Automatic ring replacing device

Abstract

The invention discloses an automatic ring replacing device which is applied to feeding and discharging of a primary ring and a secondary ring on die bonding equipment. Comprising a rack, a material box, a first lifting driving mechanism, a mechanical transfer system and a temporary storage disc; the material box is used for storing primary and secondary rings, the material box is arranged on the rack, and a discharging opening is formed in one side of the material box; the first lifting driving mechanism is used for driving the material box to move in the vertical direction; and the mechanical transfer system and the temporary storage disc are arranged on the outer side of the discharge port. According to the automatic ring replacing device, the temporary placing disc is arranged outside the discharging opening of the material box and used for temporarily placing the empty child and mother rings taken down from the blue film tensioning mechanism, so that a mechanical transfer system does not need to place the empty child and mother rings into the material box at a time; according to the technical scheme of the utility model, after the empty primary and secondary rings are placed on the temporary placing disc, the primary and secondary rings carrying the wafers can be taken and placed on the blue film tensioning mechanism, so that the feeding speed of the primary and secondary rings is effectively improved, the neutral period of the die bonding equipment is shortened, and the die bonding working efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor production, and in particular to an automatic ring changing device. Background Art

[0002] At present, the conventional ring changing device of the crystal bonding equipment is a stacked ring changing device. After several mother-and-child rings carrying wafers are stacked to form a pile of materials, they are transported to the material box of the ring changing device by a robot or external equipment. Then the mechanical gripper of the ring changing device takes the mother-and-child rings and places them on the blue film tensioning mechanism of the crystal bonding equipment in sequence. The conventional ring changing device usually takes the empty mother-and-child rings on the blue film tensioning mechanism and places them in the material box first, and then takes out the mother-and-child rings carrying wafers from the material box and places them on the blue film tensioning mechanism. This process takes a lot of time, resulting in a long idle period of the crystal bonding equipment, which is not conducive to improving the efficiency of crystal bonding. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide an automatic ring changing device capable of improving the working efficiency of crystal bonding.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is: an automatic ring changing device, which is applied to loading and unloading of mother and child rings on a die bonding device, comprising: frame; A material box, used for storing the mother-child ring, the material box is arranged on the frame, and a material outlet is arranged on one side of the material box; A first lifting drive mechanism, used for driving the material box to move in a vertical direction; A mechanical transfer system is arranged outside the discharge port; The temporary placement tray is arranged outside the discharge port.

[0005] The beneficial effects of the present invention are as follows: the automatic ring changing device is provided with a temporary placement plate outside the discharge port of the material box for temporarily placing the empty mother-and-child rings taken from the blue film tensioning mechanism, so that the mechanical transfer system does not need to place the empty mother-and-child rings into the material box at one time. It only needs to place the empty mother-and-child rings on the temporary placement plate and then the mother-and-child rings carrying the wafer can be taken and placed on the blue film tensioning mechanism, which effectively improves the loading speed of the mother-and-child rings, reduces the idle period of the crystal bonding equipment, and is beneficial to improving the efficiency of the crystal bonding work. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] Figure 1 The structure of the automatic ring changing device of the first embodiment of the present invention is shown in FIG. Figure 1 ; Figure 2 The structure of the automatic ring changing device of the first embodiment of the present invention is shown in FIG. Figure 2 .

[0007] Description of labels: 1. Mother-child ring; 11. Dovetail notch; 2. Rack; 3. Material box; 31. Material outlet; 4. A first lifting drive mechanism; 5. Mechanical transfer system; 51. Loading assembly; 511. Second lifting drive mechanism; 512. Rotation drive mechanism; 513. Mechanical arm; 5131. Suction nozzle; 52. Removal assembly; 521. Linear conveying mechanism; 522. Claw; 6. Temporarily place the disk; 7. Transfer station; 8. Photoelectric sensor. DETAILED DESCRIPTION

[0008] In order to explain the technical content, achieved objectives and effects of the present invention in detail, the following is an explanation in combination with the implementation modes and the accompanying drawings.

[0009] Please refer to Figure 1 and Figure 2 , an automatic ring changing device, used for loading and unloading of the mother-child ring 1 on the crystal bonding equipment, comprising: Rack 2; A material box 3, used for storing the mother-child ring 1, the material box 3 is arranged on the frame 2, and a material outlet 31 is arranged on one side of the material box 3; A first lifting drive mechanism 4, used for driving the material box 3 to move in a vertical direction; A mechanical transfer system 5 is arranged outside the discharge port 31; The temporary placement tray 6 is arranged outside the discharge port 31 .

