Transfer robot teaching system and transfer robot teaching method

Abstract

The invention provides a teaching system of a transfer robot and a teaching method of the transfer robot. Provided is a teaching system for a transfer robot, which is suitable for efficiently performing teaching work. The present invention is provided with: a vertical articulated vertical arm mechanism; a rotating member rotating about an axis extending in the x-direction; a horizontal articulated horizontal arm mechanism supported by the rotating member; a hand supported by the horizontal arm mechanism and provided with a detection sensor; and a control device that detects a target by means of the detection sensor, and teaches the position of the hand using the detection result, the target having: an end edge positioned on the y-direction y1 side and on the z-direction z1 side; and an end edge located at an end on the y-direction y2 side and on the z-direction z1 side and separated from the end edge by a distance L1, and the control device adjusts the angle around the central axis, the y-direction position, and the z-direction position of the hand on the basis of the distance L1 and a rotation angle at which the hand is rotated around the central axis until at least one of the end edges is detected.

Description

Technical Field

[0001] The present disclosure relates to a teaching system for a transport robot and a teaching method for the transport robot. Background Art

[0002] In the manufacturing process of semiconductor substrates, liquid crystal substrates, etc., multiple substrates are stored in multiple layers in a substrate transport container called a box, and the box is transported to a process device or an inspection device to process and inspect the substrates in the box. In addition, in the process device and the inspection device, a transport robot is used as an industrial robot that stores substrates in the transport box or takes out substrates from the box. The operation for the transport robot to store substrates in the box or take out substrates from the box needs to be taught in advance by the operator through a teaching operation.

[0003] There is a problem that the teaching operation takes a lot of time. The slots for storing each substrate in the box are very narrow and there is not much extra space. In addition, sometimes the inside of the box cannot be seen from outside the opening surface. In this case, the transport robot is located in front of the opening surface, so it is extremely difficult to see the inside of the box. The operator needs to rely on his own eyes and intuition in manual operation to operate the transport robot to perform the action of putting the substrate in / out of the narrow slot to perform teaching.

[0004] Patent document 1 discloses a structure in which a protrusion provided on a fixture is detected by an object detection sensor provided on a hand, and teaching is performed based on the detection result. According to such a structure, manual teaching by an operator is not required, and the time spent on teaching can be shortened. However, due to the structure of the handling robot, it is difficult to efficiently perform teaching in the teaching method described in patent document 1.

[0005] Prior Art Literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Publication No. 2015-153809 Summary of the invention

[0008] The present disclosure has been made based on such circumstances, and a main object of the present disclosure is to provide a teaching system for a transfer robot that is suitable for performing teaching work efficiently.

[0009] In order to solve the above-mentioned problems, the present disclosure adopts the following technical means.

[0010] The teaching system of the handling robot provided by the first mode of the present disclosure comprises: a vertical arm mechanism, which moves along an in-plane direction orthogonal to a horizontal first direction and is of a vertical multi-joint type; a first rotating member, which is supported to be able to rotate around a first rotating axis extending along the first direction relative to the vertical arm mechanism; a horizontal arm mechanism, which is supported on the first rotating member and is of a horizontal multi-joint type; a hand, which is supported on the horizontal arm mechanism and is provided with an object detection sensor; and a control device, which moves the hand and detects a detection target through the object detection sensor, and uses the detection result to teach the position of the hand, wherein the detection target has: a first An end edge is located on one side of a horizontal second direction orthogonal to the first direction and on one side of a third direction orthogonal to the first direction and the second direction; and a second end edge is located on the other side of the second direction and on one side of the third direction, and is away from the first end edge by a first distance, and the control device adjusts the angle of the hand around the central axis, the position of the hand in the second direction, and the position of the hand in the third direction based on the first distance and the rotation angle of the hand around the central axis extending along the first direction until at least either the first end edge or the second end edge is detected.

[0011] In a preferred embodiment, the control device performs the following operations: moves the hand to the other side of the third direction until the first end edge is detected and records it as the first position, records the first rotation angle of the hand obtained by rotating the hand from the first position around the center axis until the second end edge is detected, moves the hand a second distance from the first position to the other side of the second direction, records the second rotation angle of the hand obtained by rotating the hand around the center axis until the second end edge is detected, and adjusts the angle of the hand around the center axis, the position of the hand in the second direction, and the position of the hand in the third direction based on the first distance, the second distance, the first rotation angle, and the second rotation angle.

[0012] In another preferred embodiment, the control device performs the following operations: moves the hand to the other side of the third direction until the first end edge is detected, moves the hand to one side of the third direction a third distance and records it as the second position, records the third rotation angle of the hand obtained by rotating the hand from the second position around the center axis until the first end edge is detected, records the fourth rotation angle of the hand obtained by rotating the hand from the second position around the center axis until the second end edge is detected, and adjusts the angle of the hand around the center axis, the position of the hand in the second direction, and the position of the hand in the third direction according to the first distance, the third distance, the third rotation angle, and the fourth rotation angle.

[0013] In a preferred embodiment, the detection target is in the shape of a cuboid.

[0014] In the teaching method of a handling robot provided by the second embodiment of the present invention, the handling robot comprises: a vertical arm mechanism, which moves along an in-plane direction orthogonal to a horizontal first direction and is a vertical multi-joint type; a first rotating member, which is supported to be able to rotate around a first rotating axis extending along the first direction relative to the vertical arm mechanism; a horizontal arm mechanism, which is supported on the first rotating member and is a horizontal multi-joint type; and a hand, which is supported on the horizontal arm mechanism and is provided with an object detection sensor, so that the hand moves, and at the same time, a detection target is detected by the object detection sensor, and the position of the hand is taught using the detection result, wherein the detection target has: a first end edge, which is located on one side of a horizontal second direction orthogonal to the first direction and on one side of a third direction orthogonal to the first direction and the second direction; and a second end edge, which is located on the other side of the second direction The hand is on one side, and the end on one side of the third direction is a first distance away from the first end edge. The teaching method of the handling robot includes the following steps: moving the hand to the other side of the third direction until the first end edge is detected and recorded as the first position; recording a first rotation angle of the hand from the first position around a central axis extending along the first direction until the second end edge is detected; moving the hand from the first position to the other side of the second direction a second distance; recording a second rotation angle of the hand around the central axis until the second end edge is detected; and adjusting the angle of the hand around the central axis, the position of the hand in the second direction, and the position of the hand in the third direction according to the first distance, the second distance, the first rotation angle, and the second rotation angle.

