Analysis system of combined coated capillary X-ray monochromatic focusing lens and focal spot size adjusting method

Abstract

The invention discloses an analysis system of a combined coated capillary X-ray monochromatic focusing lens and a focal spot size adjusting method, and solves the technical problem that errors are easy to introduce due to a traditional method for adjusting focal spots by changing an optical path. Comprising an X-ray source, a ray beam stopper, a film-coated paraboloid type single capillary lens, a multi-layer film conical single capillary lens and an adjusting frame, and X-rays emitted from the X-ray source are parallelized by the film-coated paraboloid type single capillary lens and then emitted to the inner wall of the multi-layer film conical single capillary lens. X-rays are monochromatized and focused to a focal spot by a plurality of layers of films on the inner wall of the conical single capillary lens, and the size of the focal spot can be adjusted by moving the relative position of the ray stopper. The X-ray monochromatic focusing light path has high energy utilization rate for the X-ray source, and the generated monochromatic X-ray can improve the detection sensitivity and detection efficiency of the system.

Description

Technical Field

[0001] The invention relates to the technical field of X-ray analysis, and in particular to an analysis system of a combined coated capillary X-ray monochromatic focusing lens and a method for adjusting the size of a focal spot. Background Art

[0002] Monochromatic focused X-rays have unique advantages in the fields of XRF, XRD, XAFS and X-ray imaging. For example, in XRF analysis, monochromatic focused X-rays can reduce the background signal during the analysis to improve the analysis accuracy. Obtaining monochromatic focused X-rays can be achieved through a single element of a bent crystal or a multilayer film lens with a special curved surface, but the manufacturing of these two optical elements involves complex processes, which is difficult and costly. Therefore, monochromatic focused X-rays are often obtained by combining and matching optical elements such as capillary lenses, multilayer films, and Fresnel zone plates.

[0003] As an optical element based on the principle of total reflection, the capillary X-ray lens can focus or parallelize hard X-rays. Compared with optical elements such as zone plates and refractive lenses, it has the advantages of simple preparation and flexible application. In recent years, researchers have developed different optical systems based on multi-capillary lenses and single capillary lenses. The combination of multi-capillary optical elements can break through the performance limitations of single elements and obtain better X-ray modulation effects. Furthermore, the modulation ability of the capillary X-ray element can be further improved by coating the inner wall of the glass. For example, coating with a metal film can increase the acceptance angle while improving the transmission efficiency of high-energy X-rays (Energy>20keV), and coating with a multi-layer film can achieve monochromatization of X-rays. Furthermore, in different monochromatic focused X-ray application scenarios, the focal spot size is often affected by the size of the X-ray light source and the device parameters and cannot be freely adjusted, which limits its application and expansion in related fields.

[0004] In view of the above problems, the present invention provides a convenient and quick analysis system of a combined coated capillary X-ray monochromatic focusing lens and a method for adjusting the focal spot size. Summary of the invention

[0005] In order to solve the above problems, the present invention proposes an analysis system of a combined coated capillary X-ray monochromatic focusing lens and a method for adjusting the focal spot size.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] The object of the present invention is to provide an analysis system of a combined coated capillary X-ray monochromatic focusing lens, comprising an X-ray light source, a beam blocker, a coated parabolic single capillary lens, a multilayer film conical single capillary lens and an adjustment frame; wherein the X-ray light source is arranged at the focus of the coated parabolic single capillary lens, the beam blocker is arranged between the X-ray light source and the coated parabolic single capillary lens, and the multilayer film conical single capillary lens is arranged behind the coated parabolic single capillary lens; the beam blocker and the coated parabolic single capillary lens, the multilayer film conical single capillary lens and the adjustment frame are arranged at the focus of the coated parabolic single capillary lens, the beam blocker is arranged between the X-ray light source and the coated parabolic single capillary lens, and the multilayer film conical single capillary lens is arranged behind the coated parabolic single capillary lens. The collimation of the conical monocapillary lens is adjusted by an adjustment frame; the X-ray light source, the beam blocker, the coated parabolic monocapillary lens and the multi-layer conical monocapillary lens are coaxial, the beam blocker is placed between the focus and the entrance of the parabolic surface where the coated parabolic monocapillary lens is located, the X-rays emitted from the X-ray light source are limited by the beam blocker and then reflected by the coated parabolic monocapillary lens to obtain a parallel X-ray annular beam, and the parallel annular primary X-rays are reflected by the multi-layer conical monocapillary lens to obtain monochromatic X-rays and focus on the focus.

[0008] Furthermore, the X-ray light source adopts a copper or molybdenum target X-ray light source, and the focal spot shape of the light source is point-shaped.