[0010] The working principle of the present invention is briefly described as follows: when the mother-and-child ring 1 needs to be replaced, the mechanical transfer system 5 removes the empty mother-and-child ring 1 from the blue film tensioning mechanism and places it on the temporary tray 6, and the first lifting drive mechanism 4 drives the material box 3 to lift so that the mother-and-child ring 1 carrying the chip is aligned with the discharge port 31, and then the mechanical transfer system 5 takes the mother-and-child ring 1 loaded with the chip out of the material box 3 and places it on the blue film tensioning mechanism. When the crystal bonding equipment is performing the crystal bonding process, the first lifting drive mechanism 4 drives the material box 3 to lift so that the empty slot of the material box 3 is aligned with the discharge port 31, and the mechanical transfer system 5 places the empty mother-and-child ring 1 on the temporary tray 6 into the empty slot of the material box 3.

[0011] From the above description, it can be seen that the beneficial effects of the present invention are: the automatic ring changing device is provided with a temporary placement tray 6 outside the discharge port 31 of the material box 3 for temporarily placing the empty mother-and-child rings 1 removed from the blue film tensioning mechanism, so that the mechanical transfer system 5 does not need to place the empty mother-and-child rings 1 into the material box 3 at one time. It only needs to place the empty mother-and-child rings 1 on the temporary placement tray 6 and then the mother-and-child rings 1 carrying the chip can be taken and placed on the blue film tensioning mechanism, which effectively improves the loading speed of the mother-and-child rings 1, shortens the idle period of the crystal bonding equipment, and is beneficial to improving the efficiency of the crystal bonding work.

[0012] Furthermore, the first lifting drive mechanism 4 is a motor screw module.

[0013] It can be seen from the above description that the first lifting drive mechanism 4 can be modified from standard parts, which is easy to obtain and use, and is conducive to reducing production costs.

[0014] Furthermore, a transfer table 7 is also provided on the frame 2, and the mechanical transfer system 5 includes a loading component 51 and a removal component 52. The transfer table 7 is arranged on the outside of the discharge port 31, and the removal component 52 is used to transfer the mother and child rings 1 between the material box 3 and the transfer table 7. The loading component 51 and the temporary placement plate 6 are respectively arranged on both sides of the end of the transfer table 7 away from the material box 3.

[0015] From the above description, it can be seen that the loading component 51 and the removing component 52 respectively perform multiple actions in the loading and unloading process of the mother-and-child ring 1. In the process of the loading component 51 removing the empty mother-and-child ring 1 from the blue film tensioning mechanism, the removing component 52 can take the mother-and-child ring 1 carrying the chip from the material box 3 to the transfer table 7 for the loading component 51 to pick up, thereby further improving the loading efficiency of the mother-and-child ring 1.

[0016] Furthermore, the removal assembly 52 includes a linear conveying mechanism 521 and a clamping claw 522 . The linear conveying mechanism 521 is drivingly connected to the clamping claw 522 . The material box 3 and the loading assembly 51 are respectively located at two ends of the linear conveying mechanism 521 .

[0017] It can be seen from the above description that the removal assembly 52 has a simple structure and is easy to manufacture.

[0018] Furthermore, the linear conveying mechanism 521 is a linear motor.

[0019] It can be seen from the above description that the linear conveying mechanism 521 can be modified from standard parts, which is easy to obtain and use, and is conducive to reducing production costs.

[0020] Furthermore, the loading assembly 51 includes a second lifting drive mechanism 511, a rotating drive mechanism 512 and a robotic arm 513. The second lifting drive mechanism 511 is installed at the end of the turntable 7. The second lifting drive mechanism 511 is drivingly connected to the rotating drive mechanism 512. The rotating drive mechanism 512 is drivingly connected to the robotic arm 513.

[0021] As can be seen from the above description, the loading assembly 51 has a simple structure and is easy to manufacture. The rotary drive mechanism 512 is used to drive the mechanical arm 513 to swing so that the mechanical arm 513 moves to the temporary tray 6, the transfer table 7 or the blue film tensioning mechanism, and the second lifting drive mechanism 511 is used to drive the mechanical arm 513 to move up and down so that the mechanical arm 513 is close to or away from the temporary tray 6, the transfer table 7 and the blue film tensioning mechanism.

[0022] Furthermore, the robot arm 513 is provided with a plurality of suction nozzles 5131 .

[0023] It can be seen from the above description that using the suction nozzle 5131 to suck the parent and child ring 1 can avoid scratching or scratching the parent and child ring 1.

[0024] Furthermore, the second lifting drive mechanism 511 is a linear cylinder, an electric push rod, a linear drive motor or a cam mechanism.

[0025] It can be seen from the above description that the type of the second lifting drive mechanism 511 can be selected according to actual use requirements or production conditions.

