Integrated three-axis quartz gyroscope and electronics

Through integrated design and integrated circuit technology, the existing three-axis MEMS gyroscopes are solved, and the problems of miniaturization and low space utilization efficiency are achieved, achieving smaller volume, lower power consumption and higher accuracy.

CN119737936APending Publication Date: 2025-04-01BEIJING CHENJING ELECTRONICS
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202411729155.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-11-28
Publication Date
2025-04-01

AI Technical Summary

Technical Problem

Due to the large number of discrete components of the existing three-axis MEMS gyroscopes, the miniaturization is limited, and the size of the single-axis gyroscope of the same model is fixed, making it difficult to make full use of the internal space of the gyroscope.

Method used

It adopts an integrated three-axis quartz gyroscope design, including two horizontal polarity gyroscopes and one vertical polarity gyroscope. Through integrated circuits and hardware-combined board design, efficient use of space is achieved.

Benefits of technology

The three-axis quartz micromechanical gyroscope has been miniaturized, and the volume is reduced to about 3% of the traditional solution. The weight and power consumption are also controlled, while improving the accuracy and environmental adaptability of the gyroscope.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119737936A_ABST
    Figure CN119737936A_ABST
Patent Text Reader

Abstract

The present invention provides an integrated three-axis quartz gyroscope and electronic equipment, which relates to the technical field of gyroscopes, including a first horizontal polarity surface-mount gyroscope, a first gyroscope circuit board, a vertical polarity surface-mount gyroscope, a second gyroscope circuit board, a second horizontal polarity surface-mount gyroscope and a third gyroscope circuit board, wherein the first, second and third gyroscope circuit boards are all integrated circuits; the first horizontal polarity surface-mount gyroscope is electrically connected to the first gyroscope circuit board, the vertical polarity surface-mount gyroscope is electrically connected to the second gyroscope circuit board; the second horizontal polarity surface-mount gyroscope is electrically connected to the third gyroscope circuit board. The present invention is composed of two horizontal polarity surface-mount gyroscopes and one vertical polarity surface-mount gyroscope. Compared with a traditional three-axis gyroscope, the present invention has a smaller size and is no longer affected by the appearance of a single model surface-mount gyroscope, and the internal space is fully used. The three gyroscope circuit boards all adopt an integrated solution, which is conducive to miniaturized design.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to the field of circuit technology, and in particular to an integrated three-axis quartz gyroscope and electronic equipment. Background Art

[0002] Micro-Electro-Mechanical System (MEMS) is an angular velocity sensor based on the Coriolis effect. Compared with traditional gyroscopes, it has the advantages of small size, light weight, low cost, low power consumption and easy electronic circuit integration. It is widely used in aerospace, automotive electronics, robotics and other fields. MEMS gyroscopes can be mainly divided into ceramic gyroscopes, silicon micro gyroscopes and quartz gyroscopes. With the increase in application occasions, there are higher requirements for the size of MEMS gyroscopes, and miniaturization is an important development trend at present.

[0003] Most existing three-axis MEMS gyroscopes are composed of three single-axis gyroscopes of the same model, and their digital drive circuits and detection circuits are implemented using discrete components. The large number of discrete components limits the miniaturization of the gyroscope. In addition, the size of single-axis gyroscopes of the same model is fixed, making it difficult to fully utilize the internal space of the gyroscope. Summary of the invention

[0004] The present invention provides an integrated three-axis quartz gyroscope and electronic equipment, which solves the defects that the large number of discrete components limits the miniaturization of the gyroscope and the same type of single-axis gyroscope constituting the three-axis gyroscope has a fixed size, making it difficult to fully utilize the internal space of the gyroscope.

[0005] The present invention provides an integrated three-axis quartz gyroscope, comprising a gyroscope housing, wherein a first horizontal polarity surface-mounted gyroscope, a first gyroscope circuit board, a vertical polarity surface-mounted gyroscope, a second gyroscope circuit board, a second horizontal polarity surface-mounted gyroscope and a third gyroscope circuit board are arranged inside the gyroscope housing, wherein the first gyroscope circuit board, the second gyroscope circuit board and the third gyroscope circuit board are all integrated circuits; The first horizontal polarity surface-mounted gyroscope is electrically connected to the first gyroscope circuit board and is used to cooperate in measuring a first horizontal axial temperature and a first horizontal angular velocity; The vertical polarity surface-mount gyroscope is electrically connected to the second gyroscope circuit board for cooperatively measuring vertical axial temperature and vertical angular velocity; The second polarity surface-mount gyroscope is electrically connected to the third gyroscope circuit board for cooperatively measuring a second horizontal axial temperature and a second horizontal angular velocity.