[0015] In the teaching method of a handling robot provided by the third embodiment of the present invention, the handling robot comprises: a vertical arm mechanism, which moves along an in-plane direction orthogonal to a horizontal first direction and is a vertical multi-joint type; a first rotating member, which is supported to be able to rotate around a first rotating axis extending along the first direction relative to the vertical arm mechanism; a horizontal arm mechanism, which is supported on the first rotating member and is a horizontal multi-joint type; and a hand, which is supported on the horizontal arm mechanism and is provided with an object detection sensor, so that the hand moves, and at the same time, a detection target is detected by the object detection sensor, and the position of the hand is taught using the detection result, and the detection target has: a first end edge, which is located on one side of a horizontal second direction orthogonal to the first direction and on one side of a third direction orthogonal to the first direction and the second direction; and a second end edge, which is located in the second direction The hand is on the other side and the end on one side of the third direction is a first distance away from the first end edge. The teaching method of the transport robot includes the following steps: moving the hand to the other side of the third direction until the first end edge is detected; moving the hand to one side of the third direction a third distance and recording it as the second position; recording the third rotation angle of the hand rotating from the second position around the central axis extending along the first direction until the first end edge is detected; recording the fourth rotation angle of the hand rotating from the second position around the central axis until the second end edge is detected; and adjusting the angle of the hand around the central axis, the position of the hand in the second direction and the position of the hand in the third direction according to the first distance, the third distance, the third rotation angle and the fourth rotation angle.

[0016] -Effects of the Invention-

[0017] According to the teaching system of the handling robot involved in the present disclosure, in a handling robot having a structure including a vertical arm mechanism, a first rotating member and a horizontal arm mechanism, the hand can be efficiently adjusted in the second direction, the third direction within a plane including the second direction and the third direction, and the rotation direction around an axis along the first direction.

[0018] Other features and advantages of the present disclosure will become more apparent from the following detailed description with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic front view showing an example of a transfer robot constituting the teaching system of the transfer robot according to the present disclosure.

[0020] Figure 2 It is shown Figure 1 A perspective view of the transport robot shown.

[0021] Figure 3 It is a perspective view showing an example of the arrangement of detection targets.

[0022] Figure 4 It is a perspective view showing the positional relationship between the detection target and the hand.

[0023] Figure 5 is a block diagram showing control of the transfer robot.

[0024] Figure 6 This is a flowchart for explaining the teaching process.

[0025] Figure 7 This is a diagram for explaining a first example of the yz direction and x-axis rotation direction adjustment processing.

[0026] Figure 8 This is a flowchart showing a first example of the yz direction and x-axis rotation direction adjustment process.

[0027] Fig. 9 This is a diagram for explaining the procedure of calculating the offset amount in the yz direction and the offset angle in the x-axis rotation direction.

[0028] Fig.10 This is a diagram for explaining the procedure of calculating the offset amount in the yz direction and the offset angle in the x-axis rotation direction.

[0029] Fig.11 This is a diagram for explaining the procedure of calculating the offset amount in the yz direction and the offset angle in the x-axis rotation direction.

[0030] Fig.12 This is a diagram for explaining an example of the x-direction and z-axis rotation direction adjustment processing.

[0031] Fig.13 This is a diagram for explaining a second example of the yz direction and x-axis rotation direction adjustment processing.

[0032] Fig.14 This is a flowchart showing a second example of the yz direction and x-axis rotation direction adjustment process.

[0033] Fig.15 This is a diagram for explaining the procedure of calculating the offset amount in the yz direction and the offset angle in the x-axis rotation direction.

[0034] -Description of Reference Numerals-

[0035] A1: handling robot; 1: vertical arm mechanism; 2: first rotating member; 3: horizontal arm mechanism; 4, 4A, 4B: hands; 5: object detection sensor; 6: control device; 93: detection target; 931: first end edge; 932: second end edge; Ox: first rotating axis; Cx: center axis; L1: first distance; L2: second distance; L3: third distance; θ1: first rotation angle; θ2: second rotation angle; θ3: third rotation angle; θ4: fourth rotation angle. DETAILED DESCRIPTION

[0036] Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the drawings.

[0037] The terms "first" and "second" in the present disclosure are used simply as labels and are not necessarily intended to give a ranking to these objects.

[0038] Figure 1 This is a schematic front view showing an example of a transfer robot constituting the teaching system of the transfer robot according to the present disclosure. Figure 1 The transfer robot A1 shown in the figure performs the following operations, for example: Figure 3 ), take out the multiple layers of substrates stored in the box 8 and transport them to the loading lock chamber arranged on the side opposite to the box 8, or discharge the substrates that have been processed in the processing chamber through the loading lock chamber and return them to the box 8.

[0039] The transfer robot A1 includes a vertical arm mechanism 1 , a first rotating member 2 , a horizontal arm mechanism 3 , a hand 4 , a control device 6 , a drive mechanism 71 , and an input unit 72 .

[0040] In the example illustrated in the present embodiment, the x direction corresponds to the "first direction" of the present disclosure, and the y direction corresponds to the "second direction" of the present disclosure. The x direction and the y direction are orthogonal to each other, and are both directions along the horizontal plane. The z direction is a direction orthogonal to the x direction and the y direction, and is a direction corresponding to the vertical direction when the transport robot A1 is placed in a given transport room (not illustrated), etc., and is corresponding to the "third direction" of the present disclosure. In the following description, the upper side of the z direction is appropriately referred to as the "z1 side of the z direction", and the lower side of the z direction is appropriately referred to as the "z2 side of the z direction". The z1 side of the z direction is equivalent to the "one side of the third direction" of the present disclosure, and the z2 side of the z direction is equivalent to the "other side of the third direction" of the present disclosure. In addition, one side of the x direction is appropriately referred to as the "x1 side of the x direction", and the other side of the x direction is appropriately referred to as the "x2 side of the x direction". One side of the y direction is appropriately referred to as the "y1 side of the y direction", and the other side of the y direction is appropriately referred to as the "y2 side of the y direction". The y1 side in the y direction corresponds to “one side in the second direction” in the present disclosure, and the y2 side in the y direction corresponds to “the other side in the second direction” in the present disclosure.

[0041] The vertical arm mechanism 1 is a vertical multi-joint arm mechanism that moves in a plane direction orthogonal to the horizontal x-direction, and is composed of, for example, a plurality of arms that are rotatably connected. In the illustrated example, the vertical arm mechanism 1 includes a first vertical arm 11 and a second vertical arm 12. The first vertical arm 11 extends in a plane formed by the y-direction and the z-direction, and is supported on a fixed base 10. Specifically, the first vertical arm 11 is supported so that its base end can rotate relative to the fixed base 10 around a first horizontal axis O1 extending in the x-direction. The second vertical arm 12 extends in a plane formed by the y-direction and the z-direction, and is supported on the first vertical arm 11. Specifically, the second vertical arm 12 is supported so that its base end can rotate at the front end of the first vertical arm 11 around a second horizontal axis O2 extending in the x-direction. In addition, the structure of the vertical arm mechanism 1 is not limited to the illustrated example.

