A molybdenum substrate polishing device for multi-station processing

Abstract

The present invention relates to the technical field of molybdenum substrate grinding equipment, and in particular to a molybdenum substrate grinding device for multi-station processing, including a transport part, a clamping part, a brushing part, a grinding part, a pickling part and a cleaning part, wherein the transport part includes a transport frame, wherein transport rollers are symmetrically and horizontally rotated in the transport frame, and a transport belt is tensioned on the transport rollers of the transport frame, and multiple paddles are evenly and vertically fixed on the outer wall of the transport belt, and sliding bars are horizontally fixed on both sides of the top surface of the transport frame, and the transport frame is sequentially provided with a brushing part, a grinding part, a pickling part and a cleaning part along the running direction of the transport belt. The molybdenum substrate of the present invention sequentially completes the impurity removal, grinding, pickling and cleaning processes, and then the cleaned molybdenum substrate slides out from the clamping part, and the surface of the molybdenum substrate is fully processed by multiple processes. The grinding method of multiple processes can remove the oxide layer on multiple layers of the surface of the molybdenum substrate, and the surface of the molybdenum substrate is fully polished by multiple processes, thereby improving the surface treatment effect of the molybdenum substrate.

Description

Technical Field

[0001] The invention relates to the technical field of molybdenum substrate polishing equipment, and in particular to a molybdenum substrate polishing device for multi-station processing. Background Art

[0002] Molybdenum substrate is a flat structure made of molybdenum material, which is widely used in electronics, semiconductors, aerospace, medical equipment and other high-tech fields. Molybdenum alloy is easy to oxidize, so in order not to affect the full play of the material made of tungsten-molybdenum plate, it is an indispensable step to clean the surface oxide scale before processing. The polishing of molybdenum substrate is the process of treating its surface to achieve a specific roughness, flatness or finish. By removing the surface oxide layer, burrs and other defects, the overall appearance and flatness of the molybdenum substrate are improved.

[0003] The existing announcement number is CN214213288U, and the name is a grinding device for a metal substrate, including a fixed frame, a controller is installed on one side of the front surface of the fixed frame, a cylinder is installed on the top of the fixed frame, a support plate is fixed on the telescopic end of the cylinder, a motor is installed on one side of the top of the support plate, a grinding disc is installed on the drive shaft of the motor, a limit frame is arranged below the grinding disc, a positioning mechanism for positioning the metal substrate is arranged inside the limit frame, an adjustment mechanism for adjusting the position of the limit frame is arranged on the fixed frame, the motor is electrically connected to the controller, the limit frame can accommodate a metal substrate of a larger area, and by controlling the rotation direction and number of turns of the screw and cooperating with the action of the slide rail, the pressure plate can clamp metal substrates of different widths or lengths in the limit frame, so that the device can stably process metal substrates of different widths or lengths.

[0004] However, the above-mentioned molybdenum substrate surface grinding processing device uses a grinding disk to rotate and press on the surface of the molybdenum substrate, and uses the rotation of the grinding disk to grind the oxide layer on the surface of the molybdenum substrate. However, the single-step grinding method can only remove the oxide layer on a single layer of the surface of the molybdenum substrate, and cannot perform a multi-step complete grinding treatment on the surface of the molybdenum substrate, which affects the surface treatment effect of the molybdenum substrate. Summary of the invention

[0005] The present invention solves the problems in the related art and proposes a molybdenum substrate polishing device with multi-station processing, aiming to solve the problem that a single-process polishing method can only remove a single layer of the oxide layer on the surface of the molybdenum substrate, and cannot perform a complete multi-process polishing treatment on the surface of the molybdenum substrate, thus affecting the surface treatment effect of the molybdenum substrate.

[0006] In order to solve the above technical problems, the present invention is implemented through the following technical solutions: a multi-station processing molybdenum substrate grinding device, including a transport part, a clamping part, a brushing part, a grinding part, a pickling part and a cleaning part, the transport part including a transport frame, the transport frame is symmetrically and horizontally rotatably connected with transport rollers, and the transport rollers of the transport frame are tensioned with a transport belt, a plurality of paddles are evenly and vertically fixed on the outer wall of the transport belt, both sides of the top surface of the transport frame are horizontally fixed with sliding bars, a plurality of clamping parts are provided, and a plurality of clamping parts are horizontally slidably assembled on the sliding bar, and the transport frame is sequentially provided with a brushing part, a grinding part, a pickling part and a cleaning part along the running direction of the transport belt.