[0006] As an embodiment, the first horizontal polarity surface-mounted gyroscope, the first gyroscope circuit board, the vertical polarity surface-mounted gyroscope and the second gyroscope circuit board are horizontally arranged from top to bottom, and the third gyroscope circuit board and the second horizontal polarity surface-mounted gyroscope are vertically arranged from left to right.

[0007] As an embodiment, a shock absorber is also provided inside the gyroscope housing, and the shock absorber is arranged between the first gyroscope circuit board, the second gyroscope circuit board, the third gyroscope circuit board and the gyroscope housing, and is used to achieve vibration reduction of the first horizontal polarity surface-mounted gyroscope, the second horizontal polarity surface-mounted gyroscope and the vertical polarity surface-mounted gyroscope.

[0008] As an embodiment, the gyroscope housing includes a gyroscope upper cover and a gyroscope structural body, and the vibration damper includes a first vibration damping component, a support plate, a second vibration damping component and a third vibration damping component, the first vibration damping component is arranged between the first gyroscope circuit board and the support plate, the second vibration damping component is arranged between the second gyroscope circuit board and the gyroscope structural body, and the third vibration damping component is arranged between the third gyroscope circuit board and the gyroscope structural body, and the first vibration damping component, the support plate, the second vibration damping component, the third vibration damping component and the gyroscope structural body constitute an integrated vibration damping structure.

[0009] As an embodiment, an opening for accommodating the vertical polarity surface-mounted gyroscope is provided between the first vibration reduction assembly and the supporting plate.

[0010] As an embodiment, the first gyroscope circuit board includes a first power supply chip, a first quartz circuit conditioning chip and a first circuit board, and the first power supply chip, the first quartz circuit conditioning chip and the first horizontal polarity surface-mount gyroscope are all welded and fixed on the first circuit board; the second gyroscope circuit board includes a second power supply chip, a second quartz circuit conditioning chip and a second circuit board, and the second power supply chip, the second quartz circuit conditioning chip and the vertical polarity surface-mount gyroscope are all welded and fixed on the second circuit board; the third gyroscope circuit board includes a third power supply chip, a third quartz circuit conditioning chip and a third circuit board, and the third power supply chip, the third quartz circuit conditioning chip and the second horizontal polarity surface-mount gyroscope are all welded and fixed on the third circuit board.

[0011] As an embodiment, the first quartz circuit conditioning chip, the second quartz circuit conditioning chip and the third quartz circuit conditioning chip are all integrated with an operational amplifier module, resistors and capacitors corresponding to the operational amplifier module, a communication module, resistors and capacitors corresponding to the communication module, a power supply module and resistors and capacitors corresponding to the power supply module.

[0012] As an embodiment, the first horizontal polarity surface-mount gyroscope, the vertical polarity surface-mount gyroscope, and the second horizontal polarity surface-mount gyroscope are all packaged in a leadless chip carrier ceramic tube package.

[0013] As an embodiment, the first gyroscope circuit board, the second gyroscope circuit board and the third gyroscope circuit board are connected via a flexible board.

[0014] The present invention also provides an electronic device, comprising any one of the above-mentioned integrated three-axis quartz gyroscopes.

[0015] The integrated three-axis quartz gyroscope and electronic device provided by the present invention include a gyroscope housing, wherein a first horizontal polarity surface-mount gyroscope, a first gyroscope circuit board, a vertical polarity surface-mount gyroscope, a second gyroscope circuit board, a second horizontal polarity surface-mount gyroscope and a third gyroscope circuit board are arranged inside the gyroscope housing, wherein the first gyroscope circuit board, the second gyroscope circuit board and the third gyroscope circuit board are all integrated circuits; the first horizontal polarity surface-mount gyroscope is electrically connected to the first gyroscope circuit board for cooperating in measuring a first horizontal axial temperature and a first horizontal angular velocity; the vertical polarity surface-mount gyroscope is electrically connected to the second gyroscope circuit board for cooperating in measuring a vertical axial temperature and a vertical angular velocity; the second horizontal polarity surface-mount gyroscope is electrically connected to the third gyroscope circuit board for cooperating in measuring a second horizontal axial temperature and a second horizontal angular velocity. The present invention is composed of two horizontal polarity surface-mounted gyroscopes and one vertical polarity surface-mounted gyroscope. Compared with the traditional three-axis gyroscope, the size is smaller and is no longer affected by the appearance of a single-model single-axis gyroscope, so that the internal space of the three-axis quartz micromechanical gyroscope structure is fully utilized. In addition, the three gyroscope circuit boards all adopt an integrated solution, which is conducive to miniaturized design. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a structural schematic diagram of an existing three-axis gyroscope.