[0042] The first rotating member 2 is supported by the second vertical arm 12 (vertical arm mechanism 1 ). Specifically, the first rotating member 2 is supported at the front end of the second vertical arm 12 so as to be rotatable around a first horizontal axis O1 extending in the x direction.

[0043] Although detailed illustration is omitted, for example, the first vertical arm 11 and the second vertical arm 12 are rotated around the first horizontal axis O1 and the second horizontal axis O2 by using a power transmission unit (driving mechanism) such as a conveyor mechanism and a speed reducer, using a motor as a driving source. And, by driving and controlling the above-mentioned motor, the horizontal arm mechanism 3 supported by the vertical arm mechanism 1 via the first rotating member 2 can be moved to the front of the box or the load lock chamber. In addition, the first rotating member 2 is appropriately rotated around the first rotating axis Ox by the driving mechanism not shown. As a result, the horizontal arm mechanism 3 (the first horizontal arm 31 and the second horizontal arm 32 described later) supported by the first rotating member 2 can maintain a horizontal posture.

[0044] The horizontal arm mechanism 3 is a horizontal multi-joint arm mechanism that is supported by the first rotating member 2 and moves in a horizontal plane orthogonal to the z direction (vertical direction). The horizontal arm mechanism 3 is composed of, for example, a plurality of arms that are rotatably connected. In the illustrated example, the horizontal arm mechanism 3 includes a first horizontal arm 31 and a second horizontal arm 32. The first horizontal arm 31 is supported so that its base end can rotate relative to the first rotating member 2 around a first vertical axis V1 extending along the z direction. The second horizontal arm 32 is supported so that its base end can rotate around a second vertical axis V2 extending along the z direction at the front end of the first horizontal arm 31. In the present embodiment, as the second horizontal arm 32, two second horizontal arms 32A and 32B arranged in two layers, one above the other, are provided. In addition, the structure of the horizontal arm mechanism 3 is not limited to the illustrated example.

[0045] Although detailed illustration is omitted, for example, a motor is used as a driving source, and a power transmission unit (driving mechanism) such as a belt mechanism and a speed reducer is used to rotate the first horizontal arm 31 and the second horizontal arm 32 around the first vertical axis V1 and the second vertical axis V2. Furthermore, by driving and controlling the motor, the hand 4 (hands 4A and 4B) supported by the second horizontal arm 32 (second horizontal arms 32A and 32B) can be moved linearly along the horizontal x direction.

[0046] The hand 4 is supported by the second horizontal arm 32 (horizontal arm mechanism 3). Specifically, the hand 4 is mounted on the second horizontal arm 32. In the present embodiment, the hand 4 includes two hands 4A and 4B arranged in two layers, and these hands 4A and 4B are independently mounted on the two second horizontal arms 32A and 32B.

[0047] The hand 4 (hands 4A, 4B) is a substantially U-shaped plate member having a base 41 connected to the second horizontal arm 32 (second horizontal arm 32A, 32B) and two elongated holding portions 42 extending from the base 41. A thin plate-like substrate (not shown) is supported by the hand 4. The structure of the hand 4 is not limited to the example shown in the figure.

[0048] The handling robot A1 supports the substrate while keeping the hand 4 horizontally, and in this state, raises and lowers the hand 4, rotates and moves it in the xy plane, thereby placing it in the slot 81 in the box 8 (storing the substrate into the box 8), or receiving the substrate placed in the slot 81 through the hand 4 and taking it out of the box 8 (taking out the substrate from the box 8).

[0049] An object detection sensor 5 is provided at the front end of the holding portion 42 of the hand 4. The object detection sensor 5 will be described in detail later.

[0050] The box 8 is constructed as a rectangular box, and at least the side opposite to the handling robot A1 is open as a surface for putting in / out the substrate. On the two side surfaces inside the box 8, a plurality of grooves 81 for storing substrates in multiple layers are protruding inward. The substrates are placed on the upper surfaces of a pair of grooves 81 at the same height position, so as to be stored in the layers at the height position. The spacing of the gap sandwiched by the opposite pair of grooves 81 in the box 8 is set to be longer than the lateral length of the hand 4 (the width of the hand 4) so ​​that the hand 4 can move up and down in the box 8 without interfering with the grooves 81.

[0051] The object detection sensor 5 uses, for example, a fiber optic sensor, which is a type of optical sensor. The fiber optic sensor includes a light projecting portion and a light receiving portion, and the fiber optic sensor is a sensor that senses whether there is an object between the light emitting portion and the light receiving portion by determining whether the light receiving portion receives light from the light projecting portion. Of course, the object detection sensor 5 is not limited to a fiber optic sensor, as long as it is a sensor that can detect the presence or absence of an object. In the following description, the object detection sensor 5 is described as a fiber optic sensor. Figure 4 As shown, a light projecting portion of the object detection sensor 5 is provided at the front end of one holding portion 42 of the hand 4 , and a light receiving portion of the object detection sensor 5 is provided at the front end of the other holding portion 42 .

[0052] The object detection sensor 5 is provided to detect in which slot 81 of the cassette 8 the substrate is placed. Specifically, the transport robot A1 emits light from the light-emitting portion of the object detection sensor 5 toward the light-receiving portion, and simultaneously moves the hand 4 in the up-down direction ( Figure 4 In addition, at this time, the hand 4 is moved so that the edge of the substrate can block the optical axis of the object detection sensor 5 and the hand 4 does not contact the substrate. When no substrate is placed in the groove 81, the light from the light-emitting part is received by the light-receiving part, and when a substrate is placed in the groove 81, the light emitted by the light-emitting part is blocked by the substrate and is not received by the light-receiving part. Therefore, it is possible to detect in which groove 81 the substrate is placed based on the detection result of the object detection sensor 5.

[0053] The control device 6 controls the actions of the vertical arm mechanism 1, the first rotating member 2, and the horizontal arm mechanism 3, and teaches the position of the hand 4. Figure 5 As shown, the control device 6 includes a control unit 61 and a storage unit 62. The control unit 61 controls the driving of the drive mechanism 71 based on the teaching information stored in the storage unit 62. The drive mechanism 71 imparts a given action to the vertical arm mechanism 1, the first rotating member 2, and the horizontal arm mechanism 3. In addition, the control unit 61 controls the driving of the drive mechanism 71 based on the information input from the input unit 72. The input unit 72 is a component (such as a teaching pendant) for the operator to perform teaching operations and manual operations. Furthermore, the control unit 61 automatically performs the teaching operation by assisting the teaching operation based on the teaching processing described later. The teaching processing will be described later. The storage unit 62 stores teaching information for showing the trajectory of the movement of the hand 4. The information obtained in advance through the teaching processing is recorded in the storage unit 62 and used as teaching information.

[0054] In this embodiment, if Figure 3 as well as Figure 4 As shown, the teaching operation is automatically performed using the object detection sensor 5 provided on the hand 4 and the clamp 9 placed on the upper surface of a pair of grooves 81 of the box 8. In the teaching operation automatically performed, the position of the hand 4 is taught so that the hand 4 is adjusted to a given position.