[0007] As a preferred solution, the clamping member includes a slide, which is horizontally slidably assembled on the slide bar, and a push plate is vertically fixed to the middle of the bottom surface of the slide, and the push plate is pressed against the paddle on the transport belt.

[0008] As a preferred solution, a first motor is horizontally fixed on the top of both ends of the slide, and a orifice plate is fixed on the output end of the first motor, a rod seat is horizontally slidably connected to the orifice plate, and a first spring is horizontally arranged between the rod seat and the orifice plate, and both ends of the first spring are respectively fixed on the adjacent end surfaces of the rod seat and the orifice plate.

[0009] As a preferred embodiment, the brushing member includes a first hole frame, which is vertically fixed on the loading end of the transport frame, and a slide rod frame is vertically slidably inserted through the top surface of the first hole frame, a first hydraulic rod is vertically fixed on the top surface of the first hole frame, and the output end of the first hydraulic rod is fixed on the top surface of the slide rod frame.

[0010] As a preferred solution, an elastic rod is horizontally rotatably connected to the bottom surface of the sliding rod frame, and a plurality of elastic sheets are evenly fixed on the outer circumference of the elastic rod. A rubber tube is sleeved on the outside of the elastic rod, and the inner wall of the rubber tube is fixedly connected to the plurality of elastic sheets on the elastic rod. A grinding tube is sleeved on the outer wall of the rubber tube. A second motor is horizontally fixed to one end of the sliding rod frame, and the output end of the second motor is fixed to the end of the elastic rod.

[0011] As a preferred solution, the grinding member includes a sliding frame, which is vertically fixed above the transport frame, and a grinding motor is vertically arranged inside the sliding frame, and a grinding disc is horizontally fixed at the output end of the grinding motor.

[0012] As a preferred solution, a screw is horizontally rotatably connected on the top surface of the sliding frame, and a third motor is horizontally fixed at one end of the sliding frame, and the output end of the third motor is fixed to the end of the screw, a screw barrel slider is horizontally fixed on the top surface of the grinding motor, and the screw barrel slider is horizontally slidably assembled on the top surface of the sliding frame, a screw tube is horizontally fixed on the top surface of the screw barrel slider, and the screw tube of the screw barrel slider is through-connected with the screw thread.

[0013] As a preferred embodiment, the pickling parts include a liquid storage cylinder, which is vertically fixed on the top surface of the transport rack, and a pipe is vertically connected and fixed on the bottom surface of the liquid storage cylinder, a suction pump is connected to the pipe of the liquid storage cylinder, and a spray plate is horizontally fixed at the bottom end of the pipe of the liquid storage cylinder, a liquid drop box is horizontally arranged on the lower side of the spray plate, and the bottom end of the liquid drop box is fixed on the transport rack.

[0014] As a preferred solution, a second hole frame is horizontally fixed on one side of the liquid storage cylinder, and a scraper is vertically slidably arranged below the second hole frame, a vertical rod is vertically fixed on the top surface of the scraper, and the vertical rod slides through the second hole frame, and multiple second springs are vertically fixed between the second hole frame and the scraper.