[0018] Figure 2 It is a structural schematic diagram of the horizontal polarity surface-mounted gyroscope provided by the present invention.

[0019] Figure 3 It is a structural schematic diagram of the vertical polarity surface-mounted gyroscope provided by the present invention.

[0020] Figure 4 It is a structural schematic diagram of the integrated three-axis quartz gyroscope provided by the present invention.

[0021] Figure 5 It is a circuit diagram of the integrated three-axis quartz gyroscope provided by the present invention.

[0022] Figure 6 It is a structural schematic diagram of the first gyroscope circuit board provided by the present invention. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations on the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0025] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0026] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0027] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0028] Figure 1 It is a schematic diagram of the structure of an existing three-axis gyroscope. Figure 1 As shown, the existing three-axis quartz gyroscope consists of a three-axis gyroscope structure body 1, a three-axis gyroscope cover 2, a first single-axis gyroscope 3, a second single-axis gyroscope 4, a third single-axis gyroscope 5 and a three-axis gyroscope circuit board 6. The size of a single-axis gyroscope is generally within 16mm×20mm×12mm, and the size of an existing three-axis quartz gyroscope is generally within 87mm×87mm×26mm.

[0029] The existing three-axis gyroscope is mostly composed of three single-axis gyroscopes of the same model. The drive circuit and detection circuit are important measurement and control circuits in MEMS gyroscopes. The existing digital drive circuit and detection circuit are mostly implemented with discrete components, such as discrete analog-to-digital converter (ADC) chips, op amp chips, etc. Its working principle is: the digitally controlled oscillator (NCO) in the ARM main controller outputs a sinusoidal digital drive signal, which is loaded onto the tuning fork after passing through the digital-to-analog converter (DAC). The response of the tuning fork is converted into a voltage signal through the preamplifier, and then converted into a digital signal through the ADC. An external ADC is used to realize signal acquisition at the detection end, and an op amp circuit is used to amplify the signal. MEMS gyroscopes based on this principle have disadvantages such as complex circuits, a large number of component types and quantities, components that are easily affected by environmental factors, weak noise resistance, large size, and high power consumption. In addition, they are limited by the single-axis gyroscope size. The longest side of the single-axis gyroscope limits the size of the existing three-axis gyroscope, and there is no way to effectively utilize the space, making it difficult to miniaturize the existing three-axis MEMS gyroscope.

[0030] Compared with existing discrete circuits, ASIC technology has the advantages of small size, low power consumption, and strong anti-interference. In order to solve the problem of the difficulty in miniaturizing existing MEMS gyroscopes, a miniaturized three-axis silicon micro-electromechanical gyroscope was developed using ASICs. The drive signal is based on the principle of self-excited oscillation, combined with the automatic gain control method, and electrostatic force drive is used to achieve gyroscope resonance, so that the MEMS gyroscope circuit is integrated. However, the performance matching degree between the three axes of the monolithic three-axis micro-electromechanical gyroscope using silicon micro-gyroscope needs to be improved, the process is complex, the processing is difficult, and the anti-vibration performance needs to be optimized.

[0031] The present invention provides an integrated three-axis quartz gyroscope which is different from the principle of a miniaturized three-axis silicon micro-mechanical electromechanical gyroscope, and can solve the defects of the existing three-axis gyroscope, such as difficulty in miniaturization and insufficient space utilization. On this basis, the preferred embodiment provided by the present invention can also solve the defects of the miniaturized three-axis silicon micro-mechanical electromechanical gyroscope, which is described in detail below in conjunction with the accompanying drawings.

[0032] Figure 2 Schematic diagram of the structure of the horizontal polarity surface mounted gyroscope of the present invention. Figure 2 As shown, the present invention provides a horizontal polarity surface-mounted gyroscope, including a horizontal polarity surface-mounted gyroscope upper cover 7, a horizontal polarity surface-mounted gyroscope sensitive structure 8 and a horizontal polarity surface-mounted gyroscope tube shell 9.

