping device specifically for CNC machining of target materials to improve machining efficiency, stabilize machining quality, and simplify the operation process. Summary of the invention

[0006] In order to overcome a series of defects existing in the prior art, the purpose of the present application is to provide a convenient clamping device for CNC machining of target materials in response to the above-mentioned problems, including a chuck 1, a supporting component, an adapter 9 and a special-shaped chuck 10, the top of the chuck 1 is evenly provided with three limit grooves arranged along its own radial direction, and steel soft claws 2 are slidably installed in the limit grooves, and the steel soft claws 2 are connected to aluminum soft claws 3 through I-type connecting bolts 7, the top of the aluminum soft claws 3 are provided with top reference clamping positions, and the inner sides of the aluminum soft claws 3 are provided with inner reference clamping positions, the inner reference clamping positions are arranged in an arc-shaped structure matching the adapter 9, and the top reference clamping positions are arranged in an arc-shaped structure matching the special-shaped chuck 10.

[0007] Furthermore, the supporting component includes an annular support block 4, a connecting seat 5 and a columnar support block 6, the columnar support block 6 is fixed to the top of the connecting seat 5 by threads, the annular support block 4 is arranged around the axis of the chuck 1, the annular support block 4 is fixedly connected to the aluminum soft claw 3 by II-type connecting bolts 8, and the connecting seat 5 is fixed to the chuck 1 by bolts.

[0008] Furthermore, the centers of the top reference clamping position and the inner reference clamping position are located on the axis of the chuck 1, and the steel soft jaws 2 and the aluminum soft jaws 3 are designed with embedded avoidance grooves.

[0009] Furthermore, the steel soft claw 2 is made of heat-treated high-strength steel with a tensile strength of ≥560MPa, a yield strength of ≥310MPa, and a hardness of ≥220HB.

[0010] Furthermore, the aluminum soft claw 3 is made of high-strength aluminum material of aluminum 2 series, 6 series or 7 series, with a density of ≤2.85g / cm3 and a tensile strength of ≥280MPa.

[0011] Furthermore, the columnar support block 6 is made of a polymer material or a high-strength carbon fiber material, with a temperature resistance range of -190 to 280° C., a corrosion resistance pH range of 1 to 12, and a friction coefficient of ≤0.15.

[0012] Furthermore, the specific steps of using the convenient clamping device to process a circular target are as follows: first, clean all relevant parts to ensure that there are no impurities or foreign matter that affect the processing accuracy, and ensure that the chuck 1 is firmly installed on the CNC machine tool and the horizontal adjustment is completed; then, install the adapter 9 at the inner reference clamping position of the aluminum soft claws 3, and ensure that the aluminum soft claws 3 are in a preset clamping position; clamp the edge of the target material through the aluminum soft claws 3 to ensure that the target material is stably fixed in the chuck 1; check the stability of the clamping to ensure that the target material has no looseness or uneven clamping, and check whether the contact surface of the soft claws is completely flat to ensure that the target material is firmly fixed; after confirming that the clamping is firm, start the CNC machine tool for processing, and ensure that the target material will not be offset or damaged during the processing through the close cooperation of the aluminum soft claws 3 and the annular support block 4; after completing the processing, release the steel soft claws 2 and take out the processed target material.

[0013] Furthermore, the specific steps of using the convenient clamping device to process special-shaped target materials are as follows: clean all relevant parts to ensure that there are no impurities or foreign matter to avoid affecting the processing accuracy, and ensure that the chuck 1 is firmly installed on the CNC machine tool and the horizontal adjustment is completed; install the special-shaped chuck 10 to the top reference clamping position of the aluminum soft claw 3, and ensure that the aluminum soft claw 3 is in the preset clamping position; place the special-shaped target material in the special-shaped chuck 10 to ensure that the target material is not loose or offset in the special-shaped chuck 10; check whether the contact surface of the special-shaped chuck 10 and the aluminum soft claw 3 is flat and free of foreign matter, and ensure that the steel soft claw 2 and the aluminum soft claw 3 have sufficient clamping force on the target material without causing unnecessary damage to the target material surface; after confirming that all parts have been correctly installed and clamped firmly, start the CNC machine tool for processing; after completing the processing, loosen the steel soft claw 2, remove the aluminum soft claw 3 and the special-shaped chuck 10, and carefully take out the processed target material to avoid damage to the target material during the removal process.