[0055] The jig 9 is, for example, a thin plate-shaped dummy substrate similar to the substrate actually stored in the box 8. The material of the jig 9 is not particularly limited, and it can be the same material as the actual substrate or another material. The jig 9 is placed in the groove 81 of the box 8 for use (see Figure 3 In this embodiment, the shape of the clamp 9 is set to be a rectangular shape that is almost the same as the shape of the inner surface of the box 8, so that the placement position (position on the xy plane) of the clamp 9 in the box 8 does not change. Figure 3 By setting the length of the groove 81 (in the y direction) to be the same as and slightly smaller than the length of the inner surface of the box 8 in the lateral width direction, the fixture 9 can be placed in the groove 81 without causing any deviation in the lateral width direction (y direction) of the placement position of the fixture 9 in the box 8. In addition, by placing the fixture 9 at the innermost position of the groove 81, there is no deviation in the depth direction (x direction) of the placement position of the fixture 9 in the box 8. Thus, the position of the detection target 93 described later in the xy plane can be made a specific position. In addition, the shape of the fixture 9 is not limited to this, as long as the position of the detection target 93 in the xy plane can be determined.

[0056] In the case where the jig 9 is placed in the groove 81 of the cassette 8, the opening side of the cassette 8 ( Figure 3Two cutouts 91 and 92 are provided at the end portion (x1 side) of the x direction as shown. The cutouts 91 and 92 are provided to prevent the holding portion 42 of the hand 4 from contacting the clamp 9. Therefore, as long as this purpose can be met, the shapes of the cutouts 91 and 92 are not limited. In addition, a detection target 93 is provided on the upper surface of the portion between the cutouts 91 and the cutouts 92 of the clamp 9. In the example shown in the figure, the detection target 93 is in the shape of a rectangular parallelepiped. As shown in FIG. Figure 4 As shown, the six surfaces of the detection target 93 face any one of the x1 side in the x direction, the x2 side in the x direction, the y1 side in the y direction, the y2 side in the y direction, the z1 side in the z direction, and the z2 side in the z direction.

[0057] The detection target 93 has a first edge 931 and a second edge 932. The first edge 931 is located at the end on the y1 side of the y direction and the z1 side of the z direction. In the present embodiment, the first edge 931 is a corner formed by the side facing the y1 side of the y direction and the upper surface facing the z1 side of the z direction. The second edge 932 is located at the y2 side of the y direction and the end on the z1 side of the z direction. In the present embodiment, the second edge 932 is a corner formed by the side facing the y2 side of the y direction and the upper surface facing the z1 side of the z direction. The second edge 932 is separated from the first edge 931 by a given first distance L1. In addition, the shape of the detection target 93 is not limited to a rectangular parallelepiped shape, as long as the first edge 931 and the second edge 932 can be determined.

[0058] Next, a teaching process for automatically performing a teaching operation in the present embodiment will be described.

[0059] Figure 6 1 is a flowchart for explaining the teaching process performed by the control device 6. For example, when the operator instructs the teaching process from the input unit 72, the control device 6 (control unit 61) starts the teaching process. In the teaching process, the positions in the x-direction, y-direction, and z-direction, and the x-axis rotation direction and z-axis rotation direction are adjusted. The teaching process includes the yz direction and x-axis rotation direction adjustment process (S1), and the x-direction and z-axis rotation direction adjustment process (S2).

[0060] <Yz direction and x-axis rotation direction adjustment process - Example 1>

[0061] Figure 7 It is a diagram for illustrating the first example of the adjustment processing in the yz direction and the x-axis rotation direction, and is a schematic diagram showing the positional relationship between the object detection sensor 5 provided on the hand 4 and the detection target 93 when viewed along the x direction from the x1 side of the x direction toward the x2 side of the x direction. Figure 8This is a flowchart showing an example of the yz direction and x-axis rotation direction adjustment process.

[0062] In the yz direction and x-axis rotation direction adjustment process, first, the hand 4 is arranged on the z1 side in the z direction with respect to the detection target 93 (see Figure 7 (a) Figure 8 Next, the object detection sensor 5 performs detection while the hand 4 is moved toward the z2 side in the z direction. Here, the hand 4 is moved toward the z2 side in the z direction until the first edge 931 of the detection target 93 is detected (see Figure 7 At this time, the optical axis Op of the object detection sensor 5 is blocked by the first edge 931, and the position of the hand 4 is recorded as the first position ( Figure 8 Step S12).

[0063] Next, it is determined whether the detection target 93 is inclined relative to the hand 4 in the clockwise direction or the counterclockwise direction of the x-axis rotation direction ( Figure 8 Step S13). Figure 7 In the example shown, the detection target 93 is tilted in the clockwise direction of the x-axis rotation direction relative to the hand 4. In determining the tilt direction of the detection target 93, the object detection sensor 5 performs detection while the hand 4 is rotated around the center axis Cx. The center axis Cx extends along the x-direction and intersects the optical axis Op connecting the pair of object detection sensors 5 at the center position of the optical axis Op. The action of rotating the hand 4 around the center axis Cx is performed by appropriately driving the vertical arm mechanism 1 and the first rotating member 2 by the driving mechanism 71. Here, the hand 4 is rotated from Figure 7 The hand 4 is rotated clockwise and counterclockwise from the state shown in (b) to determine the tilt direction of the detection target 93. Figure 7 When the object detection sensor 5 is rotated in the clockwise direction (the direction in which the angle between the upper surface of the detection target 93 on the z1 side facing the z direction and the optical axis Op becomes smaller) from the state shown in (b) of FIG. 1 , the optical axis Op of the object detection sensor 5 is temporarily not blocked by the detection target 93, and then the optical axis Op is blocked by the second end edge 932 of the detection target 93. When the optical axis Op of the object detection sensor 5 is set to "OFF" for detecting the detection target 93 when it is not blocked by the detection target 93, and is set to "ON" for detecting the detection target 93 when it is blocked (the same applies to the following description), when the hand 4 is moved from Figure 7 When the hand 4 is rotated clockwise from the state shown in (b), the detection of the detection target 93 in the object detection sensor 5 is switched from ON to OFF to ON. Figure 7When the hand 4 is rotated counterclockwise from the state shown in (b), the optical axis Op of the object detection sensor 5 is always blocked by the detection target 93. Figure 7 When the hand 4 rotates counterclockwise from the state shown in (b), the detection of the detection target 93 in the object detection sensor 5 is always ON. The tilt direction of the detection target 93 relative to the x-axis rotation direction of the hand 4 can be determined by the detection result (ON or OFF) of the object detection sensor 5. And the determination result (the tilt direction of the detection target 93 relative to the x-axis rotation direction of the hand 4) is recorded in the storage unit 62. The tilt direction of the detection target 93 described below determines Figure 7 (c) The rotation direction around the central axis Cx in the subsequent processing (either clockwise or counterclockwise), and the direction around the central axis Cx of the offset angle Δθx described later (either clockwise or counterclockwise). Figure 7 (c) The subsequent steps, such as Figure 7 As shown in FIG. 1 , the case where the detection target 93 is tilted in the clockwise direction relative to the hand 4 is described. On the contrary, the processing of the case where the detection target 93 is tilted in the counterclockwise direction relative to the hand 4 is the same as Figure 7 The state is reversed left and right, and the rotation direction (clockwise and counterclockwise) of the hand 4 around the central axis Cx is also opposite.