[0015] As a preferred embodiment, the cleaning part includes a brush bar mesh cylinder, which is horizontally rotatably connected to the rear side of the transport frame, and a spray rod is horizontally inserted in the brush bar mesh cylinder, and the spray rod is horizontally fixed on the front side of the transport frame, a water collecting box is horizontally arranged below the brush bar mesh cylinder, and the water collecting box is fixed on the transport frame, a fourth motor is horizontally fixed on the rear side of the transport frame, and the output end of the fourth motor is fixed to the end of the brush bar mesh cylinder.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: during use, the molybdenum substrate that needs to be polished is squeezed and clamped by the clamping member to keep it stable, and then the clamping member clamping the molybdenum substrate is horizontally slid and assembled on the slide bar of the transport frame of the transport member, and the transport motor on the transport frame is started during use, and the transport motor drives the transport roller on the transport frame to rotate, and the tension drives the transport belt to run, and the paddle on the transport belt is used to paddle the clamping member on the transport frame to slide horizontally, and pass through the brushing member, the polishing member, the pickling member and the cleaning member in sequence, and the molybdenum substrate on the clamping member is successively completed, the impurity removal, polishing, pickling and cleaning processes are completed, and then the cleaned molybdenum substrate slides out of the clamping member, and the surface of the molybdenum substrate is fully processed by multiple processes. The polishing method of multiple processes can remove the oxide layer on multiple layers of the surface of the molybdenum substrate, and the surface of the molybdenum substrate is completely polished by multiple processes, thereby improving the surface treatment effect of the molybdenum substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of a molybdenum substrate grinding device for multi-station processing; Figure 2 It is a schematic diagram of the exploded structure of a molybdenum substrate grinding device for multi-station processing; Figure 3 It is a schematic structural diagram of a transport part in a disassembled state in an embodiment of a molybdenum substrate grinding device for multi-station processing; Figure 4 It is a schematic structural diagram of a clamping member in a disassembled state in an embodiment of a molybdenum substrate grinding device for multi-station processing; Figure 5 It is a schematic structural diagram of a brushing member in a disassembled state in an embodiment of a molybdenum substrate grinding device for multi-station processing; Figure 6 It is a schematic structural diagram of a grinding piece in a disassembled state in an embodiment of a molybdenum substrate grinding device for multi-station processing; Figure 7 It is a schematic diagram of the structure of the pickled part in the decomposed state in the embodiment of the molybdenum substrate grinding device for multi-station processing; Figure 8 It is a schematic structural diagram of a cleaning part in a disassembled state in an embodiment of a molybdenum substrate grinding device for multi-station processing.

[0018] In the figure: 1, transport member; 11, transport frame; 12, transport belt; 13, dial plate; 14, slide bar; 2, clamping member; 21, slide frame; 22, push plate; 23, first motor; 24, orifice plate; 25, rod seat; 26, first spring; 3, brushing member; 31, first orifice frame; 32, slide bar frame; 33, first hydraulic rod; 34, elastic rod; 35, rubber cylinder; 36, grinding cylinder; 37, second motor ; 4. Grinding parts; 41. Sliding frame; 42. Screw slider; 43. Grinding motor; 44. Grinding disc; 45. Screw; 46. Third motor; 5. Pickling parts; 51. Liquid storage cylinder; 52. Spray plate; 53. Suction pump; 54. Liquid drop box; 55. Second hole frame; 56. Scraper; 57. Second spring; 6. Cleaning parts; 61. Brush bar net cylinder; 62. Spray rod; 63. Water collection box; 64. Fourth motor. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0021] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0022] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0023] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0024] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0025] like Figures 1 to 5As shown, a multi-station processing molybdenum substrate grinding device includes a transport member 1, a clamping member 2, a brushing member 3, a grinding member 4, a pickling member 5 and a cleaning member 6. The transport member 1 includes a transport frame 11, and the transport frame 11 is symmetrically horizontally rotatably connected with a transport roller, and the transport roller of the transport frame 11 is tensioned with a transport belt 12, and a plurality of paddles 13 are evenly and vertically fixed on the outer wall of the transport belt 12. Both sides of the top surface of the transport frame 11 are horizontally fixed with a slide bar 14, and a plurality of clamping members 2 are provided, and a plurality of clamping members 2 are horizontally slidably assembled on the slide bar 14. The transport frame 11 is sequentially provided with a brushing member 3, a grinding member 4, a pickling member 5 and a cleaning member 6 along the running direction of the transport belt 12. During use, the molybdenum substrate to be polished is squeezed and clamped by the clamping member 2 to keep it stable, and then the clamped molybdenum substrate is The clamping part 2 of the molybdenum substrate is assembled on the slide bar 14 of the transport frame 11 of the transport part 1 for horizontal sliding. During use, the transport motor on the transport frame 11 is started, and the transport motor drives the transport roller on the transport frame 11 to rotate, and the tension drives the transport belt 12 to run. The paddle 13 on the transport belt 12 is used to paddle the clamping part 2 on the transport frame 11 to slide horizontally through the brushing part 3, the grinding part 4, the pickling part 5 and the cleaning part 6 in sequence, and the molybdenum substrate on the clamping part 2 is successively completed, the impurity removal, grinding, pickling and cleaning processes, and then the cleaned molybdenum substrate slides out of the clamping part 2, and the surface of the molybdenum substrate is fully processed by multiple processes. The grinding method of multiple processes can remove the oxide layer on multiple layers of the surface of the molybdenum substrate, and the surface of the molybdenum substrate is completely polished by multiple processes, thereby improving the surface treatment effect of the molybdenum substrate.