[0014] Compared with the prior art, this application has the following beneficial effects:

[0015] 1) This application designs a reference clamp with a self-centering function to ensure the precise positioning of the target during the processing; its installation and operation are simple, greatly reducing the dependence on the operator's skills.

[0016] 2) In this application, the processing contact surface adopts self-lubricating material to effectively prevent the target surface from being scratched, further improving the processing quality. At the same time, the inlaid avoidance groove design is adopted to achieve full contact of the positioning surface, ensuring accurate and reliable positioning.

[0017] 3) In this application, the contact material used has excellent high and low temperature resistance, and maintains stable mechanical properties at room temperature and pressure. In addition, it supports rapid switching of multiple models, can flexibly adapt to the processing needs of products of different sizes, and significantly improves processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is an overall view of an empty space of a convenient clamping device for CNC machining of target materials disclosed in an embodiment of the present application.

[0019] Figure 2 This is a general diagram of the clamping of a convenient clamping device for CNC machining of target materials disclosed in an embodiment of the present application.

[0020] Figure 3 This is a schematic structural diagram of a connecting seat in a convenient clamping device for CNC machining of target materials disclosed in an embodiment of the present application.

[0021] Figure 4 This is a schematic structural diagram of an annular support block in a convenient clamping device for CNC machining of target materials disclosed in an embodiment of the present application.

[0022] Figure 5 This is a detailed front view of an aluminum soft claw in a convenient clamping device for CNC machining of a target material disclosed in an embodiment of the present application.

[0023] Figure 6 This is a schematic structural diagram of an adapter in a convenient clamping device for CNC machining of target materials disclosed in an embodiment of the present application.

[0024] Figure 7 This is a schematic structural diagram of a steel soft claw in a convenient clamping device for CNC machining of target materials disclosed in an embodiment of the present application.

[0025] Figure 8 This is a detailed back view of an aluminum soft claw in a convenient clamping device for CNC machining of a target material disclosed in an embodiment of the present application.

[0026] Fig. 9 This is a detailed diagram of the clamping state of a special-shaped chuck in a convenient clamping device for CNC machining of target materials disclosed in an embodiment of the present application.

[0027] Fig.10 This is a schematic structural diagram of a special-shaped chuck in a convenient clamping device for CNC machining of target materials disclosed in an embodiment of the present application.

[0028] In the figure: 1: chuck, 2: steel soft jaws, 3: aluminum soft jaws, 4: ring-shaped support block, 5: connecting seat, 6: columnar support block, 7: type I connecting bolts, 8: type II connecting bolts, 9: adapter, 10: special-shaped chuck. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical scheme and advantages of the implementation of the present invention clearer, the technical scheme in the embodiment of the present invention will be described in more detail below in conjunction with the drawings in the embodiment of the present invention. In the drawings, the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The described embodiments are part of the embodiments of the present invention, not all of the embodiments.

[0030] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present invention.

[0031] The embodiments and directional terms described below with reference to the accompanying drawings are exemplary and intended to be used to explain the present invention, but should not be construed as limiting the present invention.

[0032] In a broad embodiment of the present invention, a convenient clamping device for CNC machining of target materials includes a chuck 1, a supporting component, an adapter 9 and a special-shaped chuck 10, the top of the chuck 1 is evenly provided with three limit grooves arranged along its own radial direction, steel soft claws 2 are slidably installed in the limit grooves, the steel soft claws 2 are connected to aluminum soft claws 3 by I-type connecting bolts 7, the top of the aluminum soft claws 3 are provided with top reference clamping positions, the inner sides of the aluminum soft claws 3 are provided with inner reference clamping positions, the inner reference clamping positions are arranged in an arc-shaped structure matching the adapter 9, and the top reference clamping positions are arranged in an arc-shaped structure matching the special-shaped chuck 10.