[0009] Furthermore, the material of the ray beam blocker is a high-Z material.

[0010] Furthermore, the distance f1 from the X-ray light source to the entrance end of the coated parabolic monocapillary lens is 10 mm to 500 mm, and the diameter D of the entrance end of the coated parabolic monocapillary lens is in The exit diameter d of the multilayer film conical single capillary lens out Equal, outlet diameter D out The entrance diameter d of the multilayer film conical single capillary lens in The back focal length f2 is greater than the length l of the multilayer film conical single capillary lens. c .

[0011] Furthermore, the coated parabolic single capillary lens is made of silicate glass or lead glass, the metal film element coated on the inner wall is a high-Z element, and the cross-sectional profile curve along its length direction is a parabola.

[0012] Furthermore, the multi-layer film conical single capillary lens is made of silicate glass or lead glass.

[0013] Furthermore, the diameter d of the entrance end of the multilayer film conical single capillary lens is in Greater than its outlet diameter d out The taper α of the multilayer film conical single capillary lens is the angle between the inner diameter curve of the lens and its axis, and its size is calculated according to the following formula:

[0014]

[0015] Furthermore, the inner wall coating material of the multilayer film conical monocapillary lens is a multilayer film, the multilayer film material is Al2O3 / HfO2, and when the multilayer film is designed, its high reflectivity angle to the target X-ray is equal to the taper α of the multilayer film conical monocapillary lens. The inner wall coating method of the multilayer film conical monocapillary lens adopts atomic layer deposition.

[0016] Furthermore, the method comprises the following specific steps:

[0017] Step 1: vertically place the beam blocker between the X-ray light source and the coated parabolic single capillary lens, with its center located on the axis of the optical path;

[0018] Step 2: After turning on the X-ray light source, move the beam blocker forward and backward along the axis of the optical path, and the beam spot size at the focus will change;

[0019] Step 3: When the beam blocker is closer to the X-ray light source, the focal spot at the focus becomes smaller. The focal spot diameter can be calculated according to the following formula:

[0020]

[0021] Among them, d spot is the focal spot diameter, D out_using It is the projected outer diameter of the light spot from the X-ray light source onto the inner wall of the coated parabolic single capillary lens after the beam blocker is moved.

[0022] The present invention has the following advantages: the focal spot size adjustment method provided by the present invention includes the steps of matching the geometric structure of the optical path, the acceptance area of ​​the parabolic monocapillary X-ray lens and the multilayer conical monocapillary lens; matching the taper α of the conical monocapillary lens with the multilayer design angle α; moving the beam blocker to obtain focal spots of different sizes, etc.

[0023] The present invention can achieve rapid adjustment of the focal spot size, provides a reliable means for different analysis needs of scientific researchers, and helps promote the development and progress of related fields. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic diagram of an analysis system for combining a coated capillary X-ray monochromatic focusing lens according to an embodiment of the present invention;

[0025] Figure 2 Schematic diagram of a coated parabolic single capillary lens in an embodiment of the present invention;

[0026] Figure 3Schematic diagram of a multilayer film conical single capillary lens in an embodiment of the present invention;

[0027] Figure 4 It is a schematic diagram of the principle of a method for adjusting the focal spot size of a combined coated capillary X-ray monochromatic focusing lens analysis system in an embodiment of the present invention.

[0028] In the figure: 1. X-ray light source; 2. Divergent primary X-rays; 3. Beam blocker; 4. Coated parabolic monocapillary lens; 5. Multi-layer conical monocapillary lens; 6. Focus spot; 7. Adjustment frame. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention is described clearly and completely below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Monochromatic focused X-rays are widely used in analytical scenarios such as X-ray fluorescence and X-ray diffraction, but it is not easy to promote them because the common optical components with monochromatic focusing function are expensive and difficult to prepare. Combining different simple single components can reduce the cost of obtaining monochromatic focused X-rays, which is of great significance to the practical application of X-ray spectroscopy analysis technology.

[0031] Embodiment 1

[0032] like Figure 1 As shown, an analysis system combining a coated capillary X-ray monochromatic focusing lens,

[0033] The system includes an X-ray light source 1, a beam blocker 3, a coated parabolic monocapillary lens 4, a multilayer film conical monocapillary lens 5, and an adjustment frame 7. The X-ray light source 1 is located at the focus of the coated parabolic monocapillary lens 4, the beam blocker 3 is located between the X-ray light source 1 and the coated parabolic monocapillary lens 4, and the multilayer film conical monocapillary lens 5 is located behind the coated parabolic monocapillary lens 4. The focal spot of the X-ray light source 1, the axis of the beam blocker 3, and the axis of the coated parabolic monocapillary lens 4 and the axis of the multilayer film conical monocapillary lens 5 are in the same straight line. The beam blocker 3 and the collimation of the two lenses are adjusted by the adjustment frame 7.