[0064] Next, the object detection sensor 5 performs detection while the hand 4 is rotated from the first position around the central axis Cx (see Figure 7 Here, the hand 4 is rotated around the central axis Cx until the second end edge 932 of the detection target 93 is detected, and the rotation angle at this time is recorded as the first rotation angle θ1 in the storage unit 62 ( Figure 8 Step S14). In addition, the unit of angle is degree, which also applies to the following description. Next, the hand 4 is moved from the first position ( Figure 7 (b)) to the y2 side in the y direction by a given second distance L2 (refer to Figure 7 (d) Figure 8 Here, the second distance L2 is a preset size, for example, set to about 1 / 2 of the first distance L1. However, the value of the second distance L2 is not particularly limited.

[0065] Next, the object detection sensor 5 performs detection while rotating the hand 4 around the central axis Cx (see Figure 7Here, the hand 4 is rotated around the central axis Cx until the second end edge 932 of the detection target 93 is detected, and the rotation angle at this time is recorded as the second rotation angle θ2 in the storage unit 62 ( Figure 8 Step S16).

[0066] Next, based on the first distance L1, the second distance L2, the first rotation angle θ1, and the second rotation angle θ2, the yz-direction offset of the hand 4 relative to the reference position Tx of the detection target 93 and the x-axis rotation direction offset angle of the hand 4 relative to the detection target 93 are calculated. Figures 9 to 11 The figure is used to explain the steps of calculating the offset amount (Δy) in the y direction, the offset amount (Δz) in the z direction, and the offset angle (Δθx) in the x-axis rotation direction. The reference position Tx of the detection target 93 is the center position of the first edge 931 and the second edge 932 on the upper surface of the detection target 93.

[0067] exist Fig. 9 In the figure, the detection target 93 and the reference Figure 7 The central axis Cx of the hand 4, the first distance L1 (the distance from the first end edge 931 to the second end edge 932), the second distance L2, the first rotation angle θ1 and the second rotation angle θ2 are indicated, and auxiliary lines and dimension lines are appropriately recorded. Fig. 9 For the dotted triangle, the following relationship between Mathematical Formula 1 and Mathematical Formula 2 holds true for the angle θ11 and the distance L11.

[0068] [Mathematical formula 1]

[0069] θ11=180-(θ1+(180-θ2))

[0070] [Mathematical formula 2]

[0071] L11 sinθ11=L2 sinθ1

[0072]

[0073] Next, in Fig.10 In the figure, focusing on the dotted triangle, for the offset angle Δθx in the x-axis rotation direction, the relationship of the following mathematical formula 3 holds, and for the angle θ12, the relationship of the following mathematical formula 4 holds.

[0074] [Mathematical formula 3]

[0075]

[0076]

[0077] [Formula 4]

[0078] θ12 = 180 - (Δθx + (180 - θ2))

[0079] Next, for Fig.11 the shown angle θ12 and distance L12, according to the cosine theorem, the relationship of the following mathematical formula 5 holds.

[0080] [Mathematical formula 5]

[0081]

[0082]

[0083] If the offset angle Δθx in the x-axis rotation direction and the distance L12 that have been calculated are used, then for the offset Δy in the y direction and the offset Δz in the z direction with respect to the reference position Tx of the detection target 93, they can be calculated as in the following mathematical formula 6.

[0084] [Mathematical formula 6]

[0085] Δz = (L12 - L2)sinΔθx

[0086]

[0087] And, as described above, by the offset angle Δθx in the x-axis rotation direction, the offset Δy in the y direction, and the offset Δz in the z direction calculated based on the first distance L1, the second distance L2, the first rotation angle θ1, and the second rotation angle θ2, the angle (x-axis rotation direction) of the hand 4 around the central axis Cx extending in the x direction, the position of the hand 4 in the y direction (second direction), and the position of the hand 4 in the z direction (third direction) (yz direction) Figure 8 (step S17). Thus, Figure 8 the yz direction and x-axis rotation direction adjustment process shown in the flowchart ends.

[0088] <x-direction and z-axis rotation direction adjustment process>

[0089] Fig.12 is a diagram for explaining an example of the x-direction and z-axis rotation direction adjustment process, and is a schematic diagram showing the positional relationship between the optical axis Op of the object detection sensor 5 provided on the hand 4 and the detection target 93 when viewed along the z direction from the z1 side in the z direction toward the z2 side in the z direction.

[0090] In the x-direction and z-axis rotation direction adjustment process, detection is performed by the object detection sensor 5, and the hand 4 is moved to the x2 side of the x-direction. In this process, the height position of the hand 4 (the position in the z-direction) is set so that the detection target 93 can be detected when the hand 4 is moved along the x-direction. Here, the hand 4 is configured so that the optical axis Op of the object detection sensor 5 is located on the x1 side of the x-direction relative to the detection target 93. Then, the hand 4 detects the detection target 93 through the object detection sensor 5, and then moves to the x2 side of the x-direction until the detection target 93 is no longer detected by the object detection sensor 5. Fig.12 , the position of the optical axis Op at the start of the detection of the detection target 93 is set to the optical axis Op1, and the position of the optical axis Op at the end of the detection of the detection target 93 is set to the optical axis Op2. The x-direction positions (x-coordinates) of the optical axis Op1 and the optical axis Op2 are recorded, and the offset angle (Δθz) of the hand 4 in the z-axis rotation direction relative to the detection target 93 is calculated based on the distance x' in the x-direction between the optical axis Op1 and the optical axis Op2. Here, the detection target 93 is a square with one side being the first distance L1 when viewed from the z-direction. In the absence of an offset in the z-axis rotation direction, the distance x' is the first distance L1. In contrast, Fig.12 As shown, when there is an offset angle Δθz in the z-axis rotation direction, the distance x' can be expressed as x'=L1sinΔθz+L1cosΔθz using the first distance L1 and the offset angle Δθz, and Δθz can be calculated as shown in the following mathematical formula 7.