[0033] Furthermore, the supporting component includes an annular support block 4, a connecting seat 5 and a columnar support block 6, the columnar support block 6 is fixed to the top of the connecting seat 5 by threads, the annular support block 4 is arranged around the axis of the chuck 1, the annular support block 4 is fixedly connected to the aluminum soft claw 3 by II-type connecting bolts 8, and the connecting seat 5 is fixed to the chuck 1 by bolts.

[0034] Furthermore, the centers of the top reference clamping position and the inner reference clamping position are located on the axis of the chuck 1, and the steel soft jaws 2 and the aluminum soft jaws 3 are designed with embedded avoidance grooves.

[0035] Furthermore, the steel soft claw 2 is made of heat-treated high-strength steel with a tensile strength of ≥560MPa, a yield strength of ≥310MPa, and a hardness of ≥220HB.

[0036] Furthermore, the aluminum soft claw 3 is made of high-strength aluminum material of aluminum 2 series, 6 series or 7 series, with a density of ≤2.85g / cm 3 , tensile strength ≥280MPa.

[0037] Furthermore, the columnar support block 6 is made of a polymer material or a high-strength carbon fiber material, with a temperature resistance range of -190 to 280° C., a corrosion resistance pH range of 1 to 12, and a friction coefficient of ≤0.15.

[0038] Furthermore, the specific steps of using the convenient clamping device to process a circular target are as follows: first, clean all relevant parts to ensure that there are no impurities or foreign matter that affect the processing accuracy, and ensure that the chuck 1 is firmly installed on the CNC machine tool and the horizontal adjustment is completed; then, install the adapter 9 at the inner reference clamping position of the aluminum soft claws 3, and ensure that the aluminum soft claws 3 are in a preset clamping position; clamp the edge of the target material through the aluminum soft claws 3 to ensure that the target material is stably fixed in the chuck 1; check the stability of the clamping to ensure that the target material has no looseness or uneven clamping, and check whether the contact surface of the soft claws is completely flat to ensure that the target material is firmly fixed; after confirming that the clamping is firm, start the CNC machine tool for processing, and ensure that the target material will not be offset or damaged during the processing through the close cooperation of the aluminum soft claws 3 and the annular support block 4; after completing the processing, release the steel soft claws 2 and take out the processed target material.

[0039] Furthermore, the specific steps of using the convenient clamping device to process special-shaped target materials are as follows: clean all relevant parts to ensure that there are no impurities or foreign matter to avoid affecting the processing accuracy, and ensure that the chuck 1 is firmly installed on the CNC machine tool and the horizontal adjustment is completed; install the special-shaped chuck 10 to the top reference clamping position of the aluminum soft claw 3, and ensure that the aluminum soft claw 3 is in the preset clamping position; place the special-shaped target material in the special-shaped chuck 10 to ensure that the target material is not loose or offset in the special-shaped chuck 10; check whether the contact surface of the special-shaped chuck 10 and the aluminum soft claw 3 is flat and free of foreign matter, and ensure that the steel soft claw 2 and the aluminum soft claw 3 have sufficient clamping force on the target material without causing unnecessary damage to the target material surface; after confirming that all parts have been correctly installed and clamped firmly, start the CNC machine tool for processing; after completing the processing, loosen the steel soft claw 2, remove the aluminum soft claw 3 and the special-shaped chuck 10, and carefully take out the processed target material to avoid damage to the target material during the removal process.

[0040] The preferred embodiments of the present invention are listed below in conjunction with the accompanying drawings to further describe the present invention in detail.

[0041] The embodiment of the present application provides a simple clamping device for target CNC machining, including a chuck 1, a steel soft jaw 2, an aluminum soft jaw 3, an annular support block 4, a connecting seat 5, a columnar support block 6, a type I connecting bolt 7, a type II connecting bolt 8, an adapter 9 and a special-shaped chuck 10. The embodiment of the present application also discloses the installation and use method of the device during use.