[0026] In one embodiment, Figure 2 and 4 As shown, the clamping member 2 includes a slide 21, which is assembled on the slide bar 14 for horizontal sliding, and a push plate 22 is vertically fixed to the middle of the bottom surface of the slide 21, and the push plate 22 is pressed against the paddle plate 13 on the conveying belt 12, and a first motor 23 is horizontally fixed to the top of both ends of the slide 21, and a hole plate 24 is fixed to the output end of the first motor 23, a rod seat 25 is horizontally slidably connected to the hole plate 24, and a first spring 26 is horizontally arranged between the rod seat 25 and the hole plate 24, and the two ends of the first spring 26 are respectively fixed to the adjacent end surfaces of the rod seat 25 and the hole plate 24, and the use The molybdenum substrate to be surface treated is placed horizontally in the slide 21 of the clamping member 2, and the rod seats 25 on both sides of the molybdenum substrate slide horizontally in the orifice plate 24 to squeeze the first spring 26 to deform. The deformation force of the first spring 26 pushes the rod seat 25 to slide horizontally in the orifice plate 24, and the rod seat 25 slides horizontally in the orifice plate 24 to clamp and extrude the molybdenum substrate. When switching to the other side for surface treatment later, the first motor 23 is started to drive the orifice plate 24 to deflect and rotate, and the molybdenum substrate is driven to switch to the other end face for surface processing, which effectively ensures the comprehensiveness of the surface grinding treatment of the molybdenum substrate.

[0027] In one embodiment, Figure 2 and5 As shown, the brushing member 3 includes a first hole frame 31, the first hole frame 31 is vertically fixed on the feeding end of the transport frame 11, and a sliding rod frame 32 is vertically slidably inserted and inserted on the top surface of the first hole frame 31, a first hydraulic rod 33 is vertically fixed on the top surface of the first hole frame 31, and the output end of the first hydraulic rod 33 is fixed on the top surface of the sliding rod frame 32, an elastic rod 34 is horizontally rotatably connected to the bottom surface of the sliding rod frame 32, and a plurality of elastic sheets are evenly fixed on the outer circumferential surface of the elastic rod 34, a rubber tube 35 is sleeved on the outside of the elastic rod 34, and the inner wall of the rubber tube 35 is fixedly connected to the plurality of elastic sheets on the elastic rod 34, a grinding tube 36 is sleeved on the outer wall of the rubber tube 35, and one end of the sliding rod frame 32 is horizontally rotated. A second motor 37 is fixed, and the output end of the second motor 37 is fixed to the end of the elastic rod 34. When the surface of the molybdenum substrate is subjected to impurity removal treatment during use, the first hydraulic rod 33 on the first hole frame 31 is started to extend and push the slide frame 32 to slide vertically on the first hole frame 31, driving the grinding cylinder 36 on the bottom surface of the slide frame 32 to press against the molybdenum substrate. The second motor 37 is started to drive the elastic rod 34 to rotate on the bottom surface of the slide frame 32, and the multiple elastic sheets on the outer surface of the elastic rod 34 are deformed to support the deformation of the rubber cylinder 35, pushing the grinding cylinder 36 to press against the outer surface of the molybdenum substrate, thereby providing a pressing force on the grinding cylinder 36 to ensure the dust removal effect of impurities on the surface of the molybdenum substrate, and removing impurities on the surface of the molybdenum substrate in advance.

[0028] In one embodiment, Figure 2 and 6 As shown, the grinding member 4 includes a sliding frame 41, which is vertically fixed above the transport frame 11, and a grinding motor 43 is vertically arranged inside the sliding frame 41, a grinding disc 44 is horizontally fixed to the output end of the grinding motor 43, a screw 45 is horizontally rotatably connected to the top surface of the sliding frame 41, and a third motor 46 is horizontally fixed to one end of the sliding frame 41, and the output end of the third motor 46 is fixed to the end of the screw 45, a screw barrel slider 42 is horizontally fixed to the top surface of the grinding motor 43, and the screw barrel slider 42 is horizontally slidably assembled on the top surface of the sliding frame 41, and the top of the screw barrel slider 42 A screw tube is fixed horizontally on the surface, and the screw tube of the screw barrel slider 42 is threadedly connected with the screw rod 45. During use, in order to grind the surface of the molybdenum substrate, the grinding motor 43 is started to drive the grinding disc 44 to rotate, and the rotating grinding disc 44 is pressed against the surface of the molybdenum substrate for grinding. Then the third motor 46 is started to drive the screw rod 45 to rotate, and the screw 45 drives the screw tube on the screw barrel slider 42, driving the screw barrel slider 42 to slide horizontally on the top surface of the sliding frame 41, thereby horizontally moving the grinding disc 44 to press against the surface of the molybdenum substrate for grinding, thereby ensuring the uniformity of the grinding of the molybdenum substrate.