[0034] The divergent primary X-rays 2 emitted by the X-ray light source 1 are filtered by the beam blocker 3 and then received by the parabolic monocapillary lens 4. The received primary divergent X-rays are regulated into parallel annular beams. The annular beams are received by the multilayer conical monocapillary lens 5 and converted into monochromatic focused X-rays, which are then transmitted to the focal spot 6.

[0035] In this embodiment, the X-ray light source 1 adopts a copper or molybdenum target X-ray light source, and the focal spot of the light source is in a point shape.

[0036] In this embodiment, the material of the beam blocker 3 is a high-Z material.

[0037] In this embodiment, the distance f1 from the X-ray light source 1 to the entrance end of the coated parabolic monocapillary lens 4 is 10 mm-500 mm, and the entrance end diameter D of the coated parabolic monocapillary lens 4 is in and the outlet diameter d of the multilayer film conical single capillary lens 5 out Equal, outlet diameter D out The entrance diameter d of the multilayer film conical single capillary lens 5 is in The back focal length f2 is greater than the length l of the multilayer film conical single capillary lens 5 c .

[0038] In this embodiment, the coated parabolic single capillary lens 4 is made of silicate glass or lead glass, the metal film element coated on the inner wall is a high-Z element, and the cross-sectional profile curve along the length direction is a parabola.

[0039] In this embodiment, the multi-layer film conical monocapillary lens 5 is made of silicate glass or lead glass.

[0040] like Figure 1 As shown, the entrances and exits of the coated parabolic monocapillary lens 4 and the multilayer conical monocapillary lens 5 match each other, and the taper α of the conical monocapillary lens is consistent with the high reflectivity angle α of the target monoenergetic X-ray when its multilayer film is designed. Therefore, the combined coated capillary X-ray monochromatic focusing lens analysis system proposed in this embodiment can be widely used in different analysis scenarios.

[0041] Reference Figure 2 , which shows the structure of the coated parabolic single capillary lens in the above embodiment.

[0042] Reference Figure 3 , which shows the appearance curve of the multi-layer film conical single capillary lens in the above embodiment.

[0043] like Figure 3 As shown, in this embodiment, the diameter d of the entrance end of the multilayer film conical single capillary lens 5 is in Greater than its outlet diameter dout The taper α of the multilayer film conical single capillary lens 5 is the angle between the inner diameter curve of the lens and its axis, and its size is calculated according to the following formula:

[0044]

[0045] Embodiment The following is an example of a combined coated capillary X-ray monochromatic focusing lens analysis system: the distance f1 from the X-ray source to the entrance end of the front coated parabolic single capillary lens is 52 mm, and the length l of the coated parabolic single capillary lens is p The inlet diameter is 152 mm. in The outlet diameter is 2 mm. out The entrance diameter d of the multilayer conical single capillary lens is 4 mm. in The outlet diameter is 4 mm. out 2mm, the multilayer film material is Al2O3 / HfO2, the length is l c The total length of the combined lens system is 46.2 mm, the total length of the combined lens system is 198.2 mm, the light source acceptance angle is 12 mrad, and the beam divergence angle is 60 mrad.

[0046] Embodiment 2

[0047] like Figure 4 As shown, a method for adjusting the focal spot size of a combined coated capillary X-ray monochromatic focusing lens analysis system comprises the following steps:

[0048] Step 1: vertically place the beam blocker 3 between the X-ray light source 1 and the coated parabolic single capillary lens 4, and place its center on the axis of the optical path;

[0049] Step 2: After turning on the X-ray light source 1, move the beam blocker 3 forward and backward along the axis of the optical path, and the beam spot size at the focus changes;

[0050] Step 3: When the beam blocker 3 is closer to the X-ray light source 1, the focal spot at the focus is smaller, and the focal spot diameter can be calculated according to the following formula:

[0051]

[0052] Among them, D out_using It is the projected outer diameter of the light spot from the X-ray light source onto the inner wall of the coated parabolic single capillary lens after the beam blocker is moved.

[0053] Although the specific embodiments of the present invention are described in detail in conjunction with the accompanying drawings, it should not be understood as limiting the scope of protection of the present invention. Within the scope described in the claims, various modifications and variations that can be made by those skilled in the art without creative work still belong to the scope of protection of the present invention.