[0033] Figure 3Schematic diagram of the structure of the vertical polarity surface mounted gyroscope of the present invention. Figure 3 As shown, the present invention provides a vertical polarity surface-mounted gyroscope, including a vertical polarity surface-mounted gyroscope upper cover 10 , a vertical polarity surface-mounted gyroscope sensitive structure 11 and a vertical polarity surface-mounted gyroscope tube shell 12 .

[0034] The horizontal and vertical polarity surface-mounted gyroscopes of the present invention have been designed with low noise, strong environmental adaptability and integrated design, which reduces noise interference, can adapt to high temperature, strong vibration and other environments, and meet the requirements of high precision and small volume. In addition, the interactive application of two types of single-axis horizontal polarity surface-mounted gyroscopes and vertical polarity surface-mounted gyroscopes can effectively utilize the minimum size of different types of surface-mounted gyroscopes to build a three-axis gyroscope, so that the internal space utilization of the three-axis gyroscope is optimized, ensuring that the three-axis gyroscope is no longer limited by the maximum size of the same type of single-axis gyroscope, which is conducive to the miniaturization of the three-axis gyroscope.

[0035] Figure 4 Schematic diagram of the structure of the integrated three-axis quartz gyroscope provided by the present invention. Figure 4 As shown, the present invention provides an integrated three-axis quartz gyroscope, including a gyroscope housing, wherein a first horizontal polarity surface-mounted gyroscope 14, a first gyroscope circuit board 15, a vertical polarity surface-mounted gyroscope 19, a second gyroscope circuit board 20, a second horizontal polarity surface-mounted gyroscope 25 and a third gyroscope circuit board 24 are provided inside the gyroscope housing, wherein the first gyroscope circuit board 15, the second gyroscope circuit board 20 and the third gyroscope circuit board 24 are all integrated circuits.

[0036] The first horizontal polarity surface-mounted gyroscope 14 is electrically connected to the first gyroscope circuit board 15 for cooperatively measuring a first horizontal axial temperature and a first horizontal angular velocity.

[0037] The vertical polarity surface-mounted gyroscope 19 is electrically connected to the second gyroscope circuit board 20 for cooperatively measuring the vertical axial temperature and the vertical angular velocity.

[0038] The second horizontal polarity surface-mounted gyroscope 25 is electrically connected to the third gyroscope circuit board 24 for cooperatively measuring a second horizontal axial temperature and a second horizontal angular velocity.

[0039] Among them, axial temperature refers to the temperature measured along a specific axis (usually the rotation axis or other symmetry axis of the object). In many cases, the axial temperature distribution is not only related to the position, but also closely related to the motion state of the object. Angular velocity describes the physical quantity of how fast an object rotates around a fixed axis, usually expressed in degrees per second (° / s). The magnitude and direction of the angular velocity determine the rotation state of the object.

[0040] Optionally, the gyroscope housing includes a gyroscope upper cover 13 and a gyroscope structural body 22, and the gyroscope upper cover 13 and the gyroscope structural body 22 form an inner cavity for accommodating and fixing three surface-mounted gyroscopes and circuit boards corresponding to the surface-mounted gyroscopes.

[0041] As an optional embodiment, the first horizontal polarity surface-mounted gyroscope 14, the first gyroscope circuit board 15, the vertical polarity surface-mounted gyroscope 19 and the second gyroscope circuit board 20 are horizontally arranged from top to bottom, and the third gyroscope circuit board 24 and the second horizontal polarity surface-mounted gyroscope 25 are vertically arranged from left to right.

[0042] It can be understood that the present invention is composed of two horizontal polarity surface-mounted gyroscopes and one vertical polarity surface-mounted gyroscope. Compared with a single-axis gyroscope, the present invention has a smaller size and is no longer affected by the appearance of a single-model surface-mounted gyroscope, so that the internal space of the three-axis quartz micromechanical gyroscope structure is fully utilized. In addition, the three gyroscope circuit boards all adopt an integrated solution, which is conducive to miniaturized design.