[0029] In one embodiment, Figure 2 and 7As shown, the pickling part 5 includes a liquid storage cylinder 51, which is vertically fixed on the top surface of the transport frame 11, and a pipeline is vertically connected and fixed on the bottom surface of the liquid storage cylinder 51, a suction pump 53 is connected to the pipeline of the liquid storage cylinder 51, and a spray plate 52 is horizontally fixed to the bottom end of the pipeline of the liquid storage cylinder 51, a liquid drop box 54 is horizontally arranged on the lower side of the spray plate 52, and the bottom end of the liquid drop box 54 is fixed on the transport frame 11, a second hole frame 31 is horizontally fixed to one side of the liquid storage cylinder 51, and a scraper 56 is vertically slidably arranged below the second hole frame 31, a vertical rod is vertically fixed to the top surface of the scraper 56, and the vertical rod slides through the second hole frame 31, and the second hole frame 31 is arranged. A plurality of second springs 57 are vertically fixed between the hole frame 31 and the scraper 56. When the surface of the molybdenum substrate is treated during use, pickling liquid is added to the liquid storage cylinder 51, and the suction pump 53 on the pipeline is started to drive the pickling liquid in the liquid storage cylinder 51 into the spray plate 52. The pickling liquid is sprayed on the surface of the molybdenum substrate to treat and purify the surface of the molybdenum substrate. Then, the scraper 56 slides vertically on the second hole frame 31. Under the deformation force of the plurality of second springs 57, the scraper 56 is pushed to press against the surface of the molybdenum substrate to ensure that the pickling liquid on the surface of the molybdenum substrate is scraped off, and the irregular substances on the surface are dissolved through chemical reaction, thereby obtaining a smooth and bright effect.

[0030] In one embodiment, Figure 2 and 8 As shown, the cleaning part 6 includes a brush bar net cylinder 61, which is horizontally rotatable and connected to the rear side of the transport frame 11, and a spray rod 62 is horizontally inserted in the brush bar net cylinder 61, and the spray rod 62 is horizontally fixed on the front side of the transport frame 11, and a water receiving box 63 is horizontally arranged below the brush bar net cylinder 61, and the water receiving box 63 is fixed on the transport frame 11, and a fourth motor 64 is horizontally fixed to the rear side of the transport frame 11, and the output end of the fourth motor 64 is fixed to the end of the brush bar net cylinder 61. In use, in order to remove impurities on the surface of the molybdenum substrate, the spray rod 62 is connected to the external water supply pipeline, and then water is sprayed into the brush bar net cylinder 61 through the spray rod 62, and the fourth motor 64 on the transport frame 11 is started to drive the brush bar net cylinder 61 to rotate, and the sprayed water is sprayed outward through the brush bar net cylinder 61, and then the brush bar net cylinder 61 rotates the brush bar on the outer wall to clean the impurities on the surface of the molybdenum substrate, thereby ensuring the cleanliness of the molybdenum substrate surface.