[0026] Furthermore, the rotation driving mechanism 512 is a rotation motor.

[0027] It can be seen from the above description that the rotation drive mechanism 512 can be modified from standard parts, which is easy to obtain and use, and is conducive to reducing production costs.

[0028] Furthermore, it also includes a photoelectric sensor 8 , which is arranged on one side of the frame 2 and faces the discharge port 31 .

[0029] It can be seen from the above description that the photoelectric sensor 8 is used to identify whether there is a mother-and-child ring 1 inside the discharge port 31 to prevent the automatic ring changing device from idling.

[0030] Please refer to Figure 1 and Figure 2, Embodiment 1 of the present invention is: an automatic ring changing device, which is used for loading and unloading of mother-and-child rings 1 on a crystal bonding device; it includes a frame 2, a material box 3, a first lifting drive mechanism 4, a mechanical transfer system 5 and a temporary tray 6; the material box 3 is used to store mother-and-child rings 1, the material box 3 is arranged on the frame 2, and a discharge port 31 is arranged on one side of the material box 3; the first lifting drive mechanism 4 is used to drive the material box 3 to move in a vertical direction; the mechanical transfer system 5 and the temporary tray 6 are both arranged outside the discharge port 31, and the temporary tray 6 is used to temporarily carry empty mother-and-child rings 1. In this embodiment, the first lifting drive mechanism 4 is a motor screw module. A plurality of slots are arranged in the material box 3 for storing mother-and-child rings 1, and the plurality of slots are arranged in a vertical direction.

[0031] A transfer table 7 is also provided on the frame 2. The mechanical transfer system 5 includes a loading component 51 and a removal component 52. The transfer table 7 is arranged outside the discharge port 31. The removal component 52 is used to transfer the parent and child rings 1 between the material box 3 and the transfer table 7. The loading component 51 and the temporary placement plate 6 are respectively arranged on both sides of one end of the transfer table 7 away from the material box 3.

[0032] The removal assembly 52 includes a linear conveying mechanism 521 and a clamping claw 522. The linear conveying mechanism 521 is connected to the clamping claw 522 by driving. The material box 3 and the loading assembly 51 are respectively located at the two ends of the linear conveying mechanism 521. In this embodiment, the linear conveying mechanism 521 is a linear motor. The clamping claw 522 includes a driving member and two clamping arms. The ends of the two clamping arms that are away from each other are the opening and closing ends. The driving member is used to drive the opening and closing ends of the two clamping arms to move closer to or away from each other. The opening and closing ends of the clamping arms are provided with a cylindrical clamping block protruding upward, and the clamping block is rotatable relative to the clamping arm around its own axis. The side of the mother-child ring 1 is provided with a dovetail notch 11 corresponding to the clamping claw 522. When it is necessary to remove the component 52 to drive the mother-and-child ring 1, the driving member drives the two open and closed ends of the claw 522 to approach each other, and the linear conveying mechanism 521 drives the claw 522 to move toward the mother-and-child ring 1 until the open and closed end of the claw 522 enters the dovetail notch 11, and then the driving member drives the two open and closed ends of the claw 522 away from each other to make the claw 522 and the mother-and-child ring 1 clamped and cooperated. At this time, the linear conveying mechanism 521 can drive the mother-and-child ring 1 to move through the claw 522 to exit or enter the discharge port 31.

[0033] The loading assembly 51 includes a second lifting drive mechanism 511, a rotating drive mechanism 512 and a mechanical arm 513. The second lifting drive mechanism 511 is installed at the end of the transfer table 7. The second lifting drive mechanism 511 is connected to the rotating drive mechanism 512 by driving, and the rotating drive mechanism 512 is connected to the mechanical arm 513 by driving. A plurality of suction nozzles 5131 are arranged on the mechanical arm 513. The rotating drive mechanism 512 is used to drive the mechanical arm 513 to swing so that the mechanical arm 513 moves to the temporary tray 6, the transfer table 7 or the top of the blue film tensioning mechanism. The second lifting drive mechanism 511 is used to drive the mechanical arm 513 to move up and down so that the mechanical arm 513 is close to or away from the temporary tray 6, the transfer table 7 and the blue film tensioning mechanism. In this embodiment, the second lifting drive mechanism 511 is a linear cylinder, and the rotating drive mechanism 512 is a rotating motor. In other embodiments, it is also feasible that the second lifting drive mechanism 511 is set as an electric push rod, a linear drive motor or a cam mechanism.

[0034] The automatic ring changing device further comprises a photoelectric sensor 8 , which is disposed on one side of the frame 2 and faces the discharge port 31 .