[0043] Based on the above embodiment, as an optional embodiment, a shock absorber is further provided inside the gyroscope housing, and the shock absorber is arranged between the first gyroscope circuit board 15, the second gyroscope circuit board 20, the third gyroscope circuit board 24 and the gyroscope housing, and is used to achieve vibration reduction of the first horizontal polarity surface-mounted gyroscope 14, the second horizontal polarity surface-mounted gyroscope 25 and the vertical polarity surface-mounted gyroscope 19.

[0044] The vibration damper includes a first vibration damping component 16, a support plate 18, a second vibration damping component 21 and a third vibration damping component 23. The first vibration damping component 16 is arranged between the first gyroscope circuit board 15 and the support plate 18, the second vibration damping component 21 is arranged between the second gyroscope circuit board 20 and the gyroscope structure body 22, and the third vibration damping component 23 is arranged between the third gyroscope circuit board 24 and the gyroscope structure body 22. The first vibration damping component 16, the support plate 18, the second vibration damping component 21, the third vibration damping component 23 and the gyroscope structure body 22 constitute an integrated vibration damping structure.

[0045] Optionally, the first gyroscope circuit board 15 is fixedly connected to the shock absorber by high-strength structural adhesive, and the shock absorber is fixed to the gyroscope housing by the vibration-damping adhesive. The first horizontal polarity surface-mounted gyroscope 14, the first gyroscope circuit board 15, the shock absorber and the gyroscope housing constitute an integrated vibration-damping structure.

[0046] Optionally, the second gyroscope circuit board 20 is fixed to the shock absorber by high-strength structural adhesive, and the shock absorber is fixed to the gyroscope housing by the vibration-damping adhesive. The vertical polarity surface-mounted gyroscope 19, the second gyroscope circuit board 20, the shock absorber and the gyroscope housing constitute an integrated vibration-damping structure.

[0047] Optionally, the third gyroscope circuit board 24 is fixedly connected to the shock absorber by high-strength structural adhesive, and the shock absorber is fixed to the gyroscope housing by the vibration-damping adhesive. The second horizontal polarity surface-mounted gyroscope 25, the third gyroscope circuit board 24, the shock absorber and the gyroscope housing constitute an integrated vibration-damping structure.

[0048] Optionally, the first horizontal polarity surface mount gyroscope 14 is welded on the first gyroscope circuit board 15, the vertical polarity surface mount gyroscope 19 is welded on the second gyroscope circuit board 20, and the second horizontal polarity surface mount gyroscope 25 is welded on the third gyroscope circuit board 24. All three surface mount gyroscopes are quartz MEMS surface mount gyroscopes.

[0049] It is understandable that the traditional three-axis gyroscope still needs to be optimized in terms of vibration reduction. The traditional three-axis gyroscope structure body and the circuit board are mostly rigidly connected. The vibration impact in the external environment will be transmitted to the surface-mounted gyroscope through the traditional three-axis gyroscope structure body, thereby affecting the performance of the surface-mounted gyroscope. The present invention adopts an integrated vibration reduction component design, adds a vibration damper part, realizes the integration of quartz MEMS surface-mounted gyroscope, vibration damper, circuit board and gyroscope structure body 22, three quartz MEMS surface-mounted gyroscopes are welded on the corresponding circuit board, and the circuit board is fixed to the vibration damper through high-strength structural adhesive. The connection between the first vibration damping component 16, the second vibration damping component 21 and the third vibration damping component 23 and the gyroscope structure body 22 is achieved by bonding with a special high-strength structural adhesive, which can not only ensure the vibration reduction performance of the three-axis quartz micromechanical gyroscope, but also ensure the mechanical strength of the overall structure, and improve the internal space utilization rate of the three-axis quartz micromechanical gyroscope structure.

[0050] Based on the above embodiments, as an optional embodiment, the first horizontal polarity surface-mounted gyroscope 14, the vertical polarity surface-mounted gyroscope 19 and the second horizontal polarity surface-mounted gyroscope 25 all adopt a leadless chip carrier ceramic tube package to achieve shielding of external interference signals at the detection end of the quartz tuning fork, thereby separating the detection end circuit containing sensitive signals from the outside world, reducing the impact of the environment, and improving the accuracy, stability and environmental adaptability of the gyroscope.