[0091] In addition, Fig.12 In the example shown, a case where the detection target 93 is tilted in the clockwise direction of the z-axis rotation direction is shown. The determination of the tilt direction of the detection target 93 in the z-axis rotation direction can be performed, for example, by the following steps. The hand 4 is rotated in both the clockwise and counterclockwise directions in the z-axis rotation direction from the position of the optical axis Op (optical axis Op1) at the start of the detection of the detection target 93 described above. When the hand 4 is rotated in the clockwise direction of the z-axis rotation direction, the optical axis Op of the object detection sensor 5 is not blocked by the detection target 93. Therefore, the detection of the detection target 93 by the object detection sensor 5 becomes OFF. On the other hand, when the hand 4 is rotated in the counterclockwise direction of the z-axis rotation direction, the optical axis Op of the object detection sensor 5 is always blocked by the detection target 93. Therefore, the detection of the detection target 93 by the object detection sensor 5 becomes ON. The tilt direction of the detection target 93 in the z-axis rotation direction relative to the hand 4 can be determined by the detection result (ON or OFF) of the object detection sensor 5. Then, the determination result (the tilt direction of the detection target 93 with respect to the z-axis rotation direction of the hand 4 ) is recorded in the storage unit 62 .

[0092] [Mathematical formula 7]

[0093] x'=L1 sinΔθz+L1 cosΔθz

[0094]

[0095]

[0096]

[0097]

[0098]

[0099] By calculating the offset angle Δθz in the z-axis rotation direction based on the first distance L1 and the distance x' as described above, the angle in the z-axis rotation direction of the hand 4 can be adjusted. In addition, for the alignment of the hand 4 in the x direction, the x coordinate of the center position Cp of the detection target 93 can be calculated based on the record of the optical axis Op1 and the distance x', and the x-direction position of the hand 4 can be matched based on the center position Cp. In addition, the center position Cp of the detection target 93 is located at a distance x' / 2 away from the optical axis Op1 to the x2 side in the x direction.

[0100] Next, the operation of this embodiment will be described.

[0101] According to the present embodiment, the teaching operation is automatically performed by the teaching process performed by the control device 6. In the teaching process, the operator performs very few processes by manual operation, and only processes that can be performed simply exist. Therefore, the time spent on the teaching operation can be greatly shortened. In addition, since the object detection sensor provided in the hand of a general handling robot is used, it is not necessary to provide other equipment for the handling robot.

[0102] The transport robot A1 includes a vertical arm mechanism 1, a first rotating member 2, and a horizontal arm mechanism 3. An object detection sensor 5 is provided on a hand 4 supported by the horizontal arm mechanism 3. The hand 4 is moved while detecting a detection target 93 by the object detection sensor 5, and the position of the hand 4 is taught by the control device 6 using the detection result. The detection target 93 includes a first edge 931 located on the y1 side in the y direction and the z1 side in the z direction, and a second edge 932 located on the y2 side in the y direction and the z2 side in the z direction, and separated from the first edge 931 by a first distance L1. The control device 6 adjusts the angle of the hand 4 around the central axis Cx, the position of the hand 4 in the y direction, and the position of the hand 4 in the z direction based on the first distance L1 and the rotation angle until at least one of the first edge 931 and the second edge 932 is detected by rotating the hand 4 around the central axis Cx extending in the x direction. According to such a structure, the hand 4 is moved appropriately in the yz plane while detecting the detection target 93, and the detection result is used to efficiently adjust the y direction, z direction and x-axis rotation direction of the hand 4 in the yz plane.

[0103] In the yz direction and x-axis rotation direction adjustment process in the teaching process of the present embodiment, first, the control device 6 moves the hand 4 to the z2 side in the z direction until the first edge 931 of the detection target 93 is detected and recorded as the first position, and then the first rotation angle θ1 is recorded until the hand 4 is rotated around the central axis Cx until the second edge 932 is detected. Next, the hand 4 is moved from the first position to the y2 side in the y direction by the second distance L2, and then the second rotation angle θ2 is recorded until the hand 4 is rotated around the central axis Cx until the second edge 932 is detected. Then, the angle of the hand 4 around the central axis Cx, the position of the hand 4 in the y direction, and the position of the hand 4 in the z direction are adjusted based on the first distance L1, the second distance L2, the first rotation angle θ1, and the second rotation angle θ2. In this way, the hand 4 is appropriately moved in the yz plane, and the detection target 93 is detected at the same time. The detection result is used to efficiently adjust the y direction, z direction and x-axis rotation direction of the hand 4 in the yz plane. In addition, the movement of the hand 4 in the z direction, the movement in the y direction, and the rotation around the central axis Cx in the yz plane are realized by the cooperation of the vertical arm mechanism 1 and the first rotating member 2.

[0104] In the present embodiment, the detection target 93 is in a rectangular parallelepiped shape. With such a configuration, the structure of the detection target 93 can be simplified, and the first edge 931 and the second edge 932 can be appropriately detected in the teaching process (yz direction and x-axis rotation direction adjustment process).

[0105] <Yz direction and x-axis rotation direction adjustment processing - Example 2>

[0106] Fig.13 It is a diagram for illustrating the second example of the adjustment processing in the yz direction and the x-axis rotation direction, and is a schematic diagram showing the positional relationship between the optical axis Op of the object detection sensor 5 provided on the hand 4 and the detection target 93 when viewed along the x direction from the x1 side of the x direction toward the x2 side of the x direction. Fig.14 This is a flowchart showing an example of the yz direction and x-axis rotation direction adjustment process.

[0107] In the yz direction and x-axis rotation direction adjustment process of this example, first, the hand 4 is arranged on the z1 side of the z direction with respect to the detection target 93 ( Fig.14 Next, the object detection sensor 5 performs detection while the hand 4 is moved toward the z2 side in the z direction. Here, the hand 4 is moved toward the z2 side in the z direction until the first edge 931 of the detection target 93 is detected (see Fig.13 (a) Fig.14 At this time, the optical axis Op of the object detection sensor 5 is blocked by the first edge 931 .