[0035] The working principle of the present invention is briefly described as follows: when the mother-and-child ring 1 needs to be replaced, the second lifting drive mechanism 511 and the rotating drive mechanism 512 cooperate to drive the mechanical arm 513 to remove the empty mother-and-child ring 1 from the blue film tensioning mechanism and place it on the temporary storage plate 6. At the same time, the first lifting drive mechanism 4 drives the material box 3 to lift so that the mother-and-child ring 1 carrying the wafer is aligned with the discharge port 31. The linear conveying mechanism 521 drives the claw 522 to enter the discharge port 31. The claw 522 is engaged with the mother-and-child ring 1. The linear conveying mechanism 521 pulls the mother-and-child ring 1 loaded with the wafer to the transfer table 7 through the claw 522, and the claw 522 is separated from the mother-and-child ring 1. 12 cooperates to drive the robot arm 513 to take the mother-and-child ring 1 carrying the chip from the turntable 7 to the blue film tensioning mechanism; the second lifting drive mechanism 511 and the rotating drive mechanism 512 cooperate to drive the robot arm 513 to take the empty mother-and-child ring 1 from the temporary storage plate 6 to the turntable 7 and then reset it. At the same time, the first lifting drive mechanism 4 drives the material box 3 to lift so that the empty slot of the material box 3 is aligned with the discharge port 31; the linear conveying mechanism 521 drives the claw 522 to approach the empty mother-and-child ring 1, and the claw 522 is engaged with the empty mother-and-child ring 1. The linear conveying mechanism 521 pushes the empty mother-and-child ring 1 into the empty slot of the material box 3 through the claw 522, and the claw 522 is separated from the mother-and-child ring 1, and the removal component 52 is reset.

[0036] To sum up, the automatic ring changing device provided by the present invention is equipped with a temporary placement plate outside the discharge port of the material box for temporarily placing the empty mother-and-child rings removed from the blue film tensioning mechanism, so that the mechanical transfer system does not need to place the empty mother-and-child rings into the material box at one time. It only needs to place the empty mother-and-child rings on the temporary placement plate and then the mother-and-child rings carrying the chip can be taken and placed on the blue film tensioning mechanism, which effectively improves the loading speed of the mother-and-child rings, reduces the idle period of the crystal bonding equipment, and is beneficial to improving the efficiency of the crystal bonding work.

[0037] The above descriptions are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent transformations made using the contents of the present invention's specification and drawings, or directly or indirectly applied in related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. An automatic ring changing device, used for loading and unloading of mother and child rings on a crystal bonding device, characterized in that: include: frame; A material box, used for storing the mother-child ring, the material box is arranged on the frame, and a material outlet is arranged on one side of the material box; A first lifting drive mechanism, used for driving the material box to move in a vertical direction; A mechanical transfer system is arranged outside the discharge port; The temporary placement tray is arranged outside the discharge port.

2. The automatic ring changing device according to claim 1, characterized in that: The first lifting drive mechanism is a motor screw module.

3. The automatic ring changing device according to claim 1, characterized in that: The frame is also provided with a transfer table, and the mechanical transfer system includes a loading assembly and a removal assembly. The transfer table is arranged outside the discharge port, and the removal assembly is used to transfer the parent and child rings between the material box and the transfer table. The loading assembly and the temporary placement plate are respectively arranged on both sides of one end of the transfer table away from the material box.

4. The automatic ring changing device according to claim 3, characterized in that: The removing assembly comprises a linear conveying mechanism and a clamping claw, the linear conveying mechanism is drivingly connected to the clamping claw, and the material box and the loading assembly are respectively located at two ends of the linear conveying mechanism.

5. The automatic ring changing device according to claim 4, characterized in that: The linear conveying mechanism is a linear motor.

6. The automatic ring changing device according to claim 3, characterized in that: The loading assembly includes a second lifting drive mechanism, a rotating drive mechanism and a mechanical arm. The second lifting drive mechanism is installed at the end of the turntable. The second lifting drive mechanism is drivingly connected to the rotating drive mechanism, and the rotating drive mechanism is drivingly connected to the mechanical arm.

7. The automatic ring changing device according to claim 6, characterized in that: The mechanical arm is provided with a plurality of suction nozzles.

8. The automatic ring changing device according to claim 6, characterized in that: The second lifting drive mechanism is a linear cylinder, an electric push rod, a linear drive motor or a cam mechanism.

9. The automatic ring changing device according to claim 6, characterized in that: The rotary drive mechanism is a rotary motor.

10. The automatic ring changing device according to claim 1, characterized in that: It also includes a photoelectric sensor, which is arranged on one side of the frame and faces the discharge port.

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