Claims

1. An analysis system combining a coated capillary X-ray monochromatic focusing lens, characterized in that: The invention comprises an X-ray light source (1), a beam blocker (3), a film-coated parabolic monocapillary lens (4), a multilayer film conical monocapillary lens (5) and an adjustment frame (7); wherein the X-ray light source (1) is arranged at the focus of the film-coated parabolic monocapillary lens (4), the beam blocker (3) is arranged between the X-ray light source (1) and the film-coated parabolic monocapillary lens (4), and the multilayer film conical monocapillary lens (5) is arranged behind the film-coated parabolic monocapillary lens (4); the collimation of the beam blocker (3), the film-coated parabolic monocapillary lens (4), and the multilayer film conical monocapillary lens (5) are all adjusted by the adjustment frame (7); The X-ray light source (1), the beam blocker (3), the coated parabolic monocapillary lens (4) and the multilayer film conical monocapillary lens (5) are coaxial, and the beam blocker (3) is placed between the focus and the entrance of the parabolic surface where the coated parabolic monocapillary lens (4) is located. The X-rays emitted from the X-ray light source (1) are limited by the beam blocker (3), and then reflected by the coated parabolic monocapillary lens (4) to obtain a parallel X-ray annular beam, and then reflected by the multilayer film conical monocapillary lens (5) to obtain monochromatic X-rays and focus on the focus.

2. The analysis system of the combined coated capillary X-ray monochromatic focusing lens as claimed in claim 1, characterized in that: The X-ray light source (1) adopts a copper or molybdenum target X-ray light source, and the focal spot of the light source is in a point shape.

3. The analysis system of the combined coated capillary X-ray monochromatic focusing lens as claimed in claim 1, characterized in that: The material of the ray beam blocker (3) is a high-Z material.

4. The analysis system of the combined coated capillary X-ray monochromatic focusing lens as claimed in claim 1, characterized in that: The distance f1 between the X-ray light source (1) and the entrance end of the coated parabolic monocapillary lens (4) is 10 mm to 500 mm, and the entrance end diameter D of the coated parabolic monocapillary lens (4) is in and the outlet diameter d of the multilayer film conical single capillary lens (5) out Equal, outlet diameter D out The entrance diameter d of the multilayer film conical single capillary lens (5) is in The back focal length f2 is greater than the length l of the multilayer film conical single capillary lens (5). c .

5. The analysis system of the combined coated capillary X-ray monochromatic focusing lens as claimed in claim 4, characterized in that: The coated parabolic single capillary lens (4) is made of silicate glass or lead glass, the metal film element coated on the inner wall is a high-Z element, and the cross-sectional profile curve along its length direction is a parabola.

6. The analysis system of the combined coated capillary X-ray monochromatic focusing lens as claimed in claim 4, characterized in that: The multi-layer film cone-shaped single capillary lens (5) is made of silicate glass or lead glass, and the inner wall is coated with a multi-layer film using atomic layer deposition technology.

7. The analysis system of the combined coated capillary X-ray monochromatic focusing lens as claimed in claim 6, characterized in that: The multilayer film conical single capillary lens (5) has an inlet diameter d in Greater than its outlet diameter d out The taper α of the multilayer film conical single capillary lens (5) is the angle between the inner diameter curve of the lens and its axis, and its size is calculated according to the following formula:

8. The analysis system of the combined coated capillary X-ray monochromatic focusing lens as claimed in claim 7, characterized in that: The inner wall coating material of the multilayer film conical monocapillary lens (5) is a multilayer film, and the multilayer film material is Al2O3 / HfO2. When the multilayer film is designed, its high reflectivity angle to the target X-ray is equal to the taper α of the multilayer film conical monocapillary lens (5). The inner wall coating method of the multilayer film conical monocapillary lens (5) adopts an atomic layer deposition method.

9. A method for adjusting the focal spot size of a combined coated capillary X-ray monochromatic focusing lens, characterized in that: The specific steps of the method are as follows: Step 1: vertically place the beam blocker between the X-ray light source and the coated parabolic single capillary lens, with its center located on the axis of the optical path; Step 2: After turning on the X-ray light source, move the beam blocker forward and backward along the axis of the optical path, and the beam spot size at the focus will change; Step 3: When the beam blocker is closer to the X-ray light source, the focal spot at the focus is smaller, and the focal spot diameter is calculated according to the following formula: Among them, d spot is the focal spot diameter, D out_using It is the projected outer diameter of the light spot from the X-ray light source onto the inner wall of the coated parabolic single capillary lens after the beam blocker is moved.

Images