[0108] Next, it is determined whether the detection target 93 is inclined relative to the hand 4 in the clockwise direction or the counterclockwise direction of the x-axis rotation direction ( Fig.14 Step S23). Fig.13 In the example shown, the detection target 93 is tilted in the clockwise direction of the x-axis rotation direction relative to the hand 4. In determining the tilt direction of the detection target 93, the hand 4 is rotated around the central axis Cx while the detection is performed by the object detection sensor 5. Here, the determination of the tilt direction of the detection target 93 is performed by rotating the hand 4 from Fig.13 The hand 4 is rotated in both the clockwise and counterclockwise directions from the state shown in (a). Fig.13 When the hand 4 is rotated in the clockwise direction (the direction in which the angle between the upper surface of the detection target 93 on the z1 side facing the z direction and the optical axis Op becomes smaller) from the state shown in (a) of FIG. 1 , the optical axis Op of the object detection sensor 5 is temporarily not blocked by the detection target 93, and then the optical axis Op is blocked by the second end edge 932 of the detection target 93. Fig.13 When the hand 4 is rotated clockwise from the state shown in (a), the detection of the detection target 93 in the object detection sensor 5 is switched from ON to OFF to ON. Fig.13 When the hand 4 is rotated counterclockwise from the state shown in (a), the optical axis Op of the object detection sensor 5 is always blocked by the detection target 93. Fig.13 When the hand 4 rotates counterclockwise from the state shown in (a), the detection of the detection target 93 in the object detection sensor 5 is always ON. The tilt direction of the detection target 93 relative to the x-axis rotation direction of the hand 4 can be determined by the detection result (ON or OFF) of the object detection sensor 5. And the determination result (the tilt direction of the detection target 93 relative to the x-axis rotation direction of the hand 4) is recorded in the storage unit 62. The tilt direction of the detection target 93 described below determines Fig.13 (b) The rotation direction around the central axis Cx in the subsequent processing (either clockwise or counterclockwise), and the direction around the central axis Cx of the offset angle Δθx described later (either clockwise or counterclockwise). Fig.13 (b) The subsequent steps, such as Fig.13 As shown in FIG. 1 , the case where the detection target 93 is tilted in the clockwise direction relative to the hand 4 is described. On the contrary, the processing of the case where the detection target 93 is tilted in the counterclockwise direction relative to the hand 4 is the same as Fig.13 The state is reversed left and right, and the rotation direction (clockwise and counterclockwise) of the hand 4 around the central axis Cx is also opposite.

[0109] Next, the hand 4 is moved to the z1 side in the z direction by a predetermined third distance L3 (see Fig.13 Here, the third distance L3 is a preset size. The position of the hand 4 at this time is recorded as the second position ( Fig.14 Next, the object detection sensor 5 performs detection while the hand 4 is rotated from the second position around the central axis Cx (see step S24). Fig.13 Here, the hand 4 is rotated around the central axis Cx until the first end edge 931 of the detection target 93 is detected, and the rotation angle at this time is recorded as the third rotation angle θ3 in the storage unit 62 ( Fig.14 Step S25).

[0110] Next, the object detection sensor 5 performs detection while the hand 4 is rotated from the second position around the central axis Cx (see Fig.13 Here, the hand 4 is rotated around the central axis Cx until the second end edge 932 of the detection target 93 is detected, and the rotation angle at this time is recorded as the fourth rotation angle θ4 in the storage unit 62 ( Fig.14 Step S26).

[0111] Next, based on the first distance L1, the third distance L3, the third rotation angle θ3 and the fourth rotation angle θ4, the offset amount of the hand 4 in the yz direction relative to the reference position Tx of the detection target 93 and the offset angle of the hand 4 in the x-axis rotation direction relative to the detection target 93 are calculated. Fig.15 The figure is used to explain the steps of calculating the offset amount (Δy) in the y direction, the offset amount (Δz) in the z direction, and the offset angle (Δθx) in the x-axis rotation direction. The reference position Tx of the detection target 93 is the center position of the first edge 931 and the second edge 932 on the upper surface of the detection target 93.

[0112] exist Fig.15 In (a), the detection target 93 and the reference Fig.13 The central axis Cx of the hand 4, the first distance L1 (the distance from the first end edge 931 to the second end edge 932), the third distance L3, the third rotation angle θ3 and the fourth rotation angle θ4 are represented, and auxiliary lines and dimension lines are appropriately recorded.

[0113] for Fig.15 The distance L21, the third distance L3, and the third rotation angle θ3 shown in (b) of FIG. 8 hold. Also, the third rotation angle θ3, the fourth rotation angle θ4, and the angle θ21 hold. The relationship of the following equation 9 holds.

[0114] [Mathematical formula 8]

[0115] L3=L21sinθ3

[0116]

[0117] [Mathematical formula 9]

[0118] θ21=180-θ3-θ4

[0119] Next, for Fig.15 The angle θ21 and the distance L21 shown in (b), and the angle θ22 and the first distance L1, are related by the following equation 10 based on the sine theorem.

[0120] [Formula 10]

[0121]

[0122]

[0123] The angle θ23 can be expressed using the angle θ21 and the angle θ22 as shown in the following equation 11. Regarding the offset angle Δθx in the x-axis rotation direction, the relationship of equation 11 holds true due to the angle θ23 and the third rotation angle θ3.

[0124] [Mathematical formula 11]

[0125] θ23=180-θ21-θ22

[0126] Δθx=θ23-θ3

[0127] Furthermore, the offset angle Δθx in the x-axis rotation direction can be expressed as shown in the following equation 12 based on equations 9 to 11.

[0128] [Mathematical formula 12]

[0129]

[0130] Next, for Fig.15 The distance L22 shown in (c) can be expressed as shown in the following mathematical formula 13 based on the distance L21 and the third rotation angle θ3.

[0131] [Mathematical formula 13]

[0132] L22=L21cOsθ3

[0133] Next, in Fig.15 In (c), the position coordinates (y coordinate, z coordinate) of the center axis Cx are set to (Y1, Z1), the position coordinates of the first edge 931 are set to (Y2, Z2), and the position coordinates of the reference position Tx are set to (Y3, Z3). In this example, the offset Δy in the y direction and the offset Δz in the z direction of the hand 4 relative to the reference position Tx of the detection target 93 can be calculated by obtaining the differences between the y coordinate and the z coordinate of the center axis Cx of the hand 4 and the reference position Tx of the detection target 93. That is, the offset in the y direction is calculated by Δy=Y3-Y1, and the offset in the z direction is calculated by Δz=Z3-Z1.

[0134] Here, the position coordinates (Y1, Z1) of the center axis Cx and the position coordinates (Y2, Z2) of the first end edge 931 are related by the following mathematical formula 14, and the position coordinates (Y2, Z2) of the first end edge 931 and the position coordinates (Y3, Z3) of the reference position Tx are related by the following mathematical formula 15.

[0135] [Mathematical formula 14]

[0136] Y2=Y1-L22

[0137] Z2=Z1-L3

[0138] [Mathematical formula 15]

[0139]

[0140]

[0141] Next, the offset amount Δy in the y direction can be calculated as shown in the following equation 16 based on the above equations 14, 15, and 13.

[0142] [Formula 16]

[0143]

[0144] In addition, the offset amount Δz in the z direction can be calculated as shown in the following equation 17 based on the above equations 14 and 15.

[0145] [Mathematical formula 17]

[0146]

[0147] Furthermore, as described above, the angle (x-axis rotation direction) of the hand 4 around the central axis Cx extending in the x direction, the position of the hand 4 in the y direction (second direction), and the position (yz direction) of the hand 4 in the z direction (third direction) are adjusted by calculating the offset angle Δθx in the x-axis rotation direction, the offset Δy in the y direction, and the offset Δz in the z direction based on the first distance L1, the third distance L3, the third rotation angle θ3, and the fourth rotation angle θ4 ( Fig.14 Step S27). Thus, Fig.14 The yz direction and x-axis rotation direction adjustment processing shown in the flowchart is completed.