[0051] In the digital circuit of the quartz gyroscope, the detection end circuit mainly collects, demodulates and filters the weak electrode signal on the detection end of the quartz tuning fork, and then realizes the output of the angular velocity. The detection end has high requirements for signal acquisition accuracy, but the detection signal is easily disturbed by the external environment, resulting in a large error value of the angular velocity output by the detection end circuit. Therefore, the LCC tube shell packaging (the horizontal polarity surface-mounted gyro upper cover 7 and the horizontal polarity surface-mounted gyro shell 9 constitute the horizontal polarity LCC tube shell, and the vertical polarity surface-mounted gyro upper cover 10 and the vertical polarity surface-mounted gyro shell 12 constitute the vertical polarity LCC tube shell) is used to shield the external interference signal of the quartz tuning fork detection end, thereby reducing the impact of the environment and improving the accuracy of the gyroscope. In addition, the LCC tube shell itself has excellent high temperature resistance, corrosion resistance, high strength, and vibration resistance, so that it is not easy to produce cracks, gaps, etc. under different environments, ensuring that the LCC tube shell always maintains the integrity of the structure and the sealing of the cavity under different environmental conditions, and ensuring the environmental adaptability of the three-axis quartz gyroscope under different environmental conditions.

[0052] It is understandable that traditional tube shells are mostly packaged in plastic. The thermal expansion coefficient of plastic packaging does not match, which will cause internal stress and deformation at high temperatures. In addition, its corrosion resistance is poor and its stability is insufficient, which limits the application of gyroscopes in different environments. The LCC tube shell packaging is extremely stable in terms of electrical, thermal, and mechanical properties, and can provide airtight sealing protection for the chip, making it have excellent reliability. The present invention uses LCC tube shell packaging to shield the external interference signal of the quartz tuning fork detection end, thereby reducing the impact of the environment and improving the accuracy, stability, and environmental adaptability of the gyroscope.

[0053] Figure 5 is a circuit diagram of the integrated three-axis quartz gyroscope provided by the present invention, such as Figure 5 As shown, the present invention provides a circuit hard-soft combination board design of an integrated three-axis quartz gyroscope, wherein the second gyroscope circuit board 20 and the first gyroscope circuit board 15 are connected via a first soft board 27; the first gyroscope circuit board 15 and the third gyroscope circuit board 24 are connected via a second soft board 29; and the first gyroscope circuit board 15 and the outlet board 26 are connected via a third soft board 28. Traditional three-axis quartz gyroscopes use multiple independent circuit boards, and different circuit boards need to be connected by welding wires, which increases the difficulty of gyroscope assembly and increases the required space. The three-axis quartz gyroscope circuit board of the present invention uses a hard-soft combination board to connect multi-module circuit boards and corresponding surface-mounted gyroscopes. The three-axis quartz watch movement is connected to the circuit board through different bends of the hard-soft combination board, thereby realizing the orthogonality of the three-axis gyroscope, reducing wire welding, facilitating installation, improving production efficiency, facilitating mass production, reducing the volume of the circuit board, and improving space utilization.

[0054] Figure 6: is a schematic diagram of the structure of the first gyroscope circuit board 15 provided by the present invention, such as Figure 6 As shown, on the basis of the above embodiment, as an optional embodiment, the first gyroscope circuit board 15 includes a first power chip 30, a first quartz circuit conditioning chip 31 and a first circuit board, and the first power chip 30, the first quartz circuit conditioning chip 31 and the first horizontal polarity surface-mount gyroscope 14 are all welded and fixed on the first circuit board; the second gyroscope circuit board 20 includes a second power chip, a second quartz circuit conditioning chip and a second circuit board 20, and the second power chip, the second quartz circuit conditioning chip and the vertical polarity surface-mount gyroscope 19 are all welded and fixed on the second circuit board 20; the third gyroscope circuit board 24 includes a third power chip, a third quartz circuit conditioning chip and a third circuit board 24, and the third power chip, the third quartz circuit conditioning chip and the second horizontal polarity surface-mount gyroscope 25 are all welded and fixed on the third circuit board 24.

[0055] Optionally, the first quartz circuit conditioning chip 31, the second quartz circuit conditioning chip and the third quartz circuit conditioning chip are all integrated with an operational amplifier module, a communication module, a power module and corresponding related resistors and capacitors of the operational amplifier module, the communication module and the power module.

[0056] The quartz tuning fork dedicated demodulation chip integrates the generation of the quartz tuning fork drive end drive signal, the collection of the quartz tuning fork drive end displacement signal, the high-precision output of the quartz tuning fork detection end signal, signal demodulation and signal filtering processing, and other functions, and realizes external communication through the SPI interface. It greatly reduces the number of components, reduces the failure rate caused by the large number and variety of components, and reduces the difficulty of circuit board wiring, reduces the size of the circuit board, and reduces the power consumption of the gyroscope.