[0031] In this embodiment, the molybdenum substrate to be surface treated is horizontally placed in the slide 21 of the clamping member 2 during use, and the rod seats 25 on both sides of the molybdenum substrate are squeezed to slide horizontally in the orifice plate 24, squeezing the first spring 26 to deform. The deformation force of the first spring 26 pushes the rod seat 25 to slide horizontally in the orifice plate 24, and the rod seat 25 slides horizontally in the orifice plate 24 to clamp and extrude the molybdenum substrate. When switching to the other side for surface treatment later, the first motor 23 is started to drive the orifice plate 24 to deflect and rotate, driving the molybdenum substrate to switch to the other end face for surface processing, and the transport motor on the transport frame 11 is started. The transport motor drives the transport roller on the transport frame 11 to rotate, and the tension belt is tightened. The transport belt 12 is driven to run, and the paddle 13 on the transport belt 12 is used to paddle the clamping member 2 on the transport frame 11 to slide horizontally and pass through the brushing member 3 in sequence. When the surface of the molybdenum substrate is subjected to impurity removal treatment, the first hydraulic rod 33 on the first hole frame 31 is started to extend and push the slide frame 32 to slide vertically on the first hole frame 31, driving the grinding cylinder 36 on the bottom surface of the slide frame 32 to press against the molybdenum substrate, and the second motor 37 is started to drive the elastic rod 34 to rotate on the bottom surface of the slide frame 32, and the multiple elastic sheets on the outer surface of the elastic rod 34 are deformed to support the rubber cylinder 35 to deform, pushing the grinding cylinder 36 to press against the outer surface of the molybdenum substrate, thereby providing a pressing force for the grinding cylinder 36 To ensure the dust removal effect of impurities on the surface of the molybdenum substrate, the grinding unit 4 starts the grinding motor 43 to drive the grinding disc 44 to rotate, and the rotating grinding disc 44 is pressed against the surface of the molybdenum substrate for grinding treatment, and then the third motor 46 is started to drive the screw 45 to rotate, and the screw 45 drives the screw tube on the screw barrel slider 42, driving the screw barrel slider 42 to slide horizontally on the top surface of the sliding frame 41, so that the grinding disc 44 is moved horizontally to press against the surface of the molybdenum substrate for grinding treatment, and the pickling unit 5 adds pickling liquid to the liquid storage cylinder 51, and starts the suction pump 53 on the pipeline to drive the pickling liquid in the liquid storage cylinder 51 into the spray plate 52, and the pickling liquid is sprayed on the surface of the molybdenum substrate to perform the grinding treatment on the surface of the molybdenum substrate. After treatment and purification, the scraper 56 slides vertically on the second hole frame 31, and under the deformation force of multiple second springs 57, the scraper 56 is pushed to press against the surface of the molybdenum substrate. The cleaning part 6 connects the spray rod 62 to the external water supply pipeline, and then the water is sprayed into the brush bar mesh cylinder 61 through the spray rod 62. The fourth motor 64 on the transport frame 11 is started to drive the brush bar mesh cylinder 61 to rotate, and the sprayed water is sprayed outward through the brush bar mesh cylinder 61, and then the brush bar mesh cylinder 61 rotates the brush bar on the outer wall to clean the impurities on the surface of the molybdenum substrate. The molybdenum substrate on the clamping part 2 is completed in sequence, and the impurity removal, grinding, pickling and cleaning processes are completed, and then the cleaned molybdenum substrate slides out of the clamping part 2.

[0032] The above are preferred implementation modes of the present invention. Those skilled in the art to which the present invention belongs can also change and modify the above implementation modes. Therefore, the present invention is not limited to the above specific implementation modes. Any obvious improvements, substitutions or modifications made by those skilled in the art on the basis of the present invention belong to the protection scope of the present invention.

Claims

1. A multi-station molybdenum substrate polishing device, characterized in that: The invention comprises a transport part (1), a clamping part (2), a brushing part (3), a grinding part (4), a pickling part (5) and a cleaning part (6), wherein the transport part (1) comprises a transport frame (11), wherein transport rollers are symmetrically connected to the transport frame (11) for horizontal rotation, and a transport belt (12) is tensionedly connected to the transport rollers of the transport frame (11), a plurality of paddles (13) are evenly and vertically fixed on the outer wall of the transport belt (12), and slide bars (14) are horizontally fixed on both sides of the top surface of the transport frame (11), a plurality of clamping parts (2) are provided, and a plurality of clamping parts (2) are horizontally slidably assembled on the slide bar (14), and the transport frame (11) is provided with a brushing part (3), a grinding part (4), a pickling part (5) and a cleaning part (6) in sequence along the running direction of the transport belt (12).

2. The multi-station molybdenum substrate polishing device according to claim 1 is characterized in that: The clamping member (2) comprises a slide (21), the slide (21) being assembled on the slide bar (14) in a horizontal sliding manner, and a push plate (22) being vertically fixed in the middle of the bottom surface of the slide (21), the push plate (22) being pressed against a shift plate (13) on the transport belt (12).