[0042] The steel soft claw 2 and the aluminum soft claw 3 are designed with an inlaid avoidance groove to ensure that their positioning surfaces can be fully in contact, the positioning is accurate and reliable, and different models can be quickly switched according to the size of the product. The steel soft claw 2 and the aluminum soft claw 3 are connected by an I-type connecting bolt 7, and during the installation process, the contact surface is ensured to be smooth and free of foreign matter.

[0043] The steel soft claw 2 is made of high-strength steel and has good rigidity and stable mechanical properties after heat treatment, thereby ensuring the stability of the main structure.

[0044] The aluminum soft claw 3 is made of high-strength aluminum material, such as aluminum series 2, 6, and 7, and has the characteristics of light weight and high strength. The aluminum material can more effectively protect the surface of the target material.

[0045] The connection base 5 and the columnar support block 6 use a threaded connection method, and a threaded connection method that complies with national standards is selected. This threaded connection method has the characteristics of automatic locking, thereby making the structure of the entire device more stable.

[0046] The columnar support block 6 is fixed to the connecting seat 5 by threads, and the columnar support block 6 avoids the setting of mounting holes, thereby effectively reducing the risk of debris residue, and can effectively protect the target material and prevent scratches.

[0047] The columnar support block 6 is made of polymer material or high-strength carbon fiber material, among which PPA, PTFE, PA6, T300, T400 and other series materials are preferred. These materials have a low friction coefficient and can effectively protect the target material.

[0048] The columnar support block 6 has good high-temperature resistance and low-temperature resistance, very stable mechanical properties at normal temperature and pressure, and strong anti-deformation ability.

[0049] The columnar support block 6 has excellent corrosion resistance and self-lubricating properties and can be adapted to various types of cutting fluids.

[0050] Aluminum soft claws 3 are pre-set as reference clamping positions. This method not only ensures the accuracy of position positioning, but also makes the workflow simpler and reduces the dependence on the operator's technical ability. This design enables the device to have a centering function. This design makes the installation process easier and more convenient.

[0051] This embodiment can solve the problems of back scratches and instability of back protection measures during the processing of target finished products, as well as cumbersome switching operations of various types of tooling.

[0052] The special-shaped chuck 10 is preferably made of high manganese alloy steel, so that it has good deformation ability and resilience. This design enables the present invention to process targets of various shapes. When processing non-circular target holder targets, it is only necessary to replace chucks of various shapes to successfully complete the processing, thereby overcoming the limitation that the lathe can only process circular workpieces, thereby obtaining a higher surface quality.

[0053] Installation and preparation are very critical, which will not only affect the performance and processing accuracy of the machine tool, but also affect the safety of the operator and processing efficiency. The main process is: before the formal installation, use the level to make preliminary level adjustments to the machine tool to ensure that the machine tool can be placed stably and horizontally; during the entire installation phase of the device, ensure that its components and working environment are kept clean.

[0054] Regarding the maintenance and care of the device, the aspects that need attention include: various inspections and preparations before use, matters that should be paid attention to during processing, daily cleaning and maintenance, and regular inspections. The main inspection standards include: the flatness of the device does not exceed 0.01, the verticality of the device clamping surface to the horizontal direction does not exceed 0.006, and the roundness of the device clamping surface does not exceed 0.006.

[0055] This embodiment has been applied in the processing of various 8-inch and 12-inch targets and special-shaped targets. Through the tracking and summary of the processing process, the tooling switching in the production process is fast and convenient, the efficiency is significantly improved, and the product quality is stable.

[0056] Finally, it should be pointed out that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them. Although the present invention has been described in detail with reference to the above embodiments, a person skilled in the art should understand that the technical solutions described in the above embodiments can still be modified, or some of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A convenient clamping device for target CNC machining, characterized in that: The invention comprises a chuck (1), a supporting component, an adapter (9) and a special-shaped chuck (10). The top of the chuck (1) is evenly provided with three limit grooves arranged along its own radial direction. Steel soft claws (2) are slidably installed in the limit grooves. The steel soft claws (2) are connected to aluminum soft claws (3) through I-type connecting bolts (7). The top of the aluminum soft claws (3) is provided with a top reference clamping position. The inner side of the aluminum soft claws (3) is provided with an inner reference clamping position. The inner reference clamping position is arranged in an arc structure matching the adapter (9). The top reference clamping position is arranged in an arc structure matching the special-shaped chuck (10).