[0057] The present invention realizes the acquisition of angular velocity and temperature of three axes through three quartz circuit conditioning chips, and the collected signals are demodulated and transmitted to the CPU main control circuit through SPI communication mode, and the angular velocity and temperature output are realized after digital processing such as filtering and algorithm compensation in the main control chip. It has the advantages of high degree of integration, small size, low power consumption, and little environmental impact, further improves the reliability of the three-axis quartz micromechanical gyroscope, and realizes the miniaturization of the gyroscope.

[0058] It is understandable that the traditional three-axis quartz gyroscope uses discrete components to build the driving end circuit and the detection end circuit to realize the closed-loop control of the driving tuning fork and the angular velocity signal detection function of the gyroscope, which has the defects of complex circuit, large number and variety of components, large environmental impact on the stability of the angular velocity obtained after signal acquisition and demodulation, high space occupancy, and difficulty in miniaturizing the gyroscope. The present invention uses a quartz circuit conditioning chip to integrate an operational amplifier, a power module, a communication module, and related resistors and capacitors, so that the three-axis quartz gyroscope circuit has a high degree of integration, a small size, low power consumption, and little environmental impact.

[0059] As an embodiment, the first gyroscope circuit board, the second gyroscope circuit board and the third gyroscope circuit board are connected via a flexible board. The first gyroscope circuit board, the second gyroscope circuit board and the third gyroscope circuit board are all integrated circuit boards.

[0060] The three gyroscope circuit boards provided by the present invention are connected to the multi-module circuit boards in the form of a soft-hard combination board. The three axial surface-mounted gyroscopes are connected to the circuit boards through different bending of the soft-hard combination boards, thereby realizing the orthogonality of the three-axis gyroscopes, reducing wire welding, facilitating installation, improving production efficiency, and facilitating mass production.

[0061] It is understandable that the traditional three-axis quartz gyroscope uses multiple independent circuit boards, in which case different circuit boards need to be connected by welding wires, which increases the difficulty of gyroscope assembly and increases the required space size. The present invention uses a soft-hard combination board to connect multiple module circuit boards, reducing the volume of the circuit board and the use of wires, and improving space utilization.

[0062] In summary, the integrated three-axis miniaturized quartz gyroscope provided by the present invention is composed of two horizontal polarity surface-mounted gyroscopes and one vertical polarity surface-mounted gyroscope 19, with a size of 23mm×23mm×11mm, a volume reduced to about 3% of the traditional solution, a weight that can be controlled within 30g, and a power consumption that can be controlled within 60mA. Under the same conditions, the traditional three-axis quartz gyroscope and the integrated three-axis miniaturized quartz gyroscope were tested. The test results show that the main technical indicators of the integrated three-axis miniaturized quartz gyroscope meet the requirements, and the angle random wandering is within 0.15° / The nonlinearity and asymmetry of the scale factor are within 100ppm, and the vibration variation is within 20° / h.

[0063] It can be seen that the present invention can meet the performance index requirements of the traditional three-axis quartz gyroscope under the conditions of smaller volume and fewer components. In addition, compared with the three-axis silicon gyroscope solution, the present invention has a simpler process, is easier to operate, has a high pass rate, and has better environmental adaptability.

[0064] The electronic device provided by the present application is described below. The electronic device described below and the integrated three-axis quartz gyroscope described above can refer to each other.

[0065] The present invention also provides an electronic device, comprising any one of the above-mentioned integrated three-axis quartz gyroscopes.

[0066] The electronic device provided by the present invention includes the integrated three-axis quartz gyroscope provided by any of the above embodiments, and has the technical effects corresponding to the integrated three-axis quartz gyroscope, which will not be described in detail.

[0067] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technicians in this field can understand and implement it without paying creative labor.

[0068] Through the description of the above implementation modes, those skilled in the art can clearly understand that each implementation mode can be implemented by means of hardware.