3. The multi-station molybdenum substrate polishing device according to claim 2, characterized in that: A first motor (23) is horizontally fixed to the top of both ends of the slide (21), and a hole plate (24) is fixed to the output end of the first motor (23), a rod seat (25) is horizontally slidably connected to the hole plate (24), and a first spring (26) is horizontally arranged between the rod seat (25) and the hole plate (24), and both ends of the first spring (26) are respectively fixed to the adjacent end surfaces of the rod seat (25) and the hole plate (24).

4. The multi-station molybdenum substrate polishing device according to claim 1, characterized in that: The brushing member (3) comprises a first hole frame (31), the first hole frame (31) is vertically fixed on the feeding end of the transport frame (11), and a slide rod frame (32) is vertically slidably inserted through the top surface of the first hole frame (31), a first hydraulic rod (33) is vertically fixed on the top surface of the first hole frame (31), and the output end of the first hydraulic rod (33) is fixed on the top surface of the slide rod frame (32).

5. The multi-station molybdenum substrate polishing device according to claim 3 is characterized in that: An elastic rod (34) is horizontally rotatably connected to the bottom surface of the slide rod frame (32), and a plurality of elastic sheets are evenly fixed on the outer circumferential surface of the elastic rod (34). A rubber tube (35) is sleeved on the outside of the elastic rod (34), and the inner wall of the rubber tube (35) is fixedly connected to the plurality of elastic sheets on the elastic rod (34). A grinding tube (36) is sleeved on the outer wall of the rubber tube (35). A second motor (37) is horizontally fixed to one end of the slide rod frame (32), and the output end of the second motor (37) is fixed to the end of the elastic rod (34).

6. The multi-station molybdenum substrate polishing device according to claim 1, characterized in that: The grinding member (4) comprises a sliding frame (41), the sliding frame (41) being vertically fixed above the transport frame (11), and a grinding motor (43) being vertically arranged inside the sliding frame (41), and a grinding disc (44) being horizontally fixed at the output end of the grinding motor (43).

7. The multi-station molybdenum substrate polishing device according to claim 6, characterized in that: A screw rod (45) is horizontally rotatably connected on the top surface of the sliding frame (41), and a third motor (46) is horizontally fixed to one end of the sliding frame (41), and the output end of the third motor (46) is fixed to the end of the screw rod (45). A screw barrel slider (42) is horizontally fixed to the top surface of the grinding motor (43), and the screw barrel slider (42) is horizontally slidably assembled on the top surface of the sliding frame (41). A screw tube is horizontally fixed to the top surface of the screw barrel slider (42), and the screw tube of the screw barrel slider (42) is threadedly connected to the screw rod (45).

8. The multi-station molybdenum substrate polishing device according to claim 1, characterized in that: The pickling part (5) comprises a liquid storage cylinder (51), the liquid storage cylinder (51) is vertically fixed on the top surface of the transport frame (11), and a pipeline is vertically connected and fixed on the bottom surface of the liquid storage cylinder (51), a suction pump (53) is connected to the pipeline of the liquid storage cylinder (51), and a spray plate (52) is horizontally fixed at the bottom end of the pipeline of the liquid storage cylinder (51), a liquid drop box (54) is horizontally arranged on the lower side of the spray plate (52), and the bottom end of the liquid drop box (54) is fixed on the transport frame (11).

9. The multi-station molybdenum substrate polishing device according to claim 8, characterized in that: A second hole frame (31) is horizontally fixed on one side of the liquid storage cylinder (51), and a scraper (56) is vertically slidably arranged below the second hole frame (31), a vertical rod is vertically fixed on the top surface of the scraper (56), and the vertical rod slides through the second hole frame (31), and a plurality of second springs (57) are vertically fixed between the second hole frame (31) and the scraper (56).

10. The multi-station molybdenum substrate polishing device according to claim 1, characterized in that: The cleaning member (6) comprises a brush bar net cylinder (61), the brush bar net cylinder (61) being horizontally rotatably connected to the rear side of the transport frame (11), a spray rod (62) being horizontally inserted into the brush bar net cylinder (61), the spray rod (62) being horizontally fixed to the front side of the transport frame (11), a water receiving box (63) being horizontally arranged below the brush bar net cylinder (61), and the water receiving box (63) being fixed to the transport frame (11), a fourth motor (64) being horizontally fixed to the rear side of the transport frame (11), and an output end of the fourth motor (64) being fixed to an end of the brush bar net cylinder (61).

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