2. A convenient clamping device for target CNC machining according to claim 1, characterized in that: The support component comprises an annular support block (4), a connecting seat (5) and a columnar support block (6); the columnar support block (6) is fixed to the top of the connecting seat (5) by means of threads; the annular support block (4) is arranged around the axis of the chuck (1); the annular support block (4) is fixedly connected to the aluminum soft claw (3) by means of II-type connecting bolts (8); and the connecting seat (5) is fixed to the chuck (1) by means of bolts.

3. A convenient clamping device for target CNC machining according to claim 1, characterized in that: The centers of the top reference clamping position and the inner reference clamping position are located on the axis of the chuck (1), and the steel soft jaws (2) and the aluminum soft jaws (3) are designed with embedded avoidance grooves.

4. A convenient clamping device for target CNC machining according to claim 1, characterized in that: The steel soft claw (2) is made of heat-treated high-strength steel with a tensile strength of ≥560MPa, a yield strength of ≥310MPa, and a hardness of ≥220HB.

5. The convenient clamping device for target CNC machining according to claim 1, characterized in that: The aluminum soft claw (3) is made of high-strength aluminum material of aluminum series 2, 6 or 7, with a density of ≤2.85g / cm 3 , tensile strength ≥280MPa.

6. A convenient clamping device for target CNC machining according to claim 1, characterized in that: The columnar support block (6) is made of a polymer material or a high-strength carbon fiber material, has a temperature resistance range of -190 to 280° C., a corrosion resistance pH range of 1 to 12, and a friction coefficient of ≤0.

15.

7. A convenient clamping device for target CNC machining according to claim 2, characterized in that: The specific steps of using the convenient clamping device to process a circular target are as follows: first, clean all relevant parts to ensure that there are no impurities or foreign matter that affect the processing accuracy, and ensure that the chuck (1) is firmly installed on the CNC machine tool and the horizontal adjustment is completed; then, install the adapter (9) at the inner reference clamping position of the aluminum soft claw (3), and ensure that the aluminum soft claw (3) is in a preset clamping position; clamp the edge of the target material by the aluminum soft claw (3) to ensure that the target material is stably fixed in the chuck (1); check the clamping stability to ensure that the target material has no looseness or uneven clamping phenomenon, and at the same time check whether the contact surface of the soft claw is completely flat to ensure that the target material is firmly fixed; after confirming that the clamping is stable, start the CNC machine tool for processing, and ensure that the target material will not be offset or damaged during the processing process through the close cooperation of the aluminum soft claw (3) and the annular support block (4); after the processing is completed, release the steel soft claw (2) and take out the processed target material.

8. The convenient clamping device for target CNC machining according to claim 2, characterized in that: The specific steps of using the convenient clamping device to process a special-shaped target are as follows: cleaning all relevant parts to ensure that there are no impurities or foreign matter to avoid affecting the processing accuracy, and ensuring that the chuck (1) is firmly installed on the CNC machine tool and the horizontal adjustment is completed; installing the special-shaped chuck (10) to the top reference clamping position of the aluminum soft claw (3), and ensuring that the aluminum soft claw (3) is in a preset clamping position; placing the special-shaped target in the special-shaped chuck (10), ensuring that the target is not loose or offset in the special-shaped chuck (10); Check whether the contact surface between the special-shaped chuck (10) and the aluminum soft claw (3) is flat and free of foreign matter, and ensure that the steel soft claw (2) and the aluminum soft claw (3) have sufficient clamping force on the target material without causing unnecessary damage to the target material surface; after confirming that all parts have been correctly installed and clamped firmly, start the CNC machine tool for processing; after completing the processing, loosen the steel soft claw (2), remove the aluminum soft claw (3) and the special-shaped chuck (10), and carefully take out the processed target material to avoid damage to the target material during the removal process.

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