[0069] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An integrated three-axis quartz gyroscope, comprising a gyroscope housing, characterized in that: The gyroscope housing is provided with a first horizontal polarity surface-mounted gyroscope, a first gyroscope circuit board, a vertical polarity surface-mounted gyroscope, a second gyroscope circuit board, a second horizontal polarity surface-mounted gyroscope and a third gyroscope circuit board inside, wherein the first gyroscope circuit board, the second gyroscope circuit board and the third gyroscope circuit board are all integrated circuits; The first horizontal polarity surface-mounted gyroscope is electrically connected to the first gyroscope circuit board and is used to cooperate in measuring a first horizontal axial temperature and a first horizontal angular velocity; The vertical polarity surface-mount gyroscope is electrically connected to the second gyroscope circuit board for cooperatively measuring vertical axial temperature and vertical angular velocity; The second horizontal polarity surface-mounted gyroscope is electrically connected to the third gyroscope circuit board for cooperatively measuring a second horizontal axial temperature and a second horizontal angular velocity.

2. The integrated three-axis quartz gyroscope according to claim 1, characterized in that: The first horizontal polarity surface-mounted gyroscope, the first gyroscope circuit board, the vertical polarity surface-mounted gyroscope and the second gyroscope circuit board are horizontally arranged from top to bottom, and the third gyroscope circuit board and the second horizontal polarity surface-mounted gyroscope are vertically arranged from left to right.

3. The integrated three-axis quartz gyroscope according to claim 2, characterized in that: A vibration damper is also provided inside the gyroscope housing. The vibration damper is provided between the first gyroscope circuit board, the second gyroscope circuit board, the third gyroscope circuit board and the gyroscope housing, and is used to achieve vibration reduction of the first horizontal polarity surface-mounted gyroscope, the second horizontal polarity surface-mounted gyroscope and the vertical polarity surface-mounted gyroscope.

4. The integrated three-axis quartz gyroscope according to claim 3, characterized in that: The gyroscope housing includes a gyroscope upper cover and a gyroscope structural body, the vibration damper includes a first vibration damping component, a support plate, a second vibration damping component and a third vibration damping component, the first vibration damping component is arranged between the first gyroscope circuit board and the support plate, the second vibration damping component is arranged between the second gyroscope circuit board and the gyroscope structural body, the third vibration damping component is arranged between the third gyroscope circuit board and the gyroscope structural body, and the first vibration damping component, the support plate, the second vibration damping component, the third vibration damping component and the gyroscope structural body constitute an integrated vibration damping structure.

5. The integrated three-axis quartz gyroscope according to claim 4, characterized in that: An opening for accommodating the vertical polarity surface-mounted gyroscope is provided between the first vibration reduction assembly and the bearing plate.

6. The integrated three-axis quartz gyroscope according to any one of claims 1 to 4, characterized in that: The first gyroscope circuit board includes a first power supply chip, a first quartz circuit conditioning chip and a first circuit board, and the first power supply chip, the first quartz circuit conditioning chip and the first horizontal polarity surface-mount gyroscope are all welded and fixed on the first circuit board; the second gyroscope circuit board includes a second power supply chip, a second quartz circuit conditioning chip and a second circuit board, and the second power supply chip, the second quartz circuit conditioning chip and the vertical polarity surface-mount gyroscope are all welded and fixed on the second circuit board; the third gyroscope circuit board includes a third power supply chip, a third quartz circuit conditioning chip and a third circuit board, and the third power supply chip, the third quartz circuit conditioning chip and the second horizontal polarity surface-mount gyroscope are all welded and fixed on the third circuit board.

7. The integrated three-axis quartz gyroscope according to claim 6, characterized in that: The first quartz circuit conditioning chip, the second quartz circuit conditioning chip and the third quartz circuit conditioning chip are all integrated with an operational amplifier module, a resistor and a capacitor corresponding to the operational amplifier module, a communication module, a resistor and a capacitor corresponding to the communication module, a power module and a resistor and a capacitor corresponding to the power module.

8. The integrated three-axis quartz gyroscope according to any one of claims 1 to 4, characterized in that: The first horizontal polarity surface-mount gyroscope, the vertical polarity surface-mount gyroscope and the second horizontal polarity surface-mount gyroscope are all packaged in a leadless chip carrier ceramic tube shell.

9. The integrated three-axis quartz gyroscope according to any one of claims 1 to 4, characterized in that: The first gyroscope circuit board, the second gyroscope circuit board and the third gyroscope circuit board are connected via a flexible board.

10. An electronic device, characterized in that: The invention comprises the integrated three-axis quartz gyroscope as described in any one of claims 1 to 9.