[0148] In the yz direction and x-axis rotation direction adjustment process in the teaching process of this example, first, the control device 6 moves the hand 4 to the z2 side in the z direction until the first edge 931 of the detection target 93 is detected, and then moves the hand 4 to the z1 side in the z direction by the third distance L3 and records it as the second position. Next, the third rotation angle θ3 is recorded until the hand 4 is rotated around the central axis Cx until the first edge 931 is detected. Next, the fourth rotation angle θ4 is recorded until the hand 4 is rotated around the central axis Cx from the second position until the second edge 932 is detected. And, based on the first distance L1, the third distance L3, the third rotation angle θ3, and the fourth rotation angle θ4, the angle of the hand 4 around the central axis Cx, the position of the hand 4 in the y direction, and the position of the hand 4 in the z direction are adjusted. In this way, the hand 4 is appropriately moved in the yz plane while detecting the detection target 93, and the detection result is used to efficiently adjust the hand 4 in the y direction, z direction and x-axis rotation direction in the yz plane.

[0149] The teaching system of the handling robot and the teaching method of the handling robot involved in the present disclosure are not limited to the above-mentioned embodiments. The specific structures of the teaching system of the handling robot and the teaching method of the handling robot involved in the present disclosure can be freely designed and changed in various ways. In the above-mentioned embodiments, the teaching operation is performed using the detection target 93 arranged on the side of the box 8, but the present disclosure is not limited to this. For example, the teaching operation can also be performed using the detection target 93 arranged on the side of the load lock chamber.

Claims

1. A teaching system for a handling robot, comprising: The vertical arm mechanism moves along the in-plane direction orthogonal to the horizontal first direction and is a vertical multi-joint type; a first rotating member supported so as to be rotatable relative to the vertical arm mechanism about a first rotating axis extending in the first direction; A horizontal arm mechanism, supported by the first rotating member, of a horizontal multi-joint type; a hand, supported by the horizontal arm mechanism, provided with an object detection sensor; and A control device moves the hand, detects the detection target through the object detection sensor, and uses the detection result to teach the position of the hand, The teaching system of the handling robot is characterized in that: The detection target has: a first edge located on one side of a horizontal second direction perpendicular to the first direction and on one side of a third direction perpendicular to the first direction and the second direction; and a second end edge, located on the other side of the second direction and an end on one side of the third direction, being separated from the first end edge by a first distance, The control device adjusts the angle of the hand around the central axis, the position of the hand in the second direction, and the position of the hand in the third direction based at least on the first distance and the rotation angle of the hand around the central axis extending along the first direction until at least either the first end edge or the second end edge is detected.

2. The teaching system of the handling robot according to claim 1, characterized in that: The control device performs the following operations: The hand is moved to the other side of the third direction until the first edge is detected and recorded as the first position, recording a first rotation angle of the hand from the first position to the detection of the second edge around the central axis, moving the hand from the first position to the other side of the second direction by a second distance, recording a second rotation angle obtained by rotating the hand around the central axis until the second end edge is detected, The angle of the hand around the central axis, the position of the hand in the second direction, and the position of the hand in the third direction are adjusted according to the first distance, the second distance, the first rotation angle, and the second rotation angle.

3. The teaching system of the handling robot according to claim 1, characterized in that: The control device performs the following operations: moving the hand to the other side of the third direction until the first edge is detected, The hand is moved a third distance to one side of the third direction and recorded as the second position, recording a third rotation angle of the hand from the second position to the detection of the first edge around the central axis, recording a fourth rotation angle obtained by rotating the hand from the second position around the central axis until the second edge is detected, The angle of the hand around the central axis, the position of the hand in the second direction, and the position of the hand in the third direction are adjusted according to the first distance, the third distance, the third rotation angle, and the fourth rotation angle.

4. The teaching system for a handling robot according to any one of claims 1 to 3, characterized in that: The detection target is in the shape of a cuboid.

5. A teaching method for a transport robot, the transport robot comprising: The vertical arm mechanism moves along the in-plane direction orthogonal to the horizontal first direction and is a vertical multi-joint type; a first rotating member supported so as to be rotatable relative to the vertical arm mechanism about a first rotating axis extending in the first direction; A horizontal arm mechanism, supported by the first rotating member, of a horizontal multi-joint type; and The hand is supported by the horizontal arm mechanism and is provided with an object detection sensor. The teaching method of the handling robot moves the hand, detects the detection target through the object detection sensor, and teaches the position of the hand using the detection result. The teaching method of the transport robot is characterized in that: The detection target has: a first edge located on one side of a horizontal second direction perpendicular to the first direction and on one side of a third direction perpendicular to the first direction and the second direction; and a second end edge, located on the other side of the second direction and an end on one side of the third direction, being separated from the first end edge by a first distance, The teaching method of the handling robot comprises the following steps: moving the hand to the other side of the third direction until the first edge is detected and recorded as a first position; recording a first rotation angle of the hand from the first position around a central axis extending in the first direction until the second edge is detected; Moving the hand from the first position to the other side of the second direction by a second distance; recording a second rotation angle obtained by rotating the hand around the central axis until the second end edge is detected; and The angle of the hand around the central axis, the position of the hand in the second direction, and the position of the hand in the third direction are adjusted according to the first distance, the second distance, the first rotation angle, and the second rotation angle.

6. A teaching method for a transport robot, the transport robot comprising: The vertical arm mechanism moves along the in-plane direction orthogonal to the horizontal first direction and is a vertical multi-joint type; a first rotating member supported so as to be rotatable relative to the vertical arm mechanism about a first rotating axis extending in the first direction; A horizontal arm mechanism, supported by the first rotating member, of a horizontal multi-joint type; and The hand is supported by the horizontal arm mechanism and is provided with an object detection sensor. The teaching method of the handling robot moves the hand, detects the detection target through the object detection sensor, and teaches the position of the hand using the detection result. The teaching method of the transport robot is characterized in that: The detection target has: a first edge located on one side of a horizontal second direction perpendicular to the first direction and on one side of a third direction perpendicular to the first direction and the second direction; and a second end edge, located on the other side of the second direction and an end on one side of the third direction, being separated from the first end edge by a first distance, The teaching method of the handling robot comprises the following steps: moving the hand toward the other side of the third direction until the first edge is detected; moving the hand a third distance to one side of the third direction and recording it as a second position; recording a third rotation angle obtained by rotating the hand from the second position around a central axis extending in the first direction until the first end edge is detected; recording a fourth rotation angle obtained by rotating the hand from the second position around the central axis until the second edge is detected; and The angle of the hand around the central axis, the position of the hand in the second direction, and the position of the hand in the third direction are adjusted according to the first distance, the third distance, the third rotation angle, and the fourth rotation angle.

Images